CN104831264B - Heat-generating disc and its process of surface treatment - Google Patents
Heat-generating disc and its process of surface treatment Download PDFInfo
- Publication number
- CN104831264B CN104831264B CN201410046862.8A CN201410046862A CN104831264B CN 104831264 B CN104831264 B CN 104831264B CN 201410046862 A CN201410046862 A CN 201410046862A CN 104831264 B CN104831264 B CN 104831264B
- Authority
- CN
- China
- Prior art keywords
- heat
- generating disc
- solution
- oxidation
- surface treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The present invention provides a kind of heat-generating disc and its process of surface treatment, process of surface treatment includes the following steps:With oxygenerating solution;Heat-generating disc is immersed in the oxidation solution;It is impregnated after a certain period of time in the oxidation solution, takes out the heat-generating disc, the fever panel surface forms oxidation film at this time;Remove the impurity on the surface of the oxidation film.It to heat-generating disc by carrying out oxidation processes, one layer of oxidation film with higher fusing point, dense uniform is formed in fever panel surface, improve the uniformity of heat-generating disc fever, so that heat-generating disc has higher anti-dry combustion method ability under the identical thermal efficiency, the probability that the heat-generating disc caused by misoperation or assembly are bad melts disk is reduced.
Description
Technical field
The present invention relates to the optimization fields of heat-generating disc, more particularly to a kind of heat-generating disc and its process of surface treatment.
Background technology
Heat-generating disc is the core component of electric cooker class product, is cut generally by the laggard driving of gravitational casting or centrifugal casting
It is process.The main problem after sale of electric cooker class product has 70 or so percent all to concentrate on heat-generating disc failure over the years.
And the failure of heat-generating disc is concentrated mainly on heat-generating disc and melts disk deformation, therefore, reduces the generation that heat-generating disc melts disk deformation
Effectively reduce the failure rate after sale of electric cooker class product.
Heat-generating disc melts the reason of disk deformation mainly since user is during using electric cooker class product, due to operation
Improper or assembly bad cause magnet steel to be failure to actuate and heat-generating disc is made to be in dry-fire condition.Since the main material of heat-generating disc is aluminium,
And the fusing point of aluminium be 660 degrees centigrades, misoperation or assembly it is bad when magnet steel be failure to actuate, the heat-generating pipe inside heat-generating disc is also
Continuing to heat, when temperature exceeds the fusing point of aluminum heat-generating disc, is eventually leading to the deformation of aluminum heat-generating disc.With regard to current fever
For disk, the time of anti-dry combustion method is usually at 15~25 minutes or so, that is to say, that most 25 minutes heat-generating discs of dry combustion method will produce
The phenomenon that raw molten disk deformation.
In view of the above-mentioned problems, part producing producer takes the mode of surface spraying coating to handle heat-generating disc, still
Coating also can afterwards vaporize for a period of time in dry combustion method, and heat-generating disc finally can also occur and melt disk phenomenon.
Invention content
Based on the above issues, a kind of heat-generating disc of present invention offer and its process of surface treatment, the hair crossed through the process
Hot plate under the identical thermal efficiency have higher anti-dry combustion method ability, reduce due to user's improper use or assembly it is bad and
Caused molten disk phenomenon.
To reach said effect, the present invention adopts the following technical scheme that:
A kind of process of surface treatment of heat-generating disc, includes the following steps:
With oxygenerating solution;
Heat-generating disc is immersed in the oxidation solution;
It is impregnated after a certain period of time in the oxidation solution, takes out the heat-generating disc, the fever panel surface is formed at this time
Oxidation film;
Remove the impurity on the surface of the oxidation film.
In one of the embodiments, the heat-generating disc it is described oxidation solution in soaking time be 10min~
60min。
The oxide thickness that the fever panel surface is formed in one of the embodiments, is 3 μm~35 μm.
The impurity for removing the fever panel surface after the immersion in one of the embodiments, includes the following steps:
Heat-generating disc is put into clear water and carries out ultrasonic cleaning and dries.
Further include to the hair in one of the embodiments, before the heat-generating disc is immersed the oxidation solution
Hot plate carries out the step of degreasing, cleaning.
