CN104909333B - Micro-nano corrugated structure manufacture device and method - Google Patents

Micro-nano corrugated structure manufacture device and method Download PDF

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Publication number
CN104909333B
CN104909333B CN201510184127.8A CN201510184127A CN104909333B CN 104909333 B CN104909333 B CN 104909333B CN 201510184127 A CN201510184127 A CN 201510184127A CN 104909333 B CN104909333 B CN 104909333B
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micro
extrusion board
corrugated structure
polymeric material
base material
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CN104909333A (en
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房飞宇
陈新
王晗
陈新度
刘强
吕元俊
李克天
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Guangdong University of Technology
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Guangdong University of Technology
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Abstract

The invention discloses micro-nano corrugated structure manufacture device and method, this device includes control system, thermal source, receives base material, pyroelectrics, extrusion board, device for storing liquid;Micro-nano corrugated structure manufacture method, step is:1)Flowable state polymeric material is placed in device for storing liquid;2)Under thermal source radiation, pyroelectrics produces induced electric field;3)Flowable state polymeric material rheology stretches, and forms taylor cone;4)Flowable state polymeric material forms micro-nano corrugated structure on receiving base material.The present invention adopts hot induced electric field, the threshold voltage producing required for Taylor's cone is lower, and it is suitable to multiple-channel output direct write, interference each other can be avoided, compare near field electrospinning, the method for the present invention is more stable, jet wild effect substantially reduces, by controlling effluxvelocity, extrusion board and receiving the speed of related movement between base material and distance, multiple wave patterns can be formed.

