CN104833686A - X ray amplification imaging system - Google Patents
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Abstract
The invention discloses an X-ray amplification imaging system, the X-ray amplification imaging system includes an X-ray light source, an X-ray light source lens, a phase amplification grating, an analysis absorption amplification grating, and an X-ray detector; the X-ray light source is arranged on the inlet end of the X-ray light source lens, the X-ray light source lens is used to focus X-ray irradiated by the X-ray light source to obtain micro focal spot coherent light source used for irradiation of a sample, the phase amplification grating is arranged behind the sample, and is used to collect and modulate the X-ray after irradiation of the sample to produce diffraction self-imaging effect, the analysis absorption amplification grating is arranged behind the phase amplification grating, and is located at the position of a self-imaging plane, the diffraction self-imaging effect is corresponding to the position of the self-imaging plane, the analysis absorption amplification grating is used to collect and process the X-ray from the phase amplification grating to convert phase information in the phase amplification grating into identifiable light intensity information, and the X-ray detector is arranged behind the analysis absorption amplification grating, close to the outlet end of the analysis absorption amplification grating, and used to detect and collect the information of the sample. The using range and resolution of the X-ray amplification imaging system can be greatly improved.
Description
Technical field
The present invention relates to optical image technology field, particularly a kind of X ray amplification imaging system.
Background technology
At present, X ray grating has important application in the fields such as life, the energy, environment, food, due to the optical device that X ray grating is very accurate, very high to the requirement of manufacture craft, especially the difficulty making high-quality two-dimensional x-ray grating is larger, therefore, the attention that high-quality two-dimensional x-ray grating enjoys related scientific research personnel how is made.The method of existing making grating mainly adopts mechanical scratching, holographic lithography, beamwriter lithography, X-ray lithography and microplating technology etc., but " depth-width ratio " that made the X ray grating obtained by these methods is little, and these methods have difficulties when making the two-dimentional sigmatron grating of comparatively large " depth-width ratio ", this is mainly because relative to low energy X ray, and sigmatron has stronger penetration capacity.Therefore, existing X ray grating does not meet the requirement of all circles to comparatively large " depth-width ratio " X ray grating.
In addition, when utilizing the material of conventional X ray absorption-contrast imaging technology to element compositions such as carbon, hydrogen, oxygen to carry out x-ray imaging analysis, because resolution is not high, can not meet actual needs.In addition, another key factor of development X-ray phase contrast technology is how to obtain ideal and micro-focal spot X ray coherent source of relative inexpensiveness, and more satisfactory coherent light is synchrotron radiation light source, but synchrotron radiation involves great expense, and is not easy to promote.
Summary of the invention
In view of this, the object of the embodiment of the present invention is to propose a kind of X ray amplification imaging system, adopts the X ray had compared with large ratio of height to width to amplify grating, significantly can improve resolution and the usable range of this X ray amplification imaging system.
Further, this X ray amplification imaging system comprises: X-ray source; X-ray source lens, its inlet end is provided with described X-ray source, for assemble described X-ray source launch X ray and the micro-focal spot coherent source obtained for irradiating sample; Phase place amplifies grating, after being arranged at described sample, for collecting and modulating the X ray after irradiating described sample and produce diffraction self_imaging effect; Analyze to absorb and amplify grating, after being arranged at described phase place amplification grating, be positioned at described diffraction self_imaging effect corresponding from imaging planimetric position place, described analysis absorbs amplification grating for collecting and processing the X ray amplifying grating from described phase place, and phase information is wherein converted to discernible intensity signal; X-ray detector, is arranged on described analysis and absorbs and amplify after grating, analyze near described the endpiece absorbing and amplify grating, for detecting and collecting the information of described sample.
Alternatively, in certain embodiments, described phase place is amplified grating and analyzed absorption amplification grating is taper multi-capillary X-ray grating, is drawn respectively form by many silicate glasses or lead glass single capillary; Wherein, described phase place is amplified grating and analyzed absorption amplification grating is taper surface section, para-curve profile section or other quadric surface section along the profile on respective length direction.
Alternatively, in certain embodiments, described sample is positioned over described micro-focal spot coherent source and phase place is amplified between grating, amplifies the inlet end of grating near described phase place; Described X-ray detector is arranged on after described analysis absorbs amplification grating near its endpiece.
