CN104730771A - Display substrate manufacturing method, display panel and alignment film manufacturing device - Google Patents
Display substrate manufacturing method, display panel and alignment film manufacturing device Download PDFInfo
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- CN104730771A CN104730771A CN201510145219.5A CN201510145219A CN104730771A CN 104730771 A CN104730771 A CN 104730771A CN 201510145219 A CN201510145219 A CN 201510145219A CN 104730771 A CN104730771 A CN 104730771A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
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Abstract
The embodiment of the invention provides a display substrate manufacturing method, a display panel and an alignment film manufacturing device, and belongs to the technical field of liquid crystal display. The problem of foreign matter frequent occurrence in the alignment film formation process can be solved, and the light alignment effect of alignment film is improved accordingly. The display substrate manufacturing method includes the steps of providing a substrate; conducting evaporation on the surface of the substrate with mixed liquor of dianhydride and a solvent so as to form first nano-film; under the heating condition, conducting evaporation on the first nano-film with mixed liquor of diamine, a catalyst and a solvent so as to form second nano-film; evaporating the solvents in the first nano-film and the second nano-film to enable the dianhydride and the diamine to generate a polymerization reaction under the effect of the catalyst, and forming an alignment film layer on the substrate. The display substrate manufacturing method can be used for manufacturing the display substrate.
Description
Technical field
The present invention relates to technical field of liquid crystal display, particularly relate to a kind of manufacture method and display panel, alignment films manufacturing equipment of display base plate.
Background technology
At present, substrate many employings relief printing plate (APR version) the transfer technique coating preparation alignment films in field of liquid crystal display below 6 generation lines.As shown in Figure 1, polyimide (PI) drop sprays via PI nozzle a and at the flows by action of scraper b in the crack of scraper b and network rod c, network rod c brings to network rod c PI drop by pinching the APR version e on the version ketone d of force action by rotating under the effect of external forces, PI liquid on network rod c is extruded by APR version e under the effect of the power of kneading subsequently, and is transferred on substrate f by PI liquid in the movement of version ketone d.
But, in production practices, present inventor finds, this coating method makes APR version in transfer process, in the crack of version ketone and APR version, be easy to be mingled with PI particle causes the solid foreign materials in APR version to be difficult to be eliminated, thus easily a large amount of foreign matter is produced in transfer process, this not only affects formed alignment films thickness and uniformity coefficient, also drastically influence orientation effect during light orientation.
Summary of the invention
The invention provides a kind of manufacture method and display panel, alignment films manufacturing equipment of display base plate, the foreign matter of alignment films in film forming procedure problem occurred frequently can be avoided, thus improve the light orientation effect of alignment films.
For achieving the above object, the present invention adopts following technical scheme:
A manufacture method for display base plate, comprising:
One substrate is provided;
To the mixed liquor of described substrate surface evaporation dianhydride and solvent, form the first nano thin-film;
In a heated condition, on described first nano thin-film, the mixed liquor of evaporation diamines, catalyzer and solvent, forms the second nano thin-film; By the solvent evaporation in described first nano thin-film and described second nano thin-film, make dianhydride and diamines polymerization reaction take place under the effect of described catalyzer, form orientation rete on the substrate.
Optionally, form at least one described first nano thin-film and at least one described second nano thin-film on the substrate, to form at least orientation rete described in one deck.
Optionally, the heating-up temperature under described heating condition is 50-110 DEG C.
Further, described diamines is 0.9:1 ~ 1.1:1 with the molal weight ratio of described dianhydride, and described dianhydride is 3:1 ~ 4:1 with the molal weight ratio of solvent in the mixed liquor of solvent and dianhydride.
