CN104808445A - Photoresist spraying equipment - Google Patents
Photoresist spraying equipment Download PDFInfo
- Publication number
- CN104808445A CN104808445A CN201510139164.7A CN201510139164A CN104808445A CN 104808445 A CN104808445 A CN 104808445A CN 201510139164 A CN201510139164 A CN 201510139164A CN 104808445 A CN104808445 A CN 104808445A
- Authority
- CN
- China
- Prior art keywords
- photoresist
- pipeline
- ultrasonic generator
- nozzle
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The invention discloses photoresist spraying equipment which comprises a photoresist storage device, a photoresist pipeline, an ultrasonic generator, a nozzle and a conveying belt. In a closed environment, a liquid photoresist is stored in the photoresist storage device and enters the photoresist pipeline via an output port, a temperature controlled is attached to the photoresist pipeline to control the liquefaction state of the photoresist, the photoresist pipeline is connected with the ultrasonic generator, the ultrasonic generator gasifies the liquid photoresist in the photoresist pipeline and then sprays the photoresist out of the nozzle, a to-be-coated object is fixed on the conveying belt for assembly line type conveyance, and the whole coating process is finished. The system equipment is simple, easy to operate, advanced in coating technology, more uniform in coating effect, time-saving and labor-saving, the cost is saved for an enterprise, and the increase of earnings is promoted.
Description
Technical field
The invention discloses a kind of spraying equipment, particularly a kind of jet-coating photoresit equipment.
Background technology
Coating technique is widely used in paper, film, the coating of glass baseplate and composite packaging.At present, domestic not only in printing packaging enterprise, also have many electronics, liquid crystal industry to use coating technique and equipment, its coating kind and the mode of blowing glue more single, the application of coating technique is also restricted greatly.Which kind of coating the mode of blowing glue no matter any coating equipment complex, adopt, all directly can affect quality and the effect of coating.
Summary of the invention
For above problem, the invention discloses a kind of jet-coating photoresit equipment.In enclosed environment, photoresist storer conveying photoresist is in pipeline, the temperature in pipeline is controlled by photoresist conduit controller, photoresist is kept to be in a liquid state all the time shape, recycling ultrasonic generator converts liquid photoresist to gaseous state, is evenly sprayed onto on the base material be seated on transport tape by nozzle.
A kind of jet-coating photoresit equipment, described jet-coating photoresit equipment comprises photoresist storer, photoresist pipeline, ultrasonic generator, nozzle, transport tape.Photoresist storer is as glue feeder, pipeline keyed in by input photoresist, photoresist pipeline is with temperature controller, control temperature in pipeline within a certain period of time, photoresist is made to be liquefaction, pipeline is connected with ultrasonic generator, and ultrasonic generator is ejected to after photoresist gasification liquid in pipeline on the applied object of travelling belt through nozzle.
A kind of jet-coating photoresit equipment disclosed by the invention, described photoresist pipeline, can Real-Time Monitoring the temperature controlled in pipeline with temperature controller, ensures photoresist liquefaction within a certain period of time, avoids photoresist to solidify in pipeline.
A kind of jet-coating photoresit equipment disclosed by the invention, described ultrasonic generator connects photoresist pipeline and nozzle, utilizes the principle of work of ultrasonic generator, input nozzle portion after the photoresist of gasification of liquid, photoresist after gasification sprays, and reaches evenly finer and smoother coating.
A kind of jet-coating photoresit equipment disclosed by the invention, described photoresist storer and photoresist pipeline connecting place arrange induction valve port, when photoresist pipeline is filled full, valve port is closed automatically, avoids filling and is discontented with, fill often, expend time in length, also avoids filling overfill, waste photoresist.
A kind of jet-coating photoresit equipment disclosed by the invention, described nozzle is long strip type, has multiple jet hole, and surrounding has dividing plate to block, and can gather gas and be ejected to effective coverage.
A kind of jet-coating photoresit equipment disclosed by the invention, described transport tape is provided with stationary installation, prevent applied article by external force affects shift position, antijamming capability is strong, and reliability is high.
Accompanying drawing explanation
Fig. 1 is jet-coating photoresit device structure schematic diagram disclosed by the invention.
Reference numerals list
1, photoresist storer 2, photoresist pipeline 3, pipe temperature controller
4, ultrasonic generator 5, nozzle 6, transport tape.
Embodiment
Below in conjunction with the drawings and specific embodiments, illustrate the present invention further, following embodiment should be understood only be not used in for illustration of the present invention and limit the scope of the invention, after having read the present invention, the amendment of those skilled in the art to the various equivalent form of values of invention has all fallen within the application's claims limited range.
A kind of photoresist coating disclosed by the invention, is characterized in that: described jet-coating photoresit equipment comprises photoresist storer, photoresist pipeline, ultrasonic generator, nozzle, transport tape.Liquid photoresist is stored in photoresist storer 1, enter in photoresist pipeline 2 by delivery outlet, photoresist pipeline 2 is with temperature controller, control the liquefaction of photoresist, photoresist pipeline 2 is connected with ultrasonic generator 3, ultrasonic generator 3 sprays after the liquid photoresist gasification in photoresist pipeline 2 through nozzle 4, and the article be coated with are fixed on transport tape 5 and carry out continuous-flow type transmission, complete whole coating process.