The oxidation solution is the sulfuric acid solution that mass percent concentration is 5%~30% in one of the embodiments,.
The temperature of the sulfuric acid solution is 40 DEG C~50 DEG C in one of the embodiments,.
Also include in one of the embodiments, nitric acid or hydrogen peroxide in the sulfuric acid solution;
The mass percent concentration of the nitric acid or hydrogen peroxide in the sulfuric acid solution is 0.3%~0.5%.
In one of the embodiments, the oxidation solution be salpeter solution that mass percent concentration is 5%~15% or
Hydrogenperoxide steam generator.
The surface of a kind of heat-generating disc, the heat-generating disc is handled using the process of surface treatment of the heat-generating disc.
The heat-generating disc and its process of surface treatment of the present invention, by carrying out oxidation processes to heat-generating disc, in fever panel surface
One layer of oxidation film with higher melt and dense uniform is formed, improves the uniformity of heat-generating disc fever so that heat-generating disc exists
There is higher anti-dry combustion method ability under the identical thermal efficiency, reduce the heat-generating disc caused by misoperation or assembly are bad
The probability of molten disk.
Description of the drawings
Fig. 1 is the flow chart of one embodiment of process of surface treatment of heat-generating disc of the present invention.
Specific implementation mode
Below in conjunction with embodiment, the present invention will be described in detail.It should be noted that in the absence of conflict, the application
In embodiment and embodiment in feature can be combined with each other.
The present invention provides a kind of process of surface treatment of heat-generating disc to be carried by carrying out oxidation processes to fever panel surface
The high performance of the anti-dry combustion method of heat-generating disc, user's operation is improper or assembly not at that time, avoid the molten disk of heat-generating disc, effectively subtract
The small rework issues after sale thereby resulted in, while security performance greatly improves.
The principle of the process of surface treatment of the heat-generating disc of the present invention is as follows:It is carried out at oxidation by the surface to heat-generating disc
Reason forms the oxidation film of one layer of dense uniform on the surface of heat-generating disc.Existing heat-generating disc is generally aluminum products, according to aluminum products
Chemical property, the present invention chooses the oxidation solution that can react with aluminium and aoxidized to it, and aluminium is in aoxidizing solution, surface
Form the pellumina of one layer of dense uniform;And pellumina has high temperature resistant(Fusing point is about 2000 DEG C), thermal stability it is good, strong
The feature that degree is high, chemical property is stablized can effectively prevent melting disk phenomenon caused by heat-generating disc dry combustion method.
Referring to Fig. 1, the process of surface treatment of heat-generating disc of the invention includes the following steps:
S100:With oxygenerating solution;
The oxidation solution of the present invention requires to chemically react with heat-generating disc, in one layer of oxidation of Surface Creation of heat-generating disc
Film.Oxidation solution of the invention chooses sulfuric acid solution in one of the embodiments, and concentration can be according to needed for heat-generating disc
Technological requirement configures:In a certain range, sulfuric acid concentration is higher, and in same time, oxidation is faster, and fever panel surface is formed
Oxidation film is thicker.Experiments prove that for existing electric cooker aluminum heat-generating disc, choose mass percent concentration be 5%~
30% sulfuric acid solution(The solution that i.e. mass percent concentration of sulfuric acid is 5%~30%)Better effects can be obtained, this concentration range
It is interior, layer oxide film can be formed in fever panel surface, while can prevent again oxidation disk the reaction was continued with sulfuric acid solution for inside.
More preferably, sulfuric acid solution temperature control at 40 DEG C~50 DEG C, at this temperature, aluminium can with mass percent concentration be 5%~
Oxidation reaction occurs for 30% sulfuric acid solution, generates aluminium oxide, and have faster reaction rate more at room temperature.It is anti-in order to meet
Condition is answered, usually the oxidation solution configured is placed under water bath and realizes required temperature.
Preferably, also include a small amount of nitric acid or hydrogen peroxide, more preferably, nitric acid or peroxide in above-mentioned sulfuric acid solution
It is 0.3%~0.5% to change mass percent concentration of the hydrogen in above-mentioned sulfuric acid solution.The addition of nitric acid or hydrogen peroxide, plays
The effect of catalyst can enhance the speed and oxidation effectiveness of oxidation.