Optionally, described dianhydride comprises at least one in cyclobutanetetracarboxylic dianhydride, 1,2,4,5-pyromellitic acid anhydride, 2,3,5-tricarboxylic cyclopentyl acetic acid dianhydrides and 3,4-dicarboxyl-1,2,3,4-tetrahydrochysene-1-naphthoic acid dianhydride; And/or
Described diamines comprises p-phenylenediamine (PPD), 4,4 '-diphenylamine, 4,4 '-diamino-diphenylamine, 4,4 '-diaminodiphenyl ether, 2,2 '-bis-(trifluoromethyl)-4,4 '-benzidine, 1,5-two (4-amino-benzene oxygen) pentane and 2, at least one in 2 '-dimethyl-4,4 '-benzidine; And/or
Described solvent comprises at least one in methyl pyrrolidone, butyrolactone and fourth oxyethanol.
Preferably, after the described orientation of formation on the substrate rete, also comprise:
Described orientation rete is solidified 10-40 minute at the temperature of 210 DEG C-250 DEG C.
Optionally, when described orientation rete is two-layer, the thickness of ground floor orientation rete is 800 dust-1200 dusts, and the thickness of second layer orientation rete is 200 dust-400 dusts, and described second layer orientation rete is between described ground floor orientation rete and described substrate.
Preferably, described ground floor orientation rete is polyamide acid type, and described second layer orientation rete is polyimide type.
A kind of display panel, comprises by the obtained display base plate of the manufacture method described in above-mentioned any one technical scheme.
A kind of alignment films manufacturing equipment, the second evaporation chamber comprising the first evaporation chamber and be connected with described first evaporation chamber; Wherein,
Described first evaporation chamber comprises the first material district and is located at the first material universal stage for heating described first material district below described first material district, and the top in described first material district is provided with substrate to be deposited and the first rotary machine for being elevated described substrate to be deposited relatively;
Described second evaporation chamber comprises the second material district and is located at the second material universal stage for heating described second material below described second material district, the top in described second material district is provided with described substrate to be deposited and the second rotary machine for being elevated described substrate to be deposited relatively, and is also provided with heating plate between described substrate to be deposited and described second rotary machine.
The invention provides a kind of manufacture method and display panel, alignment films manufacturing equipment of display base plate, in this manufacture method, by diamines and dianhydride layering evaporation polymerization are occurred under the effect of catalyzer and prepare alignment films on substrate.Adopt evaporation mode to prepare alignment films and not only solve the foreign matter of alignment films in film forming procedure problem occurred frequently in prior art, the thickness of each nano thin-film in evaporate process can be made in addition precisely controlled, and by the proportioning between each component of reasonable adjusting, the reaction when being polymerized of each component can also be made more abundant, prepare evenly orientation rete, thus effectively can improve the light orientation effect of orientation rete.The method is simple to operate, has certain productivity in actual production.
Accompanying drawing explanation
Fig. 1 is APR impact transfer printing device schematic diagram of the prior art;
The schematic diagram of the manufacture method of the display base plate that Fig. 2 provides for the embodiment of the present invention;
The alignment films manufacturing equipment schematic diagram that Fig. 3 provides for the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
The schematic diagram of the manufacture method of the display base plate that Fig. 2 provides for the embodiment of the present invention.As shown in Figure 2, embodiments provide a kind of manufacture method of display base plate, comprising:
Step S1 a: substrate is provided;
Step S2: to the mixed liquor of described substrate surface evaporation dianhydride and solvent, form the first nano thin-film;
Step S3: in a heated condition, on described first nano thin-film, the mixed liquor of evaporation diamines, catalyzer and solvent, forms the second nano thin-film; By the solvent evaporation in described first nano thin-film and described second nano thin-film, make dianhydride and diamines polymerization reaction take place under the effect of described catalyzer, form orientation rete on the substrate.
In the present embodiment, by the mixed liquor to substrate surface evaporation dianhydride and solvent, form the first nano thin-film with first substrate surface now, the mixed liquor then again by evaporation diamines, catalyzer and solvent on the first nano thin-film, to form the second nano thin-film.Here it should be noted that, while formation second nano thin-film, under whole reaction system is in heated condition, thus while enabling the solvent of evaporation in the first nano thin-film and the second nano thin-film obtain heating volatilization at such a temperature, the dianhydride in nano thin-film can be polymerized with diamines and forms orientation rete under the effect of catalyzer.When be polymerized under the effect at catalyzer of dianhydride and diamines form orientation rete time, because reaction system is in heated condition, orientation rete also can effectively be solidified.
