CN104632577A - Structure improved cold shield baffle of cryopump - Google Patents
Structure improved cold shield baffle of cryopump Download PDFInfo
- Publication number
- CN104632577A CN104632577A CN201510058129.2A CN201510058129A CN104632577A CN 104632577 A CN104632577 A CN 104632577A CN 201510058129 A CN201510058129 A CN 201510058129A CN 104632577 A CN104632577 A CN 104632577A
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- CN
- China
- Prior art keywords
- fixed support
- baffle
- cryopump
- cold shield
- ring washer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention discloses a structure improved cold shield baffle of a cryopump. The structure improved cold shield baffle of the cryopump comprises a cross-shaped fixed support and cone-shaped baffle rings, a plurality of inclined slots are formed in the fixed support, the baffle rings are inserted into the slots of the fixed support, vertical annular bodies are formed through extending on the lower side edges of the baffle rings, a plurality of notches are formed in the annular bodies, folded edges are formed in the side edges of the notches of the annular bodies, and the folded edges lean against the side walls of the baffle ring fixed support and are fixed on the fixed support through rivets in a riveted mode. According to the structure improved cold shield baffle of the cryopump, a riveting structure is adopted for the baffle rings on the fixed baffle to replace a welding method, so that the assembly and the fixation of the baffle are facilitated, the time of the assembly is reduced, and the production efficiency is improved.
Description
Technical field:
The present invention relates to the technical field of vacuum low-temperature pump, more specifically to the cold shield plates of architecture advances on a kind of cryopump.
Background technique:
Cryopump is the vacuum pump utilizing low-temperature surface condensed gas, also known as condensate extractionpump.Cryopump is the vacuum pump that ultimate pressure is minimum, the speed of exhaust is maximum obtaining clean vacuum.Be provided with cold screen in cryopump, cold screen internal fixtion has absorbing array and baffle, and baffle is adsorbed with the high gas molecule of attached solidifying point, the low gas molecule of attached solidifying point through baffle by absorbing array is adsorbed.Existing baffle structure as shown in Figure 1, it is made up of the fixed support 1 of font and the ring washer 2 of taper, ring washer 2 is plugged on fixed support 1, to come off from fixed support 1 for preventing ring washer 2 and general need to carry out soldering at each grafting point and fix, thus the task amount of soldering is comparatively large, baffle assembling is consuming time longer.
Summary of the invention:
Object of the present invention is exactly the deficiency for prior art, and provides the cold shield plates of architecture advances on a kind of cryopump, and it facilitates the assembly working of baffle to improve working efficiency.
Technology solution of the present invention is as follows:
The cold shield plates of architecture advances on a kind of cryopump, comprise the ring washer of criss-cross fixed support and taper, the slot of shaping some inclinations on fixed support, ring washer is plugged in support bracket fastened slot, on the lower side of ring washer, elongation moulding has vertical ring body, the upper shaping of ring body respectively has several breach, and the side of ring body breach forms flanging, and flanging to be leaned against on the support bracket fastened sidewall of ring washer and is fixed on fixed support by rivet.
The width of the breach on described ring body is greater than the thickness of every bar bracket lip on fixed support, and breach 211 sleeve is on fixed support.
The fixed support sidewall that the flanging of described ring body leans on mutually with flanging forms corresponding rivet hole.
Described fixed support and ring washer all adopt red copper, and ring washer is provided with multiple, and ring washer is evenly distributed on fixed support to fixed support outer end by by fixed support center.
Described support bracket fastened four ends all form the flange of bending, and flange forms bolt through-hole.
Beneficial effect of the present invention is: the back-up ring in (1), its stationary shadow mask adopts riveted structure to replace welding manner, thus the assembling facilitating baffle is fixed, and decreases the time of assembling, improves manufacturing efficiency.(2), the welding quality of the existing baffle be welded and fixed by the restriction of the welding technique of assembler, baffle firmly and type quality vary with each individual, and it is little to adopt riveted structure to affect by human factor, baffle fixation, profile neat appearance.
Accompanying drawing illustrates:
Fig. 1 is the structural representation of existing cold shield plates;
Fig. 2 is structural representation of the present invention;
Fig. 3 is the structural representation that the present invention lacks part back-up ring;
Fig. 4 is the structural representation of back-up ring of the present invention.
In figure: 1, fixed support; 2, ring washer; 11, slot; 12, flange; 21, ring body; 211, breach; 212, flanging; A, rivet hole.
Embodiment:
Embodiment: see shown in Fig. 2 to 4, the cold shield plates of architecture advances on a kind of cryopump, comprise the ring washer 2 of criss-cross fixed support 1 and taper, the slot 11 of shaping some inclinations on fixed support 1, ring washer 2 is plugged in the slot 11 of fixed support 1, on the lower side of ring washer 2, elongation moulding has vertical ring body 21, the upper shaping of ring body 21 respectively has several breach 211, the side of ring body 21 breach 211 forms flanging 212, the sidewall that flanging 212 leans against ring washer 2 fixed support 1 is fixed on fixed support 1 by rivet.
The width of the breach 211 on described ring body 21 is greater than the thickness of every bar bracket lip on fixed support 1, and breach 211 sleeve is on fixed support 1.
Corresponding rivet hole a is formed on the flanging 212 of described ring body 21 with on fixed support 1 sidewall that flanging 212 leans on mutually.
Described fixed support 1 and ring washer 2 all adopt red copper, and ring washer 2 is provided with multiple, and ring washer 2 is evenly distributed on fixed support 1 to fixed support 1 outer end by by fixed support 1 center.
Four ends of described fixed support 1 all form the flange 12 of bending, and flange 12 forms bolt through-hole.
Working principle: the present invention adopts in baffle design riveted structure, thus adopt riveted joint to replace welding, both the assembly working of baffle had been facilitated, additionally reduce the time of assembling, improve manufacturing efficiency, simultaneously by the considerable influence (welding manner quality is larger by the impact of personnel's welding technique) reducing human factor, thus ensure that the aesthetics of baffle fastness and profile.
Claims (5)
1. the cold shield plates of architecture advances on a cryopump, comprise the ring washer (2) of criss-cross fixed support (1) and taper, the slot (11) of the upper shaping some inclinations of fixed support (1), ring washer (2) is plugged in the slot (11) of fixed support (1), it is characterized in that: on the lower side of ring washer (2), elongation moulding has vertical ring body (21), the upper shaping of ring body (21) respectively has several breach (211), the side of ring body (21) breach (211) forms flanging (212), the sidewall that flanging (212) leans against ring washer (2) fixed support (1) is fixed on fixed support (1) by rivet.
2. the cold shield plates of architecture advances on a kind of cryopump according to claim 1, it is characterized in that: the width of the breach (211) on described ring body (21) is greater than the thickness of the upper every bar bracket lip of fixed support (1), and breach (211) sleeve is on fixed support (1).
3. the cold shield plates of architecture advances on a kind of cryopump according to claim 1, is characterized in that: upper fixed support (1) sidewall leaned on mutually with flanging (212) of the flanging (212) of described ring body (21) forms corresponding rivet hole (a).
4. the cold shield plates of architecture advances on a kind of cryopump according to claim 1, it is characterized in that: described fixed support (1) and ring washer (2) all adopt red copper, ring washer (2) is provided with multiple, and ring washer (2) is evenly distributed on fixed support (1) to fixed support (1) outer end by fixed support (1) center.
5. the cold shield plates of architecture advances on a kind of cryopump according to claim 1, it is characterized in that: four ends of described fixed support (1) all form the flange (12) of bending, and (12) form bolt through-hole to flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510058129.2A CN104632577A (en) | 2015-02-04 | 2015-02-04 | Structure improved cold shield baffle of cryopump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510058129.2A CN104632577A (en) | 2015-02-04 | 2015-02-04 | Structure improved cold shield baffle of cryopump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104632577A true CN104632577A (en) | 2015-05-20 |
Family
ID=53211702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510058129.2A Pending CN104632577A (en) | 2015-02-04 | 2015-02-04 | Structure improved cold shield baffle of cryopump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104632577A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108612639A (en) * | 2018-05-17 | 2018-10-02 | 东莞市联洲知识产权运营管理有限公司 | A kind of baffle holder on condenser pump |
| CN108661880A (en) * | 2018-05-10 | 2018-10-16 | 东莞市联洲知识产权运营管理有限公司 | The baffle holder of structure optimization on a kind of condenser pump |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090038319A1 (en) * | 2007-08-08 | 2009-02-12 | Sumitomo Heavy Industries, Ltd. | Cryopanel and Cryopump Using the Cryopanel |
| JP2009215917A (en) * | 2008-03-07 | 2009-09-24 | Sumitomo Heavy Ind Ltd | Cryopump and evacuation method |
| CN102777345A (en) * | 2011-05-12 | 2012-11-14 | 住友重机械工业株式会社 | Low temperature pump and method of manufacturing the same |
| CN203717469U (en) * | 2014-01-23 | 2014-07-16 | 浙江兴益风机电器有限公司 | Mesh-type outer-rotor fan |
| CN204646580U (en) * | 2015-02-04 | 2015-09-16 | 湖州申祥丝织有限责任公司 | The cold shield plates of architecture advances on a kind of cryopump |
-
2015
- 2015-02-04 CN CN201510058129.2A patent/CN104632577A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090038319A1 (en) * | 2007-08-08 | 2009-02-12 | Sumitomo Heavy Industries, Ltd. | Cryopanel and Cryopump Using the Cryopanel |
| JP2009215917A (en) * | 2008-03-07 | 2009-09-24 | Sumitomo Heavy Ind Ltd | Cryopump and evacuation method |
| CN102777345A (en) * | 2011-05-12 | 2012-11-14 | 住友重机械工业株式会社 | Low temperature pump and method of manufacturing the same |
| CN203717469U (en) * | 2014-01-23 | 2014-07-16 | 浙江兴益风机电器有限公司 | Mesh-type outer-rotor fan |
| CN204646580U (en) * | 2015-02-04 | 2015-09-16 | 湖州申祥丝织有限责任公司 | The cold shield plates of architecture advances on a kind of cryopump |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108661880A (en) * | 2018-05-10 | 2018-10-16 | 东莞市联洲知识产权运营管理有限公司 | The baffle holder of structure optimization on a kind of condenser pump |
| CN108612639A (en) * | 2018-05-17 | 2018-10-02 | 东莞市联洲知识产权运营管理有限公司 | A kind of baffle holder on condenser pump |
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Application publication date: 20150520 |