CN104707992A - Preparation method for superstructure Au/Ag@Al2O3@Ag nanosphere array and SERS performance of superstructure Au/Ag@Al2O3@Ag nanosphere array - Google Patents

Preparation method for superstructure Au/Ag@Al2O3@Ag nanosphere array and SERS performance of superstructure Au/Ag@Al2O3@Ag nanosphere array Download PDF

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CN104707992A
CN104707992A CN201410718678.3A CN201410718678A CN104707992A CN 104707992 A CN104707992 A CN 104707992A CN 201410718678 A CN201410718678 A CN 201410718678A CN 104707992 A CN104707992 A CN 104707992A
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nano
array
nanosphere
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sers
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胡小晔
孟国文
朱储红
韩方明
黄竹林
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Hefei Institutes of Physical Science of CAS
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Abstract

The invention discloses a preparation method for a superstructure Au/Ag@Al2O3@Ag nanosphere array and the SERS performance of the superstructure Au/Ag@Al2O3@Ag nanosphere array. The anodizing method is implemented on a pure titanium sheet two times to prepare a titanium dioxide nanometer bowl array; the titanium dioxide nanometer bowl array serves as a template, and ion sputtering of Au and Ag nano-particles is carried out so as to form Au/Ag nano-particle film; annealing treatment is then carried out to agglomerate the Au/Ag nano-particle film so as to form an ordered Au/Ag alloy nanosphere array; an atomic layer deposition technology is adopted for wrapping the Au/Ag alloy nanosphere array with an ultra-thin aluminum oxide dielectric layer; finally an ion sputtering method is then adopted for sputtering the Ag nano-particles on Au/Ag alloy nanospheres forming wrapped with the aluminum oxide dielectric layer, and the Ag nano-particles are dispersed on the Au/Ag alloy nanospheres. The SERS activity of the superstructure Au/Ag@Al2O3@Ag nanosphere array is high, the SERS signal collecting repeatability is good, and the SERS activity is not influenced by changes of incident light angles.

Description

A kind of superstructure Au/Ag@Al 2o 3the preparation method of@Ag nanosphere array and SERS performance thereof
Technical field
The present invention relates to a kind of superstructure Au/Ag@Al 2o 3the preparation method of@Ag nanosphere array, and this superstructure Au/Ag@Al 2o 3sERS (SERS) effect of@Ag nanosphere array, belongs to field of nanometer technology.
Background technology
Theoretical and experimental study shows, SERS effect is mainly derived from the Electromagnetic enhancement " focus " in noble metal backing material.In general, when the gap in noble metal substrate between nano unit is less than 10 nm, very strong local coupling can be produced, thus form Electromagnetic enhancement " focus ", and then the SERS improving substrate is active.Meanwhile, in order to obtain reproducible SERS signal, require that SERS substrate has equally distributed Electromagnetic enhancement " focus ".Based on this, preparation SERS substrate key obtains to have the ordered nano-structure array being less than 10nm gap.So far, researcher has adopted various distinct methods to prepare the SERS substrate of ordered nano array structure, and the signal obtained is repeated.But, regulate gap in these ordered structures between nano unit to below 10nm, and to realize controllable precise be a very large challenge.Recently, ald (ALD) technology is incorporated in preparation SERS substrate by researcher, insert one deck ultra-thin dielectric layer between the nano unit in SERS substrate, the gap controllable precise between nano unit can be realized by the thickness controlling dielectric layer.But, the nano gap in these SERS substrates be mainly present in the nano unit that is stacked up and down between.In actual applications, the incident laser applied is all top-down direction, and namely laser incidence angle becomes zero angle with " nano unit be stacked to " line of centres.In this case nano gap can not generate an electromagnetic field enhancing, namely can not become effective SERS and strengthen " focus ", be unfavorable for the raising of SERS performance.So, desirable SERS substrate, not only has high density, equally distributed nano gap, and the orientation of these nano gaps must be rationally, effectively output can strengthen electric field under laser irradiates, can not be affected because of the change of laser incidence angle simultaneously.