Alternatively, in certain embodiments, X ray amplification imaging system also comprises: signal conditioning package, is connected with described X-ray detector, for extracting and the information of sample described in analyzing and processing.
Alternatively, in certain embodiments, described phase place is amplified grating and analyzed the screen periods scope absorbing amplification grating is 0.01-20 micron, and the scope of depth-width ratio is 10-100000; Wherein, described screen periods is the length of the line of centres of the hollow channel of adjacent single capillary; Described depth-width ratio is the ratio of the length of grating and the half of corresponding light grid cycle.
Alternatively, in certain embodiments, described phase place amplification grating is 0.1-20 centimetre along the span of the length H1 on its horizontal centre contour direction, and the span of inlet end diameter D1 is 1-200 millimeter, and the span of endpiece diameter D2 is 4-400 millimeter; Described analysis absorption amplification grating is 0.1-15 centimetre along the span of the length H2 on its horizontal centre contour direction, and the span of inlet end diameter D3 is 8-500 millimeter, and the span of endpiece diameter D4 is: 12-600 millimeter.
Alternatively, in certain embodiments, described X-ray source lens are list/multiple capillary silicate glass or lead glass lens, the scope of its entrance focal length F1 is 1-30 centimetre, the scope of outlet focal length F2 is 1-40 millimeter, the diameter range of outlet focal spot is 0.05-20 micron, and the scope of length L1 is 5-200 millimeter, inlet end diameter D
in1scope is 3-40 millimeter, endpiece diameter D
out1scope is 1-20 millimeter.
Alternatively, in certain embodiments, the diameter range of the outlet focal spot of described X-ray source lens is 1 micron, and length L1 is 50 millimeters, inlet end diameter D
in1be 10 millimeters, endpiece diameter D
out1it is 1 millimeter; The screen periods that described phase place amplifies grating is 2 microns, and depth-width ratio is 1300, and inlet end diameter D1 and endpiece diameter D2 is respectively 8 millimeters and 12 millimeters; The described screen periods analyzing absorption amplification grating is 2 microns, and depth-width ratio is 900, and inlet end diameter D3 and endpiece diameter D4 is respectively 15 millimeters and 18 millimeters.
Alternatively, in certain embodiments, described phase place is amplified grating and analyzed absorption amplification grating is quadrilateral along the profile perpendicular to the xsect in its horizontal center line direction; Wherein, the contours profiles forming the hollow single capillary of described multi-capillary X-ray grating is sexangle or circle.
Alternatively, in certain embodiments, form described X-ray source lens, phase place amplifies grating and analyze the multiple single capillary close-packed arrays absorbing and amplify grating, the single capillary being positioned at center is one, the number of plies at its place is defined as 1, then the number of the single capillary from inside to outside on each layer is 6 (n-1), and wherein n is the number of plies, n>1, the internal diameter size of each single capillary is identical.
Relative to prior art, various embodiments of the present invention have the following advantages:
After adopting the technical scheme of the embodiment of the present invention, grating is amplified because X ray amplification imaging system of the present invention adopts the phase place with comparatively large " depth-width ratio " to amplify grating and analyzes to absorb, not only manufacture craft is simple, the prices of raw and semifnished materials are cheaper, be convenient to promote, and its X-ray energy scope be suitable for is wide, especially sigmatron is gone for, and the imaging effect of high-space resolution is obtained by the detector that low spatial is differentiated, thus significantly can improve resolution and the usable range of this X ray amplification imaging system.
In addition, the mode that X ray amplification imaging system adopts Laboratory X-ray light pipe to combine with X-ray source lens obtains micro-focal spot coherent source, can also cost be reduced carrying high performance while, be convenient to promote, there is potential important application and widely use scope.
More characteristics and advantages of the embodiment of the present invention are explained in embodiment afterwards.