It can be sent out with heat-generating disc it should be noted that the oxidation solution in the present invention is not limited to sulfuric acid solution or other
The raw solution reacted and be formed on its surface oxidation film, such as salpeter solution or hydrogenperoxide steam generator, preferably, nitric acid or peroxidating
The mass percent concentration of hydrogen is 5%~15%.
S200:In the oxidation solution that heat-generating disc immersion step S100 is prepared;
The inside of heat-generating disc is embedded with heat-generating pipe, in this step, in order to ensure final effect, need to be completely soaked heat-generating disc
It aoxidizes in solution, but oxidation solution not allowed to be dipped into heat-generating pipe, in order to avoid corrosion is generated to heat-generating pipe.
Further include the pre-treatment to heat-generating disc in one of the embodiments, before heat-generating disc is immersed oxidation solution
Technique carries out degreasing, cleaning to heat-generating disc.Usually, heat-generating disc is put into diluted acid or dilute alkaline soln and carries out degreasing,
It is used in combination clear water to clean up.
S300:Oxidisability it is molten it is middle immersion after a certain period of time, take out heat-generating disc, at this time generate heat panel surface formed oxidation film;
Heat-generating disc reacts with oxidation solution, and the oxidation film of Surface Creation dense uniform has good anti-dry combustion method
Can, while improving the uniformity of heat-generating disc fever, it is therefore prevented that heat-generating disc local temperature is excessively high, accumulation of heat and caused by melt disk
Phenomenon.
The present invention is for soaking time of the heat-generating disc in aoxidizing solution without special limitation, soaking time and final fever
The thickness for the oxidation film that panel surface is formed is related:Soaking time is longer, and oxidation film is thicker;Soaking time is shorter, and oxidation film is thinner.
Specific soaking time is executed according to the requirement of product, and under normal circumstances, soaking time is 10min~60min, is usually no more than
60min。
After panel surface of generating heat forms oxidation film, the further oxidation of heat-generating disc has been obstructed so that oxidation process can only occur
In the certain limit of fever panel surface.More preferably, the thickness for the oxidation film that fever panel surface is formed is 3 μm~35 μm, the thickness
The oxidation film of degree can effectively improve the anti-dry combustion method performance of heat-generating disc.
S400:Remove the impurity on oxide film dissolving surface.
Heat-generating disc after being disposed in aoxidizing solution, surface still can the impurity such as residual solution ion, be easy to other
Contactant generates corrosion, therefore, need to remove its surface impurity.As a kind of embodiment, wait for heat-generating disc by oxidation solution
After middle taking-up, put it into clear water and ultrasonic cleaning and dry, usually, time of ultrasonic cleaning be 5min~
15min。
The present invention also provides a kind of heat-generating disc, surface uses at the process of surface treatment of above-mentioned heat-generating disc
Reason.The heat-generating disc of the present invention, surface has the oxidation film of dense uniform, under the identical thermal efficiency, has higher anti-dry combustion method
Ability, reduce the assembly after sale due to misoperation or electric cooker class product it is improper caused by heat-generating disc melt the hair of disk phenomenon
Raw probability;Meanwhile the oxidation film of dense uniform improves the uniformity of heat-generating disc fever, it is therefore prevented that heat-generating disc local temperature mistake
High, accumulation of heat and caused by melt disk phenomenon.
The present invention is explained further below by way of specific embodiment.
Embodiment 1
1. preparing the sulfuric acid solution that mass percent concentration is 5%;
2. heating plate of electric cooker is immersed in the sulfuric acid solution that mass percent concentration is 5%, while it is molten the sulfuric acid to be housed
The solution pool of liquid is placed in 40 DEG C of sea water baths;
3. heat-generating disc impregnates 40min in the sulfuric acid solution that mass percent concentration is 5%, fever panel surface forms thickness
For 18.6 μm of pellumina;
4. heat-generating disc to be put into after carrying out ultrasonic cleaning 10min in clear water and be dried by being taken out in sulfuric acid solution.
