CN104570450A - Display baseplate, display panel and display device - Google Patents
Display baseplate, display panel and display device Download PDFInfo
- Publication number
- CN104570450A CN104570450A CN201510061125.XA CN201510061125A CN104570450A CN 104570450 A CN104570450 A CN 104570450A CN 201510061125 A CN201510061125 A CN 201510061125A CN 104570450 A CN104570450 A CN 104570450A
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- China
- Prior art keywords
- alignment mark
- base plate
- rete
- display base
- thickness
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention provides a display baseplate, a display panel and a display device. The display baseplate comprises an alignment mark, and the alignment mark is used for aligning exposure equipment in the process of exposing to form the diagram of a first film layer on the display baseplate. The thickness of the middle area of the alignment mark is less than that of the marginal area of the alignment mark so that the thickness of the alignment mark is uniform after being coated with a photoresist. The alignment mark of the display baseplate cannot be in the shape of a Chinese character hui after being coated with the photoresist, and the surface of the alignment mark is flat, is uniform in gray scale and is clear in boundary after being coated with the photoresist, thus the problem that the exposure equipment cannot be focused can be solved, the automatic aligning and exposing of the exposure equipment can be realized, and the production efficiency can be improved.
Description
Technical field
The present invention relates to display technique field, particularly, relate to a kind of display base plate, display panel and display device.
Background technology
Liquid crystal display (LCD:Liquid Crystal Display) has become the main product in current flat-panel monitor because of features such as its volume are little, low in energy consumption, radiationless.Display panels is the key component in liquid crystal display.Display panels generally includes array base palte and color membrane substrates.
In the preparation technology that color membrane substrates is prized rete (comprising red color rete, green tint rete and blue color rete), normally the Other substrate materials of the different colours forming color rete is applied on substrate, in exposure technology, by the alignment mark of CCD image sensor trap setting on substrate in exposure machine, thus realize exposure machine to contraposition and exposure before the exposure of color rete.Wherein, Other substrate materials, after coating, can cover alignment mark usually.
Due to the mobility of Other substrate materials itself, after causing applying Other substrate materials on alignment mark, the thickness of the Other substrate materials on alignment mark surface occurs inconsistent, as depicted in figs. 1 and 2, the thickness of photoresist 2 material of the surperficial zone line 11 of alignment mark 1 is greater than the thickness of photoresist 2 material of its fringe region 12, and find through overtesting, when the surface of alignment mark 1 is plane, the thickness that correspondence is formed in the photoresist 2 on alignment mark 1 zone line 11 surface from the center P ' of zone line 11 to the edge L ' of zone line 11 parabolically shape reduce, namely alignment mark 1 is coated with photoresist 2 rear surface and presents " returning " word state, this makes the gray scale being coated with the surface of photoresist 2 material of alignment mark 1 change, thus cause exposure machine alignment to focus on, namely exposure machine cannot carry out accurate contraposition by the position catching alignment mark 1, and then exposure machine cannot be exposed automatically, also warning can be sent simultaneously.
General countermeasure at present for the problems referred to above is improve the composition of photoresist, reduces the mobility of photoresist, but the time cycle of this countermeasure is long, cost is high and may cause the appearance of other technological problemses, has a strong impact on production.
Summary of the invention
The present invention is directed to the above-mentioned technical matters existed in prior art, a kind of display base plate, display panel and display device are provided.This display base plate avoids alignment mark surface presentation after coating photoresist and " returns " word state, make the surface of alignment mark after coating photoresist smooth, thus make the surperficial uniform gray level of alignment mark after coating photoresist, distinct, and then solve the problem that exposure sources contraposition cannot focus on, achieve automatic aligning and the exposure of exposure sources, improve production efficiency.
The invention provides a kind of display base plate, comprise alignment mark, described alignment mark is for carrying out the contraposition of exposure sources when exposing the figure of the first rete formed on described display base plate, the thickness of the zone line of described alignment mark is less than the thickness of its fringe region, even with the thickness making described alignment mark be coated with after photoresist.
