CN104730857A - Mask plate of liquid crystal display panel and exposure method using mask plate - Google Patents
Mask plate of liquid crystal display panel and exposure method using mask plate Download PDFInfo
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- CN104730857A CN104730857A CN201510131189.2A CN201510131189A CN104730857A CN 104730857 A CN104730857 A CN 104730857A CN 201510131189 A CN201510131189 A CN 201510131189A CN 104730857 A CN104730857 A CN 104730857A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
- G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
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- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides a mask plate of a liquid crystal display panel and an exposure method using the mask plate. The mask plate comprises a first mask plate and a second mask plate, wherein the first mask plate is used for exposing a color film base plate from left to right; a part A1 of a pixel unit is fully exposed and a part B1 of the pixel unit is partially exposed; the second mask plate is used for exposing the color film base plate from right to left; and a part A2 of the pixel unit is fully exposed and a part B2 of the pixel unit is partially exposed. According to the mask plate, the design of the exposed mask plate is changed so that pre-inclined angles of an upper half pixel unit and a lower half pixel unit are different as the exposure intensities or the exposure time of the upper half pixel unit and the lower half pixel unit are different when the color film base plate is exposed; and when the same voltage is applied, the transmittances of the upper half pixel unit and the lower half pixel unit on the color film base plate are different, so that an eight-domain structure is realized.
Description
Technical field
The present invention relates to a kind of mask plate of display panels and use the exposure method of this mask plate.
Background technology
UV
2a (Ultra Violet Vertical Alignment) technology is a kind of VA (Vertical Alignment using ultraviolet (UV=UltraViolet) to carry out LCD alignment, vertical orientation) panel technology, its title derives from being multiplied of ultraviolet (UV) and liquid crystal panel VA pattern.By importing UV
2after A technology, can save at present in VA mode liquid crystal panel for controlling slit gap and the projection of liquid crystal alignment, therefore pass through UV
2the aperture opening ratio of A technology liquid crystal panel, contrast and response speed can be improved, and significantly can cut down production routine.
Along with large scale, high-quality panel main flow increasingly, VA is with advantages such as its wide angle of visibility, high-contrasts, and become the conventional display mode of large size panel, vertical orientation (VA) product has color offset phenomenon under different angle of visibility.And mutilate-domain (multidomain) structure is the common method solving VA colour cast.
Existing general liquid crystal panel can only form 4 farmlands physically, and array base palte, by alignment method, as shown in Figure 1, is divided into two regions, carries out the UV of upper and lower both direction by VA product
2a exposes, and color membrane substrates is also divided into two regions, carries out the UV of left and right both direction
2a exposes, thus forms 4 farmland display effects.The liquid crystal panel of 4 domain structures, the exposure area of its mask plate 1,2 is designed to exposure and shading two kinds of forms.
In order to realize 8 domain structures, generally that a pixel cell is divided into A, B two parts, apply different liquid crystal voltages respectively by extra TFT or electric capacity and realize A, part B pixel transmitance difference, thus reach the display effect on 8 farmlands, as shown in Figure 2, the liquid crystal panel of 8 domain structures, the exposure area of its mask plate 1,2 is designed to exposure, shading, exposure, shading form separately, but it is complicated to have driving like this, the spinoffs such as low aperture opening ratio.
Summary of the invention
The present invention is by changing the mask plate on color membrane substrates, the figure that color membrane substrates is exposed become light leak district and half light leak interval every method or the exposure intensity of upper half-pixel and lower half-pixel or the time shutter different, thus upper half-pixel is different with the pretilt angle of lower half-pixel, when applying same voltage, upper half picture element is different with the transmitance of lower half picture element, thus realizes 8 domain structures.
The invention provides a kind of mask plate of display panels, the exposure of this mask plate on the color membrane substrates of display panels, described mask plate comprises the first mask plate and the second mask plate, described first mask plate exposure area be sequentially: full exposure area, full lightproof area, Partial exposure or part lightproof area and full lightproof area, the exposure area of described second mask plate is sequentially: full lightproof area, full exposure area, full lightproof area and Partial exposure or part lightproof area.
The present invention also provides a kind of exposure method of the mask plate on color membrane substrates, a certain pixel cell on setting color membrane substrates, this pixel cell is divided into upper and lower two parts: part A and part B, part A pixel is divided into A1 and A2 part, part B pixel is divided into B1 and B2 part, first mask plate is exposed from a left side to by color membrane substrates, the A1 part of full exposing pixels unit and the B1 part of Partial exposure pixel cell; The second mask plate is used to expose color membrane substrates from right to left, the A2 part of full exposing pixels unit and the B2 part of Partial exposure pixel cell.