The invention provides a kind of manufacture method of display base plate, in this manufacture method, by polymerization reaction take place on substrate and under the effect of catalyzer prepares alignment films by diamines and dianhydride layering evaporation.Adopt evaporation mode to prepare alignment films and not only solve foreign matter problem occurred frequently in prior art in alignment films film forming procedure, the thickness of each nano thin-film in evaporate process can be made in addition precisely controlled, and by the proportioning between each component of reasonable adjusting, the reaction when being polymerized of each component can also be made more abundant, prepare evenly orientation rete, thus effectively can improve the light orientation effect of orientation rete.The method is simple to operate, has certain productivity in actual production.
In an alternate embodiment of the present invention, form at least one described first nano thin-film and at least one described second nano thin-film on the substrate, to form at least orientation rete described in one deck.Exemplary, in the present embodiment, to form the second nano thin-film described in the first nano thin-film and described on substrate, thus orientation rete described in formation one deck is a circulation, according to the actual needs of alignment films thickness prepared required in producing, multilayer oriented rete can be formed by repeating above-mentioned circulation mode repeatedly evaporation on substrate.Form multilayer oriented rete and not only optionally can locate the layer position of PI rete in multilayer oriented rete, the orientation rete of different component/type also can be made to give full play to synergy when aligned liquid-crystal, thus formation obtains the more superior alignment films of performance.
In an alternate embodiment of the present invention, the heating-up temperature under described heating condition is 50-110 DEG C.In the present embodiment, while evaporation forms the second nano thin-film, reaction system is heated, the solvent in the first nano thin-film and the second nano thin-film can be made effectively to be volatilized on the one hand, on the other hand by reasonable adjusting heating-up temperature, also can while evaporation forms the second nano thin-film, realize the component film-forming after polymerisation in the first nano thin-film and the second nano thin-film, thus follow-up required independent heating and rear baking process can be avoided, and then provide cost savings, improve production efficiency.
In a preferred embodiment, described diamines is 0.9:1 ~ 1.1:1 with the molal weight ratio of described dianhydride, and described dianhydride is 3:1 ~ 4:1 with the molal weight ratio of solvent in the mixed liquor of solvent and dianhydride.In the present embodiment, by reasonably allocating the molal weight ratio of diamines and dianhydride and solvent and the molal weight ratio of dianhydride, can be conducive in the process of evaporation film-forming, it is more complete that dianhydride and diamines can be polymerized, and forms structural stronger orientation rete; In addition, rational allocation quantity of solvent, also can make it while playing viscosity reduction effect to raw material dianhydride or diamines in evaporate process, in polymerization stage volatilization completely, thus does not produce any impact to reaction system.
Be understandable that, diamines and dianhydride amount in the polymerization should be 1:1, but in large-scale production, the amount of each component slightly deviation during reaction, should adjust according to actual computation value, so can float within the scope of 0.9:1 ~ 1.1:1.In like manner, the molal weight of solvent and dianhydride is than also floating between 3:1 ~ 4:1.
In an alternate embodiment of the present invention, described dianhydride comprises cyclobutanetetracarboxylic dianhydride, 1, and 2,4,5-pyromellitic acid anhydride, 2,3,5-tricarboxylic cyclopentyl acetic acid dianhydride and 3,4-dicarboxyls-1, at least one in 2,3,4-tetrahydrochysene-1-naphthoic acid dianhydride (TDA); And/or described diamines comprises p-phenylenediamine (PPD), 4,4 '-diphenylamine, 4,4 '-diamino-diphenylamine, 4,4 '-diaminodiphenyl ether, 2,2 '-bis-(trifluoromethyl)-4,4 '-benzidine, 1,5-two (4-amino-benzene oxygen) pentane and 2, at least one in 2 '-dimethyl-4,4 '-benzidine; And/or described solvent comprises at least one in methyl pyrrolidone, butyrolactone and fourth oxyethanol.
