CN104588276A - Air-flow guiding device of square substrate - Google Patents
Air-flow guiding device of square substrate Download PDFInfo
- Publication number
- CN104588276A CN104588276A CN201310524819.3A CN201310524819A CN104588276A CN 104588276 A CN104588276 A CN 104588276A CN 201310524819 A CN201310524819 A CN 201310524819A CN 104588276 A CN104588276 A CN 104588276A
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- CN
- China
- Prior art keywords
- square substrate
- blade
- guiding device
- air
- fastening base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
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- Coating Apparatus (AREA)
Abstract
The invention belongs to the technical field of the wafer spin coating in the semiconductor industry, and specifically provides an air-flow guiding device of a square substrate. The device includes a cover body, a blade, a small shaft and a fastening seat; the blade, small shaft and fastening seat are arranged in the cover body; one end of the fastening seat is connected with the top of the cover body, and the other end of the fastening seat is rotatably connected with one end of the small shaft; the other end of the small shaft is connected with the blade; and the device is arranged on the opening of a substrate gluing cavity. The invention can greatly increase the rotating air-flow of substrate edge inside the gluing cavity, and improve the phenomenon of glue pile in four angles of the square substrate.
Description
Technical field
The invention belongs to the even glue technical field of semicon industry wafer, specifically a kind of airflow guiding device of square substrate.
Background technology
The chip finished product made in the market is all square, therefore square substrate is higher than disk in wafer material utilization rate, but square piece does not have disk good in the uniformity of spin coating, and glue is easily piled in the corner of square piece, so rotate even glue technology to cause waste of material to square piece.If the gluing effect of square piece corner can be improved, just can improve the materials'use rate of square piece greatly, improve yield rate.
Summary of the invention
For the problems referred to above, the object of the present invention is to provide a kind of airflow guiding device of square substrate.Described device improves square substrate coating technique effect, solves four angle glues in square basic gluing process and piles up serious phenomenon.This device manually or automatically can be used in and be coated with on glue chamer body.
To achieve these goals, the present invention is by the following technical solutions:
A kind of airflow guiding device of square substrate, comprise lid, blade, little axle and fastening base, its Leaf, little axle and fastening base are arranged in lid, one end of described fastening base is connected with the top of lid, the other end of fastening base and one end of little axle are rotationally connected, and the other end of described little axle is connected with blade.
One end of described fastening base is passed the top of lid and is connected with handle.One end of described little axle is connected with the other end of fastening base by bearing.
Described device is arranged on the opening of painting glue chamer body.Described blade is corresponding with treating the square substrate of gluing.
Advantage of the present invention and beneficial effect are:
1. the situation of cavity air-flow instability because there being opening when the present invention better solves square substrate gluing, and air-flow can be guided to improve technological effect to surrounding flowing.
2. the advantage such as structure of the present invention is easy to use and non-maintaining.
3. the present invention has the features such as structure is simple, easy to install.
Accompanying drawing explanation
Fig. 1 is the generalized section of the present invention in even adhesive dispenser;
Fig. 2 is side view of the present invention.
Wherein: 1 is lid, 2 is bearing, and 3 is blade, and 4 is handle, and 5 is little axle, and 6 is fastening base, and 7 for being coated with glue chamer body, N airflow direction.
Detailed description of the invention
As shown in Figure 1, comprise lid 1, blade 3, handle 4, little axle 5 and fastening base 6, its Leaf 3, little axle 5 and fastening base 6 are arranged in lid 1, and one end of described fastening base 6 is passed the top of lid 1 and is connected with handle 4.The other end of fastening base 6 and one end of little axle 5 are rotationally connected by bearing 2, and the other end of described little axle 5 is fixedly connected with blade 3.
As shown in Figure 2, the present invention can manually or automatically mode be buckled in be coated with glue chamer body 7 opening on and seal up cavity, allow steady air current in cavity.With one heart, described blade 3 is corresponding with treating the square substrate of gluing for this device and painting glue chamer body 7.Rotatable blade 3, without any need for driving, can voluntarily rotate under having the drive of air-flow in below, and the rotation of described blade 3 can allow painting glue chamer body 7 inside center air-flow guide to surrounding.
Operation principle of the present invention is:
When even adhesive dispenser uses, motor can drive wafer to carry out High Rotation Speed, and rotation has air-flow and flows with airflow direction N or with airflow direction N rightabout, and now blade 3 is driven by air-flow with low speed rotation.Also have the flowing of weak gas flow around blade 3, air-flow strengthens the air current flow at square piece corner place, allows glue smoothen corner.
This device is used in and is coated with on glue chamer body 7, plays sealing and is coated with glue chamer body 7 and guides the effect being coated with glue chamer body 7 internal gas flow.This device can strengthen the swirling eddy being coated with glue chamer body 7 interior substrate edge, improves the phenomenon of square substrate corner heap glue.This device materials adopts PP plastics and high-quality stainless steel, uses under being adapted at there is the occasion of corrosion in spin processes, and convenient cleaning.
Claims (5)
1. the airflow guiding device of a square substrate, it is characterized in that: comprise lid (1), blade (3), little axle (5) and fastening base (6), its Leaf (3), little axle (5) and fastening base (6) are arranged in lid (1), one end of described fastening base (6) is connected with the top of lid (1), the other end of fastening base (6) and one end of little axle (5) are rotationally connected, and the other end of described little axle (5) is connected with blade (3).
2. by the airflow guiding device of square substrate according to claim 1, it is characterized in that: one end of described fastening base (6) is passed the top of lid (1) and is connected with handle (4).
3. by the airflow guiding device of square substrate according to claim 1, it is characterized in that: one end of described little axle (5) is connected with the other end of fastening base (6) by bearing (2).
4. by the airflow guiding device of the square substrate described in any one of claim 1-3, it is characterized in that: described device is arranged on the opening of painting glue chamer body (7).
5., by the airflow guiding device of square substrate according to claim 4, it is characterized in that: described blade (3) is corresponding with treating the square substrate of gluing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310524819.3A CN104588276B (en) | 2013-10-30 | 2013-10-30 | Air-flow guiding device of square substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310524819.3A CN104588276B (en) | 2013-10-30 | 2013-10-30 | Air-flow guiding device of square substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104588276A true CN104588276A (en) | 2015-05-06 |
| CN104588276B CN104588276B (en) | 2017-02-08 |
Family
ID=53114527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310524819.3A Active CN104588276B (en) | 2013-10-30 | 2013-10-30 | Air-flow guiding device of square substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104588276B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111722474A (en) * | 2020-06-24 | 2020-09-29 | 沈阳芯源微电子设备股份有限公司 | Method for improving square sheet edge gluing wind marks |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3955226A (en) * | 1973-02-14 | 1976-05-11 | Hoechst Aktiengesellschaft | Process for heat fixation of dyestuffs using polyester material as filter for circulating air stream |
| JPS61257266A (en) * | 1985-05-10 | 1986-11-14 | Matsushita Electric Ind Co Ltd | Splash-preventing device |
| JP2000084462A (en) * | 1998-09-11 | 2000-03-28 | Japan Steel & Tube Constr Co Ltd | Pipe interior cleaning apparatus, pipe interior coating apparatus and method |
| CN201030353Y (en) * | 2007-04-30 | 2008-03-05 | 沈阳芯源微电子设备有限公司 | Square sheet rotating gumming mechanism |
-
2013
- 2013-10-30 CN CN201310524819.3A patent/CN104588276B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3955226A (en) * | 1973-02-14 | 1976-05-11 | Hoechst Aktiengesellschaft | Process for heat fixation of dyestuffs using polyester material as filter for circulating air stream |
| JPS61257266A (en) * | 1985-05-10 | 1986-11-14 | Matsushita Electric Ind Co Ltd | Splash-preventing device |
| JP2000084462A (en) * | 1998-09-11 | 2000-03-28 | Japan Steel & Tube Constr Co Ltd | Pipe interior cleaning apparatus, pipe interior coating apparatus and method |
| CN201030353Y (en) * | 2007-04-30 | 2008-03-05 | 沈阳芯源微电子设备有限公司 | Square sheet rotating gumming mechanism |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111722474A (en) * | 2020-06-24 | 2020-09-29 | 沈阳芯源微电子设备股份有限公司 | Method for improving square sheet edge gluing wind marks |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104588276B (en) | 2017-02-08 |
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
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| CP03 | Change of name, title or address |
Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |