CN104767944B - The multi-tap EMCCD amplifying circuits of output-consistence can be improved - Google Patents

The multi-tap EMCCD amplifying circuits of output-consistence can be improved Download PDF

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Publication number
CN104767944B
CN104767944B CN201510174290.6A CN201510174290A CN104767944B CN 104767944 B CN104767944 B CN 104767944B CN 201510174290 A CN201510174290 A CN 201510174290A CN 104767944 B CN104767944 B CN 104767944B
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tap
amplifier
emccd
short circuit
lead
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CN104767944A (en
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白雪平
汪朝敏
杨洪
郑渝
王小东
李立
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CETC 44 Research Institute
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CETC 44 Research Institute
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Abstract

A kind of multi-tap EMCCD amplifying circuits that can improve output-consistence, including multiple tap amplifiers, with having drain electrode, reset leakage, resetting gate and amplifier, its innovation is each tap amplifier:The drain electrode of all tap amplifiers passes through the mutual short circuit of lead by the mutual short circuit of lead, the reset leakage of all tap amplifiers, and the resetting gate of all tap amplifiers passes through lead mutual short circuit the amplifier of all tap amplifiers by the mutual short circuit of lead.The method have the benefit that:The uniformity of multi-tap EMCCD tap outputs can be significantly improved, improves image quality.

Description

The multi-tap EMCCD amplifying circuits of output-consistence can be improved
Technical field
The present invention relates to a kind of EMCCD amplifying circuits, more particularly to a kind of multi-tap EMCCD that can improve output-consistence Amplifying circuit.
Background technology
Phase earlier 1990s J.Hynecek proposes the theory that electron multiplication is used for CCD, in imaging sensor Inside is directly realized by the amplification of signal electron, and subsequent EMCCD Patents and product occur in succession.EMCCD appearance is true All solid state micro-opto image device in positive meaning, compared with traditional low-light level imaging device ICCD, EBCCD, EMCCD need not be through The transfer processes such as electrical-optical, optical-electronic are crossed, imaging chain is simple, because EMCCD has low small volume, noise, high sensitivity, detection The advantages such as ability is strong, make it receive much concern and be developed rapidly.
EMCCD technologies be also referred to as " gain on piece " technology, it be traditional CCD horizontal register and sense amplifier it Between increase by a string of doubling registers, by doubling register apply high drive, signal charge occur " ionization by collision ", so as to The amplification to signal electron is realized, gain is up to up to ten thousand times.EMCCD is before signal electron reaches sense amplifier to signal electricity Son is amplified, it is suppressed that is read limitation of the noise to detectivity, is greatly improved the detectivity of device.
With common CCD similarly, EMCCD can also be by increasing tap(That is tap amplifier)Quantity reads speed to improve Degree;But with the increase of number of taps, the inconsistency of each tap output will cause image quality to decline.
The content of the invention
The problem of in background technology, the present invention propose a kind of multi-tap EMCCD that can improve output-consistence and put Big circuit, including multiple tap amplifiers, each tap amplifier, which has, to drain, with resetting leakage, resetting gate and amplifier, its Innovation is:The drain electrode of all tap amplifiers passes through lead by the mutual short circuit of lead, the reset leakage of all tap amplifiers Mutual short circuit, the resetting gate of all tap amplifiers are passed through the amplifier of all tap amplifiers by the mutual short circuit of lead The mutual short circuit of lead.
The principle of aforementioned schemes is:It is general in the prior art to use more set power circuits to be multiple for multi-tap EMCCD Tap amplifier is powered respectively, due to each power level for being provided to each tap amplifier of set power circuit exist it is inconsistent, This results in the output of each tap amplifier there is also inconsistent, image quality is influenceed very big;Using the solution of the present invention Afterwards, it is shorted together respectively drain electrode, reset leakage, resetting gate and the amplifier of each tap amplifier, makes to be loaded into each take out Power level uniformity on head amplifier is improved, and can significantly improve the uniformity of each tap amplifier output.
Preferably, the quantity of the tap amplifier is 2 or more than 2.
Preferably, the tap amplifier uses two-stage source follow-up amplifier or three-level source follow-up amplifier.
Aforementioned schemes are depended on, when making power circuit, a set of power circuit can be only made, be amplified by multiple taps Device is multiplexed this set of power circuit, is simplified circuit structure.
The method have the benefit that:The uniformity of multi-tap EMCCD tap outputs can be significantly improved, improves imaging Quality.
Brief description of the drawings
Fig. 1, prior art principle schematic;
Fig. 2, the present invention principle schematic;
Fig. 3, embodiment of the present invention one(Tap amplifier uses two-stage source follow-up amplifier, tap amplifier in figure Quantity is 2);
Fig. 4, embodiment of the present invention two(Tap amplifier uses three-level source follow-up amplifier, tap amplifier in figure Quantity is 2);
Title in figure corresponding to each mark is respectively:Photosensitive area 1, memory block 2, horizontal transfer area 3, multiplication region 4, take out Head amplifier 5, output node 6, drain electrode VDD, reset leakage VRD, resetting gate VRG, amplifier ground VSS, output grid VOG, tap amplifier Output end VOS
Embodiment
A kind of multi-tap EMCCD amplifying circuits that can improve output-consistence, including multiple tap amplifiers, each tap Amplifier all has drain electrode VDD, reset leakage VRD, resetting gate VRGV with amplifierSS, its innovation is:All tap amplifiers Drain VDDBy the mutual short circuit of lead, the reset leakage V of all tap amplifiersRDBy the mutual short circuit of lead, all tap amplifications The resetting gate V of deviceRGBy the mutual short circuit of lead, the amplifier of all tap amplifiers ground VSSPass through the mutual short circuit of lead.
Further, the quantity of the tap amplifier is 2 or more than 2.
Further, the tap amplifier uses two-stage source follow-up amplifier or three-level source follow-up amplifier.
Further, the multiple tap amplifier is multiplexed a set of power circuit.
Present invention can apply to just according to frame transfer EMCCD, back-illuminated frame transfer EMCCD, frame interior lines EMCCD, visible ray EMCCD, X ray EMCCD etc..
Those skilled in the art shall yet further be noted that in process procedure, should try one's best and accomplish the structure for making each tap amplifier And technique making parameter is identical, such as pipe type(Exhaust pipe or reinforced pipe), breadth length ratio, threshold value implantation concentration, LDD implantation concentrations Deng.

