CN104753307A - Magnetic-levitation planar motor - Google Patents
Magnetic-levitation planar motor Download PDFInfo
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- CN104753307A CN104753307A CN201310752310.4A CN201310752310A CN104753307A CN 104753307 A CN104753307 A CN 104753307A CN 201310752310 A CN201310752310 A CN 201310752310A CN 104753307 A CN104753307 A CN 104753307A
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Abstract
The invention discloses a magnetic-levitation planar motor, comprising a magnetic-steel array and a coil array arranged on the magnetic-steel array, wherein the magnetic-steel array includes a first square magnetic-steel and a second square magnetic-steel arranged around the first magnetic-steel, the polarity of the second magnetic-steel is opposite to that of the first magnetic-steel, four sides of the first magnetic-steel and/or the second magnetic-steel are seamlessly connected by third magnetic-steel taking the shape of cubes and provided with chamfers. According to the magnetic-levitation planar motor, the plurality of coils are adopted to form a power generation body, so that the motor rotor structure is more compact and firmer. The structure of the magnetic-steel array is changed, so that the fill-in ratio of the magnetic-steel is improved, and the magnetic density distribution of the motor is improved; furthermore, under the same condition, the thrust constant of the motor is improved for at least 2%.
Description
Technical field
The present invention relates to IC manufacturing field, particularly a kind of levitation planar motor.
Background technology
In lithographic equipment, many occasions need to use multiple degrees of freedom drive unit, levitation planar motor can realize six-freedom motion, compared with tradition " H " type or " ten " font planar motor structure, levitation planar motor is simple and compact for structure, and integral rigidity is high, and have can Direct driver, the feature such as mechanical friction and non-recoil, be beneficial to the higher acceleration performance of realization and positioning precision, therefore have very tempting prospect in mask aligner Long travel work stage field of operation.
As shown in Figure 1, existing levitation planar motor, comprises magnetic steel array and coil array.Wherein, magnetic steel array comprises some magnet steel unit, as shown in Figure 2, magnet steel unit comprises the first magnet steel 11 and four the second magnet steel 12 around the first magnet steel, described first magnet steel is N pole magnet steel or S pole magnet steel, first magnet steel 11 and the second magnet steel 12 are all square magnetic steels, by cuboid the 3rd magnet steel between first magnet steel 11 and the second magnet steel 12: a 3rd magnet steel 13a, No. two the 3rd magnet steel 13b, No. three the 3rd magnet steel 13c, No. four the 3rd magnet steel 13d connect, the magnetic steel array that this kind of structural design is formed, in the intersection of four the 3rd magnet steel, a square space will be produced, thus cause in magnetic steel array, there is several such square interstice, thus cause the magnetic of magnetic steel array close little, back side magnetic is revealed large.
As shown in Figure 3, the coil array of prior art is made up of 12 coils, and every three coils form a body of having an effect, and comprises and to have an effect body 21a, 21b along first axial first, and to have an effect body 22a, 22b along second axial second.Wherein first have an effect after body 21a, 21b pass into the electric current of certain phase difference and produce Z-direction thrust, X is to thrust and Rx, Ry, Rz to torque; Second has an effect after body 22a, 22b energising produces Z-direction thrust, and Y-direction thrust and Rx, Ry, Rz are to torque.Because described first have an effect body 21a, 21b and second has an effect that body 22a, 22b are rectangular to be arranged on magnetic steel array, cause levitation planar motor Structure of mover compact not.
Summary of the invention
The invention provides a kind of levitation planar motor, to overcome close little, the problem that planar motor thrust is limited of levitation planar motor magnetic steel array magnetic in prior art.
For solving the problems of the technologies described above, the invention provides a kind of levitation planar motor, comprise: magnetic steel array and the coil array be arranged on described magnetic steel array, square second magnet steel that described magnetic steel array comprises square first magnet steel and arranges around the first magnet steel, described second magnet steel polarity is contrary with the first magnet steel, and four limits of described first magnet steel and/or the second magnet steel are by being provided with the seamless connection of the 3rd magnet steel of the rectangular shape of chamfering; Also be provided with some triangle magnet steel around described magnetic steel array, described coil array comprises four pieces of bodies of having an effect, and every block body of having an effect is made up of some coils, and the number of described coil is 6+3n, and wherein, n is nonnegative integer.
