CN104898540A - PLC-based ICP plasma generation system control method - Google Patents
PLC-based ICP plasma generation system control method Download PDFInfo
- Publication number
- CN104898540A CN104898540A CN201510159778.1A CN201510159778A CN104898540A CN 104898540 A CN104898540 A CN 104898540A CN 201510159778 A CN201510159778 A CN 201510159778A CN 104898540 A CN104898540 A CN 104898540A
- Authority
- CN
- China
- Prior art keywords
- plc
- lathe
- operator
- cavity
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/05—Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts
- G05B19/058—Safety, monitoring
Abstract
A PLC-based ICP plasma generation system control method belongs to the technical field of plasma processing machine tools. According to the invention, logic control of a PLC is adopted, and then an operator operates three buttons on an operation panel to control the whole system in stages to enable a radio frequency power supply, a cooler, an air exhaust pump, a mass flow meter and other auxiliary parts to run or stop running according to whether there is a need for processing by a machine tool or not and to ensure normal operation of a plasma processing machine tool. The operation panel is simple and is easy for an operator to operate on. Power-on and power-off control is performed by the PLC, which can effectively enhance the working efficiency of the machine tool and effectively prevent faulty operation caused by mistakes made by operators.
Description
Technical field
The invention belongs to plasma process machine tool technology field, relate to a kind of ICP plasma generating system control method based on PLC.
Background technology
Glass-mirror was after carrying out a series of machinings such as grinding, and its surface can produce sub-surface damage and micro-crack, cannot meet under specific circumstances to the request for utilization of glass-mirror.ICP plasma lathe carries out processing further to glass-mirror and can ensure to remove sub-surface damage and micro-crack under the condition not changing surface precision, makes glass-mirror reach better processing effect and meets its specific service condition.
Plasma process needs plasma reaction gas to be passed in plasma reaction torch, then radio-frequency power supply is utilized to produce inductive coupling in quarter bend, then form plasma flame to process workpiece, due to plasma reaction torch in the course of the work its temperature can reach thousands of degrees Celsius, therefore need to utilize cooler to carry chilled water to enter in plasma reaction torch and cool; In addition, plasma process needs in plasma reaction torch, pass into the oxygen of certain flow, argon gas and carbon tetrafluoride and serves as reacting gas, utilizes mass flowmeter to control the flow of often kind of gas.
Changing harm process being impacted and processes tail gas and produce in order to prevent lathe chamber pressure, first needing to seal lathe cavity; On sealing basis, utilize pressure feedback and adjustable displacement off-gas pump to carry out the adjustment of lathe cavity pressure, make it stablize, avoid affecting work pieces process, all right preventing pollution Leakage Gas is in air in addition, pollutes, even cause damage to the health of operating personnel to air.
Summary of the invention
The object of this invention is to provide a kind of ICP plasma generating system control method based on PLC, utilize the logic control of PLC, then by three buttons of operator on guidance panel, control by stages is carried out to whole system, make to comprise each accessories such as radio-frequency power supply, cooler, off-gas pump, mass flowmeter whether can need to run or stop according to machine tooling, ensure the normal operation of plasma process lathe.
The object of the invention is to be achieved through the following technical solutions:
Based on an ICP plasma generating system control method of PLC, comprise the steps:
Step one: for controller PLC and guidance panel power on, by needing the workpiece of processing to place on a mobile platform, closing lathe hermatic door, opening the valve switch of gas cylinder;
Step 2: operator by pressing debugging button on guidance panel, and setting PLC enters the debug phase, and now PLC connects the power supply of mass flowmeter, radio-frequency power supply, cooler and adjustable displacement off-gas pump; Chilled water passes in plasma reaction torch by water pipe by cooler, forms chilled(cooling) water return (CWR), for following process plays the effect of cooling quarter bend; Operator regulates the uninterrupted needed for reacting gas by mass flowmeter, and reacting gas will flow into plasma reaction torch by tracheae via after machine tool enclosure and lathe seal chamber; The pressure signal recorded is passed to analog input and output module with the form of analog voltage by the pressure transducer of lathe inside cavity, PLC reads the cavity pressure signal received in analog input and output module, then by inner pid algorithm, again control adjustable displacement off-gas pump by analog input and output module and carry out Displacement Regulation, and then it is stable to maintain cavity pressure; Operator's manual adjustments radio-frequency power supply makes it the watt level reached needed for plasma producing apparatus, then lights a fire, and after plasma reaction torch produces stable plasma flame, debugging terminates;
Step 3: the processing button on operator's push panel, setting PLC enters the process segment, the now mobile platform setting in motion of lathe, and processing starts;
Step 4: after workpiece completes processing, mobile platform stop motion, operator presses cleaning button on guidance panel, and setting PLC enters clean-up phase, then closes gas cylinder valve switch; PLC opens huge discharge off-gas pump, electromagnetic switch valve, and lathe cavity is communicated with air, out focuses on remaining reacting gas pump drainage in lathe cavity, and meanwhile, PLC closes mass flowmeter, radio-frequency power supply;
Step 5: scale removal process terminates, PLC closes cooler, huge discharge off-gas pump, closes electromagnetic switch valve.
