CN104834085B - MEMS light valve and preparation method thereof and display device - Google Patents
MEMS light valve and preparation method thereof and display device Download PDFInfo
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- CN104834085B CN104834085B CN201510290290.2A CN201510290290A CN104834085B CN 104834085 B CN104834085 B CN 104834085B CN 201510290290 A CN201510290290 A CN 201510290290A CN 104834085 B CN104834085 B CN 104834085B
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- removable slit
- mems light
- light valves
- articulamentum
- column structure
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Abstract
The invention provides an MEMS light valve and a preparation method thereof and a display device. The MEMS light valve comprises a substrate, fixed gratings and a movable grating, wherein the fixed gratings are arranged on the surface of the substrate, and the movable grating is opposite to the fixed gratings, and sleeves a cylindrical structure at the surface of the substrate via a hole in the movable grating. The surface of the cylindrical structure is provided with a connecting layer, and the connecting layer is arranged on the surface of the movable grating so that the movable grating is fixedly connected with the cylindrical structure. According to the provided MEMS light valve, the surface of the cylindrical structure which sleeves the movable grating is provided with the connecting layer, and the connecting layer is arranged on the surface of the movable grating, so that the movable grating is fixedly connected with the cylindrical structure, and the movable grating is prevented from falloff.
Description
Technical field
The present invention relates to display field, more particularly to a kind of MEMS light valves and preparation method thereof, display device.
Background technology
At present, micro-electromechanical switch (MEMS：Micro-Electro-Mechanical Systems) technology is used as following aobvious
The developing direction shown, it has incomparable advantage in terms of power consumption with respect to LCD, aobvious what is realized using MEMS technology
In showing device, it utilizes MEMS light valves to replace liquid crystal layer, and by MEMS light valves the light transmittance of the light that backlight sends is controlled, so as to
Realize the display of image.
Fig. 1 is a kind of structural representation of MEMS light valves of the prior art, and it includes being fixed on consolidating on substrate 100 '
The removable slit 300 ' determined grating 200 ' and be oppositely arranged with fixed grating 200 ', its displaying principle is：It is movable by control
Grating 300 ' is mobile so as to is formed with relative displacement with the fixed grating 200 ' being disposed below, and then causes through fixed light
The light of grid 200 ' can selectively pass through removable slit 300 ', and then realize light valve turning between on state of and dark-state
Change, wherein, in above-mentioned MEMS light valve structures, to prevent coming off for removable slit, as shown in Figure 1, it usually needs in movable light
Aperture 310 ', and the column structure being set in removable slit 300 ' by the aperture 310 ' on substrate 100 ' are opened up on grid 300 '
On 110 ', so as to removable slit is arranged on substrate, but it is larger to still suffer from removable slit using above-mentioned set-up mode
Come off risk.
The content of the invention
(1) technical problem to be solved
The technical problem to be solved in the present invention is how to solve removable slit in existing MEMS light valves to there is larger taking off
The problem of the risk that falls.
(2) technical scheme
To solve above-mentioned technical problem, technical scheme provides a kind of MEMS light valves, including substrate, is arranged on
Fixed grating and the removable slit relative with the fixed grating on the substrate surface, the removable slit is by described
Aperture on removable slit is set on the column structure on the substrate surface, is additionally provided with the surface of the column structure
Articulamentum, and the articulamentum is additionally arranged on the surface of the removable slit with by the removable slit and the column structure
It is fixedly connected.
Further, protective layer is also formed with the removable slit, and the articulamentum is same with the protective layer
Rotating fields.
Further, the material of the articulamentum is resin, silicon dioxide or silicon nitride.
Further, the column structure is transparent material.
Further, the transparent material is silicon nitride, carborundum or silicon dioxide.
To solve above-mentioned technical problem, present invention also offers a kind of display device, including above-mentioned MEMS light valves.
To solve above-mentioned technical problem, present invention also offers a kind of manufacture method of MEMS light valves, including：
Fixed grating and the removable slit relative with the fixed grating are formed on substrate, the removable slit passes through
Aperture on the removable slit is set on the column structure on the substrate surface；
Articulamentum is formed on the surface of the column structure, and the articulamentum is additionally arranged at the table of the removable slit
So that the removable slit to be fixedly connected with the column structure on face.
