CN104823341B - The optically pumped solid-state laser equipment of gain with autoregistration pump optical device and enhancing - Google Patents

The optically pumped solid-state laser equipment of gain with autoregistration pump optical device and enhancing Download PDF

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Publication number
CN104823341B
CN104823341B CN201380064804.1A CN201380064804A CN104823341B CN 104823341 B CN104823341 B CN 104823341B CN 201380064804 A CN201380064804 A CN 201380064804A CN 104823341 B CN104823341 B CN 104823341B
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laser
solid
state laser
resonator
mirror
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CN104823341A (en
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S.格龙恩博恩
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Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/04Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/041Optical pumping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/025Constructional details of solid state lasers, e.g. housings or mountings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/042Arrangements for thermal management for solid state lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/0602Crystal lasers or glass lasers
    • H01S3/0604Crystal lasers or glass lasers in the form of a plate or disc
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14External cavity lasers
    • H01S5/141External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/185Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL]
    • H01S5/187Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL] using Bragg reflection
    • HELECTRICITY
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    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/42Arrays of surface emitting lasers
    • H01S5/423Arrays of surface emitting lasers having a vertical cavity
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/07Construction or shape of active medium consisting of a plurality of parts, e.g. segments
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08059Constructional details of the reflector, e.g. shape
    • H01S3/08068Holes; Stepped surface; Special cross-section
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/005Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0071Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/023Mount members, e.g. sub-mount members
    • H01S5/02325Mechanically integrated components on mount members or optical micro-benches

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Abstract

The present invention relates to a kind of optically pumped solid-state laser equipment comprising the one or several solid-state laser mediums in laser resonator(100)And one or several pump laser diodes(200)With pumping radiation speculum(300).Laser resonator is by being arranged in solid-state laser medium(100)The first side one or several first resonator mirrors and be arranged in solid-state laser medium(100)The second side one or several second resonator mirrors(310,320,330)It is formed.First and second resonator mirrors are arranged to laser emission(500)Guiding passes through each described laser medium at least two different straight paths(100).Pump laser diode(200)It is arranged to and passes through pumping radiation(510)In the pumping radiation speculum(300)The reflection at place carrys out optically pumped solid-state laser medium(100).Pumping radiation speculum(300)With the second resonator mirror(310,320,330)It is formed on single mirror element(600)In.Using the design of solid-state laser equipment, realize pump optical device be easy to align with and the gain of the enhancing of laser apparatus.The solid-state laser equipment proposed can be realized in the form of compact.

