CN104617216B - A kind of electret film preparation method that solid film is heated based on laser - Google Patents
A kind of electret film preparation method that solid film is heated based on laser Download PDFInfo
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- CN104617216B CN104617216B CN201510019696.7A CN201510019696A CN104617216B CN 104617216 B CN104617216 B CN 104617216B CN 201510019696 A CN201510019696 A CN 201510019696A CN 104617216 B CN104617216 B CN 104617216B
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Abstract
The invention discloses a kind of electret film preparation method that solid film is heated based on laser, including：Conductive base layer is fixed on spin coating, spraying or blade coating equipment, and configures appropriate electret nano granule suspension；By adjusting spin speed, spraying rate or blade coating thickness parameter so that electret uniform suspension is covered, then to the solvent execution evaporation process of electret liquid suspension, thus formation possesses certain thickness electret layer on conductive base layer；Laser is irradiated in electret layer surface using laser heating device, the heat produced is thus irradiated using laser and causes electret nano particle to melt and be connected with each other, electret film product is thus made.Pass through the present invention, it can process that filming performance is outstanding, disengaging not easy to crack electret film product on flexible conducting substrate, and damage will not be caused to conductive base layer, it is provided simultaneously with being easy to manipulation, with low cost and the features such as suitable for high-volume large-scale production.
Description
Technical field
The invention belongs to power generating component manufacture association area, film is consolidated more particularly, to a kind of heated based on laser
Electret film preparation method, obtained electret product filming performance is good, it is not easy to crack come off, and flexibility will not be led
Electric substrate causes damage.
Background technology
Electret refer to can standby storage space electric charge and dipole electric charge dielectric substance, it can be used to manufacture electrostatic
Electric capacity generator, possesses in energy collection field and is widely applied.Classical modern electret is usually the shape of thin polymer film
Formula, such as polytetrafluoroethylene (PTFE) (PTFE), FEP fluorinated ethylene propylene copolymer (FEP) and polyvinylidene fluoride (PVDF).
In order to which for preparing electrostatic capacitance generator, electret film must be in single one layer of electrode of Surface Machining；For
Such electret element device, in the prior art typically by the coating techniques such as magnetron sputtering or vacuum thermal evaporation into
Electrode machining is carried out on the electret film of type.However, further investigation revealed that, this kind of existing process technology is not only difficult to behaviour
It is control, with high costs, and the high ambient temperature produced in process is often also possible to make base material especially conductive layer
Into damage, and directly influence performance of the electret film on electrostatic capacitance generator and use.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of staying based on the laser solid film of heating
Polar body method for manufacturing thin film, is stayed wherein heating solid membrane technology by joint spin coating, spraying or blade coating film forming and laser to perform
The preparation process of polar body film, and its key process parameter is studied and designed, mutually should be able to be on flexible conducting substrate
Process that filming performance is outstanding, disengaging not easy to crack electret film product, and damage will not be caused to conductive base layer,
Be provided simultaneously with being easy to manipulation, it is with low cost and the features such as suitable for high-volume large-scale production.
To achieve the above object, it is proposed, according to the invention, prepared there is provided a kind of electret film for heating solid film based on laser
Method, the electret film is used for electrostatic capacitance generator, and the conductive base including being laminated by flexible substrates and conductive layer
Material layer, and electret layer of the processing on the conductive layer surface, it is characterised in that this method comprises the following steps：
(a) conductive base layer is fixed on spin coating, spraying or blade coating equipment, and electret nano particle and water is pressed
According to 30~70：100 volume ratio is configured to suspension, the wherein one kind of the material of electret nano particle in following material
Or combination：Polytetrafluoroethylene (PTFE), polyvinylidene fluoride, polytrifluorochloroethylene, ethylene tetrafluoroethylene copolymer and vinylidene three
Fluoride copolymers；
(b) by adjust spin speed, spraying rate or blade coating thickness so that electret uniform suspension be covered in it is whole
On individual conductive layer surface, evaporation process then is performed to the solvent of electret liquid suspension at a temperature of 40 DEG C~60 DEG C, thus
Formed on conductive layer surface and possess certain thickness electret layer, and electret layer is by electret nanometer
Grain, which is reunited, to be formed；
(c) laser is irradiated in the electret layer surface that step (b) is formed using laser heating device, wherein
Optical maser wavelength is set to 380 nanometers~4.2 microns, laser power density be set to 2 watt/square centimeter~120 watt/square
Centimetre, sweep speed is the mm/second of 2 mm/seconds~600；In this way, the heat produced is irradiated using laser and causes electret
Nano particle melts and is connected with each other, and is consequently formed monoblock film forming, the electret film not easy to crack come off and will not be to conduction
Substrate layer produces damage.
As it is further preferred that one kind or combination in following material of material of the flexible substrates：It is paper, poly-
Ethene, polypropylene, poly- ethylene-propylene copolymers, polyimides, PET, PEN；Institute
Conductive layer is stated by one kind or combination group in gold, silver, copper, aluminium, carbon, conducting metal oxide or conducting polymer compound
Into.
As it is further preferred that in step (b), the spin speed be set to 500 revs/min to 10000 turns/
Between minute, the thickness of the electret layer is between 10 microns to 200 micron.
As it is further preferred that in step (b), when using spraying operation, described spraying rate is preferably in 10-
100 gram/minutes, the thickness of the electret layer is between 10 microns to 200 micron.
As it is further preferred that in step (b), when using blade coating operation, adjustment blade coating thickness causes electret
The thickness of material layer is between 10 microns to 200 micron.
As it is further preferred that in step (c), the optical maser wavelength is set to 600 nanometers~1800 nanometers, swash
Optical power density be set to 20 watt/square centimeter~50 watt/square centimeter, sweep speed be 30 mm/second~200 millimeter/
Second.
As it is further preferred that the electrostatic capacitance generator is preferably flexible electrostatic electric capacity generator.
In general, possess following compared with prior art, mainly by the contemplated above technical scheme of the present invention
Technological merit：
1st, heat solid membrane technology to perform the system of electret film by joint spin coating, spraying or blade coating film forming and laser
Standby process, can avoid manipulation magnetron sputtering cumbersome, with high costs or vacuum thermal evaporation technology compared with prior art, and
And the solid film of laser heating can accurately control temperature and the position of heating, and enable electret nano particle group well
Thawing is bonded together, and will not produce damage to compliant conductive substrate layer；
2nd, by the type and charge ratio of such as suspension of the key process parameter in above-mentioned technological process, evaporating temperature and
The research and design of performance parameter are laser machined, test shows that the excellent electret film of monoblock filming performance can be formed, wherein
Electret layer is not easy to crack to come off, and can be perfectly suitable for the purposes of electrostatic capacitance generator；
3rd, possess according to the preparation method of the present invention and be easy to the advantages of manipulation, low cost and low energy consumption, and and prior art
Compared to the overall performance of electret film can be significantly improved so that quality of forming film obtains effective control, is easy to high-volume scale
Manufacture, is therefore particularly suitable for the application that electrostatic capacitance generator etc converts mechanical energy into the equipment of electric energy.
Brief description of the drawings
Fig. 1 is the process chart of the electret film preparation method that solid film is heated based on laser according to the present invention；
Fig. 2 be by taking spin coating as an example come illustrate according to the present invention electret film preparation method process environments figure；
Fig. 3 is the process chart for heating solid membrane technology using laser for exemplary display.
In all of the figs, identical reference is used for representing identical element or structure, wherein：
Electret film 3- laser heating devices 4- to be further processed 1- flexible conducting substrates 2- machines electret
Body thin film
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Not constituting conflict each other can just be mutually combined.
Fig. 1 is the process chart of the electret film preparation method that solid film is heated based on laser according to the present invention.Such as
Shown in Fig. 1, the electret film is used for the use of electrostatic capacitance generator, and including by flexible substrates and conductive layer for example layer
Folded conductive base layer, and electret layer of the processing on the conductive layer surface, the method for the present invention are mainly wrapped
Include following operating procedure：
First, above-mentioned conductive base layer is fixed on spin coating, spraying or blade coating equipment, and by electret nano particle
With water according to 30~70：100 volume ratio is configured to suspension, and wherein the material of electret nano particle is in following material
One kind or combination：Polytetrafluoroethylene (PTFE), polyvinylidene fluoride, polytrifluorochloroethylene, ethylene tetrafluoroethylene copolymer and inclined fluorine
Ethene trifluoro-ethylene copolymer；
Then, by adjusting spin speed, spraying rate or blade coating thickness parameter so that electret uniform suspension covers
Cover on whole conductive layer surface, evaporated then is performed to the solvent of electret liquid suspension at a temperature of 40 DEG C~60 DEG C
Reason, thus forms on conductive layer surface and possesses certain thickness electret layer, and electret layer is by electret
Body nanoparticle agglomerates are formed；
Then, laser is irradiated in formed electret layer surface using laser heating device, wherein conduct
Crucial processing characteristics parameter, optical maser wavelength is set to 380 nanometers~4.2 microns, laser power density be set to 2 watts/it is flat
Square centimetre~120 watts/square centimeter, sweep speed is the mm/second of 2 mm/seconds~600；In this way, due to laser facula certainly
The high-energy centrality and controllability of body, the heat produced can be irradiated using laser and make it that electret nano particle melts simultaneously mutually
Connection, is consequently formed monoblock film forming, the electret film not easy to crack come off, and heating-up temperature and position can accurately be subject to
Control, will not produce damage to conductive base layer.
Some specific embodiments of above-mentioned process are performed for the present invention below, and some of which is embodied with this and are closed
Key technological parameter.
Embodiment 1
The charge ratio of 30 liters of polytetrafluoroethylene (PTFE) is added according to every 100 liters of water, polytetrafluorethylenano nano particle is added to water
Middle configuration obtains suspension；And conductive base layer is made as conductive layer as flexible substrates, copper using brown paper；Will be above-mentioned
Conductive base layer be fixed on spin-coating equipment, then in the way of dropwise addition to it surface namely conductive layer surface apply it is above-mentioned
Suspension；
The spin speed of spin-coating equipment is set as 2000 revs/min, in conductive base layer surface formed be uniformly distributed,
The suspension layers of overall covering；Then evaporation process is performed at a temperature of 40 DEG C, the water thus removed in suspension is simultaneously preliminary
Electret layer of the thickness for 50 microns is formed, wherein electret layer is by above-mentioned electret nanoparticle agglomerates
Into；
Then, laser is irradiated in above-mentioned electret layer surface using laser heating device, wherein being used as key
The optical maser wavelength of machined parameters be set to 380 nanometers, laser power density be 20 watts/square centimeter, laser scanning speed quilt
50 mm/seconds；In the process, heating-up temperature and heating location are precisely controlled so that the gained on flexible conducting substrate
The electret film film forming arrived is intact, not easy to crack to come off, while not easy damaged flexible conducting substrate.
Embodiment 2
The charge ratio of 50 liters of vinylidene trifluoro-ethylene copolymers is added according to every 100 liters of water, by vinylidene trifluoro second
Alkene copolymer nano particle is added to configuration in water and obtains suspension；And conduction is used as flexible substrates, gold using polypropylene
Layer come be made conductive base layer；Above-mentioned conductive base layer is fixed on spin-coating equipment, then to its table in the way of dropwise addition
Face namely the surface of conductive layer apply above-mentioned suspension；
The spin speed of spin-coating equipment is set as 500 revs/min, in conductive base layer surface formed be uniformly distributed,
The suspension layers of overall covering；Then evaporation process is performed at a temperature of 60 DEG C, the water thus removed in suspension is simultaneously preliminary
Electret layer of the thickness for 80 microns is formed, wherein electret layer is by above-mentioned electret nanoparticle agglomerates
Into；
Then, laser is irradiated in above-mentioned electret layer surface using laser heating device, wherein being used as key
The optical maser wavelength of machined parameters is set to 600nm, laser power density for 50 watts/cm2, and laser scanning speed is by 30mm/s；
In the process, heating-up temperature and heating location are precisely controlled so that the electret obtained by flexible conducting substrate
Forming thin film is intact, not easy to crack to come off, while not easy damaged flexible conducting substrate.
Embodiment 3
The charge ratio of 45L polyvinylidene fluoride is added according to every 100L water, polyvinylidene fluoride nano particle is added to
Configuration obtains suspension in water；And conductive base is made as conductive layer as flexible substrates, aluminium using poly- ethylene-propylene copolymers
Material layer；Above-mentioned conductive base layer is fixed on spin-coating equipment, then the surface in the way of dropwise addition to it namely conductive layer
Surface applies above-mentioned suspension；
The spin speed of spin-coating equipment is set as 200 revs/min, in conductive base layer surface formed be uniformly distributed,
The suspension layers of overall covering；Then evaporation process is performed at a temperature of 50 DEG C, the water thus removed in suspension is simultaneously preliminary
Electret layer of the thickness for 15 microns is formed, wherein electret layer is by above-mentioned electret nanoparticle agglomerates
Into；
Then, laser is irradiated in above-mentioned electret layer surface using laser heating device, wherein being used as key
The optical maser wavelength of machined parameters is set to 1800nm, laser power density for 35 watts/cm2, laser scanning speed is by 100mm/
s；In the process, heating-up temperature and heating location are precisely controlled so that the electret obtained by flexible conducting substrate
Body thin film film forming is intact, not easy to crack to come off, while not easy damaged flexible conducting substrate.
Embodiment 4
The charge ratio of 30L ethylene tetrafluoroethylene copolymers is added according to every 100L water, ethylene tetrafluoroethylene copolymer is received
Rice grain is added to configuration in water and obtains suspension；And using PET as flexible substrates, carbon as leading
Electric layer come be made conductive base layer；By above-mentioned conductive base layer be fixed on spin-coating equipment, then in the way of dropwise addition to it
Surface namely the surface of conductive layer apply above-mentioned suspension；
The spin speed of spin-coating equipment is set as 6000 revs/min, in conductive base layer surface formed be uniformly distributed,
The suspension layers of overall covering；Then evaporation process is performed at a temperature of 50 DEG C, the water thus removed in suspension is simultaneously preliminary
Electret layer of the thickness for 200 microns is formed, wherein electret layer is by above-mentioned electret nanoparticle agglomerates
Form；
Then, laser is irradiated in above-mentioned electret layer surface using laser heating device, wherein being used as key
The optical maser wavelength of machined parameters be set to 2000 nanometers, laser power density be 80 watts/square centimeter, laser scanning speed quilt
600 mm/seconds；In the process, heating-up temperature and heating location are precisely controlled so that the gained on flexible conducting substrate
The electret film film forming arrived is intact, not easy to crack to come off, while not easy damaged flexible conducting substrate.
Embodiment 5
The charge ratio of 30 liters of polytrifluorochloroethylene is added according to every 100 liters of water, polytrifluorochloroethylene nano particle is added
Into water, configuration obtains suspension；And flexible substrates, conducting metal oxide conduct are used as using PET
Conductive layer come be made conductive base layer；Above-mentioned conductive base layer is fixed on spin-coating equipment, then to it in the way of dropwise addition
Surface namely the surface of conductive layer apply above-mentioned suspension；
The spin speed of spin-coating equipment is set as 10000 revs/min, uniform point is formed in conductive base layer surface
Cloth, the suspension layers of overall covering；Then evaporation process is performed at a temperature of 60 DEG C, the water thus removed in suspension is simultaneously first
Step forms the electret layer that thickness is 10 microns, and wherein electret layer is by above-mentioned electret nanoparticle agglomerates
Form；
Then, laser is irradiated in above-mentioned electret layer surface using laser heating device, wherein being used as key
The optical maser wavelength of machined parameters be set to 600 nanometers, laser power density be 2 watts/square centimeter, laser scanning speed is by 30
Mm/second；In the process, heating-up temperature and heating location are precisely controlled so that obtained by flexible conducting substrate
Electret film film forming it is intact, it is not easy to crack to come off, while not easy damaged flexible conducting substrate.
Embodiment 6
The charge ratio of 50 liters of polyvinylidene fluoride is added according to every 100 liters of water, polyvinylidene fluoride nano particle is added
Into water, configuration obtains suspension；And conductive base layer is made as conductive layer as flexible substrates, carbon using polypropylene；Will
Above-mentioned conductive base layer is fixed on spin-coating equipment, is then applied in the way of dropwise addition to its surface namely the surface of conductive layer
Above-mentioned suspension；
The spin speed of spin-coating equipment is set as 1000 revs/min, in conductive base layer surface formed be uniformly distributed,
The suspension layers of overall covering；Then evaporation process is performed at a temperature of 45 DEG C, the water thus removed in suspension is simultaneously preliminary
Electret layer of the thickness for 80 microns is formed, wherein electret layer is by above-mentioned electret nanoparticle agglomerates
Into；
Then, laser is irradiated in above-mentioned electret layer surface using laser heating device, wherein being used as key
The optical maser wavelength of machined parameters be set to 4200 nanometers, laser power density be 120 watts/square centimeter, laser scanning speed
By 600 mm/seconds；In the process, heating-up temperature and heating location are precisely controlled so that the institute on flexible conducting substrate
Obtained electret film film forming is intact, not easy to crack to come off, while not easy damaged flexible conducting substrate.
Embodiment 7
The charge ratio of 40 liters of ethylene tetrafluoroethylene copolymers is added according to every 100 liters of water, by ethylene tetrafluoroethylene copolymer
Nano particle is added to configuration in water and obtains suspension；And flexible substrates, carbon conduct are used as using PEN
Conductive layer come be made conductive base layer；Above-mentioned conductive base layer is fixed on spin-coating equipment, then to it in the way of dropwise addition
Surface namely the surface of conductive layer apply above-mentioned suspension；
The spin speed of spin-coating equipment is set as 2000 revs/min, in conductive base layer surface formed be uniformly distributed,
The suspension layers of overall covering；Then evaporation process is performed at a temperature of 50 DEG C, the water thus removed in suspension is simultaneously preliminary
Electret layer of the thickness for 200 microns is formed, wherein electret layer is by above-mentioned electret nanoparticle agglomerates
Form；
Then, laser is irradiated in above-mentioned electret layer surface using laser heating device, wherein being used as key
The optical maser wavelength of machined parameters be set to 1450 nanometers, laser power density be 80 watts/square centimeter, laser scanning speed quilt
45 mm/seconds；In the process, heating-up temperature and heating location are precisely controlled so that the gained on flexible conducting substrate
The electret film film forming arrived is intact, not easy to crack to come off, while not easy damaged flexible conducting substrate.
Embodiment 8
The charge ratio of 30 liters of polytetrafluoroethylene (PTFE) is added according to every 100 liters of water, polytetrafluorethylenano nano particle is added to water
Middle configuration obtains suspension；And conductive base layer is made as conductive layer as flexible substrates, copper using brown paper；Will be above-mentioned
Conductive base layer is fixed on spraying equipment；
The spraying rate of spraying equipment is set as 50 gram/minutes, in conductive base layer surface formed be uniformly distributed, it is whole
The suspension layers of body covering；Then evaporation process is performed at a temperature of 40 DEG C, water and preliminary shape in suspension is thus removed
Into electret layer of the thickness for 50 microns, wherein electret layer is by above-mentioned electret nanoparticle agglomerates
Into；
Then, laser is irradiated in above-mentioned electret layer surface using laser heating device, wherein being used as key
The optical maser wavelength of machined parameters be set to 380 nanometers, laser power density be 20 watts/square centimeter, laser scanning speed quilt
50 mm/seconds；In the process, heating-up temperature and heating location are precisely controlled so that the gained on flexible conducting substrate
The electret film film forming arrived is intact, not easy to crack to come off, while not easy damaged flexible conducting substrate.
Embodiment 9
The charge ratio of 30 liters of polytetrafluoroethylene (PTFE) is added according to every 100 liters of water, polytetrafluorethylenano nano particle is added to water
Middle configuration obtains suspension；And conductive base layer is made as conductive layer as flexible substrates, copper using brown paper；Will be above-mentioned
Conductive base layer is fixed on blade coating equipment；
By adjusting the blade coating thickness parameter of blade coating equipment, formation is uniformly distributed in conductive base layer surface, entirety is covered
The suspension layers of lid；Then evaporation process is performed at a temperature of 40 DEG C, the water in suspension is thus removed and preliminarily forms thickness
The electret layer for 50 microns is spent, wherein electret layer is formed by above-mentioned electret nanoparticle agglomerates；
Then, laser is irradiated in above-mentioned electret layer surface using laser heating device, wherein being used as key
The optical maser wavelength of machined parameters be set to 380 nanometers, laser power density be 20 watts/square centimeter, laser scanning speed quilt
50 mm/seconds；In the process, heating-up temperature and heating location are precisely controlled so that the gained on flexible conducting substrate
The electret film film forming arrived is intact, not easy to crack to come off, while not easy damaged flexible conducting substrate.
To sum up, spin coating, spraying and blade coating film forming, laser are heated solid film by the present invention and electret preparation process is combined,
Develop it is a kind of new, cheap and simple, be suitable for the electret film technique of extensive application and preparation, and lead in flexibility
Electret film film forming obtained by electric substrate is intact, not easy to crack to come off, thus is suitable for preparing flexible electrostatic electric capacity
Generator, the application scenario for converting mechanical energy into electric energy.
As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred embodiments of the present invention, it is not used to
The limitation present invention, any modification, equivalent and the improvement made within the spirit and principles of the invention etc., it all should include
Within protection scope of the present invention.
Claims (6)
1. a kind of electret film preparation method that solid film is heated based on laser, the electret film is sent out for flexible electrostatic electric capacity
Motor, and the conductive base layer including being laminated by flexible substrates and conductive layer, and process on the conductive layer surface
Electret layer, it is characterised in that this method comprises the following steps：
(a) conductive base layer is fixed on spin coating, spraying or blade coating equipment, and by electret nano particle and water according to 30
~70：100 volume ratio is configured to suspension, wherein one kind in following material of the material of electret nano particle or
Combination：Polytetrafluoroethylene (PTFE), polyvinylidene fluoride, polytrifluorochloroethylene, ethylene tetrafluoroethylene copolymer and vinylidene trifluoro second
Alkene copolymer；
(b) by adjust spin speed, spraying rate or blade coating thickness parameter so that electret uniform suspension be covered in it is whole
On individual conductive layer surface, evaporation process then is performed to the solvent of electret liquid suspension at a temperature of 40 DEG C~60 DEG C, thus
Formed on conductive layer surface and possess certain thickness electret layer, and electret layer is by electret nanometer
Grain, which is reunited, to be formed；
(c) laser is irradiated in the electret layer surface that step (b) is formed using laser heating device, wherein laser
Wavelength is set to 380 nanometers~4.2 microns, laser power density be set to 2 watt/square centimeter~120 watt/square li
Rice, sweep speed is the mm/second of 2 mm/seconds~600；In this way, the heat produced is irradiated using laser and make it that electret is received
Rice grain is melted and is connected with each other, and is consequently formed monoblock film forming, the electret film not easy to crack come off and will not be to conductive base
Material layer produces damage.
2. electret film preparation method as claimed in claim 1, it is characterised in that the material of the flexible substrates be selected from
One kind or combination in lower material：Paper, polyethylene, polypropylene, poly- ethylene-propylene copolymers, polyimides, poly terephthalic acid
Second diester, PEN；The conductive layer is by gold, silver, copper, aluminium, carbon, conducting metal oxide or conductive high
One kind or combination composition in molecular compound.
3. electret film preparation method as claimed in claim 1 or 2, it is characterised in that in step (b), the spin coating
Speed is set between 500 revs/min to 10000 revs/min, and the thickness of the electret layer is 10 microns to 200
Between micron.
4. electret film preparation method as claimed in claim 1 or 2, it is characterised in that in step (b), when using spray
When applying operation, described spraying rate is in 10-100 gram/minutes, and the thickness of the electret layer is micro- for 10 microns to 200
Between rice.
5. electret film preparation method as claimed in claim 1 or 2, it is characterised in that in step (b), is scraped when using
During painting operation, adjustment blade coating thickness causes the thickness of the electret layer between 10 microns to 200 microns.
6. electret film preparation method as claimed in claim 1 or 2, it is characterised in that in step (c), the laser
Wavelength is further set to 600 nanometers~1800 nanometers, laser power density be further set to 20 watts/square centimeter~
50 watts/square centimeter, sweep speed is further configured to the mm/second of 30 mm/seconds~200.
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| CN101425467A (en) * | 2008-11-25 | 2009-05-06 | 中国科学院安徽光学精密机械研究所 | Method for preparing transparent conductive film and transparent hetero-junction on flexible substrate |
| CN102522495A (en) * | 2011-12-21 | 2012-06-27 | 贝辛电子科技（上海）有限公司 | Method for raising signal to noise ratio of piezoelectric electret film sensor |
| CN102856487A (en) * | 2012-09-25 | 2013-01-02 | 同济大学 | Preparation method of functional film of flexible piezoelectric electret |
| CN103682083A (en) * | 2012-08-31 | 2014-03-26 | 纳米新能源（唐山）有限责任公司 | Piezoelectric electret film and preparation method thereof |
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| KR101402988B1 (en) * | 2012-06-13 | 2014-06-11 | 한국과학기술연구원 | Method for Manufacturing Flexible Piezoelectric Energy Harvester Using Piezoelectric Composite and Flexible Piezoelectric Energy Harvester Manufactured by the Same |
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| CN101425467A (en) * | 2008-11-25 | 2009-05-06 | 中国科学院安徽光学精密机械研究所 | Method for preparing transparent conductive film and transparent hetero-junction on flexible substrate |
| CN102522495A (en) * | 2011-12-21 | 2012-06-27 | 贝辛电子科技（上海）有限公司 | Method for raising signal to noise ratio of piezoelectric electret film sensor |
| CN103682083A (en) * | 2012-08-31 | 2014-03-26 | 纳米新能源（唐山）有限责任公司 | Piezoelectric electret film and preparation method thereof |
| CN102856487A (en) * | 2012-09-25 | 2013-01-02 | 同济大学 | Preparation method of functional film of flexible piezoelectric electret |
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