CN104901982B - A kind of online data monitoring system and monitoring method - Google Patents
A kind of online data monitoring system and monitoring method Download PDFInfo
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- CN104901982B CN104901982B CN201410079362.4A CN201410079362A CN104901982B CN 104901982 B CN104901982 B CN 104901982B CN 201410079362 A CN201410079362 A CN 201410079362A CN 104901982 B CN104901982 B CN 104901982B
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Abstract
The invention discloses a kind of online data monitoring system and monitoring methods, belong to production process of semiconductor monitoring technology field；System includes migration units, connects external storage device；Data storage cell, connection migration unit；Input unit；Condition storage unit connects input unit；Processing unit connects data storage cell and condition storage unit respectively；Call by result unit；Method includes：Semiconductor production data of the copying and saving in external storage device simultaneously preserve；Obtain the preset Rule of judgment of user's input and the judgement grade of corresponding Rule of judgment；Multiple Rule of judgment is selected to match the semiconductor production data being stored in storage unit, subsequently form corresponding matching result data；Preserve matching result data；Matching result data are called, so that user checks.The advantageous effect of above-mentioned technical proposal is：Exclusion may influence the factor of semiconductor chip production process, promote product yield, reduce cost.
Description
Technical field
The present invention relates to production process of semiconductor monitoring technology field more particularly to a kind of online data monitoring system and prisons
Prosecutor method.
Background technology
The production technology of semiconductor chip is a technological process extremely complex and that quality management and control requirement is stringent, for every
One step is required for carrying out effective monitoring and measures, just can ensure that final production semiconductor chip have it is higher good
Rate.Manufacture for semiconductor chip, according to the difference of product, it will usually 200-300 roads manufacturing procedure is undergone, such as etch,
Grinding, film and development etc..The function that per pass manufacturing procedure is realized is different, to production effect caused by semiconductor chip
Also it is different.Other than manufacturing procedure, also some production processes are for measuring chip, to realize to product quality
Monitoring, the final production yield for promoting product.
In the production technology of semiconductor chip, any abnormal conditions can all influence the quality of product or even cause to produce
Product are directly scrapped, therefore the production process of semiconductor chip is needed to carry out complete monitoring, and different in the generation of product measuring value
Timely processing when often, to prevent or correct the generation of bad products.If abnormal conditions are omitted when measuring or are tied to measuring
Fruit is dealt with improperly, can all influence the quality of product finally generated.
In the prior art, production system for the underproof product of some measurements can accomplish to timely respond to and and
When handle, although for some qualifications, but there is the product of underproof hidden danger or trend (to reach the measurement of " warning " rank
Product corresponding to data) it can not be effectively detected, means are timely adjusted so as to take, and these amounts with hidden danger
Survey speed of production and final finished that result is likely to affect product in the case where production technology continues down
The quality of production, while the production cost of product is significantly increased.
Invention content
According to problems of the prior art, i.e., the metric data in " warning " rank can not be measured, so as to lose
Leakage may potentially influence the factor of process of producing product；A kind of online data monitoring system and monitoring method are now provided, specifically
Including：
A kind of online data monitoring system, suitable for semiconductor chip production technology；Wherein, including：
Migration units connect an external storage device, for the semiconductor production number that will be preserved in the storage device
According to copying in the online data monitoring system；
Data storage cell connects the migration units, for preserving the semiconductor life that the migration units replicate
Produce data；
Input unit inputs the judgement grade of preset Rule of judgment and the Rule of judgment for user；
Condition storage unit connects the input unit, for preserving the Rule of judgment and the corresponding judgement
Grade；
Processing unit connects the data storage cell and the condition storage unit respectively, for being deposited in the condition
Multiple Rule of judgment is selected to be matched with the semiconductor production data in storage unit, and obtain corresponding matching result
The matching result data are saved into the data storage cell by data；
The matching result data include the judgement grade quilt according to matching result and the corresponding Rule of judgment
The semiconductor production data of label and the labeled semiconductor production data account for all semiconductor production numbers
According to ratio；
Call by result unit connects the data storage cell, for sending call instruction to the data storage cell,
To obtain the corresponding matching result data preserved in the data storage cell.