In the present embodiment, sets forth diamines in the dianhydride in the first nano thin-film, the second nano thin-film and with its solvent mixed mutually the compound commonly used, it should be noted that, in fact solvent does not participate in reaction in whole reaction system, and its object added is unfavorable for evaporation because viscosity is excessive in order to avoid the raw material such as dianhydride or diamines when direct evaporation and adds with diluting reaction raw material.In addition, in order to the polyreaction of dianhydride and diamines can be enable effectively to carry out, formed at evaporation in the component of the second nano thin-film and be also added with catalyzer, react with both catalysis.Catalyzer in the present embodiment can be tertiary amine and sal tartari.
Be understandable that, diamines, dianhydride, solvent and catalyzer selected in the embodiment of the present invention also not only limit to above-mentioned cited, and those skilled in the art can select suitable diamines, dianhydride, solvent and catalyzer in conjunction with the condition of production.
In a preferred embodiment, after the described orientation of formation on the substrate rete, also comprise: described orientation rete is solidified 10-40 minute at the temperature of 210 DEG C-250 DEG C.In the present embodiment, by described alignment films layer hot setting, the hardness of orientation rete can be increased and improve the alignment capability of orientation rete.In the present embodiment one preferred version, by orientation rete solidification 20-25 minute at the temperature of 220 DEG C-230 DEG C, to form the orientation rete with better hardness, and improve the angle of inclination of orientation rete, thus improve the alignment capability of orientation rete.Be understandable that, those skilled in the art can select in conjunction with production actual conditions the temperature and time that is suitable in above-mentioned scope.
In an alternate embodiment of the present invention, when described orientation rete is two-layer, the thickness of ground floor orientation rete is 800 dust-1200 dusts, and the thickness of second layer orientation rete is 200 dust-400 dusts, and described second layer orientation rete is between described ground floor orientation rete and described substrate.In the present embodiment, for two-layer orientation rete, in the present embodiment one preferred version, described ground floor orientation rete is polyamide acid type, and described second layer orientation rete is polyimide type.Wherein, second layer orientation rete is near substrate, and it has certain thickness (or resistance), can improve image retention, but shortcoming is that hardness is too soft, and alignment capability is more weak; Ground floor orientation rete is positioned at second layer orientation film layer, has aligned liquid-crystal function, and its hardness is higher, can improve alignment capability.So when comprising two-layer orientation rete, the two can play synergy, mutually makes up by using, and is more conducive to the final alignment films formed and has superior function.
It should be noted that, the thickness optimized the most that every layer of orientation rete is all unfixing, thickness selected is all the angle from its maximizing performance, and the thickness of every layer of orientation rete all can be determined by the thickness of its reaction raw materials dianhydride, diamines and solvent.In a preferred version, the thickness of ground floor orientation rete is 1000-1200 dust, and the thickness of second layer orientation rete is 200-300 dust.Here also it should be noted that, formed ground floor orientation rete and second layer orientation rete PI component can identical can be different, as long as the type of the orientation rete formed in different orientation film is different, ground floor orientation rete such as described above is polyamide acid type, and described second layer orientation rete is polyimide type.
Embodiments provide a kind of display panel, comprise by the obtained display base plate of the manufacture method described in above-mentioned any one embodiment.The display panel that the present embodiment provides includes the alignment films that evaporation prepares.Because this alignment films meets technological design, its border effectively can be avoided to enter viewing area or Hermetic coating region, thus effectively can improve the light orientation effect of display panel.
