CN104711539A - Close sealing mechanism for vacuum film plating production line - Google Patents
Close sealing mechanism for vacuum film plating production line Download PDFInfo
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- CN104711539A CN104711539A CN201310692198.XA CN201310692198A CN104711539A CN 104711539 A CN104711539 A CN 104711539A CN 201310692198 A CN201310692198 A CN 201310692198A CN 104711539 A CN104711539 A CN 104711539A
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- hinge
- production line
- hinge seat
- hinged component
- vacuum coating
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Abstract
The invention discloses a close sealing mechanism for vacuum film plating production line. The close sealing mechanism comprises hinge members and locking member, the hinge member is connected with the chamber doors and doorframes of various chambers in the vacuum film plating production line, the chamber doors can be opened and closed through the hinge members, and the locking members are arranged on the doorframes. Compared with close sealing mechanisms in the prior art, the close sealing mechanism disclosed in the invention guarantees the flexible rotation of door hinges by adopting double bearing design to make the door hinges difficult to damage; and when the close sealing mechanism is used together with a door locking device, the double bearing design allows door bodies and the doorframes to translate into the chambers in order to make a large range gap not exist between the door bodies and the doorframes, so the door bodies can be tightly applied with the doorframes, and the sealing effect of the vacuum chambers is good, thereby the close sealing mechanism has a wide market prospect.
Description
Technical field
The present invention relates to vacuum coating production line technical field, specifically, relate to the closely sealed mechanism of a kind of vacuum coating production line.
Background technology
Vacuum plating is a kind of technology producing thin-film material, its roughly flow process be in vacuum chamber by the atom of material from heating source emanate out get to plated object surface, thus produce thin film on plated body surface.The hermatic door of vacuum plating chamber is heavier, and common door hinge is difficult to the deadweight of bearing perble range door leaf, and after life-time service, the hinge of door leaf easily damages.The hermatic door of vacuum chamber is more special, and crack between a door and its frame is provided with cushion rubber, when just closing, there is gap between door and casing, there is closed not tight phenomenon.After chamber starts to vacuumize, door can be sucked up, and cushion rubber compresses completely, reach sealing purpose, but the door hinge passed is only single shaft design, even if when cushion rubber compresses completely, still there will be trickle gap at the joining place of doorframe and door body, cause a body sealing not exclusively.Chinese patent CN202031416U discloses a kind of hermatic door hinge of plate turning box of mono-crystal furnace, and door hinge disclosed in this technical scheme mainly solves not high, the flimsy problem of conventional hinge loading strength.But this technology still cannot solve the seamless closely sealed problem of a body.Chinese patent application CN202899859U discloses a kind of capsule door of escape capsule for mining hinge arrangement.Though this technical scheme changes the sealing effectiveness of a body to a certain extent, this hinge loading strength is not high, still there is flimsy problem.Therefore, the tight and flimsy problem of door hinge of the hermatic door body of existing vacuum coating production line sealing is not still resolved, and how solving this technical barrier, is the problem that technician urgently considers.
Summary of the invention
For the problems referred to above that prior art exists, the object of this invention is to provide a kind of vacuum coating production line each chamber door body that can realize and seal the tighter closely sealed mechanism of door, better to realize sealing property, and Stability Analysis of Structures anti-pressure ability is strong.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of closely sealed mechanism of vacuum coating production line, this closely sealed mechanism comprises hinged component and tight latch fitting, and hinged component connects room door and the doorframe of each function chamber in vacuum coating production line, and room door is through hinged component folding, and tight latch fitting is arranged on doorframe.
More preferably, hinged component comprises the first hinged component, the second hinged component and secondary hinge part, and wherein the first hinged component is connected with room door, and the second hinged component is connected with doorframe, and secondary hinge part connects the first hinged component and the second hinged component respectively; First hinged component comprises the first hinge seat and the first hinge axis, second hinged component comprises the second hinge seat and the second hinge axis, first hinge seat and secondary hinge part are with the first hinge axis, second hinge seat and secondary hinge part are with the second hinge axis, and be provided with bearing between the second hinge seat and secondary hinge seat, be preferably surface bearing.
