CN104555870B - A kind of quantitative supplying device - Google Patents
A kind of quantitative supplying device Download PDFInfo
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- CN104555870B CN104555870B CN201310469511.3A CN201310469511A CN104555870B CN 104555870 B CN104555870 B CN 104555870B CN 201310469511 A CN201310469511 A CN 201310469511A CN 104555870 B CN104555870 B CN 104555870B
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- fluid infusion
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Abstract
The invention belongs to chip gluing developing process technical field, specifically a kind of quantitative supplying device.Including fluid infusion bucket, feed tank, nozzle connecting pipe, source of the gas and control system, wherein fluid infusion bucket is connected with source of the gas and feed tank respectively by gas piping and replenishing line, the replenishing line is provided with fluid infusion decoction valve, the nozzle connecting pipe is located at the lower section of feed tank, and be connected by liquid feeding pipeline with feed tank, the liquid feeding pipeline is provided with feed flow decoction valve, fluid infusion decoction valve and feed flow the decoction valve is connected with control system, the control system makes the distance between the working position of feed flow tank level and nozzle connecting pipe keep constant by fluid infusion decoction valve and feed flow decoction valve, realize the weight feed of liquid under a constant.The pressure that the present invention is produced using liquid deadweight is supplied, and is connected with control system and automatic liquid supply and weight feed can be achieved, and can carry out bubble removing work to liquid when liquid is supplied.
Description
Technical field
The invention belongs to chip gluing developing process technical field, specifically a kind of quantitative supplying device.
On semiconductor wafer or formed on its coating in the developing process after diaphragm and wafer exposure and quantitative liquid medicine is provided.
Background technology
At present, formed on the semiconductor wafer or on its coating in the developing process after diaphragm and wafer exposure,
Known fluid Supplying apparatus is mainly by the way of pump supply either compressed gas is extruded out of sealing bucket.Utilize compression
Gas can dissolve a part of gas from the liquid extruded in sealing bucket, and bubble, influence technique effect can be produced when carrying out technique
Really.It is difficult to control to the fluid flow supplied every time in this way in addition, fluid waste can be therefore caused in process.
The content of the invention
In view of the above-mentioned problems, it is an object of the invention to provide a kind of quantitative supplying device.The device utilizes liquid
The pressure that deadweight is produced is supplied, and is connected with control system and automatic liquid supply and weight feed can be achieved, and in liquid supply
When can to liquid carry out bubble removing work.
To achieve these goals, the present invention uses following technical scheme：
A kind of quantitative supplying device, including fluid infusion bucket, feed tank, nozzle connecting pipe, source of the gas and control system, wherein
Fluid infusion bucket is connected with source of the gas and feed tank respectively by gas piping and replenishing line, and the replenishing line is provided with fluid infusion decoction
Valve, the nozzle connecting pipe is located at the lower section of feed tank and is connected by liquid feeding pipeline with feed tank, is set on the liquid feeding pipeline
There is feed flow decoction valve, fluid infusion decoction valve and feed flow the decoction valve is connected with control system, and the control system passes through fluid infusion
Decoction valve and feed flow decoction valve make the distance between the working position of feed flow tank level and nozzle connecting pipe keep constant, realize and exist
The weight feed of liquid under constant pressure.
The gas piping is provided with the gas pressure adjusting means for being used for controlling gas pressure in fluid infusion bucket.The fluid infusion
Being provided with bucket is used to detect the fluid infusion bucket liquid level sensor of the highest order of liquid level and lowest order in fluid infusion bucket, the fluid infusion bucket liquid level
Sensor is connected with control system；When the liquid level in fluid infusion bucket is less than lowest order or higher than highest order, the fluid infusion bucket liquid level
Sensor sends signal to control system, and the quantitative supplying device is stopped.The gas piping connects with fluid infusion bucket
The one end connect, which is provided with, to be used to control the gas with pressure to enter fluid infusion bucket or the threeway hand by the gas discharge in fluid infusion bucket manually
Valve.
Provided with the feed flow tank level indicator being connected with control system, the feed flow tank level indicator in the feed tank
Working position, upper limit and the lower limit of feed flow tank level are detected respectively, it is described when the liquid level in feed tank is less than working position
Feed flow tank level indicator sends signal to control system, and the fluid infusion decoction valve is opened, and carries out fluid infusion；When the liquid in feed tank
When face reaches working position, the fluid infusion decoction valve is closed；When the liquid level in feed tank is more than upper limit or less than lower limit, control
System alarm processed, the quantitative supplying device is stopped.The feed tank is closing tank and upper end is provided with blast pipe
Road, the bottom of the feed tank and the upper end of liquid feeding pipeline are connected.
