CN104897042B - The measurement of mutual inductance system and method for magnetic suspension mechanism gas length - Google Patents

The measurement of mutual inductance system and method for magnetic suspension mechanism gas length Download PDF

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CN104897042B
CN104897042B CN201510221266.3A CN201510221266A CN104897042B CN 104897042 B CN104897042 B CN 104897042B CN 201510221266 A CN201510221266 A CN 201510221266A CN 104897042 B CN104897042 B CN 104897042B
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electromagnet
mutual inductance
air gap
current
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CN104897042A (en
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于占东
周琪
郑建英
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Bohai University
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Abstract

本发明公开了一种磁悬浮机构气隙长度的互感测量系统及方法,该测量系统由悬浮机构、电磁铁功率驱动单元、两个锁相放大单元和数字信号处理单元构成,一个锁相放大单元用于检测电流信号幅值,另一个锁相放大单元用于检测电压信号的幅值,所述悬浮机构由电磁铁和悬浮体构成,所述电磁铁功率驱动单元包括H桥式电路和霍尔电流传感器,所述锁相放大单元,包括前置滤波放大器,相敏检测器和低通滤波器,所述数字信号处理单元采用CPU处理器。本发明在不使用位置传感器的情况下,只需在电磁铁线圈加工中,预埋互感线圈,通过对预埋线圈互感电压以及电磁铁线圈电流的测量,就可以计算出磁悬浮机构的气隙长度。

The invention discloses a mutual inductance measurement system and method for the air gap length of a magnetic suspension mechanism. The measurement system is composed of a suspension mechanism, an electromagnet power drive unit, two phase-locked amplification units and a digital signal processing unit. In order to detect the magnitude of the current signal, another lock-in amplifier unit is used to detect the magnitude of the voltage signal. The levitation mechanism is composed of an electromagnet and a levitation body. The electromagnet power drive unit includes an H bridge circuit and a Hall current The sensor, the lock-in amplification unit, includes a pre-filter amplifier, a phase-sensitive detector and a low-pass filter, and the digital signal processing unit adopts a CPU processor. In the present invention, without using a position sensor, only the mutual inductance coil is pre-embedded in the processing of the electromagnet coil, and the air gap length of the magnetic levitation mechanism can be calculated by measuring the mutual inductance voltage of the pre-embedded coil and the current of the electromagnet coil .

Description

磁悬浮机构气隙长度的互感测量系统及方法Mutual inductance measurement system and method for air gap length of magnetic levitation mechanism

技术领域technical field

本发明涉及无位置传感器磁悬浮系统的控制领域,具体涉及一种磁悬浮机构气隙长度的互感测量系统及方法。The invention relates to the control field of a position sensorless magnetic levitation system, in particular to a mutual inductance measurement system and method for the air gap length of a magnetic levitation mechanism.

背景技术Background technique

PWM主动控制型磁悬浮技术是利用PWM驱动的电磁铁装置,采用闭环控制手段调节磁场力,使悬浮体与电磁体之间保持一定的间隙,实现悬浮的目的。磁悬浮可有效的避免物体之间接触摩擦,因此具有广阔的应用前景。磁悬浮技术已在很多的领域得到了广泛的应用,如磁悬浮列车、磁悬浮轴承、高速磁悬浮电机等。The PWM active control type magnetic levitation technology is to use the electromagnet device driven by PWM, and adopt the closed-loop control method to adjust the magnetic field force, so as to maintain a certain gap between the levitation body and the electromagnet, so as to achieve the purpose of levitation. Magnetic levitation can effectively avoid contact and friction between objects, so it has broad application prospects. Maglev technology has been widely used in many fields, such as maglev trains, maglev bearings, high-speed maglev motors, etc.

目前大多数主动控制型磁悬浮机构采用位置传感器测量气隙长度。传感器大体分为两类,激光测距传感器,电涡流位移传感器。由于位置传感器的存在,增加了系统的成本和装配的难度,不利于磁悬浮机构的小型化和低成本化。At present, most actively controlled maglev mechanisms use position sensors to measure the air gap length. Sensors are roughly divided into two categories, laser ranging sensors and eddy current displacement sensors. Due to the existence of the position sensor, the cost of the system and the difficulty of assembly are increased, which is not conducive to the miniaturization and cost reduction of the magnetic levitation mechanism.

发明内容Contents of the invention

为解决上述问题,本发明提供了一种磁悬浮机构气隙长度的互感测量系统及方法,在不使用位置传感器的情况下,只需在电磁铁线圈加工中,预埋互感线圈,通过对预埋线圈互感电压以及电磁铁线圈电流的测量,就可以计算出磁悬浮机构的气隙长度。In order to solve the above problems, the present invention provides a mutual inductance measurement system and method for the air gap length of a magnetic levitation mechanism. In the case of not using a position sensor, only the mutual inductance coil needs to be pre-embedded in the electromagnet coil processing, and the pre-embedded The air gap length of the magnetic levitation mechanism can be calculated by measuring the mutual inductance voltage of the coil and the current of the electromagnet coil.

为实现上述目的,本发明采取的技术方案为:In order to achieve the above object, the technical scheme that the present invention takes is:

磁悬浮机构气隙长度的互感测量系统,所述测量系统由悬浮机构、电磁铁功率驱动单元、两个锁相放大(LIA)单元和数字信号处理单元构成,一个锁相放大单元用于检测电流信号幅值,另一个锁相放大单元用于检测电压信号的幅值,所述悬浮机构由电磁铁和悬浮体构成,所述电磁铁功率驱动单元包括H桥式电路和霍尔电流传感器,所述锁相放大单元,包括前置滤波放大器,相敏检测器(PSD)和低通滤波器(LPF),所述数字信号处理单元采用CPU处理器,所述数字信号处理单元通过两根线缆与悬浮机构相连,一根线缆用于驱动电磁铁,另一根线缆用于测量互感电压。A mutual inductance measurement system for the air gap length of the magnetic levitation mechanism, the measurement system is composed of a levitation mechanism, an electromagnet power drive unit, two lock-in amplifier (LIA) units and a digital signal processing unit, and one lock-in amplifier unit is used to detect current signals Amplitude, another lock-in amplification unit is used to detect the amplitude of the voltage signal, the suspension mechanism is composed of an electromagnet and a suspension, and the electromagnet power drive unit includes an H-bridge circuit and a Hall current sensor. A lock-in amplifying unit, comprising a pre-filter amplifier, a phase-sensitive detector (PSD) and a low-pass filter (LPF), the digital signal processing unit adopts a CPU processor, and the digital signal processing unit communicates with the The suspension mechanism is connected, one cable is used to drive the electromagnet, and the other cable is used to measure the mutual induction voltage.

其中,两个所述锁相放大(LIA)单元均采用AD630芯片;霍尔电流传感器的输出经过信号调理,滤波放大后,输入到相敏解调芯片AD630的1脚中为Sig_Input信号,同时CPU将与PWM波同频,且经过移相处理的方波,输入到AD630的9脚中,作为锁相放大的参考信号;Sig_Input信号在AD630中被锁相放大,AD630的输出信号经过低通滤波后,得到含电流基频分量的幅值信息的信号Output;此信号经过信号调理后,输入到数字信号处理单元中。Wherein, two described lock-in amplification (LIA) units all adopt AD630 chip; The output of the Hall current sensor is through signal conditioning, and after filtering and amplifying, it is input to the 1 pin of the phase-sensitive demodulation chip AD630 as the Sig_Input signal, and the CPU Input the square wave with the same frequency as the PWM wave and has undergone phase-shift processing to the 9-pin of AD630 as the reference signal for lock-in amplification; the Sig_Input signal is locked-in and amplified in AD630, and the output signal of AD630 is low-pass filtered After that, a signal Output containing amplitude information of the fundamental frequency component of the current is obtained; this signal is input into the digital signal processing unit after signal conditioning.