As preferably, described first magnet steel is N-type magnet or S type magnet, and described 3rd magnet steel is H type magnet, and the direction of magnetization of described H type magnet is pointed to N-type magnet or deviates from S type magnet.
As preferably, the Magnetic Phase of the magnetic of described triangle magnet steel and the magnetic of described first magnet steel or the second magnet steel with.
As preferably, described coil is printed coil (PCB coil), comprises some layers of conductor, and the joint place of conductor and conductor is provided with insulator.
As preferably, in described coil, conductor part is copper, and insulator part is glass epoxy resin.
As preferably, the have an effect two ends of body of every block are provided with through hole corresponding to some and described coil.
As preferably, adopt silica gel wire bonding between described conductor or connect with PCB keyset.
As preferably, described in the coils connected in series had an effect in body adopt a road three-phase circuit, and to be driven by a three-phase drive device.
As preferably, described in every six coils in body of having an effect adopt a road three-phase circuit, a described road three-phase circuit is driven by one group of three-phase drive device.
As preferably, in described three-phase circuit, the electrical degree of three-phase current differs 60 degree or 120 degree successively.
As preferably, the pole span between described first magnet steel and the second magnet steel is τ, described in the centreline spacing of adjacent two coils in body of having an effect be τ/3.
Compared with prior art, the present invention has the following advantages:
1, in the present invention, four limits of the first magnet steel and/or the second magnet steel by being provided with the seamless connection of the 3rd magnet steel of the rectangular shape of chamfering, and are also provided with some triangle magnet steel around magnetic steel array.The structural change of magnetic steel array, not only increases magnet steel fill-in ratio, improves the close distribution of motor magnetic; And under equal conditions, make the thrust constant of motor increase at least 2%.
2, the present invention adopts some coils to form body of having an effect, and makes electric mover structure more compact, firm.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing levitation planar motor;
Fig. 2 is the magnetic steel array structural representation of levitation planar motor in prior art;
Fig. 3 is the coils array construction schematic diagram of levitation planar motor in prior art;
Fig. 4 is the structural representation of levitation planar motor in the embodiment of the invention;
Fig. 5 is the magnetic steel array structural representation of levitation planar motor in the embodiment of the invention;
Fig. 6 is the coils array construction schematic diagram of levitation planar motor in the embodiment of the invention;
Fig. 7 is the structural representation of through hole in embodiment of the invention coil array;
Fig. 8 and Fig. 9 is respectively the connection diagram of embodiment of the invention coil;
Figure 10 is the inside connection diagram (ground floor and the second layer) of embodiment of the invention coil;
Figure 11 is the inside connection diagram (layer last and layer second from the bottom) of embodiment of the invention coil.
In Fig. 1 ~ 3: 11-first magnet steel, 12-second magnet steel, 13a-the 3rd magnet steel, 13b-No. bis-the 3rd magnet steel, 13c-No. tri-the 3rd magnet steel, 13d-No. tetra-the 3rd magnet steel, 21a, 21b-first has an effect body, and 22a, 22b-second has an effect body.
In Fig. 4 ~ 11: 100-magnetic steel array, 101-first magnet steel, 102-second magnet steel, 103a-the 3rd magnet steel, 103b-No. bis-the 3rd magnet steel, 103c-No. tri-the 3rd magnet steel, 103d-No. tetra-the 3rd magnet steel, 104-triangle magnet steel;
200-coil array, 201a, 201b-first has an effect body, and 202a, 202b-second has an effect body, 203-coil, 2031-conductor, 204-through hole.
Embodiment
For enabling above-mentioned purpose of the present invention, feature and advantage become apparent more, are described in detail the specific embodiment of the present invention below in conjunction with accompanying drawing.It should be noted that, accompanying drawing of the present invention all adopts the form of simplification and all uses non-ratio accurately, only in order to object that is convenient, the aid illustration embodiment of the present invention lucidly.
As shown in Figure 4, levitation planar motor of the present invention, comprising: magnetic steel array 100(motor stator) and the coil array 200(electric mover that is arranged on described magnetic steel array 100).
