CN104568440A - Device for detecting performance of static pressure gas bearing in vacuum environment and using method thereof - Google Patents
Device for detecting performance of static pressure gas bearing in vacuum environment and using method thereof Download PDFInfo
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- CN104568440A CN104568440A CN201410857972.2A CN201410857972A CN104568440A CN 104568440 A CN104568440 A CN 104568440A CN 201410857972 A CN201410857972 A CN 201410857972A CN 104568440 A CN104568440 A CN 104568440A
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Abstract
The invention discloses a device for detecting the performance of a static pressure gas bearing in the vacuum environment and a using method thereof. The device is at least composed of a vacuum chamber, a gas supply pipe, a gas supply pressure regulating valve, a loading weight, a displacement sensor, a bearing surface, a support, a base, a deflation valve, a resistance gauge I, a gate valve I, a molecular pump I, a molecular pump I fixing frame, a vacuum chamber exhaust pipe I, a vacuum chamber exhaust pipe II, a mechanical pump I, an isolating magnetic valve I, a differential pressure valve I, a molecular pump II fixing frame, a molecular pump II, a differential pressure valve II, a bearing exhaust pipe I, a bearing exhaust pipe II, a mechanical pump II, an isolating electromagnetic valve II, a gate valve II, a leveling support, a bearing exhaust pipe III, a static pressure gas bearing, a resistance gauge II, a static pressure gas bearing exhaust groove, a static pressure gas bearing exhaust hole, a static pressure gas bearing gas supply hole and a static pressure gas bearing gas supply groove. By the adoption of the device, the bearing capacity of the static pressure gas bearing and leakage of lubricating gas in the vacuum environment under different gas supplying pressures and gas film thicknesses can be detected.
Description
Technical field:
The present invention relates to device for detecting performance and the using method thereof of hydrostatic gas-lubricated bearing under a kind of vacuum environment, belong to the Performance Detection field of precision equipment.
Background technology:
The motion locating platform that hydrostatic gas-lubricated bearing supports because of have precision high, without the excellent performance and be widely used in micro-electronic manufacturing and measure equipment such as not occurring creeping and delayed when friction, low speed strong without wearing and tearing, adaptive capacity to environment.By optimal design parameter and corresponding Positioning Servo System, the performance of current air floating platform can meet many micro-electronic manufacturing and measure the rigors of equipment to motion positions carrier.But the preceding working procedures such as extreme ultraviolet exposure, electron beam exposure, ion exposure, Thinner Films, wire width measuring and measurement operation, not only require that platform has high motion positions precision, also need vacuum or ultra clean environment.But gas bearing performance change is remarkable in vacuum, what more need concern is discharged lubrication gaseous contamination vacuum environment, causes environmental pressure to raise, destroys space cleanliness factor, interference space stability, cause etching or measuring system cisco unity malfunction.Visible, as the support component of motion positions in vacuum, easy motion and the Ultra-precision positioning of implementation platform, the structural design of hydrostatic gas-lubricated bearing and sealing system, performance calculate and the aspect such as parameter optimization also exists a series of key issue urgently to be resolved hurrily.But at present hydrostatic gas-lubricated bearing device for detecting performance is all work under conventional environment, there is the problems such as load-bearing capacity under cannot detecting vacuum environment under different supply gas pressure and air-film thickness and lubrication quantity of gas leakage
For the problems referred to above, the present invention proposes device for detecting performance and the using method thereof of hydrostatic gas-lubricated bearing under a kind of vacuum environment, under vacuum environment can be detected different supply gas pressure and air-film thickness hydrostatic gas-lubricated bearing load-bearing capacity and lubrication gas leakage rate, under vacuum environment pressurized air lubrication mechanism and experimental study all significant.
Summary of the invention:
The object of the present invention is: the device for detecting performance and the using method thereof that propose hydrostatic gas-lubricated bearing under a kind of vacuum environment, is convenient to theory and the experimental study of hydrostatic gas-lubricated bearing performance evaluation under vacuum conditions and lubrication mechanism.
