CN104624462B - One kind is used for the microscopical variable ratio frequency changer zoom transducer preparation method of ultrasonic scanning - Google Patents
One kind is used for the microscopical variable ratio frequency changer zoom transducer preparation method of ultrasonic scanning Download PDFInfo
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Abstract
It is especially a kind of to be used for the microscopical variable ratio frequency changer zoom transducer preparation method of ultrasonic scanning the present invention relates to ultrasonic scanning microscope detection field and ultrasonic imaging field, it is characterised in that：1）Obtain five different autohemagglutination focal surfaces of radius of curvature on the monosilicon using miromaching；2) deposited and be separated from each other between the ZnO piezoelectric film chip of five kinds of different-thickness, film on above-mentioned autohemagglutination focal surface respectively using Low Pressure Chemical Vapor Deposition；3）By each ZnO piezoelectric film chip of the electrode selective excitation individually drawn, the ultrasonic wave of frequency-adjustable is obtained；4）It is an entirety by the piezoelectric membrane wafer package of five kinds of different-thickness, and the transducer to form frequency conversion zoom is connected with SAM electric power connectors.The present invention obtains five kinds of different focal lengths, and the frequency conversion zoom function of the i.e. achievable ultrasonic transducer of piezoelectric membrane chip of the electrode selective excitation wherein any thickness by each drawing by the autohemagglutination focal surface of five kinds of different curvature radius.
Description
Technical field
Swept the present invention relates to ultrasonic scanning microscope detection field and ultrasonic imaging field, especially one kind for ultrasound
Retouch microscopical variable ratio frequency changer zoom transducer preparation method
Background technology
Ultrasonic scanning microscope is mainly worked using pulse return pattern, be used to carry out inside material micro- detection and into
One of important tool as research, is widely used in medical science, electronics industry and the detection of the micro-imaging of metallurgical industry at present.
For different detection objects and imaging requirements (such as detection depth, flaw size can be examined), it is necessary to frequently change different frequency and
The transducer of different focal can be only achieved optimal Detection results.So not only reduce detection efficiency, further increase due to
The caused position error of dismounting, installation, is totally unfavorable for the accurate position for judging defect.Realize ultrasonic transducer
Frequency conversion zoom technology is the more effective method that solves the above problems, and can greatly improve the performance of ultrasonic microscope, right
It is significant in the micro-imaging under different resolving powers.
The transmitting and reception of ultrasonic wave are realized more than current ultrasonic scanning microscope using single-chip PZT (piezoelectric transducer).Ultrasound
Transducer directly decides that the ultrasound signal characteristics launched and ultrasound are swept as the most crucial component of ultrasonic scanning microscope
Microscopical detection resolving power is retouched, so as to directly affect the microscopical detection image quality of ultrasonic scanning.Focused transducer except
Realized using acoustic lens outside focusing on, the main focusing that high-frequency ultrasonic is realized using autohemagglutination focal surface.However, above-mentioned transducer
Particularly high frequency focused transducerses, although the ultrasonic wave in broadband can be produced, but be due to the thickness and autohemagglutination of its piezoelectric chip
The radius of curvature of focal surface immobilizes so that other frequency contents outside centre frequency can not be detected needed for energy
Threshold value and matching pinpointed focus, therefore the change of focused transducer can not be realized by single-chip and single autohemagglutination focal surface
Frequency zoom function.
The present invention using five kinds of different-thickness piezoelectric membrane chip and the autohemagglutination focal surface phase of five kinds of different curvature radius
With reference to mode synthesize a transducer, and pass through the piezoelectric membrane for the electrode selective excitation wherein any thickness each drawn
Chip is the frequency conversion zoom purpose that ultrasonic transducer can be achieved.Using the frequency conversion zoom transducer when being detected to sample,
Without frequently change transducer just can change focus on ultrasonic wave centre frequency and focal length size, quickly realize different depth and
The scanning imagery of different resolving powers, causes detection efficiency low, defect location so as to be prevented effectively from due to changing transducer
Difficult the problem of.
The content of the invention
It is used for the microscopical variable ratio frequency changer zoom transducer preparation method of ultrasonic scanning it is an object of the invention to provide one kind.
The present invention's realizes that step is as follows：
1) the different autohemagglutination focal surface of five kinds of radius of curvature is obtained using micromachined on the monosilicon, radius of curvature by
The focal length for focusing on ultrasonic wave is determined；
2) respectively on the autohemagglutination focal surface of above-mentioned different curvature radius deposition obtain five kinds of different-thickness ZnO piezoelectricity it is thin
Film chip, the thickness of thin film wafers is determined that wherein n takes 1, cp to be the longitudinal wave velocity in piezoelectric chip, f by formula t=ncp/2f
For the resonant frequency of piezoelectric chip；
3) respectively from front and rear electrodes of the Au and Al as PZT (piezoelectric transducer), by miromaching respectively each
Drawn on the front-back of ZnO piezoelectric film chip；
4) it is an entirety by the ZnO piezoelectric film wafer package of five kinds of different-thickness, and is connected with SAM electric power connectors
Form the transducer of frequency conversion zoom.
Advantages of the present invention
Defects detection in the case where realizing material internal different depth and different resolving power in the case of being changed without transducer and
Imaging function, can not only improve detection efficiency, and can improve the positioning precision of tiny flaw.
Brief description of the drawings
The structural representation of Fig. 1 frequency conversion zoom PZT (piezoelectric transducer)s；
The structure design schematic diagram of Fig. 2 autohemagglutination focal surfaces；
The top view of Fig. 3 autohemagglutination focal surfaces；
The perspective view of Fig. 4 frequency conversion zoom transducers.
Embodiment
Below in conjunction with the accompanying drawings, by 100MHz-200MHz of variable frequency range, zooming range for 2mm-8mm PZT (piezoelectric transducer)
Exemplified by making, the design to the present invention is described in detail, but not as limiting to the invention.Fig. 1 is frequency conversion zoom pressure
The structural representation of electric transducer, mainly including preceding matching layer 1, piezoelectric membrane chip 2, positive and negative electrode 3, backing and machinery are propped up
Support layer 4, metal shell 5, side wall ring epoxide resin fixed bed 6 and SAM electric power connectors 7.Wherein, piezoelectric membrane chip 2 is by passing
The single-chip of system is improved to five different piezoelectric membrane chips of thickness, and preceding matching layer has the different self-focusing of radius of curvature bent
Face shape, ultrasonic wave realizes focusing function after passing through the structure.
The detailed manufacturing process of frequency conversion zoom PZT (piezoelectric transducer) will be specifically given below：
1. deposit 0.3 μm of silicon nitride layer on the monosilicon using Low Pressure Chemical Vapor Deposition；
2. removing partial silicon nitride using the method for ion reaction etching, so as to reserve circular open in specified location, open
2r in mouthful diameter such as Fig. 2iShown, i is the wafer number in table 1；
3. corrode as shown in Figure 2 different size of logical at the opening of above-mentioned monocrystalline silicon using 80 DEG C of KOH solution
Hole；
4. it is respectively R by diameteri(i=1,2,3,4,5), roughness is placed for less than 0.1 μm of five stainless steel beads
Above above-mentioned manhole；
5. using the space below the paraffin filling bead melted, after again removing bead after paraffin cooled and solidified, obtain
The autohemagglutination focal surface of five kinds of different curvature radius, as shown in Figure 3；
6. by the Parylene even application of 8 μ m thicks on above-mentioned autohemagglutination focal surface；
7. unnecessary paraffin is removed using toluene solution so that vacate completely the bottom of sphere curved surface；
8. according to the required ultrasonic wave centre frequency (as shown in table 1) obtained, respectively in the spherical song of five kinds of different curvatures
The Al bottom electrodes that thickness is 0.5 μm are sequentially depositing on face, thickness is respectively ti(i=1,2,3,4,5) ZnO piezoelectric film and
Thickness is 0.5 μm of Au Top electrodes, and the thickness of ZnO piezoelectric film is equal to the half of compressional wave wavelength in film；
9. removing Parylene using the method for oxygen reactive ion etching, the poly- to two of Al bottom electrodes is particularly covered in
Toluene；
10. it is filled in using electronic solder silver epoxy as back lining materials in the wire chamber formed by aluminum oxide；
11. deposit the Parylene of 3 μ m thicks as preceding matching layer, and with epoxy by five different-thickness
Then piezoelectric membrane chip is packaged as the inwall for being integrally attached to wire chamber with SAM electric power connectors.
The perspective view of frequency conversion zoom PZT (piezoelectric transducer) is as shown in figure 4, corresponding basic design parameters are as shown in table 1 below.
Claims (1)
1. one kind is used for the microscopical variable ratio frequency changer zoom transducer preparation method of ultrasonic scanning, it is characterised in that include following step
Suddenly：
1. the different autohemagglutination focal surface of five kinds of radius of curvature is obtained using micromachined on the monosilicon, radius of curvature is by focusing on
The focal length of ultrasonic wave is determined；
2. deposition obtains the ZnO piezoelectric film crystalline substance of five kinds of different-thickness on the autohemagglutination focal surface of above-mentioned different curvature radius respectively
Piece, the thickness of thin film wafers is determined that n takes 1, cp to be the longitudinal wave velocity in piezoelectric chip in formula by formula t=ncp/2f, and f is
The resonant frequency of piezoelectric chip；
3. pressed respectively in each ZnO by miromaching from front and rear electrodes of the Au and Al as PZT (piezoelectric transducer) respectively
Drawn on the front-back of conductive film chip；
4. it is entirety by the piezoelectric membrane wafer package of five kinds of different-thickness, and connects with SAM electric power connectors that to be formed can
The PZT (piezoelectric transducer) of frequency conversion zoom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410842593.6A CN104624462B (en) | 2014-12-30 | 2014-12-30 | One kind is used for the microscopical variable ratio frequency changer zoom transducer preparation method of ultrasonic scanning |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410842593.6A CN104624462B (en) | 2014-12-30 | 2014-12-30 | One kind is used for the microscopical variable ratio frequency changer zoom transducer preparation method of ultrasonic scanning |
Publications (2)
| Publication Number | Publication Date |
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| CN104624462A CN104624462A (en) | 2015-05-20 |
| CN104624462B true CN104624462B (en) | 2017-09-29 |
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| CN201410842593.6A Expired - Fee Related CN104624462B (en) | 2014-12-30 | 2014-12-30 | One kind is used for the microscopical variable ratio frequency changer zoom transducer preparation method of ultrasonic scanning |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105127081B (en) * | 2015-08-21 | 2018-01-02 | 广州丰谱信息技术有限公司 | A kind of broad-band ultrasonic transducer preparation method and signaling method |
| CN110448332A (en) * | 2019-09-12 | 2019-11-15 | 深圳市索诺瑞科技有限公司 | A kind of universal ultrasonic transducer |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2620294B1 (en) * | 1987-09-07 | 1990-01-19 | Technomed Int Sa | PIEZOELECTRIC DEVICE WITH REDUCED NEGATIVE WAVES, AND USE THEREOF FOR EXTRA-BODY LITHOTRITIS OR FOR THE DESTRUCTION OF SPECIAL TISSUES |
| US6057632A (en) * | 1998-06-09 | 2000-05-02 | Acuson Corporation | Frequency and bandwidth controlled ultrasound transducer |
| CN1647829A (en) * | 2005-02-03 | 2005-08-03 | 上海交通大学 | Focal domain controllable focusing supersonic transducer |
| CN101569882A (en) * | 2009-06-16 | 2009-11-04 | 北京理工大学 | Linear ultrasonic phased array transducer |
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Granted publication date: 20170929 Termination date: 20211230 |