CN104765145A - Achieving method of varifocal lens based on reflection-type micromirror arrays - Google Patents
Achieving method of varifocal lens based on reflection-type micromirror arrays Download PDFInfo
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- CN104765145A CN104765145A CN201510176218.7A CN201510176218A CN104765145A CN 104765145 A CN104765145 A CN 104765145A CN 201510176218 A CN201510176218 A CN 201510176218A CN 104765145 A CN104765145 A CN 104765145A
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- micro mirror
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Abstract
The invention relates to the field of optics, in particular to an achieving method of a varifocal lens based on reflection-type micromirror arrays. The method includes the steps that a switch of each unit in an MEMS micromirror array is controlled through programming by using amplitude modulation capability for light of an MEMS micromirror and two-dimensional space modulation capability for a light field of an array modulator, a reflection-type Fresnel wave zone plate with adjustable parameters is generated, the focusing function is completed, and a varifocal optical system is formed. The method has the advantages that the focusing is convenient and flexible, the structure is simple, the size is small, the repeatability is good, the precision is high, and the working band is wide. The method can be widely used in precise optical imaging devices such as a microscope, a digital camera, a telescope and the like.
Description
Technical field
The present invention relates to optical field, in particular, the present invention relates to a kind of method realizing Varifocal mirror based on micro mirror array.
Technical background
Variable focal length optical system or zoom lens are widely used in the precision optics imaging devices such as microscope, digital camera, telescope, are a kind of important optical elements.And traditional variable focal length optical system is divided into two classes usually, a kind of is the camera lens switching different focal, another kind is the position of adjustable lens on optical axis, both need larger mechanical hook-up to carry out shift in position, there is low precision, poor repeatability, zoom capabilities is limited, volume is large, the shortcoming of malfunction.
In recent years, along with the development of diffraction optics, diffraction optics not only can increase the degree of freedom of design in optical design, and all many-sided limitations of conventional optical systems can be broken through, improving system imaging quality, reduce volume and show the unrivaled advantage of conventional optical systems in reducing costs etc., and be subject to the attention of increasing optical designers.Fresnel zone plate, as the typical diffraction optical element of one, has relatively large numerical aperture/focal distance ratio, and it can be focused near field diffraction pattern, and the optical system limited by a lot of volume is adopted.To traditional optical lens such as ultraviolet region, infrared region, Terahertz district and high intensity laser beams due to the excessive incompetent occasion of loss, Fresnel zone plate can become a favorable substitutes of lens.
Original intention of the present invention utilizes MEMS micro mirror array to the Modulation and Amplitude Modulation ability of light, the Fresnel zone plate of dynamic generation Parameter adjustable, forms the variable focal length optical system that a kind of zoom is quick flexibly, structure is simple, volume is little, reproducible, precision is high, working band is wide.
Summary of the invention
The invention reside in and a kind of method realizing Varifocal mirror based on micro mirror array is provided, by making micro mirror array dynamically generate the Fresnel zone plate of Parameter adjustable to the switch of micro mirror array programming Control micro mirror unit, complete focusing function, solve that traditional variable focal length optical system low precision, poor repeatability, zoom capabilities are limited, while malfunction etc. is not enough, make again zoom system, pancreatic system have structure is simple, volume is little, working band is wide advantage.
Technical scheme of the present invention is as follows:
A kind of method realizing Varifocal mirror based on micro mirror array, it is characterized in that: can selective tilting be carried out according to micro mirror array, and then the amplitude-modulated principle realized spatial light, modulating the incident light ripple is carried out with programming Control micro mirror array, it is made to form Fresnel striped, the light that the wavelet band that each striped is formed at zone plate optical axis focus place sends is relevant to be strengthened, programming changes radius and the endless belt number of Fresnel zone plate, realizes with the variable focus of the program control optical focus switchable imaging system of reflective micro mirrors array foundation.
Further, realize variable focus based on reflective micro mirrors array, concrete operation method is: pointolite parallel is incident on micro mirror array through expanding with collimating, the analog image of the Fresnel zone plate that the programming of micro mirror array Display control computer generates.
For the generation of Fresnel analog image on micro mirror array, the zone plate black white image programming Control micro mirror array that computing machine is drawn is utilized optionally to overturn, the all micro mirror unit corresponded on the half-wave zone position of white are opened, and all micro mirror unit corresponded on the half-wave zone position of black are closed, Modulation and Amplitude Modulation is carried out to the light wave irradiated on it, obtains the optical property of approximate Fresnel zone plate.