Port in the replenishing line insertion feed tank is less than the lower limit of feed flow tank level.The control system is led to
The time that feed flow decoction valve controls liquid feeding pipeline through and off is spent, the control of fluid flow is realized.Liquid in the liquid feeding pipeline
Flow and the time interval of liquid feeding pipeline break-make are linear.
Advantages of the present invention and beneficial effect are：
1. during present invention supply liquid, the pressure produced of being conducted oneself with dignity using liquid is supplied, by controlling decoction valve break-make
Time interval can accurately control the amount that liquid is supplied, the apparatus structure is simple, low manufacture cost.
2. having liquid level sensor in fluid infusion bucket and feed tank that the present invention is used, the liquid level of liquid in bucket can be detected,
Automatic fluid filling function can be realized by control system, additional labor is reduced.
3. pipeline of the feed flow upper end with exhaust in the present invention, can release the gas dissolved in liquid in feed tank
Release and drain, so as to not interfere with the using effect of liquid in process.
Brief description of the drawings
Fig. 1 is the principle schematic diagram of the present invention.
Wherein：1 is gas pressure adjusting means, and 2 be threeway hand valve, and 3 be fluid infusion bucket liquid level sensor, and 4 be fluid infusion decoction
Valve, 5 be feed flow tank level indicator, and 6 be feed flow decoction valve, and 7 be nozzle connecting pipe, and 8 be gas exhaust piping, and 9 be fluid infusion bucket, and 10 are
Feed tank, D is the distance between working position and nozzle connecting pipe of feed flow tank level, and H is the highest order of liquid level in fluid infusion bucket,
L is the lowest order of liquid level in fluid infusion bucket, and N is the working position of feed flow tank level, and H1 is the upper limit of feed flow tank level, and H2 is
The lower limit of feed flow tank level.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
As shown in figure 1, the present invention includes gas pressure adjusting means 1, fluid infusion bucket 9, feed tank 10, nozzle connecting pipe 7, gas
Source and control system, wherein fluid infusion bucket 9 is connected with source of the gas and feed tank 10 respectively by gas piping and replenishing line, described to mend
Liquid pipeline is provided with fluid infusion decoction valve 4, and the nozzle connecting pipe 7 is located at the lower section of feed tank 10 and by liquid feeding pipeline with supplying
Flow container 10 is connected, the liquid feeding pipeline be provided with feed flow decoction valve 6, the fluid infusion decoction valve 4 and feed flow decoction valve 6 with control
System is connected.The gas piping is provided with gas pressure adjusting means 1, and admission pressure can pass through gas pressure adjusting means 1
It is adjusted, can so adjusts the pressure that liquid is extruded from fluid infusion bucket 9.
The fluid infusion bucket 9 is closed and its interior highest order H and lowest order L being provided with for detecting liquid level in fluid infusion bucket 9
Fluid infusion bucket liquid level sensor, fluid infusion bucket liquid level sensor is connected with control system；When the liquid level in fluid infusion bucket 9 is less than most
Low level L or during higher than highest order H, the fluid infusion bucket liquid level sensor sends signal, the liquid quantitative supply to control system
Device is stopped.One end that the gas piping is connected with fluid infusion bucket 9 is provided with threeway hand valve 2, for controlling band pressure manually
Gas enter fluid infusion bucket 9 or by fluid infusion bucket 9 in gas discharge.
Provided with the feed flow tank level indicator being connected with control system, the feed tank level sensing in the feed tank 10
Device detects the working position N, upper limit H1 and lower limit H2 of liquid level in feed tank 10 respectively, when the liquid level in feed tank 10 is less than work
When making position N, the feed flow tank level indicator sends signal to control system, and the fluid infusion decoction valve 4 is opened, and carries out fluid infusion；
When the liquid level in feed tank 10 reaches working position N, the fluid infusion decoction valve 4 is closed；When the liquid level in feed tank 10 is more than upper
Spacing H1 or during less than lower limit H2, control system alarm, the quantitative supplying device is stopped.
The feed tank 10 is closing tank and upper end is provided with gas exhaust piping 8, the bottom of the feed tank 10 and liquid feeding pipeline
Upper end connection.Lower limit H2 of the port less than liquid level in feed tank 10 in the replenishing line insertion feed tank 10.
Control system can select the Push And Release of fluid infusion decoction valve 4 as needed, and feed flow decoction valve 6 is under control system control
The time interval of accurate control liquid feeding pipeline through and off can be achieved, flow of each liquid by liquid feeding pipeline is so can control,
So as to realize flow control.Fluid flow and the time interval of liquid feeding pipeline break-make in the liquid feeding pipeline is linear,
Beneficial to the control to flow.It is connected in the end of the liquid-supplying system by nozzle connecting pipe 7 with nozzle, feed flow tank level
The distance between working position and nozzle connecting pipe D keep constant, it is also just constant that such liquid provides pressure by self gravitation, with
Ensure that liquid has constant pressure at nozzle, realizes the weight feed of liquid under a constant.
