CN104866162A - Inductance type touch control structure, touch control display device and manufacture method thereof - Google Patents

Inductance type touch control structure, touch control display device and manufacture method thereof Download PDF

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CN104866162A
CN104866162A CN201510323943.2A CN201510323943A CN104866162A CN 104866162 A CN104866162 A CN 104866162A CN 201510323943 A CN201510323943 A CN 201510323943A CN 104866162 A CN104866162 A CN 104866162A
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touch
inductive coil
many
inductive
control
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CN104866162B (en
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徐向阳
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Abstract

The invention provides an inductance type touch control structure, comprising a plurality of first signal lines, a plurality of second signal lines and a plurality of touch control inductive units. The plurality of first signal lines and the plurality of second signal lines intersect in an orthographic projection direction so as to form a plurality of touch control nodes. The plurality of first signal lines and the plurality of second signal lines are electrically connected through the touch control inductive unit at each corresponding touch control node. The touch control inductive unit comprises a plurality of groups of induction coils. The induction coil is used for generating induction current when sensing the closing of a touch control conductor. The first signal lines and the second signal lines are used for collecting the induction current. A touch control position is determined through detection of change of the induction current on the first signal line and the second signal line. The invention also provides a touch control display device and a manufacture method thereof. The inductance type touch control structure has good touch control stability and sensitivity.

Description

Inductive touch control structure, touch control display apparatus and manufacture method thereof
Technical field
The present invention relates to technical field of touch-control display, particularly relate to a kind of inductive touch control structure, a kind of touch control display apparatus of this touch-control structure of application and manufacture method thereof.
Background technology
At present, conventional touch screen has capacitance type touch control screen, resistance type touch control screen, inductive touch control screen etc.Wherein, resistance type touch control screen utilizes pressure sensitive principle to realize operation to screen content and control, when the pressure (as pressed by nib or finger) be subject to when touch screen is surperficial is enough large, then according to voltage divider principle, resistance type touch control screen produces the voltage representing X-coordinate and Y-coordinate, thus locates position of touch.The advantage of resistance type touch control screen is that precision is high, and shortcoming does not support multi-point touch.Capacitance type touch control screen utilizes human body sensing to carry out touch point detection control, do not need directly contact or only need gentle touchdown, locates touch-control coordinate by detecting induction current.The advantage of capacitance type touch control screen supports multi-point touch, and shortcoming is that precision is not high, and easily affected by environment, less stable, cost are higher.
The principle of work of inductive touch control screen is fixing resonance coil in pointer, by the space length changed between pointer and the touch screen being provided with touch control induction circuit, electromagnetic field is changed, the induction current that inductive coil then in described touch control induction circuit produces is also corresponding to change, and then determines touch point position by detecting faradic change.Compare resistance type touch control screen and capacitance type touch control screen, inductive touch control screen has higher penetrability and sensitivity and better stability.Touch control induction circuit is the core component of inductive touch control screen, and the performance of touch control induction circuit is directly connected to sensitivity and the stability of inductive touch control screen.But, in existing inductive touch control screen, touch control induction circuit is when sensing the touch-control action of described pointer relative to touch screen, the induction current that inductive coil produces is less, thus cause when by detecting faradic change and determining touch point position, testing result is easily affected by environment and produce error, is unfavorable for the touch-control stability and the sensitivity that promote inductive touch control screen further.
Summary of the invention
The invention provides a kind of inductive touch control structure, touch-control sensing unit is formed by adopting many group inductive coils, make described touch-control sensing unit sense touch-control conductor near time more enough generations larger induction current, thus make described inductive touch control structure the faradic change that described touch-control sensing unit produces can be detected more delicately, promote touch-control stability and sensitivity.
Separately, the present invention also provides the touch control display apparatus of this inductive touch control structure of a kind of application.
Separately, the present invention also provides the manufacture method of the touch control display apparatus of this inductive touch control structure of a kind of application.
A kind of inductive touch control structure, comprise many first signal wires, many secondary signal lines and multiple touch-control sensing unit, many described first signal wire forms multiple touch-control node with many described secondary signal lines are crossing on orthogonal projection direction, many described first signal wire is electrically connected by described touch-control sensing unit at each corresponding touch-control Nodes with many described secondary signal lines, described touch-control sensing unit comprises organizes inductive coil more, described inductive coil be used for sensed touch-control conductor near time produce induction current, described first signal wire and described secondary signal line are for gathering described induction current, to determine position of touch by the faradic change detected on described first signal wire and described secondary signal line.