Accompanying drawing explanation
The accompanying drawing of a formation embodiment of the present invention part is used to provide the further understanding to the embodiment of the present invention, and schematic description and description of the present invention, for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
The composition schematic diagram of the X ray amplification imaging system that Fig. 1 provides for the embodiment of the present invention;
Fig. 2 is the structural representation of X-ray source lens in the embodiment of the present invention;
Fig. 3 be in the embodiment of the present invention X-ray source lens along perpendicular to the diagrammatic cross-section of its central symmetry axes;
Fig. 4 is the agent structure schematic diagram that in the embodiment of the present invention, phase place amplifies grating;
Fig. 5 analyzes the agent structure schematic diagram absorbing and amplify grating in the embodiment of the present invention;
Fig. 6 is that in the embodiment of the present invention, phase place is amplified grating or analyzed absorption amplification grating along the diagrammatic cross-section perpendicular to its central symmetry axes.
Description of reference numerals
1 X-ray source
2 capillary X-ray light lens
3 micro-focal spot light sources
4 samples
5 phase places amplify grating
6 analyze absorption amplifies grating
7 X-ray detectors
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
It should be noted that, when not conflicting, the feature in the embodiment of the present invention and embodiment can combine mutually.
Below in conjunction with accompanying drawing, each preferred embodiment of the present invention is described further:
Based on the analysis of the performance to existing X ray grating and preparation method thereof, the present inventor has carried out a large amount of capillary X-ray optics development and application research, produce a kind of X-ray source lens and amplify grating with the multi-capillary X-ray with comparatively large " depth-width ratio ", and then propose a kind of X ray amplification imaging system adopting these X-ray source lens and multi-capillary X-ray grating.
With reference to Fig. 1, it is the composition schematic diagram of the X ray amplification imaging system of the embodiment of the present invention, and X ray amplification imaging system comprises: X-ray source 1, X-ray source lens 2, phase place are amplified grating 5, analyzed to absorb and amplify grating 6 and X-ray detector 7.Wherein:
The inlet end of X-ray source lens 2 is provided with X-ray source 1, the X ray that X-ray source lens 2 are launched for converging X-ray light source 1, obtains micro-focal spot coherent source 3, and micro-focal spot coherent source 3 is for irradiating sample 4.After phase place amplification grating 5 is arranged at sample 4, for collecting and modulating the X ray after irradiating sample 4 and produce diffraction self_imaging effect, obtain interference fringe.
After analysis absorption amplification grating 6 is arranged at phase place amplification grating 5, be positioned at diffraction self_imaging effect corresponding from imaging planimetric position place, analysis is absorbed, and the distance of amplifying between grating 6 and phase place amplification grating 5 meets raster phase contrast imaging condition, analyze to absorb and amplify grating 6 for collecting and processing the X ray amplifying grating 5 from phase place, phase information is wherein converted to the discernible intensity signal of X-ray detector 7.X-ray detector 7 is arranged on to analyze to absorb and amplifies after grating 6, and near analyzing the endpiece absorbing and amplify grating 6, X-ray detector 7 is for detecting and collecting the information of sample 4.
Further, X-ray source lens 2, phase place are amplified grating 5 and are analyzed absorption amplification grating 6 and can be formed by silicate glass or the drawing of lead glass kapillary, wherein, the hollow space of kapillary is the space segment that X ray passes grating, and single capillary wall absorbs the part stoping X ray to pass.In above-described embodiment, the X-ray beam that X-ray source 1 sends, these X-ray beams are collected and assembled to X-ray source lens 2, and then obtain the micro-focal spot coherent source 3 of high power, this micro-focal spot coherent source 3 is for being irradiated to sample 4, the ray transmission be irradiated to after sample 4 amplifies grating 5 to phase place, this phase place is amplified the wave front of grating 5 to these coherent lights and is modulated, produce Talbot (Taibo) self-imaging (also known as diffraction self_imaging effect), the x-ray bombardment of amplifying grating 5 modulation through phase place absorbs amplification grating 6 to analysis, this analysis absorb amplify grating 6 be placed on above-mentioned self-imaging corresponding from imaging planimetric position, thus obtain Moire fringe, phase information is wherein converted to discernible intensity signal, and then detected collection by X-ray detector 7.Like this, the information of sample 4 is proposed the signal that can detect from X-ray detector 7.
Further, in above-described embodiment, sample 4 is positioned over micro-focal spot coherent source 3 and phase place is amplified between grating 5, amplifies the inlet end of grating 5 near phase place.X-ray detector 7 is arranged on to analyze to absorb and amplifies grating 6 afterwards near its endpiece.