In order to realize the object of the present invention, intend adopting following technical scheme:
The present invention is by vacuum chamber, air supply pipe, supply gas pressure variable valve, load counterweight, displacement transducer, loading end, support, base, air release, Pirani gauge I, push-pull valve I, molecular pump I, molecular pump I fixed mount, vacuum chamber gas outlet I, vacuum chamber gas outlet II, mechanical pump I, cut off electromagnetic valve I, valve for pressure difference I, molecular pump II fixed mount, molecular pump II, valve for pressure difference II, bearing gas outlet I, bearing gas outlet II, mechanical pump II, cut off electromagnetic valve II, push-pull valve II, leveling support, bearing gas outlet III, hydrostatic gas-lubricated bearing, Pirani gauge II, hydrostatic gas-lubricated bearing air discharge duct, hydrostatic gas-lubricated bearing vent port, hydrostatic gas-lubricated bearing air vent and hydrostatic gas-lubricated bearing air supply trough composition, it is characterized in that, described supply gas pressure variable valve is arranged on air supply pipe, air supply pipe is connected with hydrostatic gas-lubricated bearing air vent by hydrostatic gas-lubricated bearing air supply trough, loading counterweight and displacement transducer are arranged on hydrostatic gas-lubricated bearing, loading end is fixed on support, support passes through leveling support installing at internal vacuum chamber, vacuum chamber is fixed on base, vacuum chamber is connected with the air admission hole of molecular pump I, the vent port of molecular pump I is connected with one end of vacuum chamber gas outlet I, the other end of vacuum chamber gas outlet I is connected with the air intake opening cutting off electromagnetic valve I, the vent port cutting off electromagnetic valve I is connected with the air admission hole of valve for pressure difference I by vacuum chamber gas outlet II, the vent port of valve for pressure difference I is connected with the air admission hole of mechanical pump I and is arranged on mechanical pump I, mechanical pump I is fixed on base, one end of bearing gas outlet III is connected with hydrostatic gas-lubricated bearing air discharge duct by hydrostatic gas-lubricated bearing vent port, the other end of bearing gas outlet III is connected with the air admission hole of molecular pump II, Pirani gauge II is arranged on bearing gas outlet III, molecular pump II is fixed on base by molecular pump II fixed mount, push-pull valve II is arranged on molecular pump II, the exhausr port of molecular pump II is connected with the air intake opening cutting off electromagnetic valve II by bearing gas outlet I, the exhausr port cutting off electromagnetic valve II is connected with the air intake opening of valve for pressure difference II by bearing gas outlet II, the exhausr port of valve for pressure difference II is connected with the air intake opening of mechanical pump II and is arranged on mechanical pump II, mechanical pump II is fixed on base, above-mentioned displacement transducer is capacitive displacement transducer or inductive displacement transducer or optical displacement sensor.
Using method of the present invention is as follows:
Certain mass being loaded counterweight is fixed on hydrostatic gas-lubricated bearing, close supply gas pressure variable valve, close vacuum chamber, open mechanical pump I, open partition electromagnetic valve I, Pirani gauge I records pressure when being less than the opening pressure of molecular pump I, start molecular pump I until the pressure in vacuum chamber remains unchanged, open mechanical pump II, when Pirani gauge II records that in bearing gas outlet III, pressure is less than the opening pressure of molecular pump II, start molecular pump II until pressure remains unchanged in bearing gas outlet III, displacement transducer zero setting, open supply gas pressure variable valve, supply gas pressure in adjustment air supply pipe is to setting pressure, when Pirani gauge II records that in bearing gas outlet III, pressure remains unchanged, read the displacement of displacement transducer, draw the load-bearing capacity under certain supply gas pressure and air-film thickness, closure molecule pump I successively, push-pull valve I and mechanical pump I, vacuum indoor pressure change is recorded according to Pirani gauge I, leaked the gas flow entering vacuum chamber by hydrostatic gas-lubricated bearing in the unit of account time.
Feature of the present invention:
The vacuum chamber exhaust system formed by utilizing mechanical pump, molecular pump, valve for pressure difference, partition solenoid valve and push-pull valve etc. and hydrostatic gas-lubricated bearing lubrication gas exhaust system, loading counterweight, displacement transducer combine and realize load-bearing capacity and air-film thickness measurement, under vacuum environment, the Performance Detection of hydrostatic gas-lubricated bearing creates condition.Structure of the present invention is simple, easy to use, is easy to realize.
