CN104617809A - Main pulse power supply of light source for detecting discharging of Xe medium capillary - Google Patents
Main pulse power supply of light source for detecting discharging of Xe medium capillary Download PDFInfo
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Abstract
The invention provides a main pulse power supply of a light source for detecting discharging of a Xe medium capillary, relates to the technology of discharging of the Xe medium capillary, and aims at solving the problem that the general power supply cannot meet the requirement on the light source for detecting the discharging of the Xe medium capillary. The main pulse power supply is that a three-phase AC power supply is connected with a primary charging circuit through a first transformer; the primary charging circuit is an AC voltage regulating charging circuit and used for charging a medium energy storing pulse formation circuit; the medium energy storing pulse formation circuit is achieved through an energy storing capacitor; the output end of the medium energy storing pulse formation circuit transmits energy to a pulse compression circuit through a second transformer; the pulse compression circuit compresses and steepens the pulse through a magnetic pulse compression network, so as to form pulse on the load as requirement. According to the main pulse power supply, the capacitance and inductance value in a magnetic compression loop are selected to be matched with light source plasma, so as to effectively achieve Z pinch. The main pulse power supply is suitably used as the power supply of the light source for detecting the discharging of a 13.5nm Xe medium capillary.
Description
Technical field
The present invention relates to Xe medium capillary discharging 13.nm EUV light source detection technique, be specifically related to the power supply of Xe medium capillary discharging test light source.
Background technology
In order to realize the great-leap-forward development of China's very lagre scale integrated circuit (VLSIC), the year two thousand twenty is realized 45nm ~ 22nm groove and plans as the Long-and Medium-term Development of China's microelectronic industry by country, and it is special to have formulated national science and technology key special subjects 02 thus.The decades in past, microelectronic industry develops rapidly, integrated circuit minimum feature size to determine on a wafer can be integrated number of transistors, also determine the integrated circuit speed of service and memory capacity.Photoetching technique, as the technical foundation of integrated circuit, is the key factor determining integrated circuit development speed.The physics limit R of mask aligner resolution determines the minimum feature size of integrated circuit, and the physics limit R of mask aligner resolution determines the minimum feature size of integrated circuit, can reduce process factor k by resolution enhance technology
1, or reduce photo-etching machine exposal wavelength X, or improve the method for numerical aperture NA, improve mask aligner resolution R.Wherein, reducing photo-etching machine exposal wavelength is one of main method.Extreme ultraviolet lithography adopts 13.5nm (2% bandwidth) radiant light as exposure light source, is most possibly to realize one of even following Next Generation Lithography of 16nm node.
Xe medium capillary discharging test light source requires supply voltage 20kV ~ 30kV, electric current 20kA ~ 40kA, pulsewidth 100ns, repetition rate 1kHz.High voltage, big current, narrow spaces and high repetition frequency propose very high requirement to power supply, in this technique, switch is the key component of pulse power system, it is distributed in the links of the pulse power, directly has influence on the quality of pulse shaping and pulse compression and the performance of the whole pulse power.The development of Pulse Power Techniques depends on the development of switch element to a great extent.For the most pulse power, power output grade, repetition rate and life-span are all determined by the performance of switch.In addition, output pulse waveform and the stability between pulse and pulse also depend on the performance of switch.What traditional High pulse power technology was conventional is gas spark gap switch, this switch completes switch motion according to the breakdown characteristics of certain pressure intensity gas, it is widely used in the high power pulsed source based on MARX generator, also the pulse power is commonly used for finally to the discharge switch of load, although this switch switching time is at nanosecond order, but because after gas breakdown, recovery time is longer, be difficult to the requirement meeting REPETITIVE PULSED POWER TECHNOLOGY, in addition due to electrode erosion problem, the short operating time in its life-span can not be very long, therefore gas spark switch is adapted at comparatively running under low-repetition-frequency.Along with Pulse Power Techniques are towards high repetition frequency, the long-life, the future development of device compact removableization, increasing solid-state switch instead of gas spark switch.The development of solid-state switch also greatly changes concept and the application thereof of Pulse Power Techniques, and solid-state switch comprises semiconductor switch and magnetic switch etc.
