CN104596676B

CN104596676B - Force checking device, robot, electronic component handling apparatus and check device

Info

Publication number: CN104596676B
Application number: CN201410583846.2A
Authority: CN
Inventors: 斋藤英俊; 松本隆伸; 神谷俊幸; 冈秀明; 河合宏纪
Original assignee: Seiko Epson Corp
Current assignee: Seiko Epson Corp
Priority date: 2013-10-31
Filing date: 2014-10-27
Publication date: 2019-03-26
Anticipated expiration: 2034-10-27
Also published as: CN104596676A

Abstract

The present invention relates to force checking device and robot, electronic component handling apparatus, electronic component inspection device and the part forming unit of the force checking device are used.The first element and second element and the second base portion that first element and second element are at least set between the first base portion that the force checking device has the first base portion, the charge exported according to external force is converted to voltage and detects external force according to voltage.First element and second element relative to the first base portion and the inclination of the second base portion or vertical mode to configure, polaxis with the charge exported according to external force, and it is configured to the polaxis direction facing opposite to each other of the polaxis of the charge of first element output and the charge of second element output.

Description

Force checking device, robot, electronic component handling apparatus and check device

Technical field

The present invention relates to force checking device and used the robot of the force checking device, electronic component handling apparatus, Electronic component inspection device and part forming unit.

Background technique

In recent years, for the purpose of improving by production efficiency, introduction of the industrial robot to production facilities such as factories is advanced. Such industrial robot has the arm that can be driven relative to an axis or multiaxis direction and the front end for being installed on arm The end effectors such as hand, component inspection utensil, component conveying utensil, component processing tool, be able to carry out component The various operations such as the components manufacturing operations such as assembling operation, component processing operation, component Inspection and component conveying operation.

In such industrial robot, force checking device is equipped between arm and end effector.Power detection dress It sets and has according to the external force being applied come the piezoelectric element (charge output element) of output charge and will be exported from the piezoelectric element Charge be converted to the conversion circuit (converter) of voltage, be able to detect the external force for being applied to piezoelectric element.Industrial robot Using such force checking device, the external force generated when carrying out detection part manufacturing operation or when component conveying operation, and be based on Testing result comes control arm and end effector.As a result, component manufacturing operation can be appropriately carried out in industrial robot Or component conveying operation etc..

As such force checking device, the crystal piezoelectric sensing using crystal as piezoelectric element is just being widely used Device.Hesitation crystal piezoelectric transducer has wider dynamic range, higher rigidity, higher intrinsic frequency and higher The excellent characteristic such as bearing, so being widely used in industrial robot.

In such crystal piezoelectric transducer, since the charge exported from crystal is faint, so because of the leakage of conversion circuit The influence of output shift caused by electric current can not be ignored.Have studied the various methods for reducing the output shift.For example, Patent document 1 discloses a kind of crystal piezoelectric transducer, the crystal piezoelectric transducer have used with conversion circuit The reverse bias circuit of the diode of the similar current characteristics of the characteristic of leakage current.The crystal piezoelectric transducer of patent document 1 is logical The contrary correcting current with the size roughly the same with the leakage current of conversion circuit from diode supply circulation is crossed, to subtract Few output shift.

In addition, for example disclosing one kind in patent document 2 has a pair of of substrate (bottom plate and cover board) and configuration at this To between substrate and be mounted with multiple piezoelectric elements circuit substrate force checking device.If applying external force to aforesaid substrate, A pair of of substrate relative displacement and to piezoelectric element apply external force.By using the output from the piezoelectric element, it is able to detect one Between the external force substrate.In the force checking device for having used such piezoelectric element, firstly, because of piezoelectric element caused by external force Deformation exported as charge.The charge is input to conversion electricity by the wiring for being electrically connected piezoelectric element with conversion circuit Road is converted into voltage by conversion circuit and exports, and carries out operation to external force based on the voltage.

Patent document 1: Japanese Unexamined Patent Publication 9-72757 bulletin

Patent document 2: Japanese Unexamined Patent Publication 11-148878 bulletin

However, in the case where using reverse bias circuit the crystal piezoelectric transducer such as above patent document 1, Due to needing the additional component such as diode, mounting area increases, so miniaturization difficult.Additionally, there are need for supplying The parts precision of desired correcting current manages this problem.

In addition, there is the charge (electric current) exported from piezoelectric element in electricity in the force checking device of above patent document 2 From the wiring for being electrically connected piezoelectric element with conversion circuit on base board, via solder flux, resist, rubbish, circuit base Substrate of plate etc. is to the case where other wiring leakages.In the piezoelectric element of such force checking device, due to from piezoelectric element The charge of output is faint, so the influence of output shift caused by can not ignoring because of leakage (leakage current), has power inspection as a result, The precision of survey reduces this problem.

Summary of the invention

The present invention is at least part in order to solve above-mentioned problem and completes, can as mode below or Application examples is realized.

[application examples 1]

Force checking device involved in the application example is characterized in that having: the first base portion；First element and second yuan The charge exported according to external force is converted to voltage, and detects above-mentioned external force according to above-mentioned voltage by part；And second base Above-mentioned first element and above-mentioned second element is at least arranged between second base portion and above-mentioned first base portion in portion, and above-mentioned One element and above-mentioned second element relative to above-mentioned first base portion and the inclination of above-mentioned second base portion or vertical mode to match It sets, there is the polaxis of the charge exported according to above-mentioned external force, and be configured to the pole of the charge of above-mentioned first element output Change the polaxis direction facing opposite to each other of the charge of axis and the output of above-mentioned second element.

Although the symbol of the voltage output shift that is included exported as a result, from first element with exported from second element The symbol for the output shift that voltage is included is consistent, but can make to be contained in the voltage exported from first element and with according to external force The symbol of the proportional component of voltage (true value) of amount of savings of the charge exported from first element be contained in it is defeated from second element The symbol of voltage out and the component of voltage (true value) proportional to the amount of savings of charge exported according to external force from second element On the contrary.Therefore, external force is calculated by using the voltage exported from first element and the voltage exported from second element, it can While reducing from the output shift that the voltage that first element and second element export is included, external force is detected.As a result, energy Enough improve the detection accuracy and detection resolution of force checking device.Also, as not needing to use as reverse bias circuit In the circuit for reducing output shift, so force checking device can be made to minimize.

[application examples 2]

In the force checking device involved in the application example, preferably obtain from above-mentioned first element and above-mentioned second element The residual quantity of the above-mentioned voltage of output.

Thereby, it is possible to reduce the detection error due to output shift.

[application examples 3]

In the force checking device involved in the application example, preferably in above-mentioned first element and above-mentioned second element, The above-mentioned polaxis of above-mentioned first element and the above-mentioned polaxis of above-mentioned second element are on the same axis.

Thereby, it is possible to detect external force while being further reduced output shift.

Application examples 4]

In the force checking device involved in the application example, preferably above-mentioned first element and above-mentioned second element pass through by Three sensor layers of the multiple ground electrode layers and the polaxis with the charge exported according to above-mentioned external force that are connected to ground It folds and constitutes, the respective above-mentioned polaxis of above three sensor is orthogonal.

Force checking device is able to detect six axle powers (force component and around x, y, z axis of going forward side by side of x, y, z axis direction as a result, Rotation force component).

[application examples 5]

In the force checking device involved in the application example, the stacking direction of above three sensor is preferably being set as γ In the case that axis direction, and mutually orthogonal directions orthogonal with above-mentioned γ axis direction are set to α axis direction, β axis direction, on Stating one in three sensors is the α axis sensor that above-mentioned charge is exported according to the above-mentioned external force to above-mentioned α axis direction, One in above three sensor be according to the above-mentioned external force to above-mentioned β axis direction and export above-mentioned charge β axis sensing Device, one in above three sensor be according to the above-mentioned external force to above-mentioned γ axis direction and the γ axis that exports above-mentioned charge is used Sensor.

As a result, first element and second element can according to three axle powers (force component of going forward side by side of x, y, z axis direction) come Output charge.

[application examples 6]

It is preferred that there are two above-mentioned first element and two above-mentioned second yuan for the tool of force checking device involved in the application example The direction of the above-mentioned polaxis of the above-mentioned α axis sensor of part, an above-mentioned first element and an above-mentioned second element with The direction court of the above-mentioned polaxis of the above-mentioned α axis sensor of another above-mentioned first element and another above-mentioned second element Round about, the above-mentioned polaxis of the above-mentioned γ axis sensor of said one first element and said one second element Direction and another above-mentioned first element and another above-mentioned second element above-mentioned γ axis sensor above-mentioned polarization The direction of axis is towards opposite direction.

Thereby, it is possible to based on the voltage exported from first element and second element, while reducing output shift, inspection Survey six axle powers.

[application examples 7]

In the force checking device involved in the application example, preferably each of above three sensor includes the first piezoelectricity Body layer has the first crystallographic axis；Second piezoelectric body layer, it is opposite disposed with above-mentioned first piezoelectric body layer, and there is the second crystallographic axis； And output electrode layer, it is located between above-mentioned first piezoelectric body layer and above-mentioned second piezoelectric body layer, above-mentioned first piezoelectric body layer Above-mentioned first crystallographic axis direction and above-mentioned second piezoelectric body layer above-mentioned second crystallographic axis direction towards opposite direction.

Thereby, it is possible to make the charge increase exported from output electrode layer.

[application examples 8]

In the force checking device involved in the application example, preferably above-mentioned first piezoelectric body layer and above-mentioned second piezoelectrics Layer is made of crystal.

Thereby, it is possible to constitute with wider dynamic range, higher rigidity, higher intrinsic frequency, higher load-bearing The piezoelectric body layer of the excellent characteristics such as property.

[application examples 9]

In the force checking device involved in the application example, preferably above-mentioned first element and above-mentioned second element are above-mentioned The circumferential direction of first base portion or above-mentioned second base portion is equiangularly spaced configuration.

External force is poorly detected thereby, it is possible to unbiased.

[application examples 10]

Robot involved in the application example is characterized in that having: at least one arm union body, with multiple arms, The adjacent arm of above-mentioned multiple arms is linked in a rotatable manner each other；End effector is located at said arm company The front end side of knot body；And force checking device, it is located between said arm union body and above-mentioned end actuator, and detect above-mentioned The external force that end effector is applied, above-mentioned force checking device have: the first base portion；First element and second element, by root The charge exported according to external force is converted to voltage, and above-mentioned external force is detected according to above-mentioned voltage；And second base portion, this Above-mentioned first element and above-mentioned second element be at least set between two base portions and above-mentioned first base portion, above-mentioned first element and Above-mentioned second element has basis to configure relative to above-mentioned first base portion and the inclination of above-mentioned second base portion or vertical mode Above-mentioned external force and the polaxis of charge exported, are configured to the polaxis and above-mentioned second of the charge of above-mentioned first element output The polaxis direction facing opposite to each other of the charge of element output.

The external force detected thereby, it is possible to feed back force checking device, more closely executes operation.In addition, being detected according to power The external force that device detects is able to detect contact etc. of the end effector to barrier.Therefore, it can easily be done previous Position control in difficult obstacle avoidance movement, object damage avoidance action etc., can more safely execute operation.And And as not needing for reducing the circuit of output shift as reverse bias circuit, so force checking device can be made small Type.Therefore, robot can be made to minimize.

[application examples 11]

Electronic component handling apparatus involved in the application example is characterized in that having: handle part, holds the ministry of electronics industry Part；And force checking device, the external force that above-mentioned handle part is applied is detected, above-mentioned force checking device has: the first base portion；The The charge exported according to external force is converted to voltage by one element and second element, and is detected according to above-mentioned voltage above-mentioned External force；And second base portion, above-mentioned first element and above-mentioned is at least set between second base portion and above-mentioned first base portion Second element, above-mentioned first element and above-mentioned second element with relative to above-mentioned first base portion and above-mentioned second base portion inclination or The vertical mode of person configures, and has the polaxis of the charge exported according to above-mentioned external force, and be configured to above-mentioned first element The polaxis direction facing opposite to each other of the polaxis of the charge of output and the charge of above-mentioned second element output.

The external force detected thereby, it is possible to feed back force checking device, more closely executes operation.In addition, being detected according to power The external force that device detects is able to detect contact etc. of the handle part to barrier.Therefore, it can easily be done in previous position Obstacle avoidance movement difficult in control, object damage avoidance action etc. are set, it is defeated can more safely to execute electronic component Send operation.Also, as not needing for reducing the circuit of output shift as reverse bias circuit, so power can be made to examine Survey device miniaturization.Therefore, electronic component handling apparatus can be made to minimize.

[application examples 12]

Electronic component inspection device involved in the application example is characterized in that having: handle part, holds the ministry of electronics industry Part；Inspection portion checks above-mentioned electronic component；And force checking device, the external force that above-mentioned handle part is applied is detected, it is above-mentioned Force checking device has: the first base portion；The charge exported according to external force is converted to electricity by first element and second element Pressure, and above-mentioned external force is detected according to above-mentioned voltage；And second base portion, between second base portion and above-mentioned first base portion extremely Above-mentioned first element and above-mentioned second element are set less, and above-mentioned first element and above-mentioned second element are relative to above-mentioned One base portion and the inclination of above-mentioned second base portion or vertical mode configure, and have the polarization of the charge exported according to above-mentioned external force Axis, and be configured to the polaxis of the charge of above-mentioned first element output and the charge of above-mentioned second element output polaxis that This is towards opposite direction.

The external force detected thereby, it is possible to feed back force checking device, more closely executes operation.In addition, being detected according to power The external force that device detects is able to detect contact etc. of the handle part to barrier.Therefore, it can easily be done in previous position Obstacle avoidance movement difficult in control, object damage avoidance action etc. are set, electronic component inspection can be more safely executed Look into operation.Also, as not needing for reducing the circuit of output shift as reverse bias circuit, so power can be made to examine Survey device miniaturization.Therefore, electronic component inspection device can be made to minimize.

[application examples 13]

Part forming unit involved in the application example is characterized in that having: tool displacement portion, is mounted tool, Make above-mentioned tool displacement；And force checking device, the external force that above-mentioned tool is applied is detected, above-mentioned force checking device has: First base portion；The charge exported according to external force is converted to voltage by first element and second element, and according to above-mentioned voltage To detect above-mentioned external force；And second base portion, above-mentioned first yuan is at least arranged between second base portion and above-mentioned first base portion Part and above-mentioned second element, above-mentioned first element and above-mentioned second element are relative to above-mentioned first base portion and above-mentioned second Base portion inclination or vertical mode configure, and have the polaxis of the charge exported according to above-mentioned external force, and are configured to State the polaxis direction facing opposite to each other of the polaxis of the charge of first element output and the charge of above-mentioned second element output.

As a result, by feeding back the external force that detects of force checking device, part forming unit being capable of more closely execution unit Process operation.In addition, the external force detected according to force checking device, is able to detect contact etc. of the tool to barrier.Therefore, energy Enough emergent stoppings in the case wheres tool contact barrier etc., part forming unit are able to carry out safer component processing and make Industry.Also, as not needing for reducing the circuit of output shift as reverse bias circuit, so power detection dress can be made Set miniaturization.Therefore, part forming unit can be made to minimize.

[application examples 14]

Force checking device involved in the application example is characterized in that having: first substrate；The second substrate；Circuit substrate, It is located between above-mentioned first substrate and above-mentioned the second substrate；Element, is installed in foregoing circuit substrate, and according to external force come Output charge；Conversion circuit installs said elements, the above-mentioned electricity that will be exported from said elements in the mounting surface of foregoing circuit substrate Lotus is converted to voltage；Wiring installs said elements in the mounting surface of foregoing circuit substrate, by said elements and above-mentioned conversion circuit Electrical connection；And guard ring, said elements are installed in the mounting surface of foregoing circuit substrate, surround said elements and above-mentioned conversion circuit Between above-mentioned wiring.

Thereby, it is possible to prevent from the charge that element exports from the wiring for being electrically connected the element with conversion circuit to other cloth Line leakage, thereby, it is possible to improve the precision of power detection.

[application examples 15]

In the force checking device involved in the application example, preferably above-mentioned conversion circuit has amplifier, the amplification utensil There are inversing input terminal and non-inverting input terminal, the current potential of above-mentioned guard ring and above-mentioned non-inverting input terminal are same current potential.

Since the current potential of non-inverting input terminal is earthing potential, the current potential of wiring is approximately to be worth with earthing potential, institute Can prevent electric current from flowing through guard ring from wiring, it can prevent charge (electric current) from leaking from wiring.

[application examples 16]

In the force checking device involved in the application example, preferably having in the above-mentioned mounting surface of foregoing circuit substrate will be upper It states the power-supply wiring that conversion circuit is electrically connected to a power source, is surrounded in the above-mentioned mounting surface of foregoing circuit substrate by above-mentioned guard ring Region is not provided with the wiring other than above-mentioned wiring and above-mentioned power-supply wiring.

Thereby, it is possible to prevent charge from wiring to other wiring leakages.

[application examples 17]

In the force checking device involved in the application example, preferably in the area of foregoing circuit substrate surrounded by above-mentioned guard ring In domain, any one in the thickness direction of foregoing circuit substrate is not provided with other than above-mentioned wiring and above-mentioned power-supply wiring Wiring.

Thereby, it is possible to prevent charge from wiring to other wiring leakages.

[application examples 18]

In the force checking device involved in the application example, preferably there is welding resistance in the above-mentioned mounting surface of foregoing circuit substrate Agent is not provided with solder resist in the region of the above-mentioned mounting surface of foregoing circuit substrate surrounded by above-mentioned guard ring.

Thereby, it is possible to prevent charge from leaking from wiring via solder resist.

[application examples 19]

In the force checking device involved in the application example, preferably in the area of foregoing circuit substrate surrounded by above-mentioned guard ring In domain, above-mentioned solder resist is all not provided with to the table back of foregoing circuit substrate.

[application examples 20]

In the force checking device involved in the application example, preferably have multiple said elements, multiple said elements it is each It is a that configuration is equiangularly spaced along the circumferential direction of above-mentioned first substrate or above-mentioned the second substrate.

External force is poorly detected thereby, it is possible to unbiased, is able to carry out the higher power detection of precision.Moreover, passing through there are three tools Above element is able to detect the force component of going forward side by side (shearing force and compression/drawing force) of six axle powers, i.e. x, y, z axis direction And the rotation force component (torque) around x, y, z axis.

[application examples 21]

Robot involved in the application example is characterized in that having: arm；End effector is set to said arm；And Force checking device is set between said arm and above-mentioned end actuator, and detects the external force that above-mentioned end actuator is applied, Above-mentioned force checking device has: first substrate；The second substrate；Circuit substrate is located at above-mentioned first substrate and above-mentioned second base Between plate；Element is installed in foregoing circuit substrate, and the output charge according to external force；Conversion circuit, in foregoing circuit base The mounting surface of plate installs said elements, and the above-mentioned charge exported from said elements is converted to voltage；Wiring, in foregoing circuit base The mounting surface of plate installs said elements, is electrically connected said elements with above-mentioned conversion circuit；And guard ring, in foregoing circuit substrate Mounting surface said elements are installed, surround the above-mentioned wiring between said elements and above-mentioned conversion circuit.

Thereby, it is possible to obtain effect identical with the force checking device of above application examples.Moreover, being capable of feedback force detection dress The external force detected is set, operation is more closely executed.In addition, the external force detected according to force checking device, is able to detect end Contact etc. of the actuator to barrier.Therefore, it can easily be done difficult obstacle avoidance in previous position control Movement, object damage avoidance action etc., can more safely execute operation.

[application examples 22]

Electronic component handling apparatus involved in the application example is characterized in that having: handle part, holds the ministry of electronics industry Part；And force checking device, the external force that above-mentioned handle part is applied is detected, above-mentioned force checking device has: first substrate；The Two substrates；Circuit substrate is located between above-mentioned first substrate and above-mentioned the second substrate；Element is installed in foregoing circuit Substrate, and the output charge according to external force；Conversion circuit installs said elements in the mounting surface of foregoing circuit substrate, will be from upper The above-mentioned charge for stating element output is converted to voltage；Wiring is installed said elements in the mounting surface of foregoing circuit substrate, is made above-mentioned Element is electrically connected with above-mentioned conversion circuit；And guard ring, said elements are installed in the mounting surface of foregoing circuit substrate, are surrounded above-mentioned Above-mentioned wiring between element and above-mentioned conversion circuit.

Thereby, it is possible to obtain effect identical with the force checking device of above application examples.Moreover, being capable of feedback force detection dress The external force detected is set, operation is more closely executed.In addition, the external force detected according to force checking device, is able to detect holding Contact etc. of the portion to barrier.Therefore, can easily be done in previous position control difficult obstacle avoidance movement, Object damages avoidance action etc., can more safely execute electronic component conveying operation.

[application examples 23]

Electronic component inspection device involved in the application example is characterized in that having: handle part, holds the ministry of electronics industry Part；Inspection portion checks above-mentioned electronic component；And force checking device, the external force that above-mentioned handle part is applied is detected, it is above-mentioned Force checking device has: first substrate；The second substrate；Circuit substrate, be located at above-mentioned first substrate and above-mentioned the second substrate it Between；Element is installed in foregoing circuit substrate, and the output charge according to external force；Conversion circuit, in foregoing circuit substrate Mounting surface installs said elements, and the above-mentioned charge exported from said elements is converted to voltage；Wiring, in foregoing circuit substrate Mounting surface installs said elements, is electrically connected said elements with above-mentioned conversion circuit；And guard ring, in the peace of foregoing circuit substrate Said elements are installed in dress face, surround the above-mentioned wiring between said elements and above-mentioned conversion circuit.

Thereby, it is possible to obtain effect identical with the force checking device of above application examples.Moreover, being capable of feedback force detection dress The external force detected is set, operation is more closely executed.In addition, the external force detected according to force checking device, is able to detect holding Contact etc. of the portion to barrier.Therefore, can easily be done in previous position control difficult obstacle avoidance movement, Object damages avoidance action etc., can more safely execute electronic component Inspection.

[application examples 24]

Part forming unit involved in the application example is characterized in that having: tool displacement portion, is mounted tool, Make above-mentioned tool displacement；And force checking device, the external force that above-mentioned tool is applied is detected, above-mentioned force checking device has: First substrate；The second substrate；Circuit substrate is located between above-mentioned first substrate and above-mentioned the second substrate；Element is mounted In foregoing circuit substrate, and the output charge according to external force；Conversion circuit installs above-mentioned member in the mounting surface of foregoing circuit substrate The above-mentioned charge exported from said elements is converted to voltage by part；Wiring installs above-mentioned member in the mounting surface of foregoing circuit substrate Part is electrically connected said elements with above-mentioned conversion circuit；And guard ring, above-mentioned member is installed in the mounting surface of foregoing circuit substrate Part surrounds the above-mentioned wiring between said elements and above-mentioned conversion circuit.

Thereby, it is possible to obtain effect identical with the force checking device of above application examples.It is filled moreover, being detected by feedback force The external force detected is set, part forming unit more closely can process operation by execution unit.In addition, being examined according to force checking device The external force measured is able to detect contact etc. of the tool to barrier.It therefore, can be in the case wheres tool contact barrier etc. Emergent stopping, part forming unit are able to carry out safer component processing operation.

Detailed description of the invention

Fig. 1 be the perspective view of first embodiment for briefly expressing force checking device according to the present invention, top view, with And cross-sectional view.

Fig. 2 is the circuit diagram for briefly expressing force checking device shown in FIG. 1.

Fig. 3 is the cross-sectional view for briefly expressing the charge output element of force checking device shown in FIG. 1.

Fig. 4 is the perspective view and section view for briefly expressing the second embodiment of force checking device according to the present invention Figure.

Fig. 5 be the perspective view of third embodiment for briefly expressing force checking device according to the present invention, top view, with And cross-sectional view.

Fig. 6 is the circuit diagram for briefly expressing force checking device shown in fig. 5.

Fig. 7 is the cross-sectional view for briefly expressing the charge output element of force checking device shown in fig. 5.

Fig. 8 is the cross-sectional view for indicating the 4th embodiment of force checking device according to the present invention.

Fig. 9 is the top view of force checking device shown in Fig. 8.

Figure 10 is the circuit diagram for briefly expressing force checking device shown in Fig. 8 (comprising guard ring (guard ring)).

Figure 11 is the cross-sectional view for briefly expressing the charge output element of force checking device shown in Fig. 8.

Figure 12 is the broken isometric of guard ring on the analog circuit substrate for briefly express force checking device shown in Fig. 8 etc. Figure.

Figure 13 is the top view for indicating the 5th embodiment of force checking device according to the present invention.

Figure 14 is the cross-sectional view at the A-A ' line in Figure 13.

Figure 15 is the circuit diagram for briefly expressing force checking device shown in Figure 13 (comprising guard ring).

Figure 16 is the figure for indicating to have used an example of the one armed robot of force checking device according to the present invention.

Figure 17 is the figure for indicating to have used an example of the multi-arm robot of force checking device according to the present invention.

Figure 18 is electronic component inspection device and the ministry of electronics industry for indicating to have used force checking device according to the present invention The figure of an example of part conveying device.

Figure 19 is the figure for indicating to have used an example of the electronic component handling apparatus of force checking device according to the present invention.

Figure 20 is the figure for indicating to have used an example of the part forming unit of force checking device according to the present invention.

Figure 21 is the figure for indicating to have used an example of the moving body of force checking device according to the present invention.

Specific embodiment

Hereinafter, preferred embodiment based on the figure is detailed to force checking device according to the present invention progress Explanation.

(first embodiment)

Fig. 1 (a) is the perspective view for briefly expressing the first embodiment of force checking device according to the present invention.Fig. 1 (b) It is the top view for briefly expressing the first embodiment of force checking device according to the present invention.Fig. 1 (c) is shown in Fig. 1 (b) A line cross-sectional view.Wherein, in Fig. 1 (b), in order to illustrate and a part of constituent element is omitted.Fig. 2 is briefly expressed shown in Fig. 1 Force checking device circuit diagram.Fig. 3 is the cross-sectional view for briefly expressing the charge output element of force checking device shown in FIG. 1.

Force checking device 1a shown in FIG. 1 have detection shearing force (external force of x-axis, y-axis into Fig. 1) and compression/ The function of drawing force (external force of the z-axis into Fig. 1).Force checking device 1a have the first base portion (bottom plate) 2, will according to external force and The charge of output is converted to voltage and detects power detecting element 3a, 3b of external force (first element 3a and according to the voltage Two element 3b) and the second base portion (cover board) of first element 3a and second element 3b is at least set between the first base portion 2 4。

As shown in Figure 1, the first base portion 2 is arranged with the second base portion 4 in opposed mode.Element 3a, 3b are relative to first The inclined state of base portion 2 is clamped (setting) between the first base portion 2 and the second base portion 4, and according to external force come output voltage.From The voltage of each output of power detecting element 3a, 3b is input to external force detection circuit 5 (not shown in Fig. 1, reference Fig. 2), To detect external force.In addition, external force detection circuit 5 is showed as with the independent constituent element of element 3a, 3b in Fig. 2, but this It's not limited to that for invention.In the force checking device 1a of present embodiment, element 3a, 3b also can have external force detection circuit 5 are used as its constituent element.

[the first base portion]

First base portion 2 shown in FIG. 1, which has, passes to power detecting element 3a, 3b for the external force applied to force checking device 1a Function.First base portion 2 is the flat component of generally circular shape when overlooking.First base portion 2 is by with relatively high The material of rigidity is constituted, and is not deformed because of the external force applied to force checking device 1a.Therefore, force checking device 1a will can be applied The external force added passes to power detecting element 3a, 3b.In addition, the first base portion 2 is in the side opposed with the second base portion 4 of the first base portion 2 Surface on have set on its periphery the first rake 21.

First rake 21 has the function that power detecting element 3a, 3b is fixedly loaded on its inclined surface.First inclination With substantially cylindric shape when portion 21 is overlooked.As shown in Fig. 1 (c), the first rake 21 is with its inclined surface the first base of direction The mode in the outside in portion 2 is arranged, and the inclined surface of the first rake 21 is relative to 2 tilt angle φ of the first base portion.Angle φ is not It is particularly limited to, is arbitrarily set in the range of 0 < φ < pi/2.Wherein, the first rake 21 and the first base portion 2 are same, by having The material of relatively high rigidity is constituted, and is not deformed because of the external force applied to force checking device 1a.The composition of first rake 21 Material can be identical as the constituent material of the first base portion 2, can also be different.

On the inclined surface of the first rake 21, strong detecting element 3a, 3b are fixedly configured.That is, present embodiment Power detecting element 3a, 3b is relative to the inclined state configuration of the first base portion 2.In this case, as described later, can will be applied to The external force of force checking device 1a is decomposed into orthogonal multiple directions (the x, y, z direction in Fig. 1 (a)) to be detected.

In the composition of diagram, the first rake 21 is generally cylindrical component when overlooking, but the present invention and unlimited Due to this.As long as the first rake 21 can make power detecting element 3a, 3b relative to the fixed load of the inclined state of the first base portion 2 It sets, can be constituted to be arbitrary.For example, it is also possible to multiple (being in the present embodiment two) discontinuous first rakes 21 are located on the first base portion 2, and each power detecting element 3a, 3b is fixedly configured on the inclined surface of each first rake 21. It is formed in addition, the first base portion 2 can be used as component independent of each other with the first rake 21, also be may be integrally formed.

[the second base portion]

Second base portion 4 shown in FIG. 1 is arranged in the mode opposed with the first base portion 2, and force checking device 1a will be applied by having The external force added passes to the function of power detecting element 3a, 3b.Same as the first base portion 2, it is substantially in round that the second base portion 4, which is when overlooking, The flat component of shape shape.Second base portion 4 is made of the material with relatively high rigidity, not because to force checking device 1a The external force of application and deform.Therefore, the external force applied to force checking device 1a can be passed to power detecting element 3a, 3b.Separately Outside, the second base portion 4 has on the surface of the side opposed with the first base portion 2 of the second base portion 4 with corresponding with (edge) its periphery The second rake 41 that mode is arranged.

Second rake 41 has clamps (holding) power detection member with the first rake 21 being located on the first base portion 2 together The function of part 3a, 3b.Second rake 41 is arranged on position corresponding with the first rake 21 being set on the first base portion 2, bows Apparent time has substantially cylindric shape.Second rake 41 is set in such a way that its inclined surface is towards the central side of the second base portion 4 It sets, the inclined surface of the second rake 41 is relative to 4 tilt angle φ of the second base portion.Therefore, make the second base portion 4 and the first base portion 2 it is arranged opposite when, the inclined surface for the second rake 41 being located on the second base portion 4 be located on the first base portion 2 first inclination The inclined surface in portion 21 is parallel to each other.Therefore, the power detecting element of the fixed configurations on the inclined surface of the first rake 21 can be made 3a, 3b clamp (holding) between the inclined surface of the first rake 21 and the inclined surface of the second rake 41.

Wherein, the second rake 41 and the second base portion 4 are same, are made of the material with relatively high rigidity, not because right Force checking device 1a apply external force and deform.The constituent material of second rake 41 can be with the constituent material of the second base portion 4 It is identical, it can also be different.

In the composition of diagram, the second rake 41 be substantially cylindric component when overlooking, but the present invention and unlimited Due to this.As long as the second rake 41 can clamp together (holding) with the first rake 21 and fixedly be configured in the first inclination Power detecting element 3a, 3b on the inclined surface in portion 21, can be arbitrary composition.For example, it is also possible to multiple (in this implementation It is two in example) discontinuous second rake 41 is located at position corresponding with power detecting element 3a, 3b.In addition, the second base portion 4 It can be used as component independent of each other with the second rake 41 to be formed, also may be integrally formed.

[force checking device (element)]

Power detecting element 3a, 3b (first element 3a and second element 3b) shown in FIG. 1 have cuts according to what is be applied Shear force carrys out the function of output voltage V.

It is exported as shown in Fig. 2, power detecting element 3a, 3b have according to the shearing force being applied come the charge of output charge Q Element 31 and the conversion circuit 32 that the charge Q exported from charge output element 31 is converted to voltage V.

[charge output element]

Charge output element 31 shown in Fig. 3 has to be exported according to external force (shearing force) lai parallel with the β axis in Fig. 3 The function of charge Q.The tool of charge output element 31 is there are two ground electrode layer 310 and is located between two ground electrode layers 310 β axis sensor 320.Wherein, in Fig. 3, ground electrode layer 310 and β axis are set as γ with the stacking direction of sensor 320 And mutually orthogonal directions orthogonal with γ axis direction are set to α axis direction, β axis direction by axis direction.

In the composition of diagram, ground electrode layer 310 and β axis are with sensor 320 all with equal width (in figure Left and right directions length), but the present invention is not limited to this.For example, the width of ground electrode layer 310 can also be used than β axis The width of sensor 320 is wide, can also be opposite.

Ground electrode layer 310 is the electrode connecting with ground (reference potential point).Constitute the material of ground electrode layer 310 not It is particularly limited to, but is for example preferably gold, chromium, titanium, aluminium, copper, iron, nickel or the alloy comprising these metals.

β axis has according to the external force (shearing force) parallel with β axis with sensor 320 come the function of output charge Q.The β axis It is configured to export positive charge according to the external force of the positive direction along β axis with sensor 320, and is applied according to the negative direction along β axis The external force that adds exports negative electrical charge.That is, β axis has the charge according to the external force output being applied along β axis direction with sensor 320 Polaxis (detection direction) P β (that is, towards polaxis P β of the positive direction of β axis).

β axis sensor 320 includes the first piezoelectric body layer 321 and the first piezoelectric body layer 321 with the first crystallographic axis CA1 It is opposite disposed and with the second crystallographic axis CA2 the second piezoelectric body layer 323 and be located at the first piezoelectric body layer 321 and the second piezoelectricity Between body layer 323 and output charge Q output electrode layer 322.In addition, constituting the lamination order of each layer of β axis sensor 320 It is the sequence of the first piezoelectric body layer 321, output electrode layer 322, the second piezoelectric body layer 323 since the downside in Fig. 3.

First piezoelectric body layer 321 is by having the piezoelectrics of the first crystallographic axis CA1 of the negative direction for being oriented in β axis to constitute.Right The surface of first piezoelectric body layer 321 is applied in the case where the external force of the positive direction of β axis, due to piezoelectric effect, in the first pressure Charge is induced in electrics layer 321.As a result, 322 side surface of output electrode layer in the first piezoelectric body layer 321 has collected around Positive charge has collected around negative electrical charge in 310 side surface of ground electrode layer of the first piezoelectric body layer 321.Equally, it is pressed to first The surface of electrics layer 321 is applied in the case where the external force of the negative direction of β axis, in the output electrode of the first piezoelectric body layer 321 322 side surface of layer have collected around negative electrical charge, have collected around in 310 side surface of ground electrode layer of the first piezoelectric body layer 321 Positive charge.

Second piezoelectric body layer 323 is by having the piezoelectrics of the second crystallographic axis CA2 of the positive direction for being oriented in β axis to constitute.Right The surface of second piezoelectric body layer 323 is applied in the case where the external force of the positive direction of β axis, due to piezoelectric effect, in the second pressure Charge is induced in electrics layer 323.As a result, 322 side surface of output electrode layer in the second piezoelectric body layer 323 has collected around Positive charge has collected around negative electrical charge in 310 side surface of ground electrode layer of the second piezoelectric body layer 323.Equally, it is pressed to second The surface of electrics layer 323 is applied in the case where the external force of the negative direction of β axis, in the output electrode of the second piezoelectric body layer 323 322 side surface of layer have collected around negative electrical charge, have collected around in 310 side surface of ground electrode layer of the second piezoelectric body layer 323 Positive charge.

In this way, the direction of the first crystallographic axis CA1 of the first piezoelectric body layer 321 is brilliant towards second with the second piezoelectric body layer 323 The contrary direction of axis CA2.As a result, and by only any one of the first piezoelectric body layer 321 or the second piezoelectric body layer 323 The case where constituting β axis sensor 320 with output electrode layer 322 is compared, and can make to be gathered near output electrode layer 322 just Charge or negative electrical charge increase.As a result, it is possible to make the charge Q increase exported from output electrode layer 322.

Wherein, as the first piezoelectric body layer 321 and the constituent material of the second piezoelectric body layer 323, crystal, Huang can be enumerated Jade, barium titanate, lead titanates, lead zirconate titanate (PZT:Pb (Zr, Ti) O₃), lithium niobate, lithium tantalate etc..In these materials, especially It is preferred that crystal.This is because the piezoelectric body layer being made of crystal has wider dynamic range, higher rigidity, higher intrinsic The excellent characteristics such as frequency, higher bearing.In addition, as the first piezoelectric body layer 321 and the second piezoelectric body layer 323, The piezoelectric body layer for generating charge for the external force (shearing force) along the face direction of layer can be made of Y cutting crystal.

Output electrode layer 322 has the positive charge that will be generated in the first piezoelectric body layer 321 and in the second piezoelectric body layer 323 Or the function that negative electrical charge is exported as charge Q.As described above, to the first piezoelectric body layer 321 surface or second pressure The surface of electrics layer 323 is applied in the case where the external force of the positive direction of β axis, has been collected around just in output electrode layer 322 Charge.As a result, exporting positive charge Q from output electrode layer 322.On the other hand, to the first piezoelectric body layer 321 surface or The surface of the second piezoelectric body layer of person 323 is applied in the case where the external force of the negative direction of β axis, near output electrode layer 322 It is populated with negative electrical charge.As a result, the charge Q negative from the output of output electrode layer 322.

In this way, charge output element 31 is by with above-mentioned ground electrode layer 310 and β axis sensor 320, it can According to external force (shearing force) the output charge Q parallel with the β axis in Fig. 3.

In addition, as charge output element 31, to having according to the external force (shearing force) parallel with β axis come output charge Q The example of function be illustrated, but the present invention is not limited to this.It is different by using the differently- oriented directivity of the first crystallographic axis CA1 The first piezoelectric body layer 321 and the second crystallographic axis CA2 different the second piezoelectric body layer 323 of differently- oriented directivity, basis can be constituted The external force (shearing force) parallel with α axis carrys out the charge output element 31 of output charge Q.Such situation is also in the scope of the present invention It is interior.

[conversion circuit]

Conversion circuit 32 has the function that the charge Q exported from charge output element 31 is converted to voltage V.Conversion circuit 32 have operational amplifier 33, capacitor 34 and switch element 35.The first input end (negative input) of operational amplifier 33 It is connect with the output electrode layer 322 of charge output element 31, the second input terminal (positive input) and ground (base of operational amplifier 33 Quasi- potential point) connection.In addition, the output terminal of operational amplifier 33 is connect with external force detection circuit 5.Capacitor 34 is connected to fortune Between the first input end and output terminal for calculating amplifier 33.Switch element 35 is connected to the first input of operational amplifier 33 Between terminal and output terminal, and it is connected in parallel with capacitor 34.In addition, switch element 35 and driving circuit are (not shown) even It connects, according to the closure/cut-off signal for carrying out driving circuit, executes switch motion.

In the case where switch element 35 disconnects, the charge Q exported from charge output element 31 is put aside with direct capacitance The capacitor 34 of C1 is measured, and is exported to external force detection circuit 5 as voltage V.Next, the case where switch element 35 is closed Under, it is short-circuited between the two-terminal of capacitor 34.As a result, savings is discharged in the charge Q of capacitor 34 and becomes 0 coulomb, it is defeated The voltage V for arriving external force detection circuit 5 out becomes 0 volt.It is known as the closure of switch element 35 reset conversion circuit 32.

Switch element 35 be MOSFET (Metal Oxide Semiconductor Field Effect Transistor: Metal oxide layer semiconductor field effect transistor) etc. thyristors.Due to thyristor and mechanical switch Compared to small-sized and light-duty, so being conducive to the miniaturization and lightness of force checking device 1a.Hereinafter, as representative examples, to making MOSFET has been used as the case where switch element 35 to be illustrated.

Switch element 35 has drain electrode, source electrode and gate electrode.The drain electrode of switch element 35 or source electrode One connect with the first input end of operational amplifier 33, another and operational amplifier 33 of drain electrode or source electrode Output terminal connection.In addition, the gate electrode of switch element 35 is connect with driving circuit (not shown).

From ideal conversion circuit 32 export voltage V with from charge output element 31 export charge Q amount of savings at Ratio.However, the leakage current for flowing into capacitor 34 from switch element 35 can be generated in actual conversion circuit 32.It is such Leakage current becomes the output shift D that voltage V is included.Therefore, if it is the component of voltage proportional to the amount of savings of charge Q is (true Value) be set as Vt, then the voltage V exported becomes V=Vt+D.

Since output shift D becomes the error relative to measurement result, so there are the detection of power detecting element 3a, 3b essences Degree and detection resolution due to leakage current (output shift D) and reduce this problem.In addition, due to leakage current and measurement (driving) Time is proportionally accumulated, thus there are problems that can not extending force checking device 1a minute this.

Such leakage current is due in the deficiency of the insulating properties of gate insulating film, the miniaturization of process rule, semiconductor The use environments such as semiconductor structures and temperature, humidity such as the deviation of impurity concentration.Due to because being leaked caused by semiconductor structure Electric current becomes the intrinsic value of each switch element, so can be compared by measured in advance due to the leakage current of semiconductor structure Relatively easily compensate.However, since the leakage current due to use environment can change, institute according to use environment (situation) To compensate difficulty.Force checking device 1a according to the present invention using power detecting element (element) 3a, the 3b for constituting element pair and The external force detection circuit 5 that external force is detected based on voltage V1, V2 of each output from power detecting element 3a, 3b can make to leak Influence (output shift D) caused by electric current reduces.

Next, referring to Fig.1, being described in detail to the positional relationship of power detecting element 3a, 3b for constituting element pair.Wherein, In Fig. 1 (b), in order to illustrate and the second base portion 4 is omitted.In addition, left and right directions is set as x-axis direction in Fig. 1 (b), it will Direction, the i.e. up and down direction orthogonal with x-axis direction is set as y-axis direction, and the direction orthogonal with x-axis and y-axis is set as z-axis side To.Also, A line will be set as by the straight line at the center of power detecting element 3a, 3b in Fig. 1 (b).Fig. 1 (c) is along Fig. 1's (b) The cross-sectional view of A line.

Power detecting element 3a has the polaxis P β 1 along above-mentioned β axis, and is exported according to the external force (shearing force) along β axis Voltage V1.Equally, power detecting element 3b has the polaxis P β 2 along above-mentioned β axis, and according to the external force (shearing force) along β axis Output voltage V2.

Power detecting element 3a, 3b are fixedly configured respectively on the inclined surface of the first rake 21, and clamping (holding) exists Between first rake 21 and the second rake 41.That is, power detecting element 3a, 3b is relative to 2 tilt angle φ of the first base portion State be arranged between the first base portion 2 and the second base portion 4.

The polaxis P β 1 of power detecting element 3a has the angle, θ 1 of horizontal direction (x/y plane).Equally, power detecting element 3b Polaxis P β 2 have horizontal direction angle, θ 2.Wherein, angle, θ 1, θ 2 are the frame of reference (x-axis, the y of distance map 1 (b) Axis, z-axis) x-axis angle.Also, as shown in Fig. 1 (c), polaxis P β 1, the P β 2 of power detecting element 3a, 3b are respectively provided with vertical Angle φ of the histogram to (plane comprising z-axis direction).Wherein, angle φ is that the xy of the frame of reference relative to Fig. 1 (b) is flat The angle in face.

As shown in Fig. 1 (b), power detecting element 3a, 3b are configured to the horizontal component of the polaxis P β 1 of power detecting element 3a The horizontal component direction facing opposite to each other of the polaxis P β 2 of (x, y-component) and power detecting element 3b.It is mentioned here " each other Towards opposite direction " it is not limited to as Fig. 1 (b), the horizontal component of polaxis P β 1 and the horizontal component of polaxis P β 2 The case where opposed situation, i.e. angle, θ 1, θ 2 meet the relationship of θ 1=θ 2.As long as at least by the horizontal component of polaxis P β 1 And each vector component for being decomposed into orthogonal x-axis direction of the horizontal component of polaxis P β 2 and the vector in y-axis direction divide When amount, the vector component of the x-axis direction of the vector component and polaxis P β 2 of the x-axis direction of polaxis P β 1 is opposite direction, or Person, the vector component in the y-axis direction of the vector component and polaxis P β 2 in the y-axis direction of polaxis P β 1 are opposite direction.

Additionally, it is preferred that power detecting element 3a, 3b are configured to the vector component and polaxis P of the x-axis direction of polaxis P β 1 The vector component of the x-axis direction of β 2 is the vector component and polaxis P β 2 of opposite direction and the y-axis direction of polaxis P β 1 The vector component in y-axis direction is opposite direction, meets | θ 1- θ 2 | the relationship of < pi/2.Thereby, it is possible to detect aftermentioned shearing Power Fx, Fy.In the following description, as representative, power detecting element 3a, 3b are configured to meet | θ 1- θ 2 | < pi/2 The case where relationship, is illustrated.

Additionally, it is preferred that power detecting element 3a, 3b are configured to the horizontal component of polaxis P β 1 and the level of polaxis P β 2 Component is opposed, meets the relationship of θ 1=θ 2.Aftermentioned external force detection circuit 5 can be further reduced output shift D as a result, While, detect shearing force Fx, Fy.

As long as in addition, being configured to the horizontal component of the polaxis P β 1 of power detecting element 3a and the pole of power detecting element 3b Change the horizontal component direction facing opposite to each other of axis P β 2, the configuration of power detecting element 3a, 3b are not particularly limited, but excellent As shown in Fig. 1 (b), power detecting element 3a and power detecting element 3b are configured on same axis (A line) for choosing.Thereby, it is possible to unbiased Poorly detect the shearing force (external force of x-axis, y-axis in figure) that the first base portion 2 or the second base portion 4 are applied.

In addition, the horizontal component of the polaxis P β 1 of the power detecting element 3a of Fig. 1 (b) and the polarization of power detecting element 3b The horizontal component of axis P β 2 is towards the outside (centrifugal direction) of the first base portion 2, but the present invention is not limited to this.That is, if with power The horizontal component of the polaxis P β 2 of the horizontal component and power detecting element 3b of the polaxis P β 1 of detecting element 3a phase towards each other The mode of opposite direction configures, then the polaxis P of the horizontal component of the polaxis P β 1 of power detecting element 3a and power detecting element 3b The horizontal component of β 2 can also be towards the center position (centripetal direction) of the first base portion 2.

If by the voltage proportional to the amount of savings of charge Q 1 exported from the charge output element 31 of power detecting element 3a Component (true value) is set as Vt1, by with the amount of savings of the charge Q 2 exported from the charge output element 31 of power detecting element 3b at than The component of voltage (true value) of example is set as Vt2, then exports from the power detecting element 3a voltage V1 exported and from power detecting element 3b Voltage V2 it is for example following.

[number 1]

V1=Vt1+D

V2=Vt2+D

Wherein, the switch element 35 of power detecting element 3a is the semiconductor being equal with the switch element 35 of power detecting element 3b Switch element, leakage current are substantially equal.Therefore, the output that the output shift D and voltage V2 that voltage V1 is included are included Drift D is substantially equal." being substantially equal " mentioned here refers to when achieving the residual quantity of two be compared value, should Residual quantity is small to can ignore that compared with original value.

In addition, since power detecting element 3a, 3b is with the horizontal component of the polaxis P β 1 of power detecting element 3a and power detection member The mode in the horizontal component direction facing opposite to each other of the polaxis P β 2 of part 3b configures, so the voltage point that voltage V1 is included The horizontal component for the component of voltage Vt2 that the symbol and voltage V2 for measuring the horizontal component (that is, Vt1 × cos (φ)) of Vt1 are included The symbol of (that is, Vt2 × cos (φ)) is inconsistent.For example, if the symbol of the horizontal component of component of voltage Vt1 is positive, voltage point The symbol for measuring the horizontal component of Vt2 is negative.Equally, if the symbol of the horizontal component of component of voltage Vt1 is negative, component of voltage The symbol of the horizontal component of Vt2 is positive.Therefore, achieve from power detecting element 3a export voltage V1 horizontal component (that is, V1 × cos (φ)) with from power detecting element 3b export voltage V2 horizontal component (that is, V2 × cos (φ)) residual quantity feelings Under condition, the horizontal component of component of voltage Vt1 is not reduced with the absolute value of the residual quantity of the horizontal component of component of voltage Vt2.

On the other hand, the output shift D and the horizontal component of voltage V2 for being included by the horizontal component of voltage V1 are wrapped The output shift D contained is not dependent on the direction of polaxis P β 1, P β 2, so the output shift that the horizontal component of voltage V1 is included The symbol of D is consistent with the symbol of output shift D that the horizontal component of voltage V2 is included.Therefore, it is achieving from power detection member The case where residual quantity of the horizontal component of the voltage V1 of part 3a output and the horizontal component of the voltage V2 exported from power detecting element 3b Under, the residual quantity for the output shift D that the horizontal component of output shift D and voltage V2 that the horizontal component of voltage V1 is included are included Absolute value reduce.

[external force detection circuit]

External force detection circuit 5 has based on voltage V1, He Congli detecting element 3b output exported from power detecting element 3a Voltage V2, to detect the shearing force (x-axis in figure, the external force of y-axis) and compression/stretching that are applied to force checking device 1a The function of power Fz.

External force detection circuit 5 is able to detect by the residual quantity of acquirement voltage V1, V2 as described below and is applied to power detection dress Set shearing force Fx, Fy of 1a.In addition, since power detecting element 3a, 3b is obliquely arranged relative to the first base portion 2, so external force Detection circuit 5 can detect the compression/drawing force Fz for being applied to force checking device 1a based on voltage V1, V2.

[number 2]

In this way, being exported achieving from the horizontal component of the power detecting element 3a voltage V1 exported with from power detecting element 3b Voltage V2 horizontal component residual quantity in the case where, the horizontal component of the horizontal component of component of voltage Vt1 and component of voltage Vt2 The absolute value of residual quantity do not reduce, the absolute value of output shift D is reduced.Therefore, the output drift in shearing force Fx, Fy can be reduced Move D.As a result, the detection error due to leakage current (output shift D) becomes smaller relatively in shearing force Fx, Fy, can be improved Detection accuracy and detection resolution of the force checking device 1a to shearing force Fx, Fy.In addition, due to above-mentioned output shift D's Reduction method is also effective in the case where minute is elongated, so being able to extend the minute of force checking device 1a.

Also, in the case where angle, θ 1, θ 2 meet 2 θ θ 1=, i.e. power detecting element 3a, 3b be with the level of polaxis P β 1 In the case that the component mode opposed with the horizontal component of polaxis P β 2 configures, above-mentioned calculating formula is simplified, as described below.

[number 3]

Fx=(Vt1-Vt2) coc φ cos θ 1

Fy=(Vt1-Vt2) cos φ sin θ 1

Fz=(Vt1+Vt2+2D) sin φ

In this case, the output shift D in shearing force Fx, Fy can be removed and (is further reduced).As a result, it is possible into one Step improves force checking device 1a to the detection accuracy and detection resolution of shearing force Fx, Fy.In addition, can further extend power The minute of detection device 1a.

In this way, since force checking device 1a of the invention has with the horizontal component of the polaxis P β 1 of power detecting element 3a The power detecting element 3a that is configured with the mode in the horizontal component direction facing opposite to each other of the polaxis P β 2 of power detecting element 3b, 3b and the horizontal component by acquirement from the power detecting element 3a voltage V1 exported and the voltage V2 from power detecting element 3b output Horizontal component residual quantity detect the external force detection circuit 5 of shearing force Fx, Fy for being applied to force checking device 1a, so can subtract Output shift D caused by few leakage current because of the switch element 35 of conversion circuit 32.As a result, it is possible to improve force checking device 1a To the detection accuracy and detection resolution of shearing force Fx, Fy.In addition, since the reduction method of above-mentioned output shift D is being surveyed Fix time it is elongated in the case where also effectively, so being able to extend the minute of force checking device 1a.Also, involved by the present invention And force checking device 1a in, as not needing for reducing the circuit of output shift D as reverse bias circuit, so energy Enough minimize force checking device 1a.

Also, since power detecting element 3a, 3b is tilted relative to the first base portion 2, so can be based on from power detecting element The vertical component (that is, V1 × sin (φ)) of the voltage V1 of 3a output, the vertical of voltage V2 of He Congli detecting element 3b output are divided It measures (that is, V2 × sin (φ)), to detect the compression/drawing force Fz for being applied to force checking device 1a.

In addition, the force checking device 1a of present embodiment has a pair of of power detecting element 3a, 3b, but the present invention does not limit In this.Force checking device 1a also can have multipair power detecting element 3a, 3b, and such situation is also within the scope of the invention.

(second embodiment)

Next, being illustrated referring to force checking device of the Fig. 4 to second embodiment.Hereinafter, for the second embodiment party Formula is illustrated centered on the difference of above-mentioned first embodiment, and for identical item, the description thereof will be omitted.Fig. 4 It (a) is the perspective view for briefly expressing the second embodiment of force checking device according to the present invention.Fig. 4 (b) is to briefly express The cross-sectional view of the second embodiment of force checking device according to the present invention.

The force checking device 1b of second embodiment in addition to the first rake 21 relative to the angle φ of the first base portion 2 and Second rake 41 is pi/2 and power detecting element 3a, 3b with power detecting element 3a's relative to the angle φ of the second base portion 4 The polaxis P β 2 of polaxis P β 1 and power detecting element 3b is in vertical direction (the stacking side of the first base portion 2 and the second base portion 4 To) on towards opposite direction mode configure other than, have it is identical with the force checking device 1a of above-mentioned first embodiment It constitutes.

In the present embodiment, angle φ and second rake 41 of first rake 21 relative to the first base portion 2 Angle φ relative to the second base portion 4 is pi/2.That is, power detecting element 3a, 3b is set with the state vertical relative to the first base portion 2 It sets.In this case, the first rake 21 and the second rake 41 become cylinder-like part.Power detecting element 3a, 3b are clamped (holding) is between the peripheral part of the first rake 21 and the inner peripheral portion of the second rake 41.

As shown in Fig. 4 (b), power detecting element 3a, 3b is with the polaxis P β's 1 of power detecting element 3a and power detecting element 3b The vertical component of polaxis P β 2 is configured towards the mode of opposite direction in vertical direction.

Since power detecting element 3a, 3b is with the polaxis P β 2 of the polaxis P β 1 of power detecting element 3a and power detecting element 3b It is configured in vertical direction towards the mode of opposite direction, so component of voltage Vt1 and voltage V2 packet that voltage V1 is included The symbol of the component of voltage Vt2 contained is inconsistent.For example, if the symbol of component of voltage Vt1 is positive, the symbol of component of voltage Vt2 It is negative.Equally, if the symbol of component of voltage Vt1 is negative, the symbol of component Vt2 is pressed to be positive.Therefore, it is achieving from power detection In the case where the residual quantity of the voltage V1 of element 3a output and the voltage V2 from power detecting element 3b output, component of voltage Vt1 and electricity The absolute value of the residual quantity of component Vt2 is pressed not reduce.

External force detection circuit 5 passes through the voltage V1 for obtaining export from power detecting element 3a as described below and detects member with from power The residual quantity of the voltage V2 of part 3b output, is able to detect the compression/drawing force Fz for being applied to force checking device 1b.

[number 4]

Fz=V1-V2

=(Vt1+D)-(Vt2+D)

=Vt1-Vt2

In this way, being examined since the force checking device 1b of present embodiment has with the polaxis P β 1 of power detecting element 3a and power Survey power detecting element 3a, 3b and pass through that the polaxis P β 2 of element 3b is configured towards the mode of opposite direction in vertical direction It obtains the voltage V1 exported from power detecting element 3a and the residual quantity of the voltage V2 exported from power detecting element 3b is applied to detect The compression of force checking device 1b/drawing force Fz external force detection circuit 5, so the switch element because of conversion circuit 32 can be reduced Output shift D caused by 35 leakage current.As a result, it is possible to improve force checking device 1b to compression/drawing force Fz detection essence Degree and detection resolution.

In addition, in the composition of diagram, the polaxis P β 1 of power detecting element 3a is towards downside in Fig. 4, power detecting element 3b Polaxis P β 2 towards upside in Fig. 4, but the present invention is not limited to this.For example, it can be the polarization of power detecting element 3a Axis P β 1 is towards upside in Fig. 4, and the polaxis P β 2 of power detecting element 3b is towards downside in Fig. 4.

(third embodiment)

Next, being illustrated based on Fig. 5, Fig. 6 and Fig. 7 to third embodiment of the present invention.Hereinafter, for third Embodiment is illustrated centered on the difference of above-mentioned first and second embodiment, for identical item, The description thereof will be omitted.

Fig. 5 (a) is the perspective view for briefly expressing the third embodiment of force checking device according to the present invention.Fig. 5 (b) It is the top view for briefly expressing the third embodiment of force checking device according to the present invention.Fig. 5 (c) is along shown in Fig. 5 (b) A1 line cross-sectional view.Fig. 5 (d) is the cross-sectional view of the A2 line shown in Fig. 5 (b).Fig. 6 is to briefly express power inspection shown in fig. 5 Survey the circuit diagram of device.Fig. 7 (a) is the cross-sectional view for briefly expressing the charge output element of the first force checking device shown in fig. 5. Fig. 7 (b) is the cross-sectional view for briefly expressing the charge output element of the second force checking device shown in fig. 5.

As shown in figure 5, the force checking device 1c of third embodiment have six axle powers of detection (x, y, z axis direction and Into force component and around the rotation force component of x, y, z axis) function.Force checking device 1c has the first base portion 2 and the first base portion 2 the second opposed base portions 4, with relative to the first base portion 2 inclination or vertical state be located at the first base portion 2 and the second base portion 4 Between and according to external force come output voltage V α, V β, V γ power detecting element (element) 30a, 30b, 30c, 30d and based on from Voltage V α, V β, the V γ of each output of power detecting element 30a, 30b, 30c, 30d are electric come the external force detection for detecting six axle powers Road 50 (it is not shown in Fig. 5, referring to Fig. 6).

Wherein, the first rake 21 for being arranged on the surface of the side opposed with the second base portion 4 of the first base portion 2 and The second rake 41 being arranged on the surface of the side opposed with the first base portion 2 of second base portion 4 has other than following point Composition identical with above-mentioned first embodiment.That is, in the first embodiment, the inclined surface of the first rake 21 relative to The angle φ (angle φ that the inclined surface of the second rake 41 has relative to the second base portion 4) that first base portion 2 has is in 0 < φ It is arbitrarily set in the range of < pi/2, and in the present embodiment, angle φ is arbitrarily set in the range of 0≤φ≤pi/2.

In other words, in present embodiment, in addition to as above-mentioned first embodiment, aftermentioned power detecting element 30a, Except the case where 30b, 30c, 30d are with relative to the configuration of the inclined state of the first base portion 2 (the case where 0 < φ < pi/2), also include The case where power detecting element 30a, 30b, 30c, 30d is configured with the state parallel relative to the first base portion 2 (the case where φ=0), And as above-mentioned second embodiment, power detecting element 30a, 30b, 30c, 30d is with vertical relative to the first base portion 2 The case where state configures (the case where φ=pi/2).

The case where power detecting element 30a, 30b, 30c, 30d is with the state configuration parallel relative to the first base portion 2 (φ= 0 the case where) under, due to can lower inhibit the height of force checking device 1c, so being conducive to the small-sized of force checking device 1c Change.In addition, the case where power detecting element 30a, 30b, 30c, 30d relative to the inclined state of the first base portion 2 to configure (0 < φ < pi/2) the case where being configured with power detecting element 30a, 30b, 30c, 30d with the state vertical relative to the first base portion 2 (φ=π/ 2) it compares, also can lower inhibit the height of force checking device 1c.

On the other hand, in power detecting element 30a, 30b, 30c, 30d relative to the inclination of the first base portion 2 or vertical shape Under the case where state configures (the case where 0 < φ < pi/2 and φ=pi/2), due to as described later, in addition to from power detecting element Except voltage V α, the V β of each output of 30a, 30b, 30c, 30d, additionally it is possible to calculated using voltage V γ shearing force (Fx, Fy), also, other than voltage V γ, additionally it is possible to compression/drawing force (Fx) is calculated using voltage V β, so can be more accurate Detect six axle powers in ground.

Also, in power detecting element 30a, 30b, 30c, 30d to match relative to the inclination of the first base portion 2 or vertical state It is identical with first embodiment under the case where setting (the case where 0 < φ < pi/2 and φ=pi/2), it can be detected according to from each power The voltage V β of element output, to calculate compression/drawing force (Fx).Therefore, the electricity exported from each power detecting element can be used only V α, V β is pressed to detect six axle powers.In this way, by the way that the voltage V α, the V β that export from each power detecting element is used only, can reduce because Deformation caused by temperature change of first base portion 2 and the second base portion 4 etc. adds power detecting element 30a, 30b, 30c, 30d The influence of buckling, while detecting six axle powers.

That is, in the case where the first base portion 2 and the second base portion 4 are deformed because of temperature change etc., for power detecting element The pressurization of 30a, 30b, 30c, 30d change.Pressurization variation is used as noise component(s), is contained in voltage V α, V β, V γ (charge Qα,Qβ,Qγ).As described later, due to the voltage V γ (charge Q of each output from power detecting element 30a, 30b, 30c, 30d It is γ) smaller compared with voltage V α, V β (charge Q α, Q β), so be directed to the noise component(s) due to temperature change of voltage V γ It is affected.

Therefore, it by the way that each voltage V α, V β for exporting from each power detecting element is used only, can reduce because of the first base The pressurization to power detecting element 30a, 30b, 30c, 30d of deformation caused by temperature change of portion 2 and the second base portion 4 etc. changes Influence, while detect six axle powers.

It is connected in addition, connecting utensil by compression screw etc. between the first base portion 2 and the second base portion 4, member is detected to power Part 30a, 30b, 30c, 30d apply pressurization.At this point, in power detecting element 30a, 30b, 30c, 30d to hang down relative to the first base portion 2 In the case where straight state configuration (in the case where φ=pi/2), since each power detecting element hangs down completely relative to the first base portion 2 Directly, so to the lower direction of rigidity of general connection utensil (for example, the side that the hand of spiral relative to compression screw is vertical To) apply external force the case where it is more.Therefore, from connection utensil rigidity from the viewpoint of, power detecting element 30a, 30b, 30c, 30d with relative to the first base portion 2 is parallel or the configuration of inclined state the case where (the case where φ=0 and 0 < φ < pi/2) It is more advantageous.

[power detecting element (element)]

Power detecting element 30a, 30b, 30c, 30d have according to along the outer of mutually orthogonal three axis (α axis, β axis, γ axis) Power it is each come output voltage V α, V β, V γ function.In addition, power detecting element 30a, 30c constitute first element pair, power detection Element 30b, 30d constitute second element pair.Belong to power detecting element 30a, 30c of first element pair structure having the same each other At.Belong to power detecting element 30b, 30d of second element pair composition having the same each other.

As shown in fig. 6, power detecting element 30a, 30c for belonging to first element pair have according to along three mutually orthogonal axis The external force that (α axis, β axis, γ axis) is applied come output charge Q α, Q β, Q γ the first charge output element 301a, will be from first Charge output element 301a output charge Q α be converted to voltage V α conversion circuit 32a, will be from the first charge output element The charge Q γ of 301a output is converted to the conversion circuit 32b of voltage V γ and will export from the first charge output element 301a Charge Q β is converted to the conversion circuit 32c of voltage V β.Belong to power detecting element 30b, 30d of second element pair in addition to having and the Except the point of the second different charge output element 301b of one charge output element 301a structure, has and belong to first element pair The identical composition of power detecting element 30a, 30c.

[charge output element]

First charge output element 301a shown in Fig. 7 (a) has according to three axis (α axis, β mutually orthogonal along Fig. 7 Axis, γ axis) external force it is each come output charge Q α, Q β, Q γ function.As shown in Fig. 7 (a), the first charge output element 301a have the four grounded electrode layer 310 connected with ground (reference potential point), according to the external force (shearing force) parallel with β axis come The first β axis sensor 320 of output charge Q β, according to the external force (compression/drawing force) parallel with γ axis come output charge Q γ The first γ axis sensor 330 and according to the external force (shearing force) parallel with α axis come output charge Q α the first α axis use Sensor 340, ground electrode layer 310 and each sensor 320,330,340 are alternately laminated.Wherein, in Fig. 7, by grounding electrode Layer 310 and the stacking direction of each sensor 320,330,340 are set as γ axis direction, will be orthogonal with γ axis direction and each other just The direction of friendship is set to α axis direction, β axis direction.

In the composition of diagram, since the downside in Fig. 7, sensed with the first β axis sensor 320, the first γ axis The sequence stacking of device 330, the first α axis sensor 340, but the present invention is not limited to this.Each sensor 320,330,340 Lamination order is arbitrary.

First β axis has according to the external force (shearing force) parallel with β axis with sensor 320 come the function of output charge Q β. First β axis sensor 320 have the function of structure identical with the β axis sensor 320 of above-mentioned first embodiment and.

First γ axis has according to the external force (compression/drawing force) parallel with γ axis with sensor 330 come output charge Q γ Function.First γ axis is configured to export positive charge according to the external force of the positive direction along γ axis with sensor 330, according to along γ External force that the negative direction of axis applies exports negative electrical charge.That is, the first γ axis has with sensor 330 according to the γ axis in Fig. 7 Polaxis (detection direction) the P γ of the charge of external force that direction is applied output is (that is, towards the positive direction of the γ axis in Fig. 7 Polaxis P γ).

First γ axis sensor 330 includes third piezoelectric body layer 331 and third piezoelectrics with third crystallographic axis CA3 Layer 331 is opposite disposed and has the four piezoelectrics layer 333 of the 4th crystallographic axis CA4 and is located at third piezoelectric body layer 331 and the 4th Between piezoelectric body layer 333 and output charge Q γ output electrode layer 332.In addition, constituting each of the first γ axis sensor 330 Layer lamination order be third piezoelectric body layer 331 since the downside in Fig. 7, output electrode layer 332, four piezoelectrics layer 333 Sequence.

Third piezoelectric body layer 331 is by having the piezoelectrics of the third crystallographic axis CA3 for the positive direction for being oriented in γ axis to constitute.Right The surface of third piezoelectric body layer 331 is applied in the case where the external force of the positive direction of γ axis, due to piezoelectric effect, in third pressure Charge is induced in electrics layer 331.As a result, 332 side surface of output electrode layer in third piezoelectric body layer 331 has collected around Positive charge has collected around negative electrical charge in 310 side surface of ground electrode layer of third piezoelectric body layer 331.Equally, to third pressure In the case that the surface of electrics layer 331 is applied with the external force applied along the negative direction of γ axis, in the output of third piezoelectric body layer 331 332 side surface of electrode layer has collected around negative electrical charge, gathers near 310 side surface of ground electrode layer of third piezoelectric body layer 331 Collection has positive charge.

Four piezoelectrics layer 333 is by having the piezoelectrics of the 4th crystallographic axis CA4 of the negative direction for being oriented in γ axis to constitute.Right The surface of four piezoelectrics layer 333 is applied in the case where the external force of the positive direction of γ axis, due to piezoelectric effect, in the 4th pressure Charge is induced in electrics layer 333.As a result, 332 side surface of output electrode layer in four piezoelectrics layer 333 has collected around Positive charge has collected around negative electrical charge in 310 side surface of ground electrode layer of four piezoelectrics layer 333.Equally, it is pressed to the 4th In the case that the surface of electrics layer 333 is applied with the external force being applied along the negative direction of γ axis, in the defeated of four piezoelectrics layer 333 332 side surface of electrode layer has collected around negative electrical charge out, near 310 side surface of ground electrode layer of four piezoelectrics layer 333 It is populated with positive charge.

As third piezoelectric body layer 331 and the constituent material of four piezoelectrics layer 333, it is able to use and the first piezoelectrics Layer 321 and the identical constituent material of the second piezoelectric body layer 323.In addition, such as third piezoelectric body layer 331 and four piezoelectrics layer 333 like that, and the piezoelectric body layer for generating charge for the external force (compression/drawing force) vertical with the face direction of layer can be cut by X Crystal is constituted.

Output electrode layer 332 has the positive charge that will be generated in third piezoelectric body layer 331 and in four piezoelectrics layer 333 Or the function that negative electrical charge is exported as charge Q γ.As described above, on the surface or the 4th to third piezoelectric body layer 331 The surface of piezoelectric body layer 333 is applied in the case where the external force of the positive direction of γ axis, has been collected around in output electrode layer 332 Positive charge.As a result, exporting positive charge Q γ from output electrode layer 332.On the other hand, in the table to third piezoelectric body layer 331 In the case that face or the surface of four piezoelectrics layer 333 are applied with the external force being applied along the negative direction of γ axis, in output electricity Pole layer 332 has collected around negative electrical charge.As a result, the charge Q γ negative from the output of output electrode layer 332.

First α axis has according to the external force (shearing force) parallel with α axis with sensor 340 come the function of output charge Q α. First α axis is configured to export positive charge according to the external force of the positive direction along α axis with sensor 340, according to the negative direction along α axis The external force of application exports negative electrical charge.That is, the first α axis sensor 340 has according to the outer of the α axis direction application in Fig. 7 Polaxis (detection direction) the P α (that is, towards polaxis P α of the positive direction of the α axis in Fig. 7) of the charge of power output.

First α axis sensor 340 includes the 5th piezoelectric body layer 341 and the 5th piezoelectrics with the 5th crystallographic axis CA5 Layer 341 is opposite disposed and has the 6th piezoelectric body layer 343 of the 6th crystallographic axis CA6 and is located at the 5th piezoelectric body layer 341 and the 6th Between piezoelectric body layer 343 and output charge Q α output electrode layer 342.In addition, constituting each layer of the first α axis sensor 340 Lamination order since the downside in Fig. 7 be the 5th piezoelectric body layer 341, output electrode layer 342, the 6th piezoelectric body layer 343 Sequentially.

5th piezoelectric body layer 341 is by having the piezoelectrics of the 5th crystallographic axis CA5 of the negative direction for being oriented in α axis to constitute.Right The surface of 5th piezoelectric body layer 341 is applied in the case where the external force of the positive direction of α axis, due to piezoelectric effect, in the 5th pressure Charge is induced in electrics layer 341.As a result, 342 side surface of output electrode layer in the 5th piezoelectric body layer 341 has collected around Positive charge has collected around negative electrical charge in 310 side surface of ground electrode layer of the 5th piezoelectric body layer 341.Equally, it is pressed to the 5th The surface of electrics layer 341 is applied in the case where the external force of the negative direction of α axis, in the output electrode of the 5th piezoelectric body layer 341 342 side surface of layer have collected around negative electrical charge, have collected around in 310 side surface of ground electrode layer of the 5th piezoelectric body layer 341 Positive charge.

6th piezoelectric body layer 343 is by having the piezoelectrics of the 6th crystallographic axis CA6 of the positive direction for being oriented in α axis to constitute.Right The surface of 6th piezoelectric body layer 343 is applied in the case where the external force of the positive direction of α axis, due to piezoelectric effect, in the 6th pressure Charge is induced in electrics layer 343.As a result, 342 side surface of output electrode layer in the 6th piezoelectric body layer 343 has collected around Positive charge has collected around negative electrical charge in 310 side surface of ground electrode layer of the 6th piezoelectric body layer 343.Equally, it is pressed to the 6th The surface of electrics layer 343 is applied in the case where the external force of the negative direction of α axis, in the output electrode of the 6th piezoelectric body layer 343 342 side surface of layer have collected around negative electrical charge, have collected around in 310 side surface of ground electrode layer of the 6th piezoelectric body layer 343 Positive charge.

As the 5th piezoelectric body layer 341 and the constituent material of the 6th piezoelectric body layer 343, it is able to use and the first piezoelectrics Layer 321 and the identical constituent material of the second piezoelectric body layer 323.In addition, such as the 5th piezoelectric body layer 341 and the 6th piezoelectric body layer 343 like that, and the piezoelectric body layer for generating charge for the external force (shearing force) along the face direction of layer can be with the first piezoelectric body layer 321 And second piezoelectric body layer 323 be similarly made of Y cutting crystal.

Output electrode layer 342 has the positive charge that will be generated in the 5th piezoelectric body layer 341 and in the 6th piezoelectric body layer 343 Or the function that negative electrical charge is exported as charge Q α.As described above, to the 5th piezoelectric body layer 341 surface or the 6th pressure The surface of electrics layer 343 is applied in the case where the external force of the positive direction of α axis, has been collected around just in output electrode layer 342 Charge.As a result, exporting positive charge Q α from output electrode layer 342.On the other hand, on the surface to the 5th piezoelectric body layer 341 Or the 6th the surface of piezoelectric body layer 343 be applied in the case where the external force of the negative direction of α axis, it is attached in output electrode layer 342 Closely it is populated with negative electrical charge.As a result, the charge Q α negative from the output of output electrode layer 342.

First β axis sensor 320, the first γ axis sensor 330 and the first α axis sensor 340 are with the first β The direction of the polaxis P β of axis sensor 320, the direction of the polaxis P γ of the first γ axis sensor 330 and the first α The mode that the direction of the polaxis P α of axis sensor 340 is orthogonal is laminated.The first charge output element 301a can have as a result, There are three polaxis P α, P β, P γ, three electricity can be exported according to each of the external force along three axis (α axis, β axis, γ axis) Lotus Q α, Q β, Q γ.

Next, referring to Fig. 7 (b), to belonging to the second charge possessed by power detecting element 30b, 30d of second element pair Output element 301b is described in detail.Second charge output element 301b shown in Fig. 7 (b) have according in Fig. 7 each other just Hand over three axis (α axis, β axis, γ axis) external force it is each come output charge Q α, Q β, Q γ function.As shown in Fig. 7 (b), the Two charge output element 301b have the four grounded electrode layer 310 connected with ground (reference potential point), according to parallel with β axis External force (shearing force) carrys out the 2nd β axis sensor 350 of output charge Q β, according to the external force (compression/stretching parallel with γ axis Power) carry out the 2nd γ axis sensor 360 of output charge Q γ and electricity is exported according to the external force (shearing force) parallel with α axis The 2nd α axis sensor 370 of lotus Q α, ground electrode layer 310 and each sensor 350,360,370 are alternately laminated.

Therefore, the second charge output element 301b is in addition to having and the first β axis different the 2nd β of 320 structure of sensor Axis sensor 350, the twoth γ axis sensor 360 different from the first γ axis 330 structures of sensor and with the first α Except point of the axis with the 2nd different α axis sensor 370 of 340 structure of sensor, have and the first charge output element 301a Identical structure.Wherein, in Fig. 7, the stacking direction of ground electrode layer 310 and each sensor 350,360,370 is set as And mutually orthogonal directions orthogonal with γ axis direction are set to α axis direction, β axis direction by γ axis direction.

In the composition of diagram, since the downside in Fig. 7, sensed with the 2nd β axis sensor 350, the 2nd γ axis The sequence stacking of device 360, the 2nd α axis sensor 370, but the present invention is not limited to this.Each sensor 350,360,370 Lamination order is arbitrary.

2nd β axis has according to the external force (shearing force) parallel with β axis with sensor 350 come the function of output charge Q β. 2nd β axis is configured to export negative electrical charge according to the external force of the positive direction along β axis with sensor 350, according to the negative direction along β axis The external force of application exports positive charge.It is applied that is, the 2nd β axis has with sensor 350 according to the β axis direction in Fig. 7 Polaxis (detection direction) the P β (that is, towards polaxis P β of the negative direction of the β axis in Fig. 7) of the charge of external force output.Therefore, The direction phase of the direction direction and the polaxis P β of the first β axis sensor 320 of the polaxis P β of 2nd β axis sensor 350 Anti- direction.

2nd β axis sensor 350 includes the second piezoelectric body layer 323 and the second piezoelectrics with the second crystallographic axis CA2 Layer 323 is opposite disposed and has the first piezoelectric body layer 321 of the first crystallographic axis CA1 and is located at the second piezoelectric body layer 323 and first Between piezoelectric body layer 321 and output charge Q β output electrode layer 322.In addition, constituting each layer of the 2nd β axis sensor 350 Stacking compliance Fig. 7 in downside start for the second piezoelectric body layer 323, output electrode layer 322, the first piezoelectric body layer 321 it is suitable Sequence.Therefore, the 2nd β axis is with sensor 350 in addition to the second piezoelectric body layer 323, output electrode layer 322, first piezoelectric body layer 321 Except lamination order, have and the first β axis identical structure of sensor 320.

In the case where the surface to the second piezoelectric body layer 323 is applied with along the external force of the positive direction of β axis, since piezoelectricity is imitated It answers, induces charge in the second piezoelectric body layer 323.As a result, in the 322 side table of output electrode layer of the second piezoelectric body layer 323 Face has collected around negative electrical charge, has collected around positive charge in 310 side surface of ground electrode layer of the second piezoelectric body layer 323.Together Sample, in the case where the surface to the second piezoelectric body layer 323 is applied with along the external force of the negative direction of β axis, in the second piezoelectric body layer 323 322 side surface of output electrode layer has collected around positive charge, in the 310 side table of ground electrode layer of the second piezoelectric body layer 323 Face has collected around negative electrical charge.

In the case where the surface to the first piezoelectric body layer 321 is applied with along the external force of the positive direction of β axis, since piezoelectricity is imitated It answers, induces charge in the first piezoelectric body layer 321.As a result, in the 322 side table of output electrode layer of the first piezoelectric body layer 321 Face has collected around negative electrical charge, has collected around positive charge in 310 side surface of ground electrode layer of the first piezoelectric body layer 321.Together Sample, in the case where the surface to the first piezoelectric body layer 321 is applied with along the external force of the negative direction of β axis, in the first piezoelectric body layer 321 322 side surface of output electrode layer has collected around positive charge, in the 310 side table of ground electrode layer of the first piezoelectric body layer 321 Face has collected around negative electrical charge.

In this way, being applied on the surface on surface or the second piezoelectric body layer 323 to the first piezoelectric body layer 321 along β axis In the case where the external force of positive direction, negative electrical charge has been collected around in output electrode layer 322.As a result, defeated from output electrode layer 322 Negative charge Q β out.On the other hand, apply on the surface on surface or the second piezoelectric body layer 323 to the first piezoelectric body layer 321 In the case where the external force of the negative direction of β axis, in output electrode layer 322 positive charge has been collected around.As a result, from output electricity The positive charge Q β of 322 output of pole layer.

2nd γ axis has according to the external force (compression/drawing force) parallel with γ axis with sensor 360 come output charge Q γ Function.2nd γ axis is configured to export negative electrical charge according to the external force of the positive direction along γ axis with sensor 360, and according to edge External force that the negative direction of γ axis applies exports positive charge.That is, the 2nd γ axis has with sensor 360 according to the γ in Fig. 7 Polaxis (detection direction) the P γ of the charge for the external force output that axis direction applies is (that is, towards the negative direction of the γ axis in Fig. 7 Polaxis P γ).Therefore, the direction direction and the first γ axis sensor 330 of the polaxis P γ of the 2nd γ axis sensor 360 Polaxis P γ contrary direction.

2nd γ axis sensor 360 includes four piezoelectrics layer 333 and four piezoelectrics with the 4th crystallographic axis CA4 Layer 333 is opposite disposed and has the third piezoelectric body layer 331 of third crystallographic axis CA3 and is located at four piezoelectrics layer 333 and third Between piezoelectric body layer 331 and output charge Q γ output electrode layer 332.In addition, constituting each of the 2nd γ axis sensor 360 Layer lamination order be four piezoelectrics layer 333 since the downside in Fig. 7, output electrode layer 332, third piezoelectric body layer 331 Sequence.Therefore, the 2nd γ axis is with sensor 360 in addition to four piezoelectrics layer 333, output electrode layer 332, third piezoelectric body layer 331 stacking has and the first γ axis identical structure of sensor 330 along except.

In the case where the surface to four piezoelectrics layer 333 is applied with along the external force of the positive direction of γ axis, due to piezoelectricity Effect induces charge in four piezoelectrics layer 333.As a result, in 332 side of output electrode layer of four piezoelectrics layer 333 Surface has collected around negative electrical charge, has collected around positive charge in 310 side surface of ground electrode layer of four piezoelectrics layer 333. Equally, in the case where the surface to four piezoelectrics layer 333 is applied with along the external force of the negative direction of γ axis, in four piezoelectrics 332 side surface of output electrode layer of layer 333 has collected around positive charge, in 310 side of ground electrode layer of four piezoelectrics layer 333 Surface has collected around negative electrical charge.

In the case where the surface to third piezoelectric body layer 331 is applied with along the external force of the positive direction of γ axis, due to piezoelectricity Effect induces charge in third piezoelectric body layer 331.As a result, in 332 side of output electrode layer of third piezoelectric body layer 331 Surface has collected around negative electrical charge, has collected around positive charge in 310 side surface of ground electrode layer of third piezoelectric body layer 331. Equally, in the case where the surface to third piezoelectric body layer 331 is applied with along the external force of the negative direction of γ axis, in third piezoelectrics 332 side surface of output electrode layer of layer 331 has collected around positive charge, in 310 side of ground electrode layer of third piezoelectric body layer 331 Surface has collected around negative electrical charge.

In this way, being applied on the surface on surface or four piezoelectrics layer 333 to third piezoelectric body layer 331 along γ axis In the case where the external force of positive direction, negative electrical charge has been collected around in output electrode layer 332.As a result, defeated from output electrode layer 332 Negative charge Q γ out.On the other hand, apply on the surface on surface or four piezoelectrics layer 333 to third piezoelectric body layer 331 In the case where the external force of the negative direction of γ axis, in output electrode layer 332 positive charge has been collected around.As a result, from output Electrode layer 332 exports positive charge Q γ.

2nd α axis has according to the external force (shearing force) parallel with α axis with sensor 370 come the function of output charge Q α. 2nd α axis is configured to export negative electrical charge according to the external force of the positive direction along α axis with sensor 370, and according to the losing side along α axis Positive charge is exported to the external force of application.That is, the 2nd α axis sensor 370 has according to the α axis direction application in Fig. 7 Polaxis (detection direction) the P α (that is, towards polaxis P α of the negative direction of the α axis in Fig. 7) of the charge of external force output.Therefore, The direction phase of the direction direction and the polaxis P α of the first α axis sensor 340 of the polaxis P α of 2nd α axis sensor 370 Anti- direction.

2nd α axis sensor 370 includes the 6th piezoelectric body layer 343 and the 6th piezoelectrics with the 6th crystallographic axis CA6 Layer 343 is opposite disposed and has the 5th piezoelectric body layer 341 of the 5th crystallographic axis CA5 and is located at the 6th piezoelectric body layer 343 and the 5th Between piezoelectric body layer 341 and output charge Q α output electrode layer 342.In addition, constituting each layer of the 2nd α axis sensor 370 Lamination order since the downside in Fig. 7 be the 6th piezoelectric body layer 343, output electrode layer 342, the 5th piezoelectric body layer 341 Sequentially.Therefore, the 2nd α axis is with sensor 370 in addition to the 6th piezoelectric body layer 343, output electrode layer 342, the 5th piezoelectric body layer 341 Lamination order except, have and the first α axis identical structure of sensor 340.

In the case where the surface to the 6th piezoelectric body layer 343 is applied with along the external force of the positive direction of α axis, since piezoelectricity is imitated It answers, induces charge in the 6th piezoelectric body layer 343.As a result, in the 342 side table of output electrode layer of the 6th piezoelectric body layer 343 Face has collected around negative electrical charge, has collected around positive charge in 310 side surface of ground electrode layer of the 6th piezoelectric body layer 343.Together Sample, in the case where the surface to the 6th piezoelectric body layer 343 is applied with along the external force of the negative direction of α axis, in the 6th piezoelectric body layer 343 342 side surface of output electrode layer has collected around positive charge, in the 310 side table of ground electrode layer of the 6th piezoelectric body layer 343 Face has collected around negative electrical charge.

In the case where the surface to the 5th piezoelectric body layer 341 is applied with along the external force of the positive direction of α axis, since piezoelectricity is imitated It answers, induces charge in the 5th piezoelectric body layer 341.As a result, in the 342 side table of output electrode layer of the 5th piezoelectric body layer 341 Face has collected around negative electrical charge, has collected around positive charge in 310 side surface of ground electrode layer of the 5th piezoelectric body layer 341.Together Sample, in the case where the surface to the 5th piezoelectric body layer 341 is applied with along the external force of the negative direction of α axis, in the 5th piezoelectric body layer 341 342 side surface of output electrode layer has collected around positive charge, in the 310 side table of ground electrode layer of the 5th piezoelectric body layer 341 Face has collected around negative electrical charge.

In this way, being applied on the surface on surface or the 6th piezoelectric body layer 343 to the 5th piezoelectric body layer 341 along α axis In the case where the external force of positive direction, negative electrical charge has been collected around in output electrode layer 342.As a result, defeated from output electrode layer 342 Negative charge Q α out.On the other hand, apply on the surface on surface or the 6th piezoelectric body layer 343 to the 5th piezoelectric body layer 341 In the case where the external force of the negative direction of α axis, in output electrode layer 342 positive charge has been collected around.As a result, from output electricity The positive charge Q α of 322 output of pole layer.

2nd β axis sensor 350, the 2nd γ axis sensor 360 and the 2nd α axis sensor 370 are with the 2nd β The direction of the polaxis P β of axis sensor 350, the direction of the polaxis P γ of the 2nd γ axis sensor 360 and the 2nd α The mode that the direction of the polaxis P α of axis sensor 370 is orthogonal is laminated.In addition, the polarization of the 2nd β axis sensor 350 The contrary direction of the direction direction and the polaxis P β of the first β axis sensor 320 of axis P β.In addition, the 2nd γ axis is used The contrary side of the direction direction and the polaxis P γ of the first γ axis sensor 330 of the polaxis P γ of sensor 360 To.Equally, the polaxis P α of the direction direction and the first α axis sensor 340 of the polaxis P α of the 2nd α axis sensor 370 Contrary direction.

In addition, the first β axis sensor 320 being made of Y cutting crystal, the 2nd β axis sensor 350, the first α axis are used The charge yield of sensor 340 and the 2nd α axis unit force of sensor 370 is, for example, 8pC/N.On the other hand, it is cut by X Cut the charge yield example of the first γ axis sensor 330 of crystal composition and the unit force of the 2nd γ axis sensor 360 For example 4pC/N.In this way, usual first charge output element 301a and the second charge output element 301b is for parallel with γ axis External force (compression/drawing force) sensitivity be the first charge output element 301a and the second charge output element 301b be directed to Below the sensitivity of the external force (shearing force) parallel with α axis or β axis.Therefore, usually from the first charge output element 301a with And second charge output element 301b output charge Q γ be from the first charge output element 301a and the second charge output member The charge Q α and charge Q β or less of part 301b output.

[conversion circuit]

Conversion circuit 32a, 32c have composition identical with the conversion circuit 32 of first embodiment.Conversion circuit 32b is removed Except the static capacity of capacitor 34, there is identical with the conversion circuit 32 of first embodiment composition.Conversion circuit 32a With voltage V α will be converted to from the charge Q α that the first charge output element 301a or the second charge output element 301b are exported Function.Conversion circuit 32b has and will export from the first charge output element 301a or the second charge output element 301b Charge Q γ is converted to the function of voltage V γ.Conversion circuit 32c has will be from the electricity of the first charge output element 301a or second The charge Q β of lotus output element 301b output is converted to the function of voltage V β.

It can connect same one drive circuit in the switch element 35 of each conversion circuit 32a, 32b, 32c, also can connect each From different driving circuits.Each switch element 35 is inputted fully synchronized closure/cut-off signal from driving circuit.It is each as a result, The movement of the switch element 35 of conversion circuit 32a, 32b, 32c is synchronous.That is, the switch element of each conversion circuit 32a, 32b, 32c 35 closure/disconnection timing is consistent.

In addition, in the circuit with voltage conversion function as conversion circuit 32a, 32b, 32c, if reducing capacitor 34 static capacity, then voltage converting sensitivity improves, but saturation charge becomes smaller.As described above, usually from the first charge The charge Q γ of output element 301a and the second charge output element 301b output be from the first charge output element 301a and The charge Q α and charge Q β or less of second charge output element 301b output.Therefore, from the sight of the sensitivity for charge Q γ From the point of view of point, the preferably static capacity C2 of the capacitor 34 of conversion circuit 32b is the electrostatic of the capacitor 34 of conversion circuit 32a, 32c Below capacity C 1.Thereby, it is possible to charge Q γ is correctly converted to voltage V γ.

In addition, the switch element 35 of each conversion circuit 32a, 32b, 32c are mutually the same thyristors, respectively open The leakage current for closing element 35 is substantially equal.Therefore, the output shift D of each switch element 35 is substantially also equal.

Next, referring to Fig. 5 (b), (c), (d), to power detecting element 30a, the 30c and composition for constituting first element pair The positional relationship of power detecting element 30b, 30d of second element pair are described in detail.Wherein, in Fig. 5 (b), in order to illustrate and save The second base portion 4 is omited.In addition, left and right directions is set as x-axis direction in Fig. 5 (b), by the direction orthogonal with x-axis direction, i.e. Up and down direction is set as y-axis direction, and the direction orthogonal with x-axis direction and y-axis direction is set as z-axis direction.Also, in Fig. 5 (b) It is middle to be set as A1 line, and the center that power detecting element 30b, 30d will be passed through by the straight line at the center of power detecting element 30a, 30c Straight line be set as A2 line.Fig. 5 (c) is the cross-sectional view of the A1 line along Fig. 5 (b).Fig. 5 (d) is the cross-sectional view of the A2 line along Fig. 5 (b).

Power detecting element 30a has polaxis P α 1, P β 1, P γ 1, and according to each external force along α axis, β axis, γ axis Come output voltage V α 1, V β 1, V γ 1.Power detecting element 30b has polaxis P α 2, P β 2, P γ 2, and according to along α axis, β axis, γ Each external force of axis comes output voltage V α 2, V β 2, V γ 2.Power detecting element 30c has polaxis P α 3, P β 3, P γ 3, and root Come output voltage V α 3, V β 3, V γ 3 according to each external force along α axis, β axis, γ axis.Equally, power detecting element 30d has polarization Axis P α 4, P β 4, P γ 4, and according to each external force along α axis, β axis, γ axis come output voltage V α 4, V β 4, V γ 4.In addition, Each voltage V α of each power detecting element 30a, 30b, 30c, 30d output, V β, it separately includes with savings in capacitor 34 in V γ The output drift of the quantity of electric charge proportional component of voltage (true value) V α t, V β t, V γ t and the leakage current due to switch element 35 Move D.

Power detecting element 30a, 30b, 30c, 30d are fixed configuration on the inclined surface of the first rake 21, and clamp and (protect Hold) between the first rake 21 and the second rake 41.That is, power detecting element 30a, 30b, 30c, 30d the first base portion 2 with Between second base portion 4, relative to the first base portion 2 parallel (φ=0), inclination (0 < φ < pi/2) or vertical state (φ =pi/2) setting.

The polaxis P β 1 of power detecting element 30a has the angle, θ 1 of horizontal direction (x/y plane).Power detecting element 30b's Polaxis P β 2 has the angle, θ 2 of horizontal direction.The polaxis P β 3 of power detecting element 30c has the angle, θ 3 of horizontal direction.Power The polaxis P β 4 of detecting element 30d has the angle, θ 4 of horizontal direction.Wherein, angle, θ 1, θ 2, θ 3, θ 4 are distance maps 5 (b) The angle of the x-axis of the frame of reference (x-axis, y-axis, z-axis).Also, each polaxis P β of power detecting element 30a, 30b, 30c, 30d It is respectively provided with the angle φ of vertical direction (plane comprising z-axis direction).Wherein, angle φ is the benchmark seat relative to Fig. 5 (b) Mark the angle of the x/y plane of system.

As shown in Fig. 5 (b), (c), power detecting element 30a, 30c of first element pair is constituted with the pole of power detecting element 30a Change the horizontal component of the horizontal component (x, y-component) of axis P β 1 and the polaxis P β 3 of power detecting element 30c towards opposite direction Mode configures.Also, power detecting element 30a, 30c is with the pole of the polaxis P α 1 of power detecting element 30a and power detecting element 30c The mode for changing axis P α 3 towards opposite direction configures.

Equally, as shown in Fig. 5 (b), (d), power detecting element 30b, 30d of second element pair is constituted with power detecting element The horizontal component of the polaxis P β 4 of the horizontal component and power detecting element 30d of the polaxis P β 2 of 30b is towards the side of opposite direction Formula configuration.Also, power detecting element 30b, 30d is with the polarization of the polaxis P α 2 of power detecting element 30b and power detecting element 30d The mode of axis P α 4 towards opposite direction configures.

In addition, constituting polaxis P γ 1, the P of power detecting element 30a, 30c of first element pair as shown in Fig. 5 (c), (d) The vertical component (z-component) of γ 3 and constitute the polaxis P γ 2 of power detecting element 30b, 30d of second element pair, P γ 4 hangs down Straight component direction facing opposite to each other.

As shown in Fig. 5 (c), power detecting element 30a, 30c is with the horizontal component of the polaxis P β 1 of power detecting element 30a The horizontal component (that is, 3 × cos of P β (φ)) of the polaxis P β 3 of (that is, 1 × cos of P β (φ)) and power detecting element 30c court each other Mode round about configures.Therefore, the horizontal component for the component of voltage V β t1 that voltage V β 1 is included is (that is, V β t1 × cos (φ)) it is inconsistent with the symbol of the horizontal component (that is, V β t3 × cos (φ)) of the component of voltage V β t3 for being included of voltage V β 3.Cause This, is achieving the horizontal component from the power detecting element 30a voltage V β 1 exported and the voltage V from power detecting element 30c output In the case where the residual quantity of the horizontal component of β 3, the difference of the horizontal component of the horizontal component and component of voltage V β t3 of component of voltage V β t1 The absolute value of amount is not reduced.

Equally, as shown in Fig. 5 (c), since power detecting element 30a, 30c is with the side of the polaxis P α 1 of power detecting element 30a The mode in the direction direction facing opposite to each other of the polaxis P α 3 of Xiang Yuli detecting element 30c configures, so voltage V α 1 is wrapped The symbol for the component of voltage V α t3 that the component of voltage V α t1 and voltage V α 3 contained is included is inconsistent.Therefore, it is achieving from power inspection In the case where the residual quantity of voltage V α 1 and the voltage V α 3 from power detecting element 30c output for surveying element 30a output, component of voltage V α The absolute value of the residual quantity of t1 and component of voltage V α t3 is not reduced.

In addition, power detecting element 30b, 30d is as shown in Fig. 5 (d) with the level of the polaxis P β 2 of power detecting element 30b point Measure the horizontal component (that is, 4 × cos of P β (φ)) of the polaxis P β 4 of (that is, 2 × cos of P β (φ)) and power detecting element 30d each other It is configured towards the mode of opposite direction.Therefore, the component of voltage V β t2 that voltage V β 2 is included horizontal component (that is, V β t2 × Cos (φ)) it is different with the symbol of the horizontal component (that is, V β t4 × cos (φ)) of the component of voltage V β t4 for being included of voltage V β 4 It causes.Therefore, achieve from power detecting element 30b export voltage V β 2 horizontal component with from power detecting element 30d export In the case where the residual quantity of the horizontal component of voltage V β 4, the absolute value of the residual quantity of component of voltage V β t2 and component of voltage V β t4 does not subtract It is few.

Equally, as shown in Fig. 5 (d), since power detecting element 30b, 30d is with the side of the polaxis P α 2 of power detecting element 30b The mode in the direction direction facing opposite to each other of the polaxis P α 4 of Xiang Yuli detecting element 30d configures, so voltage V α 2 is wrapped The symbol for the component of voltage V α t4 that the component of voltage V α t2 and voltage V α 4 contained is included is inconsistent.Therefore, it is achieving from power inspection In the case where the residual quantity of voltage V α 2 and the voltage V α 4 from power detecting element 30d output for surveying element 30b output, component of voltage V α The absolute value of the residual quantity of t2 and component of voltage V α t4 is not reduced.

Also, as shown in Fig. 5 (c), (d), since power detecting element 30a, 30c, 30b, 30d are configured to power detecting element The polaxis P γ 1 of 30a, 30c, P γ 3 vertical component (that is, 1 × sin of P γ (pi/2-φ) and P γ 3 × sin (pi/2- φ)) with the polaxis P γ 2 of power detecting element 30b, 30d, P γ 4 vertical component (that is, 2 × sin of P γ (pi/2-φ) and P 4 × sin of γ (pi/2-φ)) direction facing opposite to each other, so component of voltage V γ t1, V γ that voltage V γ 1, V γ 3 are included The vertical component (that is, V γ t1 × sin (pi/2-φ) and V γ t3 × sin (pi/2-φ)) and voltage V γ 2,4 institute of V γ of t3 The component of voltage V γ t2 that includes, V γ t4 vertical component (that is, V γ t2 × sin (pi/2-φ) and V γ t4 × sin (π/ 2- φ)) symbol it is inconsistent.Therefore, the vertical of the voltage V γ 1, V γ 3 exported from power detecting element 30a, 30c is being achieved In the case where the residual quantity of the vertical component of component and the voltage V γ 2 exported from power detecting element 30b, 30d, V γ 4, their difference The absolute value of amount is not reduced.

On the other hand, since the voltage V α, V β, V γ that export from each power detecting element 30a, 30b, 30c, 30d are included Output shift D is not dependent on the direction of polaxis P α, P β, P γ, so the output shift D that each voltage V α, V β, V γ are included Symbol is consistent.Therefore, in the case where achieving the residual quantity of each output shift D, the absolute value of residual quantity is reduced.

Additionally, it is preferred that constituting power detecting element 30a, 30c of first element pair with the horizontal component and polarization of polaxis P β 1 The mode for the relationship that the horizontal component of axis P β 3 is opposed, meets θ 1=θ 3 configures.Again it is preferred to constitute the power of second element pair Detecting element 30b, 30d are opposed with the horizontal component of polaxis P β 4 with the horizontal component of polaxis P β 2, meet θ 2=θ's 4 The mode of relationship configures.Aftermentioned external force detection circuit 50 can detect six axis while reducing output shift D as a result, Power.

In addition, more preferably power detecting element 30a, 30b, 30c, 30d with constitute first element pair power detecting element 30a, The polaxis P β 1 of 30c, the horizontal component of P β 3 and polaxis P β 2, the P β of power detecting element 30b, 30d for constituting second element pair The orthogonal mode of 4 horizontal component configures.Aftermentioned external force detection circuit 50 can be further reduced output shift D as a result, While, detect six axle powers.

As long as in addition, with the polaxis P of the horizontal component of the polaxis P β 1 of power detecting element 30a and power detecting element 30c The mode in the horizontal component of β 3 direction facing opposite to each other configures, and constitutes power detecting element 30a, 30c of first element pair Configuration be not particularly limited, but preferably as shown in Fig. 5 (b), power detecting element 30a and power detecting element 30c configuration is same On axis A1.Equally, as long as with the polaxis P β of the horizontal component of the polaxis P β 2 of power detecting element 30b and power detecting element 30d The mode in 4 horizontal component direction facing opposite to each other configures, and constitutes power detecting element 30b, 30d's of second element pair Configuration is not particularly limited, but preferably as shown in Fig. 5 (b), and power detecting element 30b and power detecting element 30d are configured in same axis On A2.Thereby, it is possible to six axle powers that unbiased poorly detection is applied to the first base portion 2 or the second base portion 4.

In addition, first element pair and the positional relationship of second element pair are not particularly limited, but preferably as shown in Fig. 5 (b), By straight line A1 that the center for the power detecting element 30a for belonging to first element pair and the center of power detecting element 30c connect and will belong to In the orthogonal mode of the straight line A2 that the center of the power detecting element 30b of second element pair is connected with the center of power detecting element 30d Configure first element to and second element pair.Thereby, it is possible to unbiased poorly detections to be applied to the first base portion 2 or the second base portion 4 External force (x-axis, y-axis, the external force of z-axis in figure).

Additionally, it is preferred that power detecting element 30a, 30b, 30c, 30d along the first base portion 2 or the second base portion 4 it is circumferential with etc. The configuration of angle interval, the more preferably concentric circles be configured to centered on the first base portion 2 or second 4 central point at equal intervals Shape.Thereby, it is possible to external force (x-axis, y-axis in figure, z that unbiased poorly detection is applied to the first base portion 2 or the second base portion 4 The external force of axis).

In addition, in the composition of Fig. 5 (b), polaxis P β 1, the P β 3 of power detecting element 30a, 30c are towards the first base portion 2 Outside (centrifugal direction), polaxis P β 2, the P β 4 of power detecting element 30b, 30d towards the inside (centripetal direction) of the first base portion 2, But the present invention is not limited to this.As long as that is, with the direction of the polaxis P β 1 of power detecting element 30a with power detecting element 30c's The direction direction facing opposite to each other of polaxis P β 3, also, the direction of the polaxis P β 2 of power detecting element 30b and power detection member The mode in the direction direction facing opposite to each other of the polaxis P β 4 of part 30d configures, be also possible to power detecting element 30a, Polaxis P β 1, the P β 3 of 30c towards the inside (centripetal direction) of the first base portion 2, the polaxis P β 2 of power detecting element 30b, 30d, P β 4 is towards the outside (centrifugal direction) of the first base portion 2.

[external force detection circuit]

External force detection circuit 50 has by obtaining the voltage from each output of power detecting element 30a, 30b, 30c, 30d The residual quantity of V α, V β, V γ, come the force component of going forward side by side (shearing force) of force component of going forward side by side (shearing force) Fx, y-axis direction to x-axis direction Fy, force component of going forward side by side (compression/drawing force) Fz in z-axis direction, around the rotation force component Mx of x-axis, around the rotation force component of y-axis My and the function that operation is carried out around the rotation force component Mz of z-axis this six axle powers.Each force component can pass through following formula It finds out.Wherein, for the simplification of formula, as shown in Fig. 5 (b), power detecting element 30a, 30b, 30c, 30d are configured as with The concentric circles that radius centered on the central point of one base portion 2 or the second base portion 4 is L, but the present invention is not limited to this.

[number 5]

Mz=L × { (V α t1+D)-(V α t2+D)+(V α t3+D)-(V α t4-D) }

Here, L is constant.

In this way, by obtaining each voltage V α (that is, V α t+D), the V β that export from each power detecting element 30a, 30b, 30c, 30d The residual quantity of (that is, V β t+D), V γ (that is, V γ t+D) can not make to savings in the proportional voltage of the quantity of electric charge of capacitor 34 The absolute value of the residual quantity of component (true value) V α t, V β t, V γ t is reduced, and reduces the absolute value of output shift D.As a result, energy Output shift D is enough reduced, the detection accuracy and detection resolution of force checking device 1c can be improved.In addition, due to above-mentioned defeated The reduction method of drift D is also effective in the case where minute is elongated out, so being able to extend the measurement of force checking device 1c Time.

In addition, according to above-mentioned formula it is found that other than in addition to the angle φ=0 the case where, even if from each power detecting element 30a, 30b, 30c, 30d output all γ=0 V V γ in the case where, can also calculate six axle powers (Fx, Fy, Fz, Mx, My,Mz).That is, other than in addition to the angle φ=0 the case where, can Jin Shiyong exported from each power detecting element 30a, 30b, 30c, 30d Voltage V α, V β calculate six axle powers.

As described above, because noise component(s) caused by the temperature change of the first base portion 2 and the second base portion 4 is relative to from power Noise component(s) caused by the influence of the voltage V α, V β of each output of detecting element 30a, 30b, 30c, 30d are compared because of temperature change Influence relative to voltage V γ is small.Therefore, power detecting element 30a, 30b, 30c, 30d with relative to the first base portion 2 inclination or Under the case where vertical state of person configures (the case where 0 < φ < pi/2 and φ=pi/2), member is detected from each power by Jin Shiyong Voltage V α, the V β of each output of part detect six axle powers, can reduce the temperature because of the first base portion 2 and the second base portion 4 For the influence of the pressurization variation of each power detecting element caused by deformation caused by variation etc., while detecting six axle powers.

In power detecting element 30a, 30b, 30c, 30d relative to the inclination of the first base portion 2 or the configuration of vertical state In situation (the case where 0 < φ < pi/2 and φ=pi/2), it is to be used only that user, which can arbitrarily set external force detection circuit 50, Six are calculated to calculate six axle powers, or using voltage V α, V β, V γ from voltage V α, the V β that each power detecting element exports respectively A axle power.

The first base portion 2 caused by temperature change because of the first base portion 2 and the second base portion 4 etc. and the second base portion 4 The variation of voltage V γ caused by deformation arrives greatly in the environment of can not ignoring relative to the true value V γ t of voltage V γ and uses power In the case where detection device 1c, in such a way that external force detection circuit 50 calculates six axle powers using only voltage V α, V β into Row setting, can reduce the influence of the deformation of the first base portion 2 and the second base portion 4, more correctly detect six axle powers.

On the other hand, the first base portion 2 and caused by temperature change because of the first base portion 2 and the second base portion 4 etc. The variation of voltage V γ caused by the deformation of two base portions 4 is small in the environment of can ignore that relative to the true value V γ t of voltage V γ In the case where using force checking device 1c, by calculating six axle powers using voltage V α, V β, V γ with external force detection circuit 50 Mode set, detect six axle powers due to using the input (voltage V α, V β, V γ) more than above-mentioned situation, so Six axle powers can more correctly be detected.

In the case where angle, θ 1, θ 2, θ 3, θ 4 meet θ 1=θ 3,4 θ θ 2=, above-mentioned calculating formula is simplified, become as Following sample.

[number 6]

Mz=L × { V α t1-V α t2+V α t3-V α t4 }

In this case, output shift D can be removed.As a result, it is possible to further increase the detection of force checking device 1c essence Degree and detection resolution.In addition, can further extend the minute of force checking device 1c.

Also, in the case where angle, θ 1, θ 2, θ 3, θ 4 meet θ 1=θ 3=pi/2, θ 2=θ 4=0, above-mentioned calculating formula quilt Further simplify, becomes as described below.

[number 7]

Mz=L × { V α t1-V α t2+V α t3-V α t4 }

Also, in the case where meeting angle φ=0, above-mentioned calculating formula is further simplified, and becomes as described below.

[number 8]

Fx=V α t1-V α t3-V β t2+V β t4

Fy=V β t1-V β t3+V α t2-V α t4

Fz=V γ t1-V γ t2+V γ t3-V γ t4

Mx=L × (- V γ t1+V γ t3)

My=L × (V γ t2-V γ t4)

Mz=L × { V α t1-V α t2+V α t3-V α t4 }

In addition, above-mentioned calculating formula becomes as described below in turn in the case where meeting angle φ=pi/2.

[number 9]

Fx=V α t1-V α t3-V γ t2+V γ t4

Fy=V γ t1-V γ t3+V α t2-V α t4

Fz=-V β t1+V β t2-V β t3+V β t4

Mx=L × (V β t1-V β t3)

My=L × (- V β t2+V β t4)

Mz=L × { V α t1-V α t2+V α t3-V α t4 }

In this way, external force detection circuit 50 is by obtaining each voltage V exported from each power detecting element 30a, 30b, 30c, 30d The residual quantity of α, V β, V γ export drift caused by capable of reducing the leakage current because of the switch element 35 of conversion circuit 32a, 32b, 32c D is moved, while detecting six axle powers.As a result, the detection error due to leakage current (output shift D) becomes smaller relatively, Neng Gouti The detection accuracy and detection resolution of high force checking device 1c.In addition, since the reduction method of above-mentioned output shift D is being surveyed Fix time it is elongated in the case where also effectively, so being able to extend the minute of force checking device 1c.Also, involved by the present invention And force checking device 1c in, as not needing for reducing the circuit of output shift as reverse bias circuit, so energy Enough minimize force checking device 1c.

In addition, the force checking device 1c of present embodiment have constitute first element pair power detecting element 30a, 30c with And power detecting element 30c, 30d these two pair element pair of second element pair is constituted, but the present invention is not limited to this.It is detected in power Device 1c have as Fig. 5 (b) first element pair and second element to two pairs of elements pair in the case where, due to such as it is above-mentioned that Sample can find out six axle powers by very simple calculations, so external force detection circuit 50 can be made to simplify.In addition, being examined in power It, can be with six axle powers of higher accuracy detection in the case where device 1c is surveyed with three pairs or more elements pair.

(the 4th embodiment)

Fig. 8 is the cross-sectional view for indicating the 4th embodiment of force checking device according to the present invention.Fig. 9 is shown in Fig. 8 Force checking device top view.Figure 10 is the circuit diagram for briefly expressing force checking device shown in Fig. 8 (comprising guard ring).Figure 11 It is the cross-sectional view for briefly expressing the charge output element of force checking device shown in Fig. 8.Figure 12 is to briefly express power shown in Fig. 8 The sectional stereogram of guard ring on the analog circuit substrate of detection device etc..

Wherein, below for convenience of explanation, the upside in Fig. 8 is known as "upper" or " top ", downside is known as "lower" Or " lower section ".In addition, the upside in Figure 11 is known as "upper", " top " or " table ", by downside be known as "lower", " lower section " or Person " inner ".In addition, diagram has guard ring on the circuit diagram of Figure 10.

Fig. 8 and force checking device 1d shown in Fig. 9 has the function of detecting external force (comprising torque), that is, have detection The function of the external force applied along mutually orthogonal three axis (α (X) axis, β (Y) axis, γ (Z) axis).

Force checking device 1d have first substrate 1002, with first substrate 1002 separate as defined in interval configuration and with first It substrate 1002 opposed the second substrate 1003, the analog circuit substrate that is located between first substrate 1002 and the second substrate 1003 (circuit substrate) 1004 is located between first substrate 1002 and the second substrate 1003 and is electrically connected with analog circuit substrate 1004 Digital circuit substrate 1005 is mounted (carrying) in the mounting surface 1043 of analog circuit substrate 1004 and there is basis to be applied External force carrys out the charge output element (element) 1010 of output signal and stores the biography of the shell 1060 of charge output element 1010 Sensor equipment 1006 and two pressurization bolts (fixation member) 1071.Hereinafter, also " electrical connection " referred to as " is connected ".

As shown in figure 8, sensor device 1006 is configured in the face of 1003 side of the second substrate of analog circuit substrate 1004 The aftermentioned protrusion (the first protrusion) 1021 and second of first substrate 1002 is located on (also referred to as surface or mounting surface) 1043 Substrate 1003 clamps.That is, charge output element 1010 via shell 1060 by protrusion 1021 and the second substrate 1003 clamping and by Pressurization.Although in addition, can also be using any one of first substrate 1002 and the second substrate 1003 as the base of applied force side Plate, but in the present embodiment, the substrate by the second substrate 1003 as applied force side is illustrated.In addition, charge exports Element 1010 also can be only fitted to the face (the also referred to as back side) 1044 of 1002 side of first substrate of analog circuit substrate 1004.

As shown in Figure 10, sensor device 1006 is installed in the mounting surface 1043 of analog circuit substrate 1004 (charge is defeated Element 1010 out), being equipped in the mounting surface 1043 will export from the charge output element 1010 of the sensor device 1006 Charge Q x is converted to the electricity that the conversion output circuit of voltage Vx (conversion circuit) 1090a, will be exported from charge output element 1010 Lotus Qz is converted to conversion output circuit (conversion circuit) 1090b of voltage Vz and will export from charge output element 1010 Charge Q y is converted to conversion output circuit (conversion circuit) 1090c of voltage Vy.In addition, being equipped in digital circuit substrate 1005 Detect the external force detection circuit 1040 for the external force being applied.The digital circuit substrate 1005 quilt compared with analog circuit substrate 1004 Configuration configures between analog circuit substrate 1004 and first substrate in 1002 side of first substrate, i.e..

First substrate 1002, the second substrate 1003, the shape of analog circuit substrate 1004 and digital circuit substrate 1005 Be not particularly limited, but in the present embodiment, first substrate 1002, the second substrate 1003, analog circuit substrate 1004 and When digital circuit substrate 1005 is overlooked, outer shape is circle.In addition, as first substrate 1002, the second substrate 1003, mould Other above-mentioned outer shapes when quasi- circuit substrate 1004 and digital circuit substrate 1005 are overlooked, such as four can be enumerated The polygons such as side shape, pentagon, ellipse etc..In addition, as first substrate 1002, the second substrate 1003, analog circuit substrate Each element at position, digital circuit substrate 1005 other than 1004 each element and each wiring and the position other than each wiring Constituent material, be not particularly limited, such as be able to use various resin materials, various metal materials etc..

[charge output element (element)]

Charge output element 1010 has to be applied according to along mutually orthogonal three axis (α (X) axis, β (Y) axis, γ (Z) axis) Each function to export three charge Qs x, Qy, Qz of (being subject to) external force added.

The shape of charge output element 1010 is not particularly limited, but in the present embodiment, and first substrate 1002 is overlooked When, from the direction vertical relative to first substrate 1002 when, be quadrangle.In addition, as charge output element 1010 Other above-mentioned outer shapes when vertical view, for example, other polygons such as pentagon, circle, ellipse etc. can be enumerated.

As shown in figure 11, charge output element 1010 has the four grounded electrode layer connecting with ground (reference potential point) 1011, according to the external force (shearing force) parallel with β axis come the first sensor 1012 of output charge Qy, according to parallel with γ axis External force (compression/drawing force) carrys out the second sensor 1013 of output charge Qz and according to the external force (shearing force) parallel with α axis Carry out the 3rd sensor 1014 of output charge Qx, ground electrode layer 1011 and each sensor 1012,1013,1014 are alternately laminated. Wherein, in Figure 11, the stacking direction of ground electrode layer 1011 and sensor 1012,1013,1014 is set as γ axis direction, And mutually orthogonal directions orthogonal with γ axis direction are set to α axis direction, β axis direction.

In the composition of diagram, since the downside in Figure 11, with first sensor 1012, second sensor 1013, The sequence of three sensors 1014 is laminated, but the present invention is not limited to this.The lamination order of sensor 1012,1013,1014 is Arbitrarily.

Ground electrode layer 1011 is the electrode connecting with ground (reference potential point).Constitute the material of ground electrode layer 1011 simultaneously It is not particularly limited, but is for example preferably gold, titanium, aluminium, copper, iron or the alloy comprising these metals.Wherein particularly preferably use Stainless steel as ferroalloy.The ground electrode layer 1011 being made of stainless steel has excellent durability and corrosion resistance.

First sensor 1012 has according to (being subject to) external force (shearing force) being applied along β axis come output charge Qy's Function.First sensor 1012 is configured to export positive charge according to the external force being applied along the positive direction of β axis, according to along β axis The negative direction external force that is applied export negative electrical charge.

First sensor 1012 includes the first piezoelectric body layer 1121 and the first piezoelectric body layer with the first crystallographic axis CA1 1121 opposite disposed and the second piezoelectric body layers 1123 with the second crystallographic axis CA2 and it is located at the first piezoelectric body layer 1121 and the Between two piezoelectric body layers 1123 and output charge Qy output electrode layer 1122.

First piezoelectric body layer 1121 is by having the piezoelectrics of the first crystallographic axis CA1 of the negative direction for being oriented in β axis to constitute.Right The surface of first piezoelectric body layer 1121 is applied in the case where the external force of the positive direction of β axis, due to piezoelectric effect, in the first pressure Charge is induced in electrics layer 1121.As a result, gathering near 1122 side surface of output electrode layer of the first piezoelectric body layer 1121 Collection has positive charge, has collected around negative electrical charge in 1011 side surface of ground electrode layer of the first piezoelectric body layer 1121.Equally, right The surface of first piezoelectric body layer 1121 is applied in the case where the external force of the negative direction of β axis, in the first piezoelectric body layer 1121 1122 side surface of output electrode layer has collected around negative electrical charge, in 1011 side surface of ground electrode layer of the first piezoelectric body layer 1121 Positive charge is collected around.

Second piezoelectric body layer 1123 is by having the piezoelectrics of the second crystallographic axis CA2 of the positive direction for being oriented in β axis to constitute.Right The surface of second piezoelectric body layer 1123 is applied in the case where the external force of the positive direction of β axis, due to piezoelectric effect, in the second pressure Charge is induced in electrics layer 1123.As a result, gathering near 1122 side surface of output electrode layer of the second piezoelectric body layer 1123 Collection has positive charge, has collected around negative electrical charge in 1011 side surface of ground electrode layer of the second piezoelectric body layer 1123.Equally, right The surface of second piezoelectric body layer 1123 is applied in the case where the external force of the negative direction of β axis, in the second piezoelectric body layer 1123 1122 side surface of output electrode layer has collected around negative electrical charge, in 1011 side surface of ground electrode layer of the second piezoelectric body layer 1123 Positive charge is collected around.

In this way, the side of the second crystallographic axis CA2 of the first crystallographic axis CA1 and the second piezoelectric body layer 1123 of the first piezoelectric body layer 1121 To towards opposite direction.As a result, with only by the first piezoelectric body layer 1121 or the second piezoelectric body layer 1123 any one and it is defeated The case where composition of electrode layer 1122 first sensor 1012, is compared out, can make to be gathered in the positive electricity near output electrode layer 1122 Lotus or negative electrical charge increase.As a result, it is possible to increase the charge Q y exported from output electrode layer 1122.

Wherein, as the first piezoelectric body layer 1121 and the constituent material of the second piezoelectric body layer 1123, crystal, Huang can be enumerated Jade, barium titanate, lead titanates, lead zirconate titanate (PZT:Pb (Zr, Ti) O₃), lithium niobate, lithium tantalate etc..Wherein particularly preferred crystal. This is because the piezoelectric body layer being made of crystal has wider dynamic range, higher rigidity, higher intrinsic frequency, higher The excellent characteristic such as bearing.In addition, as the first piezoelectric body layer 1121 and the second piezoelectric body layer 1123, for along layer Face direction external force (shearing force) and the piezoelectric body layer that generates charge can be made of Y cutting crystal.

Output electrode layer 1122 has and will generate just in the first piezoelectric body layer 1121 and in the second piezoelectric body layer 1123 The function that charge or negative electrical charge are exported as charge Q y.As described above, to the surface or second of the first piezoelectric body layer 1121 The surface of piezoelectric body layer 1123 is applied in the case where the external force of the positive direction of β axis, is collected around in output electrode layer 1122 There is positive charge.As a result, exporting positive charge Q y from output electrode layer 1122.On the other hand, to the first piezoelectric body layer 1121 Surface or the surface of the second piezoelectric body layer 1123 be applied in the case where the external force of the negative direction of β axis, in output electrode Layer 1122 has collected around negative electrical charge.As a result, the charge Q y negative from the output of output electrode layer 1122.

Additionally, it is preferred that the width of output electrode layer 1122 is the first piezoelectric body layer 1121 and the second piezoelectric body layer 1123 It is more than width.In the width of output electrode layer 1122 situation narrower than the first piezoelectric body layer 1121 or the second piezoelectric body layer 1123 Under, a part of the first piezoelectric body layer 1121 or the second piezoelectric body layer 1123 is not contacted with output electrode layer 1122.Therefore, it deposits Charge caused by the first piezoelectric body layer 1121 or the second piezoelectric body layer 1123 can not be being exported from output electrode layer 1122 A part situation.As a result, the charge Q y exported from output electrode layer 1122 is reduced.Wherein, for aftermentioned output electricity Pole layer 1132,1142 is also identical.

There is second sensor 1013 (being subject to) external force (compression/drawing force) according to being applied along γ axis to export electricity The function of lotus Qz.Second sensor 1013 is configured to export positive charge according to the compressing force parallel with γ axis, and according to γ Axis parallel drawing force exports negative electrical charge.

Second sensor 1013 includes third piezoelectric body layer 1131 and third piezoelectric body layer with third crystallographic axis CA3 1131 opposite disposed and four piezoelectrics layers 1133 with the 4th crystallographic axis CA4 and it is located at third piezoelectric body layer 1131 and the Between four piezoelectrics layer 1133 and output charge Qz output electrode layer 1132.

Third piezoelectric body layer 1131 is by having the piezoelectrics of the third crystallographic axis CA3 for the positive direction for being oriented in γ axis to constitute.? In the case where being applied with the compressing force parallel with γ axis to the surface of third piezoelectric body layer 1131, due to piezoelectric effect, in third Charge is induced in piezoelectric body layer 1131.As a result, near 1132 side surface of output electrode layer of third piezoelectric body layer 1131 It is populated with positive charge, has collected around negative electrical charge in 1011 side surface of ground electrode layer of third piezoelectric body layer 1131.Equally, exist In the case where being applied with the drawing force parallel with γ axis to the surface of third piezoelectric body layer 1131, in third piezoelectric body layer 1131 1132 side surface of output electrode layer has collected around negative electrical charge, in 1011 side surface of ground electrode layer of third piezoelectric body layer 1131 Positive charge is collected around.

Four piezoelectrics layer 1133 is by having the piezoelectrics of the 4th crystallographic axis CA4 of the negative direction for being oriented in γ axis to constitute.? In the case where being applied with the compressing force parallel with γ axis to the surface of four piezoelectrics layer 1133, due to piezoelectric effect, the 4th Charge is induced in piezoelectric body layer 1133.As a result, near 1132 side surface of output electrode layer of four piezoelectrics layer 1133 It is populated with positive charge, has collected around negative electrical charge in 1011 side surface of ground electrode layer of four piezoelectrics layer 1133.Equally, exist In the case where being applied with the drawing force parallel with γ axis to the surface of four piezoelectrics layer 1133, in four piezoelectrics layer 1133 1132 side surface of output electrode layer has collected around negative electrical charge, in 1011 side surface of ground electrode layer of four piezoelectrics layer 1133 Positive charge is collected around.

As third piezoelectric body layer 1131 and the constituent material of four piezoelectrics layer 1133, it is able to use and the first piezoelectricity Body layer 1121 and the identical constituent material of the second piezoelectric body layer 1123.In addition, such as third piezoelectric body layer 1131 and the 4th pressure Electrics layer 1133 like that, the piezoelectric body layer energy of charge is generated for the external force (compression/drawing force) vertical with the face direction of layer It is enough to be made of X cutting crystal.

Output electrode layer 1132 has and will generate just in third piezoelectric body layer 1131 and in four piezoelectrics layer 1133 The function that charge or negative electrical charge are exported as charge Q z.As described above, on the surface or to third piezoelectric body layer 1131 In the case that the surface of four piezoelectrics layer 1133 is applied with the compressing force parallel with γ axis, collected around in output electrode layer 1132 There is positive charge.As a result, exporting positive charge Q z from output electrode layer 1132.On the other hand, to third piezoelectric body layer 1131 Surface or four piezoelectrics layer 1133 surface be applied with the drawing force parallel with γ axis in the case where, in output electrode layer 1132 have collected around negative electrical charge.As a result, the charge Q z negative from the output of output electrode layer 1132.

3rd sensor 1014 has according to (being subject to) external force (shearing force) being applied along α axis come output charge Qx's Function.3rd sensor 1014 is configured to export positive charge according to the external force being applied along the positive direction of α axis, and according to along α External force that the negative direction of axis is applied exports negative electrical charge.

3rd sensor 1014 includes the 5th piezoelectric body layer 1141 and the 5th piezoelectric body layer with the 5th crystallographic axis CA5 1141 opposite disposed and the 6th piezoelectric body layers 1143 with the 6th crystallographic axis CA6 and it is located at the 5th piezoelectric body layer 1141 and the Between six piezoelectric body layers 1143 and output charge Qx output electrode layer 1142.

5th piezoelectric body layer 1141 is by having the piezoelectrics of the 5th crystallographic axis CA5 of the negative direction for being oriented in α axis to constitute.Right The surface of 5th piezoelectric body layer 1141 is applied in the case where the external force of the positive direction of α axis, due to piezoelectric effect, in the 5th pressure Charge is induced in electrics layer 1141.As a result, gathering near 1142 side surface of output electrode layer of the 5th piezoelectric body layer 1141 Collection has positive charge, has collected around negative electrical charge in 1011 side surface of ground electrode layer of the 5th piezoelectric body layer 1141.Equally, right The surface of 5th piezoelectric body layer 1141 is applied in the case where the external force of the negative direction of α axis, in the 5th piezoelectric body layer 1141 1142 side surface of output electrode layer has collected around negative electrical charge, in 1011 side surface of ground electrode layer of the 5th piezoelectric body layer 1141 Positive charge is collected around.

6th piezoelectric body layer 1143 is by having the piezoelectrics of the 6th crystallographic axis CA6 of the positive direction for being oriented in α axis to constitute.Right The surface of 6th piezoelectric body layer 1143 is applied in the case where the external force of the positive direction of α axis, due to piezoelectric effect, in the 6th pressure Charge is induced in electrics layer 1143.As a result, gathering near 1142 side surface of output electrode layer of the 6th piezoelectric body layer 1143 Collection has positive charge, has collected around negative electrical charge in 1011 side surface of ground electrode layer of the 6th piezoelectric body layer 1143.Equally, right The surface of 6th piezoelectric body layer 1143 is applied in the case where the external force of the negative direction of α axis, in the 6th piezoelectric body layer 1143 1142 side surface of output electrode layer has collected around negative electrical charge, in 1011 side surface of ground electrode layer of the 6th piezoelectric body layer 1143 Positive charge is collected around.

As the 5th piezoelectric body layer 1141 and the constituent material of the 6th piezoelectric body layer 1143, it is able to use and the first piezoelectricity Body layer 1121 and the identical constituent material of the second piezoelectric body layer 1123.In addition, such as the 5th piezoelectric body layer 1141 and the 6th pressure Like that, the piezoelectric body layer that charge is generated for the external force (shearing force) along the face direction of layer can be with the first pressure for electrics layer 1143 Electrics layer 1121 and the second piezoelectric body layer 1123 are similarly made of Y cutting crystal.

Output electrode layer 1142 has and will generate just in the 5th piezoelectric body layer 1141 and in the 6th piezoelectric body layer 1143 The function that charge or negative electrical charge are exported as charge Q x.As described above, on the surface or to the 5th piezoelectric body layer 1141 The surface of six piezoelectric body layers 1143 is applied in the case where the external force of the positive direction of α axis, is gathered near output electrode layer 1142 Collection has positive charge.As a result, exporting positive charge Q x from output electrode layer 1142.On the other hand, to the 5th piezoelectric body layer 1141 surface or the surface of the 6th piezoelectric body layer 1143 are applied in the case where the external force of the negative direction of α axis, are being exported Electrode layer 1142 has collected around negative electrical charge.As a result, the charge Q x negative from the output of output electrode layer 1142.

In this way, first sensor 1012, second sensor 1013 and 3rd sensor 1014 are examined with the power of each sensor The orthogonal mode in direction is surveyed to be laminated.Each sensor can be respectively according to mutually orthogonal force component come charge inducing as a result,. Therefore, charge output element 1010 can be according to each come defeated of the external force along three axis (α (X) axis, β (Y) axis, γ (Z) axis) Three charge Qs x, Qy, Qz out.

[sensor device]

Sensor device 1006 has above-mentioned charge output element 1010 and stores the shell of charge output element 1010 1060。

The lid that shell 1060 includes the base portion (first component) 1061 with recess portion 1611 and engages with the base portion 1061 Body (second component) 1062.Charge output element 1010 is arranged on the recess portion 1611 of base portion 1061, the recess portion of the base portion 1061 The sealing of 1611 coverd parts 1062.Thereby, it is possible to protect charge output element 1010, it is capable of providing the higher power detection dress of reliability Set 1d.Wherein, the upper surface of charge output element 1010 is contacted with lid 1062.In addition, the lid 1062 of shell 1060 is matched It sets in upside, i.e. 1003 side of the second substrate, base portion 1061 is configured in downside, i.e. 1002 side of first substrate, 1061 quilt of base portion It is fixed on analog circuit substrate 1004.According to this constitution, base portion 1061 and lid 1062 are by protrusion 1021 and the second substrate 1003 It clamps and is pressurized, charge output element 1010 is clamped and be pressurized by the base portion 1061 and lid 1062.

In addition, the constituent material as base portion 1061 is not particularly limited, such as it is able to use the insulating materials such as ceramics Deng.In addition, the constituent material as lid 1062 is not particularly limited, such as the various metal materials such as be able to use stainless steel Deng.Wherein, the constituent material of base portion 1061 can be identical with the constituent material of lid 1062, alternatively, it is also possible to difference.

In addition, the shape of shell 1060 is not particularly limited, but in the present embodiment, first substrate 1002 is when overlooking Quadrangle.In addition, above-mentioned other shapes when overlooking as shell 1060, such as can to enumerate pentagon etc. other polygon Shape, circle, ellipse etc..In addition, in the case where the shape of shell 1060 is polygon, such as its corner can be with circle Degree, alternatively, it is also possible to be chamfered.

In addition, in the present embodiment, lid 1062 is plate-like, by between its central portion 1625 and peripheral part 1626 Position bending, central portion 1625 are prominent towards the second substrate 1003.The shape of central portion 1625 is not particularly limited, but in this reality It applies in mode, becomes shape identical with charge output element 1010 when first substrate 1002 is overlooked, is quadrangle.In addition, The upper surface and lower surface of the central portion 1625 of lid 1062 is plane.

It is electrically connected in addition, being equipped in the end of the lower surface of the base portion 1061 of shell 1060 with charge output element 1010 Multiple terminals 1063.Each terminal 1063 is electrically connected with analog circuit substrate 1004 respectively, as a result, charge output element 1010 and mould Quasi- circuit substrate 1004 is electrically connected.In addition, the number of terminal 1063 is not particularly limited, it is in the present embodiment four, i.e. Terminal 1063 is respectively arranged on the four corners of base portion 1061.

[conversion output circuit and wiring]

As shown in Figure 10, be connected on charge output element 1010 conversion output circuit (conversion circuit) 1090a, 1090b,1090c.In this case, the mounting surface 1043 in analog circuit substrate 1004 is formed with and makes the electricity of sensor device 1006 The wiring 1151,1152,1153 that lotus output element 1010 is electrically connected with conversion output circuit 1090a, 1090b, 1090c.

In addition, respectively wiring 1151,1152,1153 is entirely formed in same layer.That is, without that will be routed 1151,1152, 1153 a part is formed in the face 1044 with 1043 opposite side of mounting surface of analog circuit substrate 1004, and passes through via hole, It will be formed in the wiring 1151,1152,1153 of mounting surface 1043 and the connection of wiring 1151,1152,1153 for being formed in face 1044 Processing.Thereby, it is possible to simplify the pattern of wiring 1151,1152,1153, the composition of analog circuit substrate 1004 can be made Simplify.In addition, for wiring 1151,1152,1153, due to also without being routed in the air, so not needing aerial for this The space of wiring, thereby, it is possible to realize that force checking device 1d's is lightening.

In addition, analog circuit substrate 1004 mounting surface 1043 be formed with make convert output circuit 1090a, 1090b, The power-supply wiring (not shown) that 1090c etc. is electrically connected to a power source.

In addition, conversion output circuit 1090a, which has, is converted to voltage for the charge Q x exported from charge output element 1010 The function of Vx.Conversion output circuit 1090b, which has, is converted to voltage Vz's for the charge Q z exported from charge output element 1010 Function.Conversion output circuit 1090c has the function that the charge Q y exported from charge output element 1010 is converted to voltage Vy. Since conversion output circuit 1090a, 1090b, 1090c are identical, so being said below using converting output circuit 1090c into representative It is bright.

Conversion output circuit 1090c, which has, is converted to voltage Vy and defeated for the charge Q y exported from charge output element 1010 The function of voltage Vy out.Converting output circuit 1090c has operational amplifier (amplifier) 1091, capacitor 1092, Yi Jikai Close element 1093.The inversing input terminal (first input end) 1911 of operational amplifier 1091 and charge output element 1010 Output electrode layer 1122 connects, the non-inverting input terminal (the second input terminal) 1912 and ground (benchmark of operational amplifier 1091 Potential point) connection.In addition, the output terminal 1913 of operational amplifier 1091 is connect with external force detection circuit 1040.Capacitor 1092 are connected between the inversing input terminal 1911 of operational amplifier 1091 and output terminal 1913.Switch element 1093 connects Between the inversing input terminal 1911 and output terminal 1913 of operational amplifier 1091, it is connected in parallel with capacitor 1092.Separately Outside, switch element 1093 is connect with driving circuit (not shown), and switch element 1093 is according to the closure/disconnection for carrying out driving circuit Signal executes switch motion.

In the case where switch element 1093 disconnects, the charge Q y exported from charge output element 1010 is put aside in quiet The capacitor 1092 of capacitance C1, and export as voltage Vy to external force detection circuit 1040.Next, in switch element 1093 In the case where closure, it is short-circuited between the two-terminal of capacitor 1092.As a result, savings in capacitor 1092 charge Q y electric discharge and As 0 coulomb, the voltage Vy for being output to external force detection circuit 1040 becomes 0 volt.The closure of switch element 1093 is known as making to turn Change output circuit 1090c reset.Wherein, member is exported with from charge from the voltage Vy that ideal conversion output circuit 1090c is exported The amount of savings for the charge Q y that part 1010 exports is proportional.

Switch element 1093 is, for example, MOSFET (Metal Oxide Semiconductor Field Effect Transistor: metal oxide layer semiconductor field effect transistor) etc. thyristors.Due to thyristor with Mechanical switch is compared to small-sized and light-duty, so being conducive to the miniaturization and lightness of force checking device 1d.Hereinafter, conduct Typical example, to having used MOSFET to be illustrated as the case where switch element 1093.

Switch element 1093 has drain electrode, source electrode and gate electrode.The drain electrode of switch element 1093 or source electricity One of pole connect with the inversing input terminal 1911 of operational amplifier 1091, another and operation of drain electrode or source electrode The output terminal 1913 of amplifier 1091 connects.In addition, the gate electrode of switch element 1093 is connect with driving circuit (not shown).

Same driving electricity can be connected on the switch element 1093 of each conversion output circuit 1090a, 1090b, 1090c Road can also be separately connected different driving circuits.Fully synchronized closure/disconnected is inputted to each switch element 93 from driving circuit ON signal.Respectively the movement of the switch element 1093 of conversion output circuit 1090a, 1090b, 1090c is synchronous as a result,.That is, each conversion The closure of the switch element 1093 of output circuit 1090a, 1090b, 1090c/disconnection timing is consistent.

Wherein, the constituent material as wiring 1151,1152,1153 does not limit especially as long as conductive It is fixed, for example, the various metal materials such as alloy of copper, aluminium, tungsten etc., these metals can be enumerated.

[external force detection circuit]

External force detection circuit 1040, which has based on the voltage Vx exported from conversion output circuit 1090a, from conversion, exports electricity The voltage Vz of road 1090b output and the function that the external force being applied is detected from the voltage Vy of conversion output circuit 1090c output Energy.External force detection circuit 1040 have with the converter 1401 that connect of conversion output circuit 1090a, 1090b, 1090c and with The operational part 1402 that converter 1401 connects.

Converter 1401 has the function that voltage Vx, Vy, Vz are converted from analog into digital signal.Turned by AD Parallel operation 1401 has carried out voltage Vx, Vy, Vz after digital conversion and has been input to operational part 1402.

That is, inclined to α (X) axis direction each other in the relative position for being applied first substrate 1002 and the second substrate 1003 In the case where the external force of shifting, 1401 output voltage Vx of converter.Equally, first substrate 1002 and the second base are being applied In the case where the external force that the relative position of plate 1003 is deviated to β (Y) axis direction each other, 1401 output voltage Vy of converter.Separately Outside, it is deviated each other to γ (Z) axis direction in the relative position for being applied first substrate 1002 and the second substrate 1003 outer In the case where power, 1401 output voltage Vz of converter.

1402 couples of operational part voltage Vx, Vy, Vz carried out after digital conversion for example carry out eliminating each conversion output circuit Amendment of the difference of sensitivity between 1090a, 1090b, 1090c etc. is respectively handled.Moreover, the output of operational part 1402 is exported with from charge Three proportional signals of the amount of savings of charge Q x, Qy, Qz that element 1010 exports.Due to these three signals and it is applied to charge Three axle powers (shearing force and compression/drawing force) of output element 1010 are corresponding, so force checking device 1d is able to detect and applies Add to three axle powers of charge output element 1010.

As shown in FIG. 8 and 9, in force checking device 1d, protrusion 1021 is equipped in first substrate 1002.To this For one substrate 1002 with for the second substrate 1003, protrusion 1021 becomes inside, and the face of first substrate 1002 and the second substrate 1003 face interval and it is opposed.Wherein, the upper surface (face opposed with the second substrate 1003) 1211 of protrusion 1021 is flat Face.The protrusion 1021 can be integrally formed with first substrate 1002, alternatively, it is also possible to be formed by individual components.In addition, protrusion 1021 constituent material is not particularly limited, such as can be identical as first substrate 1002.

In addition, the position of protrusion 1021 is not particularly limited, but in the present embodiment, protrusion 1021 is configured in first The central portion of substrate 1002.

In addition, the shape of protrusion 1021 is not particularly limited, but in the present embodiment, when overlooking first substrate 1002, For shape identical with charge output element 1010, as quadrangle.In addition, above-mentioned other when being overlooked as protrusion 1021 Shape, such as the polygons such as quadrangle, pentagon, ellipse can be enumerated etc..

In addition, being formed at the position for being configured with charge output element 1010 of analog circuit substrate 1004, i.e. central portion It is inserted into the hole 1041 of protrusion 1021.The hole 1041 is the through hole for penetrating through analog circuit substrate 1004.The shape in hole 1041 is not It is particularly limited to, but in the present embodiment, when overlooking first substrate 1002, is shape identical with protrusion 1021, is corner Shape.Wherein, analog circuit substrate 1004 is supported by protrusion 1021.

Equally, it is formed at the position for being configured with charge output element 1010 of digital circuit substrate 1005, i.e. central portion It is inserted into the hole 1051 of protrusion 1021.The shape in hole 1051 is not particularly limited, but in the present embodiment, overlooks first substrate When 1002, it is shape identical with protrusion 1021, is quadrangle.Wherein, digital circuit substrate 1005 is supported by protrusion 1021.

In addition, being formed in analog circuit substrate 1004, there are two two holes 1042 that pressurization bolt 1071 is inserted, equally, There are two two holes 1052 that pressurization bolt 1071 is inserted for the formation of digital circuit substrate 1005.

Protrusion 1021 is inserted into the hole 1041 of analog circuit substrate 1004 and the hole 1051 of digital circuit substrate 1005, And it is prominent towards charge output element 1010.Moreover, sensor device 1006 is clamped by protrusion 1021 and the second substrate 1003, by This, charge output element 1010 is clamped by shell 1060 by protrusion 1021 and the second substrate 1003.Wherein, the second substrate 1003 Lower surface (face opposed with first substrate 1002) 1036 be plane, the lid of the lower surface 1036 and sensor device 1006 1062 central portion abuts, and the upper surface 1211 of protrusion 1021 is abutted with base portion 1061.

In addition, the size of protrusion 1021 is not particularly limited, but when preferred vertical view first substrate 1002, the face of protrusion 1021 Product is the area of charge output element 1010 or more, and the area of more preferable specific charge output element 1010 is big.Wherein, in diagram In composition, the area of the area specific charge output element 1010 of protrusion 1021 is big.Moreover, charge output element 1010 overlooks the It is configured in protrusion 1021 (from the direction vertical relative to first substrate 1002) when one substrate 1002, in addition, charge The center line of output element 1010 is consistent with the center line of protrusion 1021.In this case, it is preferred that charge output element 1010 is being bowed It is not prominent from protrusion 1021 when depending on first substrate 1002.Thereby, it is possible to apply pressurization to charge output element 1010 is whole, separately Outside, when carrying out power detection, the whole power for applying external force and carrying out higher precision of charge output element 1010 can be detected.This Outside, protrusion 1021 can also be omitted.

In addition, first substrate 1002 is fixed with the second substrate 1003 by two pressurization bolts 1071.Wherein, by adding " fixation " that pressure bolt 1071 is realized two mutual specified amounts of fixed object of permission it is mobile while carry out.It is specific and Speech, first substrate 1002 and the second substrate 1003 are being allowed to the second of mutual specified amount by two pressurization bolts 1071 The face direction of substrate 1003 it is mobile while be fixed.In addition, this also phase in other embodiments described below Together.

Each pressurization bolt 1071 configures in such a way that its head 1715 becomes 1003 side of the second substrate respectively, from being formed in the The hole 1035 of two substrates 1003 is inserted into, and inserts the hole in the hole 1042 of analog circuit substrate 1004, digital circuit substrate 1005 1052, external screw thread 1716 is screwed up with the internal screw thread 1025 for being formed in first substrate 1002.Moreover, passing through each pressurization bolt 1071, apply pressure, the i.e. pressurization of the Z-direction (referring to Fig.1 1) of defined size to charge output element 1010.Wherein, on The size for stating pressurization is not particularly limited, and can suitably be set.

In addition, the position of each pressurization bolt 1071 is not particularly limited, but in the present embodiment, each pressurization bolt 1071 Along the circumferential direction of first substrate 1002, the second substrate 1003, analog circuit substrate 1004 and digital circuit substrate 1005, with etc. Angle interval (180 ° of intervals) configuration, that is, be configured to overlook opposed across charge output element 1010 when the second substrate 1003. Thereby, it is possible to balance to fix first substrate 1002 and the second substrate 1003 well, in addition, can balance well to each charge Output element 1010 applies pressurization.In addition, the number of pressurization bolt 1071 is not limited to two, such as or three with On.

Wherein, the constituent material as each pressurization bolt 1071, is not particularly limited, such as is able to use various resinous woods Material, various metal materials etc..

In addition, as shown in Figure 10 and Figure 12, in force checking device 1d, in the mounting surface of analog circuit substrate 1004 1043 are formed with the charge output element 1010 for surrounding sensor device 1006 and conversion output circuit 1090a, 1090b, 1090c Between wiring 1151,1152,1153 guard ring 1008.The charge that thereby, it is possible to prevent from exporting from charge output element 1010 Other wiring leakages from wiring 1151,1152,1153 to wiring 1016 etc., thereby, it is possible to improve the measurement of force checking device 1d Precision.

It wherein, is continuous pattern in reality although illustrating guard ring 1008 in Figure 10 with single dotted broken line.But, Guard ring 1008 position or plurality of positions can also be disconnected with part of it, i.e. at one, which is also contained in the present invention.Separately Outside, in the present embodiment, guard ring 1008 surrounds charge output element 1010 and conversion output circuit 1090a, 1090b, 1090c Between wiring 1151,1152,1153 entirety, but not limited to this, a part, such as of wiring 1151,1152,1153 The conversion output at position, wiring 1151,1152,1153 near the charge output element 1010 of wiring 1151,1152,1153 Position near circuit 1090a, 1090b, 1090c etc. can not also be surrounded by guard ring 1008.

In addition, the formation pattern of guard ring 1008 is not particularly limited, such as can enumerate along wiring 1151,1152,1153 The pattern of periphery and the unallied pattern of pattern of wiring 1151,1152,1153 etc..

In addition, the size of guard ring 1008 is not particularly limited, can suitably it be set according to all conditions, but preferably guard ring 1008 Thickness d at 1 μm or more 500 μm hereinafter, more preferably at 5 μm or more 100 μm or less.Additionally, it is preferred that the width W of guard ring 1008 exists 2 μm or more 1mm are hereinafter, more preferably at 10 μm or more 300 μm or less.Guard ring 1008 can dimensionally be formed by the square as a result, The leakage of the charge from conversion output circuit 1090a, 1090b, 1090c can be more reliably prevented from.

In addition, the constituent material as guard ring 1008, is not particularly limited, such as copper, aluminium, tungsten can be enumerated etc., these The various metal materials such as the alloy of metal.In addition, guard ring 1008 can with wiring 1151,1152,1153 identical materials, with Wiring 1151,1152,1153 is formed simultaneously.

Additionally, it is preferred that guard ring 1008 is connect with ground (reference potential point), make its current potential earthing potential.That is, it is preferred that making to protect The current potential of circle 1008 and the non-inverting input terminal 1912 of operational amplifier 1091 are same current potential.Due to wiring 1151,1152, 1153 current potential is approximately worth with earthing potential, so thus, it is possible to prevent electric current from flowing through shield from wiring 1151,1152,1153 Circle 1008 can prevent the leakage of the charge (electric current) from wiring 1151,1152,1153.Thereby, it is possible to correctly detect from electricity The charge that lotus output element 1010 exports can be improved the precision of power detection.

In addition, being respectively equipped with solder resist in the mounting surface 1043 of analog circuit substrate 1004 and the predetermined portion in face 1044 (solder mask) 1017.Thereby, it is possible to protect analog circuit substrate 1004, in addition, can prevent because of the welding in manufacturing process And in the unwanted part attached solder of analog circuit substrate 1004, lead to short circuit.

But solder resist 1017 is not provided in the region 1081 of analog circuit substrate 1004 surrounded by guard ring 1008.It should In the case of, in region 1081, not only in the not set solder resist 1017 of the mounting surface of analog circuit substrate 1,004 1043, with the peace The face 1044 of 1043 opposite side of dress face also not set solder resist 1017.Thereby, it is possible to prevent charge from wiring 1151,1152, 1153 leak via solder resist 1017.

Wherein, solder resist 1017 for example can be by including epoxy resin, polyimide resin, polyurethane resin, silicone resin Deng material formed.

In addition, the region 1081 of analog circuit substrate 1004 surrounded by guard ring 1008 it is not set make convert output circuit The power-supply wiring and the wiring being routed other than 1151,1152,1153 that 1090a, 1090b, 1090c etc. are electrically connected to a power source.It should In the case of, in region 1081, not only in the not set power-supply wiring of the mounting surface of analog circuit substrate 1,004 1043 and wiring 1151, the wiring other than 1152,1153, in the not set power supply in any one face of the thickness direction of analog circuit substrate 1004 Wiring other than wiring and wiring 1151,1152,1153.Thereby, it is possible to prevent charge from wiring 1151,1152,1153 to Others wiring leakage.

As described above, it can be prevented by guard ring 1008 by charge output element according to force checking device 1d For the charge of 1010 outputs from wiring 1151,1152,1153 to others wiring leakage, thereby, it is possible to improve force checking device 1d Measurement accuracy.In addition, the composition of analog circuit substrate 1004 can be simplified.

(the 5th embodiment)

Figure 13 is the top view for indicating the 5th embodiment of force checking device according to the present invention.Figure 14 is in Figure 13 A-A ' line at cross-sectional view.Figure 15 is the circuit diagram for briefly expressing force checking device shown in Figure 13 (comprising guard ring).This Outside, guard ring is illustrated in the circuit diagram of Figure 15.

Hereinafter, the 5th embodiment is illustrated centered on the difference of the 4th above-mentioned embodiment, it is right The description thereof will be omitted for identical item.

The force checking device 1e of 5th embodiment shown in Figure 13 and Figure 14 has detection external force (including torque) Function detects six axle powers (force component of going forward side by side (shearing force) of x, y, z axis direction and the rotation force components around x, y, z axis (torque)) function.

As shown in Figure 13 and Figure 14, there are four 1006, four pressurization bolts of sensor device for force checking device 1e tool 1071.The position of each sensor device 1006 is not particularly limited, but in the present embodiment, each sensor device 1006, i.e. Each charge output element 1010 along first substrate 1002, the second substrate 1003 and analog circuit substrate 1004 circumferential direction, with etc. Angle interval (90 ° of intervals) configuration.External force is poorly detected thereby, it is possible to unbiased.Moreover, being able to detect six axle powers.In addition, In present embodiment, each charge output element 1010 is all towards identical direction, and but not limited to this.

In addition, being set in a manner of corresponding with each sensor device 1006 in first substrate 1002, there are four protrusions 1021.Its In, for the protrusion 1021, due to having completed to illustrate in the 4th embodiment, so the description thereof will be omitted.

In addition, the number of sensor device 1006 be not limited to it is aforementioned four, such as or two, three or Person five or more.But the number of sensor device 1006 is preferably several, preferably three or more.In addition, as long as power detects Device 1e has at least three sensor devices 1006, it will be able to detect six axle powers.It is three in sensor device 1006 In the case of, since the number of sensor device 1006 is less, so force checking device 1e lightness can be made.In addition, sensing In the case that device equipment 1006 is four as illustrated, since six can be found out by aftermentioned very simple calculations Axle power, so operational part 1402 can be simplified.

[conversion output circuit, wiring and guard ring]

As shown in figure 15, conversion is connected with by wiring 1151,1152,1153 respectively on each charge output element 1010 Output circuit 1090a, 1090b, 1090c.In addition, the mounting surface 1043 in analog circuit substrate 1004 is formed with each wiring of encirclement 1151,1152,1153 guard ring 1008.Due to each conversion output circuit 1090a, 1090b, 1090c, respectively wiring 1151,1152, 1153 and each guard ring 1008 and the 4th above-mentioned embodiment conversion output circuit 1090a, 1090b, 1090c, wiring 1151,1152,1153 and guard ring 1008 it is identical, so the description thereof will be omitted.

[external force detection circuit]

External force detection circuit 1040 have based on from it is each conversion output circuit 1090a export voltage Vx1, Vx2, Vx3, Vx4, from each conversion output circuit 1090b voltage Vz1, Vz2, Vz3, Vz4 exported and from each conversion output circuit 1090c Voltage Vy1, Vy2, Vy3, Vy4 of output, to detect the function for the external force being applied.Wherein, with the charge of the upside in Figure 13 Corresponding output element 1010 is voltage Vx1, Vy1 and Vz1, corresponding with the charge output element 1010 on the right side in Figure 13 Voltage Vx2, Vy2 and Vz2, it is corresponding with the charge output element 1010 of the downside in Figure 13 be voltage Vx3, Vy3 and Vz3, corresponding with the charge output element 1010 in the left side in Figure 13 is voltage Vx4, Vy4 and Vz4.External force detection circuit 1040 have with conversion output circuit 1090a, 1090b, 1090c converter 1401 connecting and connect with converter 1401 The operational part 1402 connect.

Converter 1401 has voltage Vx1, Vy1, Vz1, Vx2, Vy2, Vz2, Vx3, Vy3, Vz3, Vx4, Vy4, Vz4 It is converted from analog into the function of digital signal.By converter 1401 carried out digital conversion voltage Vx1, Vy1, Vz1, Vx2, Vy2, Vz2, Vx3, Vy3, Vz3, Vx4, Vy4, Vz4 are input into operational part 1402.

That is, inclined to α (X) axis direction each other in the relative position for being applied first substrate 1002 and the second substrate 1003 In the case where the external force of shifting, converter 1401 output voltage Vx1, Vx2, Vx3, Vx4.Equally, it is being applied first substrate 1002 and the second substrate 1003 relative position each other to β (Y) axis direction deviate external force in the case where, converter 1401 Output voltage Vy1, Vy2, Vy3, Vy4.In addition, in the relative position for being applied first substrate 1002 and the second substrate 1003 In the case where the external force deviated each other to γ (Z) axis direction, converter 1401 output voltage Vz1, Vz2, Vz3, Vz4.

In addition, first substrate 1002 and the second substrate 1003 are able to carry out the relative displacement rotated around x axis, around y each other The relative displacement of axis rotation and the relative displacement rotated around z-axis, it is defeated can will to pass to charge along with the external force of each rotation Element 1010 out.

Operational part 1402 have based on carried out voltage Vx1, Vy1 after digital conversion, Vz1, Vx2, Vy2, Vz2, Vx3, Vy3, Vz3, Vx4, Vy4, Vz4, to the force component Fx that goes forward side by side of x-axis direction, the force component Fy that goes forward side by side in y-axis direction, z-axis direction and Into force component Fz, around x-axis rotation force component Mx, around y-axis rotation force component My and around z-axis rotation force component Mz into The function of row operation.Each force component can be found out by following formula.

Fx=Vx1+Vx2+Vx3+Vx4

Fy=Vy1+Vy2+Vy3+Vy4

Fz=Vz1+Vz2+Vz3+Vz4

Mx=b × (Vz4-Vz2)

My=a × (Vz3-Vz1)

Mz=b × (Vx2-Vx4)+a × (Vy1-Vy3)

Here, a, b are constants.

In this way, force checking device 1e is able to detect six axle powers.

In addition, operational part 1402 can also for example carry out eliminating between each conversion output circuit 1090a, 1090b, 1090c The amendment etc. of the difference of sensitivity.

In addition, first substrate 1002 and the second substrate 1003 pass through four pressurization bolts as shown in Figure 13 and Figure 14 1071 are fixed.In addition, the number of pressurization bolt 1071 is not limited to four, such as or two, three or five More than a.

In addition, the position of each pressurization bolt 1071 is not particularly limited, but in the present embodiment, each pressurization bolt 1071 Along the circumferential with isogonism of first substrate 1002, the second substrate 1003, analog circuit substrate 1004 and digital circuit substrate 1005 Degree interval (90 ° of intervals) configuration.Thereby, it is possible to balance to fix first substrate 1002 and the second substrate 1003 well, in addition, energy Enough balances well pressurize to each charge output element 1010.

According to force checking device 1e, effect identical with the 4th above-mentioned embodiment can be obtained.

(sixth embodiment)

Next, being based on Figure 16, sixth embodiment, that is, one armed robot of the invention is illustrated.Hereinafter, for Sixth embodiment is illustrated centered on the difference of above-mentioned each embodiment, omits it for identical item Explanation.

Figure 16 is to indicate that force checking device 1 according to the present invention has been used (to refer to force checking device 1a, 1b, 1c, 1d, 1e In any one) one armed robot an example figure.

As shown in figure 16, the one armed robot 500 of present embodiment has base station 510, arm union body 520, is set to arm company The end effector 530 of the front end side of knot body 520 and the present invention being located between arm union body 520 and end effector 530 Related force checking device 1.

Base station 510 has to the actuator (not shown) and control for generating the power for rotating arm union body 520 The function that control unit (not shown) of actuator etc. is stored.In addition, base station 510 is for example fixed on floor, wall, smallpox On plate, the trolley that can be moved etc..

Arm union body 520 has the first arm 521, the second arm 522, third arm 523, the 4th arm 524 and the 5th arm 525, It is constituted and in a rotatable manner that adjacent arm is connected to each other.Arm union body 520 according to the control of control unit, passes through It is rotated or is bent to be driven compoundly centered on the linking part of each arm.

End effector 530 has the function of holding object.End effector 530 has first to refer to 531 and second Refer to 532.After the operating position as defined in reached and based on the driving of arm union body 520 of end effector 530, adjustment the The separating distance of one finger 531 and the second finger 532, being capable of holding object.

In addition, end effector 530 is hand herein, but in the present invention, it's not limited to that.As end effector Other examples, such as can listed items inspection utensil, component conveying utensil, component processing utensil, component assembling With utensil, analyzer etc..This is also identical for the end effector in other embodiments.

Force checking device 1 has the function of that detection is applied to the external force of end effector 530.It will by force checking device 1 The external force detected feeds back to the control unit of base station 510, and one armed robot 500 is able to carry out more accurate operation.In addition, according to Six axle powers that force checking device 1 detects, one armed robot 500 are able to detect contact of the end effector 530 to barrier Deng.Therefore, it can easily be done obstacle avoidance movement difficult in previous position control, object damage avoidance is moved Make etc., one armed robot 500 can more safely execute operation.Also, in force checking device 1 according to the present invention, by In the circuit for not needing to be used to reduce output shift as reverse bias circuit, so force checking device 1 can be made to minimize. Therefore, one armed robot 500 can be made to minimize.

In addition, arm union body 520 is total to be made of five arms, but the present invention is not limited to this in the composition of diagram. The case where arm union body 520 is made of one arm, the case where being made of 2~4 arms, the case where being made of six or more arms Within the scope of the invention.

(the 7th embodiment)

<multi-arm robot>

Next, being based on Figure 17, seven embodiments, that is, multi-arm robot of the invention is illustrated.Hereinafter, for 7th embodiment is illustrated centered on the difference of above-mentioned each embodiment, omits it for identical item Explanation.

Figure 17 is to indicate that force checking device 1 according to the present invention has been used (to refer to force checking device 1a, 1b, 1c, 1d, 1e In any one) multi-arm robot an example figure.

As shown in figure 17, the multi-arm robot 600 of present embodiment has base station 610, the first arm union body 620, second Arm union body 630, set on the front end side of the first arm union body 620 first end actuator 640a, be set to the second arm union body It the second end actuator 640b of 630 front end side and is located between the first arm union body 620 and first end actuator 640a And the second force checking device according to the present invention 1 between arm union body 630 and second end actuator 640b.

Base station 610 has to the power generated for rotating the first arm union body 620 and the second arm union body 630 The function that actuator (not shown) and the control unit (not shown) etc. for controlling actuator are stored.In addition, base station 610 is for example Be fixed on floor, wall, ceiling, on the trolley that can move etc..

First arm union body 620 is constituted and linking the first arm 621 and the second arm 622 in a rotatable manner. Second arm union body 630 is constituted and linking the first arm 631 and the second arm 632 in a rotatable manner.First arm connects Knot body 620 and the second control of the arm union body 630 based on control unit, by being rotated centered on the linking part of each arm compoundly Or bending is to be driven.

First end actuator 640a and second end actuator 640b have the function of holding object.First end Actuator 640a has first to refer to that 641a and second refers to 642a.Second end actuator 640b has first to refer to 641b and the Two refer to 642b.First end actuator 640a is by reaching defined act bit and based on the driving of the first arm union body 620 After setting, adjustment first refers to that 641a and second refers to the separating distance of 642a, being capable of holding object.Equally, second end is held After reaching defined operating position and based on the driving of the second arm union body 630, adjustment first refers to row device 640b 641b and second refers to the separating distance of 642b, being capable of holding object.

There is force checking device 1 detection to be applied to the outer of first end actuator 640a or second end actuator 640b The function of power.The control unit of base station 610 is fed back to by the external force that force checking device 1 will test out, multi-arm robot 600 can More closely execute operation.In addition, according to six axle powers that force checking device 1 detects, multi-arm robot 600 is able to detect first Contact etc. of the end effector 640a or second end actuator 640b to barrier.Therefore, can easily be done with Toward position control in difficult obstacle avoidance movement, object damage avoidance action etc., multi-arm robot 600 can more pacify Operation is executed entirely.Also, in force checking device 1 according to the present invention, as not needing as reverse bias circuit For reducing the circuit of output shift, so force checking device 1 can be made to minimize.Therefore, multi-arm robot 600 can be made small Type.

In addition, arm union body amounts to two, but the present invention is not limited to this in the composition of diagram.Multi-arm machine People 600 has the case where three or more arm union bodies also within the scope of the invention.

(the 8th embodiment)

Next, being based on Figure 18 and Figure 19, eight embodiments according to the present invention, that is, electronic component inspection is filled It sets and electronic component handling apparatus is illustrated.Hereinafter, for the 8th embodiment, with above-mentioned each embodiment not With being illustrated centered on putting, for identical item, the description thereof will be omitted.

Figure 18 is to indicate that force checking device 1 according to the present invention has been used (to refer to force checking device 1a, 1b, 1c, 1d, 1e In any one) electronic component inspection device and electronic component handling apparatus an example figure.Figure 19 is to indicate The figure of an example of the electronic component handling apparatus of force checking device according to the present invention is used.

As shown in figure 18, the electronic component inspection device 700 of present embodiment has base station 710 and erects and is arranged in base The supporting station 720 of the side of platform 710.The electronic component 711 for loading and conveying check object is equipped in the upper surface of base station 710 The upstream side workbench 712u and downstream side workbench 712d for loading and conveying the electronic component 711 that inspection finishes.In addition, The filming apparatus for confirming the posture of electronic component 711 is equipped between upstream side workbench 712u and downstream side workbench 712d 713 and the inspection desk 714 of electronic component 711 is set in order to check electrical characteristics.Wherein, the example as electronic component 711, Semiconductor, semiconductor wafer, LCD, OLED etc. can be enumerated and show equipment, crystal equipment, various sensors, ink gun, various MEMS device etc..

In addition, in supporting station 720 with can be to the upstream side workbench 712u and downstream side workbench with base station 710 The mobile mode in 712d parallel direction (Y-direction) is equipped with Y workbench 731, from Y workbench 731 to the direction towards base station 710 (X-direction), which is extended, arm 732.It works in addition, being equipped with X in a manner of it can move to X-direction in the side of arm 732 Platform 733.In addition, X workbench 733 be equipped with shooting camera 734 and it is built-in being capable of vertically (Z-direction) mobile Z The electronic component handling apparatus 740 of workbench.The ministry of electronics industry is held in addition, being equipped in the front end side of electronic component handling apparatus 740 The handle part 741 of part 711.In addition, being equipped with institute of the present invention between the front end and handle part 741 of electronic component handling apparatus 740 The force checking device 1 being related to.Also, the molar behavior of control electronic component inspection device 700 is equipped in the front side of base station 710 Control device 750.

Electronic component inspection device 700 carries out the inspection of electronic component 711 as described below.Firstly, making check object Electronic component 711 is placed on upstream side workbench 712u, and is moved near inspection desk 714.Next, mobile Y workbench 731 and X workbench 733 is placed in the electronics of upstream side workbench 712u be moved to electronic component handling apparatus 740 Component 711 just on position.At this point, being able to use shooting camera 734 to confirm the position of electronic component 711.Then, if Decline electronic component handling apparatus 740 using the Z workbench being built in electronic component handling apparatus 740, passes through handle part 741 hold electronic component 711, then are moved to electronic component handling apparatus 740 on filming apparatus 713, and use bat Take the photograph the posture that device 713 confirms electronic component 711.Next, using the micro-adjusting mechanism for being built in electronic component handling apparatus 740 To adjust the posture of electronic component 711.Then, it after being moved to electronic component handling apparatus 740 on inspection desk 714, moves Electronic component 711 is placed on inspection desk 714 by the dynamic Z workbench for being built in electronic component handling apparatus 740.Due to using Micro-adjusting mechanism in electronic component handling apparatus 740 has adjusted the posture of electronic component 711, so can be by electronic component 711 It is placed into the correct position of inspection desk 714.Next, in the electrical characteristics inspection for finishing electronic component 711 using inspection desk 714 After looking into, electronic component 711, mobile Y workbench 731 and X workbench 733 specifically are lifted from inspection desk 714, to make the ministry of electronics industry Part conveying device 740 is moved on the workbench 712d of downstream side, and electronic component 711 is placed in downstream side workbench 712d.Finally, Mobile downstream side workbench 712d, is transported to specified position for the electronic component 711 after inspection.

As shown in figure 19, the electronic component handling apparatus 740 of present embodiment has handle part 741, connects with handle part 741 The force checking device 1 that connects, the rotary shaft 742 being connect via force checking device 1 with handle part 741 and the side can rotate Formula is installed on the tuning plate 743 of rotary shaft 742.In addition, tuning plate 743 can be while being guided mechanism guidance (not shown) It is mobile to X-direction and Y-direction.

In addition, 744 θ of piezo-electric motor towards the end face of rotary shaft 742 equipped with direction of rotation, 744 θ's of piezo-electric motor Driving protrusion (not shown) is pressed against the end face of rotary shaft 742.Therefore, by acting 744 θ of piezo-electric motor, can make to revolve Shaft 742 (and handle part 741) rotates arbitrary angle to the direction θ.In addition, being equipped with the pressure of X-direction towards tuning plate 743 The piezo-electric motor 744y of electric notor 744x and Y-direction, respective driving protrusion (not shown) are pressed against tuning plate 743 Surface.Therefore, by acting piezo-electric motor 744x, tuning plate 743 (and handle part 741) can be made to appoint to X-direction is mobile The distance of meaning equally by acting piezo-electric motor 744y, can be such that tuning plate 743 (and handle part 741) moves to Y-direction Move arbitrary distance.

In addition, force checking device 1 has the function of that detection is applied to the external force of handle part 741.It will by force checking device 1 The external force detected feeds back to control device 750, and electronic component handling apparatus 740 and electronic component inspection device 700 can More closely execute operation.In addition, being able to detect handle part 741 to barrier according to the external force that force checking device 1 detects Contact etc..Therefore, it can easily be done obstacle avoidance movement difficult in previous position control, object damages back Movement etc. is kept away, electronic component handling apparatus 740 and electronic component inspection device 700 are able to carry out safer operation.Also, In force checking device 1 according to the present invention, as not needing as reverse bias circuit for reducing output shift Circuit, so force checking device 1 can be made to minimize.Therefore, electronic component handling apparatus 740 and electronic component can be made to examine Look into the miniaturization of device 700.

(the 9th embodiment)

Next, being based on Figure 20, nine embodiments, that is, part forming unit of the invention is illustrated.Hereinafter, right It in the 9th embodiment, is illustrated centered on the difference of above-mentioned each embodiment, identical item is omitted Its explanation.

Figure 20 is to indicate that force checking device 1 according to the present invention has been used (to refer to force checking device 1a, 1b, 1c, 1d, 1e In any one) part forming unit an example figure.The part forming unit 800 of Figure 20 have base station 810, Pillar 820 that the upper surface of base station 810 is uprightly formed, be located at pillar 820 side feed mechanism 830, with what can be gone up and down Mode is installed on the tool displacement portion 840 of feed mechanism 830, the power according to the present invention connecting with tool displacement portion 840 inspection The tool 850 surveyed device 1 and be installed on tool displacement portion 840 via force checking device 1.

Base station 810 is the platform for loading and fixing processed component 860.Pillar 820 is for fixing feed mechanism 830 Column.Feed mechanism 830 has the function of going up and down tool displacement portion 840.Feed mechanism 830 has feeding 831 and of motor The guide rail 832 for going up and down tool displacement portion 840 based on the output from feeding motor 831.Tool displacement portion 840 have pair Tool 850 assigns the function of the displacements such as rotation, vibration.Tool displacement portion 840 has displacement motor 841, is set to and uses with displacement Motor 841 link main shaft (not shown) front end tool mounting-portion 843 and be installed on tool displacement portion 840 to keep The maintaining part 842 of main shaft.Tool 850 is installed in the tool mounting-portion 843 in tool displacement portion 840, quilt via force checking device 1 For processing processed component 860 according to the displacement assigned by tool displacement portion 840.Tool 850 is not particularly limited, such as It is spanner, Phillips screwdriver, straight screwdriver, cutter, annular saw, pliers, awl, drill bit, milling cutter etc..

Force checking device 1 has the function of that detection is applied to the external force of tool 850.It is will test out by force checking device 1 External force feed back to feeding motor 831, displacement motor 841, part forming unit 800 can more closely execution unit add Work industry.In addition, being able to detect contact etc. of the tool 850 to barrier according to the external force that force checking device 1 detects.Therefore, Emergent stopping, part forming unit 800 safer portion can be able to carry out in the case where tool 850 contacts barrier etc. Part processes operation.Also, in force checking device 1 according to the present invention, as not needing to use as reverse bias circuit In reducing the circuit of output shift, so force checking device 1 can be made to minimize.Therefore, part forming unit 800 can be made small Type.

(the tenth embodiment)

Next, being based on Figure 21, ten embodiments, that is, moving body of the invention is illustrated.Hereinafter, for the tenth Embodiment is illustrated centered on the difference of above-mentioned each embodiment, and for identical item, the description thereof will be omitted.

Figure 21 is to indicate that force checking device 1 according to the present invention has been used (to refer to force checking device 1a, 1b, 1c, 1d, 1e In any one) moving body an example figure.

As shown in figure 21, the moving body 900 of present embodiment can be moved by the power being endowed.Moving body 900 It is not particularly limited, e.g. the vehicles such as automobile, bicycle, aircraft, ship, electric car, bipod walking robot, wheel are mobile Robots such as robot etc..

Moving body 900 has main body 910 (for example, fuselage etc. of the shell of the vehicles, robot), supply for making to lead The power according to the present invention of external force caused by movement of the power part 920, detection of the mobile power of body 910 because of main body 910 Detection device 1 and control unit 930.

If main body 910 is moved by the power supplied from power part 920, as movement can generate vibration, acceleration Deng.External force caused by vibration, acceleration that the detection of force checking device 1 generates due to mobile etc..It is detected by force checking device 1 External force out passes to control unit 930.Control unit 930 by according to from force checking device 1 transmit come external force control power Portion 920 etc. is able to carry out the controls such as ability of posture control, vibration control and acceleration control.Also, it is examined in power according to the present invention It surveys in device 1, as not needing for reducing the circuit of output shift as reverse bias circuit, so power can be made to detect Device 1 minimizes.Therefore, moving body 900 can be made to minimize.

In force checking device 1 according to the present invention, having maximum detection load is 250N, and maximum detection torque is 180Nm, minimum detection torque are 0.00016Nm, and breaking load is 1000N or more, and lagging characteristics are in 2% high-performance below.

More than, to force checking device 1 according to the present invention and the power is used to detect based on embodiment illustrated Robot, electronic component handling apparatus, electronic component inspection device, part forming unit and the moving body of device 1 carry out Illustrate, but the present invention is not limited to this, each portion is configured to be replaced into the same function be formed arbitrarily.In addition, Object can be formed arbitrarily to the additional others of the present invention.In addition, the present invention is also possible to be combined with appointing in above embodiment Anticipate it is more than two constitute (feature) compositions.

In addition, in the present invention, also can be omitted shell.

In addition, in the above-described embodiment, come the element of output signal, having been used using piezoelectrics as according to external force Element, but in the present invention, as long as the element that output changes according to the external force being applied, then it's not limited to that, in addition, Such as the element for having used pressure sensitive conductive body etc. can be enumerated.

In addition, in the present invention, also can replace pressurization bolt and for example using having the function of applying pressurization to element Element, alternatively, it is also possible to using the fixing means other than bolt.

It, can also be with as long as being not limited to arm type robot (mechanical arm) in addition, robot of the invention has arm It is robot of other forms, such as SCARA robot, the walking of leg formula (walking) robot etc..

In addition, force checking device 1 according to the present invention is not limited to robot, electronic component handling apparatus, electronics Component check device, part forming unit and moving body can also apply to other devices, such as convey applied to others It is the measurement devices such as device, other check device, vibrometer, accelerometer, gravitometer, dynamometer, seismometer, inclinometer, defeated Enter device etc..

Symbol description

1a, 1b, 1c, 1d, 1e ... force checking device, 2 ... first base portions, 3a, 3b ... power detecting element, 4 ... second base portions, 5 ... external force detection circuits, 21 ... first rakes, 30a, 30b, 30c, 30d ... power detecting element, 31 ... charge output elements, 32,32a, 32b, 32c ... conversion circuit, 33 ... operational amplifiers, 34 ... capacitors, 35 ... switch elements, 41 ... second inclinations Portion, 50 ... external force detection circuits, 301a ... the first charge output element, 301b ... the second charge output element, 310 ... ground connection electricity Pole layer, 320 ... the first β axis sensors, 321 ... first piezoelectric body layers, 322 ... output electrode layers, 323 ... second piezoelectrics Layer, 330 ... the first γ axis sensors, 331 ... third piezoelectric body layers, 332 ... output electrode layers, 333 ... four piezoelectrics layers, 340 ... the first α axis sensors, 341 ... the 5th piezoelectric body layers, 342 ... output electrode layers, 343 ... the 6th piezoelectric body layers, 350 ... the 2nd β axis sensors, 360 ... the 2nd γ axis sensors, 370 ... the 2nd α axis sensors, 500 ... single armed machines People, 510 ... base stations, 520 ... arm union bodies, 521 ... first arms, 522 ... second arms, 523 ... third arms, 524 ... the 4th arms, 525 ... the 5th arms, 530 ... end effectors, 531 ... first refer to, 532 ... second refer to, 600 ... multi-arm robots, 610 ... bases Platform, 620 ... first arm union bodies, 621 ... first arms, 622 ... second arms, 630 ... second arm union bodies, 631 ... first arms, 632 ... second arms, 640a ... first end actuator, 641a ... first refer to that 642a ... second refers to, 640b ... second end executes Device, 641b ... first refer to that 642b ... second refers to, 700 ... electronic component inspection devices, 710 ... base stations, 711 ... electronic components, The upstream side 712u ... workbench, the downstream side 712d ... workbench, 713 ... filming apparatus, 714 ... inspection desks, 720 ... supporting stations, 731 ... Y workbench, 732 ... arms, 733 ... X workbench, 734 ... shooting cameras, 740 ... electronic component handling apparatus, 741 ... handle parts, 742 ... rotary shafts, 743 ... tuning plates, 744x, 744y, 744 θ ... piezo-electric motors, 750 ... control devices, 800 ... part forming units, 810 ... base stations, 820 ... pillars, 830 ... feed mechanisms, 831 ... feeding motors, 832 ... lead Rail, 840 ... tool displacement portions, 841 ... displacement motors, 842 ... maintaining parts, 843 ... tool mounting-portions, 850 ... tools, 860 ... processed components, 900 ... moving bodys, 910 ... main bodys, 920 ... power parts, 930 ... control units, 1002 ... first substrates, 1003 ... the second substrates, 1004 ... analog circuit substrates, 1005 ... digital circuit substrates, 1006 ... sensor devices, 1008 ... Guard ring, 1010 ... charge output elements, 1011 ... ground electrode layers, 1012 ... first sensors, 1013 ... second sensors, 1014 ... 3rd sensors, 1015,1016 ... wirings, 1017 ... solder resists, 1021 ... protrusions, 1025 ... internal screw threads, 1035 ... Hole, 1036 ... lower surfaces, 1040 ... external force detection circuits, 1041,1042 ... holes, 1043 ... mounting surfaces, 1044 ... faces, 1051, 1052 ... holes, 1060 ... shells, 1061 ... base portions, 1062 ... lids, 1063 ... terminals, 1071 ... pressurization bolts, 1081 ... areas Domain, 1090a, 1090b, 1090c ... convert output circuit, 1091 ... operational amplifiers, 1092 ... capacitors, 1093 ... switch members Part, 1121 ... first piezoelectric body layers, 1122 ... output electrode layers, 1123 ... second piezoelectric body layers, 1131 ... third piezoelectric body layers, 1132 ... output electrode layers, 1133 ... four piezoelectrics layers, 1141 ... the 5th piezoelectric body layers, 1142 ... output electrode layers, 1143 ... the 6th piezoelectric body layers, 1211 ... upper surfaces, 1401 ... converters, 1402 ... operational parts, 1611 ... recess portions, 1625 ... Central portion, 1626 ... peripheral parts, 1715 ... heads, 1716 ... external screw threads, A1, A2 ... axis, the first crystallographic axis of CA1 ..., CA2 ... second Crystallographic axis, CA3 ... third crystallographic axis, the 4th crystallographic axis of CA4 ..., the 5th crystallographic axis of CA5 ..., the 6th crystallographic axis of CA6 ..., P α, P α 1, P α 2, P α 3, P α 4 ... polaxis, P β, P β 1, P β 2, P β 3, P β 4 ... polaxis, P γ, P γ 1, P γ 2, P γ 3, P γ 4 ... polaxis, Q, Q1, Q2, Q α, Q β, Q γ ... charge, V1, V2, V α, V β, V γ ... voltage, θ 1, θ 2, θ 3, θ 4 ... angle.

Claims

1. a kind of force checking device, which is characterized in that have:

First base portion；

Second base portion；And

First element, second element, third element and fourth element, the phase between first base portion and second base portion For first base portion and second base portion inclination or arranged perpendicular, the charge exported according to external force is converted into electricity Pressure, and the external force is detected according to the voltage,

The first element, the second element, the third element and the fourth element pass through respectively will have basis The external force and the multiple sensors of the polaxis of charge exported are laminated to constitute,

The stacking direction of the multiple sensor is being set as γ axis direction, it will be orthogonal and mutually orthogonal with the γ axis direction In the case that direction is set to α axis direction, β axis direction,

The multiple sensor include the α axis sensor that the charge is exported according to the external force to the α axis direction, With the β axis sensor that the charge is exported according to the external force to the β axis direction,

The direction of the polaxis of the α axis sensor of the first element and the α axis of the third element are used The direction of the polaxis of sensor towards opposite direction,

The direction of the polaxis of the β axis sensor of the first element and the β axis of the third element are used The direction of the polaxis of sensor towards opposite direction,

The direction of the polaxis of the α axis sensor of the second element and the α axis of the fourth element are used The direction of the polaxis of sensor towards opposite direction,

The direction of the polaxis of the β axis sensor of the second element and the β axis of the fourth element are used The direction of the polaxis of sensor is towards opposite direction.

2. force checking device according to claim 1, which is characterized in that

The force checking device obtains the residual quantity of the voltage exported from the first element and the third element.

3. force checking device according to claim 2, which is characterized in that

The force checking device obtains the residual quantity of the voltage exported from the second element and the fourth element.

4. force checking device according to any one of claims 1 to 3, which is characterized in that

The direction of the polaxis of the β axis sensor of the first element and the β axis of the third element sense The direction of the polaxis of device is on the same axis.

5. force checking device according to claim 4, which is characterized in that

The direction of the polaxis of the β axis sensor of the second element and the β axis of the fourth element sense The direction of the polaxis of device is on the same axis.

6. force checking device according to any one of claims 1 to 3, which is characterized in that

At least one of the multiple sensor is to export the charge according to the external force to the γ axis direction γ axis sensor.

7. force checking device according to any one of claims 1 to 3, which is characterized in that

Each of the multiple sensor includes

First piezoelectric body layer has the first crystallographic axis；

Second piezoelectric body layer, it is opposite disposed with first piezoelectric body layer and have the second crystallographic axis；And

Output electrode layer is located between first piezoelectric body layer and second piezoelectric body layer,

The side of second crystallographic axis in the direction and second piezoelectric body layer of first crystallographic axis of first piezoelectric body layer To towards opposite direction.

8. force checking device according to claim 7, which is characterized in that

First piezoelectric body layer and second piezoelectric body layer are made of crystal.

9. force checking device according to claim 1, which is characterized in that

Each of the first element, the second element, the third element and the fourth element are described first The circumferential direction of base portion or second base portion is equiangularly spaced configuration.

10. a kind of robot, which is characterized in that have:

At least one arm union body, with multiple arms, and the side to rotate freely each other by the adjacent arm of the multiple arm Formula links；

End effector is located at the front end side of the arm union body；And

Force checking device described in any one of claim 1 to 9 is located at the arm union body and the end effector Between, and detect the external force that the end effector is applied.

11. a kind of electronic component handling apparatus, which is characterized in that have:

Handle part holds electronic component；And

Force checking device detects the external force that the handle part is applied,

The force checking device has:

First base portion；

Second base portion；And

12. a kind of electronic component inspection device, which is characterized in that have:

Handle part holds electronic component；

Inspection portion checks the electronic component；And

The force checking device has:

First base portion；

Second base portion；And

13. a kind of part forming unit, which is characterized in that have:

Tool displacement portion is mounted tool, makes the tool displacement；And

Force checking device detects the external force that the tool is applied,

The force checking device has:

First base portion；

Second base portion；And