Above the X ray amplification imaging system in above-described embodiment is illustrated, below the primary optics in above-mentioned is described further:
1, X-ray source lens
Here, the X-ray source lens 2 in the various embodiments described above are illustrated, any one X-ray source lens 2 of the optional the following stated of the various embodiments described above:
1) performance
X-ray source lens 2 are adopted in above-described embodiment, micro-focal spot coherent source 3 is obtained in conjunction with capillary X-ray light lens technology like this by high power Large focal spot X-ray source, and this micro-focal spot coherent source 3 can overcome the problems such as existing micro-focal spot coherent source cost is high, power is low, therefore, above-mentioned X ray amplification imaging system can adopt laboratory Large focal spot X ray light pipe as light source, such as, X-ray source 1 can be Laboratory X-ray light pipe, and power bracket is 3-9000 watt.Like this, be not only convenient to the popularization of this X ray amplification imaging system, usable range widely can also be made it have.
2) profile
With reference to Fig. 2, it is the agent structure schematic diagram of X-ray source lens 2.
As shown in Figure 2, in the various embodiments described above, the profile that X-ray source lens 2 are gone up along its length can be taper surface section, para-curve profile section or other quadric surface section according to actual needs.
3) form
X-ray source lens 2 can be single capillary silicate glass or lead glass lens, also can multiple capillary silicate glass or lead glass lens, are namely the single hole or porosu solid that do not have to support.Wherein, kapillary is hollow, and X ray total reflection occurs on the hollow tube inwall of kapillary and changes the direction of propagation.Such as, in above-described embodiment, X-ray source lens 2 can be Multi-channel Optical Devices, the X ray of converging and diverging can obtain micro-focal spot coherent source, for the imaging of X ray optical grating contrast.
As shown in Figure 3, X-ray source lens 2 are regular hexagons along the profile of the xsect perpendicular to its centerline direction, and it is made up of many single capillaries (being labeled as B in figure), and the profile of the xsect of single capillary is circular.Many single capillary close-packed arrays composition X-ray source lens 2, if the number of plies at a middle single capillary place is defined as 1, the number of the single capillary then from inside to outside on each layer is 6 (n-1), wherein n>1 is the number of plies, and the internal diameter size of single capillary is identical also can be different.
4) geometry parameter
As Figure 2-3, X-ray source lens 2 geometry parameter comprises: entrance focal length F1 (inlet end of X-ray source lens 2 is to the distance of x-ray source), outlet focal length F2 (endpiece of X-ray source lens 2 exports the distance at focal spot place to it), capillary X-ray light lens 2 length L1, lens entrance end diameter dimension D
in1, endpiece diameter dimension D
out1, full-size D
max1(be its diameter to circular capillaries X ray convergent lens, to polygon tubule X ray convergent lens be its opposite side distance from).
Wherein, optionally, the length L1 scope of X-ray source lens 2 can be 5-200 millimeter, the inlet end diameter D of lens
in1scope can be 3-40 millimeter, the endpiece diameter D of lens
out1scope can be 1-20 millimeter, and the scope of entrance focal length F1 is 1-30 centimetre, and the scope of outlet focal length F2 is 1-40 millimeter, full-size D
max1scope be 3-20 millimeter.The energy range that X-ray source lens 2 are suitable for X ray can be 1-150keV.
Such as, the length L1 of X-ray source lens 2 can be 50 millimeters, inlet end diameter D
in1can be 10 millimeters, endpiece diameter D
out1can be 1 millimeter, the energy range being suitable for X ray can be 80keV.
5) physical parameter
I) export focused spot diameter, the i.e. diameter of micro-focal spot coherent source 3, span can be 0.05-50 micron, such as, can select the lens that can form 0.1um, 1um or 20um focal spot according to actual needs.
Ii) power density gain, is: when placing X ray convergent lens 2 in light path and when not placing these lens, the X-ray intensity ratio in the unit areas such as this lens focal spot place, span can be 100-10000.