Claims (3)

1. a kind of multi-tap EMCCD amplifying circuits that can improve output-consistence, including multiple tap amplifiers, each tap are put Big device all has drain electrode (VDD), reset leakage (VRD), resetting gate (VRG) and amplifier ground (VSS), it is characterised in that:All taps are put Drain electrode (the V of big deviceDD) pass through the mutual short circuit of lead, the reset leakage (V of all tap amplifiersRD) pass through the mutual short circuit of lead, institute There is the resetting gate (V of tap amplifierRG) by the mutual short circuit of lead, the amplifier of all tap amplifiers ground (VSS) by drawing The mutual short circuit of line;The multiple tap amplifier is multiplexed a set of power circuit.
2. the multi-tap EMCCD amplifying circuits according to claim 1 that output-consistence can be improved, it is characterised in that:Institute The quantity for stating tap amplifier is 2 or more than 2.
3. the multi-tap EMCCD amplifying circuits according to claim 1 that output-consistence can be improved, it is characterised in that:Institute State tap amplifier and use two-stage source follow-up amplifier or three-level source follow-up amplifier.
CN201510174290.6A 2015-04-14 2015-04-14 The multi-tap EMCCD amplifying circuits of output-consistence can be improved Active CN104767944B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004172267A (en) * 2002-11-19 2004-06-17 Matsushita Electric Ind Co Ltd Solid-state imaging device
JP2005167273A (en) * 2005-01-19 2005-06-23 Matsushita Electric Ind Co Ltd Solid-state image sensor
CN101119446A (en) * 2006-08-01 2008-02-06 松下电器产业株式会社 Solid state imaging device and imaging device
CN102324893A (en) * 2011-06-16 2012-01-18 中国电子科技集团公司第四十四研究所 Amplifier structure for improving output consistency of CCDs (Charge Coupled Devices)
CN103219345A (en) * 2012-01-18 2013-07-24 佳能株式会社 Image pickup apparatus and image pickup system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004172267A (en) * 2002-11-19 2004-06-17 Matsushita Electric Ind Co Ltd Solid-state imaging device
JP2005167273A (en) * 2005-01-19 2005-06-23 Matsushita Electric Ind Co Ltd Solid-state image sensor
CN101119446A (en) * 2006-08-01 2008-02-06 松下电器产业株式会社 Solid state imaging device and imaging device
CN102324893A (en) * 2011-06-16 2012-01-18 中国电子科技集团公司第四十四研究所 Amplifier structure for improving output consistency of CCDs (Charge Coupled Devices)
CN103219345A (en) * 2012-01-18 2013-07-24 佳能株式会社 Image pickup apparatus and image pickup system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
CCD片上放大器直流输出电压影响因素分析;韩恒利,汪凌,唐利等;《半导体光电》;20131215;第34卷(第6期);第935-938页 *

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