CN104860972A - Preparation method of high-purity trimethyl indium - Google Patents

Preparation method of high-purity trimethyl indium Download PDF

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Publication number
CN104860972A
CN104860972A CN201510239288.2A CN201510239288A CN104860972A CN 104860972 A CN104860972 A CN 104860972A CN 201510239288 A CN201510239288 A CN 201510239288A CN 104860972 A CN104860972 A CN 104860972A
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trimethyl indium
purity
preparation
chromatography column
crude product
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CN104860972B (en
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顾宏伟
茅嘉原
李敏
王士峰
洪海燕
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SUZHOU PUYAO PHOTOELECTRIC MATERIAL CO Ltd
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SUZHOU PUYAO PHOTOELECTRIC MATERIAL CO Ltd
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    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00Compounds containing elements of Groups 3 or 13 of the Periodic Table

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Abstract

The invention relates to a preparation method of high-purity trimethyl indium, belonging to the technical field of preparing group III metallic compounds in the periodic table of elements. The preparation method disclosed by the invention comprises the following steps: (1) taking diethyl ether as a solvent to prepare a trimethyl indium crude product; (2) carrying out purification to the trimethyl indium crude product obtained in step (1), wherein the purification method comprises the step of adopting a first chromatographic column to carry out purification to the trimethyl indium crude product; and the stationary phase adopted by the first chromatographic column is grafted silica, and the grafted silica is silica of which the surface is grafted with tri-n-octylamine. The preparation method disclosed by the invention adopts the two steps of synthesis and separation and obtains the trimethyl indium of which the purity can reach 6N; above all, the purity method adopted is combined with the solid-liquid separation means, a certain coordination agent is loaded on the silica, not only is the operation simple, but also the purification effect is improved further.