Description

Micro-nano corrugated structure manufacture device and method
Technical field
The present invention relates to micro-nano corrugated structure manufacture device and method.
Background technology
The potential use due to its unique mechanical property and its in flexible extensible electronics, nano photoelectric device for the ripple struction On the way, cause the widely studied of people in recent years.Especially manufacture field, such as electronic skin, flexible extensible in flexible electronic Display screen etc., adopts ripple struction as electronic component interconnection architecture, thus having high stretch-proof, bending resistance more.
In order to obtain sinuous ripple struction, prior art has been presented for some solutions, such as adopts prestretching, first Flexible substrates are pre-stretched, then spray printing attachment structure, after pre-stretching release, substrate recovers naturalness, connects knot Due to being under pressure, flexing becomes serpentine shape to structure, thus having preferable tensile resistance.However, this manufacture method yet suffers from Many deficiencies, if desired for pre-stretching operation, flow process is complicated, and its tensile resistance is affected by pre-stretching degree because its be by Ripple struction is transferred on the gum elastic substrate of prestrain, then release substrate, forms buckling structure, inevitably introduces Residual stress.
A kind of method preparing micro-nano corrugated structure using electrostatic spinning is proposed, it leads in patent CN102162176A Cross and electrospun polymer solution is sprayed via shower nozzle, and fall on flexible substrates through electric field action, using jet Nonlinear instability " whip move ", form helical form in space, according to effluxvelocity, mobile metal collection plate, heavy on substrate Long-pending formation ripple struction.However, further investigations have shown that, although above-mentioned existing solution can solve ripple to a certain extent The big problem of residual stress in stricture of vagina structure preparation process, but still there is following technical problem:Due to " the whip in electrostatic spinning Dynamic " behavior itself with composite factor correlations such as the density of solution, surface tension, electrical conductivity, dielectric constants, be Electrospun itself A kind of characteristic, because influence factor is numerous, mechanism is complicated, leads to " whip moves " behavior of most fibers disorderly and unsystematic, the fibre of deposition Dimension mostly also is random, irregular non-woven fabrics form;In addition, for realizing " whip moves " behavior, different solutions system need to be directed to, right Kinds of processes parameter (as voltage, jet length, flow etc.) is adjusted, and state modulator is more difficult, can only be in specific work Under skill parameter, reliable and stable " whip moves " could be obtained.And the limitation due to electrostatic spinning process itself, at present still without one-tenth Ripe method, realizes hi-Fix deposition and the patterning of electrostatic spinning.The therefore this method preparing micro-nano corrugated structure Often less efficient it is impossible to long-term, stably obtain specific ripple struction, actual poor operability.
Hot induced electric field induces rheological molding technology, using thermoelectric materials such as ferroelectric crystals, under thermal source radiation, produces sense Raw electric field, makes polymer in the presence of hot induced electric field, and rheology stretches, and forms taylor cone, and taylor cone tip is connect with motion Receive substrate contact, in conjunction with receiving substrate transport, complete the direct write of micro-nano pattern.
Serving effect(Liquid rope-coil effect), during being widely present in motion of viscous.Viscous flow During body nonlinear motion, because the unequal force of local, fluid column is led to bend to some direction(buckling), shape The Non-Linear Vibration becoming.This vibration produced before this in some plane, but saw in the direction vertical with individual plane, then only It is compressive deformation(crushing).In this plane, once there being new factor, induction bends, just in this plane Occur that another one is vibrated.The plane that both are located is mutually perpendicular to.Both front and back vibration superposition, forms three-dimensional vibrating.Two The amplitude of vibration, frequency are also different, and the comprehensive morphological generating is also different.The accumulation deformation therefore producing in the plane can table It is now simple folding(folding), can also appear as petal-shaped, can also appear as 8 fonts(figure of eight).When Amplitude in two planes and frequency reach unanimity, and pile up and then show as helical form, and serving effect produces.The shape of its stacking Shape, frequency and wavelength, with fluid viscosity, flow speed, highly, the factor such as the movement velocity of receiver board relevant.(List of references: 1、Habibi M, Hosseini S H, Khatami M H, et al. Liquid supercoiling[J]. Physics of Fluids (1994-present), 2014, 26(2): 024101.).
Content of the invention
It is an object of the invention to provide micro-nano corrugated structure manufacture device and method.
The technical solution used in the present invention is:
Micro-nano corrugated structure manufacture device,
Including control system, thermal source, receive base material, pyroelectrics, extrusion board, device for storing liquid;
Wherein, control system is connected with thermal source, reception base material, extrusion board, device for storing liquid respectively;
