CN104868771A - Molecular pump frequency converter control system - Google Patents
Molecular pump frequency converter control system Download PDFInfo
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- CN104868771A CN104868771A CN201510155968.6A CN201510155968A CN104868771A CN 104868771 A CN104868771 A CN 104868771A CN 201510155968 A CN201510155968 A CN 201510155968A CN 104868771 A CN104868771 A CN 104868771A
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- molecular pump
- rotating speed
- frequency converter
- control system
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Abstract
The invention provides a molecular pump frequency converter control system comprising a voltage reducing module, a rectification module, an inversion module, a rotating speed tracking module and a DSP control module. The rotating speed tracking module converts UVW three-phase AC electric signals outputted by the inversion module into molecular pump real-time rotating speed. The DSP control module outputs SPWM wave with corresponding frequency to control output voltage of the inversion module according to the molecular pump real-time rotating speed. The rotating speed tracking module is arranged, the molecular pump rotating speed is tacked in real time via the rotating speed tracking module and the output voltage value is adjusted according to the molecular pump rotating speed so that a molecular pump can realize soft start in starting no matter when or what type of state, and thus starting instant charging current can be reduced.
Description
Technical field
The invention belongs to Frequency Converter Control technical field, relate to a kind of molecular pump frequency converter control system.
Background technology
Molecular pump is one of key equipment obtaining high vacuum (HV) and ultra high vacuum (UHV).It is widely used in industrial circle and the research departments such as electronics industry, Surface Engineering, nuclear power industry, plasma technique, film engineering.The displacement pump principle relying on volume-variation to bleed broken away from by turbomolecular pump, but in order to improve compression ratio and pumping speed, its rotating speed is very high, generally between 15000rpm to 90000rpm.
Current molecular pump product generally adopts high-speed AC asynchronous motor to drive, and the rated frequency of motor is between 250-1500Hz, and rated voltage is generally less than 60V.The frequency and voltage of countries in the world common frequency power network power supply is not quite similar, if China is 220V/50Hz, Japan is 110V/60Hz etc., but countries in the world common frequency power network power supply all can not meet the requirement that molecular pump runs, and this just needs RHVC to drive molecular pump.
Frequency-conversion drive apparatus is essentially a special frequency converter; rely on Technics of Power Electronic Conversion technology; power electronic device and circuit thereof is utilized to carry out transformation, unsteady flow and frequency conversion to electrical network input; to reach the electrical energy changer of molecular pump motor input requirements; meanwhile, there is certain protection and controlling functions.Frequency converter is as a kind of frequency conversion speed-adjusting system, and the performance superior by means of it and energy-saving effect, start to play its safety in molecular pump industry, stablize, control actual effect efficiently gradually.
Existing frequency converter starts along with the startup of molecular pump usually, frequency converter export to molecular pump power supply can not along with the actual speed of molecular pump respective change.
Summary of the invention
Technical problem to be solved by this invention is, for the above-mentioned deficiency of prior art, proposes a kind of traceable molecular pump real-time rotate speed, reduces the molecular pump frequency converter control system of inrush current.
The technical scheme that technical solution problem of the present invention adopts proposes a kind of molecular pump frequency converter control system, and it comprises voltage reduction module, rectification module, inversion module, rotating speed tracing module and DSP control module; The UVW three-phase alternating current signal of telecommunication that inversion module exports by described rotating speed tracing module is converted to molecular pump real-time rotate speed; Described DSP control module exports the output voltage of the SPWM ripple control inversion module of corresponding frequencies according to molecular pump real-time rotate speed.
Further, described rotating speed tracing module obtains molecular pump real-time rotate speed in the following way: by UV two phase voltage of the UVW three-phase alternating current signal of telecommunication by exporting the first square-wave signal of reflection UV two-phase voltage difference after operational amplifier Difference Calculation; By VW two phase voltage by exporting the second square-wave signal of reflection VW two-phase voltage difference after operational amplifier Difference Calculation; The high level of the first square-wave signal and the second square-wave signal is counted, draw the output frequency of the first square-wave signal and the second square-wave signal according to high level output number in the unit interval, draw molecular pump rotational frequency according to this output frequency thus calculate molecular pump rotating speed.
Further, 220V alternating current is reduced to 60V alternating current by described voltage reduction module.
Further, 60V alternating current is converted to 85V Rectified alternating current by described rectification module.
Further, also comprise filtration module, Rectified alternating current is filtered into level and smooth direct current by described filtration module.