The invention provides a kind of mask plate of display panels, the exposure of this mask plate on the color membrane substrates of display panels, described mask plate comprises first, second, third and the 4th mask plate, the exposure area of the first mask plate, from top to bottom etc. sequence is divided into 8 regions, wherein, the first, the 3rd, the 5th and the 7th is full exposure area, and other regions are full lightproof area; The exposure area of the second mask plate, also etc. sequence is divided into 8 regions from top to bottom, and wherein, the second, the 4th, the 6th and the 8th is full exposure area, and other regions are full lightproof area; The exposure area of the 3rd mask plate, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 3rd and SECTOR-SEVEN territory be full exposure area, other regions are full lightproof area; The exposure area of the 4th mask plate, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 4th and Section Eight territory be full exposure area, other regions are full lightproof area.
The present invention also provides a kind of exposure method of the mask plate on color membrane substrates, a pixel cell on setting color membrane substrates is divided into C and D part, this another adjacent pixel cell is divided into E and F part, C, D, E, F is being divided into two parts respectively, be respectively C1, C2, D1, D2, E1, E2, F1, and F2, first time is when exposing, the first mask plate is used to expose from a left side to by color membrane substrates, the C1 of pixel cell, D1, E1, and the time shutter of F1 part is T minute, from right to left color membrane substrates is exposed with the second mask plate again, the C2 of pixel cell, D2, E2, and the time shutter of F2 part is T minute, when second time exposes, use the 3rd mask plate left to exposing by color membrane substrates, D1 and the F1 Partial exposure time of pixel cell is xT minute (0≤< x≤< 1), expose color membrane substrates from right to left with the 4th mask plate, D2 and the F2 Partial exposure time of pixel cell is xT minute (0≤< x≤< 1) again.
The invention provides a kind of mask plate of display panels, the exposure of this mask plate on the color membrane substrates of display panels, described mask plate comprises first, second, third and the 4th mask plate, the exposure area of the first mask plate, from top to bottom etc. sequence is divided into 8 regions, wherein, first and the 5th region be full exposure area, other regions are full lightproof area; The exposure area of the second mask plate, also etc. sequence is divided into 8 regions from top to bottom, wherein, second and the 6th region be full exposure area, other regions are full lightproof area; The exposure area of the 3rd mask plate, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 3rd and SECTOR-SEVEN territory be full exposure area, other regions are full lightproof area; The exposure area of the 4th mask plate, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 4th and Section Eight territory be full exposure area, other regions are full lightproof area.
The present invention also provides a kind of exposure method of the mask plate on color membrane substrates, a pixel cell on setting color membrane substrates is divided into C and D part, this another adjacent pixel cell is divided into E and F part, C, D, E, F is being divided into two parts respectively, be respectively C1, C2, D1, D2, E1, E2, F1, and F2, first time is when exposing, the first mask plate is used to expose to color membrane substrates from left to right, the C1 of pixel cell, with E1 part time shutter be TR minute, from right to left color membrane substrates is exposed with the second mask plate again, the time shutter of C2 and the E2 part of pixel cell is TR minute, when second time exposes, the 3rd mask plate is used to expose to color membrane substrates from left to right, D1 and the F1 Partial exposure time of pixel cell is Ry (y >=1) T minute, expose color membrane substrates from right to left with the 4th mask plate, D2 and the F2 Partial exposure time of pixel cell is Ry (y >=1) T minute again.
The invention provides a kind of mask plate of display panels, the exposure of this mask plate on the color membrane substrates of display panels, described mask plate comprises the first mask plate and the second mask plate, the exposure area of the first mask plate 110, from top to bottom etc. sequence is divided into 8 regions, wherein, first and the 5th region be partial exposure area, 3rd and SECTOR-SEVEN territory be full exposure area, first and the 5th the area of regional exposure be the xz (0≤< zx≤< 1) of the 3rd or the 7th exposure area area, other regions are all full lightproof areas, the protection zone of the second mask plate 120, also etc. sequence is divided into 8 regions from top to bottom, wherein, second and the 6th region be partial exposure area, 4th and Section Eight territory be full exposure area, and second and the area of the 6th regional exposure be the z (0≤z≤1) of the 4th or the 8th exposure area area, x (0 < x < 1), other regions are all full lightproof areas.