Thermal source is used for thermoelectric body provides heat radiation to produce induced electric field;
Device for storing liquid is connected with extrusion board, and it is used for providing flowable state polymeric material to extrusion board;
Extrusion board is used for reception base material output flowable state polymeric material.
Described extrusion board is provided with multiple extrusions.
Described device for storing liquid is connected with extrusion board by multiple pipelines.
Described pyroelectrics is ferroelectric.
Described ferroelectric is BaTiO3、SrTiO3、LiNbO3One of.
A kind of micro-nano corrugated structure manufacture method, step is:
1)Flowable state polymeric material is placed in the device for storing liquid of described device;
2)Control system controls thermal source to work to carry out heat radiation, and under thermal source radiation, pyroelectrics produces induced electric field;
3)Under control system control, device for storing liquid provides flowable state polymeric material, flowable state polymer to extrusion board Under the effect of induced electric field and the control of control system, rheology stretches material, forms taylor cone, and taylor cone is most advanced and sophisticated and receives Base material contacts;
4)Control extrusion board and receive the distance that base material keeps setting in the Z-axis direction, holding in X/Y plane sets Speed of related movement, flowable state polymeric material forms micro-nano corrugated structure on receiving base material.
Step 1)In, described flowable state polymeric material is at least one in the polymeric material of following molten state: PCL、PLA、PMMA、ABS、PAM、ACR、PU、PA、PET、PBT、POE、EVA、CPE、EP、PP、PE;Or it is following polymers At least one flowable state polymeric material being dissolved in gained in solvent in material:PEO、PLGA、PVDF.
Step 2)-3)In, control system controls the radiant intensity of thermal source, thus controlling the intensity of induced electric field, and then controls The rheology draw speed of flowable state polymeric material processed.
Step 3)In, by the multiple pipelines between device for storing liquid and extrusion board, control system controls infusion device to select Property to extrusion board export flowable state polymeric material.
Step 4)In, specifically adopt numerical control X, Y, Z axis precise mobile platform to control extrusion board and receive base material in Z-direction Distance, and extrusion board with receive speed of related movement in X/Y plane for the base material.
The invention has the beneficial effects as follows:
The present invention adopts hot induced electric field, and the threshold voltage producing required for Taylor's cone is lower, and is suitable to multiple-channel output Direct write, can avoid interference each other, compare near field electrospinning, and the method for the present invention is more stable, and jet wild effect is big Big reduction, by controlling effluxvelocity, extrusion board and receiving the speed of related movement between base material and distance, can form multiple Wave pattern.
Specifically:
1)The present invention adopts hot induced electric field to replace high voltage electric field, can avoid direct write shower nozzle close to substrate distance when easy Produce point discharge phenomenon, and direct write process is safer;
2)Replace the syringe needle of conventional electrostatic spinning using flat board, Electric Field Distribution situation is more concentrated, producing Taylor's cone needs Induced potential threshold values less, and can be suitably used for many jets direct write, in hgher efficiency, without conventional multi-needle electrostatic spinning occurs Interference;
3)Direct write process can avoid the generation of " whip moves " during electrostatic spinning, and it is more stable to compare near field electrospinning, weakens Jet instability in electro-spinning process;
4)According to effluxvelocity, change the speed of motion platform, change extrusion platform and the distance receiving base material, you can obtain Obtain the ripple struction of dissimilar, wavelength and frequency, can be controlled by changing the distance of extrusion platform and reception base material simultaneously The most advanced and sophisticated exposure level with receiver board of taylor cone, controls the size of direct write ripple figure line.
Brief description
Fig. 1 is the structural representation of apparatus of the present invention.
Specific embodiment
As shown in Figure 1:
Micro-nano corrugated structure manufacture device,
Including control system 1, thermal source 2, receive base material 3, pyroelectrics 4, extrusion board 5, device for storing liquid 6;
Wherein, control system is connected with thermal source, reception base material, extrusion board, device for storing liquid respectively;
Thermal source is used for thermoelectric body provides heat radiation to produce induced electric field;
Device for storing liquid is connected with extrusion board, and it is used for providing flowable state polymeric material to extrusion board;
Extrusion board is used for reception base material output flowable state polymeric material.
Preferably, described extrusion board is provided with multiple extrusions.
Preferably, described device for storing liquid is connected with extrusion board by multiple pipelines.
Preferably, control system can control the caloradiance of supplying heat source, and then adjusts the intensity size of induced electric field;
Preferably, pyroelectrics is closely coupled with reception base material;