Wherein, many described first signal wire is parallel to each other along X-direction and is arranged at intervals at same layer, many described secondary signal line is parallel to each other along Y direction and is arranged at intervals at another layer, and by an insulator separation between many described first signal wires and many described secondary signal lines, described touch-control node surrounding is divided by described first signal wire and described secondary signal line and forms the first induction zone, the second induction zone, the 3rd induction zone and the 4th induction zone.
Wherein, many groups of described inductive coils are semi-enclosed 3/4 rectangular configuration, and coaxially arrange successively centered by described touch-control node, the intersection of many groups of described inductive coils one end separately in described 3rd induction zone and described 4th induction zone and described first signal wire are electrically connected, and the intersection of the described inductive coil of the many groups other end separately in described first induction zone and described 4th induction zone and described secondary signal line are electrically connected.
Wherein, many groups of described inductive coils comprise the first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil, described first inductive coil is near described touch-control Node configuration, and the second inductive coil, described 3rd inductive coil and described 4th inductive coil are successively away from described touch-control Node configuration.
A kind of touch control display apparatus, comprise color membrane substrates and be arranged at the inductive touch control structure on described color membrane substrates, described inductive touch control structure comprises many first signal wires, many secondary signal lines and multiple touch-control sensing unit, many described first signal wire forms multiple touch-control node with many described secondary signal lines are crossing on orthogonal projection direction, many described first signal wire is electrically connected by described touch-control sensing unit at each corresponding touch-control Nodes with many described secondary signal lines, described touch-control sensing unit comprises organizes inductive coil more, described inductive coil be used for sensed touch-control conductor near time produce induction current, described first signal wire and described secondary signal line are for gathering described induction current, to determine position of touch by the faradic change detected on described first signal wire and described secondary signal line.
Wherein, many described first signal wire is parallel to each other along X-direction and is arranged at intervals at same layer, many described secondary signal line is parallel to each other along Y direction and is arranged at intervals at another layer, and by one first insulator separation between many described first signal wires and many described secondary signal lines, described touch-control node surrounding is divided by described first signal wire and described secondary signal line and forms the first induction zone, the second induction zone, the 3rd induction zone and the 4th induction zone.
Wherein, many groups of described inductive coils are semi-enclosed 3/4 rectangular configuration, and coaxially arrange successively centered by described touch-control node, by one second insulator separation between many groups of described inductive coils and many described secondary signal lines, many groups of described inductive coil one end are separately electrically connected by the first via hole and described first signal wire at the intersection of described 3rd induction zone and described 4th induction zone, the many groups of described inductive coils other end is separately electrically connected by the second via hole and described secondary signal line at the intersection of described first induction zone and described 4th induction zone.
Wherein, many groups of described inductive coils comprise the first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil, described first inductive coil is near described touch-control Node configuration, and the second inductive coil, described 3rd inductive coil and described 4th inductive coil are successively away from described touch-control Node configuration.
A manufacture method for touch control display apparatus, comprising:
Color membrane substrates forms conductive film by sputtering sedimentation aluminium, molybdenum or copper, and forms many first signal wires by exposing, developing, etch, peel off processing procedure;
The first insulation course is formed by plasma enhanced chemical vapor deposition method by inorganic insulating material;
Described first insulation course forms conductive film by sputtering sedimentation aluminium, molybdenum or copper, and forms many secondary signal lines by exposing, developing, etch, peel off processing procedure;
The second insulation course is formed by plasma enhanced chemical vapor deposition method by inorganic insulating material;
The position corresponding at described first signal wire forms the first via hole running through described first insulation course and the second insulation course by photoetching, and is formed in the position that described secondary signal line is corresponding the second via hole running through described second insulation course by photoetching;
Described second insulation course forms conductive film by sputtering and depositing tin indium oxide, and form touch-control sensing unit by exposure, development, etching, stripping processing procedure, and one end of described touch-control sensing unit is electrically connected by described first via hole and described first signal wire, the other end of described touch-control sensing unit is electrically connected by described second via hole and described secondary signal line.
Wherein, described method also comprises:
Color membrane substrates forms black matrix by coating, exposure, development; And
Described second insulation course and described touch-control sensing unit form color filter film and chock insulator matter.
Described inductive touch control structure adopts the first inductive coil of described coaxial setting, the second inductive coil, the 3rd inductive coil and the 4th inductive coil to form described touch-control sensing unit, make described touch-control sensing unit sense touch-control conductor near time more enough generations larger induction current, thus make described inductive touch control structure the faradic change that described touch-control sensing unit produces can be detected more delicately, promote touch-control stability and the sensitivity of described touch control display apparatus.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the inductive touch control structural representation that first embodiment of the invention provides.
Fig. 2 is the close-up schematic view of the structure of inductive touch control shown in Fig. 1.
Fig. 3 is the structural representation of the touch control display apparatus that second embodiment of the invention provides.
Fig. 4 is the schematic flow sheet of the manufacture method of the touch control display apparatus that third embodiment of the invention provides.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
For ease of describing, can use such as here " ... under ", " ... below ", D score, " ... on ", " on " etc. space relative terms the relation of an element or feature and another (a bit) element or feature is as illustrated in the drawing described.Be appreciated that, when an element or layer be called as another element or layer " on ", " being connected to " or " being couple to " another element or layer time, it can directly on another element or layer, be directly connected to or be couple to another element or layer, or intervening elements or layer can be there is.On the contrary, when an element be called as on " directly existing " another element or layer, " being directly connected to " or " being directly coupled to " another element or layer time, there is not intervening elements or layer.
Being appreciated that terminology used here is only to describe specific embodiment, not really wanting to limit the present invention.When here using, clearly state unless context separately has, otherwise singulative " " and " being somebody's turn to do " are also intended to comprise plural form.Further, when using in this manual, term " comprises " and/or shows " comprising " existence of described feature, entirety, step, operation, element and/or assembly, but does not get rid of other features one or more, entirety, step, operation, element, the existence of assembly and/or its combination or increase.
Unless otherwise defined, all terms used herein (comprising technical term and scientific terminology) all have the identical meanings that the those of ordinary skill in field belonging to the present invention is understood usually.Will be further understood that, the term defined in such as universaling dictionary, otherwise should be interpreted as having the implication that implication with them in the linguistic context of association area is consistent, and should not be interpreted as idealized or excessive formal meaning, unless so defined clearly at this.
Refer to Fig. 1, first embodiment of the invention provides a kind of inductive touch control structure 100, and it comprises many first signal wires 10, many secondary signal lines 30 and multiple touch-control sensing unit 50.Be specially, many described first signal wires 10 (may be defined as X-direction) in the horizontal direction and are parallel to each other and interval setting, and many described secondary signal lines 30 vertically (may be defined as Y direction) and are parallel to each other and interval setting.Many described first signal wire 10 is positioned at same layer, and many described secondary signal lines 30 are positioned at another layer, and is isolated by an insulation course (not shown) between many described first signal wires 10 and many described secondary signal lines 30.As shown in Figure 1, many described first signal wire 10 forms multiple touch-control node N with many described secondary signal lines 30 are crossing on orthogonal projection direction, that is, each first signal wire 10 is crossing with described secondary signal line 30 thus form multiple touch-control node N in orthogonal projection direction.Touch-control node N place in a correspondence between described first signal wire 10 and described secondary signal line 30 is electrically connected by touch-control sensing unit 50 described in.Described touch-control sensing unit 50 is for producing induction current when having sensed that touch-control conductor (as pointer) is close.The induction current that described first signal wire 10 produces for gathering described touch-control sensing unit 50 with described secondary signal line 30.Described inductive touch control structure 100 changes with the induction current on described secondary signal line 30 by detecting described first signal wire 10, can position described touch-control conductor.
Refer to Fig. 2, Fig. 2 is the partial enlarged drawing of a touch-control sensing unit 50 of the structure of inductive touch control shown in Fig. 1 100.Described touch-control sensing unit 50 part is arranged around described touch-control node N.Described touch-control node N is positioned at by described first signal wire 10 and secondary signal the line 30 crossing and point of intersection of one " ten " character form structure formed on orthogonal projection direction.Each touch-control node N surrounding successively forms first induction zone N1, second induction zone N2, three induction zone N3 and four induction zone N4 with described secondary signal line 30 for boundary line with described first signal wire 10.That is, the surrounding of described touch-control node N is divided by described first signal wire 10 and secondary signal line 30 and forms the first induction zone N1, the second induction zone N2, the 3rd induction zone N3 and the 4th induction zone N4.
Described touch-control sensing unit 50 comprises the first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57.Described first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 all in semi-enclosed 3/4 rectangular configuration, and are coaxially arranged successively from inside to outside centered by described touch-control node N.In other words, described first inductive coil 51 is arranged near described touch-control node N, and the second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 are arranged away from described touch-control node N successively.Between described first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55, the 4th inductive coil 57, there is gap S.Being appreciated that the width by changing described gap S, the loop density of described touch-control sensing unit 50 can be changed, thus change the touch-control sensing performance of touch-control sensing unit 50.Such as, when described gap S reduces, the loop density of described touch-control sensing unit 50 increases, and induction current increases; When described gap S increases, the loop density of described touch-control sensing unit 50 reduces, and induction current reduces.Be appreciated that described first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 can also be other geometric configuratioies, as circle, triangle, rhombus etc.Being appreciated that included by described touch-control sensing unit 50, inductive coil quantity is not limited to four groups, can also be the inductive coil of three groups of inductive coils, five groups of inductive coils, six groups of inductive coils or other quantity.
The respective one end of described first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 is electrically connected at the intersection of described 3rd induction zone N3 and described 4th induction zone N4 and described first signal wire 10, that is, one end that this first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 are respective is electrically connected with the first signal wire 10 surrounding of described touch-control node N being divided into described 3rd induction zone N3 and described 4th induction zone N4.The respective other end of described first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 is electrically connected at the intersection of described first induction zone N1 and described 4th induction zone N4 and described secondary signal line 30, that is, the other end that this first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 are respective is electrically connected with the secondary signal line 30 surrounding of described touch-control node N being divided into described first induction zone N1 and described 4th induction zone N4.When described touch-control sensing unit 50 sensed touch-control conductor near time, described first inductive coil 51, second inductive coil 53, magnetic flux in 3rd inductive coil 55 and the 4th inductive coil 57 changes, and then the first induction current I1 corresponding with described magnetic flux change is produced on described first inductive coil 51, described second inductive coil 53 produces the second induction current I2 corresponding with described magnetic flux change, described 3rd inductive coil 55 produces the three induction current I3 corresponding with described magnetic flux change, described 4th inductive coil 57 produces the four induction current I4 corresponding with described magnetic flux change.Further, on described first signal wire 10, form the first location current I10 after described first induction current I1, the second induction current I2, the 3rd induction current I3 and the 4th induction current I4 superpose mutually, and form the second location current I30 on described secondary signal line 30.
Be appreciated that described first location current I10 is the pulsed current signal that phase place is contrary with described second location current I30.When described touch-control conductor is near described touch-control sensing unit 50, described inductive touch control structure 100 by detecting the change of the first location current I10 on described first signal wire 10 and the second location current I30 on described secondary signal line 30, and then realizes the location to described touch-control conductor.
In an alternative embodiment, isolated by one first insulation course (not shown) between described first signal wire 10 and described secondary signal line 30, isolated by one second insulation course (not shown) between described touch-control sensing unit 50 and described secondary signal line 30, described first inductive coil 51, second inductive coil 53, the first via hole (not shown) of described first insulation course and the second insulation course is run through respectively by one and described first signal wire 10 is electrically connected at the intersection of described 3rd induction zone N3 and described 4th induction zone N4 in one end of 3rd inductive coil 55 and the 4th inductive coil 57, the other end of described first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 runs through the second via hole (not shown) of described second insulation course respectively by one and described secondary signal line 30 is electrically connected at the intersection of described first induction zone N1 and described 4th induction zone N4.
Refer to Fig. 3, second embodiment of the invention provides a kind of touch control display apparatus 200 applying described inductive touch control structure 100.Described touch control display apparatus 200 comprises color membrane substrates 210, black matrix (not shown), the first insulation course (not shown), the second insulation course (not shown), color filter film (not shown) and described inductive touch control structure 100.Wherein, described inductive touch control structure 100 comprises many first signal wires 10, many secondary signal lines 30 and multiple touch-control sensing unit 50.
Described black matrix is formed on described color membrane substrates 210 by coating, exposure, developing manufacture process.Many described first signal wire 10 is positioned at same layer, and it is by metallic films such as sputtering sedimentation aluminium Al, molybdenum Mo, copper Cu, is then formed on described color membrane substrates 210 by exposure, development, etching, stripping processing procedure.Wherein, many described first signal wires 10 (may be defined as X-direction) in the horizontal direction and are parallel to each other and interval is arranged.Described first insulation course by inorganic insulating material (as silicon nitride SiNx) by plasma enhanced chemical vapor deposition method (Plasma Enhanced Chemical Vapor Deposition, PECVD) be formed on described color membrane substrates 210, to cover many described first signal wires 10; Or described first insulation course can also be directly coat the organic transparent insulation material on described color membrane substrates 210, to cover many described first signal wires 10.Many described secondary signal line 30 is positioned at same layer, and it is by metallic films such as sputtering sedimentation aluminium Al, molybdenum Mo, copper Cu, is then formed on described first insulation course by exposure, development, etching, stripping processing procedure.Wherein, many described secondary signal lines 30 vertically (may be defined as Y direction) and are parallel to each other and interval is arranged.By described first insulator separation between many described first signal wires 10 and many described secondary signal lines 30, and many described first signal wires 10 form multiple touch-control node N with many described secondary signal lines 30 are crossing on orthogonal projection direction, that is, each first signal wire 10 is crossing with described secondary signal line 30 thus form multiple touch-control node N in orthogonal projection direction.Described second insulation course by inorganic insulating material (as silicon nitride SiNx) by PECVD deposit be formed at as described on the first insulation course, to cover many described secondary signal lines 30; Or described second insulation course can also be directly coat the organic transparent insulation material on described first insulation course, to cover many described secondary signal lines 30.
Described touch-control sensing unit 50, by transparent conductive films such as sputtering and depositing tin indium oxides (Indium-Tin Oxide, ITO), is then formed on described second insulation course by exposure, development, etching, stripping processing procedure.Described touch-control sensing unit 50 is electrically connected by the first via hole H1 and described first signal wire 10 running through described first insulation course and the second insulation course, and is electrically connected by the second via hole H2 and described secondary signal line 30 running through described second insulation course.Described color filter film is arranged on described touch-control sensing unit 50.
Particularly, described touch-control sensing unit 50 comprises the first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57.Described first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 all in semi-enclosed 3/4 rectangular configuration, and are coaxially arranged successively from inside to outside centered by described touch-control node N.That is, described first inductive coil 51 is arranged near described touch-control node N, and the second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 are arranged away from described touch-control node N successively.Between described first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55, the 4th inductive coil 57, there is gap S.Being appreciated that the width by changing described gap S, the loop density of described touch-control sensing unit 50 can be changed, thus change the touch-control sensing performance of touch-control sensing unit 50.Such as, when described gap S reduces, the loop density of described touch-control sensing unit 50 increases, and induction current increases; When described gap S increases, the loop density of described touch-control sensing unit 50 reduces, and induction current reduces.Be appreciated that described first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 can also be other geometric configuratioies, as circle, triangle, rhombus etc.Being appreciated that included by described touch-control sensing unit 50, inductive coil quantity is not limited to four groups, can also be the inductive coil of three groups of inductive coils, five groups of inductive coils, six groups of inductive coils or other quantity.
Described touch-control node N is positioned at by described first signal wire 10 and secondary signal the line 30 crossing and point of intersection of one " ten " character form structure formed on orthogonal projection direction.Touch-control node N surrounding described in each successively forms first induction zone N1, second induction zone N2, three induction zone N3 and four induction zone N4 with described secondary signal line 30 for boundary line with described first signal wire 10.The respective one end of described first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 is electrically connected by described first via hole H1 and described first signal wire 10 at the intersection of described 3rd induction zone N3 and described 4th induction zone N4, that is, one end that this first inductive coil 51, second inductive coil 53, the 3rd inductive coil 55 and the 4th inductive coil 57 are respective is electrically connected by described first via hole H1 and the first signal wire 10 surrounding of described touch-control node N being divided into described 3rd induction zone N3 and described 4th induction zone N4.Described first inductive coil 51, second inductive coil 53, 3rd inductive coil 55 and the respective other end of the 4th inductive coil 57 are electrically connected by described second via hole H2 and described secondary signal line 30 at the intersection of described first induction zone N1 and described 4th induction zone N4, namely, this first inductive coil 51, second inductive coil 53, 3rd inductive coil 55 and the respective other end of the 4th inductive coil 57 are electrically connected by described second via hole H2 and the secondary signal line 30 surrounding of described touch-control node N being divided into described first induction zone N1 and described 4th induction zone N4.
Described touch-control sensing unit 50 is for producing induction current when having sensed that touch-control conductor (as pointer) is close.The induction current that described first signal wire 10 produces for gathering described touch-control sensing unit 50 with described secondary signal line 30.Described inductive touch control structure 100 changes with the induction current on described secondary signal line 30 by detecting described first signal wire 10, can position described touch-control conductor.
Particularly, when described touch-control sensing unit 50 sensed touch-control conductor near time, described first inductive coil 51, second inductive coil 53, magnetic flux in 3rd inductive coil 55 and the 4th inductive coil 57 changes, and then the first induction current I1 corresponding with described magnetic flux change is produced on described first inductive coil 51, described second inductive coil 53 produces the second induction current I2 corresponding with described magnetic flux change, described 3rd inductive coil 55 produces the three induction current I3 corresponding with described magnetic flux change, described 4th inductive coil 57 produces the four induction current I4 corresponding with described magnetic flux change.Further, on described first signal wire 10, form the first location current I10 after described first induction current I1, the second induction current I2, the 3rd induction current I3 and the 4th induction current I4 superpose mutually, and form the second location current I30 on described secondary signal line 30.Be appreciated that described first location current I10 is the pulsed current signal that phase place is contrary with described second location current I30.When described touch-control conductor is near described touch-control sensing unit 50, described inductive touch control structure 100 by detecting the change of the first location current I10 on described first signal wire 10 and the second location current I30 on described secondary signal line 30, and then realizes the location to described touch-control conductor.
Refer to Fig. 4, third embodiment of the invention provides a kind of manufacture method of touch control display apparatus, and the method comprises:
Step S401: form black matrix by coating, exposure, development on color membrane substrates.
Step S402: form conductive film by sputtering sedimentation aluminium Al, molybdenum Mo or copper Cu on the described color membrane substrates of completing steps S401, then forms many first signal wires by exposing, developing, etch, peel off processing procedure.Wherein, many described first signal wires (may be defined as X-direction) in the horizontal direction and are parallel to each other and interval is arranged.
Step S403: on the described color membrane substrates of completing steps S402 by inorganic insulating material (as silicon nitride SiNx) by plasma enhanced chemical vapor deposition method (Plasma Enhanced Chemical VaporDeposition, PECVD) form the first insulation course, or directly the organic transparent insulation material of coating one deck forms the first insulation course.
Step S404: form conductive film by sputtering sedimentation aluminium Al, molybdenum Mo or copper Cu on described first insulation course, then forms many secondary signal lines by exposing, developing, etch, peel off processing procedure.Wherein, many described secondary signal lines vertically (may be defined as Y direction) and are parallel to each other and interval setting, by described first insulator separation between many described first signal wires and many described secondary signal lines, and many described first signal wires form multiple touch-control node with many described secondary signal lines are crossing on orthogonal projection direction.
Step S405: form the second insulation course by inorganic insulating material (as silicon nitride SiNx) by PECVD deposition on described first insulation course of completing steps S404, or directly the organic transparent insulation material of coating one deck forms the second insulation course.
Step S406: the position corresponding at described first signal wire forms the first via hole running through described first insulation course and the second insulation course by photoetching, and formed in the position that described secondary signal line is corresponding the second via hole running through described second insulation course by photoetching.
Step S407: form transparent conductive film by sputtering and depositing tin indium oxide (Indium-Tin Oxide, ITO) on described second insulation course, and form touch-control sensing unit by exposing, developing, etch, peel off processing procedure.And described touch-control sensing unit one end is electrically connected by described first via hole and described first signal wire, the other end of described touch-control sensing unit is electrically connected by described second via hole and described secondary signal line.
