CN104561931B - Metal organic chemical vapor deposition device - Google Patents

Metal organic chemical vapor deposition device Download PDF

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Publication number
CN104561931B
CN104561931B CN201510043159.6A CN201510043159A CN104561931B CN 104561931 B CN104561931 B CN 104561931B CN 201510043159 A CN201510043159 A CN 201510043159A CN 104561931 B CN104561931 B CN 104561931B
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CN
China
Prior art keywords
calcinatory
quartz reactor
vapor deposition
drier
chemical vapor
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Expired - Fee Related
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CN201510043159.6A
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Chinese (zh)
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CN104561931A (en
Inventor
宋志国
曹春艳
万鑫
赵爽
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Bohai University
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Bohai University
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/405—Oxides of refractory metals or yttrium

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Catalysts (AREA)

Abstract

The invention discloses a kind of metal organic chemical vapor deposition device, including nitrogen gas container, drier, valve, first calcinatory, second calcinatory, first quartz reactor, second quartz reactor and condenser pipe, nitrogen gas container is connected to the first quartz reactor by drier, drier is connected to the second quartz reactor by valve, first quartz reactor, second quartz reactor is individually positioned in the first calcinatory, in second calcinatory, the first described calcinatory, TBOT and activated carbon are placed with respectively in second calcinatory, second quartz reactor is connected with condenser pipe, the first described calcinatory, flame retardant coating and recuperation layer are equipped with second calcinatory, coatings capable of preventing from far infrared radiation is coated with the recuperation layer inwall.The present invention produces catalyst using MOCVD devices, the excellent catalytic effect of its obtained catalyst, can both improve light-catalysed efficiency, separates recovery photochemical catalyst again, and using effect is good.