More preferably, in order to make hinged component structure more compact and reasonable, the first hinge seat is removed material according to secondary hinge part shape and is become the first groove, and secondary hinge part embeds in the first groove and the first hinge seat coaxial rotation; Correspondingly, the second hinge seat is removed material according to secondary hinge part shape and is become the second groove, and secondary hinge part embeds in the second groove and the second hinge seat coaxial rotation; First groove is contrary with the second slot opening direction.
More preferably, the first hinge seat and the second hinge seat contour isometric, the first hinge seat and the second hinge seat not wide, in other words, the second hinge seat is thicker than the first hinge seat; When this stand out can realize becoming vacuum state in vacuum coating production line chamber, avoiding external atmosphere pressure room door to be provided with the side of hinged component cannot be evenly airtight, and make the process that closes of whole room door stressed more average, room door sealing performance is good.
More preferably, the first groove is arranged on the stage casing of the first hinge seat, and similarly, the second groove is arranged on the stage casing of the second hinge seat.
More preferably, in order to, make the process that closes of whole room door stressed more average, fixed by a bolt between the first hinge seat and secondary hinge part, and this bolt is connected with room door, by this bolt adjustment secondary hinge part, secondary hinge part is not swung in rotation process, and in rotation process, confinement cells door is along with the gap wobble of secondary hinge part and the first hinge seat, but making room door along with the rotation of secondary hinge part, this bolt is preferably countersunk screw.
Preferably, tight latch fitting comprises permanent seat, retaining element and thrust screw, and permanent seat is bolted on the doorframe of each function chamber of coating film production line, and retaining element is movably arranged on permanent seat by thrust screw.
More preferably, be flexibly connected between thrust screw with retaining element, retaining element is rotatable when thrust screw is arranged on doorframe.
Compared with prior art, in the present invention, closely sealed mechanism adopts duplex bearing design can ensure the flexible rotating of door hinge, makes door hinge not fragile; When coordinating door locking device to use in the lump, two shaft design can promote door body and doorframe is overall as chamber interior translation, make can not produce large-scale gap between Men Tiyu doorframe, thus door physical efficiency is fitted with doorframe more closely, the sealing effectiveness of vacuum chamber is also better.Therefore, the present invention has wide market outlook.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the closely sealed mechanism of a kind of vacuum coating production line provided by the invention for vacuum coating production line chamber;
Fig. 2 is a kind of preferred implementation stereographic map of a kind of vacuum coating production line provided by the invention hinged component in closely sealed mechanism;
Fig. 3 is a kind of preferred implementation skeleton view of a kind of vacuum coating production line provided by the invention hinged component in closely sealed mechanism;
Fig. 4 is a kind of preferred implementation structure iron of a kind of vacuum coating production line provided by the invention with latch fitting tight in closely sealed mechanism.
Embodiment
Do to illustrate in detail, intactly further to the present invention below in conjunction with the drawings and the specific embodiments.
Fig. 1 to Fig. 4 is the schematic diagram of a kind of closely sealed mechanism of vacuum coating production line door provided by the invention.Vacuum coating production line comprises substrate transmission class waterline and plated film streamline, and plated film streamline comprises at least 7 chambers further, and this closely sealed mechanism, for being arranged on each chamber by fastening for the room door of each chamber, keeps the stopping property of each chamber.As shown in Figures 1 to 4, this closely sealed mechanism comprises a hinged component 10 and tight latch fitting 20, and hinged component 10 connects room door and the doorframe of each function chamber in vacuum coating production line, and room door is through hinged component 10 folding, and tight latch fitting 20 is arranged on doorframe.
