CN104659013A - Electric fuse structure and semiconductor device - Google Patents
Electric fuse structure and semiconductor device Download PDFInfo
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- CN104659013A CN104659013A CN201310582628.2A CN201310582628A CN104659013A CN 104659013 A CN104659013 A CN 104659013A CN 201310582628 A CN201310582628 A CN 201310582628A CN 104659013 A CN104659013 A CN 104659013A
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Abstract
The invention discloses an electric fuse structure and a semiconductor device. The electric fuse structure comprises a substrate, an electric fuse, and a heating structure, wherein the electric fuse is located on the substrate; the electric fuse comprises a fuse, and an anode and a cathode located at two ends of the fuse respectively and connected with the fuse; and the heating structure is located on the substrate, electrically isolated from the electric fuse by a dielectric layer, and is used for transferring generated heat to the electric fuse. The problem that the prior electric fuse has large fusing current can be solved.
Description
Technical field
The present invention relates to technical field of semiconductors, particularly relate to a kind of electric fuse structure, and a kind of semiconductor device comprising this electric fuse structure.
Background technology
Fuse-wires structure conventional is at present generally two kinds: laser fuse (laser fuse) and electric fuse (electricfuse is called for short E-fuse).Laser fuse utilizes laser beam to cut fuse, and electric fuse utilizes big current by fuse failure.Along with the development of semiconductor technology, electric fuse instead of laser fuse gradually.Electric fuse is divided into the several types such as metal electric fuse, polysilicon electric fuse, metal silicide electric fuse.
As shown in Figure 1, existing a kind of electric fuse 1 comprises: fuse 10; Lay respectively at fuse 10 two ends and the anode 11 be connected with fuse 10 and negative electrode 12.Electric fuse 1 synchronously can be formed with the interconnection line in metal interconnect structure.
The fusing mechanism of electric fuse 1 is as follows: shown in composition graphs 2, the negative electrode of electric fuse 1 12 and be applied in voltage VP as the drain electrode electric connection of the transistor 2 of device for fusing, anode 11, and the grid of transistor 2 is applied in voltage VG, source ground.Under the voltage VP being applied to anode 11 and the acting in conjunction of voltage VG being applied to transistor 2 grid, produce the instant pulse current 3 being flowed to negative electrode 12 by anode 11, instant pulse current 3 size is within the scope of the current values allowing electric fuse fusing, under the effect of instant pulse current 3, fuse 10 can generate heat, and makes the position fusing of being heated maximum in fuse 10.The fusing position of definition fuse 10 is the fuse area of electric fuse 1.
But above-mentioned existing electric fuse has the following disadvantages: 1) blowout current of electric fuse is larger; 2) owing to providing the device for fusing of blowout current there is unsteadiness to electric fuse, there is fluctuation in the blowout current that device for fusing can be made to provide to electric fuse, causes fuse to be fused, and then cause electric fuse to work.
Summary of the invention
The problem to be solved in the present invention is: the blowout current of existing electric fuse is larger.
Another problem that the present invention will solve is: because providing the device for fusing of blowout current to there is unsteadiness to electric fuse, causes existing electric fuse possibly cannot be fused.
For solving the problem, the invention provides a kind of electric fuse structure, comprising:
Substrate;
Be positioned at the electric fuse on described substrate, described electric fuse comprises: fuse; Lay respectively at described fuse two ends and the anode be connected with described fuse and negative electrode;
By the heating arrangement of dielectric layer electric isolution on described substrate and between described electric fuse, described heating arrangement is used for the heat of generation to be passed to described electric fuse.
Optionally, the material of described electric fuse is metal.
Optionally, the material of described heating arrangement is metal.
Optionally, described metal is copper or aluminium.
Optionally, described heating arrangement comprises: be positioned at the first heating unit above or below described electric fuse.
Optionally, described heating arrangement comprises: be positioned at the second heating unit of same layer with described electric fuse.
Optionally, described heating arrangement comprises:
Be positioned at the first heating unit above or below described electric fuse; And
The second heating unit of same layer is positioned at described electric fuse.
Optionally, between described first heating unit and the second heating unit, by being positioned at the conductive plunger electrical connection of described dielectric layer; Or,
Between described first heating unit and the second heating unit, by described dielectric layer electric isolution.
Optionally, the quantity of described first heating unit is at least two, and two described first heating units lay respectively at above described electric fuse, below.
Optionally, described first heating unit and the projection of fuse in substrate top surface overlapping.
Optionally, described fuse has fuse area, described first heating unit and the projection of fuse area in substrate top surface overlapping.
Optionally, described second heating unit and fuse have right opposite amass.
Optionally, described fuse has fuse area, and described second heating unit and fuse area have right opposite and amass.