Step S408: form color filter film and chock insulator matter (Photo Space, PS) on described second insulation course of completing steps S407.
Wherein, described touch-control sensing unit comprises the first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil.Described first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil all in semi-enclosed 3/4 rectangular configuration, and are coaxially arranged successively from inside to outside centered by described touch-control node.In other words, described first inductive coil is near described touch-control Node configuration, and the second inductive coil, the 3rd inductive coil and the 4th inductive coil are successively away from described touch-control Node configuration.Between described first inductive coil, the second inductive coil, the 3rd inductive coil, the 4th inductive coil, there is gap.Being appreciated that the width by changing described gap, the loop density of described touch-control sensing unit can be changed, thus change the touch-control sensing performance of touch-control sensing unit.Such as, when described gap reduces, the loop density of described touch-control sensing unit increases, and induction current increases; When described gap increases, the loop density of described touch-control sensing unit reduces, and induction current reduces.Be appreciated that described first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil can also be other geometric configuratioies, as circle, triangle, rhombus etc.Being appreciated that included by described touch-control sensing unit, inductive coil quantity is not limited to four groups, can also be the inductive coil of three groups of inductive coils, five groups of inductive coils, six groups of inductive coils or other quantity.
Described touch-control node is positioned at by described first signal wire and secondary signal the line crossing and point of intersection of one " ten " character form structure formed on orthogonal projection direction.Described touch-control node surrounding with described first signal wire and described secondary signal line for boundary line forms the first induction zone, the second induction zone, the 3rd induction zone and the 4th induction zone successively.Described first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil one end are separately electrically connected by described first via hole and described first signal wire at the intersection of described 3rd induction zone and described 4th induction zone, that is, this first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil one end are separately electrically connected by described first via hole and the first signal wire surrounding of described touch-control node being divided into described 3rd induction zone and described 4th induction zone.Described first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil other end are separately electrically connected by described second via hole and described secondary signal line at the intersection of described first induction zone and described 4th induction zone, that is, this first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil other end are separately electrically connected by described second via hole and the secondary signal line surrounding of described touch-control node being divided into described first induction zone and described 4th induction zone.Described first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil are used for producing induction current when having sensed that touch-control conductor (as pointer) is close.The induction current that described first signal wire and described secondary signal line produce for gathering described first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil.Changed by the induction current detected on described first signal wire and described secondary signal line, can position described touch-control conductor.
Described inductive touch control structure adopts the first inductive coil of described coaxial setting, the second inductive coil, the 3rd inductive coil and the 4th inductive coil to form described touch-control sensing unit, make described touch-control sensing unit sense touch-control conductor near time more enough generations larger induction current, thus make described inductive touch control structure the faradic change that described touch-control sensing unit produces can be detected more delicately, promote touch-control stability and the sensitivity of described touch control display apparatus.
Above disclosedly be only preferred embodiment of the present invention, certainly the interest field of the present invention can not be limited with this, one of ordinary skill in the art will appreciate that all or part of flow process realizing above-described embodiment, and according to the equivalent variations that the claims in the present invention are done, still belong to the scope that invention is contained.

Claims (10)

1. an inductive touch control structure, comprise many first signal wires and many secondary signal lines, it is characterized in that, described inductive touch control structure also comprises multiple touch-control sensing unit, many described first signal wire forms multiple touch-control node with many described secondary signal lines are crossing on orthogonal projection direction, many described first signal wire is electrically connected by described touch-control sensing unit at each corresponding touch-control Nodes with many described secondary signal lines, described touch-control sensing unit comprises organizes inductive coil more, described inductive coil be used for sensed touch-control conductor near time produce induction current, described first signal wire and described secondary signal line are for gathering described induction current, to determine position of touch by the faradic change detected on described first signal wire and described secondary signal line.
2. inductive touch control structure as claimed in claim 1, it is characterized in that, many described first signal wire is parallel to each other along X-direction and is arranged at intervals at same layer, many described secondary signal line is parallel to each other along Y direction and is arranged at intervals at another layer, and by an insulator separation between many described first signal wires and many described secondary signal lines, described touch-control node surrounding is divided by described first signal wire and described secondary signal line and forms the first induction zone, the second induction zone, the 3rd induction zone and the 4th induction zone.