The another heat-generating disc without surface treatment for taking same size, with surface treated heat-generating disc in embodiment 1
Simulation overall test is carried out together, the dry combustion method under identical rated voltage, the results showed that:Without the heat-generating disc of surface treatment
Dry combustion method 20min occurs as soon as molten disk phenomenon;Surface treated heat-generating disc dry combustion method 72h under rated voltage finds no exception,
And treated heat-generating disc meets technology requirement in heating property and various aspects test.
Embodiment 2
1. preparing the sulfuric acid solution that mass percent concentration is 20%;
2. heating plate of electric cooker is immersed in the sulfuric acid solution that mass percent concentration is 20%, while the sulfuric acid will be housed
The solution pool of solution is placed in 45 DEG C of sea water baths;
3. heat-generating disc impregnates 50min in the sulfuric acid solution that mass percent concentration is 20%, fever panel surface forms thickness
For 21.9 μm of pellumina;
4. heat-generating disc to be put into after carrying out ultrasonic cleaning 5min in clear water and be dried by being taken out in sulfuric acid solution.
The another heat-generating disc without surface treatment for taking same size, with surface treated heat-generating disc in embodiment 2
Simulation overall test is carried out together, the dry combustion method under identical rated voltage, the results showed that:Without the heat-generating disc of surface treatment
Dry combustion method 20min occurs as soon as molten disk phenomenon;Surface treated heat-generating disc dry combustion method 72h under rated voltage finds no exception,
And treated heat-generating disc meets technology requirement in heating property and various aspects test.
Embodiment 3
1. preparing the sulfuric acid solution that mass percent concentration is 30%;
2. heating plate of electric cooker is immersed in the sulfuric acid solution that mass percent concentration is 30%, while the sulfuric acid will be housed
The solution pool of solution is placed in 50 DEG C of sea water baths;
3. heat-generating disc impregnates 60min in the sulfuric acid solution that mass percent concentration is 30%, fever panel surface forms thickness
For 25.9 μm of pellumina;
4. heat-generating disc to be put into after carrying out ultrasonic cleaning 15min in clear water and be dried by being taken out in sulfuric acid solution.
The another heat-generating disc without surface treatment for taking same size, with surface treated heat-generating disc in embodiment 3
Simulation overall test is carried out together, the dry combustion method under identical rated voltage, the results showed that:Without the heat-generating disc of surface treatment
Dry combustion method 25min occurs as soon as molten disk phenomenon;Surface treated heat-generating disc dry combustion method 72h under rated voltage finds no exception,
And treated heat-generating disc meets technology requirement in heating property and various aspects test.
Embodiment 4
1. matching oxygenerating solution, wherein the mass percent concentration of sulfuric acid is 20%, and the mass percent concentration of nitric acid is
0.3%;
2. heating plate of electric cooker is immersed in the oxidation solution of step 1., while the solution pool equipped with the oxidation solution being set
In 45 DEG C of sea water baths;
3. heat-generating disc impregnates 50min in above-mentioned oxidation solution, fever panel surface forms the aluminium oxide that thickness is 25.9 μm
Film;
4. heat-generating disc to be put into after carrying out ultrasonic cleaning 15min in clear water and be dried by being taken out in above-mentioned oxidation solution.
The another heat-generating disc without surface treatment for taking same size, with surface treated heat-generating disc in embodiment 4
Simulation overall test is carried out together, the dry combustion method under identical rated voltage, the results showed that:Without the heat-generating disc of surface treatment
Dry combustion method 25min occurs as soon as molten disk phenomenon;Surface treated heat-generating disc dry combustion method 72h under rated voltage finds no exception,
And treated heat-generating disc meets technology requirement in heating property and various aspects test.
Embodiment 5
1. preparing the salpeter solution that mass percent concentration is 10%;
2. heating plate of electric cooker is immersed in the salpeter solution that mass percent concentration is 10%, while the nitric acid will be housed
The solution pool of solution is placed in 45 DEG C of sea water baths;
3. heat-generating disc impregnates 50min in the salpeter solution that mass percent concentration is 10%, fever panel surface forms thickness
For 25.0 μm of pellumina;
4. heat-generating disc to be put into after carrying out ultrasonic cleaning 15min in clear water and be dried by being taken out in salpeter solution.