The present invention also provides a kind of exposure method of the mask plate on color membrane substrates, a pixel cell on setting color membrane substrates is divided into C and D part, this another adjacent pixel cell is divided into E and F part, C, D, E, F is being divided into two parts respectively, be respectively C1, C2, D1, D2, E1, E2, F1, and F2, the first mask plate is used to expose from a left side to by color membrane substrates, the time shutter of C1 and the E1 part of pixel cell is TS minute, the time shutter of D1 and the E1 part of pixel cell is (1+xz) TS minute (0 < x < 1), from right to left color membrane substrates is exposed with the second mask plate again, the time shutter of C2 and the E2 part of pixel cell is TS minute, the time shutter of D2 and the F2 part of pixel cell is (1+xz) TS minute (0 < x < 1).
The present invention is by changing the design of the mask plate of exposure, when color membrane substrates is exposed, upper half pixel cell is different with the exposure intensity of lower half pixel cell or the time shutter is different, cause half pixel cell different with the tilt angle of lower half pixel cell, when applying identical voltage, upper half pixel cell on color membrane substrates is different with the transmitance of lower half pixel cell, thus realizes 8 domain structures.
Accompanying drawing explanation
Fig. 1 is mask plate on existing 4 farmland color membrane substrates and exposure orientation schematic diagram;
Fig. 2 is mask plate on existing 8 farmland color membrane substrates and exposure orientation schematic diagram;
Fig. 3 is that on color membrane substrates of the present invention, tilt angle is the V-T curve map of the software simulation of 89 °, 88 °;
Fig. 4 is the partial enlarged drawing of Fig. 3 at H place;
Fig. 5 be the present invention utilize exposure intensity different condition under realize the schematic diagram of 8 farmland orientations;
Fig. 6 be the present invention utilize the time shutter different condition under realize the schematic diagram of the first embodiment of 8 farmland orientations;
Fig. 7 be the present invention utilize the time shutter different condition under realize the schematic diagram of the first embodiment of 8 farmland orientations;
Fig. 8 be the present invention utilize the time shutter different condition under realize the schematic diagram of the second embodiment of 8 farmland orientations;
Fig. 9 be the present invention utilize the time shutter different condition under realize the schematic diagram of the second embodiment of 8 farmland orientations;
Figure 10 be the present invention utilize the time shutter different condition under realize the schematic diagram of the 3rd embodiment of 8 farmland orientations.
Embodiment
Below in conjunction with the drawings and specific embodiments, illustrate the present invention further, these embodiments should be understood only be not used in for illustration of the present invention and limit the scope of the invention, after having read the present invention, the amendment of those skilled in the art to the various equivalent form of value of the present invention has all fallen within the application's claims limited range.
Transmitance can be caused different according to exposure intensity difference, the present invention designs a kind of UV2A MASK mask plate and exposes color membrane substrates, make the light leak district of the exposure figure on color membrane substrates become light leak district and half light leak interval every mode, when exposing on color membrane substrates, the exposure of upper half pixel cell of color membrane substrates is 100%, its OD value is 0, the exposure of lower half pixel cell on color membrane substrates is 0%-100%, the 0D value of lower half-pix is: 0 < OD < 4, make to irradiate rear upper half-pixel different with the tilt angle that lower half-pixel is formed, after causing applying liquid crystal voltage, the rotational angle of liquid crystal molecule has deviation, thus reach the display effect on 8 farmlands.
OD:optical density, printing opacity concentration, represents the transmitance by black matrix", OD=-log
10(transmitance) OD value is the bigger the better, and the size of OD value is: 0≤OD≤4.
The present invention also discloses a kind of difference according to the time shutter, make upper half pixel cell on color membrane substrates different with lower half pixel cell time shutter, thus upper half pixel cell is different with the tilt angle of lower half pixel cell, when applying identical voltage, upper half pixel cell on color membrane substrates is different with the transmitance of lower half pixel cell, thus realizes 8 domain structures.
The scheme side of being described below according to above-mentioned exposure intensity difference makes upper and lower pixel cell tilt angle different:
Under constant illumination time, when the intensity of linear polarization incident UV light is different from each other, different tilt angles can be obtained, this is because tilt angle depends on emittance, and emittance is directly proportional to light intensity and irradiation time (intensity X time), time constant upon irradiation, the intensity of above-mentioned critical intensity incident beam is stronger, and what become making tilt angle is larger.