为解决上述问题,本发明还提供了一种磁悬浮机构气隙长度的互感测量方法,包括如下步骤:In order to solve the above problems, the present invention also provides a mutual inductance measurement method of the air gap length of the magnetic levitation mechanism, comprising the following steps:

S1、CPU向电磁铁功率驱动单元发出PWM驱动信号,电磁铁线圈产生电流,悬浮体在电磁力控制下运动使气隙x发生改变,进而改变磁路的磁阻和线圈电流;S1. The CPU sends a PWM drive signal to the electromagnet power drive unit, the electromagnet coil generates current, and the suspension moves under the control of electromagnetic force to change the air gap x, thereby changing the reluctance of the magnetic circuit and the coil current;

S2、利用锁相放大(LIA)技术,将淹没于电流谐波信号中的位置变化信息提取出来;S2. Using lock-in amplification (LIA) technology, the position change information submerged in the current harmonic signal is extracted;

S3、根据PWM信号中基频激励电压分量的幅值和电流的关系,在CUP处理器中计算出气隙长度。S3. Calculate the air gap length in the CUP processor according to the relationship between the amplitude of the fundamental frequency excitation voltage component in the PWM signal and the current.

其中,所述运动使气隙x的计算公式为:Wherein, the movement makes the calculation formula of the air gap x be:

式中,N为电磁铁线圈的匝数,μ0表示真空磁导率,A表示电磁铁铁芯的截面积,ω0表示脉宽调制信号基波角频率,m为预埋互感线圈的匝数,Ui0表示电流基波信号幅值,Uue0表示基频激励电压分量的幅值,I表示磁路中铁芯的长度,μr表示铁芯相对磁导率。In the formula, N is the number of turns of the electromagnet coil, μ 0 represents the vacuum permeability, A represents the cross-sectional area of the electromagnet core, ω 0 represents the fundamental angular frequency of the pulse width modulation signal, and m is the turn of the embedded mutual inductance coil U i0 represents the amplitude of the current fundamental wave signal, U ue0 represents the amplitude of the fundamental frequency excitation voltage component, I represents the length of the iron core in the magnetic circuit, μ r represents the relative magnetic permeability of the iron core.

本发明具有以下有益效果:The present invention has the following beneficial effects:

利用锁相放大技术,处理磁悬浮机构气隙测量问题;利用采用互感线圈测量主回路基频电压,一方面可以避免主回路直流干扰,另一方面可以消除电阻压降iR对测量的影响,提高了测量的精度;考虑了控制信号占空比对气隙测量的影响,与其他无位置传感器方法相比,测量更精确;电磁铁即作为执行机构,又作为磁阻测量的敏感器件;与现有的利用激光位置传感器、以及电涡流测量的方案相比,本方法成本更低,更易于集成,更适合安装和调试。Use phase-locked amplification technology to solve the problem of air gap measurement of magnetic levitation mechanism; use mutual induction coil to measure the fundamental frequency voltage of the main circuit, on the one hand, it can avoid the DC interference of the main circuit, on the other hand, it can eliminate the influence of the resistance voltage drop iR on the measurement, and improve the efficiency. The accuracy of the measurement; the influence of the duty cycle of the control signal on the air gap measurement is considered, and the measurement is more accurate compared with other position sensorless methods; the electromagnet is used as an actuator and a sensitive device for reluctance measurement; compared with the existing Compared with existing solutions using laser position sensors and eddy current measurements, this method has lower cost, is easier to integrate, and is more suitable for installation and debugging.

附图说明Description of drawings

图1本发明实施例一种磁悬浮机构气隙长度的互感测量系统的系统结构图Fig. 1 is a system structure diagram of a mutual inductance measurement system for the air gap length of a magnetic levitation mechanism according to an embodiment of the present invention

图2为图1的简化图。FIG. 2 is a simplified diagram of FIG. 1 .

图3为本发明实施例中磁悬浮装置的等效磁路模型示意图。Fig. 3 is a schematic diagram of an equivalent magnetic circuit model of the magnetic levitation device in the embodiment of the present invention.

图4为本发明实施例中磁悬浮装置的等效的等效电路图。Fig. 4 is an equivalent equivalent circuit diagram of the magnetic levitation device in the embodiment of the present invention.

图5为本发明实施例中AD630锁相放大电路。Fig. 5 is the AD630 lock-in amplifier circuit in the embodiment of the present invention.