Accompanying drawing illustrates:
Fig. 1 is one-piece construction figure of the present invention
1, vacuum chamber; 2, air supply pipe; 3, supply gas pressure variable valve; 4, counterweight is loaded; 5, displacement transducer; 6, loading end; 7, support; 8, base; 9, air release; 10, Pirani gauge I; 11, push-pull valve I; 12, molecular pump I; 13, molecular pump I fixed mount; 14, vacuum chamber gas outlet I; 15, vacuum chamber gas outlet II; 16, mechanical pump I; 17, electromagnetic valve I is cut off; 18, valve for pressure difference I; 19, molecular pump II fixed mount; 20, molecular pump II; 21, valve for pressure difference II; 22, bearing gas outlet I; 23, bearing gas outlet II; 24, mechanical pump II; 25, electromagnetic valve II is cut off; 26, push-pull valve II; 27, leveling support; 28, bearing gas outlet III; 29, hydrostatic gas-lubricated bearing; 30, Pirani gauge II; 31, hydrostatic gas-lubricated bearing air discharge duct; 32, hydrostatic gas-lubricated bearing vent port; 33, hydrostatic gas-lubricated bearing air vent; 34, hydrostatic gas-lubricated bearing air supply trough.
Embodiment:
Supply gas pressure variable valve 3 of the present invention is arranged on air supply pipe 2, air supply pipe 2 is connected with hydrostatic gas-lubricated bearing air vent 33 by hydrostatic gas-lubricated bearing air supply trough 34, loading counterweight 4 and displacement transducer 5 are arranged on hydrostatic gas-lubricated bearing 29, loading end 6 is fixed on support 7, it is inner that support 7 is arranged on vacuum chamber 1 by leveling support 27, vacuum chamber 1 is fixed on base 8, vacuum chamber 1 is connected with the air admission hole of molecular pump I12, the vent port of molecular pump I12 is connected with one end of vacuum chamber gas outlet I14, the other end of vacuum chamber gas outlet I14 is connected with the air intake opening cutting off electromagnetic valve I 17, the vent port cutting off electromagnetic valve I 17 is connected with the air admission hole of valve for pressure difference I18 by vacuum chamber gas outlet II15, the vent port of valve for pressure difference I18 is connected with the air admission hole of mechanical pump I16 and is arranged on mechanical pump I16, mechanical pump I16 is fixed on base 8, one end of bearing gas outlet III28 is connected with hydrostatic gas-lubricated bearing air discharge duct 31 by hydrostatic gas-lubricated bearing vent port 32, the other end of bearing gas outlet III28 is connected with the air admission hole of molecular pump II20, Pirani gauge II30 is arranged on bearing gas outlet III28, molecular pump II20 is fixed on base 8 by molecular pump II fixed mount 19, push-pull valve II26 is arranged on molecular pump II20, the exhausr port of molecular pump II20 is connected with the air intake opening cutting off electromagnetic valve II 25 by bearing gas outlet I22, the exhausr port cutting off electromagnetic valve II 25 is connected with the air intake opening of valve for pressure difference II21 by bearing gas outlet II23, the exhausr port of valve for pressure difference II21 is connected with the air intake opening of mechanical pump II24 and is arranged on mechanical pump II24, mechanical pump II24 is fixed on base 8.
Above-mentioned displacement transducer 5 is capacitive displacement transducer or inductive displacement transducer or optical displacement sensor.
When the present invention needs the performance of hydrostatic gas-lubricated bearing under detection vacuum environment, certain mass being loaded counterweight 4 is fixed on hydrostatic gas-lubricated bearing 29, close supply gas pressure variable valve 3, close vacuum chamber 1, open mechanical pump I16, open and cut off electromagnetic valve I 17, Pirani gauge I10 records pressure when being less than the opening pressure of molecular pump I12, start molecular pump I12 until the pressure in vacuum chamber 1 remains unchanged, open mechanical pump II24, when Pirani gauge II30 records that in bearing gas outlet III28, pressure is less than the opening pressure of molecular pump II20, start molecular pump II20 until pressure remains unchanged in bearing gas outlet III28, displacement transducer 5 zero setting, open supply gas pressure variable valve 3, supply gas pressure in adjustment air supply pipe 2 is to setting pressure, when Pirani gauge II30 records that in bearing gas outlet III28, pressure remains unchanged, read the displacement of displacement transducer 5, draw the load-bearing capacity under certain supply gas pressure and air-film thickness, closure molecule pump I12 successively, push-pull valve I11 and mechanical pump I16, pressure change in vacuum chamber 1 is recorded according to Pirani gauge I10, leaked the gas flow entering vacuum chamber (1) by hydrostatic gas-lubricated bearing 29 in the unit of account time.
Claims (3)
1. the device for detecting performance of hydrostatic gas-lubricated bearing under a vacuum environment, it is at least by vacuum chamber (1), air supply pipe (2), supply gas pressure variable valve (3), load counterweight (4), displacement transducer (5), loading end (6), support (7), base (8), air release (9), Pirani gauge I (10), push-pull valve I (11), molecular pump I (12), molecular pump I fixed mount (13), vacuum chamber gas outlet I (14), vacuum chamber gas outlet II (15), mechanical pump I (16), cut off electromagnetic valve I (17), valve for pressure difference I (18), molecular pump II fixed mount (19), molecular pump II (20), valve for pressure difference II (21), bearing gas outlet I (22), bearing gas outlet II (23), mechanical pump II (24), cut off electromagnetic valve II (25), push-pull valve II (26), leveling support (27), bearing gas outlet III (28), hydrostatic gas-lubricated bearing (29), Pirani gauge II (30), hydrostatic gas-lubricated bearing air discharge duct (31), hydrostatic gas-lubricated bearing vent port (32), hydrostatic gas-lubricated bearing air vent (33) and hydrostatic gas-lubricated bearing air supply trough (34) composition, it is characterized in that, described supply gas pressure variable valve (3) is arranged on air supply pipe (2), air supply pipe (2) is connected with hydrostatic gas-lubricated bearing air vent (33) by hydrostatic gas-lubricated bearing air supply trough (34), loading counterweight (4) and displacement transducer (5) are arranged on hydrostatic gas-lubricated bearing (29), loading end (6) is fixed on support (7), it is inner that support (7) is arranged on vacuum chamber (1) by leveling support (27), vacuum chamber (1) is fixed on base (8), vacuum chamber (1) is connected with the air admission hole of molecular pump I (12), the vent port of molecular pump I (12) is connected with one end of vacuum chamber gas outlet I (14), the other end of vacuum chamber gas outlet I (14) is connected with the air intake opening cutting off electromagnetic valve I (17), the vent port cutting off electromagnetic valve I (17) is connected with the air admission hole of valve for pressure difference I (18) by vacuum chamber gas outlet II (15), the vent port of valve for pressure difference I (18) is connected with the air admission hole of mechanical pump I (16) and is arranged on mechanical pump I (16), mechanical pump I (16) is fixed on base (8), one end of bearing gas outlet III (28) is connected with hydrostatic gas-lubricated bearing air discharge duct (31) by hydrostatic gas-lubricated bearing vent port (32), the other end of bearing gas outlet III (28) is connected with the air admission hole of molecular pump II (20), Pirani gauge II (30) is arranged on bearing gas outlet III (28), molecular pump II (20) is fixed on base (8) by molecular pump II fixed mount (19), push-pull valve II (26) is arranged on molecular pump II (20), the exhausr port of molecular pump II (20) is connected with the air intake opening cutting off electromagnetic valve II (25) by bearing gas outlet I (22), the exhausr port cutting off electromagnetic valve II (25) is connected with the air intake opening of valve for pressure difference II (21) by bearing gas outlet II (23), the exhausr port of valve for pressure difference II (21) is connected with the air intake opening of mechanical pump II (24) and is arranged on mechanical pump II (24), mechanical pump II (24) is fixed on base (8).
2. the device for detecting performance of hydrostatic gas-lubricated bearing under a kind of vacuum environment according to claim 1, is characterized in that: described displacement transducer (5) is capacitive displacement transducer or inductive displacement transducer or optical displacement sensor.