The another heat-generating disc without surface treatment for taking same size, with surface treated heat-generating disc in embodiment 5
Simulation overall test is carried out together, the dry combustion method under identical rated voltage, the results showed that:Without the heat-generating disc of surface treatment
Dry combustion method 23min occurs as soon as molten disk phenomenon;Surface treated heat-generating disc dry combustion method 72h under rated voltage finds no exception,
And treated heat-generating disc meets technology requirement in heating property and various aspects test.
Embodiment 6
1. preparing the hydrogenperoxide steam generator that mass percent concentration is 10%;
2. heating plate of electric cooker is immersed in the hydrogenperoxide steam generator that mass percent concentration is 10%, while will be equipped with should
The solution pool of hydrogenperoxide steam generator is placed in 45 DEG C of sea water baths;
3. heat-generating disc impregnates 50min in the hydrogenperoxide steam generator that mass percent concentration is 10%, fever panel surface is formed
The pellumina that thickness is 24.3 μm;
4. heat-generating disc to be put into after carrying out ultrasonic cleaning 15min in clear water and be dried by being taken out in hydrogenperoxide steam generator.
The another heat-generating disc without surface treatment for taking same size, with surface treated heat-generating disc in embodiment 6
Simulation overall test is carried out together, the dry combustion method under identical rated voltage, the results showed that:Without the heat-generating disc of surface treatment
Dry combustion method 23min occurs as soon as molten disk phenomenon;Surface treated heat-generating disc dry combustion method 72h under rated voltage finds no exception,
And treated heat-generating disc meets technology requirement in heating property and various aspects test.
After above-described embodiment shows that the process of surface treatment through the present invention is handled, heat-generating disc is in heating property and respectively
Aspect test meets technology requirement;Compared with the heat-generating disc without surface treatment, through the present invention process of surface treatment into
Dry combustion method occurs melting disk phenomenon row treated heat-generating disc for 72 hours yet under nominal power, has more excellent anti-dry combustion method energy
Power effectively reduces the failure after sale of electric cooker class product heat-generating disc, increases safety in utilization.It should be noted that by
After the process of surface treatment of the present invention is handled, heat-generating disc is in whole machine installation and use aspect compared with untreated heat-generating disc
Equal indifference.
Several embodiments of the invention above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously
Cannot the limitation to the scope of the claims of the present invention therefore be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the guarantor of the present invention
Protect range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (6)
1. a kind of process of surface treatment of heat-generating disc, which is characterized in that include the following steps:
With oxygenerating solution, the oxidation solution is the sulfuric acid solution or quality percentage that mass percent concentration is 5%~30%
The hydrogenperoxide steam generator that the salpeter solution or mass percent concentration that specific concentration is 5%~15% are 5%~15%;
Heat-generating disc is immersed in the oxidation solution, the heat-generating disc is aluminum products;
After impregnating 10min~60min in the oxidation solution, the heat-generating disc is taken out, the fever panel surface is formed at this time
The oxidation film that thickness is 3 μm~35 μm;
Remove the impurity on the surface of the oxidation film.
2. the process of surface treatment of heat-generating disc according to claim 1, which is characterized in that remove the fever after the immersion
The impurity of panel surface includes the following steps:
Heat-generating disc is put into clear water and carries out ultrasonic cleaning and dries.
3. the process of surface treatment of heat-generating disc according to claim 1, which is characterized in that the heat-generating disc is being immersed institute
Further include the steps that degreasing, cleaning are carried out to the heat-generating disc before stating oxidation solution.
4. the process of surface treatment of heat-generating disc according to claim 1, which is characterized in that the temperature of the sulfuric acid solution is
40 DEG C~50 DEG C.
5. the process of surface treatment of heat-generating disc according to claim 1, which is characterized in that also include in the sulfuric acid solution
Nitric acid or hydrogen peroxide;
The mass percent concentration of the nitric acid or hydrogen peroxide in the sulfuric acid solution is 0.3%~0.5%.
6. a kind of heat-generating disc, which is characterized in that the surface of the heat-generating disc is generated heat using Claims 1 to 5 any one of them
The process of surface treatment of disk is handled.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410046862.8A CN104831264B (en) | 2014-02-10 | 2014-02-10 | Heat-generating disc and its process of surface treatment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410046862.8A CN104831264B (en) | 2014-02-10 | 2014-02-10 | Heat-generating disc and its process of surface treatment |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104831264A CN104831264A (en) | 2015-08-12 |
CN104831264B true CN104831264B (en) | 2018-08-10 |
Family
ID=53809454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410046862.8A Active CN104831264B (en) | 2014-02-10 | 2014-02-10 | Heat-generating disc and its process of surface treatment |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104831264B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106048506A (en) * | 2016-07-18 | 2016-10-26 | 佛山市高明高盛铝业有限公司 | Processing technology of oxidized heating disc |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3765952A (en) * | 1971-08-10 | 1973-10-16 | J N Tuttle Inc | Oxidizing composition and process for aluminum |
CN1995456A (en) * | 2006-12-22 | 2007-07-11 | 无锡江南计算技术研究所 | Aluminium alloy plate type cooler flow path chemical oxidation process |
CN201375394Y (en) * | 2009-02-26 | 2010-01-06 | 李明 | Novel electric rice cooker |
CN202617376U (en) * | 2012-05-25 | 2012-12-19 | 美的集团有限公司 | Electric heating plate |
-
2014
- 2014-02-10 CN CN201410046862.8A patent/CN104831264B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3765952A (en) * | 1971-08-10 | 1973-10-16 | J N Tuttle Inc | Oxidizing composition and process for aluminum |
CN1995456A (en) * | 2006-12-22 | 2007-07-11 | 无锡江南计算技术研究所 | Aluminium alloy plate type cooler flow path chemical oxidation process |
CN201375394Y (en) * | 2009-02-26 | 2010-01-06 | 李明 | Novel electric rice cooker |
CN202617376U (en) * | 2012-05-25 | 2012-12-19 | 美的集团有限公司 | Electric heating plate |
Also Published As
Publication number | Publication date |
---|---|
CN104831264A (en) | 2015-08-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2020522882A5 (en) | ||
JP2008150708A5 (en) | ||
CN105551805B (en) | The middle processing method of medium-high voltage aluminum electrolytic capacitor electrode foil | |
JP2015526903A5 (en) | ||
JP6846568B2 (en) | Post-treatment method to improve the quality of oxide film of aluminum medium-high pressure electrode foil | |
JP2007138934A (en) | Coating substrate forming method and stripping method | |
KR102464850B1 (en) | How to prepare a graphene coating layer on a metal surface | |
EP3683337B1 (en) | Process for removing aluminum-silicon coatings from metallic structures | |
CN104831264B (en) | Heat-generating disc and its process of surface treatment | |
WO2014187049A1 (en) | Micro-nano processing method for aluminum or aluminum alloy surface, and aluminum or aluminum alloy structure | |
JP2013506313A5 (en) | ||
JP2010169081A (en) | Steam turbine blade and method for manufacturing the same | |
CN109750346A (en) | A kind of manufacture craft of mesohigh etched foil | |
CN104313533A (en) | Ultrasonic frequency induction heating technology based quick hot-dipping aluminizing technology | |
JP6300398B2 (en) | Method for manufacturing fluid machine member | |
CN102701605A (en) | Preparation method for alumina/quartz glass composite fiber | |
KR102369396B1 (en) | Pre-processing method for manufacturing electronic aluminum foil including TiO2 media layer | |
CN103320747B (en) | A kind of laser of last stage vane of steam turbine oozes titanium technique | |
KR102071794B1 (en) | Boron film removing method, and pattern forming method and apparatus using boron film | |
CN105753495B (en) | A kind of ceramic substrate is fired with copper foil method for pre-oxidizing | |
CN106757236A (en) | Improve the method and palladium film layer of stainless steel surfaces palladium film layer decay resistance | |
CN114908355A (en) | Method for cleaning metal surface | |
CN104928745B (en) | The oxidation treatment method of heat-generating disc | |
JP6725833B2 (en) | Parts manufacturing method and surface treatment method | |
CN106999995A (en) | The stripping technology of deposition materials is removed from mask, carrier and deposition tool part |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
EXSB | Decision made by sipo to initiate substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |