CN104626718B - Alignment adhesion equipment - Google Patents
Alignment adhesion equipment Download PDFInfo
- Publication number
- CN104626718B CN104626718B CN201410850560.6A CN201410850560A CN104626718B CN 104626718 B CN104626718 B CN 104626718B CN 201410850560 A CN201410850560 A CN 201410850560A CN 104626718 B CN104626718 B CN 104626718B
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- China
- Prior art keywords
- jointing plate
- base station
- vibration
- base
- controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 230000007246 mechanism Effects 0.000 claims description 12
- 230000000694 effects Effects 0.000 claims description 9
- 230000009471 action Effects 0.000 claims description 8
- 230000033001 locomotion Effects 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims description 5
- 230000008447 perception Effects 0.000 claims description 3
- 230000003139 buffering effect Effects 0.000 claims 1
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 7
- 238000010030 laminating Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001846 repelling effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
- B32B38/1825—Handling of layers or the laminate characterised by the control or constructional features of devices for tensioning, stretching or registration
- B32B38/1833—Positioning, e.g. registration or centering
Landscapes
- Vibration Prevention Devices (AREA)
Abstract
The invention relates to the technical field of liquid crystal panel manufacturing and discloses alignment adhesion equipment. The alignment adhesion equipment comprises a base, a base platform, buffer parts, a driving part, an alignment unit, a vibration sensor and a controller, wherein the base platform is arranged opposite to the base; the buffer parts are arranged between the base and the base platform; the driving part is arranged between the base and the base platform; the alignment unit is arranged on the support side of the base platform; the vibration sensor is arranged on the base platform and is used for detecting vibration information of the base platform in a direction perpendicular to the support surface; the controller is in signal connection with the driving part, the vibration sensor and the alignment unit; the controller is used for controlling the driving part to provide acting force opposite to the vibration direction of the base platform to the base platform when the vibration information acquired by the vibration sensor is within a threshold range set by the controller, so as to balance the vibration force to the base platform; when the vibration information acquired by the vibration sensor exceeds the threshold range set by the controller, the alignment unit is controlled to stop operating. By adopting the alignment adhesion equipment, the vibration of the base platform in the vertical direction can be controlled, and thus the alignment precision can be improved.
Description
Technical field
The present invention relates to liquid crystal panel manufacturing technology field, particularly to a kind of contraposition abutted equipment.
Background technology
At present, vacuum abutted technique is the important step in liquid crystal panel manufacture process, in airtight vacuum cavity, leads to
Cross price fixing and lower price fixing adsorbs array (Thin Film Transistor, TFT) substrate and color film (Color respectively
Filter, CF) substrate, upper price fixing and lower price fixing move towards, and TFT substrate and CF substrate are pressed together formation liquid crystal surface
Plate.
In vacuum abutted technique, to accurately detect and control the vibration of vertical direction during contraposition, to improve contraposition essence
Degree.
Production trend is that 6 generations following product carries out producing liquid crystal display miniaturization at present, and less size is for aligning accuracy
Requirement higher, current 5, less than 4.95 product aligning accuracy Design value reaches 4.75um.Therefore, for vacuum pairing machine control
The requirement that damping is moved just more is increased, therefore it provides a kind of contraposition laminating that can control vertical vibration, raising aligning accuracy
Equipment is the major issue of current urgent need to resolve.
Content of the invention
The invention provides a kind of align abutted equipment, this contraposition abutted equipment can control base station shaking in vertical direction
Dynamic, such that it is able to improve aligning accuracy.
For reaching above-mentioned purpose, the present invention provides technical scheme below：
A kind of contraposition abutted equipment, including：
Base；
The base station being oppositely arranged with described base, the side surface that described base station deviates from described base forms supporting surface；
It is arranged at the bolster between described base and base station；
It is arranged at the actuator between described base and base station；
It is arranged at the pairing unit of the supporting surface of described base station；
It is arranged at described base station to detect described base station along the vibration biography of the vibration information perpendicular to described supporting surface direction
Sensor；
The controller being connected with described actuator, described vibrating sensor and described pairing cell signal, described control
Device is used for：
When the vibration information of described vibrating sensor collection is located in the threshold range that described controller sets, control institute
Stating actuator is provided and its direction of vibration opposite effect power for described base station according to the Regulate signal being formed, to balance described base
The vibration force that platform is subject to；
When the vibration information of described vibrating sensor collection exceeds the threshold range that described controller sets, control described
Pairing unit is according to the brake signal stopping action producing.
Above-mentioned contraposition abutted equipment, can detect base station along the vibration letter perpendicular to supporting surface direction by vibrating sensor
Breath, and pairing unit can be controlled by controller according to the vibration information of vibrating sensor collection, that is, work as vibration
When information is located in the threshold range that controller sets, controller controls actuator to be provided for base station according to the Regulate signal being formed
With its direction of vibration opposite effect power, to balance the vibration force that base station is subject to, thus ensureing precisely to align；When vibration information surpasses
When going out the threshold range that controller sets, controller controls pairing unit according to the brake signal stopping action producing, to shake
Stop to box process, such that it is able to avoid to box procedure failure when dynamic larger.
Therefore, above-mentioned contraposition abutted equipment can control base station in the vibration of vertical direction, such that it is able to improve contraposition essence
Degree.
Preferably, described actuator is horizontal-vertical random earthquake or the actuator based on material agility.
Preferably, when described actuator is the described actuator based on material agility, the material of described actuator is
Piezoelectric ceramics or piezoelectric membrane or electrostriction ceramics or marmem or magnetostriction materials.
Preferably, described bolster is air spring.
Preferably, described vibrating sensor perceives instrument for Piezoelectric Jet vertical vibration.
Preferably, described pairing unit includes：
It is fixed on the locating rack of the supporting surface of described base station；
Be fixed on described locating rack determines jointing plate；
It is installed on the dynamic jointing plate of described locating rack；
Drive the first driving means of described dynamic jointing plate action, described first driving means are with described controller signals even
Connect；
It is installed on described locating rack, the position detecting device for detecting described dynamic jointing plate stroke；
Supporting mechanism, when described dynamic jointing plate exceedes setting position with respect to the described stroke determining jointing plate, described
Support mechanism is used for being supported in described to be determined between jointing plate and described dynamic jointing plate.
Preferably, described position detecting device is travel switch.
Preferably, described supporting mechanism is installed on and described determines jointing plate.
Preferably, described supporting mechanism includes：
It is fixed on the described fixed seat determined on jointing plate, described fixed seat deviates from the described side determining jointing plate and is provided with cunning
Rail；
It is installed on described fixed seat and the support column being slidably matched with described slide rail, described support column can be along perpendicular to institute
Stretch in the direction stating substrate support surface；
It is connected with described position detecting device signal, be installed on described fixed seat to drive described support column along described slide rail
The second driving means slided.
Preferably, described support column includes fix bar and expansion link, and described expansion link can do with respect to described fix bar
It is connected with buffer spring between stretching motion and fix bar and expansion link；Set in one end of described fix bar and described fixed seat
The slide rail put is slidably matched；And when described support column be supported in described determine between jointing plate and described dynamic jointing plate when, described stretch
The external part of contracting bar is offseted towards the one side determining jointing plate with dynamic jointing plate.
Preferably, described second driving means are cylinder.
Preferably, described cylinder includes cylinder body and expansion link, and described cylinder body is fixed on described fixed seat, described expansion link
External part is installed on described support column, and described expansion link can stretch along the direction parallel to slide rail with respect to described cylinder body.
Brief description
Fig. 1 is a kind of structural representation of contraposition abutted equipment provided in an embodiment of the present invention；
Fig. 2 is a kind of pairing cellular construction schematic diagram of contraposition abutted equipment provided in an embodiment of the present invention.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation description is it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of not making creative work
Embodiment, broadly falls into the scope of protection of the invention.
Refer to Fig. 1, Fig. 1 is a kind of structural representation of contraposition abutted equipment provided in an embodiment of the present invention.
As shown in figure 1, a kind of contraposition abutted equipment provided in an embodiment of the present invention, including：
Base 1；
The base station 2 being oppositely arranged with base 1, the side surface that base station 2 deviates from base forms supporting surface 21；
It is arranged at the bolster 3 between base 1 and base station 2；
It is arranged at the actuator 4 between base 1 and base station 2；
It is arranged at the pairing unit 5 of the supporting surface 21 of base station 2；
It is arranged at base station 2 to detect base station 2 along the vibrating sensor 6 of the vibration information perpendicular to supporting surface 21 direction；
The controller 7 being connected with actuator 4, vibrating sensor 6 and pairing unit 5 signal, controller 7 is used for：
When the vibration information of vibrating sensor 6 collection is located in the threshold range that controller 7 sets, control actuator 4
It is that base station 2 provides and its direction of vibration opposite effect power according to the Regulate signal being formed, with vibrating of balancing that base station 2 is subject to
Power；
When the vibration information of vibrating sensor 6 collection exceeds the threshold range that controller 7 sets, control pairing unit 5
According to the brake signal stopping action producing.
By vibrating sensor 6, above-mentioned contraposition abutted equipment, can detect that base station 2 hangs down along perpendicular to supporting surface 21 direction
Nogata to vibration information, and can according to vibrating sensor 6 collection vibration information pass through controller 7 to actuator 4 with
And pairing unit 5 is controlled, that is, when vibration information is located in the threshold range that controller 7 sets, controller 7 can basis
The Regulate signal being formed controls actuator 4 to provide and direction of vibration opposite effect power of base station 2 itself for base station 2, to reduce base
The Oscillation Amplitude of platform 2, thus improve laminating aligning accuracy；When vibration information exceeds the threshold range that controller 7 sets, control
Device 7 produces brake signal and controls pairing unit 5 stopping action, to stop laminating process when vibrating larger, such that it is able to keep away
Exempt from procedure failure of fitting.
Therefore, above-mentioned contraposition abutted equipment can control base station in the vibration of vertical direction, such that it is able to improve contraposition essence
Degree.
As shown in figure 1, in a kind of specific embodiment, actuator 4 can should be made from the signal that controller is sent
The device of quick response, specifically can adopt horizontal-vertical random earthquake or the actuator based on material agility.
When actuator 4 is horizontal-vertical random earthquake, controller 7 can control horizontal-vertical random earthquake center line loop current
Size and Orientation, when base station 2 vibrates downwards, by the direction of control electric current, forms, in two coils, the magnetic pole repelling each other up and down, by
In magneticaction, base station 2 can be stoped from vibrating downwards；When base station 2 vibrates upwards, then form attracting magnetic up and down in two coils
Pole, the magnetic field force of generation can stop base station 2 vibration upwards.In sum, horizontal-vertical random earthquake can be realized suppressing base
The effect of platform 2 vibration.
Preferably, when the actuator that actuator is based on material agility, the material of actuator can for piezoelectric ceramics,
Or piezoelectric membrane or electrostriction ceramics or marmem or magnetostriction materials etc..
As shown in figure 1, on the basis of above-described embodiment, in a kind of specific embodiment, bolster 3 can be air bullet
Spring, the cushioning effect of air spring can weaken the vibration of base station 2.
As shown in figure 1, on the basis of the various embodiments described above, in a kind of specific embodiment, vibrating sensor 6 can be
Piezoelectric Jet vertical vibration perceives instrument.
In Piezoelectric Jet vertical vibration perception instrument, piezoelectric bimorph flexural vibrations with the vibration of base station 2, make pump chamber
The change that the volume of cavity increases, reduces, makes gas constantly send into collecting chamber through fluid feed port, and constantly by arranging
Pore is discharged to exhaust chamber, thus forming a stable solid jet bundle.Laminar air flow bundle is in the jet interior parallel installation of directive
In temperature-sensitive a pair of hot water radiation wire beyond the Great Wall, once there being angular velocity signal to input, the air-flow originally passing through from thermal resistance symmetrical centre
Bundle will deviate to a direction under coriolis force effect, and the bigger deflecting angle of angular speed is bigger, causes different to two thermal resistances
Cooling, thus thermosensitive wire resistance changes.Thermosensitive wire is connected in the opposing arms of electric bridge, then electric bridge output is relative with angular speed
The analog voltage answered, then Piezoelectric Jet vertical vibration perception instrument can by the vibration signal of base station 2 be changed into electric signal transmission to
Controller 7.
As depicted in figs. 1 and 2, on the basis of the various embodiments described above, in a kind of specific embodiment, pairing unit 5 can
To include：
It is fixed on the locating rack 51 of the supporting surface 21 of base station 2；
Be fixed on locating rack 51 determines jointing plate 52；
It is installed on the dynamic jointing plate 53 of locating rack 51；
Drive the first driving means of dynamic jointing plate 53 action, first driving means are connected with controller signals；
It is installed on locating rack 51, the position detecting device 54 for detecting dynamic jointing plate 53 stroke；
Supporting mechanism 8, when dynamic jointing plate 53 exceedes setting position with respect to the stroke determining jointing plate 52, supporting mechanism 8
Determine between jointing plate 52 and dynamic jointing plate 53 for being supported in.
In above-mentioned pairing unit 5, dynamic jointing plate 53 can move with respect to determining jointing plate 52, determines jointing plate 52 and dynamic laminating
Array base palte and the color membrane substrates of display floater can be loaded on two relative faces of plate 53, by dynamic jointing plate 53 direction respectively
Determine jointing plate 52 and move such that it is able to make array base palte and color membrane substrates press together thus forming display floater, in this process
In, supporting mechanism 8 may be located to be determined to be supported between jointing plate 52 and dynamic jointing plate 53 and to the dynamic jointing plate 53 on top, with
The dynamic jointing plate 53 preventing top surprisingly falls damage display floater.