The displacement opened, turn off main dependence majority carrier of semiconductor switch and dissipation have come.At present, pulse power field is applied to break-make high voltage pulse, the semiconductor switch of electric current mainly comprises: FST (recovering thyristor soon), IGBT (igbt), MOSFET (metal-oxide-semiconductor field effect t), IGCT (integrated gate commutated thyristor), SOS (semiconductor open switch), DBD (delay damper diode), RSD (reverse-conducting twin crystal multiple tube), FID (fast power transistor), DSRD (drift step recovery diode), SITH (state induction thyristor).Along with improving constantly of power-performance, semiconductor switch has been applied in the pulse power more and more, and semiconductor switch compact conformation, volume is little, become the first-selection of the compact pulse power, but the withstand voltage through-current capability of semiconductor switch is poor, can not in high-power lower operation, and control rate is comparatively slow, control precision is not high enough, can not meet the requirement of Xe medium capillary discharging test light source.
Summary of the invention
The object of the invention is the problem that cannot meet the requirement of Xe medium capillary discharging test light source in order to solve conventional 13.5nm extreme ultraviolet power supply, a kind of main pulse power supply of Xe medium capillary discharging test light source is provided.
The main pulse power supply of a kind of Xe medium capillary discharging test light source of the present invention, comprise primary charging circuit 1, intermediate energy storage pulse shaping circuit 2 and narrowing circuit 3, three-phase alternating-current supply is connected with primary charging circuit 1 by a transformer P, primary charging circuit 1 adopts the charging circuit of AC voltage adjusting, described primary charging circuit 1 charges for intermediate energy storage pulse shaping circuit 2, this intermediate energy storage pulse shaping circuit 2 adopts storage capacitor C0 to realize energy storage, the output of intermediate energy storage pulse shaping circuit 2 passes through No. two transformer PT by energy transferring to narrowing circuit 3, this narrowing circuit 3 carries out compression steepness by magnetic pulse compression network paired pulses, finally in load, form required pulse.
Described primary charging circuit 1 comprises voltage regulating module 1-1, variable-voltage transformer 1-2, high-tension transformer 1-3, rectifier bridge 1-4, voltage divider 1-5 and control module 1-6, the input of voltage regulating module 1-1 connects three-phase alternating-current supply, the output of voltage regulating module 1-1 connects the input of variable-voltage transformer 1-2, the output voltage of this variable-voltage transformer 1-2 is after high-tension transformer 1-3 boosts, by rectifier bridge 1-4, the storage capacitor C0 in intermediate energy storage pulse shaping circuit 2 is charged, voltage divider 1-5 is in parallel with this storage capacitor C0, the voltage sampling signal input of the sampled signal output link control module 1-6 of voltage divider 1-5, the control signal output of this control module 1-6 connects the control signal input of voltage regulating module 1-1.
Described intermediate energy storage pulse shaping circuit 2 comprises storage capacitor C0, K switch 1, inductance L, diode D, No. two K switch 2 and an electric capacity C1, storage capacitor C0, K switch 1, inductance L and a diode D connect successively, form series arm, this series arm is in parallel with No. two K switch 2, and the common end grounding of storage capacitor C0 and No. two K switch 2, one end of these No. two K switch 2 connects one end of an electric capacity C1, and the other end of an electric capacity C1 and the other end of No. two K switch 2 are the output of intermediate energy storage pulse shaping circuit 2.
Described narrowing circuit 3 comprises No. two electric capacity C2, No. three electric capacity C3, No. four electric capacity C4, a controllable impedance MS1, No. two controllable impedance MS2 and No. three controllable impedance MS3, one end of No. two electric capacity C2 connects one end of a controllable impedance MS1, the other end of this controllable impedance MS1 connects one end of No. three electric capacity C3 and one end of No. two controllable impedance MS2 simultaneously, the other end of these No. two controllable impedance MS2 connects one end of No. four electric capacity C4 and one end of No. three controllable impedance MS3 simultaneously, the other end of the other end of these No. three controllable impedance MS3 and No. four electric capacity C4 is as the output of described power supply, and the other end of described No. two electric capacity C2, the equal ground connection of the other end of the other end of No. three electric capacity C3 and No. four electric capacity C4, and the two ends of No. two electric capacity C2 connect the pair of output of No. two transformer PT respectively.
The main pulse power supply of a kind of Xe medium capillary discharging test light source of the present invention, under pulse condition, main pulse voltage peak value 18.0kV, current amplitude 15.6kA, the wide 120ns of half-wave, all meet design objective, coordinate the prepulsing power supply matched, the requirement of Xe medium capillary discharging test light source can be met.
Accompanying drawing explanation
Fig. 1 is the circuit structure diagram of the main pulse power supply of a kind of Xe medium capillary discharging test light source described in execution mode one;
Fig. 2 is the circuit structure diagram of the primary charging circuit 1 in execution mode two;
Fig. 3 is the circuit structure diagram of the intermediate energy storage pulse shaping circuit 2 in execution mode five;
Fig. 4 is the circuit structure diagram of the narrowing circuit 3 in execution mode six;
Fig. 5 be a kind of Xe medium capillary discharging test light source of the present invention theory diagram;
Pre-pulse voltages waveform when Fig. 6 is the electric discharge of pulse break load;
Fig. 7 is under Xe throughput 0.7sccm, discharge frequency 100Hz condition, the voltage oscillogram of prepulsing;
Fig. 8 is under Xe throughput 0.7sccm, discharge frequency 100Hz condition, the current waveform figure of prepulsing;
Fig. 9 is the voltage and current oscillogram of power supply main pulse.
Embodiment
Embodiment one: composition graphs 1 illustrates present embodiment, the main pulse power supply of a kind of Xe medium capillary discharging test light source described in present embodiment, comprise primary charging circuit 1, intermediate energy storage pulse shaping circuit 2 and narrowing circuit 3, three-phase alternating-current supply is connected with primary charging circuit 1 by a transformer P, primary charging circuit 1 adopts the charging circuit of AC voltage adjusting, described primary charging circuit 1 charges for intermediate energy storage pulse shaping circuit 2, this intermediate energy storage pulse shaping circuit 2 adopts storage capacitor C0 to realize energy storage, the output of intermediate energy storage pulse shaping circuit 2 passes through No. two transformer PT by energy transferring to narrowing circuit 3, this narrowing circuit 3 carries out compression steepness by magnetic pulse compression network paired pulses, finally in load, form required pulse.
As shown in Figure 1, the main pulse power supply described in present embodiment is divided into primary charging circuit 1, intermediate energy storage pulse shaping circuit 2 and narrowing circuit 3 three parts.Primary charging circuit 1 adopts the charging modes of AC voltage adjusting, and intermediate energy storage pulse shaping circuit 2 is made up of resonant mode voltage-multiplying circuit and pulse transformer, and narrowing circuit 3 adopts the mode of three grades of magnetic pulse compressions.Power Operating Process is: three-phase alternating current charges for large storage capacitor C0 after boosting rectification, then large storage capacitor C0 is to electric capacity C1 resonant charging, part energy is transferred to an electric capacity C1, electric capacity C1 again by step-up pulse transformer by energy transferring to narrowing circuit 3 No. two electric capacity C2, and then carry out compression steepness by magnetic pulse compression network paired pulses, finally in load, form required pulse.This main pulse power supply coordinates corresponding prepulsing power supply, and be used on Xe medium capillary discharging test light source, the indices such as light source pulse amplitude, pulsewidth all meet the requirement of detection light source.
Embodiment two: composition graphs 2 illustrates present embodiment, present embodiment is the further restriction of the main pulse power supply to a kind of Xe medium capillary discharging test light source described in execution mode one, in present embodiment, described primary charging circuit 1 comprises voltage regulating module 1-1, variable-voltage transformer 1-2, high-tension transformer 1-3, rectifier bridge 1-4, voltage divider 1-5 and control module 1-6, the input of voltage regulating module 1-1 connects three-phase alternating-current supply, the output of voltage regulating module 1-1 connects the input of variable-voltage transformer 1-2, the output voltage of this variable-voltage transformer 1-2 is after high-tension transformer 1-3 boosts, by rectifier bridge 1-4, the storage capacitor C0 in intermediate energy storage pulse shaping circuit 2 is charged, voltage divider 1-5 is in parallel with this storage capacitor C0, the voltage sampling signal input of the sampled signal output link control module 1-6 of voltage divider 1-5, the control signal output of this control module 1-6 connects the control signal input of voltage regulating module 1-1.
Primary charging circuit 1 is charged to 5kV for storage capacitor C0, the energy exporting individual pulse due to final power supply is 60 ~ 80J, consider the loss of subsequent pulse compression ring amount of energy saving, the each link rearwards of storage capacitor C0 provides the energy of 100J, the energy of storage capacitor C0 initial storage is 1500J, then choosing storage capacitor C0 is 120 μ F.Therefore, high voltage direct current charging link is that the storage capacitor C0 of 120 μ F is charged to 5kV.The most high repetition frequency of pulse exported due to power supply is 200Hz, and storage capacitor C0 to power 100J to rear class link at every turn, and the power of known high voltage direct current charging link is 20kW.
The elementary charging modes of power supply mainly contains constant voltage charge and constant current charge.Constant voltage charge utilizes high-voltage DC power supply to be charged to electric capacity by powerful current-limiting resistance.Compared with constant voltage charging method, constant current charge mode is without current-limiting resistance, and DC power supply is directly to capacitor charging, charge efficiency is high and charging rate is fast, but constant current charge principle and complex structure, immature in high-power charging art, and be all constant current charge approx within the specific limits.Present embodiment adopts the AC voltage regulation type be made up of high-power contactor and intelligent control module with thyristor to be similar to the method for constant current charge.By regulating the rate of voltage rise on storage capacitor C0, thus the change of control charging current is to realize a kind of mode of accurate constant current charge.
Adopt powerful variable-voltage transformer 1-2 to regulate in a big way voltage, utilize voltage regulating module 1-1 to regulate among a small circle voltage.First reconcile variable-voltage transformer 1-2 to certain certain value, then utilize voltage regulating module 1-1 to carry out accurate adjustment interior among a small circle to charging voltage.Variable-voltage transformer 1-2 output voltage is charged to storage capacitor C0 by three-phase bridge rectification circuit after high-tension transformer 1-3 boosts.Voltage Feedback is returned by the voltage divider 1-5 of storage capacitor C0 parallel connection, is presented at control inerface, to carry out the observation adjustment of voltage when utilizing variable-voltage transformer 1-2 and control module 1-6 pressure regulation; Meanwhile, when adopting computer control, control module 1-6 samples to the charging voltage value of reality from voltage divider 1-5, and when voltage reaches set point, control module 1-6 sends instruction, disconnects the input signal of voltage regulating module 1-1, stops charging.Adjustment exports the time length of control signal (0-10V), can change charging rate.
Embodiment three: composition graphs 1 illustrates present embodiment, present embodiment is the further restriction of the main pulse power supply to a kind of Xe medium capillary discharging test light source described in execution mode one, in present embodiment, described voltage regulating module 1-1 adopts thyristor module to realize.
Embodiment four: composition graphs 1 illustrates present embodiment, present embodiment is the further restriction of the main pulse power supply to a kind of Xe medium capillary discharging test light source described in execution mode one, in present embodiment, described voltage divider 1-5 adopts divider resistance to realize.
Embodiment five: composition graphs 3 illustrates present embodiment, present embodiment is the further restriction of the main pulse power supply to a kind of Xe medium capillary discharging test light source described in execution mode one, in present embodiment, described intermediate energy storage pulse shaping circuit 2 comprises storage capacitor C0, a K switch 1, inductance L, diode D, No. two K switch 2 and an electric capacity C1, storage capacitor C0, a K switch 1, inductance L and diode D connect successively, form series arm, this series arm is in parallel with No. two K switch 2, and the common end grounding of storage capacitor C0 and No. two K switch 2, one end of these No. two K switch 2 connects one end of an electric capacity C1, the other end of the other end of an electric capacity C1 and No. two K switch 2 is the output of intermediate energy storage pulse shaping circuit 2.
Intermediate energy storage pulse forming procedure adopts resonant mode voltage-multiplying circuit.Carry out resonant charging by storage capacitor C0 to a middle storage capacitor i.e. electric capacity C1, then energy is all passed to pulse compression system below by this electric capacity C1.Detailed process is: after storage capacitor C0 charges, and K switch 1 closes, storage capacitor C0 by inductance L to electric capacity C1 resonant charging, after charging, a K switch 1 disconnects, and simultaneously No. two K switch 2 close, electric capacity C1 by energy transferring to pulse compression system.
Embodiment six: composition graphs 4 illustrates present embodiment, present embodiment is the further restriction of the main pulse power supply to a kind of Xe medium capillary discharging test light source described in execution mode one, in present embodiment, described narrowing circuit 3 comprises No. two electric capacity C2, No. three electric capacity C3, No. four electric capacity C4, a controllable impedance MS1, No. two controllable impedance MS2 and No. three controllable impedance MS3, one end of No. two electric capacity C2 connects one end of a controllable impedance MS1, the other end of this controllable impedance MS1 connects one end of No. three electric capacity C3 and one end of No. two controllable impedance MS2 simultaneously, the other end of these No. two controllable impedance MS2 connects one end of No. four electric capacity C4 and one end of No. three controllable impedance MS3 simultaneously, the other end of the other end of these No. three controllable impedance MS3 and No. four electric capacity C4 is as the output of described power supply, and the other end of described No. two electric capacity C2, the equal ground connection of the other end of the other end of No. three electric capacity C3 and No. four electric capacity C4, and the two ends of No. two electric capacity C2 connect the pair of output of No. two transformer PT respectively.