Further, it is additionally included on the removable slit and forms protective layer, wherein, the articulamentum and the protective layer
Formed for identical material and in a patterning processes.
Further, the material of the articulamentum is resin, silicon dioxide or silicon nitride.
Further, the column structure is transparent material.
(3) beneficial effect
The MEMS light valves that the present invention is provided, by arranging connection for being arranged on the surface of the column structure of removable slit
Layer, and articulamentum is additionally arranged on the surface of removable slit, so as to removable slit be fixedly connected with column structure, and then drop
The risk that low removable slit comes off.
Description of the drawings
Fig. 1 is a kind of structural representation of MEMS light valves of the prior art；
Fig. 2 is a kind of structural representation of MEMS light valves that embodiment of the present invention is provided；
Fig. 3 is a kind of schematic diagram of display device that embodiment of the present invention is provided；
Fig. 4～Fig. 7 is a kind of schematic diagram for making MEMS light valves that embodiment of the present invention is provided.
Specific embodiment
With reference to the accompanying drawings and examples, the specific embodiment of the present invention is described in further detail.Hereinafter implement
Example is not limited to the scope of the present invention for illustrating the present invention.
Fig. 2 be embodiment of the present invention provide a kind of MEMS light valves schematic diagram, the MEMS light valves include substrate 100,
The fixed grating 200 being arranged on the surface of the substrate 100 and the removable slit 300 relative with the fixed grating 200, institute
State the column structure 110 that removable slit 300 is set on the surface of the substrate 100 by the aperture 310 on the removable slit
On, articulamentum 400 is additionally provided with the surface of the column structure 110, and the articulamentum 400 is additionally arranged at the movable light
So that the removable slit 300 to be fixedly connected with the column structure 110 on the surface of grid 300.
The MEMS light valves that embodiment of the present invention is provided, by the surface of the column structure for being used to be arranged removable slit
Articulamentum is set, and articulamentum is additionally arranged on the surface of removable slit, connect so as to removable slit and column structure be fixed
Connect, and then reduce the risk that removable slit comes off.
Preferably for the MEMS light valves in above-mentioned embodiment, articulamentum 400 can be made completely to cover removable slit 300
Lid, such that it is able to make articulamentum can also as the protective layer of removable slit, wherein, the material of the articulamentum can be resin,
For example, hardness and the preferable resin of scratch resistance effect, such as acryl resin after annealing, silicone etc. can be chosen, or is gone back
Other transparent insulation materials, such as silicon dioxide (SiO2) or silicon nitride (SiNx) can be chosen；
Wherein, column structure 110 can be transparent material, and for example, the transparent material can be silicon nitride, carborundum or two
Silicon oxide.
Additionally, in above-mentioned removable slit, at fixed pivot the light gate part of (i.e. aperture 310) and the removable slit it
Between be elastic connection such that it is able to ensure that light gate part thereon can be moved horizontally, for example, can lack in removable slit
Loop configuration is set between Kong Yuguang gate parts, makes that there is certain telescopic space between light gate part and fixed pivot, made
Its light gate part can be moved horizontally in the presence of electrostatic force.
Additionally, embodiment of the present invention additionally provides a kind of display device, including above-mentioned MEMS light valves.
Specifically, referring to Fig. 3, the display device includes substrate, be arranged on a plurality of data lines on substrate (... .SLn, SLn
+ 1, SLn+2, SLn+3, SLn+4 ... .), a plurality of grid line (... .GLn, GLn+1, GLn+2, GLn+3, GLn+4 ... .) and by this
A plurality of data lines intersects several sub-pixel units being arranged in array of definition with a plurality of grid line, wherein, each sub- picture
Plain unit is provided with TFT (thin film transistor (TFT)) 11 and above-mentioned MEMS light valves 12, and data wire is electrically connected with the source electrode of TFT, grid
Line is electrically connected with the grid of TFT, is controlled the unlatching of TFT switch, is closed by grid line, and the drain electrode of TFT is electrically connected with MEMS light valves,
The voltage of MEMS light valves is applied to by data line traffic control, such that it is able to control MEMS light valves in removable slit in electrostatic force
The lower movement of effect, the light transmittance of the light transmission MEMS light valves to control that backlight sends, realizes the sub-pixel unit in dark-state
Conversion between on state of.