具体实施方式Detailed ways

为了使本发明的目的及优点更加清楚明白,以下结合实施例对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the objects and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

如图1-2所示,本发明实施例提供了一种磁悬浮机构气隙长度的互感测量系统,所述测量系统由悬浮机构、电磁铁功率驱动单元、两个锁相放大(LIA)单元和数字信号处理单元构成,一个锁相放大单元用于检测电流信号幅值,另一个锁相放大单元用于检测电压信号的幅值,所述悬浮机构由电磁铁和悬浮体构成,所述电磁铁功率驱动单元包括H桥式电路和霍尔电流传感器,所述锁相放大单元,包括前置滤波放大器,相敏检测器(PSD)和低通滤波器(LPF),所述数字信号处理单元采用CPU处理器,所述数字信号处理单元通过两根线缆与悬浮机构相连,一根线缆用于驱动电磁铁,另一根线缆用于测量互感电压。As shown in Figure 1-2, the embodiment of the present invention provides a mutual inductance measurement system for the air gap length of a magnetic levitation mechanism, the measurement system consists of a levitation mechanism, an electromagnet power drive unit, two lock-in amplifier (LIA) units and The digital signal processing unit is composed of one lock-in amplifier unit for detecting the amplitude of the current signal, and the other lock-in amplifier unit is used for detecting the amplitude of the voltage signal. The suspension mechanism is composed of an electromagnet and a suspension body. The electromagnet The power drive unit includes an H-bridge circuit and a Hall current sensor, the lock-in amplifier unit includes a pre-filter amplifier, a phase-sensitive detector (PSD) and a low-pass filter (LPF), and the digital signal processing unit adopts CPU processor, the digital signal processing unit is connected with the suspension mechanism through two cables, one cable is used to drive the electromagnet, and the other cable is used to measure the mutual inductance voltage.

如图5所示,两个所述锁相放大(LIA)单元均采用AD630芯片;霍尔电流传感器的输出经过信号调理,滤波放大后,输入到相敏解调芯片AD630的1脚中为Sig_Input信号,同时CPU将与PWM波同频,且经过移相处理的方波,输入到AD630的9脚中,作为锁相放大的参考信号;Sig_Input信号在AD630中被锁相放大,AD630的输出信号经过低通滤波后,得到含电流基频分量的幅值信息的信号Output;此信号经过信号调理后,输入到数字信号处理单元中。As shown in Figure 5, the two lock-in amplifier (LIA) units all use the AD630 chip; the output of the Hall current sensor is signal-conditioned, filtered and amplified, and then input to pin 1 of the phase-sensitive demodulator chip AD630 as Sig_Input At the same time, the CPU will input the square wave with the same frequency as the PWM wave and the phase-shifted processing to the 9-pin of AD630 as the reference signal for lock-in amplification; the Sig_Input signal is locked-in and amplified in AD630, and the output signal of AD630 After low-pass filtering, a signal Output containing amplitude information of the fundamental frequency component of the current is obtained; this signal is input into the digital signal processing unit after signal conditioning.

本发明实施例还提供了一种磁悬浮机构气隙长度的互感测量方法,包括如下步骤:The embodiment of the present invention also provides a mutual inductance measurement method for the air gap length of the magnetic levitation mechanism, comprising the following steps:

S1、CPU向电磁铁功率驱动单元发出PWM驱动信号,电磁铁线圈产生电流,悬浮体在电磁力控制下运动使气隙x发生改变,进而改变磁路的磁阻和线圈电流;S1. The CPU sends a PWM drive signal to the electromagnet power drive unit, the electromagnet coil generates current, and the suspension moves under the control of electromagnetic force to change the air gap x, thereby changing the reluctance of the magnetic circuit and the coil current;

S2、利用锁相放大(LIA)技术,将淹没于电流谐波信号中的位置变化信息提取出来;S2. Using lock-in amplification (LIA) technology, the position change information submerged in the current harmonic signal is extracted;

S3、根据PWM信号中基频激励电压分量的幅值和电流的关系,在CUP处理器中计算出气隙长度。S3. Calculate the air gap length in the CUP processor according to the relationship between the amplitude of the fundamental frequency excitation voltage component in the PWM signal and the current.

