CN104831236B - Waterproof ventilation polyurethane film compound ion plating nano-metal technique and its product - Google Patents

Waterproof ventilation polyurethane film compound ion plating nano-metal technique and its product Download PDF

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Publication number
CN104831236B
CN104831236B CN201510149112.8A CN201510149112A CN104831236B CN 104831236 B CN104831236 B CN 104831236B CN 201510149112 A CN201510149112 A CN 201510149112A CN 104831236 B CN104831236 B CN 104831236B
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nano
metal
matrix
polyurethane film
particle
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CN104831236A (en
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朱家骏
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Ke Aodu New Material Co Ltd In Jiaxing
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Ke Aodu New Material Co Ltd In Jiaxing
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Priority to PCT/CN2016/075171 priority patent/WO2016155451A1/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/20Metallic material, boron or silicon on organic substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)

Abstract

The present invention relates to waterproof ventilation polyurethane film compound ion plating nano-metal technique, matrix is waterproof ventilation polyurethane film, and technique includes:(1) for matrix in vacuum chamber, vacuum is 10Pa~3.0 × 10‑4Pa, heating-up temperature are 60 DEG C~120 DEG C, carry out matrix vaccum dewatering degassing process;(2) cathode ion filming equipment is used, using argon gas or nitrogen as protective gas, vacuum is 1.0 × 10‑1Pa~3.0 × 10‑4Pa, temperature are 1 DEG C~35 DEG C, matrix 3.0~30.0m/min of the speed of service, carry out plasma surface cleaning treatment to matrix, using metal as target, use compound ion plated film mode to produce density as 1.0~10.0g/m2Metal ion and nano-particle, plated nano metal coating in matrix surface, the granularity of the nano-particle of nano metal coating is less than 100nm;(3) above-mentioned material cut, measured, Vacuum Package.The present invention has the advantages that the nano-particle narrowly distributing of nano metal coating, nano metal coating uniformity are good, nano metal excellent performance is stable.

Description

Waterproof ventilation polyurethane film compound ion plating nano-metal technique and its product
Technical field
The invention belongs to functional high molecule material field, and in particular to a kind of waterproof ventilation polyurethane film compound ion Plating nano-metal technique and its product.
Background technology
Nano metal (silver, copper, zinc, nickel and its alloy etc.) be using advanced nanometer technology by metal material nanosizing, Described metal nano particle average major dimension is less than 100nm independent particle or particle agglomeration.Nano metal can Produce powerful and lasting various performances (such as electric conductivity, electromagnetic wave shielding, static electricity resistance, thermal insulation, sterilization antibiotic property).Receive Meter Yin, Nanometer Copper and nanometer nickel alloy can be in several minutes interior kill various bacterias and virus, broad-spectrum sterilization antibacterials and without any Drug resistance and the secondary stimulation of poison, these excellent properties of nano metal can be widely used for function clothes, protective articles and health and use In the products such as product.During substrate surface plating nano-metal particle, many technical problems also be present, first, nano metal particles quantum count is not Foot and coating adhesion be not strong, and makes the various excellent functions of material not enough persistently and sufficient;Second, nano metal coating its receive The difficult control of rice corpuscles distribution, nano-particle skewness, make nano level metal coating be turned into submicron order even micro- The coat of metal of meter level, and performance is (such as than table possessed by the surface property of micro-sized metal layer and nano level metal layer surface Area, skin effect, bulk effect and quantum size effect etc.) there is huge difference;Third, the height of matrix surface cleanliness factor, meeting Directly affect the power of nano metal coating adhesion.
The content of the invention
It is an object of the present invention to provide a kind of waterproof ventilation polyurethane film compound ion plating nano-metal technique, make The nano-particle narrowly distributing of coating and it is evenly distributed, coating adhesion is strong, to improve the performance of product.
To achieve these goals, the invention provides a kind of waterproof ventilation polyurethane film compound ion plating nano-metal Technique, it is characterised in that matrix is waterproof ventilation polyurethane film, and the technique comprises the following steps:
(1) for described matrix in vacuum chamber, vacuum is 10Pa~3.0 × 10-4Pa, heating-up temperature are 60 DEG C~120 DEG C, Carry out matrix vaccum dewatering degassing process;
(2) cathode ion filming equipment is used, using argon gas or nitrogen as protective gas, vacuum is 1.0 × 10-1Pa~ 3.0×10-4Pa, temperature are -1 DEG C~-35 DEG C, matrix 3.0~30.0m/min of the speed of service, and plasma body surface is carried out to matrix Face cleaning treatment, using metal as target, metal ion and nano-particle are produced using compound ion plated film mode, metal ion and 1.0~5.0g/m of nano-particles density2, nano metal coating, the nano-particle of nano metal coating have been plated in matrix surface Granularity be less than 100nm;
(3) above-mentioned material cut, measured, Vacuum Package.
The present invention first carries out vaccum dewatering degassing process, then use using waterproof ventilation polyurethane film as matrix to matrix Compound ion plated film mode plating nano-metal, have nano-particle narrowly distributing, the nano metal coating of nano metal coating uniform Property good, nano metal excellent performance it is stable the advantages that.
Further, the compound ion plated film mode is arc ion plating and both plated film sides of magnetron sputtering plating Formula is combined.The combination of both plated film modes of arc ion plating and magnetron sputtering plating, caused gold can be controlled well Belong to ion and the density of nano-particle and the ratio between the two, make that coating adhesion is stronger, uniformity is more preferable.
Further, the granularity of the nano-particle of the nano metal coating is 10~60nm.Nano-particle is distributed model Enclose narrow, nano-particle to be evenly distributed, coating adhesion is stronger, measurement is more preferable.
Embodiment
Waterproof ventilation polyurethane film compound ion plating nano-metal technique of the present invention, matrix are that waterproof air previous polyurethane is thin Film, waterproof ventilation polyurethane film have substantial amounts of nano grade pore, have good water-proof breathable properties.
Embodiment 1
Matrix is waterproof ventilation polyurethane film, proportion 1.21, breadth 1380mm, thickness 0.015mm, moisture permeability 12000g/m2/ 24h, water resistance 10000mmH2O.Processing step includes:
(1) matrix is placed in vacuum chamber, vacuum is 1.0 × 10-1Pa, 60~90 DEG C of heating-up temperature, heat time 20~50 minutes, carry out matrix vaccum dewatering degassing process.
(2) cathode ion filming equipment of the breadth for 1400mm is used, the matrix after processing is placed on filming equipment On unwinding device, vacuum is 2.4 × 10-1Pa, temperature are -15 DEG C, and the matrix speed of service is 15.0m/min, with 99.9% Argon gas is high-purity with 99.99% as protective gas, flow 1200ml/min, progress matrix plasma surface cleaning treatment Degree silver is used as target, 80~120A of arc current, magnetic control 460~880V of voltage, 12~20A of electric current, using compound ion plated film Mode produces silver ion and nano-particle, and silver ion and nano-particles density are 1.0~5.0g/m2, plated in matrix surface Nano silver plating, the granularity of the nano-particle of nano silver plating is 10~30nm.Obtained product is coated with nanogold on matrix Belong to coating, the granularity of the nano-particle of nano metal coating is 10~30nm.By controlling the power of plasma electrical source and putting Speed is rolled up, the thickness of coating can be adjusted.
(3) above-mentioned material is cut on request, measured, Vacuum Package.
Embodiment 2
Matrix is waterproof ventilation polyurethane film, proportion 1.21, breadth 1380mm, thickness 0.020mm, moisture permeability 12000g/m2/ 24h, water resistance 10000mmH2O.Processing step includes:
(1) matrix is placed in vacuum chamber, vacuum is 1.0 × 10-1Pa, 60~90 DEG C of heating-up temperature, heat time 30~50 minutes, carry out matrix vaccum dewatering degassing process.
(2) cathode ion filming equipment of the breadth for 1400mm is used, the matrix after processing is placed on filming equipment On unwinding device, vacuum is 2.6 × 10-1Pa, temperature are -15 DEG C, and the matrix speed of service is 10.0m/min, with 99.9% Argon gas flow 1200ml/min, carries out matrix plasma surface cleaning treatment, with 99.9% high-purity as protective gas Metallic aluminium 80~120A of arc current, magnetic control 360~460V of voltage, 22~28A of electric current, is plated as target using compound ion Film mode produces aluminium ion and nano-particle, and aluminium ion and nano-particles density are 1.0~10.0g/m2, plated in matrix surface Nanometer aluminium coat, the granularity of the nano-particle of nanometer aluminium coat is 10~60nm.Obtained product is coated with nanometer on matrix The coat of metal, the granularity of the nano-particle of nano metal coating is 10~60nm.By control plasma electrical source power and Speed is unreeled, the thickness of coating can be adjusted.
(3) above-mentioned material is cut on request, measured, Vacuum Package.
For the present invention in step (1), vacuum can be in 10Pa to 3.0 × 10-4Selected in the range of Pa, heating-up temperature can be with Selected in the range of 60 DEG C to 120 DEG C, the heat time was controlled at 10 to 60 minutes.Step (1) can effectively remove the water on matrix Point, bubble and impurity, be ready for follow-up plated film, coating adhesion can be made strong, it is difficult for drop-off.In step (2), protect Shield gas can be argon gas or nitrogen, and vacuum is 1.0 × 10-1Pa to 3.0 × 10-4Pa, temperature are -1 DEG C to -35 DEG C, matrix The speed of service 3.0 is to 30.0m/min, metal ion and nano-particles density 1.0 to 10.0g/m2.The nanometer of nano metal coating The granularity of particle is less than 100nm, and correspondingly, the granularity of the nano-particle of the nano metal coating of obtained product is less than 100nm. The granularity of the nano-particle of nano metal coating is preferred, nano-particle narrow distribution range, nano-particle distribution in 10~60nm Uniformly, coating adhesion is stronger, measurement is more preferable.
Compound ion plated film mode is that arc ion plating and magnetron sputtering plating both plated film modes are combined, the party Formula can control well caused by metal ion and the density of nano-particle and the ratio between the two, make coating adhesion it is stronger, Uniformity is more preferable.Metal is gold, silver, aluminium, copper, zinc, iron, nickel, titanium, platinum, palladium, cobalt, tantalum, rare earth metal and its mixture and conjunction The mixtures and alloy of gold and these metals, the foregoing metal listed be or relation.Prepreerence is noble metal, other Metal it is apparent to those skilled in the art.
The present invention can design nano metal coating according to the specific requirement of material function, pass through the superposition of nano metal coating Various functions material is obtained with Material cladding, such as electric conductivity, electromagnetic wave shielding, static electricity resistance, thermal insulation, sterilization antibiotic property Deng, make the performance of waterproof ventilation polyurethane film in itself fully demonstrate out, meanwhile, make product that there is nano metal coating institute again The various functions having and effect.
Nano-particle narrowly distributing, nano metal coating uniformity of the present invention with nano metal coating are good, nano metal The advantages that excellent performance is stable, can be continuously produced, and high yield rate, quality are good, pollution-free and excellent performance is stable.Obtained system Product had both had the function that waterproof and breathable and filter bacteria virus, had the performances such as sterilization antibacterial, antistatic and thermal insulation again, can be extensive For in the products such as function clothes, protective articles and amenities.

