CN104679499A - IC equipment human-computer interaction interface customizable data displaying method - Google Patents
IC equipment human-computer interaction interface customizable data displaying method Download PDFInfo
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- CN104679499A CN104679499A CN201310638665.0A CN201310638665A CN104679499A CN 104679499 A CN104679499 A CN 104679499A CN 201310638665 A CN201310638665 A CN 201310638665A CN 104679499 A CN104679499 A CN 104679499A
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Abstract
The invention relates to an IC equipment human-computer interaction interface customizable data displaying method which includes the following steps: configuring IC equipment parameters for XML and storing the parameters; loading and analyzing an XML configuration file on the IC equipment human-computer interaction interface and creating a control according to the IC equipment parameters; displaying data transmitted by the equipment end in real time and transmitting a control command to the equipment data by the IC equipment human-computer interaction interface. By means of the method, management is facilitated, unified management of data of different classes can be achieved at the software equipment end on the IC equipment human-computer interaction interface, secondary development cost of software is reduced, and expandability, maintainability and operability of the software are improved.
Description
Technical field
The present invention discloses a kind of IC and equips human-computer interaction interface customizable data display packing, and the present invention mainly provides the method for designing of equipping human-computer interaction interface user's logarithm different demands according to the show for IC.
Background technology
Current domestic semiconductor factory investment is towards 12 inch wafer future developments, and its wafer production operation is day by day complicated, and parameter kind required in processing process also gets more and more.How combining efficiently, arranging and demonstrating these parameters becomes IC and equips a technical matters in human-computer interaction interface software development.
Existing IC equipment software is mostly for the human-computer interaction interface that the exploitation of single type adapts.But when changing in the face of different types of machines or user's request, problem wherein just can embody.This human-computer interaction interface being only applicable to single type cannot carry out flexible configuration according to the demand of user, often needs designer to modify to program, adds development and maintenance cost.
Summary of the invention
For the problems referred to above, the invention provides a kind of IC and equip human-computer interaction interface customizable data display packing, to adapt to human-computer interaction interface towards requirement during different types of machines.
For achieving the above object, the technical solution used in the present invention is: a kind of IC equips human-computer interaction interface customizable data display packing, comprises the following steps:
In XML configuration file, configure IC equip parameter and preserve; IC equips human-computer interaction interface and loads and analyzing XML configuration file, equips parameter create control according to IC; The Data Concurrent that the real-time display device end of IC equipment human-computer interaction interface is sent send control command to equipment end.
Described IC equips parameter and comprises wafer processing reaction chamber temperature and pressure, reacting gas and volume thereof, processing formula title, fills a prescription working time, creates control command code.
Described data comprise currency and the setting value that described IC equipment parameter comprises wafer processing reaction chamber temperature and pressure, the currency of reacting gas volume and setting value, data layout.
Describedly equip parameter according to IC and create control and be specially IC and equip human-computer interaction interface and determine whether to create button control according to the establishment control command code in parameter and be presented at IC and equip on human-computer interaction interface.
The Data Concurrent that described IC equipment human-computer interaction interface real-time display device end is sent send control command to comprise the following steps to equipment end: IC equips the data that the real-time display device end of human-computer interaction interface is sent, and by button click control, control command is sent to equipment end.
The present invention has following beneficial effect and advantage:
1. the present invention makes system can need to customize according to user.
2. the invention provides edit methods IC being equipped to human-computer interaction interface data, parameter information stores with the form of xml file, and user can by reading to the editor of profile parameters display information and configure.
3. management is convenient in the present invention, and the present invention can realize the unified management of IC being equipped to the different classes of data of human-computer interaction interface software equipment end.
4. the present invention can reduce the secondary development cost of software, improves the extensibility of software, maintainable and ease for operation.
Accompanying drawing explanation
Fig. 1 is method flow diagram of the present invention;
Fig. 2 is configuration file operational flowchart;
Fig. 3 is configuration data operational flowchart.
Embodiment
Below in conjunction with embodiment, the present invention is described in further detail.
The mode of utilization to XML file operation, storage realizes the configuration to the display of human-computer interaction interface data.First XML configuration file template is imported (for configuring the XML file of collected data, wherein according to configuration convention in the past, listed some frequently-used datas, handled easily person uses), with the form of dendrogram, the content of the collected data of equipment end and form are edited.Import to after editting in XML configuration file template.Restart facility, prepares data when device initialize according to the content in XML configuration file, and when IC equipment human-computer interaction interface software sends request of data to equipment, equipment equips human-computer interaction interface software return data to IC.
Described IC equips human-computer interaction interface customizable data display packing, comprises the following steps:
Step 1, what in configuration file, configure customer demand equips at IC parameter human-computer interaction interface software needing show.
Step 2, is saved in configuration file by the parameter configured.
Step 3, restarts software, loading parameters configuration file.
Step 4, equipment end is equipped human-computer interaction interface software to IC and is sent data.
Step 5, creates according to return data and specifies control and associative operation.
In described step 1, what in configuration file, configure customer demand equips at IC parameter human-computer interaction interface software needing show.These parameters comprise equipment end and arrange the parameter (such as reaction chamber temperature, reaction chamber pressure) seldom changed, the parameter of equipment end change (reacting gas and volume thereof, processing formula title, formula working time) and establishment control command code etc.