As shown in Fig. 2 in a kind of specific embodiment, position detecting device 54 can be travel switch.
As shown in Fig. 2 in a kind of specific embodiment, supporting mechanism 8 is installed on determines jointing plate 52, and supporting mechanism 8 wraps
Include：
It is fixed on the fixed seat 81 determining on jointing plate 52, fixed seat 81 deviates from determines the side of jointing plate 52 and be provided with slide rail 82；
It is installed on fixed seat 81 and the support column 83 being slidably matched with slide rail 82, support column 83 can be along perpendicular to base station 2
Stretch in the direction in support face 21；
Be connected with position detecting device 54 signal, be installed on fixed seat 81 to drive that support column 83 slides along slide rail 82
Two driving means 84.Can be realized sliding along slide rail 82 to support column 83 by position detecting device 54 and the second driving means 84
Move and automatically controlled.
As shown in Fig. 2 in above-mentioned contraposition abutted equipment, when position detecting device 54 detects dynamic jointing plate 53 to away from fixed
When the stroke of jointing plate 52 direction movement exceedes setting position, the stroke signal of dynamic jointing plate 53 is transmitted by position detecting device 54
To the second driving means 84, support column 83 can be driven to slide along slide rail 82 according to stroke signal the second driving means 84, so that
Support column 83 slides into dynamic jointing plate 53 and determines between jointing plate 52, and now support column 83 is supported in dynamic jointing plate 53 and fixed laminating
Between plate 52, and the upper end of support column 83 can be offseted with dynamic jointing plate 53, and relatively determine jointing plate 52 when dynamic jointing plate 53 and transport
When dynamic, support column 83 can be stretched with the up and down motion of servo-actuated jointing plate 53, so that its upper end keeps and moves jointing plate 53 and offset,
Such that it is able to play the effect of the dynamic jointing plate 53 supporting top, accordingly it is possible to prevent dynamic jointing plate 53 is free in the course of work
Fall and damage display floater to be fit, thus playing a protective role.
As shown in Fig. 2 in a kind of specific embodiment, support column 83 can include fix bar 831 and expansion link 832, stretches
Contracting bar 832 can do with respect to fix bar 831 and be connected with buffer spring between stretching motion and fix bar 831 and expansion link 832
833, one end of fix bar 831 is slidably matched with the slide rail 82 of setting in fixed seat 81；And determine laminating when support column 83 is supported in
When between plate 52 and dynamic jointing plate 53, the top of expansion link 832 is offseted towards the one side determining jointing plate 52 with dynamic jointing plate 53.
As shown in Fig. 2 in a kind of specific embodiment, the second driving means 84 drive support column 83 to slide along slide rail 82,
Specifically can include：Second driving means 84 can be cylinder；Cylinder includes cylinder body 841 and expansion link 842, the cylinder body of cylinder
841 are fixed on fixed seat 81, and the external part of expansion link 842 is installed on support column 83.By air pressure in the cylinder body 841 of cylinder
Change can drive expansion link 842 to do stretching motion with respect to cylinder body 841, and the direction of motion of expansion link 842 is flat with slide rail 82
OK, the motion of therefore expansion link 842 can drive support column 83 to slide along slide rail 82, to realize driving support column 83 along slide rail 82
Slide.
Obviously, those skilled in the art can carry out various changes and modification without deviating from this to the embodiment of the present invention
Bright spirit and scope.So, if these modifications of the present invention and modification belong to the claims in the present invention and its equivalent technologies
Within the scope of, then the present invention is also intended to comprise these changes and modification.
Claims (11)
1. a kind of contraposition abutted equipment is it is characterised in that include：
Base；
The base station being oppositely arranged with described base, the side surface that described base station deviates from described base forms supporting surface；
It is arranged at the bolster between described base and base station；
It is arranged at the actuator between described base and base station；
It is arranged at the pairing unit of the supporting surface of described base station；
It is arranged at described base station to detect described base station along the vibrating sensor of the vibration information perpendicular to described supporting surface direction；
The controller being connected with described actuator, described vibrating sensor and described pairing cell signal, described controller is used
In：
When the vibration information of described vibrating sensor collection is located in the threshold range that described controller sets, control described drive
Moving part provides and its direction of vibration opposite effect power for described base station according to the Regulate signal being formed, and is subject to balancing described base station
The vibration force arriving；
When the vibration information of described vibrating sensor collection exceeds the threshold range that described controller sets, control described pairing
Unit is according to the brake signal stopping action producing；
Described pairing unit includes：
It is fixed on the locating rack of the supporting surface of described base station；
Be fixed on described locating rack determines jointing plate；
It is installed on the dynamic jointing plate of described locating rack；
Drive the first driving means of described dynamic jointing plate action, described first driving means are connected with described controller signals；
It is installed on described locating rack, the position detecting device for detecting described dynamic jointing plate stroke；
Supporting mechanism, when described dynamic jointing plate exceedes setting position with respect to the described stroke determining jointing plate, described support machine
Structure is used for being supported in described to be determined between jointing plate and described dynamic jointing plate.
2. according to claim 1 contraposition abutted equipment it is characterised in that described actuator be horizontal-vertical random earthquake,
Or the actuator based on material agility.
3. contraposition abutted equipment according to claim 2 is it is characterised in that working as described actuator is described based on material machine
During the actuator of quick property, the material of described actuator be piezoelectric ceramics or piezoelectric membrane or electrostriction ceramics or
Marmem or magnetostriction materials.
4. contraposition abutted equipment according to claim 1 is it is characterised in that described bolster is air spring.
5. contraposition abutted equipment according to claim 1 is it is characterised in that described vibrating sensor is that Piezoelectric Jet is vertical
Vibration perception instrument.
6. the contraposition abutted equipment according to any one of Claims 1 to 5 is it is characterised in that described position detecting device is
Travel switch.
7. the contraposition abutted equipment according to any one of Claims 1 to 5 is it is characterised in that described supporting mechanism is installed on
Described determine jointing plate.
8. contraposition abutted equipment according to claim 7 is it is characterised in that described supporting mechanism includes：
It is fixed on the described fixed seat determined on jointing plate, described fixed seat deviates from the described side determining jointing plate and is provided with slide rail；
It is installed on described fixed seat and the support column being slidably matched with described slide rail, described support column can be along perpendicular to described base
Stretch in the direction of platform supporting surface；
It is connected with described position detecting device signal, be installed on described fixed seat to drive described support column to slide along described slide rail
The second driving means.
9. contraposition abutted equipment according to claim 8 is it is characterised in that described support column includes fix bar and stretches
Bar, described expansion link can do with respect to described fix bar and be connected with buffering elastic between stretching motion and fix bar and expansion link
Spring；One end of described fix bar is slidably matched with the slide rail of setting in described fixed seat；And when described support column be supported in described
When determining between jointing plate and described dynamic jointing plate, the external part of described expansion link and dynamic jointing plate are towards the one side phase determining jointing plate
Support.
10. contraposition abutted equipment according to claim 8 is it is characterised in that described second driving means are cylinder.
11. according to claim 10 contraposition abutted equipments it is characterised in that described cylinder includes cylinder body and expansion link,
Described cylinder body is fixed on described fixed seat, and the external part of described expansion link is installed on described support column, and described expansion link can be relatively
Stretch along the direction parallel to slide rail in described cylinder body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410850560.6A CN104626718B (en) | 2014-12-30 | 2014-12-30 | Alignment adhesion equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410850560.6A CN104626718B (en) | 2014-12-30 | 2014-12-30 | Alignment adhesion equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104626718A CN104626718A (en) | 2015-05-20 |
| CN104626718B true CN104626718B (en) | 2017-02-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410850560.6A Expired - Fee Related CN104626718B (en) | 2014-12-30 | 2014-12-30 | Alignment adhesion equipment |
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| CN (1) | CN104626718B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114085034A (en) * | 2021-11-10 | 2022-02-25 | 华为技术有限公司 | Welding apparatus and welding method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001050334A (en) * | 1999-08-05 | 2001-02-23 | Fujita Corp | Active type vibration resisting device |
| JP2012104393A (en) * | 2010-11-11 | 2012-05-31 | Canon Inc | Alignment method, alignment device, and manufacturing method and manufacturing apparatus of organic el display device |
| TWI625797B (en) * | 2012-10-26 | 2018-06-01 | Nikon Corp | Substrate bonding device, substrate position matching device, substrate bonding method, and substrate position matching method |
| CN103162067B (en) * | 2012-12-19 | 2015-04-22 | 哈尔滨工业大学 | Air flotation vibration isolation platform based on spring zero position criterion and laser self-alignment measurement |
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| CN104626718A (en) | 2015-05-20 |
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Granted publication date: 20170222 |