Description

The optically pumped solid-state laser of gain with autoregistration pump optical device and enhancing Device equipment
Technical field
The present invention relates to a kind of one or several solid-state laser mediums and optically pumped solid-state including in laser resonator The optically pumped solid-state laser equipment of the one or several pump laser diodes of laser medium, the laser resonator is by cloth Set the first side of the solid-state laser medium one or several first resonator mirrors and be arranged in the solid-state laser medium One or several second resonator mirrors of second, opposite, side formed, first and second resonator mirror is arranged to will be described The laser emission of laser resonator guides at least two different straight paths passes through each described laser medium.For this The example of kind optically pumped solid-state laser equipment is optical pumping Vertical extended cavity surface emitting laser(VECSEL)Or half Conductor disk laser(SDL), provide for the dielectric laser device power with high brightness, narrow bandwidth and short laser pulse (medium laser powers)Compact and inexpensive solution.Such laser apparatus can be used for requirement ratio Numerous applications of higher brightness and/or shorter pulse that laser diode can supply.
Background technology
Standard disk laser needs the optics of pump laser and pump laser optical device about laser resonator Pattern precisely aligns.It is difficult during the manufacture for being aligned in laser apparatus.In addition, such laser is usually low It is restricted in terms of the power of brightness pumps radiation, the low-light level pumping radiation can focus on the given active of laser medium In region, this leads to the low gain of laser apparatus.Similarly, the maximum diffipation power density in laser medium is usually by cold But the limitation of method is particularly limited by installation the heat sink of laser medium on it.
5,553,088 A of US disclose a kind of one or several dish type solid-state laser mediums including in laser resonator Solid-state laser equipment.Laser resonator at least one embodiment from the first end face of solid-state laser medium by forming Several second resonator mirrors of first resonator mirror and the second, opposite, side for being arranged in solid-state laser medium are formed.Resonator mirror quilt It is arranged to guide the laser emission of laser resonator on two different paths and passes through laser medium.By being arranged in and solid-state Several laser diodes at the identical carrier element of laser medium are from side-pumped laser medium.Since laser emission is in difference The equipment for propagating through laser medium on path, therefore being proposed allows the gain of the enhancing of laser medium.This also allows to give birth to At the more preferable of heat be distributed and lead to improved cooling.The document does not propose in the laser passed through by laser emission Any solution of pump optical device being more easily aligned in the situation of the end face progress optical pumping of medium.
Invention content
The object of the present invention is to provide a kind of optical side pumped solid state lasers with one or several solid-state laser mediums Device equipment makes it possible to easily be directed at pump optical device and can realize in a compact fashion.
The purpose is realized using optical side pumped solid-state laser equipment according to claim 1.The advantageous implementation of equipment Example is the theme of dependent claims or can be inferred from the further part and preferred embodiment of specification.
The optical side pumped solid-state laser equipment proposed includes the one or several preferred domains in laser resonator Shape or plate shape solid-state laser medium.Laser resonator is humorous by be arranged in the first side of solid-state laser medium one or several first Shake device mirror and be arranged in solid-state laser medium the second side opposite with first side one or several second resonator mirrors It is formed.First and second resonator mirrors are arranged to the laser emission of laser apparatus at least two different straight paths Guiding passes through each described laser medium.Laser can be designed as such as VECSEL, wherein each laser medium by Form the DBR of one of first resonator mirror(Distributed Bragg reflector)On quantum well structure formed.However, it is also possible to real Existing other types of laser, such as wherein solid-state laser medium is the solid-state laser of laser crystal.One or several laser Device pump laser diode and pumping radiation speculum are arranged to through the pumping laser at the pumping radiation speculum The reflection of the pumping radiation of diode carrys out optically pumped solid-state laser medium.Pumping radiation speculum is together with the second resonator mirror one It rises and is located in the second side and is arranged and designed into the solid-state laser medium being directly reflected into pumping radiation in the second side End face.Reflection of pump power mirror and the second resonator mirror are formed on the single mirror element in the second side of solid-state laser medium In.First resonator mirror or resonator mirror can be formed by the end face of the laser medium on the first side.For this purpose, crystalline laser The end face of medium can suitably be applied the high reflection for being coated with and realizing laser emission in these endfaces.In VECSEL or semiconductor In the situation of disk laser, the first resonator mirror by arranging laser medium on it(Active medium)'s(It is multiple)DBR is formed. However, it is also possible to provide in the form of the mirror element of separation(It is multiple)First resonator mirror.