Preferably, the online data monitoring system, wherein, the judgement grade of the Rule of judgment is divided into qualified grade
And alert level；
The semiconductor production data for being matched with the Rule of judgment of the qualified grade are marked as qualification；
Do not match the Rule of judgment of the qualified grade the semiconductor production data be marked as it is unqualified；
The semiconductor production data for being matched with the Rule of judgment of the alert level are marked as without warning；
The semiconductor production data for not matching the Rule of judgment of the alert level are marked as needing to warn
It accuses.
Preferably, the online data monitoring system, wherein, the migration units include：
One data selecting module, for selecting to be stored in the semiconductor production data of the storage device amount that is suitable for
The measurement point data of survey, and copy in the data storage cell and preserve.
Preferably, the online data monitoring system, wherein, multiple call is preset in the call by result unit and shows mould
Plate.
Preferably, the online data monitoring system, wherein, it further includes：
User's display unit connects the call by result unit, for sending request display to the call by result unit
The request instruction for calling indicating template, the call by result unit obtain the matching knot from the data storage cell
Fruit data are simultaneously filled to the frame of the calling indicating template of request display, by the calling indicating template by filling
It is sent in user's display unit and shows.
A kind of online data monitoring method, suitable for semiconductor chip production technology；Wherein,
Step 1, it the semiconductor production data of the copying and saving in external storage device and preserves；
Step 2, the preset Rule of judgment of user's input and the judgement grade of the corresponding Rule of judgment are obtained；
Step 3, multiple Rule of judgment is selected to match the semiconductor production data for being replicated and preserving,
Subsequently form corresponding matching result data；
Step 4, the matching result data are preserved；
Step 5, the matching result data are called, so that user checks.
Preferably, the online data monitoring method, wherein, the matching result data are included according in the step 3
Matching result and the corresponding Rule of judgment the semiconductor production data that are labeled of the judgement grade and marked
The semiconductor production data of note account for the ratio of all semiconductor production data.
Preferably, the online data monitoring method, wherein, the judgement grade of the Rule of judgment is divided into qualified grade
And alert level；
The semiconductor production data for being matched with the Rule of judgment of the qualified grade are marked as qualification；
Do not match the Rule of judgment of the qualified grade the semiconductor production data be marked as it is unqualified；
The semiconductor production data for being matched with the Rule of judgment of the alert level are marked as without warning；
The semiconductor production data for not matching the Rule of judgment of the alert level are marked as needing to warn
It accuses.
Preferably, the online data monitoring method, wherein, in the step 1, the semiconductor for being replicated and preserving is given birth to
Production data are to be stored in the measurement point data for being suitable for measuring in the semiconductor production data of the external storage device.
Preferably, the online data monitoring method, wherein, it is preset with multiple calling indicating templates；
The step 5 specifically includes：
Step 51, multiple calling indicating templates are preset；
Step 52, the preset instruction for calling indicating template of externally input request display one is obtained；
Step 53, it matching result data and is filled according to instruction calls to the corresponding frame for calling indicating template
In frame；
Step 54, output is passed through the calling indicating template of filling and is shown, so that user checks.
The advantageous effect of above-mentioned technical proposal is：It is accurate to find the metric data in " warning " rank, it excludes in time latent
Possibility influence the factor of semiconductor chip production process, improving production efficiency and product yield, and reduce production cost.
Description of the drawings
Fig. 1 is a kind of structure diagram of online data monitoring system in the preferred embodiment of the present invention；
Fig. 2-3 is a kind of flow diagram of online data monitoring system in the preferred embodiment of the present invention；
Specific embodiment
The invention will be further described in the following with reference to the drawings and specific embodiments, but not as limiting to the invention.