Further, DC inverter is SPWM ripple equivalent AC electricity and adds dead band and dead area compensation by described inversion module.
Further, current sample module and display module is also comprised; The real-time current value that described current sample module acquires inversion module exports also is shown by display module.
Further, also comprise outside terminal temperature detecting module, described outside terminal temperature detecting module detection molecules pump real time temperature, disconnect molecular pump power source when temperature exceedes set point.
Further, adopt RS485 communications protocol between described display module and DSP control module and add CRC check module.
The present invention is provided with rotating speed tracing module, by rotating speed tracing module real-time tracing molecular pump rotating speed and according to molecular pump adjustment of rotational speed output voltage values make molecular pump no matter when or which kind of state start and all can realize soft start, can reduce to start momentary charge electric current.
Accompanying drawing explanation
Fig. 1 is the control principle block diagram of molecular pump frequency converter control system of the present invention.
Embodiment
Be below specific embodiments of the invention and by reference to the accompanying drawings, technical scheme of the present invention is further described, but the present invention be not limited to these embodiments.
Please refer to Fig. 1, molecular pump frequency converter control system of the present invention, it comprises voltage reduction module 10, rectification module 20, inversion module 30, rotating speed tracing module 40 and DSP control module 50.
Chinese 220V or 380V power-frequency voltage for being the voltage that applicable molecular pump frequency converter uses by common frequency power network voltage transitions, such as, being reduced to 60V, or Japanese 110V power-frequency voltage is reduced to 60V by voltage reduction module 10.
Alternating current after step-down is the DC power supply of pulsation by rectification module 20 rectification.Rectification module 20 can adopt three-phase bridge rectification circuit.
The Voltage pulsating direct-current supply exported through rectification module 20 also can be passed through filtration module 60 and is treated to stable DC power supply.
Stable DC power supply is converted to the AC power of equivalence for molecular pump through inversion module 30.
In the present invention, the IGBT of inversion module controls by DSP control module 50.Also be, the UVW three-phase alternating current that inversion module exports first exports rotating speed tracing module to, rotating speed tracing module draws molecular pump motor real-time rotate speed according to UVW three-phase alternating current, DSP control module 50 exports the SPWM ripple signal of corresponding frequencies to inversion module according to molecular pump real-time rotate speed, makes inversion module export corresponding voltage according to demand.
Rotating speed tracing module obtains molecular pump motor real-time rotate speed in the following way:
By UV two phase voltage of the UVW three-phase alternating current signal of telecommunication by exporting the first square-wave signal of reflection UV two-phase voltage difference after operational amplifier Difference Calculation; By VW two phase voltage by exporting the second square-wave signal of reflection VW two-phase voltage difference after operational amplifier Difference Calculation; The high level of the first square-wave signal and the second square-wave signal is counted, draw the output frequency of the first square-wave signal and the second square-wave signal according to high level output number in the unit interval, draw molecular pump rotational frequency according to this output frequency thus calculate molecular pump rotating speed.
In a preferred embodiment, utilizing program major cycle 2ms execution characteristic once, is that a cycle calculations goes out output frequency with 500 high level period.The relation of one to one is there is in signal output frequency with molecular pump electric machine frequency.
When frequency converter no-output and molecular pump rotating speed is not 0 time, startup moment, frequency converter namely can according to molecular pump real-time rotate speed export corresponding SPWM ripple control inversion module, realize the soft start of molecular pump, can reduce start moment impulse current.
More preferably, inversion module of the present invention also added the ac power waveform more closing to reality alternating current that dead band and dead area compensation make inversion module export.
The present invention is also provided with current sample module 70 and display module 80, current sample module 70.Current sample module 70 is gathered the real-time current value of inversion module output and feeds back to DSP control module and shown by display module 80, and person easy to use checks molecular pump frequency converter instantaneous operating conditions.
Adopt the communication of RS485 communications protocol between DSP control module and display module, be also added with CRC check program simultaneously, make the communication between DSP control module and display module have very strong antijamming capability, go for the operating mode of all kinds of complexity.
More preferably, the present invention is also provided with outside terminal temperature detecting module, described outside terminal temperature detecting module detection molecules pump real time temperature, disconnects molecular pump power source when temperature exceedes set point.Outside terminal temperature detecting module perfectly can protect molecular pump, and the phenomenon preventing molecular pump overheated occurs.
Specific embodiment described herein is only to the explanation for example of the present invention's spirit.Those skilled in the art can make various amendment or supplement or adopt similar mode to substitute to described specific embodiment, but can't depart from spirit of the present invention or surmount the scope that appended claims defines.
Claims (9)
1. a molecular pump frequency converter control system, is characterized in that: comprise voltage reduction module, rectification module, inversion module, rotating speed tracing module and DSP control module; The UVW three-phase alternating current signal of telecommunication that inversion module exports by described rotating speed tracing module is converted to molecular pump real-time rotate speed; Described DSP control module exports the output voltage of the SPWM ripple control inversion module of corresponding frequencies according to molecular pump real-time rotate speed.
2. require the molecular pump frequency converter control system described in 1 according to claim, it is characterized in that: described rotating speed tracing module obtains molecular pump real-time rotate speed in the following way: by UV two phase voltage of the UVW three-phase alternating current signal of telecommunication by exporting the first square-wave signal of reflection UV two-phase voltage difference after operational amplifier Difference Calculation; By VW two phase voltage by exporting the second square-wave signal of reflection VW two-phase voltage difference after operational amplifier Difference Calculation; The high level of the first square-wave signal and the second square-wave signal is counted, draw the output frequency of the first square-wave signal and the second square-wave signal according to high level output number in the unit interval, draw molecular pump rotational frequency according to this output frequency thus calculate molecular pump rotating speed.
3. require the molecular pump frequency converter control system described in 1 according to claim, it is characterized in that: 220V alternating current is reduced to 60V alternating current by described voltage reduction module.
4. require the molecular pump frequency converter control system described in 1 according to claim, it is characterized in that: 60V alternating current is converted to 85V Rectified alternating current by described rectification module.
5. require the molecular pump frequency converter control system described in 1 according to claim, it is characterized in that: also comprise filtration module, Rectified alternating current is filtered into level and smooth direct current by described filtration module.
6. require the molecular pump frequency converter control system described in 1 according to claim, it is characterized in that: DC inverter is SPWM ripple equivalent AC electricity and adds dead band and dead area compensation by described inversion module.
7. require the molecular pump frequency converter control system described in 1 according to claim, it is characterized in that: also comprise current sample module and display module; The real-time current value that described current sample module acquires inversion module exports also is shown by display module.
8. require the molecular pump frequency converter control system described in 1 according to claim, it is characterized in that: also comprise outside terminal temperature detecting module, described outside terminal temperature detecting module detection molecules pump real time temperature, disconnects molecular pump power source when temperature exceedes set point.
9. require the molecular pump frequency converter control system described in 7 according to claim, it is characterized in that: adopt RS485 communications protocol between described display module and DSP control module and add CRC check module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510155968.6A CN104868771A (en) | 2015-04-03 | 2015-04-03 | Molecular pump frequency converter control system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510155968.6A CN104868771A (en) | 2015-04-03 | 2015-04-03 | Molecular pump frequency converter control system |
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| CN104868771A true CN104868771A (en) | 2015-08-26 |
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| CN201510155968.6A Pending CN104868771A (en) | 2015-04-03 | 2015-04-03 | Molecular pump frequency converter control system |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050168897A1 (en) * | 2003-12-05 | 2005-08-04 | Vacon Oyj | Charging of a filter capacitor in the intermediate circuit of a frequency converter |
| CN102790568A (en) * | 2012-08-01 | 2012-11-21 | 北京海斯德电机技术有限公司 | Soft start control system for high-speed brushless DC motor |
| CN203416196U (en) * | 2013-09-09 | 2014-01-29 | 山东新风光电子科技发展有限公司 | Motor rotating speed tracing apparatus |
| CN103916000A (en) * | 2014-03-05 | 2014-07-09 | 深圳市海浦蒙特科技有限公司 | Galloping start control method of frequency converter |
-
2015
- 2015-04-03 CN CN201510155968.6A patent/CN104868771A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050168897A1 (en) * | 2003-12-05 | 2005-08-04 | Vacon Oyj | Charging of a filter capacitor in the intermediate circuit of a frequency converter |
| CN102790568A (en) * | 2012-08-01 | 2012-11-21 | 北京海斯德电机技术有限公司 | Soft start control system for high-speed brushless DC motor |
| CN203416196U (en) * | 2013-09-09 | 2014-01-29 | 山东新风光电子科技发展有限公司 | Motor rotating speed tracing apparatus |
| CN103916000A (en) * | 2014-03-05 | 2014-07-09 | 深圳市海浦蒙特科技有限公司 | Galloping start control method of frequency converter |
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Application publication date: 20150826 |