XML configuration file form is as follows:
< node one >
< node two >
< node three parameter parameter one currency IO parameter one setting value IO parameter one data format parameter one default value creates control command code one ></ node three >
< node three parameter two parameter two currency IO parameter two setting value IO parameter two data format parameter two default values create control command code two ></ node three >
</ node two >
</ node one >
Wherein IO is input/output variable (INPUT/OUTPUT), and pre-set parameter is read by the IO of pre-set parameter come from PM module (technical module), TM module (transport module).
In described step 2, the parameter configured is saved in configuration file.After data configuration in described step 1 terminates, all parameters set are kept in XML configuration file.
In described step 3, restart software, loading parameters configuration file.After XML configuration file in described step 2 has configured, restart software, equipment can load this XML configuration file automatically, make wherein arrange effectively.
In described step 4, equipment end is equipped human-computer interaction interface software to IC and is sent data.In described step 3, equipment end is by after DSR, equipment can be equipped human-computer interaction interface software to IC and send reaction chamber temperature, pressure, reacting gas and the data such as volume, processing formula title, working time of filling a prescription, establishment control command code thereof, data ID is parameter name, and attribute comprises pre-set parameter IO, parameter currency IO, parameter format, parameter default, creates control command code.
In described step 5, create and specify control.In described step 4, IC equips the transmission reaction chamber temperature that human-computer interaction interface receiving equipment end sends, pressure, reacting gas, the data such as processing formula title, working time of filling a prescription, establishment control command code, data ID is parameter name, and attribute comprises pre-set parameter IO, parameter currency IO, parameter format, parameter default, creates control command code; Create the text box adapted, the controls such as button according to the establishment control command code (set 1 as creating, 0 is do not create) in data content, if equipment end fails to send data, or IC equipment human-computer interaction interface software fails to receive data, then show default value.In described step 5, carry out associative operation.Create text box, after the controls such as button, give the corresponding button by button event, can associative operation be completed, such as, control command is sent to equipment end.
As shown in Figure 1, general flow workflow graph is as follows:
1, configuration IC equips the parameter (such as reaction chamber temperature, reaction chamber pressure) that other interactive interface software needs display, the parameter of equipment end change (reacting gas and volume thereof, processing formula title, formula working time) and establishment control command code etc.
2, the parameter configured is saved in configuration file.
3, restart software, loading configuration file.
4, IC equips human-computer interaction interface and determines whether to create button control according to the establishment control command code in parameter and be presented on IC equipment human-computer interaction interface.
5, equipment end is equipped human-computer interaction interface software to IC and is sent data (currency of such as reaction chamber temperature and pressure, setting value etc.).
As shown in Figure 2: configuration file operating process workflow graph is as follows:
1, import XML configuration file template, determine the parameter and the parameter information (title of parameter, currency, setting value, the currency of reacting gas volume and setting value, the information such as data layout) that need display.
2, by using XML file operative technique and windows graphical operation technology, XML file content is configured with dendrogram form.
3, by the operation to dendrogram, complete the configuration to parameter and parameter information.
4, the content of configuration is saved in XML template file.
As shown in Figure 3: configuration data operating process workflow graph is as follows.
1, launch the node of certain the class data in dendrogram, start editing data.
2, choose data.
3, the ID(such as parameter name of editing data), the information such as attribute (sensor information of wafer processing reaction chamber, data layout, establishment control command code).
Claims (5)
1. IC equips a human-computer interaction interface customizable data display packing, it is characterized in that comprising the following steps:
In XML configuration file, configure IC equip parameter and preserve; IC equips human-computer interaction interface and loads and analyzing XML configuration file, equips parameter create control according to IC; The Data Concurrent that the real-time display device end of IC equipment human-computer interaction interface is sent send control command to equipment end.
2. a kind of IC according to claim 1 equips human-computer interaction interface customizable data display packing, it is characterized in that: described IC equips parameter and comprises wafer processing reaction chamber temperature and pressure, reacting gas and volume thereof, processing formula title, fill a prescription working time, create control command code.
3. a kind of IC according to claim 1 equips human-computer interaction interface customizable data display packing, it is characterized in that: described data comprise currency and the setting value that described IC equipment parameter comprises wafer processing reaction chamber temperature and pressure, the currency of reacting gas volume and setting value, data layout.
4. a kind of IC according to claim 1 equips human-computer interaction interface customizable data display packing, it is characterized in that: describedly equip parameter according to IC and create control and be specially IC and equip human-computer interaction interface and determine whether to create button control according to the establishment control command code in parameter and be presented at IC and equip on human-computer interaction interface.
5. a kind of IC according to claim 1 equips human-computer interaction interface customizable data display packing, it is characterized in that: the Data Concurrent that described IC equipment human-computer interaction interface real-time display device end is sent send control command to comprise the following steps to equipment end: IC equips the data that the real-time display device end of human-computer interaction interface is sent, and by button click control, control command is sent to equipment end.
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| CN201310638665.0A CN104679499A (en) | 2013-11-30 | 2013-11-30 | IC equipment human-computer interaction interface customizable data displaying method |
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| CN107918312A (en) * | 2016-10-06 | 2018-04-17 | 矢崎总业株式会社 | Customize IC |
| CN110020298A (en) * | 2017-10-27 | 2019-07-16 | 北京国双科技有限公司 | Parameter display method and apparatus |
| CN111385319A (en) * | 2018-12-27 | 2020-07-07 | 北京金风科创风电设备有限公司 | Parameter downloading method and device of wind generating set and storage medium |
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Application publication date: 20150603 |