Advantage of the present invention is:
(1) guidance panel is succinct, and handled easily personnel operate;
(2) utilize PLC to carry out power on and off control, effectively improve lathe work efficiency, and effectively prevent the maloperation that causes because of operating personnel's error;
(3) requirement utilizing electromagnetic switch valve to meet lathe cavity to be communicated with air with clean-up phase in the sealing requirements in process segment;
(4) effectively prevent reacting gas to atmospheric pollution and the injury to operating personnel.
Accompanying drawing explanation
Fig. 1 is the ICP plasma generating system control principle drawing based on PLC of the present invention, in figure: 1-gas cylinder, 2-mass flowmeter, 3-radio-frequency power supply, 4-machine tool enclosure, 5-lathe seal chamber, 6-guidance panel, 7-PLC, 8-analog input and output module, 9-pressure transducer, 10-cooler, 11-adjustable displacement off-gas pump, 12-huge discharge off-gas pump, 13-electromagnetic switch valve, 14-mobile platform, 15-workpiece, 16-plasma reaction torch.
Embodiment
Below in conjunction with accompanying drawing, technical scheme of the present invention is further described; but be not limited thereto; everyly technical solution of the present invention modified or equivalent to replace, and not departing from the spirit and scope of technical solution of the present invention, all should be encompassed in protection scope of the present invention.
As shown in Figure 1, the ICP plasma generating system control method based on PLC of the present invention, concrete implementation step is as follows:
Step one: for primary control PLC 7 and guidance panel 6 power on, by needing the workpiece 15 of processing to be placed on mobile platform 14, closes lathe hermatic door; Open the valve switch of gas cylinder 1;
Step 2: operator by pressing debugging button on guidance panel 6, and setting PLC 7 enters the debug phase, and now PLC 7 can connect the power supply of mass flowmeter 2, radio-frequency power supply 3, cooler 10 and adjustable displacement off-gas pump 11; Chilled water passes in plasma reaction torch 16 by water pipe by cooler 10, forms chilled(cooling) water return (CWR), for following process plays the effect of cooling quarter bend; Operator regulates the uninterrupted needed for reacting gas by mass flowmeter 2, and reacting gas will flow into plasma reaction torch 16 by tracheae via after machine tool enclosure 4 and lathe seal chamber 5; The pressure signal recorded is passed to analog input and output module 8 with the form of analog voltage by the pressure transducer 9 of lathe inside cavity, PLC 7 reads the cavity pressure signal received in analog input and output module 8, then by inner pid algorithm, again control adjustable displacement off-gas pump 11 by analog input and output module 8 and carry out Displacement Regulation, and then it is stable to maintain cavity pressure; Operator's manual adjustments radio-frequency power supply 3 makes it the watt level reached needed for plasma producing apparatus, then lights a fire, and after plasma reaction torch 16 produces stable plasma flame, debugging terminates;
Step 3: the processing button on operator's push panel 6, setting PLC 7 enters the process segment, now mobile platform 14 setting in motion of lathe, and processing starts;
Step 4: after workpiece 15 completes processing, mobile platform 15 stop motion, operator presses cleaning button on guidance panel 6, and setting PLC 7 enters clean-up phase, then closes gas cylinder 1 valve switch; PLC 7 will open huge discharge off-gas pump 12, electromagnetic switch valve 13, and lathe cavity is communicated with air, out focus on remaining reacting gas pump drainage in lathe cavity, and meanwhile, PLC 7 will close mass flowmeter 2, radio-frequency power supply 3;
Step 5: according to lathe cavity volume size and exhaust pump capacity, calculating roughly required evacuation time is 15min, after operator presses cleaning button, PLC 7 timer internal starts, setting-up time is 15min, and after 15min, scale removal process terminates, PLC 7 closes cooler 10, huge discharge off-gas pump 12, closes electromagnetic switch valve 13.