Wherein, the display device that embodiment of the present invention is provided can be note-book computer display screen, TV, digital phase
Any product with display function such as frame, mobile phone, panel computer or part.
Embodiment of the present invention additionally provides a kind of manufacture method of MEMS light valves, including：
Fixed grating and the removable slit relative with the fixed grating are formed on substrate, the removable slit passes through
Aperture on the removable slit is set on the column structure on the substrate surface；
Articulamentum is formed on the surface of the column structure, and the articulamentum is additionally arranged at the table of the removable slit
So that the removable slit to be fixedly connected with the column structure on face.
Specifically, the manufacture method of the MEMS light valves can include：
S1：Fixed grating and column structure are made on a surface of the substrate, as shown in figure 4, first on the surface of substrate 100
Upper formation fixed grating 200, wherein, forming the fixed grating 200 can then fixed using lighttight non-conducting material
Region outside grating 200 makes column structure 110, and the column structure 110 can adopt transparent material, for example, can adopt nitrogen
SiClx, carborundum, silicon dioxide etc.；
S2：Sacrifice layer 500 is formed on fixed grating 200, wherein, sacrifice layer 500 can adopt amorphous carbon material, specifically
Ground, the technology mode that can adopt blade coating+spin forms the sacrifice layer 500 so that the sacrifice layer is placed only in and compares column structure
At 110 highly low positions, and the upper surface in column structure 110 does not form expendable material, obtains structure as shown in Figure 5；
S3：Removable slit is formed, as shown in fig. 6, making removable slit 300, the removable slit of formation on sacrifice layer 500
300 are arranged on column structure 110 on the surface of a substrate by aperture 310 thereon；
S4：Articulamentum is formed on the surface of column structure, and the articulamentum is additionally arranged on the surface of removable slit
So as to removable slit be fixedly connected with column structure, as shown in fig. 7, removable slit 300 is fixed on into post by articulamentum 400
In shape structure 110, so as to reduce the risk that removable slit comes off simultaneously, it is preferable that can be formed for protecting in this step
The protective layer of removable slit, specifically, deposits one layer of insulation film first in the structure that step S3 is obtained, and its material can be
Resin, silicon dioxide or silicon nitride, the insulation film of deposition is bonded in the surface of removable slit and column structure and incite somebody to action both
It is completely covered, then thin film corresponding with the transmission region of removable slit in insulation film is removed by techniques such as exposure, developments
Material, retains removable slit light tight region and the thin-film material above aperture, so as to can not only obtain required connection
Layer links together removable slit with column structure, also simultaneously in the surface formation layer protective layer of removable slit；
S5：Sacrifice layer 500 is removed, so as to form MEMS light valve structures as shown in Figure 2.
The manufacture method of the MEMS light valves that embodiment of the present invention is provided, by being used to be arranged the column knot of removable slit
Articulamentum is formed on the surface of structure, and articulamentum is also covered on the surface of removable slit, so as to by removable slit and column
Structure is fixedly connected, and then reduces the risk that removable slit comes off.
Embodiment of above is merely to illustrate the present invention, and not limitation of the present invention, about the common of technical field
Technical staff, without departing from the spirit and scope of the present invention, can also make a variety of changes and modification, therefore all
The technical scheme of equivalent falls within scope of the invention, and the scope of patent protection of the present invention should be defined by the claims.
Claims (10)
1. a kind of MEMS light valves, including substrate, the fixed grating being arranged on the substrate surface and with the fixed grating
Relative removable slit, the removable slit is set in the column on the substrate surface by the aperture on the removable slit
In structure, it is characterised in that be provided with articulamentum on the surface of the column structure, and the articulamentum be additionally arranged at it is described can
So that the removable slit to be fixedly connected with the column structure on the surface of dynamic grating.