Summary of the invention
The present invention aims to provide a kind of superjunction Au/Ag@Al of nano gap with high density, isotropic distribution 2o 3the preparation method of@Ag nanosphere array and SERS performance thereof, preparation method of the present invention is simple, effectively and favorable repeatability, the SERS activity of obtained array is high, SERS signals collecting is reproducible and its SERS is active does not affect by the change of incident angle of light.
The present invention prepares titanium dioxide (TiO by carrying out twice anodizing to pure titanium sheet 2) nano bowl array; And as template, ion sputtering Au and Ag nano particle, form Au/Ag nano-particular film; Carry out annealing in process again, Au/Ag nano-particular film is reunited, form orderly Au/Ag alloy nano ball array; Then ald (ALD) technology aluminium oxide (Al that coated one deck is ultra-thin in Au/Ag alloy nano ball array is adopted 2o 3) dielectric layer; The last ion sputtering method that adopts again is being coated with Al 2o 3the Au/Ag alloy nano-sphere of dielectric layer sputters Ag nano particle, makes its Dispersed precipitate on Au/Ag alloy nano-sphere, form superstructure Au/Ag@Al 2o 3@Ag nanosphere array.
The concrete scheme that the present invention adopts is as follows:
A kind of superstructure Au/Ag@Al 2o 3the preparation method of@Ag nanosphere array, comprises following concrete steps:
(1) preparation of nano titania bowl array
Pure titanium sheet is oxidized 1.5 hours in the ammonium fluoride ethylene glycol solution of 0.26M under 50 V oxidation voltages, obtains TiO 2nano-tube array; Then the TiO of generation is removed by sonic oscillation 2nano-tube array, titanium sheet stays more shallow TiO 2nano bowl array, is finally oxidized 40 minutes by the titanium sheet with more shallow nano bowl array in the ammonium fluoride ethylene glycol solution of 0.26M under 10 V oxidation voltages, obtains the TiO of hierarchy 2nano bowl array;
(2) preparation of Au/Ag nanosphere array
With the TiO of preparation 2nano bowl array is template, successively ion sputtering Au and Ag two kinds of nano particles, forms Au/Ag nano-particular film and covers TiO 2on nano bowl array mould plate; When ion sputtering Au and Ag nano particle, sputtering current used is 15mA, and the time of sputtering Au is 4 minutes, and then sputters Ag nano particle 2 minutes; After having sputtered Au/Ag nano particle, by the TiO with Au/Ag nano-particular film 2the 400 DEG C of annealing 1 hour in nitrogen atmosphere of nano bowl array mould plate, forms Au/Ag nanosphere array;
(3) superstructure Au/Ag@Al 2o 3the preparation of@Ag nanosphere array
Adopt ald (ALD) technology aluminium oxide (Al that coated one deck is ultra-thin in the Au/Ag alloy nano ball array of preparation 2o 3) dielectric layer; Can control Al by the cycle-index of control ALD 2o 3the thickness of dielectric layer; Adopt ALD to circulate 20 times at this, the Al that 2nm is thick can be obtained 2o 3dielectric layer; Finally, then adopt ion sputtering method being coated with Al 2o 3the Au/Ag nanosphere array of dielectric layer sputters Ag nano particle, and sputtering current used is appointed for 15mA, and sputtering time is 4 minutes, forms superstructure Au/Ag@Al 2o 3@Ag nanosphere array.
