CN104875081B - 一种基于介电泳效应的微小孔精密加工方法 - Google Patents
一种基于介电泳效应的微小孔精密加工方法 Download PDFInfo
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- CN104875081B CN104875081B CN201510297914.3A CN201510297914A CN104875081B CN 104875081 B CN104875081 B CN 104875081B CN 201510297914 A CN201510297914 A CN 201510297914A CN 104875081 B CN104875081 B CN 104875081B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/002—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using electric current
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CN201510297914.3A CN104875081B (zh) | 2015-06-03 | 2015-06-03 | 一种基于介电泳效应的微小孔精密加工方法 |
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CN104875081A CN104875081A (zh) | 2015-09-02 |
CN104875081B true CN104875081B (zh) | 2017-04-12 |
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Families Citing this family (2)
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CN110181387B (zh) * | 2019-06-03 | 2020-10-23 | 浙江工业大学 | 一种化学预处理和介电泳协同作用的碳化硅平面抛光方法和装置 |
CN110238706B (zh) * | 2019-06-03 | 2020-09-11 | 浙江工业大学 | 一种基于空化和介电泳的多相流抛光方法及抛光系统 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN203282283U (zh) * | 2013-05-29 | 2013-11-13 | 浙江工业大学 | 基于介电泳效应的抛光设备 |
CN203292952U (zh) * | 2013-05-22 | 2013-11-20 | 广东工业大学 | 一种电泳辅助微细超声加工机床 |
CN103433841A (zh) * | 2013-08-01 | 2013-12-11 | 浙江工业大学 | 基于介电泳效应的双平面研磨/抛光圆柱形零件设备 |
CN103551927A (zh) * | 2013-11-11 | 2014-02-05 | 广东工业大学 | 一种电泳辅助超声振动驱动磨粒运动抛光微孔的装置及加工方法 |
CN103909288A (zh) * | 2014-04-04 | 2014-07-09 | 广东工业大学 | 一种电泳辅助超声机械复合微细钻削加工装置 |
CN104440584A (zh) * | 2014-11-04 | 2015-03-25 | 广东工业大学 | 一种磨粒流微孔抛光装置及其抛光工艺 |
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JP4783719B2 (ja) * | 2006-12-04 | 2011-09-28 | 秋田県 | 電界下における誘電性砥粒を水に分散させた流体を用いた仕上げ方法及び仕上げ装置 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN203292952U (zh) * | 2013-05-22 | 2013-11-20 | 广东工业大学 | 一种电泳辅助微细超声加工机床 |
CN203282283U (zh) * | 2013-05-29 | 2013-11-13 | 浙江工业大学 | 基于介电泳效应的抛光设备 |
CN103433841A (zh) * | 2013-08-01 | 2013-12-11 | 浙江工业大学 | 基于介电泳效应的双平面研磨/抛光圆柱形零件设备 |
CN103551927A (zh) * | 2013-11-11 | 2014-02-05 | 广东工业大学 | 一种电泳辅助超声振动驱动磨粒运动抛光微孔的装置及加工方法 |
CN103909288A (zh) * | 2014-04-04 | 2014-07-09 | 广东工业大学 | 一种电泳辅助超声机械复合微细钻削加工装置 |
CN104440584A (zh) * | 2014-11-04 | 2015-03-25 | 广东工业大学 | 一种磨粒流微孔抛光装置及其抛光工艺 |
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