CN104617810B - The two-way little peak voltage creep resistant method of application of stacked piezoelectric ceramic actuator - Google Patents
The two-way little peak voltage creep resistant method of application of stacked piezoelectric ceramic actuator Download PDFInfo
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- CN104617810B CN104617810B CN201410671425.5A CN201410671425A CN104617810B CN 104617810 B CN104617810 B CN 104617810B CN 201410671425 A CN201410671425 A CN 201410671425A CN 104617810 B CN104617810 B CN 104617810B
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Abstract
The invention discloses a kind of two-way little peak voltage creep resistant method of application of stacked piezoelectric ceramic actuator, the method increasing two-way small magnitude peak voltage, when driving voltage is plateau voltage, the increase of next control time in plateau voltage beginning is identical with the change direction of plateau voltage and amplitude is Aspike, the persistent period be TdPeak voltage.By the method increasing two-way small magnitude peak voltage, the creep rate of system is quickly reduced to zero, meets the demand to stacked piezoelectric ceramic actuator precise positioning, it is achieved that the nanoscale location under big step pressure reduction, large-spacing.
Description
One, technical field
The invention belongs to piezoelectric ceramic actuator field, the application of a kind of stacked piezoelectric ceramic actuator is two-way
Little peak voltage creep resistant method.
Two, background technology
The advantages such as it is high that stacked piezoelectric ceramic actuator has displacement resolution, and volume is little, and response is fast, High power output, its
It is widely used in the micrometric displacement operation association area carrying out micro/nano level, but its intrinsic sluggishness, the non-linear displacement making it of creep
Error increases, and has had a strong impact on its positioning precision.
Creep properties is exactly when the magnitude of voltage being applied to piezoelectric ceramic actuator no longer changes, and shift value is not to stablize
In one fixed value, but over time slowly varying, and the most just reach stationary value.This is due to electrolyte
There is frictional force between internal lattice, in crystal, 90 degree of electricdomains influence each other when starting to turn to, after voltage stops change, and lattice
Owing to inertia continues upset, and there is certain deformation hysteresis.
Existing creep suppressing method has and is divided into two kinds: model method and model-free methods.Model method is first to set up creep
Model, asks its inversion model to eliminate creep the most again.Wherein the foundation of creep model is divided into two kinds: the first is set up and lag phase
The creep model closed, is all the value first determining sluggishness in this class model, then in the value determining creep according to sluggish value；
Its two be set up creep model based on data identification, from the point of view of existing document, study creep, action time by the method
Scope is the stabilization sub stage of creep.The method of model-free is exactly creep to be regarded as the nonlinear terms being attached in sluggishness are come in addition
Suppression, often uses complex controll and various high-grade intelligent controls etc..As used unidirectional amplitude peak voltage to act on piezoelectricity pottery
Porcelain driver, draws the location of nano-precision to be expected, but the peak voltage of this one direction amplitude must use many
Circle.Although certain effect is played in the suppression creep of both the above method, but process is complicated, suppresses creep DeGrain, presses down
Displacement error after system still can not meet the demand of precise positioning.
Three, summary of the invention
In order to overcome above-mentioned technical disadvantages, it is an object of the invention to provide the application of a kind of stacked piezoelectric ceramic actuator
Two-way little peak voltage creep resistant method, the method is simple to operate, and creep error speed can be made to be rapidly reduced to zero, therefore full
The foot demand to stacked piezoelectric ceramic actuator precise positioning.
For reaching above-mentioned purpose, the present invention adopts the technical scheme that: the method increasing peak voltage, at driving voltage is
During plateau voltage, the next control time when plateau voltage starts increases and amplitude identical with the change direction of plateau voltage
For Aspike, the persistent period be Td Peak voltage.
By the method increasing peak voltage, the creep error speed of system is quickly reduced to zero, makes essence fast and accurately
Close location is possibly realized.
The present invention devises, and the described next control time when plateau voltage starts increases the change with plateau voltage
The identical peak voltage in direction is set to when the plateau voltage ascent stage, and the amplitude of peak voltage is on the occasion of, increasing action voltage
Amplitude, when plateau voltage descending branch, the amplitude of peak voltage is negative value, reduce applied voltage amplitude,
In the technical program, to increase the change with plateau voltage in the next control time when plateau voltage starts
Change direction is identical and amplitude is Aspike, the persistent period be Td Peak voltage be important technical characteristic, for stacked piezoelectricity
In the creep resisting technical field of ceramic driver open loop, there is novelty, creativeness and practicality, the art in the technical program
Language is all can to explain with patent documentation in the art and understand.
Four, accompanying drawing explanation
In order to be illustrated more clearly that embodiments of the invention or technical scheme of the prior art, below will to embodiment or
In description of the prior art, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only
Some embodiments of the present invention, for those of ordinary skill in the art, on the premise of not paying creative work, also may be used
To obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is for increasing peak voltage schematic diagram.
Fig. 2 has the plateau voltage of two-way small magnitude peak voltage.
Fig. 3-Fig. 4 be plateau voltage be peak voltage and the change in displacement schematic diagram of the various multiples of 1v.
Fig. 5-Fig. 6 be plateau voltage be peak voltage and the change in displacement schematic diagram of the various multiples of 2v.