Description

Metal organic chemical vapor deposition device
Technical field
The present invention relates to chemical device technical field, and in particular to a kind of metal organic chemical vapor deposition device.
Background technology
Nanometer powder TiO2It is effective photochemical catalyst, but the easily reunion etc. of recovery difficulty, bad dispersibility, particle is present and asks Topic, significantly limit its practical application in the treatment of waste water.The Preparation equipment of traditional photochemical catalyst can not be solved effectively Certainly above mentioned problem, it is therefore desirable to a kind of new equipment for preparing this catalyst, to solve existing problem.
The content of the invention
To solve the above problems, the invention provides a kind of metal organic chemical vapor deposition device, it can both improve light and urge The efficiency of change, recovery photochemical catalyst is separated again, using effect is good, practical.
To achieve the above object, the technical scheme taken of the present invention is：
Metal organic chemical vapor deposition device, including nitrogen gas container, drier, valve, the first calcinatory, the second calcining Device, the first quartz reactor, the second quartz reactor and condenser pipe, nitrogen gas container are connected to the first quartz reaction by drier Device, drier are connected to the second quartz reactor by valve, and the first quartz reactor, the second quartz reactor are individually positioned in In first calcinatory, the second calcinatory, TBOT and activated carbon are placed with respectively in the first described calcinatory, the second calcinatory, Second quartz reactor is connected with condenser pipe, and flame retardant coating and recuperation layer are equipped with the first described calcinatory, the second calcinatory, Coatings capable of preventing from far infrared radiation is coated with the recuperation layer inwall, the flame retardant coating in terms of weight percentage, contains in raw material High aluminium material 50%~60%, silica 0.5%~5%, andalusite 10%~15%, sillimanite 10%~15%, three oxidations Two iron 0.3%~0.5%, it is possible to additionally incorporate the additive for accounting for raw material gross weight 3%~10%, first quartz reactor, Be equipped with wear-resistant coating on the outer wall of two quartz reactors, the wear-resistant coating be aluminum oxide, zirconium oxide, magnesia, cerium oxide, A kind of oxide powder in thorium oxide, silica and titanium dioxide, or the mixing of two or more oxide powder Thing.
Preferably, described drier uses silica gel drier.
Preferably, the flame retardant coating is in terms of weight percentage, high aluminium material 55%, silica are contained in raw material 2.75%, andalusite 12.5%, sillimanite 12.5%, di-iron trioxide 0.4%, it is possible to additionally incorporate and account for raw material gross weight 6.5% Additive.
Preferably, it is provided with temperature sensor in first calcinatory, the second calcinatory.
Preferably, it is provided with temperature sensor in first quartz reactor, the second quartz reactor.
Preferably, being provided with bluetooth module in the temperature sensor, the temperature sensor has shifting by bluetooth connection Dynamic terminal
The invention has the advantages that：The present invention produces catalyst using MOCVD devices, its obtained catalyst Excellent catalytic effect, can both improve light-catalysed efficiency, again separate recovery photochemical catalyst, using effect is good, far infrared radiation The setting of coating, the heat exchange in calcinatory is improved, temperature field strength and uniformity in calcinatory is improved, fuel combustion is more filled Point, reach the increase thermal efficiency, greatly improve the refractory material thermal efficiency, reducing energy consumption, saving the energy and extending calcinatory liner makes It is high with the time limit, fractional energy savings.
Brief description of the drawings
Fig. 1 is the structural representation of metal organic chemical vapor deposition device of the embodiment of the present invention.
Embodiment
In order that objects and advantages of the present invention are more clearly understood, the present invention is carried out with reference to embodiments further Describe in detail.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not used to limit this hair It is bright.
As shown in figure 1, the embodiments of the invention provide a kind of metal organic chemical vapor deposition device, including nitrogen gas container 1st, drier 2, valve 3, the first calcinatory 4, the second calcinatory 5, the first quartz reactor 7, the second quartz reactor 8 and condensation Pipe 10, nitrogen gas container 1 are connected to the first quartz reactor 7 by drier 2, and drier 2 is connected to the second quartz by valve 3 Reactor 8, the first quartz reactor 7, the second quartz reactor 8 are individually positioned in the first calcinatory 4, in the second calcinatory 5, institute TBOT6 and activated carbon 9, the second quartz reactor 8 and condenser pipe are placed with respectively in the first calcinatory 4 for stating, the second calcinatory 5 10 are connected, and are equipped with flame retardant coating and recuperation layer in described the first calcinatory 4, the second calcinatory 5, on the recuperation layer inwall It is coated with coatings capable of preventing from far infrared radiation, the flame retardant coating in terms of weight percentage, contains high aluminium material 50%~60% in raw material, and two Silica 0.5%~5%, andalusite 10%~15%, sillimanite 10%~15%, di-iron trioxide 0.3%~0.5%, separately It is outer to add the additive for accounting for raw material gross weight 3%~10%, first quartz reactor 7, the outer wall of the second quartz reactor 8 On be equipped with wear-resistant coating, the wear-resistant coating be aluminum oxide, zirconium oxide, magnesia, cerium oxide, thorium oxide, silica and A kind of oxide powder in titanium dioxide, or the mixture of two or more oxide powder.
Described drier 2 uses silica gel drier.
The flame retardant coating in terms of weight percentage, contains high aluminium material 55%, silica 2.75%, andalusite in raw material 12.5%, sillimanite 12.5%, di-iron trioxide 0.4%, it is possible to additionally incorporate the additive for accounting for raw material gross weight 6.5%.
Temperature sensor is provided with first calcinatory 4, the second calcinatory 5.
Temperature sensor is provided with first quartz reactor 7, the second quartz reactor 8.
Bluetooth module is provided with the temperature sensor, the temperature sensor has mobile terminal by bluetooth connection
Embodiment 1
The present embodiment prepares catalyst using the said equipment, and its preparation flow is：By 5.0g granular active carbons AC, 40- 60mesh, the 6.0molL at a temperature of 373K-1HNO3In boil 1h to generate hydroxyl, be then washed with deionized water net, dry After be put into quartz reactor, 373K with dry N2Water is gone to dry 15 minutes；TBOT/N2Mixture reacts under the conditions of 298K 2-12h；Lead into reactor and dry N2The part predecessor remained with removing in reactor for 30 minutes；Under nitrogen protection finally Calcine 3h, after testing its photochemical catalyst excellent catalytic effect.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should It is considered as protection scope of the present invention.

