CN104697472B - Three-dimensional Rotating Angle Measurement and its device - Google Patents

Three-dimensional Rotating Angle Measurement and its device Download PDF

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CN104697472B
CN104697472B CN201510083944.4A CN201510083944A CN104697472B CN 104697472 B CN104697472 B CN 104697472B CN 201510083944 A CN201510083944 A CN 201510083944A CN 104697472 B CN104697472 B CN 104697472B
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autocollimator
angle
coordinate system
dimensional
measurement
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CN104697472A (en
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杨东来
白建明
胡晓东
于芳苏
赵小东
孙国燕
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The present invention relates to a kind of three-dimensional Rotating Angle Measurement and its device, including a measurement apparatus body being made up of two Two-Axis Autocollimators and a reflection part i.e. cooperative target.During measurement, the first autocollimator in measurement apparatus aims at reflection part normal reflection face, and the bidimensional angle variable quantity in reflection part normal reflection face is measured by optical autocollimating measuring principle;Similarly, the second autocollimator measures the bidimensional angle variable quantity in reflection part oblique reflection face.After the data processing centre of three-dimensional measuring apparatus receives these angle informations, the angle value of three-dimensional corner can be calculated according to formula, 3 d pose variable quantity of the testee in space is realized, there is the characteristics of implementation is simple, technology maturation is reliable, installation operation facilitates.

Description

Three-dimensional Rotating Angle Measurement and its device
Technical field
The invention belongs to technical field of electro-optical measurement, is related to one kind and realizes three-dimensional outer corner measurement based on self-collimation measurement technology Method and its device.
Background technology
Object has three degree of freedom in Space Rotating:The angle of pitch, deflection angle and roll angle, the wherein angle of pitch and deflection angle are surveyed Amount can use conventional photo measuring method (such as autocollimator measurement) to obtain, and realize that the high-acruracy survey of roll angle is always One problem in Technology of Precision Measurement field.At present, mainly there are laser interferance method, polarized light measurement to rolling angle measurement both at home and abroad Method and measuring method based on image procossing etc..
Laser interferance method by roll angle change by being converted into optical path difference so as to realize measurement, although laser interferance method can be with Realize that High precision roll angle measures, but premise is the need to ensure that other two dimension angulars (angle of pitch and deflection angle) in measurement process It can not change, otherwise influence whether rolling angle measurement precision.
Polarized light measurement method is to be based on magneto-optic modulation principle, utilizes the linearly polarized light polarization direction detected and analyzer Optical axis included angle calculates roll angle, and the polarizer and analyzer, which need to be in respectively in two units, could complete angle survey Amount.The optical-mechanical system complex designing of polarized light detection method, and measuring apparatus volume it is larger be unfavorable for be arranged on testee on, In the presence of certain application limitation.
Measuring method based on image procossing, it is that cooperative target is installed on testee, by shooting cooperative target Change to realize rolling angle measurement.Although this method is easier to realize, but shoot the imaging sensor used in camera and differentiate Rate is to limit the bottleneck of its measurement accuracy, and measurement accuracy is difficult to improve.
The content of the invention
The present invention is directed to problems of the prior art, there is provided one kind realizes three-dimensional based on self-collimation measurement technology The method of outer corner measurement, the high-acruracy survey to three-dimensional corner can be realized using the present apparatus.
To solve the problems, such as that prior art is present, technical scheme provided by the invention is as follows:
A kind of three-dimensional corner measuring apparatus, it is characterized in that:Including reflection part, the first autocollimator, second certainly Collimator, the reflection part are arranged on testee, and the reflection part includes normal reflection face and oblique reflection face, it is described just Reflecting surface and the angle in oblique reflection face are θ, 5 °≤θ≤20 °, and the angle of first autocollimator and the second autocollimator is also The optical axis of θ, the first autocollimator face normal reflection face and the first autocollimator is vertical with normal reflection face, second autocollimatic The optical axis of straight instrument face oblique reflection face and the second autocollimator is vertical with oblique reflection face.
Above-mentioned first autocollimator and the second autocollimator are Two-Axis Autocollimator or one-dimensional autocollimator,
When for one-dimensional autocollimator when, the quantity of first autocollimator for 2 and it is parallel set, second auto-collimation The quantity of instrument is 2 and parallel setting,
When for Two-Axis Autocollimator when, the quantity of first autocollimator is 1, and the quantity of second autocollimator is 1。
Photoelectric detector in Two-Axis Autocollimator is face array CMOS image sensor or area array CCD, one-dimensional auto-collimation Photoelectric detector in instrument is line array CCD.
Consider the factors such as the measurement accuracy, equipment volume and measurement distance of invention device, θ preferred model in the present invention Enclose for 10 ° ± 2 '.
The method that three-dimensional outer corner measurement is carried out using said apparatus, it is characterized in that:
1) OXYZ coordinate systems, O are established1X1Y1Z1Coordinate system, O2X2Y2Z2Coordinate system, OXYZ are testee measuring coordinate system, O1X1Y1Z1For the first autocollimator measuring coordinate system, O2X2Y2Z2For the second autocollimator measuring coordinate system,
Wherein OXZ, O1X1Z1、O2X2Z2In the horizontal plane, OY axles, O1Y1Axle, O2Y2Axle and horizontal plane, coordinate system Meet right-hand rule, coordinate system OXYZ and coordinate system O1X1Y1Z1Overlap, coordinate system O2X2Y2Z2For coordinate system O1X1Y1Z1Around O1Y1Axle Obtained after rotate counterclockwise θ angles, θ values are the fixed angle of the reflecting surface of reflection part two;
2) the first autocollimator aligns reflecting surface and carries out alignment measurement, draws two measurement angle angle value:α1xWith α 1y, wherein α 1xThe deflection angle β of corner variable quantity, i.e. testee for reflection part around Y-axis;α1yFor the corner change of reflection part about the z axis Amount, the i.e. angle of pitch ω of testee;
3) the second autocollimator carries out alignment measurement to oblique reflection face, draws two measurement angle angle value:α2xWith α 2y, wherein α 2xCorner variable quantity for reflection part around Y-axis, with α 1xIt is worth identical;α2yMeasured for the second autocollimator in the second autocollimator Angle variable quantity in measuring coordinate system Y-axis, it contains two kinds of angle informations:Roll angle component α and α 1yComponent ω;
4) the angle value α 1 according to step 2), 3) measuredy、α2yAnd two reflecting surface fixed angle θ calculate testee Roll angle.
The calculation formula of roll angle is corresponding with specific derivation process, and the roll angle calculation formula in the present invention is:
The present invention has advantages below:
1st, the invention belongs to optical non-contact measurement, three-dimensional outer corner measurement is realized using self-collimation measurement technology, is had The characteristics of implementation is simple, technology maturation is reliable, installation operation facilitates;
2nd, the present invention uses photoelectric detector of the high speed large area array cmos image sensor as autocollimator, Neng Gouman The high accuracy of sufficient corner, real-time response measurement etc. require;
3rd, of the invention solve can be same with other bidimensional corners to the limitation of rolling angle measurement, roll angle in background technology When measure, and necessarily measurement field range in having compared with high measurement accuracy.
Brief description of the drawings
Fig. 1 is the composition schematic diagram (top view) of the present invention;
Fig. 2 is the measuring principle schematic diagram (top view) of the present invention;
Fig. 3 is the coordinate system graph of a relation of three-dimensional outer corner measurement;
Fig. 4 is the position view in measuring coordinate system of unit vector corresponding to reflection part normal.
The label declaration of accompanying drawing 1:
1- testees;2- reflection parts;3- collimated light sources 1;4- three-dimensionals angle-measuring equipment installs carrier;The angle measurement of 5- three-dimensionals fills Put casing;6- faces array CMOS image sensor 1;The autocollimators of 7- first;8- collimated light sources 2;9- faces array CMOS image sensor 2;The autocollimators of 10- second;11- reflection parts normal reflection face;12- reflection parts oblique reflection face;71- the first autocollimator light Road;72- the second autocollimator light paths;61- first returns to picture point 1;91- second returns to picture point.
Embodiment
The present invention measures according to autocollimator Cleaning Principle, and three-dimensional corner measuring apparatus includes one by two two dimensions The measurement apparatus body and a reflection part 2 (i.e. cooperative target) that autocollimator is formed.During measurement, first in measurement apparatus Autocollimator 7 aims at reflection part normal reflection face 11, and reflection part normal reflection face is measured by optical autocollimating measuring principle Bidimensional angle variable quantity;Similarly, the second autocollimator 10 measures the bidimensional angle variable quantity in reflection part oblique reflection face 12. After the data processing centre of three-dimensional measuring apparatus receives these angle informations, the angle of three-dimensional corner can be calculated according to formula Angle value, realize 3 d pose variable quantity of the testee 1 in space.
Embodiments of the present invention are described in detail below in conjunction with the accompanying drawings:
As shown in figure 1, reflection part 2 is arranged on testee 1, three-dimensional measuring apparatus is set up contour with reflection part On position.Measurement apparatus position is adjusted, makes the first autocollimator 7 alignment reflection part normal reflection face 11, the second autocollimator 10 Reflection part oblique reflection face 12 is directed at, while ensures that two autocollimators receive first returns to the return picture point of picture point 61 and second 91 position is substantially in the center of imaging sensor.After possessing above-mentioned condition, you can carry out three-dimensional outer corner measurement.
As shown in Fig. 2 coordinate system OXYZ is systematic survey coordinate system in figure, coordinate system O1X1Y1Z1For the first autocollimator Measuring coordinate system, O2X2Y2Z2For the second autocollimator measuring coordinate system, wherein OXZ, O1X1Z1、O2X2Z2In the horizontal plane, OY Axle, O1Y1Axle, O2Y2Axle and horizontal plane, coordinate system meet right-hand rule.Coordinate system OXYZ and coordinate system O1X1Y1Z1Overlap, Coordinate system O2X2Y2Z2For coordinate system O1X1Y1Z1Around O1Y1Obtained after axle rotate counterclockwise θ angles, θ values are that reflection part two reflects The fixed angle in face.
As shown in figure 3, the unit vector I1 in measuring coordinate system OXYZ corresponds to the normal vector in reflection part normal reflection face, Unit vector I2 corresponds to the normal vector in reflection part oblique reflection face, and it is normal reflection face normal that I1 and I2, which have fixed angle a θ, θ, With the angle between the normal of oblique reflection face.Vectorial I1 coordinates are set in measuring coordinate system OXYZ as (1,0,0)T, vectorial I2 coordinates For (cos, 0 ,-sin θ)T, vectorial I1, I2 change are consistent with normal N 1, N2 change, that is, correspond to the positive and negative of reflection part Penetrate the change of the three-dimensional corner in face and oblique reflection face.
After equipment under test rotation alpha, β, ω angle, vectorial I1, I2 are changed into I1 ', I2 ' (in measuring coordinate system OXYZ):
C in formula1、C2、C3For the transformation matrix of coordinates rotated around OX axles, OY axles, OZ axles:
As shown in figure 4, the variable angle amount for defining postrotational vectorial I1 ', I2 ' and plane OXZ is respectively α 1y、α2y, to Measure I1 ', I2 ' and plane X1OY1Variable angle amount be respectively α 1x、α2x.It can be obtained by I1 ', I2 ' coordinate:
Can direct measurement α 1 using the first autocollimatory、α1x, i.e., can be obtained partially according to the first autocollimator measurement result Pivot angle β and angle of pitch ω.
According to vectorial I2 ' coordinates, I2 ' and plane X can be calculated1OZ1Variable angle amount a2:
When α, ω be low-angle (- 20 '~+20 ' in the range of) when, can approximate sin α ≈ α, sin ω ≈ ω, cos ω ≈ 1, Above formula is reduced to:
α2y≈arcsin(ωcosθ+αsinθ)
So as to draw roll angle α calculation formula:

Claims (8)

  1. A kind of 1. three-dimensional corner measuring apparatus, it is characterised in that:Including reflection part, the first autocollimator, the second autocollimator, The reflection part is arranged on testee, and the reflection part includes normal reflection face and oblique reflection face, the normal reflection face Angle with oblique reflection face is θ, and 5 °≤θ≤20 °, the angle of first autocollimator and the second autocollimator is also θ, described The optical axis of first autocollimator face normal reflection face and the first autocollimator is vertical with normal reflection face, and second autocollimator is just It is vertical with oblique reflection face to the optical axis in oblique reflection face and the second autocollimator.
  2. 2. three-dimensional corner measuring apparatus according to claim 1, it is characterised in that:First autocollimator and second is certainly Collimator is Two-Axis Autocollimator or one-dimensional autocollimator,
    When for one-dimensional autocollimator when, the quantity of first autocollimator for 2 and it is parallel set, second autocollimator Quantity for 2 and it is parallel set,
    When for Two-Axis Autocollimator when, the quantity of first autocollimator is 1.
  3. 3. three-dimensional corner measuring apparatus according to claim 2, it is characterised in that:Photodetection in Two-Axis Autocollimator Device is face array CMOS image sensor or area array CCD, and the photoelectric detector in one-dimensional autocollimator is line array CCD.
  4. 4. the three-dimensional corner measuring apparatus according to one of claims 1 to 3, it is characterised in that:10°≤θ≤20°.
  5. 5. three-dimensional corner measuring apparatus according to claim 4, it is characterised in that:θ=10 ° ± 2 '.
  6. 6. three-dimensional corner measuring apparatus according to claim 5, it is characterised in that:The optical axis of first autocollimator with Normal reflection face normal angle, the first autocollimator optical axis and oblique reflection face normal angle error are in the range of ± 2 '.
  7. 7. the method for three-dimensional outer corner measurement is carried out according to one of claim 1 to 6 described device, it is characterised in that:
    1) OXYZ coordinate systems, O are established1X1Y1Z1Coordinate system, O2X2Y2Z2Coordinate system, OXYZ are testee measuring coordinate system, O1X1Y1Z1For the first autocollimator measuring coordinate system, O2X2Y2Z2For the second autocollimator measuring coordinate system,
    Wherein OXZ, O1X1Z1、O2X2Z2In the horizontal plane, OY axles, O1Y1Axle, O2Y2Axle and horizontal plane, coordinate system meet the right side Gimmick then, coordinate system OXYZ and coordinate system O1X1Y1Z1Overlap, coordinate system O2X2Y2Z2For coordinate system O1X1Y1Z1Around O1Y1Axle is counterclockwise Obtained after rotation θ angles, θ values are the fixed angle of the reflecting surface of reflection part two;
    2) the first autocollimator aligns reflecting surface and carries out alignment measurement, draws two measurement angle angle value:α1xWith α 1y, wherein α 1xFor Deflection angle β of the reflection part around the corner variable quantity, i.e. testee of Y-axis;α1yFor the corner variable quantity of reflection part about the z axis, That is the angle of pitch ω of testee;
    3) the second autocollimator carries out alignment measurement to oblique reflection face, draws two measurement angle angle value:α2xWith α 2y, wherein α 2xFor Reflection part around Y-axis corner variable quantity, with α 1xIt is worth identical;α2yMeasure for the second autocollimator and measured in the second autocollimator Angle variable quantity in coordinate system Y-axis, it contains two kinds of angle informations:Roll angle component α and α 1yComponent ω;
    4) the angle value α 1 according to step 2), 3) measuredy、α2yAnd two reflecting surface fixed angle θ calculate the rolling of testee Angle.
  8. 8. the method for three-dimensional outer corner measurement according to claim 7, it is characterised in that:The calculation formula of roll angle is:
    <mrow> <mi>&amp;alpha;</mi> <mo>=</mo> <mfrac> <mrow> <mi>s</mi> <mi>i</mi> <mi>n</mi> <mi>&amp;alpha;</mi> <msub> <mn>2</mn> <mi>y</mi> </msub> <mo>-</mo> <mi>&amp;alpha;</mi> <msub> <mn>1</mn> <mi>y</mi> </msub> <mo>*</mo> <mi>c</mi> <mi>o</mi> <mi>s</mi> <mi>&amp;theta;</mi> </mrow> <mrow> <mi>sin</mi> <mi>&amp;theta;</mi> </mrow> </mfrac> <mo>.</mo> </mrow>
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CN101023295A (en) * 2004-09-20 2007-08-22 皇家飞利浦电子股份有限公司 Led collimator element with a semiparabolic reflector

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