Claims (3)
1., based on an ICP plasma generating system control method of PLC, it is characterized in that described method step is as follows:
Step one: for controller PLC and guidance panel power on, by needing the workpiece of processing to place on a mobile platform, closing lathe hermatic door, opening the valve switch of gas cylinder;
Step 2: operator by pressing debugging button on guidance panel, and setting PLC enters the debug phase, and now PLC connects the power supply of mass flowmeter, radio-frequency power supply, cooler and adjustable displacement off-gas pump; Chilled water passes in plasma reaction torch by water pipe by cooler, forms chilled(cooling) water return (CWR), for following process plays the effect of cooling quarter bend; Operator regulates the uninterrupted needed for reacting gas by mass flowmeter, and reacting gas will flow into plasma reaction torch by tracheae via after machine tool enclosure and lathe seal chamber; The pressure signal recorded is passed to analog input and output module with the form of analog voltage by the pressure transducer of lathe inside cavity, PLC reads the cavity pressure signal received in analog input and output module, then by inner pid algorithm, again control adjustable displacement off-gas pump by analog input and output module and carry out Displacement Regulation, and then it is stable to maintain cavity pressure; Operator's manual adjustments radio-frequency power supply makes it the watt level reached needed for plasma producing apparatus, then lights a fire, and after plasma reaction torch produces stable plasma flame, debugging terminates;
Step 3: the processing button on operator's push panel, setting PLC enters the process segment, the now mobile platform setting in motion of lathe, and processing starts;
Step 4: after workpiece completes processing, mobile platform stop motion, operator presses cleaning button on guidance panel, and setting PLC enters clean-up phase, then closes gas cylinder valve switch; PLC opens huge discharge off-gas pump, electromagnetic switch valve, and lathe cavity is communicated with air, out focuses on remaining reacting gas pump drainage in lathe cavity, and meanwhile, PLC closes mass flowmeter, radio-frequency power supply;
Step 5: scale removal process terminates, PLC closes cooler, huge discharge off-gas pump, closes electromagnetic switch valve.
2. the ICP plasma generating system control method based on PLC according to claim 1, is characterized in that the pump drainage time of described clean-up phase is set as 15min.
3. the ICP plasma generating system control method based on PLC according to claim 1, the requirement that it is characterized in that utilizing electromagnetic switch valve to meet lathe cavity and be communicated with air with clean-up phase in the sealing requirements in process segment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510159778.1A CN104898540A (en) | 2015-04-07 | 2015-04-07 | PLC-based ICP plasma generation system control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510159778.1A CN104898540A (en) | 2015-04-07 | 2015-04-07 | PLC-based ICP plasma generation system control method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104898540A true CN104898540A (en) | 2015-09-09 |
Family
ID=54031257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510159778.1A Pending CN104898540A (en) | 2015-04-07 | 2015-04-07 | PLC-based ICP plasma generation system control method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104898540A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101797394A (en) * | 2009-02-09 | 2010-08-11 | 王龙哲 | Radio-frequency inductance coupling plasma sterilizer |
| US8169148B2 (en) * | 2007-07-10 | 2012-05-01 | Samsung Electronics Co., Ltd. | Plasma generating apparatus |
| US20120211466A1 (en) * | 2011-02-22 | 2012-08-23 | Dae-Kyu Choi | Plasma processing apparatus and method thereof |
| CN102751160A (en) * | 2012-07-13 | 2012-10-24 | 中微半导体设备(上海)有限公司 | Etching device and corresponding etching method |
| CN103037613A (en) * | 2012-12-07 | 2013-04-10 | 常州中科常泰等离子体科技有限公司 | Control system of full-automatic cold plasma seed processor |
| CN103237402A (en) * | 2013-05-14 | 2013-08-07 | 哈尔滨工业大学 | Air plasma processing device |
| CN203265858U (en) * | 2013-05-17 | 2013-11-06 | 济宁市齐力机电设备有限公司 | Continuous air feeding and pressure stabilizing device of minitype numerical control precise plasma cutting machine |
| CN104233172A (en) * | 2014-09-12 | 2014-12-24 | 芜湖鼎瀚再制造技术有限公司 | Plasma spraying processing system |
-
2015
- 2015-04-07 CN CN201510159778.1A patent/CN104898540A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8169148B2 (en) * | 2007-07-10 | 2012-05-01 | Samsung Electronics Co., Ltd. | Plasma generating apparatus |
| CN101797394A (en) * | 2009-02-09 | 2010-08-11 | 王龙哲 | Radio-frequency inductance coupling plasma sterilizer |
| US20120211466A1 (en) * | 2011-02-22 | 2012-08-23 | Dae-Kyu Choi | Plasma processing apparatus and method thereof |
| CN102751160A (en) * | 2012-07-13 | 2012-10-24 | 中微半导体设备(上海)有限公司 | Etching device and corresponding etching method |
| CN103037613A (en) * | 2012-12-07 | 2013-04-10 | 常州中科常泰等离子体科技有限公司 | Control system of full-automatic cold plasma seed processor |
| CN103237402A (en) * | 2013-05-14 | 2013-08-07 | 哈尔滨工业大学 | Air plasma processing device |
| CN203265858U (en) * | 2013-05-17 | 2013-11-06 | 济宁市齐力机电设备有限公司 | Continuous air feeding and pressure stabilizing device of minitype numerical control precise plasma cutting machine |
| CN104233172A (en) * | 2014-09-12 | 2014-12-24 | 芜湖鼎瀚再制造技术有限公司 | Plasma spraying processing system |
Non-Patent Citations (1)
| Title |
|---|
| 王家富: "大气等离子体抛光系统设计及实验研究", 《中国优秀硕士学位论文全文数据库工程科技Ⅰ辑》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105268713A (en) | Intelligence gas curtain fume hood | |
| CN105376997A (en) | Positive-pressure explosion-proof control cabinet and control method thereof | |
| CN105056624A (en) | Cutting fluid supplying and recycling device | |
| CN202893720U (en) | High-pressure water jet cleaning center | |
| MX2016006970A (en) | Combined system for producing steel and method for operating the combined system. | |
| CN205201327U (en) | Water sword cutting system | |
| CN104898540A (en) | PLC-based ICP plasma generation system control method | |
| CN104773961A (en) | ICP (inductively coupled plasma) processing machine tool cavity air pressure control method based on PLC (programmable logic controller) | |
| CN103453777A (en) | Smoke residual heat power generating system | |
| CN103658080B (en) | Cleaning by High Pressure Water Jet center | |
| CN104061562A (en) | Saturated vapor generating device for verifying sulfur hexafluoride humidity sensor | |
| CN104259929A (en) | Chip removal device for machine tool chip treatment | |
| CN203534220U (en) | Flue gas waste heat power generation system | |
| CN106425063A (en) | Digitalized plasma cutting power supply | |
| CN103868048A (en) | Primary side drying system of steam generator | |
| CN207689082U (en) | Product hermeticity detector | |
| CN103194733B (en) | A kind of atomic layer deposition apparatus | |
| CN109209848A (en) | A kind of air integral compressor automatic Regulation technology | |
| KR101355514B1 (en) | Method for controlilng temperature of drum water in boiler using surplus steam | |
| CN204988893U (en) | Constant velocity cardan joint thermal treatment inductor accredited testing organization | |
| CN203613212U (en) | Blast furnace gas sprinkling control systems | |
| CN104563212A (en) | Variable-frequency constant-pressure make-up water control system on basis of PI (Proportional-Integral) regulation | |
| CN212327246U (en) | Fire extinguishing device of battery disassembling equipment | |
| CN219431902U (en) | Steam waste heat and residual pressure power generation system of high-pressure deaerator | |
| CN109202526A (en) | A kind of coolant system for cutting machines |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150909 |