Due to the difference of pretilt angle, simulated find by simulation softward ExpertLCD, as shown in Figure 3 and Figure 4, when the tilt angle of fixing array base palte is 89 °, the tilt angle changing color membrane substrates is respectively 89 °, 88 °.Can find from Fig. 3 and Fig. 4, T-V curve offsets, and the pixel transmitance that same electrical pressure has different tilt angle is different.
Figure 5 shows that the present invention utilizes exposure intensity different, design a kind of mask plate to expose color membrane substrates thus the schematic diagram realizing 8 farmland orientations, by causing tilt angle different under the condition that the exposure intensity of zones of different is different thus making transmitance difference reach the schematic diagram of 8 farmland display effects.
According to the mask plate of exposure intensity different designs, the present invention devises two different mask plates 10, 20, the exposure area of described first mask plate 10 is sequentially: full exposure area (OD=0), full lightproof area (OD=4), Partial exposure or part lightproof area (0 < OD < 4), and full lightproof area (OD=4), the exposure area of described second mask plate 20 is sequentially: full lightproof area (OD=4), full exposure area (OD=0), full lightproof area (OD=4), and Partial exposure or part lightproof area (0 < OD < 4), below describe first, second mask plate 10, 20 are used in the exposure on color membrane substrates.
The present invention is by being divided into upper and lower two parts by a pixel cell: part A and part B, and when carrying out the orientation of UV2A light, the array base palte exposure of display panels is divided into two regions, left and right, and upper and lower both direction carries out orientation to a half pixel units; Color membrane substrates is divided into four regions up and down, and wherein part A pixel and part B pixel are all that left and right both direction carries out UV irradiation to 1/4th pixels.
On color membrane substrates, the exposure method of above-mentioned mask plate is used to be: part A pixel is divided into A1 and A2 part, part B pixel is divided into B1 and B2 part, first mask plate 10 is exposed color membrane substrates from left to right, the A1 part of full exposing pixels unit and the B1 part of Partial exposure pixel cell; The second mask plate is used to expose color membrane substrates from right to left, the A2 part of full exposing pixels unit and the B2 part of Partial exposure pixel cell.
Exposure mode according to Fig. 6, the part A of color membrane substrates and part B pixel are when carrying out UV and irradiating, by changing the mask plate of color membrane substrates, the light leak district of the figure that color membrane substrates is exposed become light leak district and half light leak interval every mode, when color membrane substrates exposes, the exposure of upper half-pixel is 100% (OD=0), the exposure of lower half-pixel is 0%-100% (0 < OD < 4), make to irradiate rear part A different from the tilt angle that part B is formed, after causing applying liquid crystal voltage, the rotational angle of liquid crystal molecule has deviation, thus reach the display effect on 8 farmlands.
Transmitance can be caused different according to time shutter difference, the present invention also counts a kind of UV2A MASK mask plate and exposes color membrane substrates, make half pixel cell different with the tilt angle of lower half pixel cell, when applying identical voltage, upper half pixel cell on color membrane substrates is different with the transmitance of lower half pixel cell, thus realizes 8 domain structures.
According to time shutter difference, the different scheme of upper and lower pixel cell tilt angle is described below: under constant illumination time, when the intensity of linear polarization incident UV light is different from each other, different tilt angles can be obtained, this is because tilt angle depends on emittance, and emittance is directly proportional to light intensity and irradiation time (intensity X time), when constant light intensity, in marginal time, the time of incident illumination is longer, what become making tilt angle is larger, knows that same electrical depresses the pixel transmitance with different tilt angle again different by Fig. 3 and Fig. 4.
Fig. 6 to Figure 10 uses a kind of brand-new mask plate, causes tilt angle different thus make transmitance difference reach the schematic diagram of 8 farmland display effects by the time shutter difference of zones of different.
As shown in Figure 6 and Figure 7, color membrane substrates uses the mask plate that 4 different, the exposure area of the first mask plate 30, from top to bottom etc. sequence is divided into 8 regions, wherein, the first, the 3rd, the 5th and the 7th is full exposure area, and other regions are full lightproof area; The exposure area of the second mask plate 40, also etc. sequence is divided into 8 regions from top to bottom, and wherein, the second, the 4th, the 6th and the 8th is full exposure area, and other regions are full lightproof area; The exposure area of the 3rd mask plate 50, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 3rd and SECTOR-SEVEN territory be full exposure area, other regions are full lightproof area; The exposure area of the 4th mask plate 60, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 4th and Section Eight territory be full exposure area, other regions are full lightproof area.