Preferably, the thickness of the zone line of described alignment mark from the center of described zone line to the edge of described zone line parabolically shape increase, the thickness of the fringe region of described alignment mark is even.
Preferably, the thickness of the zone line of described alignment mark is even, and the thickness of the fringe region of described alignment mark is even.
Preferably, the shape of the orthogonal projection of described alignment mark on described display base plate is rectangle, square, circle or triangle.
Preferably, described display base plate is color membrane substrates, and described color membrane substrates is formed with black matrix, and described alignment mark adopts the material identical with described black matrix and arranges with layer with described black matrix.
Preferably, described first rete comprises red color rete, green tint rete or blue color rete, and the material of the color rete of described redness, described green tint rete and described blue color rete is the material of described photoresist.
Preferably, described display base plate is array base palte, and described alignment mark adopts metal material or insulating material to make.
Preferably, described first rete comprises pixel electrode layer, gate metal layer, source and drain metal level, active layer or common electrode layer.
The present invention also provides a kind of display panel, comprises above-mentioned display base plate.
The present invention also provides a kind of display device, comprises above-mentioned display panel.
Beneficial effect of the present invention: display base plate provided by the present invention, the thickness of alignment mark zone line is less than the thickness of its fringe region, make alignment mark entirety in pit shape, correspondence be applied to the zone line of alignment mark photoresist some can be filled in pit, which avoid alignment mark surface presentation after coating photoresist and " return " word state, make the surface of alignment mark after coating photoresist smooth, thus make the surperficial uniform gray level of alignment mark after coating photoresist, distinct, and then solve the problem that exposure sources contraposition cannot focus on, achieve automatic aligning and the exposure of exposure sources, improve production efficiency.
Display panel provided by the present invention, by adopting above-mentioned display base plate, not only preparing quality more excellent, also improving the production efficiency of this display panel simultaneously.
Display device provided by the present invention, by adopting above-mentioned display panel, not only making its quality more excellent, also improving the production efficiency of this display device simultaneously.
Accompanying drawing explanation
Fig. 1 is the structure cut-open view of alignment mark in prior art;
Fig. 2 be the alignment mark in Fig. 1 is coated with photoresist after structure cut-open view;
Fig. 3 is the structure cut-open view of alignment mark in the embodiment of the present invention 1;
Fig. 4 be the alignment mark in Fig. 3 is coated with photoresist after structure cut-open view;
Fig. 5 is the structure cut-open view of alignment mark in the embodiment of the present invention 2.
Description of reference numerals wherein:
1. alignment mark; 11. zone lines; 12. fringe regions; 2. photoresist.
Embodiment
For making those skilled in the art understand technical scheme of the present invention better, below in conjunction with the drawings and specific embodiments, a kind of display base plate provided by the present invention, display panel and display device are described in further detail.
Embodiment 1:
The present embodiment provides a kind of display base plate, as shown in Figure 3 and Figure 4, comprise alignment mark 1, alignment mark 1 is for carrying out the contraposition of exposure sources when exposing the figure of the first rete formed on display base plate, the thickness of the zone line 11 of alignment mark 1 is less than the thickness of its fringe region 12, even with the thickness making alignment mark 1 be coated with after photoresist 2.
It should be noted that, fringe region 12 is around in the periphery of zone line 11.The zone line 11 of alignment mark 1 and the boundary line delimitation of fringe region 12 are that the thickness distribution situation being the photoresist that the alignment mark 1 of plane is coated with according to surface in prior art carries out dividing, namely the thicker regional assignment that distributes of corresponding photoresist 2 is zone line 11, the peripheral corresponding photoresist 2 of the zone line 11 thinner region that distributes is fringe region 12, as long as the thickness of alignment mark 1 arranges and finally can guarantee that alignment mark 1 is coated with the thickness after photoresist 2 evenly in the present embodiment.