Optionally, described second heating unit is as pseudo-pattern.
In addition, present invention also offers a kind of semiconductor device, comprise above-mentioned arbitrary electric fuse structure.
Compared with prior art, technical scheme of the present invention has the following advantages:
Electric fuse structure comprises: electric fuse and the heating arrangement for generation heat being passed to electric fuse.Can heat be produced after passing into electric current in heating arrangement and be passed to electric fuse.Therefore, after electric fuse passes into electric current self produce under heat and heating arrangement pass to the acting in conjunction of the heat of electric fuse, electric fuse can be fused.And electric fuse of the prior art can only after electric fuse passes into electric current self produce the effect of heat under fuse.More known, when the electric fuse fusing identical, to the blowout current that the electric fuse in the technical program passes into, be less than the blowout current passed into electric fuse of the prior art, the electric fuse blowout current in the technical program is reduced.
Accompanying drawing explanation
Fig. 1 is the three-dimensional structure diagram of existing a kind of electric fuse;
Fig. 2 is wherein a kind of fusing schematic diagram of electric fuse shown in Fig. 1;
Fig. 3 is the stereogram of electric fuse structure in the first embodiment of the present invention, does not demonstrate substrate and the dielectric layer between electric fuse and heating arrangement in figure;
Fig. 4 is the vertical view that the edge of electric fuse structure shown in Fig. 3 looks over perpendicular to substrate top surface direction, does not demonstrate substrate and the dielectric layer between electric fuse and heating arrangement in figure;
Fig. 5 is by the profile after turning 90 degrees along AA cross section gained profile dextrorotation in Fig. 4;
Fig. 6 is wherein a kind of fusing schematic diagram of electric fuse structure in one embodiment of the present of invention;
Fig. 7 is that in the second embodiment of the present invention, electric fuse structure, along the vertical view looked over perpendicular to substrate top surface direction, does not demonstrate substrate and the dielectric layer between electric fuse and heating arrangement in figure;
Fig. 8 is the profile along BB cross section in Fig. 7;
Fig. 9 is that in the third embodiment of the present invention, electric fuse structure, along the vertical view looked over perpendicular to substrate top surface direction, does not demonstrate substrate and the dielectric layer between electric fuse and heating arrangement in figure;
Figure 10 is the profile along CC cross section in Fig. 9;
Figure 11 is the vertical view that in electric fuse structure shown in Fig. 9, two the first heating units edges look over perpendicular to substrate top surface direction;
Figure 12 is that in the fourth embodiment of the present invention, electric fuse structure, along the vertical view looked over perpendicular to substrate top surface direction, does not demonstrate substrate and the dielectric layer between electric fuse and heating arrangement in figure;
Figure 13 is the profile along DD cross section in Figure 12;
Figure 14 is the vertical view that in electric fuse structure shown in Figure 12, the first heating unit and the second heating unit edge look over perpendicular to substrate top surface direction;
Figure 15 is that in the fifth embodiment of the present invention, electric fuse structure, along the vertical view looked over perpendicular to substrate top surface direction, does not demonstrate substrate and the dielectric layer between electric fuse and heating arrangement in figure;
Figure 16 is the profile along EE cross section in Figure 15;
Figure 17 is the vertical view that in electric fuse structure shown in Figure 15, two the first heating units edges look over perpendicular to substrate top surface direction;
Figure 18 is that in the sixth embodiment of the present invention, electric fuse structure, along the vertical view looked over perpendicular to substrate top surface direction, does not demonstrate substrate and the dielectric layer between electric fuse and heating arrangement in figure;
Figure 19 is the profile along FF cross section in Figure 18;
Figure 20 is the vertical view that in electric fuse structure shown in Figure 18, two the first heating units edges look over perpendicular to substrate top surface direction;
Figure 21 is the vertical view that in the seventh embodiment of the present invention, electric fuse and the second heating unit edge look over perpendicular to substrate top surface direction;
Figure 22 is the vertical view that in the eighth embodiment of the present invention, electric fuse and the second heating unit edge look over perpendicular to substrate top surface direction.
Embodiment
As previously mentioned, there is the larger problem of blowout current in existing electric fuse.
In order to solve the problem, the invention provides a kind of electric fuse structure of improvement, this electric fuse structure comprises: electric fuse and the heating arrangement for generation heat being passed to electric fuse.Therefore, after electric fuse passes into electric current self produce under heat and heating arrangement pass to the acting in conjunction of the heat of electric fuse, electric fuse can be fused.And electric fuse of the prior art can only after electric fuse passes into electric current self produce the effect of heat under fuse.More known, when the electric fuse fusing identical, to the blowout current that the electric fuse in the technical program passes into, be less than the blowout current passed into electric fuse of the prior art, the electric fuse blowout current in the technical program is reduced.
For enabling above-mentioned purpose of the present invention, feature and advantage more become apparent, and are described in detail specific embodiments of the invention below in conjunction with accompanying drawing.
First embodiment
Shown in composition graphs 3 to Fig. 5, the electric fuse structure of the present embodiment comprises:
Substrate 100.
Be positioned at the electric fuse 200 on substrate 100, electric fuse 200 comprises: fuse 210; Lay respectively at fuse 210 two ends and the anode 220 be connected with fuse 210 and negative electrode 230.
By the heating arrangement 400 of dielectric layer 300 electric isolution on substrate 100 and between electric fuse 200.Heating arrangement 400 comprises: two lay respectively at above electric fuse 200, the first heating unit 410 of below; Two lay respectively at electric fuse 200 relatively both sides and and electric fuse 200 be positioned at the second heating unit 420 of same layer.Be positioned at the two ends of the first heating unit 410 below electric fuse 200 respectively by conductive plunger 500, be electrically connected with two the second heating units 420, the two ends being positioned at the first heating unit 410 above electric fuse 200, also respectively by conductive plunger 500, are electrically connected with two the second heating units 420.Separated by dielectric layer 300 between two the first heating units 410, separated between two the second heating units 420 by dielectric layer 300, the position between the first heating unit 410 and the second heating unit 420 except conductive plunger 500 is separated by dielectric layer 300.
Shown in composition graphs 6, electric current I 1 is passed into, after the input of heating arrangement 400 passes into electric current I 2 in electric fuse 200, on the one hand, electric fuse 200 self can be made under the effect of electric current I 1 to produce heat, on the other hand, the heating arrangement 400 passing into electric current I 2 can produce heat and be passed to electric fuse 200 via dielectric layer 300.Therefore, at electric fuse 200 self produce under heat and heating arrangement 400 pass to the acting in conjunction of the heat of electric fuse 200, electric fuse 200 can be fused.And electric fuse of the prior art can only after electric fuse passes into electric current produce the effect of heat under fuse.More known, when the electric fuse fusing identical, to the blowout current that the electric fuse in the technical program passes into, be less than the blowout current passed into electric fuse of the prior art, the electric fuse blowout current in the technical program is reduced.
In the present embodiment, electric current I 1 can be passed in the following manner: the anode 220 of electric fuse 200 is applied in voltage VP, negative electrode 230 is electrically connected with the drain electrode of the transistor 610 as device for fusing, and the grid of transistor 610 is applied in voltage VG, source ground to electric fuse 200.
In the present embodiment, electric current I 2 can be passed in the following manner: one end of one of them the first heating unit 410 is applied in voltage VP to the input of heating arrangement 400, one end of another the first heating unit 410 is electrically connected with the drain electrode of transistor 620, and the grid of transistor 620 is applied in voltage VG, source ground.
As previously mentioned, owing to providing the device for fusing of blowout current there is unsteadiness to electric fuse, there is fluctuation in the blowout current that device for fusing can be made to provide to electric fuse, causes fuse to be fused, and then cause electric fuse to work.Due to the blowout current passed into the electric fuse in the technical program, be less than the blowout current passed into electric fuse of the prior art, therefore in the technical program adopt device for fusing with in prior art adopt device for fusing stability identical (namely device for fusing provide the fluctuation range of blowout current identical, such as blowout current all about 5% fluctuate) condition under, in the technical program adopt device for fusing the undulating value of blowout current is provided, to be less than in prior art adopt device for fusing the undulating value of blowout current is provided.Therefore, in the technical program, electric fuse cannot by the probability fused, and being less than electric fuse in prior art cannot by the probability fused, and thus in the technical program, the performance of electric fuse improves.
In addition, as the size of the transistor of device for fusing and for providing the size of blowout current proportional.That is, transistor is for providing blowout current larger, then the size of transistor is larger; Transistor is for providing blowout current less, then the size of transistor is less.Due to the blowout current passed into the electric fuse in the technical program, be less than the blowout current passed into electric fuse of the prior art, therefore the size of the transistor of blowout current is provided to electric fuse in the technical program, smaller than providing the size of the transistor of blowout current in prior art to electric fuse, thus can improve the integrated level of integrated circuit.
In the alternative of the present embodiment, also identical or different electric current can be passed into respectively to each heating unit in heating arrangement 400, as long as make each heating unit be passed into electric current to produce heat, in this case, without the need to being electrically connected with conductive plunger between each heating unit.