Preferred as one, described photoresist pipeline, with temperature controller, can be monitored and control the temperature in pipeline, ensures that in certain hour, photoresist is in the duct in liquefaction.
Preferred as one, described photoresist pipeline, with temperature controller, can be monitored and control the temperature in pipeline, ensures that in certain hour, photoresist is in the duct in liquefaction.
Preferred as one, described photoresist pipeline, with temperature controller, can be monitored and control the temperature in pipeline, ensures that in certain hour, photoresist is in the duct in liquefaction.
Preferred as one, described photoresist storer is glue feeder, by photoresist input channel, arranges induction valve port with the connecting place of photoresist pipeline, and when photoresist pipeline is filled full, valve port is closed automatically.
Preferred as one, described nozzle is long strip type, has multiple jet hole, and surrounding has dividing plate to block.
Preferred as one, described transport tape is in fact coating base station, is provided with stationary installation, prevent applied article by external force affects shift position.
Claims (6)
1. a jet-coating photoresit equipment, it is characterized in that: liquid photoresist is stored in photoresist storer, enter in photoresist pipeline by delivery outlet, photoresist pipeline is with temperature controller, control the liquefaction of photoresist, photoresist pipeline is connected with ultrasonic generator, and ultrasonic generator sprays after the liquid photoresist gasification in photoresist pipeline through nozzle, and the article be coated with are fixed on transport tape and carry out continuous-flow type transmission.
2. photoresist pipeline according to claim 1, is characterized in that: described photoresist pipeline, with temperature controller, can be monitored and control the temperature in pipeline, ensures that in certain hour, photoresist is in the duct in liquefaction.
3. ultrasonic generator according to claim 1, is characterized in that: described photoresist pipeline, with temperature controller, can be monitored and control the temperature in pipeline, ensures that in certain hour, photoresist is in the duct in liquefaction.
4. photoresist storer according to claim 1, it is characterized in that: described photoresist storer is glue feeder, by photoresist input channel, induction valve port is set with the connecting place of photoresist pipeline, when photoresist pipeline is filled full, valve port is closed automatically.
5. nozzle according to claim 1, is characterized in that: described nozzle is long strip type, has multiple jet hole, and surrounding has dividing plate to block.
6. transport tape according to claim 1, is characterized in that: described transport tape be in fact coating base station, be provided with stationary installation, prevent applied article by external force affects shift position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510139164.7A CN104808445A (en) | 2015-03-28 | 2015-03-28 | Photoresist spraying equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510139164.7A CN104808445A (en) | 2015-03-28 | 2015-03-28 | Photoresist spraying equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104808445A true CN104808445A (en) | 2015-07-29 |
Family
ID=53693397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510139164.7A Pending CN104808445A (en) | 2015-03-28 | 2015-03-28 | Photoresist spraying equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104808445A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113448172A (en) * | 2020-03-27 | 2021-09-28 | 长鑫存储技术有限公司 | Photoresist coating device and method |
-
2015
- 2015-03-28 CN CN201510139164.7A patent/CN104808445A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113448172A (en) * | 2020-03-27 | 2021-09-28 | 长鑫存储技术有限公司 | Photoresist coating device and method |
| WO2021190462A1 (en) * | 2020-03-27 | 2021-09-30 | 长鑫存储技术有限公司 | Photoresist coating device and method |
| US11526080B2 (en) | 2020-03-27 | 2022-12-13 | Changxin Memory Technologies, Inc. | Device and method for photoresist coating |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2016111848A3 (en) | Fluid dispensing system | |
| CN106457287B (en) | Coating system and method for coating an object | |
| CN104808445A (en) | Photoresist spraying equipment | |
| AR113037A1 (en) | SYSTEMS AND METHODS FOR FILLING CONTAINERS | |
| CN108687816A (en) | Membrane material cutting method, cutting means, compound film material, backlight module and display device | |
| CN105797886A (en) | Electrostatic paint spraying system | |
| CN211678340U (en) | Pipeline surface finish film thickness control system | |
| CN202316177U (en) | Spraying and atomizing device used for feed production | |
| CN104495389A (en) | Material conveying method | |
| CN203916995U (en) | A kind of corrugated paper production line automatic double surface gluer | |
| CN202527339U (en) | Glue spraying control system of hot melt glue machine | |
| CN204730231U (en) | Material diversion device | |
| CN203275962U (en) | Centralized control system for long-distance pipeline coal conveying head end station | |
| CN108940755A (en) | A kind of environmental protection corrugated board adhesive cyclic utilization system | |
| CN209427415U (en) | A kind of device of fixed Wound adhesive tape | |
| CN204159508U (en) | For the sizer that sanitary napkin is produced | |
| CN207709307U (en) | Glue usage amount continuous metering device | |
| CN202741274U (en) | Anti-bonding agent coating device | |
| US20070295836A1 (en) | Powder delivery method and apparatus | |
| CN206661146U (en) | A kind of high-precision liquid feed system | |
| CN206424953U (en) | A kind of arrangement of silica gel chemical industry workshop | |
| CN104418090A (en) | Pneumatic pipeline transmission device | |
| CN103787043A (en) | Pipe belt machine control device and starting and adjusting method of pipe belt machine | |
| CN205165004U (en) | Environmental protection plastic sheet production facility | |
| WO2021079194A3 (en) | Dispensing systems and methods including online remixing of thermal management and/or emi mitigation materials |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150729 |