As shown in Figure 5, four square second magnet steel 102 that described magnetic steel array 100 comprises square first magnet steel 101 and arranges around the first magnet steel 101, described first magnet steel 101 is N-type magnetic pole or S type magnetic pole, and described second magnet steel 102 polarity is contrary with the first magnet steel 101.Preferably, four limits of described first magnet steel 101 and/or the second magnet steel 102 are by being provided with the seamless connection of the 3rd magnet steel of the rectangular shape of chamfering, described 3rd magnet steel comprises: the 3rd magnet steel 103a, No. two the 3rd magnet steel 103b, No. three the 3rd magnet steel 103c, No. four the 3rd magnet steel 103d, and the direction of magnetization of each 3rd magnet steel points to N-type magnetic pole or away from S type magnetic pole.The present invention, by arranging chamfering at the two ends of the 3rd magnet steel, makes four of intersection the 3rd magnet steel agree with, and tight produces, and improves the close distribution of magnetic of magnetic steel array.
Preferably, described magnetic steel array 100 surrounding adds some triangle magnet steel 104, and the magnetic further increasing magnetic steel array is close, and under making equal conditions, the thrust constant of motor increases at least 2%.
As shown in Figure 6, described coil array 200(electric mover) comprise and to have an effect body 201a, 201b and to have an effect body 202a, 202b along second axial second along first axial first; Wherein, first the rear X that produces of body 201a and 201b energising is had an effect to thrust, Z-direction thrust and Rx, Ry, Rz torque; Second has an effect after body 202a, 202b energising produces Y-direction thrust, Z-direction thrust and Rx, Ry, Rz torque.
Preferably, every block body of having an effect is made up of 12 coils 203, and the number of described coil 203 can increase according to actual needs or reduce, but its number must meet 6+3n bar, wherein n=0,1,2,3...(and nonnegative integer).Further, define the first magnet steel 101 and the second magnet steel 102 centreline spacing is τ (pole span), then in body of having an effect the centreline spacing of every two coils 203 be τ/3(specifically as shown in Figure 8 and Figure 9).
In the present embodiment, as preferably, described coil 203 adopts PCB structure, and be namely provided with some layers of conductor 2031 in described coil 203, the joint place between conductor 2031 and conductor 2031 is provided with insulator.Described conductor part is copper, and insulator part is FR4(glass epoxy resin glass).
As shown in Figure 7, the have an effect two ends of body of every block are provided with some through holes 204, in these through holes 204, have three for connecing three-phase drive device, remaining through hole 204 be all for coil 204 each layers of conductor 2031 between connection.Incorporated by reference to Figure 10, the through hole 204 in pcb board for the interlayer wiring of coil 203 inside, corresponding two through holes 204 of every one deck conductor 2031.That is, every layer of conductor 2031 two ends have one, and namely a through hole 204 connects two layer conductors.Certainly, the hole count of conductor 2031 number of plies and through hole 204 can increase according to the actual requirements or reduce, but while number of plies increase, the thickness of coil 203 also can correspondingly increase.Further, the connected mode of body coil 203 had an effect described in has multiple:
As shown in Figure 8, in body of having an effect, every six coils 203 connect a road three-phase electricity to a kind of connected mode, adopt " Y " type connected mode.Particularly: in Fig. 86, left side coil 203 connect three-phase electricity A1 end, B1 end and C1 end; 6 coils 203 in the right connect A2 end, B2 end and C2 end respectively, and in this kind of mode of connection, every block body of having an effect needs two three-phase drive devices to drive.When wherein one group of coil (6) fault, can guarantee that another group coil 203 normally works.
As preferably, the electrical degree difference 60 degree or 120 degree of electric current in described three-phase circuit.Particularly, when the electrical current direction of B phase is identical with A, C two-phase, when namely coil array 200 is driver connected, B phase is just connect, the electrical degree difference 60 degree now in three-phase circuit.And when the electrical current direction of B phase is contrary with A, C two-phase, when namely coil array 200 is driver connected, during by the reversal connection of B phase, the electrical degree in three-phase circuit then differs 120 degree.
Have an effect body coil 203 another kind of connected mode as shown in Figure 9, all coils 203 series connection be a road three-phase circuit, body coil 203 needs three-phase drive device of therefore having an effect.Certainly, now in three-phase circuit, the electrical degree of electric current is also difference 60 degree or 120 degree, is by just to connect or reversal connection B phase realizes equally.