The superstructure Au/Ag@Al that the present invention obtains 2o 3the SERS performance test of@Ag nanosphere array comprises following concrete steps: by choosing the SERS substrate of other three kinds of different structures and kind superstructure Au/Ag@Al 2o 3the SERS performance of@Ag nanosphere array compares, and assesses its SERS performance; The other three kinds of substrates be selected are respectively: TiO 2ion sputtering Au and Ag nano particle on nano bowl array mould plate array, Au/Ag nano particle ball array and the Au/Ag Ag nanosphere array of the direct gained of direct ion sputtering Ag nano particle on Au/Ag composite Nano ball, do not have Al between the Ag particle in Au/Ag Ag nanosphere and Au/Ag nanosphere 2o 3dielectric layer is separated; During SERS performance test, by this several various substrates 10 -7m and 10 -8soak 1 hour in M rhodamine (R6G) solution, after air drying, detect the Raman signal of substrate; In Raman signal measurement, laser Raman spectrometer selects Renishaw Invia Reflex Raman spectrometer, excitation wavelength is 532nm, len 20 selected by light source power 0.1mW, camera lens ×, the time of integration is 10s.
At superstructure Au/Ag@Al 2o 3in@Ag nanosphere, Al 2o 3au/Ag alloy nano-sphere is separated with the Ag nano particle of ion sputtering afterwards by dielectric layer, forms nano gap.Because ALD technology can realize Al 2o 3medium thickness is controllable precise in nanoscale, therefore at superstructure Au/Ag@Al 2o 3in@Ag nanosphere, the gap between the Ag nano particle of Au/Ag alloy nano-sphere and ion sputtering can by regulating Al 2o 3medium thickness accurately controls.The Au/Ag@Al of this superstructure 2o 3@Ag nanosphere has high density and the nano gap of Dispersed precipitate, forms highdensity SERS and strengthens " focus ", therefore have high SERS active; Simultaneously because this enhancing " focus " is isotropic distribution in superstructure, in SERS application, do not affect its SERS performance because of the incidence angle change of incident laser.In addition, the Au/Ag@Al of this superstructure 2o 3@Ag nanosphere is uniform sequential arrangement, so can obtain reproducible SERS signal in SERS signals collecting.
Beneficial effect of the present invention:
Preparation method's technique of the present invention is simple, can accurate being emerged of control SERS " focus ", and preparation is reproducible, obtained Au/Ag@Al 2o 3@Ag nanosphere array has the feature of nano gap of high density, isotropic distribution, therefore SERS activity is high, SERS signals collecting is reproducible, SERS is active does not affect by the change of incident angle of light, be expected to be used as the SERS substrate that activity is high, signal is reproducible, have wide application prospects in the quick detection in the fields such as environment, chemistry, biology.
Accompanying drawing explanation
Fig. 1 is superstructure Au/Ag@Al 2o 3preparation technology's flow chart of@Ag nanosphere array; Wherein, (a), anodised TiO 2nano bowl array mould plate, the TiO after (b), ion sputtering Au and Ag nano particle 2nano bowl array mould plate, ball array received by the Au/Ag alloy formed after (c), annealing in process, (d), coated Al 2o 3ball array received by Au/Ag alloy after dielectric, (e), the superstructure Au/Ag@Al formed 2o 3@Ag nanosphere array.
Fig. 2 is superstructure Au/Ag@Al 2o 3the morphology characterization that in@Ag nanosphere array preparation process, each stage is corresponding; Wherein, (a), anodised TiO 2the SEM photo of nano bowl array mould plate, the TiO after (b), ion sputtering Au and Ag nano particle 2the SEM photo of nano bowl array mould plate, the Au/Ag alloy formed after (c), annealing in process receives the SEM photo of ball array and (d) its enlarged photograph, (e), coated Al 2o 3au/Ag alloy after dielectric receives the SEM photo of ball array and (e) TEM photo thereof, (f), the superstructure Au/Ag@Al formed 2o 3the SEM photo of@Ag nanosphere array and (h) its TEM photo.
Fig. 3 (a) is the absorption R6G (10 of four kinds of different nanostructureds -7m) SERS spectrum is recorded after, wherein, (1), superstructure Au/Ag@Al 2o 3@Ag nanosphere array, (2), Au/Ag@Ag composite Nano ball array, (3), TiO 2ion sputtering Au and Ag nano-particular film (4), Au/Ag nano particle ball array on array of templates; The right survey of figure (a) is the SEM figure of these four kinds of structures corresponding; Fig. 3 (b) is finite element modelling superstructure Au/Ag@Al 2o 3the electric-field intensity of@Ag nanosphere and distribution, wherein, (A) is straightforward face, and (B) is cross section, and the left side of figure (b) is model schematic.
