CN104678121A - APM belt speed real-time monitoring device and method - Google Patents
APM belt speed real-time monitoring device and method Download PDFInfo
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- CN104678121A CN104678121A CN201310641632.1A CN201310641632A CN104678121A CN 104678121 A CN104678121 A CN 104678121A CN 201310641632 A CN201310641632 A CN 201310641632A CN 104678121 A CN104678121 A CN 104678121A
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- belt
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- roller
- apm
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Abstract
The invention discloses an APM belt speed real-time monitoring device. The device mainly comprises a metal roller, wherein the metal roller is installed below a belt and directly contacts with the belt, and the length of a contact surface is more than 2cm. The invention also discloses a method based on the device for monitoring the speed of an APM belt in real time. The roller is additionally installed below the belt and forms a reverse synchronous movement system together with the belt, the speed of the belt is monitored by utilizing the rotation speed of the roller, the problem of multiple conversion and driving a large scale by virtue of a small scale can be avoided, and the real-time and effective monitoring of the APM belt speed can be realized.
Description
Technical field
The present invention relates to IC manufacturing field, under particularly relating to track-type work pattern, the real time monitoring apparatus of crawler track speeds and method.
Background technology
APM(track-type work pattern) principle of work as shown in Figure 1, motor high-speed rotation, drives wheel box by rotating shaft, and wheel box is converted into the speed of process requirements the speed of motor, then by gear driven crawler belt (belt) running.
Under this work pattern, the speed of belt is monitored by the rotating speed of monitoring motor, and namely giving tacit consent to motor rotary speed is exactly belt speed.The shortcoming of this method for supervising is: 1) after multiple conversion, motor speed effectively can not represent belt speed; 2) large with small band, wheel box is driven by rotating shaft, and rotating shaft is due to long term wear, be easy to occur skidding, when rotating shaft is skidded, motor speed is constant, but the speed finally passing to belt is slack-off, cause belt speed abnormal and machine detection less than problem, thus directly have influence on the thickness of film forming.
Summary of the invention
One of the technical problem to be solved in the present invention is to provide a kind of APM belt speed real time monitoring apparatus, and it can monitor belt speed in real time effectively.
For solving the problems of the technologies described above, APM belt speed real time monitoring apparatus of the present invention, comprise Metal Contact Rollers, be arranged on below belt, and directly contact with belt, surface of contact length is more than 2 centimetres.
Two of the technical problem to be solved in the present invention is to provide the method monitoring APM belt speed with said apparatus in real time.
For solving the problems of the technologies described above, APM belt speed method for real-time monitoring of the present invention, step comprises:
1) Metal Contact Rollers is installed below belt directly to contact with belt;
2) belt running, drives roller reverse sync to rotate;
3) monitor the rotating speed of roller, roller rotating speed is converted into belt speed.
The present invention by installing roller additional below belt, forms reverse sync kinematic system with belt, utilizes the rotating speed of roller, monitors the speed of belt, avoids multiple conversion and with the large problem of small band, achieves real-time, the effective monitoring of APM belt speed.
Accompanying drawing explanation
Fig. 1 is the principle of work schematic diagram of existing APM.
Fig. 2 is the principle of work schematic diagram that the present invention monitors APM belt speed in real time.
Fig. 3 is the APM belt speed real time monitoring apparatus structural drawing of the embodiment of the present invention.
Fig. 4 is the back side (A) and front (B) structural drawing of Fig. 3 device.
Embodiment
Understand more specifically for having technology contents of the present invention, feature and effect, now by reference to the accompanying drawings, details are as follows:
The present invention adopts contact roller method to monitor the belt speed of APM in real time, its principle of work as shown in Figure 2, install a Metal Contact Rollers below belt additional and (must metal material be used, to prevent from scalding roller surface), roller directly contacts with belt, and (surface of contact length must more than 2 centimetres, to guarantee that roller is without skidding), and keep certain pressure between roller and belt.
During belt running, belt drive roller is to the direction synchronous axial system contrary with belt, and both form a real-time relative motion system, and belt actual speed passes to roller in real time.Owing to being be with greatly little, roller there will not be wearing and tearing skidding, and the rotating speed of roller can represent the speed of belt, therefore, just can monitor the speed of belt in real time by the rotating speed of monitoring roller.
Below the structure of the APM belt speed real time monitoring apparatus of the embodiment of the present invention is described in further detail.
Refer to shown in Fig. 3-4, this APM belt speed real time monitoring apparatus mainly comprises pedestal, roller and speed counting device etc.
1. pedestal.Pedestal is divided into upper and lower two joints.Lower joint plays installs firm effect, by connecting bend, pedestal is fixed on (firm screw is installed in punching) in the equipment metal frame at open place below belt.Upper joint is made up of two parts, and Part I is made up of irony framework and stage clip, and effect is the elastic force pressure provided by stage clip, makes to be fixed on to connect roller on panel and belt front face and produce reverse sync and move; Part II connects panel, and effect is the speed counting device connecting pedestal and roller and roller.
2. roller.Roller to be a diameter the be roller bearing of 10 centimetres, the material of roller bearing conforms to belt material, is iron-nickel alloy.Roller is fixed on pedestal by connecting panel, and is that downward-sloping miter angle contacts with the belt of horizontal level, as shown in Fig. 4 (B), produces reverse sync motion to make roller.