Exposure mode on color membrane substrates shown in Fig. 6 and Fig. 7 exposes adjacent two pixel cells simultaneously, one pixel cell is divided into C and D part, this another adjacent pixel cell is divided into E and F part, C, D, E, F are being divided into two parts respectively, are respectively C1, C2, D1, D2, E1, E2, F1 and F2.
When carrying out the orientation of UV2A light, the exposure on array base palte is divided into two regions, and upper and lower both direction carries out orientation to a half-pix; Color membrane substrates needs exposure twice, and the exposure on color membrane substrates is divided into four regions, and wherein C, D, E, F partial pixel is all that left and right both direction carries out UV irradiation to 1/4th pixels.
On color membrane substrates, the exposure method of above-mentioned mask plate is used to be: when first time exposes, the first mask plate 30 is used to expose color membrane substrates from left to right, the time shutter of C1, D1, E1 and F1 part of pixel cell is T minute, expose color membrane substrates from right to left with the second mask plate 40, the time shutter of C2, D2, E2 and F2 part of pixel cell is T minute again; When second time exposes, use the 3rd mask plate 50 left to exposing by color membrane substrates, D1 and the F1 Partial exposure time of pixel cell is xT minute (0≤x≤1), expose color membrane substrates from right to left with the 4th mask plate 60, D2 and the F2 Partial exposure time of pixel cell is xT minute (0≤x≤1) again.
Fig. 6 and Fig. 7, by designed mask plate, and mask plate is the same with the relative velocity of glass substrate movement when controlling double exposure, make the time shutter of the top and the bottom of each pixel cell after irradiating different thus the tilt angle difference formed, after causing applying liquid crystal voltage, the rotational angle of liquid crystal molecule has deviation, thus realizes 8 farmland orientation effects.
Exposure mode on color membrane substrates shown in Fig. 8 and Fig. 9 is the schematic diagram of the second embodiment, color membrane substrates uses the mask plate that 4 different, the exposure area of the first mask plate 70, from top to bottom etc. sequence is divided into 8 regions, wherein, first and the 5th region be full exposure area, other regions are full lightproof area; The exposure area of the second mask plate 80, also etc. sequence is divided into 8 regions from top to bottom, wherein, second and the 6th region be full exposure area, other regions are full lightproof area; The exposure area of the 3rd mask plate 90, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 3rd and SECTOR-SEVEN territory be full exposure area, other regions are full lightproof area; The exposure area of the 4th mask plate 100, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 4th and Section Eight territory be full exposure area, other regions are full lightproof area.
On color membrane substrates, the exposure method of above-mentioned mask plate is used to be: when first time exposes, the first mask plate 70 is used to expose to color membrane substrates from left to right, the time shutter of C1 and the E1 part of pixel cell is S minute, expose color membrane substrates from right to left with the second mask plate 80, the time shutter of C2 and the E2 part of pixel cell is R minute again; When second time exposes, the 3rd mask plate 90 is used to expose to color membrane substrates from left to right, D1 and the F1 Partial exposure time of pixel cell is Ry (y >=1) minute, expose color membrane substrates from right to left with the 4th mask plate 100, D2 and the F2 Partial exposure time of pixel cell is Ry (y >=1) minute again.
The relative velocity of mask plate and glass substrate movement when Fig. 8 and Fig. 9 also controls to double expose by designed mask plate, make that the time shutter of the top and the bottom of pixel cell is different thus tilt angle is different, after causing applying liquid crystal voltage, the rotational angle of liquid crystal molecule has deviation, thus realizes 8 farmland orientation effects.
It color membrane substrates shown in Figure 10 is the schematic diagram of the 3rd embodiment of Exposure mode, color membrane substrates uses the mask plate that 2 different, the exposure area of the first mask plate 110, from top to bottom etc. sequence is divided into 8 regions, wherein, first and the 5th region be partial exposure area, the 3rd and SECTOR-SEVEN territory be full exposure area, first and the 5th the area of regional exposure be the z (0≤z≤1) of the 3rd or the 7th exposure area area, other regions are all full lightproof areas; The protection zone of the second mask plate 120; also etc. sequence is divided into 8 regions from top to bottom; wherein; second and the 6th region be partial exposure area; 4th and Section Eight territory be full exposure area; and second and the area of the 6th regional exposure be the z (0≤z≤1) of the 4th or the 8th exposure area area, other regions are all full lightproof areas.