2, X ray amplifies grating
Here mentioned X ray amplifies grating and comprises phase place and amplify grating 5 and analyze to absorb and amplify grating 6, is below illustrating of carrying out the two, the various embodiments described above are optional amplifies grating 5 by any one phase place following and analyze to absorb and amplify grating 6:
1) performance
In above-mentioned X ray amplification imaging system, multi-capillary X-ray is adopted to amplify grating, namely phase place amplification grating 5 and analysis absorption amplification grating 6 realize amplification imaging, not only there is larger depth-width ratio, resolution is high, and the energy range be suitable for is wide, especially goes for sigmatron, thus overcome the shortcoming of existing X ray grating, make this X ray amplification imaging system have important and scientific research more widely and using value.Therefore, the phase contrast amplification imaging system based on this X ray grating is particularly suitable for the phase contrast amplification imaging research of tiny sampler, can say that above-described embodiment has further developed X-ray phase contrast technology.
2) form
In above-described embodiment, phase place is amplified grating 5 and analyzed absorption amplification grating 6 is the porosu solid not having to support, and is drawn respectively form by many silicate glasses or lead glass single capillary.
It should be noted that, in above-described embodiment, X-ray source lens 2, phase place are amplified grating 5 and are analyzed to absorb and amplify grating 6 and drawing machine can be adopted to carry out the techniques such as compound drawing to the female pipe of glass make and obtain.Such as: by fiber drawing furnace, drawing is carried out to the female pipe of glass and produce single capillary, then utilize these single capillaries to be drawn by compound, obtain satisfactory multi-capillary X-ray grating.Wherein, fiber drawing furnace is for having well heater and manual or automatic wiredrawing device.Glass mother pipe is heavy-walled glass pipe, and material can be silicate glass and lead glass etc., and accordingly, the material of single capillary is silicate glass or lead glass.Here, by selecting the methods such as suitable glass material and Controlling Technology, meet the requirement of comparatively large " depth-width ratio " high-energy X-rays grating of each bound pair, also can meet the requirement of comparatively large " depth-width ratio " low-energy X-ray grating of each bound pair simultaneously, can say, this multi-capillary X-ray preparing grating method in preparing grating field especially high energy preparing grating field will bring revolutionary innovation.Particularly, above-described embodiment draws silicate or lead glass multi-capillary X-ray grating by wire drawing machine, the manufacture craft of grating can not only be simplified, and because of its prices of raw and semifnished materials cheap, also be convenient to promote, make multi-capillary X-ray grating have important scientific research and using value, in the science such as life, the energy, environment, food, there is important application.
3) profile
With reference to Fig. 4-5, it is respectively phase place and amplifies grating 5 and analyze the agent structure schematic diagram absorbing and amplify grating 6.In above-described embodiment, phase place is amplified grating 5 and analyzed absorption amplification grating 6 is taper multi-capillary X-ray grating, is taper surface section, para-curve profile section or other quadric surface section along the profile on respective length direction.
Because above-described embodiment adopts the X ray grating of taper, so have enlarging function, this can reduce the requirement of imaging system to high-space resolution detector, such as, above-mentioned X-ray detection can adopt spatial-resolved detection device, and its spatial discrimination scope can be 0.01-200 micron.In other words, the detection that above-described embodiment can utilize low spatial to differentiate obtains the imaging effect of high-space resolution.The X ray amplification imaging system of amplifying grating based on this multi-capillary X-ray can carry out phase contrast imaging, such as, and the sample imaging analysis of medical science and field of biology.
4) geometry parameter
As shown in Figure 4, the geometry parameter that phase place amplifies grating 5 comprises length H1, inlet end diameter D2 and endpiece diameter D3 etc., wherein:
I) phase place amplifies grating 5 along the length H1 on its horizontal centre contour direction, and span can be 0.1-20 centimetre;
Ii) inlet end diameter D1, span can be: 1-200 millimeter;
Iii) endpiece diameter D2, span can be: 4-400 millimeter.
As shown in Figure 5, analyze the geometry parameter absorbing amplification grating 6 and comprise length H2, inlet end diameter D3 and endpiece diameter D4 etc., wherein:
I) analyze absorption and amplify grating 6 along the length H2 on its horizontal centre contour direction, span can be: 0.1-15 centimetre;
Ii) inlet end diameter D3, span can be: 8-500 millimeter;
Iii) endpiece diameter D4, span can be: 12-600 millimeter.
