CN104588279A - Photoresist waste liquor collection device for coating machine and coating machine - Google Patents

Photoresist waste liquor collection device for coating machine and coating machine Download PDF

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Publication number
CN104588279A
CN104588279A CN201510067518.1A CN201510067518A CN104588279A CN 104588279 A CN104588279 A CN 104588279A CN 201510067518 A CN201510067518 A CN 201510067518A CN 104588279 A CN104588279 A CN 104588279A
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CN
China
Prior art keywords
photoresistance glue
glue waste
waste liquid
collecting bag
photoresistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510067518.1A
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Chinese (zh)
Other versions
CN104588279B (en
Inventor
辛宪栋
曾凯
曹旭东
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Hefei Xinsheng Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201510067518.1A priority Critical patent/CN104588279B/en
Publication of CN104588279A publication Critical patent/CN104588279A/en
Application granted granted Critical
Publication of CN104588279B publication Critical patent/CN104588279B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1039Recovery of excess liquid or other fluent material; Controlling means therefor

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  • Adhesives Or Adhesive Processes (AREA)
  • Coating Apparatus (AREA)

Abstract

The invention relates to the technical field of preparation of displays and discloses a photoresist waste liquor collection device for a coating machine and the coating machine. The photoresist waste liquor is conveniently recycled, the phenomenon that the photoresist waste liquor is evaporated can be reduced, and the service energy consumption of the coating machine is reduced. The photoresist waste liquor collection device comprises a photoresist waste liquor circulating pipeline and a hydraulic pump arranged on the photoresist waste liquor circulating pipeline, and also comprises a first switching valve and a retractable photoresist waste liquor collection bag, wherein the photoresist waste liquor collection bag comprises a first opening; the first opening is communicated with the outlet of the hydraulic pump by virtue of the first switching valve; and the shrinkage pressure of the photoresist waste liquor collection bag is higher than the steam pressure of the photoresist waste liquor.

Description

The photoresistance glue waste collecting device of coating machine and coating machine
Technical field
The present invention relates to the preparing technical field of display, particularly a kind of photoresistance glue waste collecting device of coating machine and coating machine.
Background technology
The production of colored filter generally adopts slit-nozzles coated form, need to be coated with the photoresistance glue that can volatilize fast with coating machine, and coating machine can produce photoresistance glue waste liquid in the process of coating, photoresistance glue waste liquid has high volatile volatile, assemble if a large amount of and hold fire hazardous or blast, therefore, just need corresponding device to reclaim photoresistance glue waste liquid.
In prior art, what coating machine adopted usually comprises the device that photoresistance glue waste liquid reclaims: collection box, waste liquid cooling unit and waste liquid steam discharge unit, waste liquid cooling unit is for reducing the temperature of photoresistance glue waste liquid in collection box, reduce the evaporation rate of photoresistance glue waste liquid, waste liquid steam device for transferring is used for being discharged by the gas of the photoresistance glue waste liquid volatilization in collection box in time, prevent because air accumulation causes disaster hidden-trouble, avoid gas to be again condensed into photoresistance glue body or solid simultaneously, pollute or blocking photoresistance glue waste collection equipment.
Visible, in order to ensure that the photoresistance glue waste liquid in collection box does not evaporate, need to ensure that waste liquid cooling unit and waste liquid steam discharge unit run without interruption for 24 hours, will reduce the service life of coating machine like this, and the waste liquid cooling unit of coating machine and waste liquid steam discharge unit repair and comparatively bother.
Summary of the invention
The invention provides a kind of photoresistance glue waste collecting device and coating machine of coating machine, be convenient to reclaim photoresistance glue waste liquid, and the generation of photoresistance glue waste liquid Evaporation Phenomenon can be reduced, reduce the Energy in use of coating machine.
For achieving the above object, the invention provides following technical scheme:
The invention provides a kind of photoresistance glue waste collecting device of coating machine, comprising: photoresistance glue waste liquor stream is threaded a pipe, be arranged at described photoresistance glue waste liquor stream thread a pipe on hydraulic pump, also comprise:
First switch valve;
Contractile photoresistance glue waste liquid collecting bag, described photoresistance glue waste liquid collecting bag comprises: the first opening, described first opening is communicated with by described first switch valve with described hydraulic pressure delivery side of pump, and the systolic pressure of described photoresistance glue waste liquid collecting bag is greater than the vapour pressure of photoresistance glue waste liquid.
The photoresistance glue waste collecting device of coating machine provided by the invention in use, hydraulic pump drive photoresistance glue waste liquid to be threaded a pipe flowing along photoresistance glue waste liquor stream, open the first switch valve, photoresistance glue waste liquor stream enters photoresistance glue waste liquid collecting bag, systolic pressure due to photoresistance glue waste liquid collecting bag is greater than the vapour pressure of photoresistance glue waste liquid, therefore, photoresistance glue waste liquid collecting bag can utilize autogenous shrinkage pressure to reduce the evaporation of photoresistance glue waste liquid, namely the amount that photoresistance glue waste liquid collecting bag can make gas in the gas-liquid reciprocation of photoresistance glue waste liquid become liquid is greater than the amount that liquid becomes gas, photoresistance glue waste liquid collecting bag does not need additionally to arrange waste liquid cooling device and waste liquid steam device for transferring in addition, save cost.
So the photoresistance glue waste collecting device of coating machine provided by the invention, is convenient to reclaim photoresistance glue waste liquid, and can reduces the generation of photoresistance glue waste liquid Evaporation Phenomenon, reduce because air accumulation causes the generation of disaster hidden-trouble, reduce the Energy in use of coating machine.
In some optional embodiments, above-mentioned photoresistance glue waste collecting device also comprises: be arranged at the photoresistance glue waste liquid deaeration unit between described first switch valve and described hydraulic pressure delivery side of pump.The air entered in the photoresistance glue waste liquid before photoresistance glue waste liquid collecting bag can be discharged by arranging of photoresistance glue waste liquid deaeration unit.
In some optional embodiments, described photoresistance glue waste liquid collecting bag also comprises: the second opening, and described second opening part is provided with the first check valve and second switch valve, and described second switch valve is positioned between described first check valve and described second opening.The setting of the first check valve, can avoid extraneous air to enter in photoresistance glue waste liquid collecting bag from the second opening.
In some optional embodiments, above-mentioned photoresistance glue waste collecting device also comprises: be arranged at the second check valve between described photoresistance glue waste liquid deaeration unit and described first switch valve.Arranging of second check valve can make photoresistance glue waste liquid flow along a direction, and the liquid namely in photoresistance glue waste liquid collecting bag or gas can not be back to hydraulic pump again.
In some optional embodiments, the vapour pressure of the photoresistance glue waste liquid when systolic pressure of described photoresistance glue waste liquid collecting bag is greater than 60 DEG C.60 DEG C is the limiting temperature of the environment of plant, the temperature of the environment of plant is between 21 DEG C ~ 25 DEG C under normal circumstances, therefore it is preferred, the vapour pressure of photoresistance glue waste liquid when as long as the systolic pressure of photoresistance glue waste liquid collecting bag is greater than 60 DEG C, the amount that gas in the gas-liquid reciprocation of photoresistance glue waste liquid namely can be made to become liquid is greater than the amount that liquid becomes gas.
In some optional embodiments, the material of described photoresistance glue waste liquid collecting bag is synthetic rubber.
In some optional embodiments, above-mentioned photoresistance glue waste collecting device also comprises: the housing wrapping up described photoresistance glue waste liquid collecting bag.Because photoresistance glue waste liquid collecting bag is softer, the arranging of housing can play the effect to the protection of photoresistance glue waste liquid collecting bag.
In some optional embodiments, above-mentioned photoresistance glue waste collecting device also comprises: for detecting the sensor of the force value in described photoresistance glue waste liquid collecting bag;
The first controller be connected with described sensor signal, described first controller is used for producing alarm signal when force value is greater than the reference pressure value preset;
The alarm be connected with described first controller signals, described alarm produces alarm according to the alarm signal received.Arranging of sensor can be monitored constantly to the photoresistance glue waste liquid amount in photoresistance glue waste liquid collecting bag, when the waste liquid in photoresistance glue waste liquid collecting bag reach a certain amount of after, first controller will produce alarm signal, and alarm alarm reminds operating personnel to be discharged by the waste liquid in photoresistance glue waste liquid collecting bag in time.
In some optional embodiments, above-mentioned photoresistance glue waste collecting device also comprises: for detecting the sensor of the force value in described photoresistance glue waste liquid collecting bag, and the second controller to be connected with described sensor, described hydraulic pump, described first switch valve, second switch valve, the first check valve and the second check valve signal, described second controller is used for when force value is greater than the reference pressure value preset, and controls described hydraulic pump, the first switch valve and described second closed check valve, described second switch valve and described first check valve and opens.Arranging of sensor can be monitored constantly to the photoresistance glue waste liquid amount in photoresistance glue waste liquid collecting bag, when the waste liquid in photoresistance glue waste liquid collecting bag reach a certain amount of after, second controller can hydraulic control pump, the first switch valve and described second closed check valve, second switch valve and the first check valve be opened, to be discharged in time by the photoresistance glue waste liquid in photoresistance glue waste liquid collecting bag.
Present invention also offers a kind of coating machine, comprising: the photoresistance glue waste collecting device described in above-mentioned any one.Due to the photoresistance glue waste collecting device of above-mentioned coating machine, be convenient to reclaim photoresistance glue waste liquid, and the generation of photoresistance glue waste liquid Evaporation Phenomenon can be reduced, reduce the Energy in use of coating machine, so coating machine provided by the invention has good serviceability, and energy consumption can be saved.
Accompanying drawing explanation
A kind of structural representation of photoresistance glue waste collecting device that Fig. 1 provides for the embodiment of the present invention;
The another kind of structural representation of photoresistance glue waste collecting device that Fig. 2 provides for the embodiment of the present invention.
In figure:
1-photoresistance glue waste liquor stream is threaded a pipe 2-hydraulic pump
31-first switch valve 32-second switch valve
4-photoresistance glue waste liquid collecting bag 5-photoresistance glue waste liquid deaeration unit
61-first check valve 62-second check valve
7-housing 8-sensor
91-first controller 92-second controller
10-alarm
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.
As shown in Figure 1, a kind of structural representation of photoresistance glue waste collecting device that Fig. 1 provides for the embodiment of the present invention, the invention provides a kind of photoresistance glue waste collecting device of coating machine, comprise: photoresistance glue waste liquor stream threads a pipe 1, be arranged at the hydraulic pump 2 that photoresistance glue waste liquor stream is threaded a pipe on 1, also comprise:
First switch valve 31;
Contractile photoresistance glue waste liquid collecting bag 4, photoresistance glue waste liquid collecting bag 4 comprises: the first opening, and the first opening is communicated with by the first switch valve 31 with the outlet of hydraulic pump 2, and the systolic pressure of photoresistance glue waste liquid collecting bag 4 is greater than the vapour pressure of photoresistance glue waste liquid.
The photoresistance glue waste collecting device of coating machine provided by the invention, in use, hydraulic pump 2 drives photoresistance glue waste liquid to thread a pipe 1 flowing along photoresistance glue waste liquor stream, open the first switch valve 31, photoresistance glue waste liquor stream enters photoresistance glue waste liquid collecting bag 4, systolic pressure due to photoresistance glue waste liquid collecting bag 4 is greater than the vapour pressure of photoresistance glue waste liquid, therefore, photoresistance glue waste liquid collecting bag 4 can utilize autogenous shrinkage pressure to reduce the evaporation of photoresistance glue waste liquid, namely the amount that photoresistance glue waste liquid collecting bag 4 can make gas in the gas-liquid reciprocation of photoresistance glue waste liquid become liquid is greater than the amount that liquid becomes gas, photoresistance glue waste liquid collecting bag 4 does not need additionally to arrange waste liquid cooling device and waste liquid steam device for transferring in addition, save cost.
So the photoresistance glue waste collecting device of coating machine provided by the invention, is convenient to reclaim photoresistance glue waste liquid, and can reduces the generation of photoresistance glue waste liquid Evaporation Phenomenon, reduce because air accumulation causes the generation of disaster hidden-trouble, reduce the Energy in use of coating machine.
Photoresistance glue waste liquid collecting bag 4 in use for some time, photoresistance glue waste liquid collecting bag 4 can be full of by the photoresistance glue waste liquid collected, transport for the ease of the waste liquid in photoresistance glue waste liquid collecting bag 4 is discharged, photoresistance glue waste liquid collecting bag 4 also comprises: the second opening, and the second opening part is provided with the first check valve 61 and second switch valve 32, and second switch valve 32 is between the first check valve 61 and the second opening.The setting of the first check valve 61, can avoid extraneous air to enter in photoresistance glue waste liquid collecting bag 4 from the second opening.
Further, above-mentioned photoresistance glue waste collecting device also comprises: be arranged at the photoresistance glue waste liquid deaeration unit 5 between the first switch valve 31 and the outlet of hydraulic pump 2.The air entered in the photoresistance glue waste liquid before photoresistance glue waste liquid collecting bag can be discharged by arranging of photoresistance glue waste liquid deaeration unit 5, avoids too much air to enter in photoresistance glue waste liquid collecting bag 4.
Thread a pipe in order to avoid photoresistance glue waste liquid along photoresistance glue waste liquor stream and 1 flow back to hydraulic pump 2, above-mentioned photoresistance glue waste collecting device also comprises: be arranged at the second check valve 62 between photoresistance glue waste liquid deaeration unit 5 and the first switch valve 31.
60 DEG C is the limiting temperature of the environment of plant, and the temperature of the environment of plant is between 21 DEG C ~ 25 DEG C under normal circumstances, therefore preferably, the vapour pressure of the photoresistance glue waste liquid when systolic pressure of photoresistance glue waste liquid collecting bag is greater than 60 DEG C.The amount that gas in the gas-liquid reciprocation of photoresistance glue waste liquid namely can be made to become liquid is greater than the amount that liquid becomes gas.
Optionally, the material of above-mentioned photoresistance glue waste liquid collecting bag 4 is synthetic rubber.
In a kind of detailed description of the invention, above-mentioned photoresistance glue waste collecting device also comprises: the housing 7 of parcel photoresistance glue waste liquid collecting bag 4.Because photoresistance glue waste liquid collecting bag 4 is softer, the arranging of housing 7 can play the effect to the protection of photoresistance glue waste liquid collecting bag 4.Housing 7 can be fixed on the shell of bracing frame or coating machine.
For the ease of knowing whether photoresistance glue waste liquid collecting bag 4 is full of, the phenomenon avoiding photoresistance glue waste liquid collecting bag 4 to be bursting at the collision occurs:
In a kind of detailed description of the invention, as shown in Figure 1, above-mentioned photoresistance glue waste collecting device also comprises: for detecting the sensor 8 of the force value in photoresistance glue waste liquid collecting bag 4;
The first controller 91, first controller 91 be connected with sensor 8 signal is for producing alarm signal when force value is greater than the reference pressure value preset;
The alarm 10 be connected with the first controller 91 signal, alarm 10 produces alarm according to the alarm signal received.Arranging of sensor 8 can be monitored constantly to the photoresistance glue waste liquid amount in photoresistance glue waste liquid collecting bag 4, when the waste liquid in photoresistance glue waste liquid collecting bag 4 reach a certain amount of after, first controller 91 will produce alarm signal, and alarm 10 alarm reminds operating personnel to be discharged by the waste liquid in photoresistance glue waste liquid collecting bag in time.
In another kind of detailed description of the invention, as shown in Figure 2, the another kind of structural representation of photoresistance glue waste collecting device that Fig. 2 provides for the embodiment of the present invention, above-mentioned photoresistance glue waste collecting device also comprises: for detecting the sensor 8 of the force value in photoresistance glue waste liquid collecting bag 4, and with sensor 8, hydraulic pump 2, first switch valve 31, second switch valve 32, the second controller 92 that first check valve 61 is connected with the second check valve 62 signal, second controller 92 is for when force value is greater than the reference pressure value preset, hydraulic control pump 2, first switch valve 31 and the second check valve 62 are closed, second switch valve 32 and the first check valve 61 are opened.Arranging of sensor 8 can be monitored constantly to the photoresistance glue waste liquid amount in photoresistance glue waste liquid collecting bag, when the waste liquid in photoresistance glue waste liquid collecting bag reach a certain amount of after, second controller 92 can hydraulic control pump 2, first switch valve 31 and the second check valve 62 is closed, second switch valve 32 and the first check valve 61 are opened, to be discharged in time by the photoresistance glue waste liquid in photoresistance glue waste liquid collecting bag, be convenient to the Automated condtrol of coating machine.
Optionally, the sensor can be positioned at the first opening part of photoresistance glue waste liquid collecting bag, also can be positioned at the exit of hydraulic pump, also can be positioned at other position, is not just repeating one by one here.
Based on the advantage of above-mentioned photoresistance glue waste collecting device, present invention also offers a kind of coating machine, comprising: the photoresistance glue waste collecting device described in above-mentioned any one.Due to the photoresistance glue waste collecting device of above-mentioned coating machine, be convenient to reclaim photoresistance glue waste liquid, and the generation of photoresistance glue waste liquid Evaporation Phenomenon can be reduced, reduce the Energy in use of coating machine, so coating machine provided by the invention has good serviceability, and energy consumption can be saved.
Obviously, those skilled in the art can carry out various change and modification to the embodiment of the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.

Claims (10)

1. a photoresistance glue waste collecting device for coating machine, comprising: photoresistance glue waste liquor stream is threaded a pipe, be arranged at described photoresistance glue waste liquor stream thread a pipe on hydraulic pump, it is characterized in that, also comprise:
First switch valve;
Contractile photoresistance glue waste liquid collecting bag, described photoresistance glue waste liquid collecting bag comprises: the first opening, described first opening is communicated with by described first switch valve with described hydraulic pressure delivery side of pump, and the systolic pressure of described photoresistance glue waste liquid collecting bag is greater than the vapour pressure of photoresistance glue waste liquid.
2. photoresistance glue waste collecting device according to claim 1, it is characterized in that, described photoresistance glue waste liquid collecting bag also comprises: the second opening, and described second opening part is provided with the first check valve and second switch valve, and described second switch valve is positioned between described first check valve and described second opening.
3. photoresistance glue waste collecting device according to claim 2, is characterized in that, also comprise: be arranged at the photoresistance glue waste liquid deaeration unit between described first switch valve and described hydraulic pressure delivery side of pump.
4. photoresistance glue waste collecting device according to claim 3, is characterized in that, also comprise: be arranged at the second check valve between described photoresistance glue waste liquid deaeration unit and described first switch valve.
5. photoresistance glue waste collecting device according to claim 4, is characterized in that, the vapour pressure of the photoresistance glue waste liquid when systolic pressure of described photoresistance glue waste liquid collecting bag is greater than 60 DEG C.
6. photoresistance glue waste collecting device according to claim 4, is characterized in that, the material of described photoresistance glue waste liquid collecting bag is synthetic rubber.
7. photoresistance glue waste collecting device according to claim 4, is characterized in that, also comprise: the housing wrapping up described photoresistance glue waste liquid collecting bag.
8. the photoresistance glue waste collecting device according to any one of claim 4 ~ 7, is characterized in that, also comprise:
For detecting the sensor of the force value in described photoresistance glue waste liquid collecting bag;
The first controller be connected with described sensor signal, described first controller is used for producing alarm signal when force value is greater than the reference pressure value preset;
The alarm be connected with described first controller signals, described alarm produces alarm according to the alarm signal received.
9. the photoresistance glue waste collecting device according to any one of claim 4 ~ 7, it is characterized in that, also comprise: for detecting the sensor of the force value in described photoresistance glue waste liquid collecting bag, and with described sensor, described hydraulic pump, described first switch valve, second switch valve, the second controller that first check valve is connected with the second check valve signal, described second controller is used for when force value is greater than the reference pressure value preset, control described hydraulic pump, first switch valve and described second closed check valve, described second switch valve and described first check valve are opened.
10. a coating machine, is characterized in that, comprising: the photoresistance glue waste collecting device as described in any one of claim 1 ~ 9.
CN201510067518.1A 2015-02-09 2015-02-09 The photoresistance glue waste collecting device of coating machine and coating machine Expired - Fee Related CN104588279B (en)

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Application Number Priority Date Filing Date Title
CN201510067518.1A CN104588279B (en) 2015-02-09 2015-02-09 The photoresistance glue waste collecting device of coating machine and coating machine

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Application Number Priority Date Filing Date Title
CN201510067518.1A CN104588279B (en) 2015-02-09 2015-02-09 The photoresistance glue waste collecting device of coating machine and coating machine

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CN104588279B CN104588279B (en) 2016-08-31

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107309141A (en) * 2017-05-24 2017-11-03 苏州金螳螂幕墙有限公司 The recovery of glue and method is reused more than a kind of fluid sealant
CN109692788A (en) * 2017-10-20 2019-04-30 神讯电脑(昆山)有限公司 Glue collection device
CN116037591A (en) * 2023-02-14 2023-05-02 江苏汇成光电有限公司 Automatic buffering anti-blocking device for exhaust pipeline of photoresist coating machine
CN116037591B (en) * 2023-02-14 2024-05-17 江苏汇成光电有限公司 Automatic buffering anti-blocking device for exhaust pipeline of photoresist coating machine

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0386270A (en) * 1989-08-28 1991-04-11 Meiji Kikai Seisakusho:Kk Coating liquid mixing and feeding device
EP1306551A2 (en) * 2001-10-25 2003-05-02 Kansai Paint Co., Ltd. Method and apparatus for supplying coating material
JP2004249243A (en) * 2003-02-21 2004-09-09 Heishin Engineering & Equipment Co Ltd System for supplying material
CN204052064U (en) * 2014-07-29 2014-12-31 洛阳特斯拉能源科技有限公司 A kind of coating machine automatic feeding system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0386270A (en) * 1989-08-28 1991-04-11 Meiji Kikai Seisakusho:Kk Coating liquid mixing and feeding device
EP1306551A2 (en) * 2001-10-25 2003-05-02 Kansai Paint Co., Ltd. Method and apparatus for supplying coating material
JP2004249243A (en) * 2003-02-21 2004-09-09 Heishin Engineering & Equipment Co Ltd System for supplying material
CN204052064U (en) * 2014-07-29 2014-12-31 洛阳特斯拉能源科技有限公司 A kind of coating machine automatic feeding system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107309141A (en) * 2017-05-24 2017-11-03 苏州金螳螂幕墙有限公司 The recovery of glue and method is reused more than a kind of fluid sealant
CN109692788A (en) * 2017-10-20 2019-04-30 神讯电脑(昆山)有限公司 Glue collection device
CN116037591A (en) * 2023-02-14 2023-05-02 江苏汇成光电有限公司 Automatic buffering anti-blocking device for exhaust pipeline of photoresist coating machine
CN116037591B (en) * 2023-02-14 2024-05-17 江苏汇成光电有限公司 Automatic buffering anti-blocking device for exhaust pipeline of photoresist coating machine

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