Description

The preparation method of high-purity trimethyl indium
Technical field
The invention belongs to technical field prepared by the periodic table of elements the IIIth race's metallic compound, in particular, the present invention relates to a kind of preparation method of high-purity trimethyl indium.
Background technology
High-purity trimethyl indium is widely used in growing semiconductor thin-film material, is the important source material of grow light electronic material in metal organic chemical vapor deposition technology (MOCVD), chemical beam epitaxy (CBE) process.In order to meet photoelectron material high purity, (trimethyl indium that purity is inadequate can have a huge impact the performance of chip high-precision specification of quality, very large infringement is also had to MOCVD device), require that the purity of high-purity trimethyl indium reaches 99.9999%, otherwise just need to purify further.
Chinese invention patent application CN102020668A discloses a kind of method of preparation of industrialization trimethyl indium, in the reactor being full of rare gas element, drop into indium-magnesium alloy raw material, under ether, tetrahydrofuran (THF) or methyltetrahydrofuran exist, progressively add haloalkane (monobromethane or methyl iodide) under agitation, solvent refluxing speed is controlled by the rate of addition controlling haloalkane, after having reacted, solvent is steamed, obtain the title complex of trimethyl indium and ether more at reduced pressure conditions, finally solution is joined and is obtained trimethyl indium.The mode that the method adopts reactor to be separated with evaporating kettle, unreacted alloy still continues reaction in a kettle., and overall yield is close to 95%, and by product can be recycled, and does not almost have waste material; And there is no spontaneous combustible substance due to the raw material adopted in reaction process, reaction process safety, is particularly suitable for large-scale industrial production.
Trimethyl indium is due to the restriction of preparation technology, itself and reaction solvent is made to be difficult to be separated, existing mode selects the coordination agents such as ethers to carry out coordination, then under intensification and vacuum condition, low boiling point solvent is removed, and then under elevated temperature in vacuo, solution is joined and is obtained crude product, then obtains high purity product again through rectifying.It is liquid that major part coordination agent all belongs to macromole high boiling point, and viscosity is higher, and small molecules lower-boiling impurity is easily wrapped in inside macromole high boiling point coordination agent, is not easy to be divided, and purity generally only can reach 95.0 ~ 99.0%.Prior art is the purity ensureing trimethyl indium on the other hand, can select to abandon a part of trimethyl indium, allow it be taken out of in the lump with lower-boiling impurity, but due to trimethyl indium self character, the danger causing this portion to work is comparatively large, and not easy to operate, difficulty is higher.
Summary of the invention
In order to solve above-mentioned technical problem of the prior art, the object of the present invention is to provide preparation method of a kind of high-purity trimethyl indium and preparation method thereof.
To achieve these goals, present invention employs following technical scheme:
A preparation method for high-purity trimethyl indium, is characterized in that comprising the following steps: comprise the following steps: (1) take ether as solvent, prepares trimethyl indium crude product; (2) carry out purifying to the trimethyl indium crude product that step (1) obtains, described purification process comprises employing first chromatography column carries out purifying step to described trimethyl indium crude product; And the stationary phase that described first chromatography column adopts is grafted silica, and described grafted silica is the silicon-dioxide that surface grafting has tri-n-octyl amine; The operation of described purifying is as follows: (2.1) pour stationary phase into trimethyl indium is in the second chromatography column of silicon-dioxide, relies on gravity naturally dirty, treats that liquid stream is complete, collect solution; (2.2) solution of collection is poured in the first chromatography column, rely on gravity naturally dirty, treat the complete collection solution of liquid stream; Again the solution collected is poured in the first chromatography column again, repetitive operation 2 ~ 5 times; (2.3) 100 DEG C and add pyrolysis under being less than the temperature condition of 120 DEG C and join are being greater than to the first chromatography column after (2.2) process, and bottom chromatography column, are vacuumizing the trimethyl indium collected and can obtain purifying.
Wherein, the purity of described trimethyl indium is 80.0 ~ 85.0%.
Wherein, described trimethyl indium crude product is obtained by any one of following reaction (1) ~ (4):
CH 3mgX+InX 3→ In (CH 3) 3+ MgX 2, X is I or Br (1)
CH 3x+In+Mg → In (CH 3) 3+ MgX 2+ CH 3mgX, X are I or Br (2)
CH 3x+In+Li → In (CH 3) 3+ Li X, X are I or Br (3)
CH 3li+InX 3→ In (CH 3) 3+ Li X, X are I or Br (4)
Wherein, described grafted silica prepares by the following method: first utilize aminosilane to carry out surface treatment to silicon-dioxide, and then grafting tri-n-octyl amine.
Wherein, described grafted silica prepares by the following method: be scattered in by silica-gel powder in acidic solution, 10 ~ 20h is stirred at 60 ~ 120 DEG C, be cooled to 40 ~ 60 DEG C, add aminosilane and continue stirring 10 ~ 20h, then add tri-n-octyl amine, stir 4 ~ 8h, filtration can obtain grafted silica.
Wherein, the mass ratio of described silica-gel powder, aminosilane and tri-n-octyl amine is: 100:3 ~ 6:8 ~ 12.
Wherein, described aminosilane is selected from least one in γ-aminopropyl triethoxysilane, γ-aminopropyltrimethoxysilane, phenylaminomethyl triethoxyl silane, phenylaminomethyl Trimethoxy silane, N-β (aminoethyl)-γ-aminopropyl triethoxysilane, N-β (aminoethyl)-γ-aminopropyltrimethoxysilane or N-β (aminoethyl)-γ-aminopropyltriethoxy diethoxy silane, is preferably γ-aminopropyl triethoxysilane.
Compared with prior art, the preparation method of high-purity trimethyl indium of the present invention has following beneficial effect:
Preparation method of the present invention adopts synthesis and is separated two steps and obtains the trimethyl indium that purity can reach 6N; Especially the purification process adopted combines the means of solid-liquid separation, by specific coordination agent load on silica, not only simple to operate, and further increases purification effect.
Embodiment
Below with reference to specific embodiment, the preparation method to high-purity trimethyl indium of the present invention is further elaborated, to make more complete explanation to inventive concept of the present invention and effect thereof.