In order to make zoom system, pancreatic system volume less, another kind of example is, for the generation of Fresnel analog image on micro mirror array, the zone plate black white image programming Control micro mirror array generated in embedded system is utilized optionally to overturn, the all micro mirror unit corresponded on the half-wave zone position of white are opened, and all micro mirror unit corresponded on the half-wave zone position of black are closed, Modulation and Amplitude Modulation is carried out to the light wave irradiated on it, obtain the optical property of approximate Fresnel zone plate.Make focusing system less compacter.
The invention has the beneficial effects as follows::
1. utilize MEMS micro mirror to the Modulation and Amplitude Modulation ability of light and array modulators to the two-dimensional space modulation capability of light field, generate the dynamic Fresnel zone plate of Parameter adjustable, the variable focal length optical system of formation has the advantage that zoom is quick flexibly, structure is simple, volume is little, reproducible, precision is high.
2. utilize MEMS micro mirror array to carry out light field modulation, micro mirror surfaces can be coated with high-performance metal reflectance coating, relative to traditional transmitted light lens and phase modulation-type zone plate, has wider working band.
3. the method has practicality widely, can be applicable to the precision optics imaging devices such as microscope, digital camera, telescope.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that Fresnel zone plate is focused.
Fig. 2 is Fresnel zone plate figure and micro mirror array analog wave strap schematic diagram.
Fig. 3 is the optical system for testing example realizing Varifocal mirror system based on micro mirror array.
Fig. 4 is micro mirror unit operating diagram.
In figure: 1 is pointolite; 2 for expanding and collimating mirror; 3 is micro mirror array and driving circuit; 4 is computing machine or embedded system.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described:
Fig. 1 is the schematic diagram that Fresnel zone plate is focused.The present invention is based on the diffraction focusing principle of Fresnel zone plate to light, fresnel's zone plate can regard a kind of Variable line-space gratings as in fact, and modal circular Fresnel zone plate is made up of one group of concentric endless belt.Generally zone plate can be divided into amplitude type zone plate and phase-type zone plate.Fig. 1 is an amplitude type zone plate schematic diagram.According to Fresnel diffraction principle, by the odd bands in shielding fresnel zone or even bands, make the half-wave zone of printing opacity relative to when focus place optical path difference is the integral multiple of wavelength X on zone plate optical axis, the light intensity of this point is greatly enhanced, reach the effect of focusing, the radius demand fulfillment formula of every grade of half-wave zone
Meanwhile, focal distance f and wavelength X are inversely proportional to, and formula is as follows
So, by regulating the radius r of every one-level half-wave zone
n, just can focus f.Such as, r is worked as
nwhen expanding 2 times, focal length expands 4 times.It should be noted that, how many focusing f of the total number of rings of zone plate do not affect, and only have impact to resolution and depth of focus.
Fig. 2 is Fresnel zone plate figure and micro mirror array analog wave strap schematic diagram.When using the mode of reflection instead of transmission, the function of Fresnel zone plate focusing can be realized equally.Because the band structure of Fresnel zone plate is very meticulous, and along with the technological development of micro-electromechanical system (MEMS) technology, MEMS micro mirror array is adopted to make the Fresnel zone plate dynamically generating different parameters become possibility.Fig. 2 left side is conventional Fresnel zone plate figure, by Digital Discrete, figure can be loaded on MEMS micro mirror array, although some indexs can be made to decline, as resolution and the efficiency of light energy utilization, do not affect focusing function, when micromirror size is enough little time, index declines and can accept.That figure is loaded into the schematic diagram after on MEMS micro mirror array on the right of Fig. 2, the micro mirror unit of Fresnel zone plate white half-wave zone part reflects light to imaging surface, and the micro mirror unit of black half-wave zone part reflects light to beyond imaging surface, conductively-closed and sponging, realizes the function of reflective Fresnel zone plate.When regulating the radius of half-wave zone, loading graphic change, focal distance f can be conditioned.Utilize MEMS micro mirror to the Modulation and Amplitude Modulation ability of light and array modulators to the two-dimensional space modulation capability of light field, the present invention has the advantage that structure is simple, volume is little.