Claims (6)

1. metal organic chemical vapor deposition device, it is characterised in that including nitrogen gas container (1), drier (2), valve (3), First calcinatory (4), the second calcinatory (5), the first quartz reactor (7), the second quartz reactor (8) and condenser pipe (10), Nitrogen gas container (1) is connected to by drier (2), the first quartz reactor (7), and drier (2) is connected to by valve (3) Two quartz reactors (8), the first quartz reactor (7), the second quartz reactor (8) are individually positioned in the first calcinatory (4), In two calcinatories (5), TBOT (6) and activated carbon are placed with respectively in described the first calcinatory (4), the second calcinatory (5) (9), the second quartz reactor (8) is connected with condenser pipe (10), is all provided with described the first calcinatory (4), the second calcinatory (5) There are flame retardant coating and recuperation layer, coatings capable of preventing from far infrared radiation is coated with the recuperation layer inwall, the flame retardant coating is with weight percent Than representing, contain high aluminium material 50%~60%, silica 0.5%~5%, andalusite 10%~15%, sillimanite in raw material 10%~15%, di-iron trioxide 0.3%~0.5%, the additive for accounting for raw material gross weight 3%~10% is it is possible to additionally incorporate, it is described First quartz reactor (7), the second quartz reactor (8) outer wall on be equipped with wear-resistant coating, the wear-resistant coating is oxidation A kind of oxide powder in aluminium, zirconium oxide, magnesia, cerium oxide, thorium oxide, silica and titanium dioxide, or two kinds or The mixture of two or more oxide powders.
2. metal organic chemical vapor deposition device according to claim 1, it is characterised in that described drier (2) Using silica gel drier.
3. metal organic chemical vapor deposition device according to claim 1, it is characterised in that the flame retardant coating is with weight Percentage represents, contains high aluminium material 55%, silica 2.75%, andalusite 12.5%, sillimanite 12.5%, three oxygen in raw material Change two iron 0.4%, it is possible to additionally incorporate the additive for accounting for raw material gross weight 6.5%.
4. metal organic chemical vapor deposition device according to claim 1, it is characterised in that first calcinatory (4), it is provided with temperature sensor in the second calcinatory (5).
5. metal organic chemical vapor deposition device according to claim 1, it is characterised in that first quartz reaction Temperature sensor is provided with device (7), the second quartz reactor (8).
6. metal organic chemical vapor deposition device according to claim 5, it is characterised in that in the temperature sensor Provided with bluetooth module, the temperature sensor has mobile terminal by bluetooth connection.
CN201510043159.6A 2015-01-25 2015-01-25 Metal organic chemical vapor deposition device Expired - Fee Related CN104561931B (en)

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CN109012607A (en) * 2018-08-10 2018-12-18 南通寰宇博新化工环保科技有限公司 A kind of nanocomposite and preparation method thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101037768A (en) * 2007-04-10 2007-09-19 武汉工程大学 Method and device for plating diamond like film on inner-outer wall of quartz round tube

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100337988C (en) * 2006-04-29 2007-09-19 巩义市华西炉料有限公司 Sillimanite andalusite micropowder combined refractory ball
US20140066299A1 (en) * 2012-08-31 2014-03-06 Basf Se Particles Containing One Or More Multi-Layered Dots On Their Surface, Their Use, and Preparation of Such Particles

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101037768A (en) * 2007-04-10 2007-09-19 武汉工程大学 Method and device for plating diamond like film on inner-outer wall of quartz round tube

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