2. MEMS light valves according to claim 1, it is characterised in that protective layer is also formed with the removable slit, and
The articulamentum is same layer structure with the protective layer.
3. MEMS light valves according to claim 2, it is characterised in that the material of the articulamentum is resin, silicon dioxide
Or silicon nitride.
4. MEMS light valves according to claim 1, it is characterised in that the column structure is transparent material.
5. MEMS light valves according to claim 4, it is characterised in that the transparent material is silicon nitride, carborundum or two
Silicon oxide.
6. a kind of display device, it is characterised in that include the MEMS light valves as described in claim 1-5 is arbitrary.
7. a kind of manufacture method of MEMS light valves, it is characterised in that include：
Fixed grating and the removable slit relative with the fixed grating are formed on substrate, the removable slit is by described
Aperture on removable slit is set on the column structure on the substrate surface；
Articulamentum is formed on the surface of the column structure, and the articulamentum is additionally arranged on the surface of the removable slit
So that the removable slit to be fixedly connected with the column structure.
8. the manufacture method of MEMS light valves according to claim 7, it is characterised in that be additionally included on the removable slit
Protective layer is formed, wherein, the articulamentum is identical material and the formation in a patterning processes with the protective layer.
9. the manufacture method of MEMS light valves according to claim 8, it is characterised in that the material of the articulamentum is tree
Fat, silicon dioxide or silicon nitride.
10. the manufacture method of MEMS light valves according to claim 7, it is characterised in that the column structure is transparent material
Material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510290290.2A CN104834085B (en) | 2015-05-29 | 2015-05-29 | MEMS light valve and preparation method thereof and display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510290290.2A CN104834085B (en) | 2015-05-29 | 2015-05-29 | MEMS light valve and preparation method thereof and display device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104834085A CN104834085A (en) | 2015-08-12 |
| CN104834085B true CN104834085B (en) | 2017-04-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510290290.2A Active CN104834085B (en) | 2015-05-29 | 2015-05-29 | MEMS light valve and preparation method thereof and display device |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105185243B (en) * | 2015-10-15 | 2018-01-09 | 京东方科技集团股份有限公司 | A kind of display base plate, display device and display methods |
| CN105467579B (en) * | 2016-02-03 | 2017-03-22 | 京东方科技集团股份有限公司 | MEMS light valve and display device |
| CN108447407B (en) * | 2018-02-09 | 2020-04-14 | 武汉华星光电技术有限公司 | Micro-grain light-emitting diode display panel |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101636344A (en) * | 2007-03-21 | 2010-01-27 | 高通Mems科技公司 | Mems cavity-coating layers and method |
| CN202372703U (en) * | 2011-12-21 | 2012-08-08 | 上海丽恒光微电子科技有限公司 | MEMS (Micro Electro Mechanical System) light valve and display device with same |
| CN203998936U (en) * | 2014-07-11 | 2014-12-10 | 中芯国际集成电路制造(北京)有限公司 | MEMS device |
| CN104649214A (en) * | 2013-11-19 | 2015-05-27 | 中芯国际集成电路制造(上海)有限公司 | Contact plug for MEMS (Micro Electro Mechanical System) device and forming method thereof |
-
2015
- 2015-05-29 CN CN201510290290.2A patent/CN104834085B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101636344A (en) * | 2007-03-21 | 2010-01-27 | 高通Mems科技公司 | Mems cavity-coating layers and method |
| CN202372703U (en) * | 2011-12-21 | 2012-08-08 | 上海丽恒光微电子科技有限公司 | MEMS (Micro Electro Mechanical System) light valve and display device with same |
| CN104649214A (en) * | 2013-11-19 | 2015-05-27 | 中芯国际集成电路制造(上海)有限公司 | Contact plug for MEMS (Micro Electro Mechanical System) device and forming method thereof |
| CN203998936U (en) * | 2014-07-11 | 2014-12-10 | 中芯国际集成电路制造(北京)有限公司 | MEMS device |
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| CN104834085A (en) | 2015-08-12 |
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