Embodiment 1
Be that to be scattered in concentration be in the aqueous hydrochloric acid of 1mol/L to 1000 object silica-gel powders by 100g particle diameter, acidification 15h under the condition of 80 DEG C, be cooled to 40 DEG C, add 5g γ-aminopropyl triethoxysilane to continue to stir 12h, then 10g tri-n-octyl amine is added, stir 8h, after filtration, can grafted silica be obtained.Loaded by the grafted silica obtained in chromatography column (internal diameter is 10mm), pressurization ensures to fill evenly, then adds normal hexane and rinses, can obtain the first chromatography column after rinsing well.Be that 400 object silica-gel powders load in chromatography column (internal diameter is 10mm) by 100g particle diameter, pressurization ensures to fill evenly, can obtain the second chromatography column.
Embodiment 2
With CH 3mgX and InX 3(X is I or Br) is raw material, is solvent with ether, through slightly raising the trimethyl indium that purity is 85.0% after building-up reactions.The purification operations comprised the following steps is carried out with this trimethyl indium crude product.
Step 2.1: this trimethyl indium is poured in the second chromatography column prepared by embodiment 1, relies on gravity naturally dirty, treats that liquid stream is complete, collection solution.
Step 2.2: solution step 2.1 collected all is poured in the first chromatography column prepared by embodiment 1, relies on gravity naturally dirty, treats the complete collection solution of liquid stream; Again the solution collected all is poured in this first chromatography column, the aforementioned operation of repeating step 26 times;
Step 2.3: add pyrolysis to the first chromatography column after step 2.2 processes and join, Heating temperature is 105 DEG C, and is power with vacuum pump evacuation bottom chromatography column, collects the trimethyl indium that solution is joined.
ICP-OES and NMR analysis is carried out to the trimethyl indium that step 2.3 obtains, can confirm that the purity of the trimethyl indium collected is 99.9999% (6N).
Embodiment 3
With haloalkane CH 3x (X is I or Br), indium and magnesium are raw material, are solvent with ether, through slightly raising the trimethyl indium that purity is 85.0% after building-up reactions.The purification operations comprised the following steps is carried out with this trimethyl indium crude product.
Step 2.1: this trimethyl indium is poured in the second chromatography column prepared by embodiment 1, relies on gravity naturally dirty, treats that liquid stream is complete, collection solution.
Step 2.2: solution step 2.1 collected all is poured in the first chromatography column prepared by embodiment 1, relies on gravity naturally dirty, treats the complete collection solution of liquid stream; Again the solution collected all is poured in this first chromatography column, the aforementioned operation of repeating step 26 times;
Step 2.3: add pyrolysis to the first chromatography column after step 2.2 processes and join, Heating temperature is 115 DEG C, and is power with vacuum pump evacuation bottom chromatography column, collects the trimethyl indium that solution is joined.
ICP-OES and NMR analysis is carried out to the trimethyl indium that step 2.3 obtains, can confirm that the purity of the trimethyl indium collected is 99.9999% (6N).
Embodiment 4
With CH 3li and InX 3(X is I or Br) is raw material, is solvent with ether, through slightly raising the trimethyl indium that purity is 85.0% after building-up reactions.The purification operations comprised the following steps is carried out with this trimethyl indium crude product.
Step 2.1: this trimethyl indium is poured in the second chromatography column prepared by embodiment 1, relies on gravity naturally dirty, treats that liquid stream is complete, collection solution.
Step 2.2: solution step 2.1 collected all is poured in the first chromatography column prepared by embodiment 1, relies on gravity naturally dirty, treats the complete collection solution of liquid stream; Again the solution collected all is poured in this first chromatography column, the aforementioned operation of repeating step 26 times;
Step 2.3: add pyrolysis to the first chromatography column after step 2.2 processes and join, Heating temperature is 105 DEG C, and is power with vacuum pump evacuation bottom chromatography column, collects the trimethyl indium that solution is joined.
ICP-OES and NMR analysis is carried out to the trimethyl indium that step 2.3 obtains, can confirm that the purity of the trimethyl indium collected is 99.9999% (6N).
Embodiment 5
With haloalkane CH 3x (X is I or Br), indium and lithium are raw material, are solvent with ether, through slightly raising the trimethyl indium that purity is 85.0% after building-up reactions.The purification operations comprised the following steps is carried out with this trimethyl indium crude product.
Step 2.1: this trimethyl indium is poured in the second chromatography column prepared by embodiment 1, relies on gravity naturally dirty, treats that liquid stream is complete, collection solution.
Step 2.2: solution step 2.1 collected all is poured in the first chromatography column prepared by embodiment 1, relies on gravity naturally dirty, treats the complete collection solution of liquid stream; Again the solution collected all is poured in this first chromatography column, the aforementioned operation of repeating step 26 times;
Step 2.3: add pyrolysis to the first chromatography column after step 2.2 processes and join, Heating temperature is 115 DEG C, and is power with vacuum pump evacuation bottom chromatography column, collects the trimethyl indium that solution is joined.
ICP-OES and NMR analysis is carried out to the trimethyl indium that step 2.3 obtains, can confirm that the purity of the trimethyl indium collected is 99.9999% (6N).
Comparative example
Chromatography column is made with the tri-n-octyl amine of Di-n-Butyl Amine, tripropyl amine alternate embodiment 1, adopt the purification operations of embodiment, analyze through ICP-OES and NMR and find, not only can not remove ether wherein or methyl-tetrahydrofuran solvent, and metallic impurity ion, but also Di-n-Butyl Amine and tripropyl amine can be introduced.
For the ordinary skill in the art; specific embodiment is just to invention has been exemplary description; specific implementation of the present invention is not subject to the restrictions described above; as long as have employed the improvement of the various unsubstantialities that method of the present invention is conceived and technical scheme is carried out; or design of the present invention and technical scheme directly applied to other occasion, all within protection scope of the present invention without to improve.