3. the using method of the device for detecting performance of hydrostatic gas-lubricated bearing under a kind of vacuum environment according to claim 1, it is characterized in that: certain mass is loaded counterweight (4) and be fixed on hydrostatic gas-lubricated bearing (29), close supply gas pressure variable valve (3), close vacuum chamber (1), open mechanical pump I (16), open and cut off electromagnetic valve I (17), Pirani gauge I (10) records pressure when being less than the opening pressure of molecular pump I (12), start molecular pump I (12) until the pressure in vacuum chamber (1) remains unchanged, open mechanical pump II (24), Pirani gauge II (30) records bearing gas outlet III (28) interior pressure when being less than the opening pressure of molecular pump II (20), start molecular pump II (20) until bearing gas outlet III (28) interior pressure remains unchanged, displacement transducer (5) zero setting, open supply gas pressure variable valve (3), supply gas pressure in adjustment air supply pipe (2) is to setting pressure, when Pirani gauge II (30) records that in bearing gas outlet III (28), pressure remains unchanged, read the displacement of displacement transducer (5), draw the load-bearing capacity under certain supply gas pressure and air-film thickness, closure molecule pump I (12) successively, push-pull valve I (11) and mechanical pump I (16), the interior pressure change of vacuum chamber (1) is recorded according to Pirani gauge I (10), leaked the gas flow entering vacuum chamber (1) by hydrostatic gas-lubricated bearing (29) in the unit of account time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410857972.2A CN104568440B (en) | 2014-12-30 | 2014-12-30 | The device for detecting performance and its using method of hydrostatic gas-lubricated bearing under a kind of vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410857972.2A CN104568440B (en) | 2014-12-30 | 2014-12-30 | The device for detecting performance and its using method of hydrostatic gas-lubricated bearing under a kind of vacuum environment |
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| Publication Number | Publication Date |
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| CN104568440A true CN104568440A (en) | 2015-04-29 |
| CN104568440B CN104568440B (en) | 2017-04-05 |
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| CN201410857972.2A Expired - Fee Related CN104568440B (en) | 2014-12-30 | 2014-12-30 | The device for detecting performance and its using method of hydrostatic gas-lubricated bearing under a kind of vacuum environment |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105065453A (en) * | 2015-09-01 | 2015-11-18 | 中国计量学院 | Air static bearing with compound sealing mode and use method thereof |
| CN106298413A (en) * | 2016-08-08 | 2017-01-04 | 武汉钢铁股份有限公司 | A kind of vacuum relief system for electron microscopic instrument |
| CN110513394A (en) * | 2019-08-26 | 2019-11-29 | 清华大学 | A kind of vacuum air-bearing and its device for detecting performance and detection method |
| CN115126778A (en) * | 2022-06-15 | 2022-09-30 | 北京航空航天大学 | Hybrid foil gas bearing |
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| CN204301999U (en) * | 2014-12-30 | 2015-04-29 | 中国计量学院 | The device for detecting performance of hydrostatic gas-lubricated bearing under a kind of vacuum environment |
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2014
- 2014-12-30 CN CN201410857972.2A patent/CN104568440B/en not_active Expired - Fee Related
Patent Citations (6)
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| JPH09222124A (en) * | 1996-02-19 | 1997-08-26 | Nippon Seiko Kk | Static pressure gas bearing |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105065453A (en) * | 2015-09-01 | 2015-11-18 | 中国计量学院 | Air static bearing with compound sealing mode and use method thereof |
| CN105065453B (en) * | 2015-09-01 | 2017-06-27 | 中国计量学院 | A kind of hydrostatic gas-lubricated bearing and its application method with compound seal mode |
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| CN110513394A (en) * | 2019-08-26 | 2019-11-29 | 清华大学 | A kind of vacuum air-bearing and its device for detecting performance and detection method |
| CN115126778A (en) * | 2022-06-15 | 2022-09-30 | 北京航空航天大学 | Hybrid foil gas bearing |
| CN115126778B (en) * | 2022-06-15 | 2023-09-12 | 北京航空航天大学 | Hybrid foil gas bearing |
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| CN104568440B (en) | 2017-04-05 |
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Granted publication date: 20170405 Termination date: 20171230 |