5) physical parameter
i) screen periods
As shown in Figure 6, phase place is amplified grating 5 and is analyzed and absorbs that to amplify grating 6 along the profile of the xsect perpendicular to respective horizontal center line direction be quadrilateral, the profile forming the hollow single capillary of these gratings is quadrilateral, black part in xsect is the wall of single capillary, be used for absorbing and stopping X ray, white portion is the hollow space of single capillary, for X ray is through the passage of grating.Here, the length of the line of centres of adjacency channel is defined as screen periods p1.
Wherein, optionally, the screen periods scope that phase place amplifies grating 5 and analysis absorption amplification grating 6 can be 0.01-20 micron, and depth-width ratio scope can be 10-100000.In addition, phase place is amplified grating 5 and is analyzed to absorb and amplifies grating 6 and can be 1-800 millimeter along the diameter range at the interface perpendicular to respective central symmetry axes, and the energy range being suitable for X ray can be 1-150keV.
ii) depth-width ratio
As shown in figs. 4-6, the length H1 of grating and H2 is defined as corresponding grating corresponding " depth-width ratio " respectively with the ratio of the half in the cycle of corresponding grating.
, amplify grating 5 for phase place herein, the depth-width ratio of phase place amplification grating 5 is the ratio of the half of its length H1 and screen periods.Optionally, the screen periods that phase place amplifies grating 5 can be 2-8 micron, and depth-width ratio can be 1300-1500, inlet end diameter D1 can be 8-10 millimeter, endpiece diameter D2 is 12-14 millimeter, and use the energy of X ray to can be 80-100keV, the material of grating can be lead glass.
And for example, analyze the screen periods scope absorbing amplification grating 6 and can be 2-6 micron, depth-width ratio can be 900-1200, inlet end diameter D3 can be 15-18 millimeter, endpiece diameter D4 can be 18-20 millimeter, and use the energy of X ray to can be 80-100keV, the material of grating can be lead glass.
As the optional embodiment of one, in the various embodiments described above, X ray amplification imaging system also can comprise signal conditioning package, and signal conditioning package is connected with X-ray detector 7, for extracting the information of described sample 4, and carries out analyzing and processing to this information.Here, signal conditioning package can be configured according to the needs of practical application.Like this, adopt the X ray amplification imaging system of above-described embodiment, the information of sample 4 can be proposed from the signal detected of X-ray detector 7, and carry out analyzing and processing by signal conditioning package according to real needs.
To sum up, compared with prior art, the X ray amplification imaging system that various embodiments of the present invention propose has the following advantages:
The X ray amplification imaging system that various embodiments of the present invention propose adopts the X ray with comparatively large " depth-width ratio " to amplify grating, namely phase place is amplified grating and is analyzed absorption amplification grating, not only manufacture craft is simple, the prices of raw and semifnished materials are cheaper, be convenient to promote, and its X-ray energy scope be suitable for is wide, especially sigmatron is gone for, and obtain the imaging effect of high-space resolution by the detector that low spatial is differentiated, and then significantly can improve resolution and the usable range of this X ray amplification imaging system.
In addition, the mode that the X ray amplification imaging system of various embodiments of the present invention adopts Laboratory X-ray light pipe to combine with X-ray source lens obtains micro-focal spot coherent source, can also cost be reduced carrying high performance while, be convenient to promote, there is potential important application and widely use scope.
In addition, those skilled in the art should be understood that, other additional devices contributing to imaging also can be comprised in the imaging system of the various embodiments described above, as the accessory bracket, adjusting gear accessory etc. of testing table, each optical element, this belongs to the conventional device in this area, is therefore no longer described further.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. an X ray amplification imaging system, is characterized in that, comprising:
X-ray source (1);
X-ray source lens (2), its inlet end is provided with described X-ray source (1), for assembling the X ray that described X-ray source (1) is launched and the micro-focal spot coherent source (3) obtained for irradiating sample (4);
Phase place amplifies grating (5), after being arranged at described sample (4), for collecting and modulating the X ray after irradiating described sample (4) and produce diffraction self_imaging effect;
Analyze to absorb and amplify grating (6), after being arranged at described phase place amplification grating (5), be positioned at described diffraction self_imaging effect corresponding from imaging planimetric position place, described analysis absorbs amplification grating (6) for collecting and processing the X ray amplifying grating (5) from described phase place, and phase information is wherein converted to discernible intensity signal;
X-ray detector (7), is arranged on after described analysis absorbs and amplify grating (6), analyzes near described the endpiece absorbing and amplify grating (6), for detecting and collecting the information of described sample (4).
2. X ray amplification imaging system according to claim 1, it is characterized in that, described phase place is amplified grating (5) and analyzed absorption amplification grating (6) is taper multi-capillary X-ray grating, is drawn respectively form by many silicate glasses or lead glass single capillary; Wherein, described phase place is amplified grating (5) and analyzed absorption amplification grating (6) is taper surface section, para-curve profile section or other quadric surface section along the profile on respective length direction.
3. X ray amplification imaging system according to claim 1 and 2, it is characterized in that, described sample (4) is positioned over described micro-focal spot coherent source (3) and phase place is amplified between grating (5), amplifies the inlet end of grating (5) near described phase place; Described X-ray detector (7) is arranged on after described analysis absorbs amplification grating (6) near its endpiece.
4. X ray amplification imaging system according to claim 1, is characterized in that, also comprise:
Signal conditioning package, is connected with described X-ray detector (7), for extracting and the information of sample (4) described in analyzing and processing.
5. the X ray amplification imaging system according to any one of Claims 1-4, it is characterized in that, described phase place is amplified grating (5) and analyzed the screen periods scope absorbing amplification grating (6) is 0.01-20 micron, and the scope of depth-width ratio is 10-100000; Wherein, described screen periods is the length of the line of centres of the hollow channel of adjacent single capillary; Described depth-width ratio is the ratio of the length of grating and the half of screen periods.
6. X ray amplification imaging system according to claim 5, is characterized in that:
Described phase place amplification grating (5) is 0.1-20 centimetre along the span of the length H1 on its horizontal centre contour direction, and the span of inlet end diameter D1 is 1-200 millimeter, and the span of endpiece diameter D2 is 4-400 millimeter;
Described analysis absorption amplification grating (6) is 0.1-15 centimetre along the span of the length H2 on its horizontal centre contour direction, and the span of inlet end diameter D3 is 8-500 millimeter, and the span of endpiece diameter D4 is: 12-600 millimeter.
7. X ray amplification imaging system according to claim 6, it is characterized in that, described X-ray source lens (2) are list/multiple capillary silicate glass or lead glass lens, the scope of its entrance focal length F1 is 1-30 centimetre, the scope of outlet focal length F2 is 1-40 millimeter, the diameter range of outlet focal spot is 0.05-50 micron, and the scope of length L1 is 5-200 millimeter, inlet end diameter D
in1scope be 3-40 millimeter, endpiece diameter D
out1scope be 1-20 millimeter.
8. X ray amplification imaging system according to claim 7, is characterized in that:
The diameter range of the outlet focal spot of described X-ray source lens (2) is 1 micron, and length L1 is 50 millimeters, inlet end diameter D
in1be 10 millimeters, endpiece diameter D
out1it is 1 millimeter;
The screen periods that described phase place amplifies grating (5) is 2 microns, and depth-width ratio is 1300, and inlet end diameter D1 and endpiece diameter D2 is respectively 8 millimeters and 12 millimeters;
The described screen periods analyzing absorption amplification grating (6) is 2 microns, and depth-width ratio is 900, and inlet end diameter D3 and endpiece diameter D4 is respectively 15 millimeters and 18 millimeters.
9. X ray amplification imaging system according to claim 8, is characterized in that, described phase place is amplified grating (5) and analyzed absorption amplification grating (6) along the profile perpendicular to the xsect in its horizontal center line direction is quadrilateral; Wherein, the contours profiles forming the hollow single capillary of described multi-capillary X-ray grating is sexangle or circle.
10. X ray amplification imaging system according to claim 9, it is characterized in that, form described X-ray source lens (2), phase place amplifies grating (5) and analyze the multiple single capillary close-packed arrays absorbing and amplify grating (6), the single capillary being positioned at center is one, the number of plies at its place is defined as 1, the number of the single capillary then from inside to outside on each layer is 6 (n-1), wherein n is the number of plies, n>1, the internal diameter size of each single capillary is identical.
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