The alignment films manufacturing equipment schematic diagram that Fig. 3 provides for the embodiment of the present invention.Below in conjunction with Fig. 3 specifically introduce enforcement that the embodiment of the present invention provides above-mentioned on display base plate evaporation have the alignment films manufacturing equipment of orientation rete, the second evaporation chamber B that this alignment films manufacturing equipment comprises the first evaporation chamber A and is connected with the first evaporation chamber A; Wherein,
First evaporation chamber A comprises the first material district 4 and the top for first material universal stage 1, the first material district 4 of heating the first material district 4 be located at below the first material district 4 is provided with substrate 3 to be deposited and the first rotary machine 2 for being elevated substrate 3 to be deposited relatively;
The second material universal stage 21 for heating the second material that second evaporation chamber B comprises the second material district 24 and is located at below the second material district 24, the top in the second material district 24 is provided with substrate 3 to be deposited and the second rotary machine 22 for being elevated substrate 3 to be deposited relatively, and is also provided with heating plate 27 between substrate 3 to be deposited and the second rotary machine 22.
The alignment films manufacturing equipment that the present embodiment provides comprises two similar evaporation chambers, i.e. the first evaporation chamber and the second evaporation chamber, and difference part is also to be provided with heating plate 27 in the second evaporation chamber.Below will describe in detail.
First evaporation chamber A includes to be positioned at from the bottom to top successively provides the first vacuum plant 5 of vacuum tightness for this chamber bottom the first evaporation chamber A, and the mixed solution that first can hold two acid anhydride and solvent in the first material district 4 of material district 4, first in evaporation chamber A; The first material universal stage 1 for heating the first material district 4 is provided with, the first rotary machine 2 for being elevated substrate 3 to be deposited being relatively provided with substrate 3 to be deposited and being provided with above substrate 3 to be deposited above the first material district 4 below the first material district 4.Two acid anhydride in such first material district 4 and the mixed solution of solvent evaporate under the rotary heating of the first material universal stage 1, evaporation is on the to be deposited substrate 3 corresponding with above it, and substrate 3 to be deposited is by the elevating control of the first rotary machine 2 thus be evenly coated with the first nano thin-layer formed by the mixed solution of two acid anhydride and solvent in its surface.
After substrate 3 surface to be deposited forms the first nano thin-layer, it is imported and exported 6 from the first evaporation chamber A through chamber by the transmission of mechanical arm and moves to the second evaporation chamber B by this substrate 3 to be deposited, in like manner, second evaporation chamber B and the first evaporation chamber A has close structure, same section comprises being positioned at provides the second vacuum plant 25 of vacuum tightness for this chamber bottom the second evaporation chamber B, and second material district 24 and the second material universal stage 21 for heating the second material district 24 of being located at below the second material district 24, the second rotary machine 22 for being elevated substrate 3 to be deposited being relatively provided with substrate 3 to be deposited and arranging above substrate 3 to be deposited above the second material district 24.
Wherein, the material held in second material district 24 can be the mixed solution of diamine, solvent and catalyzer, this mixed solution evaporates under the rotary heating of the second material universal stage 21, evaporation is formed on the substrate to be deposited 3 of the first nano thin-film corresponding with above it, and this substrate 3 to be deposited is by the elevating control of the second rotary machine 22 thus be evenly coated with the second nano thin-layer formed by the mixed solution of diamine, solvent and catalyzer in its surface again.Now, can obtain being evaporated completely in order to ensure the solvent in the component be coated with on the surface of the substrate the orientation rete film-forming that complete and two acid anhydride and diamine can be polymerized formation under the effect of catalyzer, heating plate 27 is also provided with between substrate 3 to be deposited and the second rotary machine 22, wherein, the temperature of heating plate 27 can adjust between 50-110 DEG C according to the response situation in reaction system.Question response carries out complete, can form orientation rete on substrate 3 to be deposited.
Embodiments provide a kind of alignment films manufacturing equipment, this equipment is simple, easy to operate, because this equipment and TFT prepare link, as resin generates, or solvent also has general character to equipment required in the links such as metal etch, and therefore this equipment can be widely used in each operation link of display base plate.
Obviously, above-described embodiment is only for clearly example being described, and the restriction not to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all embodiments.And thus the apparent change of extending out or variation be still in the protection domain of the invention.
Claims (10)
1. a manufacture method for display base plate, is characterized in that, comprising:
One substrate is provided;
To the mixed liquor of described substrate surface evaporation dianhydride and solvent, form the first nano thin-film;
In a heated condition, on described first nano thin-film, the mixed liquor of evaporation diamines, catalyzer and solvent, forms the second nano thin-film; By the solvent evaporation in described first nano thin-film and described second nano thin-film, make described dianhydride and described diamines polymerization reaction take place under the effect of described catalyzer, form orientation rete on the substrate.
2. manufacture method according to claim 1, is characterized in that,
Form at least one described first nano thin-film and at least one described second nano thin-film on the substrate, to form at least orientation rete described in one deck.
3. manufacture method according to claim 1, is characterized in that, the heating-up temperature under described heating condition is 50-110 DEG C.
4. manufacture method according to claim 1, is characterized in that, described diamines is 0.9:1 ~ 1.1:1 with the molal weight ratio of described dianhydride, and described dianhydride is 3:1 ~ 4:1 with the molal weight ratio of solvent in the mixed liquor of solvent and dianhydride.
5. manufacture method according to claim 1, is characterized in that, described dianhydride comprises cyclobutanetetracarboxylic dianhydride, 1,2,4,5-pyromellitic acid anhydride, 2,3,5-tricarboxylic cyclopentyl acetic acid dianhydrides and 3, at least one in 4-dicarboxyl-1,2,3,4-tetrahydrochysene-1-naphthoic acid dianhydride; And/or
Described diamines comprises p-phenylenediamine (PPD), 4,4 '-diphenylamine, 4,4 '-diamino-diphenylamine, 4,4 '-diaminodiphenyl ether, 2,2 '-bis-(trifluoromethyl)-4,4 '-benzidine, 1,5-two (4-amino-benzene oxygen) pentane and 2, at least one in 2 '-dimethyl-4,4 '-benzidine; And/or
Described solvent comprises at least one in methyl pyrrolidone, butyrolactone and fourth oxyethanol.
6. the manufacture method according to any one of claim 1-5, is characterized in that, after the described orientation of formation on the substrate rete, also comprises:
Described orientation rete is solidified 10-40 minute at the temperature of 210 DEG C-250 DEG C.
7. manufacture method according to claim 6, it is characterized in that, when described orientation rete is two-layer, the thickness of ground floor orientation rete is 800 dust-1200 dusts, the thickness of second layer orientation rete is 200 dust-400 dusts, and described second layer orientation rete is between described ground floor orientation rete and described substrate.
8. manufacture method according to claim 7, is characterized in that, described ground floor orientation rete is polyamide acid type, and described second layer orientation rete is polyimide type.
9. a display panel, is characterized in that, comprises by the obtained display base plate of the manufacture method described in any one of claim 1-8.
10. an alignment films manufacturing equipment, is characterized in that, the second evaporation chamber comprising the first evaporation chamber and be connected with described first evaporation chamber; Wherein,
Described first evaporation chamber comprises the first material district and is located at the first material universal stage for heating described first material district below described first material district, and the top in described first material district is provided with substrate to be deposited and the first rotary machine for being elevated described substrate to be deposited relatively;
Described second evaporation chamber comprises the second material district and is located at the second material universal stage for heating described second material below described second material district, the top in described second material district is provided with described substrate to be deposited and the second rotary machine for being elevated described substrate to be deposited relatively, and is also provided with heating plate between described substrate to be deposited and described second rotary machine.
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| WO2018010249A1 (en) * | 2016-07-13 | 2018-01-18 | 深圳市华星光电技术有限公司 | Alignment film solvent, alignment film solution, and manufacturing method for an alignment film |
| CN106292076A (en) * | 2016-11-01 | 2017-01-04 | 京东方科技集团股份有限公司 | The manufacture method of a kind of alignment film, producing device and alignment film |
| CN106292076B (en) * | 2016-11-01 | 2019-06-04 | 京东方科技集团股份有限公司 | A kind of production method of alignment film, producing device and alignment film |
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| CN104730771B (en) | 2017-08-25 |
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