The solid-state laser equipment of the present invention uses appropriately designed mirror element, and pump light, which is directed to solid-state laser, to be situated between And at the same time forming the second resonator mirror of laser resonator in matter.The pumping radiation mirror being formed in the mirror element is designed to Pumping is covered in the region of the laser medium of the pattern of the laser emission on different paths by these laser mediums.Therefore, it pumps Pu beam and zlasing mode are always overlapped without complicated alignment, because the part for forming the mirror element of pump optical device is total It is in the fixed spatial relationship in the part with the mirror element for forming the second resonator mirror.Utilize such self-centering mirror member The alignment of part, pump optical device significantly simplifies.The design proposed allows pump laser diode close to the cloth of laser medium It sets, so as to cause the design closely of solid-state laser equipment.The difference for passing through solid-state laser medium due to laser emission Path can deposit the pump energy of higher amount, so as to cause laser apparatus compared to wherein laser emission always identical The gain enhanced for the laser-like of laser medium is propagated through on path.Different paths also allow better heat to be distributed And the thus more preferable cooling of solid-state laser equipment.Cooling is preferably realized by the cooling body with plane surface, is swashed Optical medium is installed to adjacent to each other on the plane surface.Pump laser diode can also be with solid-state laser medium neighboringly And/or it is installed on in-between in the cooling body.Pump laser diode is then towards mirror element transmitting substantially perpendicular to solid The pumping radiation of the end face of state laser medium.Cooling body can be the heat sink of bulk material, particularly metal, and can also have It is useful for air cooled cold sink.It is also possible to for the cooling body to be embodied as the chamber of the coolant liquid for such as water, institute It states coolant liquid and is pumped through cooling body during the operation of laser apparatus.
Pump laser diode can be the array of single diode or laser diode, such as Vertical Cavity Surface transmitting swashs Light device(VCSEL)Array or microchip VECSEL arrays.The main body of mirror element is preferably formed by optically transparent material, such as through The glass of coating or coated plastics.Coating for mirror can be formed by metalized coated or dielectric coating, such as ability As known in domain.
The laser apparatus proposed may include being mounted on carrier element appropriate, particularly cooling body adjacent to each other On at least two solid-state laser mediums.Each in these laser mediums is preferably swashed by several pumpings on carrier element Optical diode surrounds.Then mirror element may include a pumping radiation speculum for laser medium described in each, institute It states pumping radiation speculum and preferably pertains to corresponding laser medium centering.On mirror element, these pumping radiation speculums arrangement Between the second resonator mirror, the laser emission from one of laser medium is reflected into neighbouring laser medium.This causes to lead to The zigzag path for the laser emission crossed between the first and second resonator mirrors of laser apparatus and cause to pass through laser medium Different straight paths.Pump laser diode and pumping radiation speculum be arranged and designed into make it is each in these paths It is a that required gain is realized by fully optical pumping.One in two external resonator mirrors of mirror element is designed to Form laser resonator goes out coupling mirror.This means that the mirror allows the fraction of laser emission to pass through the mirror to laser resonator Outside access.
In a further embodiment, the solid-state laser equipment proposed includes be arranged on carrier element appropriate one A single solid-state laser medium.Similarly in this embodiment, if solid-state laser medium is preferably by the carrier element Dry pump laser diode surrounds.In this embodiment, mirror element may include to be formed the second resonator mirror center and It is designed to pumping radiation being reflected into solid-state laser medium and is formed(It is multiple)The outside area of pumping radiation speculum.It depends on The number of second resonator mirror, laser emission can be conducted through laser medium on substantially more than two different paths, So as to cause the zigzag path of the laser emission between the first and second resonator mirrors by laser apparatus, as before In embodiment like that.The outside area of mirror element be then designed to covering by the laser emission of the laser medium it is all not With the pattern in path solid-state laser medium towards(facing)Endface generates the intensity distribution of pumping radiation.Similarly exist In the embodiment, what one of second resonator mirror was designed to be formed laser resonator goes out coupling mirror.
These and other aspects of the invention will be apparent from embodiment described below and will be with reference to the implementation Example is illustrated.
Description of the drawings
Itd is proposed solid-state laser equipment is more fully described following by exemplary mode combination attached drawing.Each figure It shows:
First exemplary cross-sectional side view of the laser apparatus that Fig. 1 is proposed;
Top view in the solid-state laser medium of the laser apparatus of Fig. 2 Fig. 1;
Top view on the mirror element of the laser apparatus of Fig. 3 Fig. 1;
Cross-sectional side view in second example of the solid-state laser equipment that Fig. 4 is proposed;
Top view in the solid-state laser medium of the laser apparatus of Fig. 5 Fig. 4;
Top view on the mirror element of the laser apparatus of Fig. 6 Fig. 4;
Fig. 7 along circular path A indicated in Fig. 6 viewgraph of cross-section.
Specific implementation mode