Fig. 4 (a) is finite element modelling superstructure Au/Ag@Al 2o 3the electric-field intensity of@Ag nanosphere under different angle and distribution, the upper left corner is illustraton of model; Fig. 4 (b) is superstructure Au/Ag@Al 2o 3@Ag nanosphere array under different angle, with R6G (10 -7m) the SERS spectrum recorded.
Fig. 5 (a) is with R6G (10 -8m) be molecular detection, at superstructure Au/Ag@Al 2o 3the SERS spectrum that on@Ag nanosphere array, any 12 points record; Fig. 5 (b) is with the 1361cm schemed in a on every bar spectral line -1peak be by force ordinate draw block diagram.
Detailed description of the invention
Embodiment 1: superstructure Au/Ag@Al 2o 3the preparation of@Ag nanosphere array
(1) preparation of nano titania bowl array
Pure titanium sheet is oxidized 1.5 hours in the ammonium fluoride ethylene glycol solution of 0.26M under 50 V oxidation voltages, obtains TiO 2nano-tube array; Then the TiO of generation is removed by sonic oscillation 2nano-tube array, titanium sheet stays more shallow TiO 2nano bowl array, is finally oxidized 40 minutes by the titanium sheet with more shallow nano bowl array in the ammonium fluoride ethylene glycol solution of 0.26M under 10 V oxidation voltages, obtains the TiO of hierarchy 2nano bowl array; As can be seen from Fig. 1 a, the diameter of this nano bowl is about 150nm, and the degree of depth is about 60nm.
(2) preparation of Au/Ag nanosphere array
With the TiO of preparation 2nano bowl array is template, successively ion sputtering Au and Ag two kinds of nano particles, forms Au/Ag nano-particular film (as Fig. 2 b) and covers TiO 2on nano bowl array mould plate; When ion sputtering Au and Ag nano particle, sputtering current used is 15mA, and the time of sputtering Au is 4 minutes, and then sputters Ag nano particle 2 minutes; After having sputtered Au/Ag nano particle, by the TiO with Au/Ag nano-particular film 2the 400 DEG C of annealing 1 hour in nitrogen atmosphere of nano bowl array mould plate, Au/Ag nano-particular film is reunited, and formation diameter is about the Au/Ag alloy nano-sphere of 100 nm.Due to TiO 2the restriction of nano bowl, the Au/Ag alloy nano-sphere of each formation is limited a TiO 2in nano bowl, form large-area ordered Au/Ag alloy nano ball array (as shown in Fig. 2 b and c) according to the array structure of nano bowl.
(3) superstructure Au/Ag@Al 2o 3the preparation of@Ag nanosphere array
Adopt ald (ALD) the technology aluminum oxide dielectric layer (as Fig. 2 e) that coated one deck is ultra-thin in the Au/Ag alloy nano ball array of preparation; By to regulate in ALD process cycle-index can in atomic scale accurate control Al 2o 3medium thickness.In order to by Al 2o 3the THICKNESS CONTROL of dielectric layer is within the scope of 5 nm, and our experimental applications 20 ALD circulations, obtain the Al that about 2 nm are thick 2o 3dielectric layer (as Fig. 2 f).Then, by ion sputtering Ag nano particle, make being distributed in of Ag nano particle disperse be coated with Al 2o 3on the Au/Ag alloy nano-sphere of dielectric layer, obtain superstructure Au/Ag@Al 2o 3@Ag nanosphere array (as Fig. 2 g).Due to Al 2o 3the existence of dielectric layer, by Al between the Ag nano particle of sputtering and Au/Ag alloy nano-sphere 2o 3dielectric layer is separated, the gap (namely SERS strengthens " focus ") (as Fig. 2 h) of the 2nm of formation high density, isotropic distribution.
Embodiment 2: superstructure Au/Ag@Al 2o 3the SERS performance test of@Ag nanosphere array
By choosing the SERS substrate of other three kinds of different structures and kind superstructure Au/Ag@Al 2o 3the SERS performance of@Ag nanosphere array compares, and assesses its SERS performance.The other three kinds of substrates be selected are respectively: TiO 2ion sputtering Au and Ag nano particle on nano bowl array mould plate array, Au/Ag nano particle ball array and on Au/Ag composite Nano ball the Au/Ag Ag nanosphere array of the direct gained of direct ion sputtering Ag nano particle (between the Ag particle in Au/Ag Ag nanosphere and Au/Ag nanosphere, there is no Al 2o 3dielectric layer is separated).During SERS performance test, by this several various substrates 10 -7soak 1 hour in M rhodamine (R6G) solution, after air drying, measure its Raman signal.Be 10 on the left of Fig. 3 a -7m R6G adsorbs measured SERS spectrum on these four kinds of substrates, and the right survey of Fig. 3 a is the SEM figure that this several substrate is corresponding.In test process, all experiment conditions (laser excitation wavelength, laser intensity, the time of integration) are identical.Compose as can be seen from SERS that this several substrate obtains, superstructure Au/Ag@Al 2o 3@Ag nanosphere array shows best SERS performance.We know, SERS performance is relevant with the specific area of substrate; Generally have the SERS substrate of high-ratio surface, the targeted molecular number of absorption is many, and its SERS signal strengthens.But, Au/Ag@Ag nanosphere array and superstructure Au/Ag@Al 2o 3@Ag nanosphere array has suitable specific area, but shows lower SERS performance, so for superstructure Au/Ag@Al 2o 3@Ag nanosphere array, this high SERS performance is mainly owing to 2 nm gaps of substrate middle-high density.Finite element modelling superstructure Au/Ag@Al 2o 3in@Ag, magnetic distribution result also shows: these nano gap places create strong electric-field enhancing, defines highdensity SERS and strengthens " focus ", as shown in Figure 3 b.
In addition, because these 2 nm gaps are isotropic distribution, therefore the SERS of whole superstructure nanosphere is active will not change by the change in incident light direction.For the ease of the foundation of model and SERS test, can fixed laser incident direction constant, by the change regulating the inclination angle of substrate to realize laser incidence angle.Fig. 4 a shows finite element modelling under different laser incidence angle, superstructure Au/Ag@Al 2o 3the situation of@Ag nanosphere magnetic distribution and intensity.Result shows, under different incidence angles, and superstructure Au/Ag@Al 2o 3the maximum field of@Ag nanosphere strengthens constant, and the rule of its distribution is constant.Therefore, judge according to electric-field intensity and distribution, its SERS activity is by constant.In order to verify superstructure Au/Ag@Al 2o 3the SERS performance of@Ag nanosphere array is by the impact of incident angle of light, and the present invention also tested the change of its SERS activity under differing tilt angles.During SERS performance test, by superstructure Au/Ag@Al 2o 3@Ag nanosphere array is 10 -8soak 1 hour in M rhodamine (R6G) solution, after air drying, measure its Raman signal under different angle.Fig. 4 b shows the SERS spectrum under different angle.As can be seen from the figure, the change at inclination angle does not cause the change of SERS activity, and namely superstructure Au/Ag@Al is described 2o 3the SERS performance of@Ag nanosphere array does not affect by the change of incident laser angle.
And, due to superstructure Au/Ag@Al 2o 3@Ag nanosphere is ordered arrangement, so the SERS signal repeatability had.With 10 -8m rhodamine (R6G) is molecular detection, test any 12 points in substrate SERS spectrum (Fig. 5 a), result show its Raman strengthen peak intensity (Fig. 5 a) amplitude effect mean value 5%, the SERS signal had is repeated.