On color membrane substrates, the exposure method of above-mentioned mask plate is used to be: to use the first mask plate 110 to expose from a left side to by color membrane substrates, the time shutter of C1 and the E1 part of pixel cell is S minute, the time shutter of D1 and the E1 part of pixel cell is (1+z) S minute (0≤z≤1), from right to left color membrane substrates is exposed with the second mask plate 120 again, the time shutter of C2 and the E2 part of pixel cell is T minute, and the time shutter of D2 and the F2 part of pixel cell is (1+z) S minute (0≤z≤1).
Different with the time shutter by area mask plate designing different exposure areas, only need single exposure, make the tilt angle that after irradiating, the top and the bottom of each pixel cell are formed different, after causing applying liquid crystal voltage, the rotational angle of liquid crystal molecule has deviation, thus realizes 8 farmland orientation effects.
Claims (9)
1. the mask plate of a display panels, the exposure of this mask plate on the color membrane substrates of display panels, described mask plate comprises the first mask plate and the second mask plate, it is characterized in that: described first mask plate exposure area be sequentially: full exposure area, full lightproof area, Partial exposure or part lightproof area and full lightproof area, the exposure area of described second mask plate is sequentially: full lightproof area, full exposure area, full lightproof area and Partial exposure or part lightproof area.
2. use the exposure method of the mask plate described in claim 1, it is characterized in that: a certain pixel cell on setting color membrane substrates, this pixel cell is divided into upper and lower two parts: part A and part B, part A pixel is divided into A1 and A2 part, part B pixel is divided into B1 and B2 part, first mask plate is exposed from a left side to by color membrane substrates, the A1 part of full exposing pixels unit and the B1 part of Partial exposure pixel cell; The second mask plate is used to expose color membrane substrates from right to left, the A2 part of full exposing pixels unit and the B2 part of Partial exposure pixel cell.
3. the mask plate of a display panels, the exposure of this mask plate on the color membrane substrates of display panels, described mask plate comprises first, second, third and the 4th mask plate, it is characterized in that: the exposure area of the first mask plate, from top to bottom etc. sequence is divided into 8 regions, wherein, the first, the 3rd, the 5th and the 7th is full exposure area, and other regions are full lightproof area; The exposure area of the second mask plate, also etc. sequence is divided into 8 regions from top to bottom, and wherein, the second, the 4th, the 6th and the 8th is full exposure area, and other regions are full lightproof area; The exposure area of the 3rd mask plate, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 3rd and SECTOR-SEVEN territory be full exposure area, other regions are full lightproof area; The exposure area of the 4th mask plate, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 4th and Section Eight territory be full exposure area, other regions are full lightproof area.
4. use the exposure method of the mask plate described in claim 3, it is characterized in that: the pixel cell on setting color membrane substrates is divided into C and D part, this another adjacent pixel cell is divided into E and F part, C, D, E, F is being divided into two parts respectively, be respectively C1, C2, D1, D2, E1, E2, F1, and F2, first time is when exposing, the first mask plate is used to expose from a left side to by color membrane substrates, the C1 of pixel cell, D1, E1, and the time shutter of F1 part is T minute, from right to left color membrane substrates is exposed with the second mask plate again, the C2 of pixel cell, D2, E2, and the time shutter of F2 part is T minute, when second time exposes, use the 3rd mask plate left to exposing by color membrane substrates, D1 and the F1 Partial exposure time of pixel cell is xT minute (0≤x≤1), expose color membrane substrates from right to left with the 4th mask plate, D2 and the F2 Partial exposure time of pixel cell is xT minute (0≤x≤1) again.
5. the mask plate of a display panels, the exposure of this mask plate on the color membrane substrates of display panels, described mask plate comprises first, second, third and the 4th mask plate, it is characterized in that: the exposure area of the first mask plate, from top to bottom etc. sequence is divided into 8 regions, wherein, first and the 5th region be full exposure area, other regions are full lightproof area; The exposure area of the second mask plate, also etc. sequence is divided into 8 regions from top to bottom, wherein, second and the 6th region be full exposure area, other regions are full lightproof area; The exposure area of the 3rd mask plate, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 3rd and SECTOR-SEVEN territory be full exposure area, other regions are full lightproof area; The exposure area of the 4th mask plate, also etc. sequence is divided into 8 regions from top to bottom, wherein, the 4th and Section Eight territory be full exposure area, other regions are full lightproof area.