Claims (7)

1. a preparation method for high-purity trimethyl indium, is characterized in that: comprise the following steps: (1) is solvent with ether, prepares trimethyl indium crude product; (2) carry out purifying to the trimethyl indium crude product that step (1) obtains, described purification process comprises employing first chromatography column carries out purifying step to described trimethyl indium crude product; And the stationary phase that described first chromatography column adopts is grafted silica, and described grafted silica is the silicon-dioxide that surface grafting has tri-n-octyl amine; The operation of described purifying is as follows: (2.1) pour stationary phase into trimethyl indium is in the second chromatography column of silicon-dioxide, relies on gravity naturally dirty, treats that liquid stream is complete, collect solution; (2.2) solution of collection is poured in the first chromatography column, rely on gravity naturally dirty, treat the complete collection solution of liquid stream; Again the solution collected is poured in the first chromatography column again, repetitive operation 3 ~ 6 times; (2.3) 100 DEG C and add pyrolysis under being less than the temperature condition of 120 DEG C and join are being greater than to the first chromatography column after (2.2) process, and bottom chromatography column, are vacuumizing the trimethyl indium collected and can obtain purifying.
2. the preparation method of high-purity trimethyl indium according to claim 1, is characterized in that: the purity of described trimethyl indium crude product is 80.0 ~ 85.0%.
3. the preparation method of high-purity trimethyl indium according to claim 1, is characterized in that: described trimethyl indium crude product is obtained by any one of following reaction (1) ~ (4):
CH 3mgX+InX 3→ In (CH 3) 3+ MgX 2, X is I or Br (1)
CH 3x+In+Mg → In (CH 3) 3+ MgX 2+ CH 3mgX, X are I or Br (2)
CH 3x+In+Li → In (CH 3) 3+ Li X, X are I or Br (3)
CH 3li+InX 3→ In (CH 3) 3+ Li X, X are I or Br (4).
4. the preparation method of high-purity trimethyl indium according to claim 1, is characterized in that: described grafted silica prepares by the following method: first utilize aminosilane to carry out surface treatment to silicon-dioxide, and then grafting tri-n-octyl amine.
5. the preparation method of high-purity trimethyl indium according to claim 1, it is characterized in that: described grafted silica prepares by the following method: described grafted silica prepares by the following method: silica-gel powder is scattered in acidic solution, 10 ~ 20h is stirred at 60 ~ 120 DEG C, be cooled to 40 ~ 60 DEG C, add aminosilane and continue stirring 10 ~ 20h, then add tri-n-octyl amine, stir 4 ~ 8h, filtration can obtain grafted silica.
6. the preparation method of high-purity trimethyl indium according to claim 5, is characterized in that: the mass ratio of described silica-gel powder, aminosilane and tri-n-octyl amine is: 100:3 ~ 6:8 ~ 12.
7. the preparation method of high-purity trimethyl indium according to claim 4, it is characterized in that: described aminosilane is selected from least one in γ-aminopropyl triethoxysilane, γ-aminopropyltrimethoxysilane, phenylaminomethyl triethoxyl silane, phenylaminomethyl Trimethoxy silane, N-β (aminoethyl)-γ-aminopropyl triethoxysilane, N-β (aminoethyl)-γ-aminopropyltrimethoxysilane or N-β (aminoethyl)-γ-aminopropyltriethoxy diethoxy silane, be preferably γ-aminopropyl triethoxysilane.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103145745A (en) * 2013-03-06 2013-06-12 江苏南大光电材料股份有限公司 Method for industrially preparing high-purity metal organic compound
CN103849165A (en) * 2012-11-28 2014-06-11 中国科学院化学研究所 Functionalized nanometer silica with ultraviolet ray absorption function group grafted on surface, and preparation method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103849165A (en) * 2012-11-28 2014-06-11 中国科学院化学研究所 Functionalized nanometer silica with ultraviolet ray absorption function group grafted on surface, and preparation method thereof
CN103145745A (en) * 2013-03-06 2013-06-12 江苏南大光电材料股份有限公司 Method for industrially preparing high-purity metal organic compound

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