Fig. 1 shows the first exemplary cross-sectional side view of proposed solid-state laser equipment.Laser apparatus includes Three plate shape solid-state laser mediums 100 being mounted side by side on heat sink 400 plane surface.It is every in these laser mediums 100 One can be formed by the active region of VCSEL and be surrounded by several pump laser diodes 200, as can from Fig. 2 institute Show to laser medium and it is heat sink on top view identify as.Laser resonator in the example is by being arranged in laser Seven resonator mirrors on the both sides of medium are formed.First resonator mirror is formed by the DBR of the VCSEL of offer laser medium 100. End mirror 320 goes out coupling mirror 330 and two refrative mirrors 310 are arranged in the second, opposite, side of laser medium 100.Utilize resonator The shown arrangement of mirror, laser emission 500 propagate through laser apparatus on zigzag path.Each laser medium 100 is two It is transmitted on a difference path.The arrangement further includes being arranged and designed into pumping radiation 510 towards the end face of laser medium 100 Three pumping radiation speculums 300 of orientation.Second resonator mirror 310,320,330 is together with pumping radiation speculum 300 It is formed in a single optical element 600.Since the optical element can manufacture with high precision, can not have Ideally ensure pumping radiation speculum 300 in the case of having any other alignment(That is pump optical device)With the second resonance Relative orientation between device mirror 310,320,330 and arrangement.Thus, when installing proposed laser apparatus, it is very easy to Realize alignment of the pump optical device about laser resonator.Pumping radiation speculum is by three parabolics as indicated in figure 1 Face is formed.The radiation of pump laser diode 200 is thus reflected and focuses on active medium(Laser medium 100)It is upper and with The optical mode of resonator in these media is overlapped.
Fig. 3 shows wherein identify pumping radiation speculum 300 and second laser mirror(End mirror 320, refrative mirror 310 and go out coupling mirror 330)Disposed adjacent optical element 600 on top view.
It is of course also possible to by the single rectangular active medium that extends between two of Fig. 1 external laser mediums 100 come Replace three laser mediums 100.Then pump laser diode 200 will be positioned along the long side of rectangular laser medium.Mirror element 600 will provide for the direct refrative mirror 310 located adjacent one another on both sides with pumping mirror 300.Certainly, this is only according to this hair One in several other possibilities of bright arrangement.
Fig. 4 shows the second exemplary side view of proposed solid-state laser equipment.In this example, only one solid-state Laser medium 100 is arranged on heat sink 400 plane surface.If the solid-state laser medium is by heat sink 400 similar face Dry pump laser diode surrounds.The solid-state laser of the example of such arrangement for pump laser diode 200 in Figure 5 It is shown in top view on medium 100.
Mirror element 600 in the embodiment include pumping radiation is reflected into it is outer on the end face of solid-state laser medium 100 Section 301.The central part 311 of mirror element 600 forms the second resonator mirror.In this case, all pump laser diodes In the exterior section 301 that 200 radiation passes through mirror element 600(It is multiple)Pumping radiation focusing mirror is in the allusion quotation than resonator On the larger-sized single patch of pattern formula 110(Referring to Fig. 5).For state-of-the-art disk laser, bigger than mode sizes More regions pumped will lead to the multi-mode operation with the brightness reduced.However in this embodiment, several refrative mirrors Zlasing mode is reflected through pumped region 110 by 310 circular arrangement at several different locations.Refrative mirror 310 is somebody's turn to do It is shown in the top view being arranged in the reflection side of mirror element 600 shown in Fig. 6.
Fig. 7 shows the optical path of laser emission with the viewgraph of cross-section along round wire A indicated in Fig. 6.At this In viewgraph of cross-section, also indicates out the end mirror 320 of laser resonator and go out coupling mirror 330.Since Fig. 7 is showing along round wire Cross section, therefore resonator end mirror 320 and go out coupling mirror 330 and be arranged in adjacent to each other on mirror element 600.For this field skill It is apparent that the central part in the region pumped can also be filled by the appropriate arrangement of refrative mirror 310 for art personnel There is optical mode.
Although illustrating and describing the present invention in detail in attached drawing and foregoing description, such diagram and description Be considered to be it is illustrative or exemplary and not restrictive;The present invention is not limited to the disclosed embodiments.For example, although each figure Three different laser mediums are only shown, but such medium of another number, such as two or more than three can be provided. By laser medium or pass through whole equipment(Particularly form zigzag path)Different paths and corresponding refrative mirror 310 number Mesh is not limited to disclosed number.
In addition, the functional laser component for solid-state laser, such as calibrator, nonlinear crystal, SESAM(Half Conductor saturable absorption somascope), saturable absorber, polarizer, pockels cell, AOM(Acousto-optic modulator)... it can collect At in laser apparatus.Those skilled in the art when putting into practice invention claimed, by attached drawing, disclosure and The research of appended claims, it is possible to understand that and realize other modifications of the disclosed embodiments.In the claims, word " comprising " is not excluded for other element or steps, and indefinite article "a" or "an" be not excluded for it is multiple.It is mutually different from The only fact for belonging to certain measures described in claim does not indicate that the combination of these measures cannot be used for benefiting.Particularly, institute There is equipment claim that can be freely combined, if significant in this way.Reference marker in claim should not be construed as Limit range.
List of reference signs
100 laser mediums
110 regions pumped
200 pump laser diodes
300 pumping radiation speculums
The exterior section of 301 mirror elements
310 resonator refrative mirrors
The central part of 311 mirror elements
320 resonator end mirrors
330 resonators go out coupling mirror
400 is heat sink
500 laser emissions
510 pumping radiations
600 mirror elements