6. use the exposure method of the mask plate described in claim 5, it is characterized in that: the pixel cell on setting color membrane substrates is divided into C and D part, this another adjacent pixel cell is divided into E and F part, C, D, E, F is being divided into two parts respectively, be respectively C1, C2, D1, D2, E1, E2, F1, and F2, first time is when exposing, the first mask plate is used to expose to color membrane substrates from left to right, the C1 of pixel cell, with E1 part time shutter be R minute, from right to left color membrane substrates is exposed with the second mask plate again, the time shutter of C2 and the E2 part of pixel cell is R minute, when second time exposes, the 3rd mask plate is used to expose to color membrane substrates from left to right, D1 and the F1 Partial exposure time of pixel cell is Ry (y >=1) minute, expose color membrane substrates from right to left with the 4th mask plate, D2 and the F2 Partial exposure time of pixel cell is Ry (y >=1) minute again.
7. the mask plate of a display panels, the exposure of this mask plate on the color membrane substrates of display panels, described mask plate comprises the first mask plate and the second mask plate, it is characterized in that: the exposure area of the first mask plate, from top to bottom etc. sequence is divided into 8 regions, wherein, first and the 5th region be partial exposure area, 3rd and SECTOR-SEVEN territory be full exposure area, first and the 5th the area of regional exposure be the z (0≤z≤1) of the 3rd or the 7th exposure area area, other regions are all full lightproof areas; The protection zone of the second mask plate; also etc. sequence is divided into 8 regions from top to bottom; wherein; second and the 6th region be partial exposure area; 4th and Section Eight territory be full exposure area; and second and the area of the 6th regional exposure be the z (0≤z≤1) of the 4th or the 8th exposure area area, other regions are all full lightproof areas.
8. use the exposure method of the mask plate described in claim 7, it is characterized in that: the pixel cell on setting color membrane substrates is divided into C and D part, this another adjacent pixel cell is divided into E and F part, C, D, E, F is being divided into two parts respectively, be respectively C1, C2, D1, D2, E1, E2, F1, and F2, the first mask plate is used to expose from a left side to by color membrane substrates, the time shutter of C1 and the E1 part of pixel cell is S minute, the time shutter of D1 and the E1 part of pixel cell is (1+z) S minute, from right to left color membrane substrates is exposed with the second mask plate again, the time shutter of C2 and the E2 part of pixel cell is TS minute, the time shutter of D2 and the F2 part of pixel cell is (1+z) S minute.
9. the exposure method of the mask plate according to claim 2 or 4 or 6 or 8, is characterized in that: array base palte exposure is divided into two regions, left and right, and upper and lower both direction carries out orientation to a half pixel units.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105572973A (en) * | 2015-12-23 | 2016-05-11 | 南京中电熊猫液晶显示科技有限公司 | Mask board and photo-alignment method |
| CN106918955A (en) * | 2017-05-11 | 2017-07-04 | 京东方科技集团股份有限公司 | A kind of smooth alignment apparatus and method, liquid crystal display panel |
| CN107728385A (en) * | 2017-10-10 | 2018-02-23 | 南京中电熊猫液晶显示科技有限公司 | Liquid crystal panel and its light alignment method |
| CN108873597A (en) * | 2018-06-26 | 2018-11-23 | 南京中电熊猫液晶显示科技有限公司 | A kind of mask plate and orientation exposure method |
| CN109459891A (en) * | 2018-12-29 | 2019-03-12 | 成都中电熊猫显示科技有限公司 | Light alignment method of display panel, display panel and display device |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5853818A (en) * | 1996-07-29 | 1998-12-29 | Lg Electronics, Inc. | Method for manufacturing multi-domain liquid crystal cell |
| KR100205260B1 (en) * | 1997-05-28 | 1999-07-01 | 구자홍 | Method for fabricating lc cell using photo-alignment process |