Fig. 2 is a kind of preferred implementation stereographic map of a kind of vacuum coating production line provided by the invention hinged component in closely sealed mechanism; Fig. 3 is a kind of preferred implementation skeleton view of a kind of vacuum coating production line provided by the invention hinged component in closely sealed mechanism.As shown in Figures 2 and 3, hinged component 10 comprises the first hinged component 11, second hinged component 12 and secondary hinge part 13, wherein the first hinged component 11 is connected with room door, and the second hinged component 12 is connected with doorframe, and secondary hinge part 13 connects the first hinged component 11 and the second hinged component 12 respectively; First hinged component 11 comprises the first hinge seat 111 and the first hinge axis 112 further, second hinged component 12 comprises the second hinge seat 121 and the second hinge axis 122, first hinge seat 111 and secondary hinge part 13 rotate with the first hinge axis 112, second hinge seat 121 and secondary hinge part 13 rotate with the second hinge axis 122, and be provided with bearing 14 between the second hinge seat 122 and secondary hinge part 13, be preferably surface bearing.
In order to make hinged component 10 structure more compact and reasonable, the first hinge seat 111 is removed material according to secondary hinge part 13 shape and is become the first groove 111, and secondary hinge part 13 embeds in the first groove 111 and rotates with the first hinge axis 112 with the first hinge seat 111; Correspondingly, the second hinge seat 121 is removed material according to secondary hinge part 13 shape and is become the second groove 1211, and secondary hinge part 13 embeds in the second groove 1211 and rotates with the second hinge axis 122 with the second hinge seat 121; It should be noted that the first groove 1111 is contrary with the second groove 1211 opening direction, the width of the two is consistent with the width of secondary hinge part 13.
More preferably, the first hinge seat 111 and the second hinge seat 121 contour isometric, the first hinge seat 111 and the second hinge seat 121 not wide, in other words, the second hinge seat 121 is thicker than the first hinge seat 111; When this stand out can realize becoming vacuum state in vacuum coating production line chamber, avoiding external atmosphere pressure room door to be provided with the side of hinged component 10 cannot be evenly airtight, and make the process that closes of whole room door stressed more average, room door sealing performance is good.
First groove 1111 is arranged on the stage casing of the first hinge seat 111, and similarly, the second groove 1211 is arranged on the stage casing of the second hinge seat 121.
In order to make the process that closes of whole room door stressed more average, fixed by a bolt between the first hinge seat 111 and secondary hinge part 13, and this bolt is connected with room door, by this bolt adjustment secondary hinge part 13, secondary hinge part 13 is not swung in rotation process, and in rotation process, confinement cells door is along with the gap wobble of secondary hinge part 13 and the first hinge seat 111, but room door is rotated along with secondary hinge part 13, this bolt is preferably countersunk screw.
Fig. 4 is a kind of preferred implementation structure iron of a kind of vacuum coating production line provided by the invention with latch fitting tight in closely sealed mechanism.As shown in Figure 4, tight latch fitting 20 comprises permanent seat 21, retaining element 22 and a thrust screw 23, and permanent seat 21 is bolted on the doorframe of each function chamber of coating film production line, and retaining element 22 is movably arranged on permanent seat 21 by thrust screw 23.Be flexibly connected between thrust screw 23 with retaining element 22, retaining element 22 is rotatable when thrust screw 23 is arranged on doorframe.When room door closes, rotate retaining element 22, retaining element 22 is pressed on the door of room, then is fixed element 22 further through thrust screw 23, realize room door and be more close to doorframe.
Retaining element 22 can adopt various locking plate of the prior art or chain structure, as a kind of preferred version, retaining element 22 is the cam-like of a removal material, and retaining element 22 is rotated by a screw, when retaining element 22 remove material side overlap with doorframe time, room door can be opened; When retaining element 22 do not remove material side be close to room door time, room door locking.