Preferably, it is not shown, the micro-nano structure manufacture device of the present invention also includes the accurate shifting of numerical control X, Y, Z axis Moving platform, can control reception base material and speed of related movement in X/Y plane for the extrusion board, and extrusion board and reception base material Distance in Z-direction.
Preferably, described pyroelectrics is ferroelectric;It is further preferred that described ferroelectric is BaTiO3、SrTiO3、 LiNbO3One of.
Preferably, described flowable state polymeric material is at least one in the polymeric material of following molten state: PCL、PLA、PMMA、ABS、PAM、ACR、PU、PA、PET、PBT、POE、EVA、CPE、EP、PP、PE;Or it is following polymers At least one flowable state polymeric material being dissolved in gained in solvent in material:PEO、PLGA、PVDF.
A kind of micro-nano corrugated structure manufacture method, step is:
1)Flowable state polymeric material is placed in the device for storing liquid of said apparatus;
2)Control system controls thermal source to work to carry out heat radiation, and under thermal source radiation, pyroelectrics produces induced electric field;
3)Under control system control, device for storing liquid provides flowable state polymeric material, flowable state polymer to extrusion board Under the effect of induced electric field and the control of control system, rheology stretches material, forms taylor cone, and taylor cone is most advanced and sophisticated and receives Base material contacts;
4)Control extrusion board and receive the distance that base material keeps setting in the Z-axis direction, holding in X/Y plane sets Speed of related movement, flowable state polymeric material forms micro-nano corrugated structure on receiving base material.
Preferably, step 1)In, described flowable state polymeric material be following molten state polymeric material in extremely Few one kind:PCL、PLA、PMMA、ABS、PAM、ACR、PU、PA、PET、PBT、POE、EVA、CPE、EP、PP、PE;Or it is following At least one flowable state polymeric material being dissolved in gained in solvent in polymeric material:PEO、PLGA、PVDF.
Preferably, step 2)-3)In, control system controls the radiant intensity of thermal source, thus controlling the intensity of induced electric field, And then the rheology draw speed of controlling stream dynamic aggregation thing material.
Preferably, step 3)In, by the multiple pipelines between device for storing liquid and extrusion board, control system controls transfusion dress Put and optionally export flowable state polymeric material to extrusion board.
Preferably, step 4)In, specifically adopt numerical control X, Y, Z axis precise mobile platform to control extrusion board to exist with receiving base material The distance of Z-direction, and extrusion board and reception speed of related movement in X/Y plane for the base material.
With reference to specific embodiment, the present invention is described further:
Embodiment 1:
1)Will be placed below for Poly(D,L-lactide-co-glycolide (poly (lactic-co-glycolic acid), PLGA) On extrusion board;
2)Under thermal source radiation, top LiNbO3Crystal produces induced electric field, makes PLGA in the effect of hot induced electric field Under, rheology stretches, and forms taylor cone, and taylor cone is most advanced and sophisticated to be contacted with reception flexible parent metal;
3)Thermal source radiant intensity, the speed of restrained stretching rheology are controlled by control system;
4)By controlling Z axis motion, adjustment extrusion board is 1mm with the distance receiving flexible parent metal, changes distance controllable The diameter of direct write fiber;
5)Extrusion board is controlled using numerical control X, Y-axis precise mobile platform, makes extrusion board with respect to reception flexible parent metal folk prescription To motion, speed is 5mm/s, controls the start and stop of thermal source by control program and then controls the start and stop of direct write, achievable micro-nano pendulum The making of line ripple struction;Change mobile platform speed is 6mm/s, the making of the achievable micro-nano ripple struction of falling 8-shaped;Change Mobile platform speed is 8mm/s, the making of achievable micro-nano sinusoid ripple struction;When platform speed is for 13mm/s, become Straight line.
The present embodiment only provides explanation step, wherein heat source strength, extrusion board speed, extrusion board and reception flexible parent metal The parameters such as distance can select suitable numerical value according to experimental conditions.
Embodiment 2:
1)Will be placed below for Poly(D,L-lactide-co-glycolide (poly (lactic-co-glycolic acid), PLGA) On extrusion board;
2)Under thermal source radiation, top LiNbO3Crystal produces induced electric field, makes PLGA in the effect of hot induced electric field Under, rheology stretches, and forms taylor cone, and taylor cone is most advanced and sophisticated to be contacted with reception flexible parent metal;
3)Thermal source radiant intensity, the speed of restrained stretching rheology are controlled by control system;
4)By controlling Z axis motion, adjustment extrusion board is 0.8mm with the distance receiving flexible parent metal;
5)Extrusion board is controlled using numerical control X, Y-axis precise mobile platform, makes extrusion board with respect to reception flexible parent metal folk prescription To motion, speed is 4.5mm/s, controls the start and stop of thermal source by control program and then controls the start and stop of direct write, achievable micro-nano The making of cycloid ripple struction;Change mobile platform speed is 5mm/s, the making of the achievable micro-nano ripple struction of falling 8-shaped;Change Becoming mobile platform speed is 6.5mm/s, the making of achievable micro-nano sinusoid ripple struction;When platform speed is for 12mm/s, Change is in line.

Claims (10)

1. micro-nano corrugated structure manufacture device it is characterised in that:
Including control system, thermal source, receive base material, pyroelectrics, extrusion board, device for storing liquid;
Wherein, control system is connected with thermal source, reception base material, extrusion board, device for storing liquid respectively;
Thermal source is used for thermoelectric body provides heat radiation to produce induced electric field;
Device for storing liquid is connected with extrusion board, and it is used for providing flowable state polymeric material to extrusion board;
Extrusion board is used for reception base material output flowable state polymeric material.
2. micro-nano corrugated structure manufacture device according to claim 1 it is characterised in that:Described extrusion board is provided with many Individual extrusion.
3. micro-nano corrugated structure manufacture device according to claim 2 it is characterised in that:Described device for storing liquid passes through many Individual pipeline is connected with extrusion board.
4. micro-nano corrugated structure manufacture device according to claim 1 it is characterised in that:Described pyroelectrics is ferroelectricity Body.
5. micro-nano corrugated structure manufacture device according to claim 4 it is characterised in that:Described ferroelectric is BaTiO3、 SrTiO3、LiNbO3One of.
6. a kind of micro-nano corrugated structure manufacture method it is characterised in that:Step is:
1)Flowable state polymeric material is placed in the device for storing liquid of the device described in any one in claim 1-4;
2)Control system controls thermal source to work to carry out heat radiation, and under thermal source radiation, pyroelectrics produces induced electric field;
3)Under control system control, device for storing liquid provides flowable state polymeric material, flowable state polymeric material to extrusion board Under the effect of induced electric field and the control of control system, rheology stretches, and forms taylor cone, and taylor cone is most advanced and sophisticated and receives base material Contact;
4)Control extrusion board and receive the distance that base material keeps setting in the Z-axis direction, keep the relative of setting in X/Y plane Movement velocity, flowable state polymeric material forms micro-nano corrugated structure on receiving base material.
7. a kind of micro-nano corrugated structure manufacture method according to claim 6 it is characterised in that:Step 1)In, described Flowable state polymeric material is at least one in the polymeric material of following molten state:PCL、PLA、PMMA、ABS、PAM、 ACR、PU、PA、PET、PBT、POE、EVA、CPE、EP、PP、PE;Or it is dissolved in molten at least one in polymeric materials The flowable state polymeric material of gained in agent:PEO、PLGA、PVDF.
8. a kind of micro-nano corrugated structure manufacture method according to claim 6 it is characterised in that:Step 2)-3)In, control System controls the radiant intensity of thermal source, thus controlling the intensity of induced electric field, and then the rheology of controlling stream dynamic aggregation thing material Draw speed.
9. a kind of micro-nano corrugated structure manufacture method according to claim 6 it is characterised in that:Step 3)In, by storage Multiple pipelines between liquid device and extrusion board, control system controls infusion device optionally to gather to extrusion board output flowable state Compound material.
10. a kind of micro-nano corrugated structure manufacture method according to claim 6 it is characterised in that:Step 4)In, specifically adopt Control extrusion board with numerical control X, Y, Z axis precise mobile platform and receive the distance in Z-direction for the base material, and extrusion board and reception Speed of related movement in X/Y plane for the base material.
CN201510184127.8A 2015-04-17 2015-04-17 Micro-nano corrugated structure manufacture device and method Expired - Fee Related CN104909333B (en)

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Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004351608A (en) * 2003-05-07 2004-12-16 Institute Of Physical & Chemical Research Manufacturing method of nano material, and nano material
JP5566286B2 (en) * 2007-06-08 2014-08-06 カーバー サイエンティフィック,インコーポレイテッド Method for converting thermal energy into electrical energy
CN102162176B (en) * 2011-03-16 2012-09-05 华中科技大学 Micro-nano corrugated structure and preparation method thereof, and device and application
CN102205944B (en) * 2011-04-19 2013-01-23 北京化工大学 Device and method for manufacturing micro-nano structure
CN102660783B (en) * 2012-05-30 2015-11-11 苏州大学 Multihole bubble electrostatic spinning apparatus
CN203583021U (en) * 2013-10-11 2014-05-07 厦门大学 Multi-spray-head auxiliary electrostatic spinning device with plate electrode
CN103572386B (en) * 2013-10-12 2016-06-15 东华大学 A kind of flat board pin hole coaxial electrostatic spinning fiber composite spinning head and spinning process thereof
CN203639618U (en) * 2013-10-29 2014-06-11 厦门大学 Multi-micropore electrostatic spinning spinneret
CN103900480B (en) * 2014-03-18 2017-04-26 广东工业大学 Grating ruler manufacturing method based on near-field electrospinning direct-writing technology
CN103993369B (en) * 2014-04-16 2016-08-24 广东工业大学 A kind of generating means of controlled waveform micro nanometer fiber
CN104261343B (en) * 2014-09-02 2016-05-04 西安交通大学 A kind of low cost micro-nano structure lithographic method of directly writing based on static
CN104358029B (en) * 2014-10-17 2018-02-16 华中科技大学 A kind of method and device that micro-nano corrugated structure is prepared using electrostatic spinning

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