| JP2004302439A (en) * | 2003-03-19 | 2004-10-28 | Fujitsu Display Technologies Corp | Exposure mask and method for exposing pattern |
| CN101390008A (en) * | 2006-01-26 | 2009-03-18 | 夏普株式会社 | Liquid crystal display device manufacturing method, and liquid crystal display device |
| CN101589334A (en) * | 2007-04-20 | 2009-11-25 | 夏普株式会社 | Liquid crystal display device manufacturing method, and liquid crystal display device |
| CN101655645A (en) * | 2005-08-30 | 2010-02-24 | 友达光电股份有限公司 | Masking film for sequential lateral solidification (SLS) technology and laser crystallization method |
| CN102687078A (en) * | 2010-01-25 | 2012-09-19 | 夏普株式会社 | Exposure apparatus, liquid crystal display device, and method for manufacturing liquid crystal display device |
| CN103513472A (en) * | 2012-06-26 | 2014-01-15 | 群康科技(深圳)有限公司 | Substrate, display device provided with substrate and manufacturing method of display device |
| CN104238195A (en) * | 2014-09-29 | 2014-12-24 | 南京中电熊猫液晶显示科技有限公司 | Orientation method of liquid crystal VA (Vertical Alignment) mode |
| CN104536259A (en) * | 2014-12-26 | 2015-04-22 | 南京中电熊猫液晶显示科技有限公司 | Detection method for aligning mask plate in optical alignment |
-
2015
- 2015-03-24 CN CN201510131189.2A patent/CN104730857B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5853818A (en) * | 1996-07-29 | 1998-12-29 | Lg Electronics, Inc. | Method for manufacturing multi-domain liquid crystal cell |
| KR100205260B1 (en) * | 1997-05-28 | 1999-07-01 | 구자홍 | Method for fabricating lc cell using photo-alignment process |
| JP2004302439A (en) * | 2003-03-19 | 2004-10-28 | Fujitsu Display Technologies Corp | Exposure mask and method for exposing pattern |
| CN101655645A (en) * | 2005-08-30 | 2010-02-24 | 友达光电股份有限公司 | Masking film for sequential lateral solidification (SLS) technology and laser crystallization method |
| CN101390008A (en) * | 2006-01-26 | 2009-03-18 | 夏普株式会社 | Liquid crystal display device manufacturing method, and liquid crystal display device |
| CN101589334A (en) * | 2007-04-20 | 2009-11-25 | 夏普株式会社 | Liquid crystal display device manufacturing method, and liquid crystal display device |
| CN102687078A (en) * | 2010-01-25 | 2012-09-19 | 夏普株式会社 | Exposure apparatus, liquid crystal display device, and method for manufacturing liquid crystal display device |
| CN103513472A (en) * | 2012-06-26 | 2014-01-15 | 群康科技(深圳)有限公司 | Substrate, display device provided with substrate and manufacturing method of display device |
| CN104238195A (en) * | 2014-09-29 | 2014-12-24 | 南京中电熊猫液晶显示科技有限公司 | Orientation method of liquid crystal VA (Vertical Alignment) mode |
| CN104536259A (en) * | 2014-12-26 | 2015-04-22 | 南京中电熊猫液晶显示科技有限公司 | Detection method for aligning mask plate in optical alignment |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105572973A (en) * | 2015-12-23 | 2016-05-11 | 南京中电熊猫液晶显示科技有限公司 | Mask board and photo-alignment method |
| CN105572973B (en) * | 2015-12-23 | 2018-10-09 | 南京中电熊猫液晶显示科技有限公司 | A kind of mask plate and light alignment method |
| CN106918955A (en) * | 2017-05-11 | 2017-07-04 | 京东方科技集团股份有限公司 | A kind of smooth alignment apparatus and method, liquid crystal display panel |
| CN106918955B (en) * | 2017-05-11 | 2019-09-13 | 京东方科技集团股份有限公司 | A kind of smooth alignment apparatus and method, liquid crystal display panel |
| CN107728385A (en) * | 2017-10-10 | 2018-02-23 | 南京中电熊猫液晶显示科技有限公司 | Liquid crystal panel and its light alignment method |
| CN107728385B (en) * | 2017-10-10 | 2020-07-07 | 南京中电熊猫液晶显示科技有限公司 | Liquid crystal panel and optical alignment method thereof |
| CN108873597A (en) * | 2018-06-26 | 2018-11-23 | 南京中电熊猫液晶显示科技有限公司 | A kind of mask plate and orientation exposure method |
| CN109459891A (en) * | 2018-12-29 | 2019-03-12 | 成都中电熊猫显示科技有限公司 | Light alignment method of display panel, display panel and display device |
| CN109459891B (en) * | 2018-12-29 | 2022-05-03 | 成都中电熊猫显示科技有限公司 | Light alignment method of display panel, display panel and display device |
| CN112419879A (en) * | 2020-11-30 | 2021-02-26 | 武汉天马微电子有限公司 | Display panel and display device |
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