In a word, the superstructure Au/Ag@Al set forth in the present invention 2o 3@Ag nanosphere array will be a kind of high performance practicality SERS substrate.Its design and preparation method can not only realize the gap controllable precise between nano unit, form highdensity SERS and strengthen focus, and its focus is that isotropism is uniformly distributed, its SERS performance is not changed by the angle change of incident light, and SERS signals collecting is reproducible simultaneously.

Claims (2)

1. a superstructure Au/Ag Al 2o 3the preparation method of@Ag nanosphere array, is characterized in that comprising following concrete steps:
(1) preparation of nano titania bowl array
Pure titanium sheet is oxidized 1.5 hours in the ammonium fluoride ethylene glycol solution of 0.26M under 50 V oxidation voltages, obtains TiO 2nano-tube array; Then the TiO of generation is removed by sonic oscillation 2nano-tube array, titanium sheet stays more shallow TiO 2nano bowl array, is finally oxidized 40 minutes by the titanium sheet with more shallow nano bowl array in the ammonium fluoride ethylene glycol solution of 0.26M under 10 V oxidation voltages, obtains the TiO of hierarchy 2nano bowl array;
(2) preparation of Au/Ag nanosphere array
With the TiO of preparation 2nano bowl array is template, successively ion sputtering Au and Ag two kinds of nano particles, forms Au/Ag nano-particular film and covers TiO 2on nano bowl array mould plate; When ion sputtering Au and Ag nano particle, sputtering current used is 15mA, and the time of sputtering Au is 4 minutes, and then sputters Ag nano particle 2 minutes; After having sputtered Au/Ag nano particle, by the TiO with Au/Ag nano-particular film 2the 400 DEG C of annealing 1 hour in nitrogen atmosphere of nano bowl array mould plate, forms Au/Ag nanosphere array;
(3) superstructure Au/Ag@Al 2o 3the preparation of@Ag nanosphere array
Adopt ald (ALD) technology aluminium oxide (Al that coated one deck is ultra-thin in the Au/Ag alloy nano ball array of preparation 2o 3) dielectric layer; By the cycle-index control Al of control ALD 2o 3the thickness of dielectric layer; Adopt ALD to circulate in the present invention 20 times, the Al that 2nm is thick can be obtained 2o 3dielectric layer; Finally, then adopt ion sputtering method being coated with Al 2o 3the Au/Ag nanosphere array of dielectric layer sputters Ag nano particle, and sputtering current used is still 15mA, and sputtering time is 4 minutes, forms superstructure Au/Ag@Al 2o 3@Ag nanosphere array.
2. a superstructure Au/Ag Al as claimed in claim 1 2o 3the SERS performance of@Ag nanosphere array, is characterized in that, described SERS performance test comprises following concrete steps: by choosing the SERS substrate of other three kinds of different structures and kind superstructure Au/Ag@Al 2o 3the SERS performance of@Ag nanosphere array compares, and assesses its SERS performance; The other three kinds of substrates be selected are respectively: TiO 2ion sputtering Au and Ag nano particle on nano bowl array mould plate array, Au/Ag nano particle ball array and the Au/Ag Ag nanosphere array of the direct gained of direct ion sputtering Ag nano particle on Au/Ag composite Nano ball, do not have Al between the Ag particle in Au/Ag Ag nanosphere and Au/Ag nanosphere 2o 3dielectric layer is separated; During SERS performance test, by this several various substrates 10 -7m and 10 -8soak 1 hour in M rhodamine (R6G) solution, after air drying, detect the Raman signal of substrate; In Raman signal measurement, laser Raman spectrometer selects Renishaw Invia Reflex Raman spectrometer, excitation wavelength is 532nm, len 20 selected by light source power 0.1mW, camera lens ×, the time of integration is 10s.
CN201410718678.3A 2014-12-01 2014-12-01 Preparation method for superstructure Au/Ag@Al2O3@Ag nanosphere array and SERS performance of superstructure Au/Ag@Al2O3@Ag nanosphere array Pending CN104707992A (en)

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