The above-mentioned setting of alignment mark 1 makes it overall in pit shape, correspondence be applied to the zone line 11 of alignment mark 1 photoresist 2 some can be filled in pit, the final like this surface that alignment mark 1 is coated with after photoresist 2 is smooth.Setting like this, avoid alignment mark 1 its surface presentation after coating photoresist 2 and " return " word state, make the surperficial uniform gray level of alignment mark 1 after coating photoresist 2, distinct, thus solve the problem that exposure sources contraposition cannot focus on, achieve automatic aligning and the exposure of exposure sources, improve production efficiency.
In the present embodiment, the thickness of the zone line 11 of alignment mark 1 from the center P of zone line 11 to the edge L of zone line 11 parabolically shape increase, the thickness of the fringe region 12 of alignment mark 1 is even.As shown in Figure 2, owing to finding through overtesting, when the surface of alignment mark 1 is plane, the thickness that correspondence is formed in the photoresist 2 on alignment mark 1 zone line 11 surface from the center P ' of zone line 11 to the edge L ' of zone line 11 parabolically shape reduce, so so arrange, the larger part of photoresist 2 thickness can be made just to be filled in the zone line 11 of the depression of alignment mark 1, and the integral thickness of alignment mark 1 after coating photoresist 2 can be made even, thus it is smooth to make alignment mark 1 be coated with the surface after photoresist 2, and then make the surperficial uniform gray level of alignment mark 1 after coating photoresist 2, distinct, solve the problem that exposure sources contraposition cannot focus on, achieve automatic aligning and the exposure of exposure sources.
In the present embodiment, the shape of the orthogonal projection of alignment mark 1 on display base plate is square.Certainly, the shape of alignment mark 1 is also not only confined to this several shape.The shape of the orthogonal projection of alignment mark 1 on display base plate can also be rectangle, circle or triangle.
In the present embodiment, display base plate is color membrane substrates, color membrane substrates is formed with black matrix, and alignment mark 1 adopts the material identical with black matrix and arranges with layer with black matrix.Namely alignment mark 1 and black matrix are formed by a patterning processes simultaneously.Wherein, alignment mark 1 is formed by intermediate tone mask technique and black matrix simultaneously, simple for production and additionally can not increase the preparation technology of display base plate.
In the present embodiment, the first rete comprises red color rete, green tint rete or blue color rete, and the material of red color rete, green tint rete and blue color rete is the material of photoresist.Owing to being coated with red color rete, when green tint rete or blue color rete, the color rete of redness of photoresist material, green tint rete or blue color rete can cover whole alignment mark 1 simultaneously, so the above-mentioned setting of alignment mark 1 can make the larger part of photoresist 2 thickness just be filled in the zone line 11 of the depression of alignment mark 1 in the present embodiment, and the integral thickness of alignment mark 1 after coating photoresist 2 can be made even, thus it is smooth to make alignment mark 1 be coated with the surface after photoresist 2, and then make the surperficial uniform gray level of alignment mark 1 after coating photoresist 2, distinct, solve the problem that exposure sources contraposition cannot focus on, achieve automatic aligning and the exposure of exposure sources.
It should be noted that, on color membrane substrates, first rete is also not only confined to above-mentioned three kinds of color retes, as long as other rete all needs first to be coated with photoresist on this rete before exposure, and then make exposure sources carry out after accurate contraposition final exposure to form the figure of this rete by alignment mark 1, the alignment mark 1 in the present embodiment all can be adopted to carry out the accurate contraposition of exposure sources when exposing.
Embodiment 2:
The present embodiment provides a kind of display base plate, and as different from Example 1, as shown in Figure 5, the thickness of the zone line 11 of alignment mark 1 is even, and the thickness of the fringe region 12 of alignment mark 1 is even.
Due to very little (this is mainly in order to make the area taken on display base plate that alignment mark 1 can not be too much) that the alignment mark 1 on display base plate all designs usually, so the area of the zone line 11 of alignment mark 1 and fringe region 12 is also corresponding very little, alignment mark 1 above-mentioned sets up that all can enough to realize making alignment mark 1 to be coated with the thickness after photoresist even.Therefore in the present embodiment the above-mentioned setting of alignment mark 1 that alignment mark 1 also can be made completely to be coated with the surface after photoresist is smooth, thus make the surperficial uniform gray level of alignment mark 1 after coating photoresist, distinct, and then solve the problem that exposure sources contraposition cannot focus on, achieve automatic aligning and the exposure of exposure sources.
In the present embodiment, other structures of display base plate are in the same manner as in Example 1, repeat no more herein.
Embodiment 3:
The present embodiment provides a kind of display base plate, with embodiment 1-2 unlike, display base plate is array base palte, and alignment mark adopts metal material or insulating material to make.First rete comprises pixel electrode layer, gate metal layer, source and drain metal level, active layer or common electrode layer.
In the present embodiment, the metal material that the metal material that alignment mark adopts can be pixel electrode layer, any one rete adopts in gate metal layer, source and drain metal level or common electrode layer, certainly, alignment mark also can adopt the material being formed with active layer to make.In addition, alignment mark can also adopt the material identical with the material of any one insulation course in array base palte (as gate insulation layer or passivation layer) to make.Setting like this, can make a certain rete on alignment mark and array base palte prepare formation by a patterning processes simultaneously, thus can not increase the extra processing step of array base palte.
In the present embodiment, when on array base palte, preparation forms pixel electrode layer, gate metal layer, source and drain metal level, active layer or common electrode layer, all first on substrate, form this rete of one deck, then on this rete, photoresist is coated with, then exposure sources accurate contraposition is made by alignment mark, the accurate post-exposure equipment of contraposition exposes, the final figure forming this rete after follow-up development etching.Because photoresist is when being applied on certain rete, usually can cover whole alignment mark simultaneously, so the arranging of alignment mark in the present embodiment can make the larger part of photoresist thickness just be filled in the zone line of the depression of alignment mark equally, and the integral thickness of alignment mark after coating photoresist can be made even, thus make the surface after alignment mark coating photoresist smooth, and then make the surperficial uniform gray level of alignment mark after coating photoresist, distinct, solve the problem that exposure sources contraposition cannot focus on, achieve automatic aligning and the exposure of exposure sources.
It should be noted that, on array base palte, first rete is also not only confined to above-mentioned rete, as long as other rete all needs first to be coated with photoresist on this rete before exposure, and then make exposure sources carry out after accurate contraposition final exposure to form the figure of this rete by alignment mark, the alignment mark in the present embodiment all can be adopted to carry out the accurate contraposition of exposure sources when exposing.
In the present embodiment, other structures of display base plate are identical with any one in embodiment 1-2, repeat no more herein.
The display base plate that the beneficial effect of embodiment 1-3: embodiment 1-3 provides, the thickness of alignment mark zone line is less than the thickness of its fringe region, make alignment mark entirety in pit shape, correspondence be applied to the zone line of alignment mark photoresist some can be filled in pit, which avoid alignment mark surface presentation after coating photoresist and " return " word state, make the surface of alignment mark after coating photoresist smooth, thus make the surperficial uniform gray level of alignment mark after coating photoresist, distinct, and then solve the problem that exposure sources contraposition cannot focus on, achieve automatic aligning and the exposure of exposure sources, improve production efficiency.
Embodiment 4:
The present embodiment provides a kind of display panel, comprises the display base plate of embodiment 1-3 in any one.
By adopting the display base plate of embodiment 1-3 in any one, the preparation quality of this display panel can be made more excellent, also improve the production efficiency of this display panel simultaneously.
Embodiment 5:
The present embodiment provides a kind of display device, comprises the display panel in embodiment 4.
By adopting the display panel in embodiment 4, the quality of this display device can be made more excellent, also improve the production efficiency of this display device simultaneously.
Be understandable that, the illustrative embodiments that above embodiment is only used to principle of the present invention is described and adopts, but the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (10)
1. a display base plate, comprise alignment mark, described alignment mark is for carrying out the contraposition of exposure sources when exposing the figure of the first rete formed on described display base plate, it is characterized in that, the thickness of the zone line of described alignment mark is less than the thickness of its fringe region, even with the thickness making described alignment mark be coated with after photoresist.
2. display base plate according to claim 1, is characterized in that, the thickness of the zone line of described alignment mark from the center of described zone line to the edge of described zone line parabolically shape increase, the thickness of the fringe region of described alignment mark is even.
3. display base plate according to claim 1, is characterized in that, the thickness of the zone line of described alignment mark is even, and the thickness of the fringe region of described alignment mark is even.
4. display base plate according to claim 1, is characterized in that, the shape of the orthogonal projection of described alignment mark on described display base plate is rectangle, square, circle or triangle.
5. display base plate according to claim 1, is characterized in that, described display base plate is color membrane substrates, and described color membrane substrates is formed with black matrix, and described alignment mark adopts the material identical with described black matrix and arranges with layer with described black matrix.
6. display base plate according to claim 5, it is characterized in that, described first rete comprises red color rete, green tint rete or blue color rete, and the material of the color rete of described redness, described green tint rete and described blue color rete is the material of described photoresist.
7. display base plate according to claim 1, is characterized in that, described display base plate is array base palte, and described alignment mark adopts metal material or insulating material to make.
8. display base plate according to claim 7, is characterized in that, described first rete comprises pixel electrode layer, gate metal layer, source and drain metal level, active layer or common electrode layer.
9. a display panel, is characterized in that, comprises the display base plate described in claim 1-8 any one.
10. a display device, is characterized in that, comprises display panel according to claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510061125.XA CN104570450A (en) | 2015-02-05 | 2015-02-05 | Display baseplate, display panel and display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510061125.XA CN104570450A (en) | 2015-02-05 | 2015-02-05 | Display baseplate, display panel and display device |
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| Publication Number | Publication Date |
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| CN104570450A true CN104570450A (en) | 2015-04-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510061125.XA Pending CN104570450A (en) | 2015-02-05 | 2015-02-05 | Display baseplate, display panel and display device |
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| CN (1) | CN104570450A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106842837A (en) * | 2017-02-10 | 2017-06-13 | 京东方科技集团股份有限公司 | Contraposition mark and forming method thereof, glass substrate and half-tone mask |
| CN107505754A (en) * | 2017-09-20 | 2017-12-22 | 深圳市华星光电技术有限公司 | Liquid crystal display panel and liquid crystal display |
| CN110459134A (en) * | 2019-03-07 | 2019-11-15 | 友达光电股份有限公司 | Array substrate |
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| CN202563208U (en) * | 2012-01-13 | 2012-11-28 | 京东方科技集团股份有限公司 | Liquid crystal display device |
| CN103238104A (en) * | 2010-11-30 | 2013-08-07 | 夏普株式会社 | Substrate and liquid crystal display device |
| CN203535344U (en) * | 2013-10-23 | 2014-04-09 | Tcl显示科技（惠州）有限公司 | Display device and display module thereof |
| CN104102042A (en) * | 2014-06-30 | 2014-10-15 | 京东方科技集团股份有限公司 | Color film base plate, manufacturing method thereof, and display device |
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| CN103238104A (en) * | 2010-11-30 | 2013-08-07 | 夏普株式会社 | Substrate and liquid crystal display device |
| CN102289111A (en) * | 2011-07-29 | 2011-12-21 | 友达光电股份有限公司 | Display panel |
| CN202563208U (en) * | 2012-01-13 | 2012-11-28 | 京东方科技集团股份有限公司 | Liquid crystal display device |
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| CN106842837A (en) * | 2017-02-10 | 2017-06-13 | 京东方科技集团股份有限公司 | Contraposition mark and forming method thereof, glass substrate and half-tone mask |
| CN107505754A (en) * | 2017-09-20 | 2017-12-22 | 深圳市华星光电技术有限公司 | Liquid crystal display panel and liquid crystal display |
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Application publication date: 20150429 |