Fig. 7-Fig. 8 be plateau voltage be peak voltage and the change in displacement schematic diagram of the various multiples of 3v.
Fig. 9-Figure 10 be plateau voltage be peak voltage and the change in displacement schematic diagram of the various multiples of 4v.
Figure 11-Figure 12 be plateau voltage be peak voltage and the change in displacement schematic diagram of the various multiples of 5v.
Figure 13-Figure 14 be plateau voltage be peak voltage and the change in displacement schematic diagram of the various multiples of 6v.
Five, detailed description of the invention
Below in conjunction with embodiment, further describing the present invention, following example are intended to illustrate rather than this
The further restriction of invention.The steps include:
Seeing Fig. 1-Fig. 2, the driving voltage of stacked piezoelectric ceramic actuator is set to have ascent stage and descending branch
Plateau voltage, when the plateau voltage ascent stage, it is A that the next control time after plateau voltage effect applies amplitudespike、
Persistent period is Td Peak voltage, now the amplitude of peak voltage is on the occasion of, the amplitude of increasing action voltage；At plateau voltage
During descending branch, apply amplitude numerical value identical, but in opposite direction and that the persistent period is identical peak voltage, now peak voltage reduces
The amplitude of plateau voltage.
Following table be numerical value and the plateau voltage of peak voltage be multiple proportion, as when plateau voltage is 3v, input spike
The numerical value of voltage could be arranged to 3v, 6v or 9v.
Following table is drawn, creep rate when have recorded the peak voltage of each plateau voltage input different multiplying according to Fig. 3-Figure 14
It it is the number of zero.
According to upper table it will be seen that employ the peak voltage of two-way small magnitude after, creep rate be zero step obvious
Increasing, when the limits of error is set to 50nm, the zero creep rate-scalable positioned on a large scale is to whole step.
The peak voltage of Fig. 3-Fig. 4 input is when step pressure reduction is 1V, and peak voltage amplitude is respectively equal to 0V, 1V, 2V and
Corresponding creep situation during 3V, from the beginning of at 20ms；
Fig. 5-Fig. 6 inputs step voltage difference when being 2V, and peak amplitude is respectively 0V, the corresponding creep feelings of 2V, 4V, 6V
Condition；
Fig. 7-Fig. 8 inputs step voltage difference when being 3V, and peak amplitude is respectively 0V, the creep change that 3V, 6V, 9V are corresponding
Situation；
It is that 4V is that Fig. 9-Figure 10 inputs step voltage difference, and peak voltage amplitude is respectively 0V, when 4V, 8V, 12V, and creep
Situation of change；
It is 5V that Figure 11-Figure 12 inputs step voltage difference, and peak voltage value is 0V, the change feelings of creep when 5V, 10V, 15V
Condition；
Figure 13-Figure 14 inputs step voltage difference when being 6V, and peak voltage amplitude is respectively 0V, compacted when 6V, 12V, 18V
Become situation of change.
Certainly, described above is not limitation of the present invention, and the present invention is also not limited to the example above, and this technology is led
The technical staff in territory invention essential scope in made change, retrofit, add or replace, also should belong to the guarantor of the present invention
Protect scope.
Claims (1)
1. the two-way little peak voltage creep resistant method of the application of stacked piezoelectric ceramic actuator, is characterized in that: by increasing
The method adding two-way small magnitude peak voltage realizes: when driving voltage is plateau voltage, in plateau voltage beginning
The next control time increase and amplitude identical with the change direction of plateau voltage be Aspike, the persistent period be the point of Td
Peak voltage;Described plateau voltage beginning increase the peak voltage identical with the change direction of plateau voltage be set at step
During the voltage ascent stage, the amplitude of peak voltage is on the occasion of, the amplitude of increasing action voltage, when plateau voltage descending branch, spike
The amplitude of voltage is negative value, reduces the amplitude of applied voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410671425.5A CN104617810B (en) | 2014-11-21 | 2014-11-21 | The two-way little peak voltage creep resistant method of application of stacked piezoelectric ceramic actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410671425.5A CN104617810B (en) | 2014-11-21 | 2014-11-21 | The two-way little peak voltage creep resistant method of application of stacked piezoelectric ceramic actuator |
Publications (2)
| Publication Number | Publication Date |
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| CN104617810A CN104617810A (en) | 2015-05-13 |
| CN104617810B true CN104617810B (en) | 2016-12-07 |
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| CN201410671425.5A Expired - Fee Related CN104617810B (en) | 2014-11-21 | 2014-11-21 | The two-way little peak voltage creep resistant method of application of stacked piezoelectric ceramic actuator |
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Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2109063C3 (en) * | 1971-02-25 | 1979-07-19 | Braun Ag | Piezoelectric drive |
| US4806272A (en) * | 1985-07-19 | 1989-02-21 | Acheson Industries, Inc. | Conductive cathodic protection compositions and methods |
| JP4665477B2 (en) * | 2004-10-20 | 2011-04-06 | パナソニック株式会社 | Piezoelectric actuator control method, position control mechanism, and disk device |
| CN100495894C (en) * | 2006-04-06 | 2009-06-03 | 合肥工业大学 | Anti-creep driving method of piezoelectric ceramic driver |
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