Because coil 203 adopts PCB structure, the back panel wiring mode of coil 203 is as shown in Figure 10,11.It should be noted that, be laminating, and joint place is filled with FR4 between in fact each layer conductor 2031 and between each bar coil 203 for convenience of observing, in figure by each layer conductor 2031 separately.
Figure 10 is the ground floor of six coils 203 and the interlayer connected mode of second layer conductor 2031: all conductor in parallel outlets of every one deck.Ground floor conductor 2031 one end of three coils 203 in the left side connects three-phase current (A1, B1, C1) respectively, the ground floor conductor 2031 of the other end and the right three coils 203 is connected successively, and then connect with the second layer conductor 2031 of three coils 203 in the left side, the second layer conductor 2031 of the second layer three conductors 2031 of left side coil 203 three coils 203 in series connection the right successively again, and then the third layer conductor 2031 of three coils 203 in the left side of connecting, layer by layer the like.As shown in figure 11, during to the bottom, the leading-out terminal short circuit of the conductor 2031 of the bottom of three coils 203 in the right, as " Y " type tie point of three-phase current.
The interlayer connected mode of above-mentioned conductor 2031 can be realized by following two kinds of modes: 1, in coil periphery silica gel wire bonding; 2, connect with PCB keyset.Because the connection between each layer conductor 2031 is that more layer connects, so not by realizing the interlayer connected mode shown in Figure 10 in pcb board inside.To can operating in such a way of pcb board switching: do 8 pieces of pcb boards, one end of these pcb boards is the needle-like head of each through hole 204 correspondence, its inside is the connecting circuit according to the patten's design shown in Figure 10, by 8 respectively with the pcb board of dozens of needle-like head (male), insert the two ends (female) of corresponding body of having an effect.Namely the connected mode shown in Figure 10 is achieved.
In the present embodiment, coil 203 inside can also adopt another kind of connected mode, and the connected mode of its bottom conductor 2031 is slightly different from above-mentioned connection.Particularly, the bottom three strip conductor 2031 no longer short circuit of the right coil 203, but the ground floor conductor 2031 of adjacent three coils 203 on the right side of it of continuing to connect successively.
Because the inner connecting way of described coil 203 has two kinds, the mode of its external three-phase electricity also has two kinds, and therefore, by permutation and combination, the structure of described coil array 200 has multiple choices mode.
In sum, levitation planar motor of the present invention, comprise: magnetic steel array 100 and the coil array 200 be arranged on described magnetic steel array 100, square second magnet steel 102 that described magnetic steel array 100 comprises square first magnet steel 101 and arranges around the first magnet steel 101, described second magnet steel 102 polarity is contrary with the first magnet steel 101, and four limits of described first magnet steel 101 and/or the second magnet steel 102 are by being provided with the seamless connection of the 3rd magnet steel 103 of the rectangular shape of chamfering; Also be provided with some triangle magnet steel 104 around described magnetic steel array 100, described coil array 200 comprises four pieces of bodies of having an effect, and every block body of having an effect is made up of some coils 203, and the number of described coil 203 is 6+3n, and wherein, n is nonnegative integer.
Compared with prior art, the present invention has the following advantages:
1, in the present invention, four limits of the first magnet steel 101 and/or the second magnet steel 102 by being provided with the seamless connection of the 3rd magnet steel 103 of the rectangular shape of chamfering, and are also provided with some triangle magnet steel 104 around magnetic steel array 100.The structural change of magnetic steel array 100, not only increases magnet steel fill-in ratio, improves the close distribution of motor magnetic; And under equal conditions, make the thrust constant of motor increase at least 2%.
2, the present invention adopts 6+3n bar coil 203 to form body of having an effect, and makes the structure of electric mover more compact, firm.
3, described coil array 200 adopts PCB structure, make the structure of electric mover compacter, firm, coil 203 surface planarity is better, overall dimension is closer to design load, reduce force oscillation that motor causes because physical dimension and design load are inconsistent, thrust disturbs, raising motor mode stability and control precision.
4, because coil 203 surface of PCB structure seals completely, so do not need to do insulation processing as conventional planar motor coil, do not exist because cooled plate is leaked problems such as causing coil short, and water route and coil plate can be made of one, improve running reliability of motor.