Continue with reference to Fig. 3 and to shown in 5, from the fusing mechanism of electric fuse 200, the fusing position of electric fuse 200 is arranged in fuse 210 and is heated maximum positions.The fusing position of definition fuse 210 is that the fuse area 211(of electric fuse 200 is represented by dashed line).Generally speaking, when the shape of fuse 210 is comparatively regular, the fuse area 211 of fuse 210 is positioned at the centre position of fuse 210, makes the distance between fuse area 211 and anode 220, no better than the distance between fuse area 211 and negative electrode 230.In actual applications, finite element emulation software can be utilized to measure the particular location of fuse area 211 in electric fuse 200.
In the present embodiment, the projection on the substrate 100 on surface of two the first heating units 410, all overlapping with the projection on the fuse area 211 of fuse 210 on the substrate 100 surface, two the first heating units 410 are all across fuse 210, and the projection on the substrate 100 on surface of two the first heating units 410 is overlapping.Due to the projection on two the first heating units 410 on the substrate 100 surface, all overlapping with the projection on the fuse area 211 of fuse 210 on the substrate 100 surface, make the heat produced by two the first heating units 410 can be passed to the fuse area 211 of fuse 210 more, and then fuse 210 is more easily fused.
In other embodiments, the projection of the first heating unit 410 on the substrate 100 on surface, also can not be overlapping with the projection on the fuse area 211 of fuse 210 on the substrate 100 surface.In addition, the projection on the substrate 100 on surface of two the first heating units 410 also can not be overlapping.In this case, the heat that the first heating unit 410 produces still can be passed to the fuse area 211 of fuse 210, only can be passed to the heat of the fuse area 211 of fuse 210 relatively less.
In the present embodiment, two the second heating units 420 all have right opposite and amass with the fuse area 211 of fuse 210, make the heat produced by two the second heating units 420 can be passed to the fuse area 211 of fuse 210 more, and then fuse 210 is more easily fused.
In other embodiments, the second heating unit 420 also can with the fuse area 211 of fuse 210 do not have right opposite amass.In this case, the heat that the second heating unit 420 produces still can be passed to the fuse area 211 of fuse 210, only can be passed to the heat of the fuse area 211 of fuse 210 relatively less.
In other embodiments, also only can comprise first heating unit 410 in heating arrangement 400, this first heating unit 410 can be positioned at above or below electric fuse 200; Or also only can comprise second heating unit 420 in heating arrangement 400, this second heating unit 420 can be positioned at any side of electric fuse 200; Or, also first heating unit 410 and second heating unit 420 only can be comprised in heating arrangement 400, this first heating unit 410 can be positioned at above or below electric fuse 200, and this second heating unit 420 can be positioned at any side of electric fuse 200.
It should be noted that, in the present invention, electric fuse 200 and heating arrangement 400 all synchronously can be formed with the interconnection line in metal interconnect structure; Conductive plunger 500 synchronously can be formed with the conductive plunger in metal interconnect structure.In a particular embodiment, the material of electric fuse 200 and heating arrangement 400 can be all metal, as copper or aluminium.
In other embodiments, electric fuse 200 also can adopt other to be suitable for the material fused.Heating arrangement 400 can produce the material of heat after other also can be adopted to pass into electric current.
When electric fuse 200 and heating arrangement 400 and the interconnection line in metal interconnect structure are synchronously formed, the second heating unit 420 in heating arrangement 400 is passed to except the heat effect of electric fuse 200 except possessing to produce, also there is following effect: with faking pattern, to reduce because of the circuit layout density of electric fuse structure region, the harmful effect that brings with the circuit layout density inconsistency of metal interconnect structure.
From the above, because the electric fuse 200 in the technical program, heating arrangement 400 and conductive plunger 500 all synchronously can be formed, thus without the need to increasing extra manufacture craft with metal interconnect structure.
In the present embodiment, substrate 100 is formed with device (not shown), as elements such as transistor, electric capacity, resistance.Dielectric layer 300 can be the lamination of one deck dielectric layer or multilayer dielectricity layer.In a particular embodiment, dielectric layer 300 can be the dielectric materials such as silica, silicon nitride, silicon oxynitride.
In the present embodiment, fuse 210, first heating unit 410 and the second heating unit 420 all linearly.First heating unit 410 is perpendicular to fuse 210, and the second heating unit 420 is parallel to fuse 210.
In other embodiments, the second heating unit 420 also can be not parallel with fuse 210.In this case, the heat that the second heating unit 420 produces still can be passed to the fuse area 211 of fuse 210, only can be passed to the heat of the fuse area 211 of fuse 210 relatively less.
Second embodiment
Difference between second embodiment and the first embodiment is: in a second embodiment, shown in composition graphs 7 and Fig. 8, in heating arrangement 400, the quantity of the first heating unit is three, be respectively, be positioned at first heating unit 411 below electric fuse 200, be positioned at two spaced first heating units 412 above electric fuse 200.
Wherein, the projection of the first heating unit 411 on the substrate 100 on surface, overlapping with the projection on the fuse area 211 of fuse 210 on the substrate 100 surface, and the first heating unit 411 is across fuse 210; First heating unit 411, by conductive plunger 500, is electrically connected with the second heating unit 421, second heating unit 422.Be arranged in two the first heating units 412 above electric fuse 200, one of them first heating unit 412 is electrically connected with the second heating unit 421 by conductive plunger 500, another first heating unit 412 is electrically connected with the second heating unit 422 by conductive plunger 500, and the bearing of trend of two the first heating units 412 is all across fuse 210.
In the technical scheme of the present embodiment, shown in composition graphs 6, the mode passing into electric current I 1 to electric fuse 200 with reference to the first embodiment, can not repeat them here.Electric current I 2 can be passed in the following manner: be arranged in two the first heating units 412 above electric fuse 200 to the input of heating arrangement 400, one of them first heating unit 412 is applied in voltage VP, another first heating unit 412 is electrically connected with the drain electrode of transistor 620, and the grid of transistor 620 is applied in voltage VG, source ground.
As the alternative of the present embodiment, also can by the position of two the first heating units 412 be positioned at above electric fuse 200, exchange with the position of first heating unit 411 be positioned at below electric fuse 200.In this case, passing into the mode of electric current I 2 to heating arrangement 400 can be constant.
3rd embodiment
Difference between 3rd embodiment and the first embodiment is: in the third embodiment, shown in composition graphs 9 to Figure 11, the first heating unit 413 be positioned at below electric fuse 200 comprises: head and the tail connect successively, and linearly heating part 4131, heating part 4132, heating part 4133, heating part 4134 and heating part 4135, wherein, heating part 4133, heating part 4131, heating part 4135 is parallel to each other, and heating part 4131 and heating part 4135 are positioned on straight line, heating part 4132 and heating part 4131 are mutually 90 degree, heating part 4134 and heating part 4135 are mutually 90 degree.
The first heating unit 414 shape be positioned at above electric fuse 200 is identical with the first heating unit 413.First heating unit 414 comprises: head and the tail connect and linearly heating part 4141, heating part 4142, heating part 4143, heating part 4144 and heating part 4145 successively, wherein, heating part 4143, heating part 4141, heating part 4145 are parallel to each other, and heating part 4141 and heating part 4145 are positioned on straight line, heating part 4142 and heating part 4141 are mutually 90 degree, and heating part 4144 and heating part 4145 are mutually 90 degree.
The projection on the substrate 100 on surface of the heating part 4142 of heating part 4132, first heating unit 414 of the first heating unit 413, all overlapping with the projection on the second heating unit 423 on the substrate 100 surface, and heating part 4132 and heating part 4142 are all electrically connected with the second heating unit 423 by conductive plunger 500.
The projection on the substrate 100 on surface of the heating part 4144 of heating part 4134, first heating unit 414 of the first heating unit 413, all overlapping with the projection on the second heating unit 424 on the substrate 100 surface, and heating part 4134 and heating part 4144 are all electrically connected with the second heating unit 424 by conductive plunger 500.
The heating part 4143 of heating part 4133, first heating unit 414 of the first heating unit 413, projection on the substrate 100 on surface is overlapping, and overlapping with the projection on the fuse area 211 of fuse 210 on the substrate 100 surface, and heating part 4133 and heating part 4143 are across fuse 210.
It should be noted that, although separate with dotted line between adjacent two heating parts of the first heating unit 413 and adjacent two heating parts of the second heating unit 414 in Figure 11, in fact adjacent two heating parts of the first heating unit 413 and the second heating unit 414 are all one-body molded.
In the technical scheme of the present embodiment, pass into the mode of electric current to electric fuse 200 and all with reference to the first embodiment, can not repeat them here to the mode that heating arrangement 400 passes into electric current.
4th embodiment
Difference between 4th embodiment and the first embodiment is: in the fourth embodiment, in conjunction with shown in Figure 12 to Figure 14, the first heating unit 415 be positioned at below electric fuse 200 comprises: head and the tail connect and linearly heating part 4151, heating part 4152, heating part 4153, heating part 4154 and heating part 4155 successively, wherein, heating part 4153, heating part 4151, heating part 4155 are parallel to each other, and heating part 4151, heating part 4155 lay respectively at the relative both sides of heating part 4153; Heating part 4152 and heating part 4151 are mutually 90 degree, and heating part 4154 and heating part 4155 are mutually 90 degree, and heating part 4152, heating part 4154 lay respectively at the relative both sides of heating part 4153.