Claims (9)

1. a kind of optically pumped solid-state laser equipment, including
One or several solid-state laser mediums in laser resonator(100),
By being arranged in the solid-state laser medium(100)The first side one or several first resonator mirrors and be arranged in institute State solid-state laser medium(100)The second side opposite with first side one or several second resonator mirrors(310, 320,330)The laser resonator formed,
It is arranged to the laser emission of the laser resonator(500)Guiding passes through every at least two different straight paths One laser medium(100)First and second resonator mirror(310,320,330),
One or several pump laser diodes(200)With pumping radiation speculum(300),
It is arranged to and passes through pumping radiation(510)In the pumping radiation speculum(300)The reflection at place comes optical pumping institute State solid-state laser medium(100)The pump laser diode(200),
It is disposed in the second side and is designed to the pumping radiation(510)Directly it is reflected into solid-state laser medium (100)The pumping radiation speculum(300),
The wherein described reflection of pump power mirror(300)With second resonator mirror(310,320,330)It is formed on single Mirror element(600)In, and
The wherein described solid-state laser medium(100)It is formed by the quantum well structure on distributed Bragg reflector.
2. optically pumped solid-state laser equipment according to claim 1,
The wherein described solid-state laser medium(100)It is mounted side by side on cooling body(400)On.
3. optically pumped solid-state laser equipment according to claim 2,
Wherein equipment includes at least two solid-state laser mediums(100), each is by the cooling body(400)On it is several The pump laser diode(200)It surrounds.
4. optically pumped solid-state laser equipment according to claim 3,
Wherein mirror element(600)Including being used for each described laser medium(100)A pumping radiation speculum(300), The pumping radiation speculum(300)It is arranged in second resonator mirror(310,320,330)Coupling is formed out with being designed to Close second resonator mirror of mirror(310,320,330)In outside one between.
5. optically pumped solid-state laser equipment according to claim 2,
Wherein equipment includes by the cooling body(400)On several pump laser diodes(200)The list surrounded A solid-state laser medium(100).
6. optically pumped solid-state laser equipment according to claim 5,
Wherein mirror element(600)Including forming second resonator mirror(310,320,330)Center(311)And it is set It counts into the pumping radiation(510)It is reflected into solid-state laser medium(100)And form the pumping radiation speculum(300)'s Outside area(301), second resonator mirror(310,320,330)One of be designed to form out coupling mirror.
7. optically pumped solid-state laser equipment according to claim 6,
The wherein described mirror element(600)The outside area(301)It is designed in the solid-state laser medium(100)Middle generation Pumping radiation(510)Intensity distribution, intensity distribution covering passes through solid-state laser medium(100)Laser emission(500) All different straight paths.
8. optically pumped solid-state laser equipment according to claim 2,
The wherein described pump laser diode is arranged in the cooling body to surround each described solid-state laser medium.
9. according to claim 2 or the optically pumped solid-state laser equipment of claim 5,
The wherein described pump laser diode is Vcsel or the transmitting of electrical pump Vertical extended cavity surface Laser.
CN201380064804.1A 2012-12-11 2013-11-05 The optically pumped solid-state laser equipment of gain with autoregistration pump optical device and enhancing Active CN104823341B (en)

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