3. inductive touch control structure as claimed in claim 2, it is characterized in that, many groups of described inductive coils are semi-enclosed 3/4 rectangular configuration, and coaxially arrange successively centered by described touch-control node, the intersection of many groups of described inductive coils one end separately in described 3rd induction zone and described 4th induction zone and described first signal wire are electrically connected, and the intersection of the described inductive coil of the many groups other end separately in described first induction zone and described 4th induction zone and described secondary signal line are electrically connected.
4. inductive touch control structure as claimed in claim 3, it is characterized in that, many groups of described inductive coils comprise the first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil, described first inductive coil is near described touch-control Node configuration, and the second inductive coil, described 3rd inductive coil and described 4th inductive coil are successively away from described touch-control Node configuration.
5. a touch control display apparatus, comprise color membrane substrates, it is characterized in that, described touch control display apparatus also comprises the inductive touch control structure be arranged on described color membrane substrates, described inductive touch control structure comprises many first signal wires, many secondary signal lines and multiple touch-control sensing unit, many described first signal wire forms multiple touch-control node with many described secondary signal lines are crossing on orthogonal projection direction, many described first signal wire is electrically connected by described touch-control sensing unit at each corresponding touch-control Nodes with many described secondary signal lines, described touch-control sensing unit comprises organizes inductive coil more, described inductive coil be used for sensed touch-control conductor near time produce induction current, described first signal wire and described secondary signal line are for gathering described induction current, to determine position of touch by the faradic change detected on described first signal wire and described secondary signal line.
6. touch control display apparatus as claimed in claim 5, it is characterized in that, many described first signal wire is parallel to each other along X-direction and is arranged at intervals at same layer, many described secondary signal line is parallel to each other along Y direction and is arranged at intervals at another layer, and by one first insulator separation between many described first signal wires and many described secondary signal lines, described touch-control node surrounding is divided by described first signal wire and described secondary signal line and forms the first induction zone, the second induction zone, the 3rd induction zone and the 4th induction zone.
7. touch control display apparatus as claimed in claim 6, it is characterized in that, many groups of described inductive coils are semi-enclosed 3/4 rectangular configuration, and coaxially arrange successively centered by described touch-control node, by one second insulator separation between many groups of described inductive coils and many described secondary signal lines, many groups of described inductive coil one end are separately electrically connected by the first via hole and described first signal wire at the intersection of described 3rd induction zone and described 4th induction zone, the many groups of described inductive coils other end is separately electrically connected by the second via hole and described secondary signal line at the intersection of described first induction zone and described 4th induction zone.
8. touch control display apparatus as claimed in claim 7, it is characterized in that, many groups of described inductive coils comprise the first inductive coil, the second inductive coil, the 3rd inductive coil and the 4th inductive coil, described first inductive coil is near described touch-control Node configuration, and the second inductive coil, described 3rd inductive coil and described 4th inductive coil are successively away from described touch-control Node configuration.
9. a manufacture method for the touch control display apparatus as described in claim 5-8 any one, is characterized in that, described method comprises:
Color membrane substrates forms conductive film by sputtering sedimentation aluminium, molybdenum or copper, and forms many first signal wires by exposing, developing, etch, peel off processing procedure;
The first insulation course is formed by plasma enhanced chemical vapor deposition method by inorganic insulating material;
Described first insulation course forms conductive film by sputtering sedimentation aluminium, molybdenum or copper, and forms many secondary signal lines by exposing, developing, etch, peel off processing procedure;
The second insulation course is formed by plasma enhanced chemical vapor deposition method by inorganic insulating material;
The position corresponding at described first signal wire forms the first via hole running through described first insulation course and the second insulation course by photoetching, and is formed in the position that described secondary signal line is corresponding the second via hole running through described second insulation course by photoetching;
Described second insulation course forms conductive film by sputtering and depositing tin indium oxide, and form touch-control sensing unit by exposure, development, etching, stripping processing procedure, and one end of described touch-control sensing unit is electrically connected by described first via hole and described first signal wire, the other end of described touch-control sensing unit is electrically connected by described second via hole and described secondary signal line.
10. the manufacture method of touch control display apparatus as claimed in claim 9, it is characterized in that, described method also comprises:
Color membrane substrates forms black matrix by coating, exposure, development; And
Described second insulation course and described touch-control sensing unit form color filter film and chock insulator matter.
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