As shown in Figure 1, in the preferred embodiment of the present invention, a kind of online data monitoring system, applied to semiconductor core
In piece production technology, which includes：
Migration units 1 connect external storage device 2；
In the preferred embodiment of the present invention, external storage device 2 can be a manufacturing execution system
The database of (Manufacturing Execution System, MES).Semiconductor chip production is preserved in MES data library
Various semiconductor production data in technique.In the preferred embodiment of the present invention, the semiconductor production that is preserved in MES data library
Data are obtained by manual or automatic acquired on semiconductor production equipment.On migration units 1 are obtained from external storage device 2
State semiconductor production data.
In the preferred embodiment of the present invention, a data selecting module 11 is provided in migration units 1, for selecting to protect
The measurement point data for being suitable for measuring in the semiconductor production data in external storage device 2 is stored in, and is copied into and moves
It moves in the data storage cell 3 that unit is connected and preserves.
In the preferred embodiment of the present invention, the effect of above-mentioned migration units 1 is to give birth to the semiconductor in storage device 2
Production data, which are selectively migrated into data storage cell 3, to be preserved, and not only can guarantee the real-time of data in this way, but also can ensure that data
Data storage capacity is unlikely to excessive in storage unit 3.
In the preferred embodiment of the present invention, above-mentioned data storage cell 3 can be statistics processing procedure management and control
(Statistical Process Control, SPC) database.
In the preferred embodiment of the present invention, in above-mentioned online data monitoring system, including an input unit 4, for using
Person's input is suitable for the different Rule of judgment of the measurement process of semiconductor production data and corresponding to each Rule of judgment
Judge grade.
In the preferred embodiment of the present invention, the judgement grade of Rule of judgment is divided into qualified grade and alert level,
Each judge that the specific function of grade can hereinafter be described in detail.
In the preferred embodiment of the present invention, further include what is connect with input unit 4 in above-mentioned online data monitoring system
Condition storage unit 5, the Rule of judgment inputted for preserving user by input unit 4 and corresponding judgement grade.
In the preferred embodiment of the present invention, above-mentioned online data monitoring system further includes connects data storage cell respectively
3 and the processing unit 6 of condition storage unit 5.The processing unit 6 is stored in the semiconductor life in data storage cell 3 in processing
When producing data, multiple Rule of judgment are selected from condition storage unit 5, by semiconductor production data and the Rule of judgment being entered
It is matched, and exports matching result data.In the preferred embodiment of the present invention, processing unit 6 is by matching result data weight
New be sent into data storage cell 3 preserves.
The present invention preferred embodiment in, once to semiconductor creation data in the process of processing, at least with
Three Rule of judgment are used as carries out matched foundation to semiconductor creation data.
In the preferred embodiment of the present invention, above-mentioned matching result data include being sentenced according to above-mentioned matching result and correspondence
The semiconductor production data and labeled semiconductor production data that the judgement grade of broken strip part is labeled account for all semiconductors
The ratio of creation data.Further, it in preferred embodiment of the invention, is drawn according to the judgement grade of above-mentioned Rule of judgment
Point, the situation that semiconductor creation data is marked can be included：
The semiconductor production data for being matched with the Rule of judgment of qualified grade are marked as qualification；
Do not match the Rule of judgment of qualified grade semiconductor production data be marked as it is unqualified；
The semiconductor production data for being matched with the Rule of judgment of alert level are marked as without warning；
The semiconductor production data for not matching the Rule of judgment of alert level are marked as needing to alert.
It further,, should be partly when semiconductor production data are marked as unqualified in preferred embodiment of the invention
Step in production technology corresponding to conductor creation data or the product produced are considered problematic, are needed immediately
Stop production and queueing problem；When semiconductor production data are marked as needing warning, although for qualified data, quilt
Think that there is the possibility of potential impact semiconductor chip production technology, that is, be considered as the semiconductor production number for needing to alert
According to development trend is intended to influence semiconductor chip production technology, it should be given birth to when measuring with underproof semiconductor
Production data are pointed out and carry out timely processing together.