其中,所述运动使气隙x的计算公式为:Wherein, the movement makes the calculation formula of the air gap x be:

式中,N为电磁铁线圈的匝数,μ0表示真空磁导率,A表示电磁铁铁芯的截面积,ω0表示脉宽调制信号基波角频率,m为预埋互感线圈的匝数,Ui0表示电流基波信号幅值,Uue0表示基频激励电压分量的幅值,I表示磁路中铁芯的长度,μr表示铁芯相对磁导率。In the formula, N is the number of turns of the electromagnet coil, μ 0 represents the vacuum permeability, A represents the cross-sectional area of the electromagnet core, ω 0 represents the fundamental angular frequency of the pulse width modulation signal, and m is the turn of the embedded mutual inductance coil U i0 represents the amplitude of the current fundamental wave signal, U ue0 represents the amplitude of the fundamental frequency excitation voltage component, I represents the length of the iron core in the magnetic circuit, μ r represents the relative magnetic permeability of the iron core.

所述运动使气隙x的计算公式通过以下步骤获得:The movement enables the calculation formula of the air gap x to be obtained through the following steps:

如图3-4所示,取N为主线圈匝数,i为线圈电流,m为互感线圈的匝数,互感线圈与差动放大电路相连,因此可以认为互感线圈开路,其电压为Ue。Ni为系统的磁动势,Rm为系统的磁阻。若忽略漏磁和端面效应则系统的磁阻可表示为:As shown in Figure 3-4, N is the number of turns of the main coil, i is the coil current, m is the number of turns of the mutual induction coil, and the mutual induction coil is connected to the differential amplifier circuit, so it can be considered that the mutual induction coil is open, and its voltage is U e . Ni is the magnetomotive force of the system, and R m is the magnetoresistance of the system. If the magnetic flux leakage and end effect are ignored, the magnetic resistance of the system can be expressed as:

其中,I表示磁路中铁芯长度(含悬浮体),x表示气隙长度,μ0为真空磁导率,μr为铁芯材料的相对磁导率,A表示铁芯的面积Among them, I represents the length of the iron core (including the suspension) in the magnetic circuit, x represents the length of the air gap, μ 0 is the vacuum magnetic permeability, μ r is the relative magnetic permeability of the core material, and A represents the area of the iron core

根据磁阻与电感的关系,有:According to the relationship between reluctance and inductance, there are:

电磁铁的磁链为:The flux linkage of the electromagnet is:

ψ=Li (3)ψ=Li (3)

若电磁铁两端加电压u,电磁铁线圈电阻为R,则可以列出电磁铁电流回路方程为:If the voltage u is applied to both ends of the electromagnet and the resistance of the electromagnet coil is R, the equation of the electromagnet current loop can be listed as:

其中,e为感应电压。互感回路的电压为:Among them, e is the induced voltage. The voltage of the mutual inductance circuit is:

若忽略电磁铁的反电势项,即,则有If the back EMF term of the electromagnet is neglected, that is, then there is

将L与Rm的关系(2)带入(6)式,有Bringing the relationship (2) between L and R m into formula (6), we have

对(7)式进行傅立叶分析,只考虑基频情况,有:Carry out Fourier analysis to formula (7), only consider the fundamental frequency situation, have:

其中,iv0为电流的基频分量,uev0为互感线圈电压的基频分量。Among them, iv0 is the fundamental frequency component of the current, and u ev0 is the fundamental frequency component of the mutual induction coil voltage.

令:Ui0为i的基频分量信号的幅值,Uue0为ue的基频分量信号的幅值,根据(8)式,两者的关系如下:Order: U i0 is the amplitude of the fundamental frequency component signal of i, and U ue0 is the amplitude of the fundamental frequency component signal of u e . According to formula (8), the relationship between the two is as follows:

若Ui0和Uue0已知,则气隙长度可以表示为:If U i0 and U ue0 are known, the air gap length can be expressed as:

本具体实施采用锁相放大技术测量电流基频分量的幅值Ui0和Uue0。采用相敏放大技术提取信号幅值信息的原因如下:In this specific implementation, the amplitudes U i0 and U ue0 of the fundamental frequency components of the current are measured using a lock-in amplification technique. The reasons for using phase-sensitive amplification technology to extract signal amplitude information are as follows:

a)利用相敏检测器实现调制信号的解调过程,可以同时利用频率和相位进行检测,干扰噪声与信号同频又同相的概率很低;a) The phase-sensitive detector is used to realize the demodulation process of the modulated signal, and the frequency and phase can be used for detection at the same time, and the probability of interference noise having the same frequency and phase as the signal is very low;

b)相比普通解调器而言,锁相放大器采用低通滤波,其通频带可以做得很窄,而且其带宽不受调制频率影响,具有很好的稳定性。b) Compared with ordinary demodulators, the lock-in amplifier adopts low-pass filtering, and its passband can be made very narrow, and its bandwidth is not affected by the modulation frequency, so it has good stability.

c)电磁铁通过PWM脉冲信号激励产生电磁力,PWM基频信号是载波信号,位置信息被调制在PWM基频信号中,因此可以直接利用PWM信号中的基频分量作为参考信号。c) The electromagnet is excited by the PWM pulse signal to generate electromagnetic force. The PWM base frequency signal is a carrier signal, and the position information is modulated in the PWM base frequency signal. Therefore, the base frequency component in the PWM signal can be directly used as a reference signal.

本具体实施的实现过程中,CPU所用的处理器,可以是单片机、DSP、ARM、FPGA,PC104,PC机等;参考信号可由CPU处理器发出,也可以采用专门的锁相环(PLL)电路,生成用于锁相放大的参考信号;锁相放大单元可以采用ADb30为核心的锁相放大电路,也可以采用由高速模拟开关电路搭建的锁相放大电路,或直接通过数字锁相放大方式实现锁相放大功能;霍尔电流传感器的功能可以用采样电阻取代,即在H桥下端串联一个锰铜低温漂采样电阻,再用差动放大电路测出电阻电压,进而通过计算的方式得到电流。In the realization process of this concrete implementation, the used processor of CPU can be single-chip microcomputer, DSP, ARM, FPGA, PC104, PC machine etc.; Reference signal can be sent by CPU processor, also can adopt special phase-locked loop (PLL) circuit , to generate a reference signal for lock-in amplification; the lock-in amplifier unit can use ADb30 as the core lock-in amplifier circuit, or use a lock-in amplifier circuit built by a high-speed analog switch circuit, or directly realize it through digital lock-in amplification Phase-locked amplification function; the function of the Hall current sensor can be replaced by a sampling resistor, that is, a manganese-copper low-temperature drift sampling resistor is connected in series at the lower end of the H bridge, and then the differential amplifier circuit is used to measure the resistor voltage, and then the current is obtained by calculation.

以上所述仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以作出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above is only a preferred embodiment of the present invention, it should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, some improvements and modifications can also be made, and these improvements and modifications should also be It is regarded as the protection scope of the present invention.

Claims (4)

1.磁悬浮机构气隙长度的互感测量系统,其特征在于,所述测量系统由悬浮机构、电磁铁功率驱动单元、两个锁相放大单元和数字信号处理单元构成,一个锁相放大单元用于检测电流信号幅值,另一个锁相放大单元用于检测电压信号的幅值,所述悬浮机构由电磁铁和悬浮体构成,所述电磁铁功率驱动单元包括H桥式电路和霍尔电流传感器,所述锁相放大单元,包括前置滤波放大器,相敏检测器和低通滤波器,所述数字信号处理单元采用CPU处理器,所述数字信号处理单元通过两根线缆与悬浮机构相连,一根线缆用于驱动电磁铁,另一根线缆用于测量互感电压;其中,激励信号采用电磁铁功率驱动单元控制信号,其形式为PWM脉冲。1. The mutual inductance measurement system of the air gap length of the magnetic levitation mechanism is characterized in that the measurement system is made of a levitation mechanism, an electromagnet power drive unit, two lock-in amplifier units and a digital signal processing unit, and a lock-in amplifier unit is used for Detect the amplitude of the current signal, and another lock-in amplifier unit is used to detect the amplitude of the voltage signal. The levitation mechanism is composed of an electromagnet and a levitation body. The electromagnet power drive unit includes an H-bridge circuit and a Hall current sensor , the lock-in amplification unit includes a pre-filter amplifier, a phase-sensitive detector and a low-pass filter, the digital signal processing unit adopts a CPU processor, and the digital signal processing unit is connected to the suspension mechanism through two cables , one cable is used to drive the electromagnet, and the other cable is used to measure the mutual inductance voltage; wherein, the excitation signal adopts the control signal of the electromagnet power drive unit, which is in the form of PWM pulse. 2.根据权利要求1所述的磁悬浮机构气隙长度的互感测量系统,其特征在于,两个所述锁相放大单元均采用AD630芯片;霍尔电流传感器的输出经过信号调理,滤波放大后,输入到相敏解调芯片AD630的1脚中为Sig_Input信号,同时CPU将与PWM波同频,且经过移相处理的方波,输入到AD630的9脚中,作为锁相放大的参考信号;Sig_Input信号在AD630中被锁相放大,AD630的输出信号经过低通滤波后,得到含电流基频分量的幅值信息的信号Output;此信号经过信号调理后,输入到数字信号处理单元中。2. the mutual inductance measurement system of magnetic levitation mechanism air gap length according to claim 1, it is characterized in that, two described lock-in amplifying units all adopt AD630 chip; The output of Hall current sensor is through signal conditioning, after filtering and amplifying, Input to the 1 pin of the phase-sensitive demodulation chip AD630 is the Sig_Input signal, and at the same time, the CPU will input the square wave with the same frequency as the PWM wave and has been phase-shifted into the 9 pin of the AD630 as a reference signal for lock-in amplification; The Sig_Input signal is phase-locked and amplified in the AD630, and the output signal of the AD630 is low-pass filtered to obtain a signal Output containing the amplitude information of the fundamental frequency component of the current; this signal is input to the digital signal processing unit after signal conditioning. 3.一种利用权利要求1所述的磁悬浮机构气隙长度的互感测量系统的磁悬浮机构气隙长度的互感测量方法,其特征在于,包括如下步骤:3. a mutual inductance measurement method of the magnetic levitation mechanism air gap length utilizing the mutual inductance measurement system of the magnetic levitation mechanism air gap length claimed in claim 1, is characterized in that, comprises the steps: S1、CPU向电磁铁功率驱动单元发出PWM驱动信号,电磁铁线圈产生电流,悬浮体在电磁力控制下运动使气隙x发生改变,进而改变磁路的磁阻和线圈电流;S1. The CPU sends a PWM drive signal to the electromagnet power drive unit, the electromagnet coil generates current, and the suspension moves under the control of electromagnetic force to change the air gap x, thereby changing the reluctance of the magnetic circuit and the coil current; S2、利用锁相放大技术,将淹没于电流谐波信号中的位置变化信息提取出来;S2. Using phase-locked amplification technology to extract the position change information submerged in the current harmonic signal; S3、根据PWM信号中基频激励电压分量的幅值和电流的关系,在CUP处理器中计算出气隙长度。S3. Calculate the air gap length in the CUP processor according to the relationship between the amplitude of the fundamental frequency excitation voltage component in the PWM signal and the current. 4.根据权利要求3所述的磁悬浮机构气隙长度的互感测量方法,其特征在于,所述运动使气隙x的计算公式为:4. the mutual inductance measurement method of magnetic levitation mechanism air gap length according to claim 3, is characterized in that, described motion makes the calculation formula of air gap x be: 式中,N为电磁铁线圈的匝数,μ0表示真空磁导率,A表示电磁铁铁芯的截面积,ω0表示脉宽调制信号基波角频率,m为预埋互感线圈的匝数,Ui0表示电流基波信号幅值,Uue0表示基频激励电压分量的幅值,l表示磁路中铁芯的长度,μr表示铁芯相对磁导率。In the formula, N is the number of turns of the electromagnet coil, μ 0 represents the vacuum permeability, A represents the cross-sectional area of the electromagnet core, ω 0 represents the fundamental angular frequency of the pulse width modulation signal, and m is the turn of the embedded mutual inductance coil U i0 represents the amplitude of the current fundamental wave signal, U ue0 represents the amplitude of the fundamental frequency excitation voltage component, l represents the length of the iron core in the magnetic circuit, μ r represents the relative magnetic permeability of the iron core.
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