When each function chamber of coating film production line needs to seal, room door is closed, first hinged component 11 is connected with room door, second hinged component 12 is connected with doorframe, secondary hinge part 13 connects the first hinged component 11 and the second hinged component 12 respectively, and such first hinged component 11 is along with the motion of room door, and secondary hinge part 13 is connected with the second hinge axis 122 of the second hinged component 12, this specimen chamber door rotates, until room door closes together with secondary hinge part 13 centered by the second hinge axis 122; After room door closes, room door is close to doorframe away from the side of closely sealed mechanism, and gap is also left in the side being close to closely sealed mechanism, promote room door to the lateral movement near doorframe, because secondary hinge part 13 is connected with the first hinge axis 112 of the first hinged component 11, promoting room door in the side moving process near doorframe, room door rotates centered by the first hinge axis 112 of the first hinged component 11, until room door laminating doorframe.When after room door laminating doorframe, rotate the retaining element 22 in tight latch fitting 20, make retaining element 22 not remove material side and be close to room door, make room door locking.
Finally be necessary described herein: above embodiment is only for being described in more detail technical scheme of the present invention; can not be interpreted as limiting the scope of the invention, some nonessential improvement that those skilled in the art's foregoing according to the present invention is made and adjustment all belong to protection scope of the present invention.
Claims (10)
1. the closely sealed mechanism of vacuum coating production line, it is characterized in that: described closely sealed mechanism comprises hinged component and tight latch fitting, described hinged component connects room door and the doorframe of each function chamber in vacuum coating production line, and described room door is through hinged component folding, and described tight latch fitting is arranged on doorframe.
2. the closely sealed mechanism of vacuum coating production line according to claim 1, it is characterized in that: described hinged component comprises the first hinged component, the second hinged component and secondary hinge part, wherein said first hinged component is connected with room door, described second hinged component is connected with doorframe, and described secondary hinge part connects the first hinged component and the second hinged component respectively; Described first hinged component comprises the first hinge seat and the first hinge axis, described second hinged component comprises the second hinge seat and the second hinge axis, described first hinge seat and secondary hinge part are with the first hinge axis, described second hinge seat and secondary hinge part with the second hinge axis, and are provided with bearing between the second hinge seat and secondary hinge seat.
3. the closely sealed mechanism of vacuum coating production line according to claim 2, is characterized in that: described bearing is surface bearing.
4. the closely sealed mechanism of vacuum coating production line according to claim 2, is characterized in that: described first hinge seat is removed material according to secondary hinge part shape and become the first groove, and described secondary hinge part embeds in the first groove and the first hinge seat coaxial rotation; Correspondingly, described second hinge seat is removed material according to secondary hinge part shape and is become the second groove, and described secondary hinge part embeds in the second groove and the second hinge seat coaxial rotation; Described first groove is contrary with the second slot opening direction.
5. the closely sealed mechanism of vacuum coating production line according to claim 2, is characterized in that: described first hinge seat and the second hinge seat contour isometric, the second hinge seat and the first hinge seat not wide.
6. the closely sealed mechanism of vacuum coating production line according to claim 2, is characterized in that: described second hinge seat is thicker than the first hinge seat.
7. the closely sealed mechanism of vacuum coating production line according to claim 4, is characterized in that: described first groove is arranged on the stage casing of the first hinge seat.
8. the closely sealed mechanism of vacuum coating production line according to claim 4, is characterized in that: described second groove is arranged on the stage casing of the second hinge seat.
9. the closely sealed mechanism of vacuum coating production line according to claim 2, is characterized in that: fixed by a bolt between described first hinge seat and described secondary hinge part.
10. the closely sealed mechanism of vacuum coating production line according to claim 9, is characterized in that: described bolt is preferably countersunk screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310692198.XA CN104711539A (en) | 2013-12-16 | 2013-12-16 | Close sealing mechanism for vacuum film plating production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310692198.XA CN104711539A (en) | 2013-12-16 | 2013-12-16 | Close sealing mechanism for vacuum film plating production line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104711539A true CN104711539A (en) | 2015-06-17 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310692198.XA Pending CN104711539A (en) | 2013-12-16 | 2013-12-16 | Close sealing mechanism for vacuum film plating production line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104711539A (en) |
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2013
- 2013-12-16 CN CN201310692198.XA patent/CN104711539A/en active Pending
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| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150617 |