In the preferred embodiment of the present invention, above-mentioned processing unit 6 can be statistics processing procedure management and control (Statistical
Process Control, SPC) server.
In the preferred embodiment of the present invention, user can input to have by input unit judges grade accordingly
Rule of judgment, processing unit 6 are will determine that in advance in condition deposit condition storage unit 5.When carrying out data processing, processing unit
6 extract the Rule of judgment that this data processing needs are used from condition storage unit 5.
In the preferred embodiment of the present invention, call by result unit 7 is further included in above-mentioned online data monitoring system, is connected
Above-mentioned data storage cell 3.Call by result unit 7 sends call instruction to data storage cell 3, and being stored in data with calling deposits
Corresponding matching result data in storage unit 3.
In the preferred embodiment of the present invention, the above results call unit 7 is also connected with user's display unit 8.User shows
Unit 8 sends the request instruction of the preset matching result data of request display, call by result unit 7 to call by result unit 7
Corresponding call instruction is sent to data storage cell 3 according to the request instruction, to obtain corresponding matching result data.As a result it adjusts
Acquired matching result data are sent in user's display unit 8 with unit 7 and are shown.
Further, in preferred embodiment of the invention, multiple call is preset in call by result unit 7 and shows mould
Plate.User's display unit 8 to call by result unit 7 send out be actually request display one it is preset call indicating template
Request instruction.Call by result unit 7 is according to the request instruction to the corresponding matching result number of 3 request call of data storage cell
According to in filling to the frame of the calling indicating template.Filled calling indicating template is sent to by call by result unit 7
It is shown in user's display unit 8.
In the preferred embodiment of the present invention, the above results call unit 7 can be a report for being applied to Web service
Server (Web Report Server).
In the preferred embodiment of the present invention, above-mentioned user's display unit 8 can be the client that is operated for user, example
Such as personal computer.Further, in preferred embodiment of the invention, due to report server can be supplied to simultaneously it is multiple
The service of client query report, therefore multiple client can be included in above-mentioned user's display unit 8, each client is asked
Receive process of summing are independent.
Further, in preferred embodiment of the invention, user's display unit is called shown by indicating template
Matching result data can include but is not limited to：The Rule of judgment used when this total amount of data measured, measurement is (including judging
The judgement grade of condition) and the ratio of semiconductor production data and total amount of data that is labeled with different labels (such as need
The semiconductor production data of warning and the ratio of total amount of data) etc..In the preferred embodiment of the present invention, need to alert partly leads
The ratio and the ratio of underproof semiconductor production data and total amount of data of body creation data and total amount of data are single
The key results data of measurement.
In the preferred embodiment of the present invention, a kind of online data monitoring method, online data monitoring are further described
Method is realized by an online data monitoring system.As shown in above, which includes being connected to outside
The migration units of storage device, the data storage cell for being connected to migration units, input unit, the item for being connected to input unit
Part storage unit, is connected to the defeated of processing unit at the processing unit for being connected to data storage cell and condition storage unit
Enter unit and be connected to the call by result unit of data storage cell；As shown in Fig. 2, above-mentioned online data monitoring method is specific
Including：
S1：Step 1, it semiconductor production data of the copying and saving in external storage device and preserves；
In the preferred embodiment of the present invention, the part in semiconductor production data is suitable for the amount of measurement by migration units
Measuring point data is copied in data storage cell and is preserved.
S2：Step 2, the preset Rule of judgment of user's input and the judgement grade of corresponding Rule of judgment are obtained, and
It preserves；
In the preferred embodiment of the present invention, according to the Stringency of Rule of judgment, the judgement grade of Rule of judgment is set.
Specifically, in preferred embodiment of the invention, it can will determine that the judgement grade of condition is set as qualified rank
Or warning level.