Claims (6)

1. waterproof ventilation polyurethane film compound ion plating nano-metal technique, it is characterised in that matrix is the poly- ammonia of waterproof and breathable Ester film, waterproof ventilation polyurethane film have substantial amounts of nano grade pore, have good water-proof breathable properties, and the technique includes Following steps:
(1) for described matrix in vacuum chamber, vacuum is 10Pa~3.0 × 10-4Pa, heating-up temperature are 60 DEG C~120 DEG C, are carried out Matrix vaccum dewatering degassing process;
(2) cathode ion filming equipment is used, using argon gas or nitrogen as protective gas, vacuum is 1.0 × 10-1Pa~3.0 ×10-4Pa, temperature are -1 DEG C~-35 DEG C, matrix 3.0~30.0m/min of the speed of service, and it is clear to carry out plasma surface to matrix Clean processing, using metal as target, metal ion and nano-particle, metal ion and nanometer are produced using compound ion plated film mode 1.0~10.0g/m of particle density2, nano metal coating, the grain of the nano-particle of nano metal coating have been plated in matrix surface Spend for 10~60nm;
(3) above-mentioned material cut, measured, Vacuum Package;
The compound ion plated film mode is that arc ion plating and magnetron sputtering plating both plated film modes are combined.
2. waterproof ventilation polyurethane film compound ion plating nano-metal technique according to claim 1, it is characterised in that The metal be gold, silver, aluminium, copper, zinc, iron, nickel, titanium, platinum, palladium, cobalt, tantalum, rare earth metal and these metals mixture with Alloy.
3. waterproof ventilation polyurethane film compound ion plating nano-metal technique according to claim 2, it is characterised in that The waterproof ventilation polyurethane film proportion 1.21,0.01~0.02mm of thickness, moisture permeability 12000g/m2/ 24h, water resistance 10000mmH2O。
4. waterproof ventilation polyurethane film compound ion plating nano-metal technique according to claim 3, it is characterised in that In the step (1), the heat time is 10~60 minutes.
5. the product prepared using technique described in claim 1, it is characterised in that matrix is waterproof ventilation polyurethane film, is prevented Water ventilation polyurethane film has substantial amounts of nano grade pore, has good water-proof breathable properties, using compound ion plated film mode Nano metal coating is plated on the matrix, and the granularity of the nano-particle of nano metal coating is 10~60nm, described compound Ion film plating mode is that arc ion plating and magnetron sputtering plating both plated film modes are combined.
6. product according to claim 5, it is characterised in that the metal of the nano metal coating be gold, silver, aluminium, copper, Zinc, iron, nickel, titanium, platinum, palladium, cobalt, tantalum, the mixture and alloy of rare earth metal and these metals.
CN201510149112.8A 2015-03-31 2015-03-31 Waterproof ventilation polyurethane film compound ion plating nano-metal technique and its product Active CN104831236B (en)

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CN201510149112.8A CN104831236B (en) 2015-03-31 2015-03-31 Waterproof ventilation polyurethane film compound ion plating nano-metal technique and its product
PCT/CN2016/075171 WO2016155451A1 (en) 2015-03-31 2016-03-01 Process for composite ion plating of waterproof breathable polyurethane film with nanometals and product thereof

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CN104831236B (en) * 2015-03-31 2017-12-22 嘉兴中科奥度新材料有限公司 Waterproof ventilation polyurethane film compound ion plating nano-metal technique and its product
CN112210760B (en) * 2020-10-13 2021-05-07 廖斌 Surface treatment method of ultrathin polymer
CN113441014A (en) * 2021-06-07 2021-09-28 杭州龙碧科技有限公司 Nano fiber membrane, composite nano fiber filtering membrane, nano membrane filter screen and preparation
CN113370612A (en) * 2021-06-23 2021-09-10 深圳市他她实业有限公司 Nano material composite cloth

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08158269A (en) * 1994-11-28 1996-06-18 Unitika Ltd Production of light-reflective fabric
CN1155734C (en) * 2002-05-27 2004-06-30 长沙力元新材料股份有限公司 Process and apparatus for preparing porous metal by combined physical gas-phase deposition techinque
KR100819873B1 (en) * 2006-09-21 2008-04-07 주식회사 피앤아이 Metal coating apparatus and method for hemp cloth using physical evaporation
CN1970882A (en) * 2006-12-13 2007-05-30 东华大学 Anti-UV fabric capable of shielding electromagnetic wave and its producing method
CN101275361A (en) * 2008-04-17 2008-10-01 苏州工业园区鸿锦纳米有限公司 Nano-silver nonwoven cloth and application thereof to sterilizing filter element
CN101637679A (en) * 2009-08-25 2010-02-03 江南大学 Method for preparing antibacterial filter screen
CN101660125A (en) * 2009-09-18 2010-03-03 邵楠 Technology for plating nano-metal on fiber
CN102958337A (en) * 2011-08-19 2013-03-06 鸿富锦精密工业(深圳)有限公司 Electromagnetic shielding method and product
CN104831528B (en) * 2015-03-31 2017-10-13 嘉兴中科奥度新材料有限公司 The non-woven fabric compounded ion plating nano-metal technique of highly effective air particulate filter and its product
CN104831236B (en) * 2015-03-31 2017-12-22 嘉兴中科奥度新材料有限公司 Waterproof ventilation polyurethane film compound ion plating nano-metal technique and its product
CN104831527B (en) * 2015-03-31 2017-10-13 嘉兴中科奥度新材料有限公司 The full covered composite yarn ion plating nano-metal technique of aramid fiber or laid fabric surface and its product

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