3. speed counting device.Speed counting device is fixed on pedestal by connecting panel.There is a disk speed counting device outside, and disk border is designed with breach, and this disk is connected with roller by belt, and realization is synchronized with the movement with roller; Speed counting device is built-in with speed calculation module, for disk rotational speed is converted into belt speed.The principle of work of speed counting device is: roller rotates, drive the disk rotational of speed counting device, laser emitting source and reception source is had before and after disk border, the light of laser counts disk rotational one circle by circular tray designs breach, and disk rotational speed is converted into the speed (unit is inch/min) of belt by the built-in speed calculation module of speed counting device.
Claims (6)
1.APM belt speed real time monitoring apparatus, is characterized in that, comprise Metal Contact Rollers, be arranged on below belt, and directly contact with belt, surface of contact length is more than 2 centimetres.
2. device according to claim 1, it is characterized in that, also comprise pedestal, be arranged on below belt, described pedestal comprises framework, stage clip and connection panel, described framework and stage clip are used for suppressing roller and belt front face and produce reverse sync and move, and described connection panel is for being connected to pedestal by roller.
3. device according to claim 1 and 2, is characterized in that, also comprises speed counting device, described speed counting device is with a disk, disk border is designed with breach, is provided with laser emitting source and reception source before and after disk border, and this disk to be connected with roller by another belt and to be synchronized with the movement; Described speed counting device is also built-in with speed calculation module, for disk rotational speed is converted into belt speed.
4. device according to claim 1 and 2, is characterized in that, described roller and belt are that miter angle contacts.
5. device according to claim 3, is characterized in that, described roller and belt are that miter angle contacts.
6.APM belt speed method for real-time monitoring, it is characterized in that, step comprises:
1) Metal Contact Rollers is installed below belt directly to contact with belt;
2) belt running, drives roller reverse sync to rotate;
3) monitor the rotating speed of roller, roller rotating speed is converted into belt speed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310641632.1A CN104678121A (en) | 2013-12-03 | 2013-12-03 | APM belt speed real-time monitoring device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310641632.1A CN104678121A (en) | 2013-12-03 | 2013-12-03 | APM belt speed real-time monitoring device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104678121A true CN104678121A (en) | 2015-06-03 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310641632.1A Pending CN104678121A (en) | 2013-12-03 | 2013-12-03 | APM belt speed real-time monitoring device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104678121A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106153971A (en) * | 2016-06-17 | 2016-11-23 | 安庆市虹泰新材料有限责任公司 | A kind of belt line speed speed measuring device |
| CN111596089A (en) * | 2020-04-22 | 2020-08-28 | 安徽楚江科技新材料股份有限公司 | High-precision speed measuring device for LED copper strip |
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| CA2053436A1 (en) * | 1990-10-29 | 1992-04-30 | Robert D. Braun | Method and apparatus for determining relative contributions of individual cylinders of internal combustion engine using contact tachometer |
| CN2821575Y (en) * | 2005-09-30 | 2006-09-27 | 营口大和衡器有限公司 | Velometer |
| CN2852135Y (en) * | 2005-11-01 | 2006-12-27 | 甘肃省机械科学研究院 | Belt velocity measurer |
| CN201145699Y (en) * | 2007-12-27 | 2008-11-05 | 宝山钢铁股份有限公司 | Dismountable type band steel speed measuring apparatus |
| CN201548549U (en) * | 2009-09-14 | 2010-08-11 | 山西省烟草公司阳泉市公司 | Speed measuring wheel of cigarette carton coding machine |
| CN203275429U (en) * | 2013-06-08 | 2013-11-06 | 上海鼎经自动化科技有限公司 | Elastic friction velocity measurement mechanism |
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2013
- 2013-12-03 CN CN201310641632.1A patent/CN104678121A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2053436A1 (en) * | 1990-10-29 | 1992-04-30 | Robert D. Braun | Method and apparatus for determining relative contributions of individual cylinders of internal combustion engine using contact tachometer |
| CN2821575Y (en) * | 2005-09-30 | 2006-09-27 | 营口大和衡器有限公司 | Velometer |
| CN2852135Y (en) * | 2005-11-01 | 2006-12-27 | 甘肃省机械科学研究院 | Belt velocity measurer |
| CN201145699Y (en) * | 2007-12-27 | 2008-11-05 | 宝山钢铁股份有限公司 | Dismountable type band steel speed measuring apparatus |
| CN201548549U (en) * | 2009-09-14 | 2010-08-11 | 山西省烟草公司阳泉市公司 | Speed measuring wheel of cigarette carton coding machine |
| CN203275429U (en) * | 2013-06-08 | 2013-11-06 | 上海鼎经自动化科技有限公司 | Elastic friction velocity measurement mechanism |
Non-Patent Citations (2)
| Title |
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| 本溪钢铁学校: "《机构及机械零件》", 30 June 1965 * |
| 王炳元: "《核探测微机称重技术应用》", 31 December 1996 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106153971A (en) * | 2016-06-17 | 2016-11-23 | 安庆市虹泰新材料有限责任公司 | A kind of belt line speed speed measuring device |
| CN111596089A (en) * | 2020-04-22 | 2020-08-28 | 安徽楚江科技新材料股份有限公司 | High-precision speed measuring device for LED copper strip |
| CN111596089B (en) * | 2020-04-22 | 2022-04-12 | 安徽楚江高精铜带有限公司 | High-precision speed measuring device for LED copper strip |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150603 |
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| RJ01 | Rejection of invention patent application after publication |