In the other embodiment of the present invention, according to the Stringency of Rule of judgment, judgement of condition etc. can also will determine that
Grade is set as other ranks, so as to limit the processing rank of matched semiconductor production data.
S3：Step 3, multiple Rule of judgment is selected to match the semiconductor production data for being replicated and preserving, then
Form corresponding matching result data；
In the preferred embodiment of the present invention, three Rule of judgment is at least selected to carry out matching treatment；
In the preferred embodiment of the present invention, according to the judgement grade of Rule of judgment, to processed semiconductor production number
According to marking, such as：
The semiconductor production data for being matched with the Rule of judgment of qualified grade are marked as qualification；
Do not match the Rule of judgment of qualified grade semiconductor production data be marked as it is unqualified；
The semiconductor production data for being matched with the Rule of judgment of alert level are marked as without warning；
The semiconductor production data for not matching the Rule of judgment of alert level are marked as needing to alert.
Further, in preferred embodiment of the invention, the above-mentioned semiconductor production data for being labeled with not conforming to case marking,
Expression there is mistake in the production process of semiconductor chip, fall short of specifications so as to cause product or production technology not
Meet regulation；And the above-mentioned semiconductor production data for being labeled with needing warning label, although representing the life of semiconductor chip at present
Do not occur underproof situation during production, but entire Production trend there is a possibility that potentially to influence production process, need
It to be handled in time before there is mistake.
In the preferred embodiment of the present invention, though it is to detect qualification the reason of at least three Rule of judgment of selection
But there are the semiconductor production data of potential risk.Therefore, goal of the invention of the invention is：It is detecting underproof partly to lead
It while body creation data, detects the creation data in " warning " rank and is handled in time, to prevent later
The production mistake of appearance.
S4：Step 4, matching result data are preserved；
In the preferred embodiment of the present invention, after processing unit processes obtain above-mentioned matching result data, its whole is sent
Enter in data storage cell and preserve.
S5：Step 5, matching result data are called, so that user checks.
Further, in preferred embodiment of the invention, as shown in figure 3, step 5 specifically includes：
S51：Step 51, multiple calling indicating templates are preset；
S52：Step 52, the externally input preset request instruction for calling indicating template of request display one is obtained；
S53：Step 53, matching result data are called according to request instruction and filled to the corresponding frame for calling indicating template
In frame；
S54：Step 54, output is passed through the calling indicating template of filling and is shown, so that user checks.
In conclusion specifically describing in preferred embodiment of the invention, semiconductor creation data is once measured
Process：
First, migration units obtain the measurement point data suitable for measuring from external storage device, and by Data Migration
It is preserved into data storage cell；
Then, user sets Rule of judgment and each Rule of judgment used in this measurement by input unit
Corresponding judge grade (qualified rank or warning level), and by the Rule of judgment set and corresponding judgement etc.
Grade is sent into condition storage unit and is preserved；
Then, processing unit selection is stored at least three Rule of judgment in condition storage unit, to semiconductor production
Data are matched, to generate corresponding matching result data；In matching result data, processing unit according to it is selected not
With Rule of judgment judgement grade and to semiconductor creation data carry out it is matched as a result, beating semiconductor creation data
Upper corresponding label.
Finally, user sends the finger of request display matching result data by user's display unit to call by result unit
It enables, call by result unit obtains the corresponding matching result data preserved in data storage cell, and is shown in user and shows list
In member.
The foregoing is merely preferred embodiments of the present invention, not thereby limit embodiments of the present invention and protection model
It encloses, to those skilled in the art, should can appreciate that all with made by description of the invention and diagramatic content
Equivalent replacement and obviously change obtained scheme, should all include within the scope of the present invention.
Claims (7)
1. a kind of online data monitoring system, suitable for semiconductor chip production technology；It is characterised in that it includes：
Migration units connect an external storage device, for the semiconductor production preserved in the storage device data to be answered
It makes in the online data monitoring system；
Data storage cell connects the migration units, for preserving the semiconductor production number that the migration units replicate
According to；
Input unit inputs the judgement grade of preset Rule of judgment and the Rule of judgment for user；
Condition storage unit connects the input unit, for preserving the Rule of judgment and the corresponding judgement grade；
Processing unit connects the data storage cell and the condition storage unit respectively, single for being stored in the condition
Multiple Rule of judgment is selected to be matched with the semiconductor production data in member, and obtain corresponding matching result number
According to the matching result data are saved into the data storage cell；
The matching result data include being labeled according to the judgement grade of matching result and the corresponding Rule of judgment
The semiconductor production data and the labeled semiconductor production data account for all semiconductor production data
Ratio；
Call by result unit connects the data storage cell, for sending call instruction to the data storage cell, to obtain
Take the corresponding matching result data preserved in the data storage cell；
The judgement grade of the Rule of judgment is divided into qualified grade and alert level；
The semiconductor production data for being matched with the Rule of judgment of the qualified grade are marked as qualification；
Do not match the Rule of judgment of the qualified grade the semiconductor production data be marked as it is unqualified；
The semiconductor production data for being matched with the Rule of judgment of the alert level are marked as without warning；
The semiconductor production data for not matching the Rule of judgment of the alert level are marked as needing to alert.
2. online data monitoring system as described in claim 1, which is characterized in that the migration units include：
Data selecting module, for selecting to be stored in the amount for being suitable for measuring in the semiconductor production data of the storage device
Measuring point data, and copy in the data storage cell and preserve.
3. online data monitoring system as described in claim 1, which is characterized in that be preset in the call by result unit more
A calling indicating template.
4. online data monitoring system as claimed in claim 3, which is characterized in that further include：
User's display unit connects the call by result unit, for being sent described in request display to the call by result unit
The request instruction of indicating template is called, the call by result unit obtains the matching result number from the data storage cell
According to and fill to request display the calling indicating template frame in, will by filling the calling indicating template send
It is shown into user's display unit.
5. a kind of online data monitoring method, suitable for semiconductor chip production technology；It is characterized in that,
Step 1, it the semiconductor production data of the copying and saving in external storage device and preserves；
Step 2, the preset Rule of judgment of user's input and the judgement grade of the corresponding Rule of judgment are obtained, and is protected
It deposits；
Step 3, multiple Rule of judgment is selected to match the semiconductor production data for being replicated and preserving, then
Form corresponding matching result data；
Step 4, the matching result data are preserved；
Step 5, the matching result data are called, so that user checks；
The matching result data include sentencing described in matching result and the corresponding Rule of judgment in the step 3
Semiconductor production data that disconnected grade is labeled and the labeled semiconductor production data account for all described partly lead
The ratio of body creation data；
The judgement grade of the Rule of judgment is divided into qualified grade and alert level；
The semiconductor production data for being matched with the Rule of judgment of the qualified grade are marked as qualification；
Do not match the Rule of judgment of the qualified grade the semiconductor production data be marked as it is unqualified；
The semiconductor production data for being matched with the Rule of judgment of the alert level are marked as without warning；
The semiconductor production data for not matching the Rule of judgment of the alert level are marked as needing to alert.
6. online data monitoring method as claimed in claim 5, which is characterized in that in the step 1, the institute replicating and preserve
It is to be stored in the amount for being suitable for measuring in the semiconductor production data of the external storage device to state semiconductor production data
Measuring point data.
7. online data monitoring method as claimed in claim 5, which is characterized in that
The step 5 specifically includes：
Step 51, multiple calling indicating templates are preset；
Step 52, the preset request instruction for calling indicating template of externally input request display one is obtained；
Step 53, the matching result data are called according to the request instruction and filled to the corresponding calling indicating template
Frame in；
Step 54, output is passed through the calling indicating template of filling and is shown, so that user checks.
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| CN109656205B (en) * | 2018-12-11 | 2020-11-24 | Oppo（重庆）智能科技有限公司 | Defective product control method and device, electronic device and readable storage medium |
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