Fig. 3 is the optical system for testing example realizing Varifocal mirror system based on micro mirror array.The light of pointolite 1 outgoing through its rear expand with collimating mirror 2 after, incide on micro mirror array and driving circuit 3 with the form of directional light, being programmed by computing machine or embedded system 4 is loaded on micro mirror array by Fresnel zone plate figure, and the light finally by Fresnel zone plate diffraction focuses on imaging surface.Wherein pointolite can select laser to test.Because computing machine or embedded system can according to the programs finished, the Fresnel zone plate parameter that dynamic adjustments micro mirror array generates, whole variable focal length optical system realizes zoom and has fast flexible, reproducible, advantage that precision is high, and this overcomes the bad shortcoming of the slow and low precision in tradition machinery location, repeatability.
Fig. 4 is a kind of micro mirror unit example operating diagram meeting job requirement.MEMS micro mirror can drive micro mirror unit minute surface to deflect by piezoelectricity, magnetic force, electrostatic, emergent light angle is departed from, reaches the effect of optical wavelength gating.Micro mirror surfaces can be coated with high-performance metal reflectance coating, relative to traditional transmitted light lens and phase modulation-type zone plate, has wider working band.This advantage is especially outstanding at infrared, Terahertz, ultraviolet, X-ray wave band.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from spirit of the present invention and category.
Claims (4)
1. one kind realizes the method for Varifocal mirror based on micro mirror array, it is characterized in that: can selective tilting be carried out according to micro mirror array, and then the amplitude-modulated principle realized spatial light, modulating the incident light ripple is carried out with programming Control micro mirror array, it is made to form Fresnel striped, the light that the wavelet band that each striped is formed at zone plate optical axis focus place sends is relevant to be strengthened, programming changes radius and the endless belt number of Fresnel zone plate, realizes with the variable focus of the program control optical focus switchable imaging system of reflective micro mirrors array foundation.
2. a kind of method realizing zoom lens based on reflective micro mirrors array according to claim 1, it is characterized in that, variable focus is realized based on reflective micro mirrors array, concrete operation method is: pointolite parallel is incident on micro mirror array through expanding with collimating, the analog image of the Fresnel zone plate that micro mirror array display programming generates.
3. a kind of method realizing Varifocal mirror based on micro mirror array according to claim 2, it is characterized in that: the generation of Fresnel analog image on micro mirror array, the zone plate black white image programming Control micro mirror array that computing machine is drawn is utilized optionally to overturn, the all micro mirror unit corresponded on the half-wave zone position of white are opened, and all micro mirror unit corresponded on the half-wave zone position of black are closed, Modulation and Amplitude Modulation is carried out to the light wave irradiated on it, obtains the optical property of approximate Fresnel zone plate.
4. a kind of method realizing Varifocal mirror based on micro mirror array according to claim 2, it is characterized in that: the generation of Fresnel analog image on micro mirror array, the zone plate black white image programming Control micro mirror array generated in embedded system is utilized optionally to overturn, the all micro mirror unit corresponded on the half-wave zone position of white are opened, and all micro mirror unit corresponded on the half-wave zone position of black are closed, Modulation and Amplitude Modulation is carried out to the light wave irradiated on it, obtains the optical property of approximate Fresnel zone plate.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105322439A (en) * | 2015-11-24 | 2016-02-10 | 电子科技大学 | Light-beam-controllable nanowire laser based on patterning growth |
| CN107116307A (en) * | 2016-08-03 | 2017-09-01 | 塔工程有限公司 | Laser scriber |
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| CN1982949A (en) * | 2005-12-16 | 2007-06-20 | 鸿富锦精密工业（深圳）有限公司 | Liquid-crystal lens system and forming method |
| US20070139777A1 (en) * | 2005-12-21 | 2007-06-21 | Intel Corporation | Reconfigurable zone plate lens |
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2015
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1982949A (en) * | 2005-12-16 | 2007-06-20 | 鸿富锦精密工业（深圳）有限公司 | Liquid-crystal lens system and forming method |
| US20070139777A1 (en) * | 2005-12-21 | 2007-06-21 | Intel Corporation | Reconfigurable zone plate lens |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105322439A (en) * | 2015-11-24 | 2016-02-10 | 电子科技大学 | Light-beam-controllable nanowire laser based on patterning growth |
| CN105322439B (en) * | 2015-11-24 | 2018-06-19 | 电子科技大学 | It is a kind of based on growing patterned light beam controllable nano laser line generator |
| CN107116307A (en) * | 2016-08-03 | 2017-09-01 | 塔工程有限公司 | Laser scriber |
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Application publication date: 20150708 |