Pulse compression link is the core of whole power supply, sometimes also integrates with pulse forming procedure.By selecting electric capacity, the inductance value in magnetic compression loop, obtaining the adjustable pulse of pulse duration and exporting, realizing Xe medium capillary discharging test light source plasma impedance optimum Match, thus realize Z constriction better.Magnetic switch also can be combined with pulse forming network (BPFN) in the pulse power, but usually used as primary switch, and the pulse duration of BPFN is difficult to reconcile, and require strictly to mate with load impedance, therefore present embodiment selects magnetic pulse compression network as the pulse compression link of the pulse power, be beneficial to pulse width modulation, and do not need strictly to mate with load impedance.Present embodiment selects three grades of magnetic pulse compressions.Select magnetic core minimum volume needed for three grades of magnetic pulse compressions to be when selecting best progression 1.6 times of required minimum volume, every one-level pulse compression ratio is chosen as 5,4,2 respectively.
Compared with the power supply of routine, the power acquisition magnetic switch described in present embodiment is as the control switch of whole power supply, and control rate and precision are more accurate, can meet the requirement of power supply overall objective.Meanwhile, adopt three grades of magnetic pulse compression loops to realize pulse compression, thus the electric current obtaining pulsewidth 120ns export, and embodies the technical advantage of magnetic switch and three grades of magnetic field impulses generally.On the other hand, power acquisition three grades of magnetic pulse compression technology, power volume also significantly reduces, and has saved space cost.
The main pulse power supply of a kind of Xe medium capillary discharging test light source of the present invention, corresponding prepulsing power supply need be coordinated, prepulsing power principle and structure are all very simple, primarily of bridge rectifier, switch I GBT, pulse transformer and current-limiting resistance are formed, and those skilled in the art can to go out to match the concrete structure of the prepulsing power supply used by designed, designed completely according to main pulse power supply.Main pulse power supply and prepulsing power supply form kind of a power supply for Xe medium capillary discharging test light source jointly, this power work principle as shown in Figure 5, first send a triggering signal by trigger control unit respectively to prepulsing power supply and main pulse power supply, between two triggering signals, there is certain time delay.Prepulsing power supply forms high pressure and is carried in capillary front end formation preionization plasma, preionization plasma enters capillary inside along with the discharge gas be filled with, after certain time delay, main pulse power supply will form high-voltage pulse at capillary two ends, this high-voltage pulse is by preionization plasma discharge in capillary, form high-temperature high-density plasma through Z constriction, thus realize the output of EUV radiant light.
After the installation of prepulsing power supply, under off condition, first test the voltage waveform of power supply.Be illustrated in figure 6 pre-pulse voltages waveform when pulse break load is discharged, can find out, under break load condition, pre-pulse voltages is through 4.2 μ s to peaking, and pre-pulse voltages is up to 24kV, and amplitude meets design objective.According to prepulsing Power Management Design parameter, μ s is adjustable in its pulse duration 1 μ s ~ 20.
To complete under pulse condition after the test of prepulsing power source performance, under repetition rate 100Hz condition, test prepulsing supply voltage-current waveform, as Fig. 7 and Fig. 8 be respectively Xe throughput 0.7sccm, repetition rate 100Hz time, prepulsing electric current first pulse effective value ~ 20A, but current effective value ~ 10A, meets requirement of experiment subsequently.
When power system design, a large amount of heats can be produced when considering pulse shaping and compression circuit work, simultaneously in order to the insulation property in assurance device miniaturization process, the pulse shaping of main pulse power supply and front two stages of compression loop are placed in fuel tank.In capillary, be filled with Xe gas, adopt main pulse to discharge separately respectively and in advance-main pulse associating discharge mode work.Experimental result shows, under the independent discharging condition of main pulse power supply, when Xe throughput is lower than 7sccm, gas cannot puncture, and now plasma effectively cannot form high-temperature high-density plasma by constriction, thus can not realize the output of 13.5nm radiant light.After introducing prepulsing power supply, be within the scope of 0.4sccm ~ 5.0sccm in Xe throughput, Xe gas all can puncture smoothly, thus Z constriction forms high-temperature high-density plasma, realizes 13.5nm radiant light and exports.Be illustrated in figure 9 Xe throughput 1.0sccm, pre--main pulse main pulse voltage current waveform when combining electric discharge.As seen from Figure 7, under pulse condition, main pulse voltage peak value 18.0kV, current amplitude 15.6kA, the wide 120ns of half-wave, all meets design objective.
Claims (6)
1. the main pulse power supply of an Xe medium capillary discharging test light source, it is characterized in that: it comprises primary charging circuit (1), intermediate energy storage pulse shaping circuit (2) and narrowing circuit (3), three-phase alternating-current supply is connected with primary charging circuit (1) by a transformer (P), primary charging circuit (1) adopts the charging circuit of AC voltage adjusting, described primary charging circuit (1) is intermediate energy storage pulse shaping circuit (2) charging, this intermediate energy storage pulse shaping circuit (2) adopts storage capacitor (C0) to realize energy storage, the output of intermediate energy storage pulse shaping circuit (2) passes through No. two transformers (PT) by energy transferring to narrowing circuit (3), this narrowing circuit (3) carries out compression steepness by magnetic pulse compression network paired pulses, finally in load, form required pulse.
2. the main pulse power supply of a kind of Xe medium capillary discharging test light source according to claim 1, it is characterized in that: described primary charging circuit (1) comprises voltage regulating module (1-1), variable-voltage transformer (1-2), high-tension transformer (1-3), rectifier bridge (1-4), voltage divider (1-5) and control module (1-6), the input of voltage regulating module (1-1) connects three-phase alternating-current supply, the output of voltage regulating module (1-1) connects the input of variable-voltage transformer (1-2), the output voltage of this variable-voltage transformer (1-2) is after high-tension transformer (1-3) boosting, by rectifier bridge (1-4) to storage capacitor (C0) charging in intermediate energy storage pulse shaping circuit (2), voltage divider (1-5) is in parallel with this storage capacitor (C0), the voltage sampling signal input of the sampled signal output link control module (1-6) of voltage divider (1-5), the control signal output of this control module (1-6) connects the control signal input of voltage regulating module (1-1).
3. the main pulse power supply of a kind of Xe medium capillary discharging test light source according to claim 2, is characterized in that: described voltage regulating module (1-1) adopts thyristor module to realize.
4. the main pulse power supply of a kind of Xe medium capillary discharging test light source according to claim 2, is characterized in that: described voltage divider (1-5) adopts divider resistance to realize.
5. the main pulse power supply of a kind of Xe medium capillary discharging test light source according to claim 1, it is characterized in that: described intermediate energy storage pulse shaping circuit (2) comprises storage capacitor (C0), a switch (K1), inductance (L), diode (D), No. two switches (K2) and an electric capacity (C1), storage capacitor (C0), a switch (K1), inductance (L) and diode (D) are connected successively, form series arm, this series arm is in parallel with No. two switches (K2), and the common end grounding of storage capacitor (C0) and No. two switches (K2), one end of these No. two switches (K2) connects one end of an electric capacity (C1), the other end of an electric capacity (C1) and the other end of No. two switches (K2) are the output of intermediate energy storage pulse shaping circuit (2).
6. the main pulse power supply of a kind of Xe medium capillary discharging test light source according to claim 1, it is characterized in that: described narrowing circuit (3) comprises No. two electric capacity (C2), No. three electric capacity (C3), No. four electric capacity (C4), a controllable impedance (MS1), No. two controllable impedances (MS2) and No. three controllable impedances (MS3), one end of No. two electric capacity (C2) connects one end of a controllable impedance (MS1), the other end of this controllable impedance (MS1) connects one end of No. three electric capacity (C3) and one end of No. two controllable impedances (MS2) simultaneously, the other end of these No. two controllable impedances (MS2) connects one end of No. four electric capacity (C4) and one end of No. three controllable impedances (MS3) simultaneously, the other end of these No. three controllable impedances (MS3) and the other end of No. four electric capacity (C4) are as the output of described power supply, and the other end of described No. two electric capacity (C2), the other end of No. three electric capacity (C3) and the equal ground connection of the other end of No. four electric capacity (C4), and the two ends of No. two electric capacity (C2) connect the pair of output of No. two transformers (PT) respectively.
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| CN113179005A (en) * | 2021-05-25 | 2021-07-27 | 长安大学 | Double-pulse power supply and working method thereof |
| CN113179005B (en) * | 2021-05-25 | 2023-08-01 | 长安大学 | Double-pulse power supply and working method thereof |
| CN117792142A (en) * | 2024-02-28 | 2024-03-29 | 中国空气动力研究与发展中心高速空气动力研究所 | High-power high-frequency pulse plasma power supply and charging and discharging method thereof |
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