Obviously, those skilled in the art can carry out various change and modification to invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (13)
1. a levitation planar motor, comprising: magnetic steel array and the coil array be arranged on described magnetic steel array, is characterized in that,
Square second magnet steel that described magnetic steel array comprises square first magnet steel and arranges around the first magnet steel, described second magnet steel polarity is contrary with the first magnet steel, and four limits of described first magnet steel and/or the second magnet steel are by being provided with the seamless connection of the 3rd magnet steel of the rectangular shape of chamfering.
2. levitation planar motor as claimed in claim 1, is characterized in that, be also provided with some triangle magnet steel around described magnetic steel array.
3. levitation planar motor as claimed in claim 1, it is characterized in that, described coil array comprises four pieces of bodies of having an effect, and every block body of having an effect is made up of some coils, and the number of described coil is 6+3n, n is nonnegative integer.
4. levitation planar motor as claimed in claim 1, it is characterized in that, described first magnet steel is N-type magnet or S type magnet, and described 3rd magnet steel is H type magnet, and the direction of magnetization of described H type magnet is pointed to N-type magnet or deviates from S type magnet.
5. levitation planar motor as claimed in claim 2, is characterized in that, the Magnetic Phase of the magnetic of described triangle magnet steel and the magnetic of described first magnet steel or the second magnet steel is same.
6. levitation planar motor as claimed in claim 3, it is characterized in that, described coil is printed coil (PCB coil), comprises some layers of conductor, and the joint place of conductor and conductor is provided with insulator.
7. levitation planar motor as claimed in claim 6, it is characterized in that, in described coil, conductor part is copper, and insulator part is glass epoxy resin.
8. levitation planar motor as claimed in claim 3, is characterized in that, the have an effect two ends of body of every block are provided with through hole corresponding to some and described coil.
9. levitation planar motor as claimed in claim 6, is characterized in that, adopt silica gel wire bonding or connect with PCB keyset between described conductor.
10. levitation planar motor as claimed in claim 3, is characterized in that, described in the coils connected in series had an effect in body, adopt a road three-phase circuit, and driven by a three-phase drive device.
11. levitation planar motor as claimed in claim 3, is characterized in that, described in every six coils in body of having an effect adopt a road three-phase circuit, a described road three-phase circuit is driven by one group of three-phase drive device.
12. levitation planar motor as described in claim 10 or 11, it is characterized in that, in described three-phase circuit, the electrical degree of three-phase current differs 60 degree or 120 degree successively.
13. levitation planar motor as claimed in claim 3, it is characterized in that, the pole span between described first magnet steel and the second magnet steel is τ, described in the centreline spacing of adjacent two coils in body of having an effect be τ/3.
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Cited By (6)
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| CN105790480A (en) * | 2016-03-09 | 2016-07-20 | 深圳航天科技创新研究院 | Permanent magnet motor employing PCB winding |
| CN108964404A (en) * | 2018-07-18 | 2018-12-07 | 中国石油大学(华东) | A kind of novel permanent-magnet planar motor and its decoupling algorithm |
| JP2019502341A (en) * | 2015-11-05 | 2019-01-24 | エーエスエムエル ネザーランズ ビー．ブイ． | Magnet array, electric coil device, displacement system, lithographic apparatus, and device manufacturing method |
| CN111542993A (en) * | 2017-12-27 | 2020-08-14 | 贝克霍夫自动化有限公司 | Stator unit and stator module |
| WO2020211827A1 (en) * | 2019-04-17 | 2020-10-22 | 上海微电子装备（集团）股份有限公司 | Maglev motor and control method therefor |
| CN111903045A (en) * | 2017-12-27 | 2020-11-06 | 贝克霍夫自动化有限公司 | Stator module |
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| US11522433B2 (en) | 2017-12-27 | 2022-12-06 | Beckhoff Automation Gmbh | Stator unit and stator module |
| CN108964404A (en) * | 2018-07-18 | 2018-12-07 | 中国石油大学(华东) | A kind of novel permanent-magnet planar motor and its decoupling algorithm |
| WO2020211827A1 (en) * | 2019-04-17 | 2020-10-22 | 上海微电子装备（集团）股份有限公司 | Maglev motor and control method therefor |
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| CN104753307B (en) | 2018-07-20 |
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