The first heating unit 416 shape be positioned at above electric fuse 200 is identical with the first heating unit 415.First heating unit 416 comprises: head and the tail connect and linearly heating part 4161, heating part 4162, heating part 4163, heating part 4164 and heating part 4165 successively, wherein, heating part 4163, heating part 4161, heating part 4165 are parallel to each other, and heating part 4161, heating part 4165 lay respectively at the relative both sides of heating part 4163; Heating part 4162 and heating part 4161 are mutually 90 degree, and heating part 4164 and heating part 4165 are mutually 90 degree, and heating part 4162, heating part 4164 lay respectively at the relative both sides of heating part 4163.
Wherein, the projection on the substrate 100 on surface of the heating part 4162 of heating part 4152, first heating unit 416 of the first heating unit 415, all overlapping with the projection on the second heating unit 425 on the substrate 100 surface, and heating part 4152 and heating part 4162 are all electrically connected with the second heating unit 425 by conductive plunger 500.
The projection on the substrate 100 on surface of the heating part 4164 of heating part 4154, first heating unit 416 of the first heating unit 415, all overlapping with the projection on the second heating unit 426 on the substrate 100 surface, and heating part 4154 and heating part 4164 are all electrically connected with the second heating unit 426 by conductive plunger 500.
The heating part 4163 of heating part 4153, first heating unit 416 of the first heating unit 415, projection on the substrate 100 on surface is overlapping, and overlapping with the projection on the fuse area 211 of fuse 210 on the substrate 100 surface, and heating part 4153 and heating part 4163 are across fuse 210.
It should be noted that, although separate with dotted line between adjacent two heating parts of the first heating unit 415 and adjacent two heating parts of the second heating unit 416 in Figure 14, in fact adjacent two heating parts of the first heating unit 415 and the second heating unit 416 are all one-body molded.
In the technical scheme of the present embodiment, pass into the mode of electric current to electric fuse 200 and all with reference to the first embodiment, can not repeat them here to the mode that heating arrangement 400 passes into electric current.
5th embodiment
Difference between 5th embodiment and the 3rd embodiment is: in the 5th embodiment, in conjunction with shown in Figure 15 to Figure 17, the first heating unit 413 be positioned at below electric fuse 200 also comprises: be connected with heating part 4131 and be mutually the heating part 4136 of 90 degree, heating part 4136 and heating part 4132 are just to setting; Be connected with heating part 4135 and be mutually the heating part 4137 of 90 degree, heating part 4137 and heating part 4134 are just to setting.Heating part 4136 and heating part 4137 all linearly.
The first heating unit 414 be positioned at above electric fuse 200 also comprises: be connected with heating part 4141 and be mutually the heating part 4146 of 90 degree, heating part 4146 and heating part 4142 are just to setting; Be connected with heating part 4145 and be mutually the heating part 4147 of 90 degree, heating part 4147 is all linearly and just to setting with heating part 4144.
The projection on the substrate 100 on surface of the heating part 4146 of heating part 4136, first heating unit 414 of the first heating unit 413, all overlapping with the projection on the second heating unit 423 on the substrate 100 surface, and heating part 4136 and heating part 4146 are all electrically connected with the second heating unit 423 by the conductive plunger 500 of more than (for three conductive plungers in figure), make the shorted on one end of the first heating unit 413 and the first heating unit 414.
The projection on the substrate 100 on surface of the heating part 4147 of heating part 4137, first heating unit 414 of the first heating unit 413, all overlapping with the projection on the second heating unit 424 on the substrate 100 surface, and heating part 4137 and heating part 4147 are all electrically connected with the second heating unit 424 by the conductive plunger 500 of more than (for three conductive plungers in figure), make the other end short circuit of the first heating unit 413 and the first heating unit 414.In other words, in the technical scheme of the present embodiment, the two ends of the first heating unit 413, respectively with the shorted on both ends of the first heating unit 414.
The heating part 4143 of heating part 4133, first heating unit 414 of the first heating unit 413, projection on the substrate 100 on surface is overlapping, and overlapping with the projection on the fuse area 211 of fuse 210 on the substrate 100 surface, and heating part 4133 and heating part 4143 are across fuse 210.
It should be noted that, although separate with dotted line between adjacent two heating parts of the first heating unit 413 and adjacent two heating parts of the second heating unit 414 in Figure 17, in fact adjacent two heating parts of the first heating unit 413 and the second heating unit 414 are all one-body molded.
In the technical scheme of the present embodiment, shown in composition graphs 6, the mode passing into electric current I 1 to electric fuse 200 with reference to the first embodiment, can not repeat them here.The one end that can pass into electric current I 2: the first heating unit 413 to the input of heating arrangement 400 is in such a way applied in voltage VP, and the other end is electrically connected with the drain electrode of transistor 620, and the grid of transistor 620 is applied in voltage VG, source ground.Or the one end that also can pass into electric current I 2: the second heating unit 414 to heating arrangement 400 is in such a way applied in voltage VP, and the other end is electrically connected with the drain electrode of transistor 620, and the grid of transistor 620 is applied in voltage VG, source ground.
6th embodiment
Difference between 6th embodiment and the 4th embodiment is: in the sixth embodiment, in conjunction with shown in Figure 18 to Figure 20, the first heating unit 415 be positioned at below electric fuse 200 also comprises: be connected with heating part 4151 and be mutually the heating part 4156 of 90 degree, heating part 4156 and heating part 4152 are just to setting; Be connected with heating part 4135 and be mutually the heating part 4157 of 90 degree, heating part 4157 and heating part 4154 just to setting, heating part 4156 and heating part 4157 all linearly.
The first heating unit 416 be positioned at above electric fuse 200 also comprises: be connected with heating part 4161 and be mutually the heating part 4166 of 90 degree, heating part 4166 and heating part 4162 are just to setting; Be connected with heating part 4135 and be mutually the heating part 4167 of 90 degree, heating part 4167 and heating part 4164 just to setting, heating part 4166 and heating part 4167 all linearly.
The projection on the substrate 100 on surface of the heating part 4166 of heating part 4156, first heating unit 416 of the first heating unit 415, all overlapping with the projection on the second heating unit 425 on the substrate 100 surface, and heating part 4156 and heating part 4166 are all electrically connected with the second heating unit 425 by the conductive plunger 500 of more than (for three conductive plungers in figure), make the shorted on one end of the first heating unit 415 and the first heating unit 416.
The projection on the substrate 100 on surface of the heating part 4167 of heating part 4157, first heating unit 416 of the first heating unit 415, all overlapping with the projection on the second heating unit 426 on the substrate 100 surface, and heating part 4157 and heating part 4167 are all electrically connected with the second heating unit 426 by the conductive plunger 500 of more than (for three conductive plungers in figure), make the other end short circuit of the first heating unit 415 and the first heating unit 416.In other words, in the technical scheme of the present embodiment, the two ends of the first heating unit 415, respectively with the shorted on both ends of the first heating unit 416.
The heating part 4163 of heating part 4153, first heating unit 416 of the first heating unit 415, projection on the substrate 100 on surface is overlapping, and overlapping with the projection on the fuse area 211 of fuse 210 on the substrate 100 surface, and heating part 4153 and heating part 4163 are across fuse 210.
It should be noted that, although separate with dotted line between adjacent two heating parts of the first heating unit 415 and adjacent two heating parts of the second heating unit 416 in Figure 20, in fact adjacent two heating parts of the first heating unit 415 and the second heating unit 416 are all one-body molded.
In the technical scheme of the present embodiment, shown in composition graphs 6, the mode passing into electric current I 1 to electric fuse 200 with reference to the first embodiment, can not repeat them here.The one end that can pass into electric current I 2: the first heating unit 415 to the input of heating arrangement 400 is in such a way applied in voltage VP, and the other end is electrically connected with the drain electrode of transistor 620, and the grid of transistor 620 is applied in voltage VG, source ground.Or the one end that also can pass into electric current I 2: the second heating unit 416 to heating arrangement 400 is in such a way applied in voltage VP, and the other end is electrically connected with the drain electrode of transistor 620, and the grid of transistor 620 is applied in voltage VG, source ground.
7th embodiment
Difference between 7th embodiment and above-mentioned any embodiment is: as shown in figure 21, the fuse 210 of electric fuse 200 is U-shaped, fuse 210 comprises: head and the tail connect and linearly fuse part 2101, fuse part 2102 and fuse part 2103 successively, wherein, fuse part 2101 is connected with anode 220, fuse part 2103 is connected with negative electrode 230, fuse part 2102 and fuse part 2101 are mutually 90 degree, fuse part 2102 and fuse part 2103 are also mutually 90 degree, and fuse part 2101 and fuse part 2103 are just to setting, fuse area 211 is positioned at fuse part 2102; Two the second heating units 420 being positioned at the relative both sides of fuse 210 are also U-shaped, be arranged in parallel with fuse 210.
8th embodiment
Difference between 8th embodiment and above-mentioned any embodiment is: as shown in figure 22, the fuse 210 of electric fuse 200 comprises: head and the tail connect and linearly fuse part 2101, fuse part 2102 and fuse part 2103 successively, wherein, fuse part 2101 is connected with anode 220, fuse part 2103 is connected with negative electrode 230, fuse part 2102 and fuse part 2101 are mutually 90 degree, fuse part 2102 and fuse part 2103 are also mutually 90 degree, and the bearing of trend of fuse part 2101, contrary with the bearing of trend of fuse part 2103, fuse area 211 is positioned at fuse part 2102; Be positioned at the second heating unit 420a, the second heating unit 420b of the relative both sides of fuse 210 all in L-type, wherein, a part of second heating unit 420a and fuse part 2102 are just to setting, another part and fuse part 2103 are just to setting, a part of second heating unit 420b and fuse part 2102 are just to setting, and another part and fuse part 2101 are just to setting.
It should be noted that, in the inventive solutions, the shape of electric fuse, the shape of the first heating unit and quantity, the shape of the second heating unit and quantity, first heating unit and electric fuse are being parallel to the relative position on substrate top surface direction, and the second heating unit and electric fuse are being parallel to the relative position on substrate top surface direction, should only not be confined to given embodiment and accompanying drawing.In a particular application, can according to the true form of electric fuse, adjust the shape of the first heating unit and the second heating unit in heating arrangement, quantity, and first heating unit, between the second heating unit and electric fuse, being parallel to the relative position on substrate top surface direction, the heat that heating arrangement is produced farthest can be passed to electric fuse.
On the basis of above-mentioned electric fuse structure, present invention also offers a kind of semiconductor device, it comprises the electric fuse structure of above-mentioned any embodiment.
In the present invention, each embodiment adopts laddering literary style, and emphasis describes the difference with previous embodiment, and the same section in each embodiment can with reference to previous embodiment.
Although the present invention discloses as above, the present invention is not defined in this.Any those skilled in the art, without departing from the spirit and scope of the present invention, all can make various changes or modifications, and therefore protection scope of the present invention should be as the criterion with claim limited range.
Claims (15)
1. an electric fuse structure, is characterized in that, comprising:
Substrate;
Be positioned at the electric fuse on described substrate, described electric fuse comprises: fuse; Lay respectively at described fuse two ends and the anode be connected with described fuse and negative electrode;
By the heating arrangement of dielectric layer electric isolution on described substrate and between described electric fuse, described heating arrangement is used for the heat of generation to be passed to described electric fuse.
2. electric fuse structure according to claim 1, is characterized in that, the material of described electric fuse is metal.
3. electric fuse structure according to claim 1, is characterized in that, the material of described heating arrangement is metal.
4. the electric fuse structure according to Claims 2 or 3, is characterized in that, described metal is copper or aluminium.
5. electric fuse structure according to claim 1, is characterized in that, described heating arrangement comprises: be positioned at the first heating unit above or below described electric fuse.
6. electric fuse structure according to claim 1, is characterized in that, described heating arrangement comprises: be positioned at the second heating unit of same layer with described electric fuse.
7. electric fuse structure according to claim 1, is characterized in that, described heating arrangement comprises:
Be positioned at the first heating unit above or below described electric fuse; And
The second heating unit of same layer is positioned at described electric fuse.
8. electric fuse structure according to claim 7, is characterized in that, between described first heating unit and the second heating unit, by being positioned at the conductive plunger electrical connection of described dielectric layer; Or,
Between described first heating unit and the second heating unit, by described dielectric layer electric isolution.
9. the electric fuse structure according to claim 5 or 7, is characterized in that, the quantity of described first heating unit is at least two, and two described first heating units lay respectively at above described electric fuse, below.
10. the electric fuse structure according to claim 5 or 7, is characterized in that, described first heating unit and the projection of fuse in substrate top surface overlapping.
11. electric fuse structures according to claim 10, is characterized in that, described fuse has fuse area, described first heating unit and the projection of fuse area in substrate top surface overlapping.
12. electric fuse structures according to claim 6 or 7, is characterized in that, described second heating unit and fuse have right opposite and amass.
13. electric fuse structures according to claim 12, is characterized in that, described fuse has fuse area, and described second heating unit and fuse area have right opposite and amass.
14. electric fuse structures according to claim 6 or 7, it is characterized in that, described second heating unit is as pseudo-pattern.
15. 1 kinds of semiconductor device, is characterized in that, comprise the electric fuse structure described in any one of claim 1 to 14.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310582628.2A CN104659013A (en) | 2013-11-19 | 2013-11-19 | Electric fuse structure and semiconductor device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310582628.2A CN104659013A (en) | 2013-11-19 | 2013-11-19 | Electric fuse structure and semiconductor device |
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| CN104659013A true CN104659013A (en) | 2015-05-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310582628.2A Pending CN104659013A (en) | 2013-11-19 | 2013-11-19 | Electric fuse structure and semiconductor device |
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| CN (1) | CN104659013A (en) |
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| CN110994561A (en) * | 2019-04-30 | 2020-04-10 | 宁德时代新能源科技股份有限公司 | Battery safety protection system and processing method |
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