The present invention operation principle be：
As shown in figure 1, having had liquid in fluid infusion bucket 9, threeway hand valve 2 is opened, compressed gas passes through gas pressure
Adjusting means 1 enters fluid infusion bucket 9, and when fluid infusion decoction valve 4 is opened, liquid is pressed into feed tank 10, feed tank 10 from fluid infusion bucket 9
Liquid is gradually increasing.When the liquid level in flow container 10 reaches work N, whole system can start normal work, fluid infusion decoction valve 4
Close；When feed flow decoction valve 6 is opened, now the working position N of liquid level is protected all the time to nozzle connecting pipe 7 apart from D in flow container 10
Hold constant, liquid just enters nozzle connecting pipe 7 with constant pressure.Because pressure is constant, pipeline is constant, now connected by nozzle
The time that the fluid flow and feed flow decoction valve 6 of pipe 7 are opened is linear, and now control system can be according to required liquid every time
Flow how much come determine feed flow decoction valve 6 open time.So just realize liquid quantitative supply.
When liquid level is less than working position N in sealant supplement cylinder 10, control system can open the liquid in fluid infusion decoction valve 4, fluid infusion bucket 9
Cognition extrudes fluid infusion bucket 9 under the pressure of compressed gas and enters sealant supplement cylinder 10；When liquid level reaches working position N in sealant supplement cylinder 10
When, control system closes fluid infusion decoction valve 4 and stops feed flow.When to 10 fluid infusion of feed tank, replenishing line end will be less than lower limit
Position H2, reduces when liquid enters feed tank 10 to enter to splash with original liquid, so as to produce bubble.It is vented when the device works
Pipeline 8 is opened all the time, and the gas that liquid in feed tank 10 discharges is excluded into feed tank 10.When in fluid infusion bucket 9 liquid level less than minimum
During the L of position, system alarm, whole device is stopped, and now needs the liquid make-up into fluid infusion bucket 9.When liquid level is higher than in fluid infusion bucket 9
During highest order H, system alarm, whole device is stopped, and should now take out a part of liquid in fluid infusion bucket 9, allow its liquid level
Less than highest order, now the device just starts normal work.
When the liquid level in feed tank 10 is less than lower limit H2 or higher than upper limit H1, now illustrate that pipeline has exception,
System alarm, whole device is stopped, and need to check that pipeline is repaired.
Gas pressure adjusting means is commercial products in the present invention, and model (R1000-8-W-T/Z) purchases public in CKD
Department.
Claims (6)
1. a kind of quantitative supplying device, it is characterised in that：Including fluid infusion bucket (9), feed tank (10), nozzle connecting pipe (7),
Source of the gas and control system, wherein fluid infusion bucket (9) are connected with source of the gas and feed tank (10) respectively by gas piping and replenishing line,
The replenishing line is provided with fluid infusion decoction valve (4), and the nozzle connecting pipe (7) is located at the lower section of feed tank (10) and passed through
Liquid feeding pipeline is connected with feed tank (10), the liquid feeding pipeline be provided with feed flow decoction valve (6), the fluid infusion decoction valve (4) and
Feed flow decoction valve (6) is connected with control system, and the control system is made by fluid infusion decoction valve (4) and feed flow decoction valve (6)
The distance between the working position of feed flow tank level and nozzle connecting pipe (D) keeps constant, realizes liquid under a constant
Weight feed；The feed tank (10) is closing tank, and the upper end of the closing tank is provided with gas exhaust piping (8), bottom and feed pipe
The upper end connection on road；
The control system controls the time of liquid feeding pipeline through and off by feed flow decoction valve (6), realizes the control of fluid flow；
Fluid flow and the time interval of liquid feeding pipeline break-make in the liquid feeding pipeline is linear.
2. the quantitative supplying device as described in claim 1, it is characterised in that：The gas piping, which is provided with, to be used to control
The gas pressure adjusting means (1) of fluid infusion bucket (9) interior gas pressure.
3. the quantitative supplying device as described in claim 1 or 2, it is characterised in that：Being provided with the fluid infusion bucket (9) is used for
The highest order (H) of fluid infusion bucket (9) interior liquid level and the fluid infusion bucket liquid level sensor of lowest order (L) are detected, the fluid infusion bucket liquid level is passed
Sensor is connected with control system；When the liquid level in fluid infusion bucket (9) is less than lowest order (L) or higher than highest order (H), the fluid infusion
Bucket liquid level sensor sends signal to control system, and the quantitative supplying device is stopped.
4. the quantitative supplying device as described in claim 1 or 2, it is characterised in that：The gas piping and fluid infusion bucket (9)
One end of connection, which is provided with, to be used to control the gas with pressure to enter fluid infusion bucket (9) or discharge the gas in fluid infusion bucket (9) manually
Threeway hand valve (2).
5. the quantitative supplying device as described in claim 1, it is characterised in that：It is provided with and control in the feed tank (10)
The feed flow tank level indicator of system connection, the feed flow tank level indicator detects the work of feed tank (10) interior liquid level respectively
Position (N), upper limit (H1) and lower limit (H2), when the liquid level in feed tank (10) is less than working position (N), the feed tank liquid
Level sensor sends signal to control system, and the fluid infusion decoction valve (4) is opened, and carries out fluid infusion；Liquid in feed tank (10)
When face reaches working position (N), the fluid infusion decoction valve (4) is closed；When the liquid level in feed tank (10) exceed upper limit (H1) or
During less than lower limit (H2), control system alarm, the quantitative supplying device is stopped.
6. the quantitative supplying device as described in claim 1, it is characterised in that：The replenishing line insertion feed tank (10)
Interior port is less than the lower limit (H2) of feed tank (10) interior liquid level.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310469511.3A CN104555870B (en) | 2013-10-09 | 2013-10-09 | A kind of quantitative supplying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310469511.3A CN104555870B (en) | 2013-10-09 | 2013-10-09 | A kind of quantitative supplying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104555870A CN104555870A (en) | 2015-04-29 |
| CN104555870B true CN104555870B (en) | 2017-09-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310469511.3A Active CN104555870B (en) | 2013-10-09 | 2013-10-09 | A kind of quantitative supplying device |
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|---|---|---|---|---|
| CN104989952A (en) * | 2015-07-22 | 2015-10-21 | 广东汉能薄膜太阳能有限公司 | Continuous and stable high-purity chemical conveying system and method |
| CN105547845A (en) * | 2015-12-22 | 2016-05-04 | 广州特种承压设备检测研究院 | Hydraulic pressure-resistant test method and hydraulic pressure-resistant test device |
| CN107562078A (en) * | 2016-07-01 | 2018-01-09 | 鹏鼎控股(深圳)股份有限公司 | The control method of liquid medicine supply control system, liquid medicine feed system and liquid medicine feed system |
| CN107611055A (en) * | 2016-07-12 | 2018-01-19 | 沈阳芯源微电子设备有限公司 | A kind of pipeline liquid feed device for reducing bubble and producing and there is automatic row's bubble function |
| ES2883270T3 (en) * | 2017-03-03 | 2021-12-07 | Elaflex Hiby Gmbh & Co Kg | Distribution nozzle for two maximum flow rates |
| CN106643985A (en) * | 2017-03-14 | 2017-05-10 | 苏州聚晶科技有限公司 | Quantitative seal fluid supplementing equipment |
| CN110786787A (en) * | 2018-08-03 | 2020-02-14 | 广东宝乐机器人股份有限公司 | Water tank water outlet control method and device and cleaning robot |
| CN109268687A (en) * | 2018-10-16 | 2019-01-25 | 迈得医疗工业设备股份有限公司 | Liquid feed device |
| CN110404860A (en) * | 2019-08-08 | 2019-11-05 | 中芯集成电路（宁波）有限公司 | A kind of use in waste water treatment probe cleaning method and device |
| CN110808218B (en) * | 2019-10-23 | 2022-07-08 | 长江存储科技有限责任公司 | Control method of treatment liquid supply device and treatment liquid supply device |
| CN111948112A (en) * | 2020-08-10 | 2020-11-17 | 盐城新海川机电科技有限公司 | Penetrating fluid constant-pressure quantitative supply method and device |
| CN113179736A (en) * | 2021-06-04 | 2021-07-30 | 上海集熠节能环保技术有限公司 | Need not automatic fertilizer injection unit of extra power supply |
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| EP0217400A2 (en) * | 1985-10-02 | 1987-04-08 | Fuji Photo Film Co., Ltd. | Apparatus for precisely measuring and supplying liquid |
| CN2074761U (en) * | 1990-07-14 | 1991-04-10 | 北京有色金属研究总院 | Automatic rationing liquid feeder |
| KR100244477B1 (en) * | 1997-05-30 | 2000-02-01 | 김영환 | Cleaning solution automatic supplying apparatus and method for semiconductor wafer coater |
| CN201092532Y (en) * | 2007-07-25 | 2008-07-30 | 比亚迪股份有限公司 | Liquid quantitative supply device |
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2013
- 2013-10-09 CN CN201310469511.3A patent/CN104555870B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85101364A (en) * | 1985-04-01 | 1987-01-10 | Fmc公司 | Proportioning device for liquid |
| EP0217400A2 (en) * | 1985-10-02 | 1987-04-08 | Fuji Photo Film Co., Ltd. | Apparatus for precisely measuring and supplying liquid |
| CN2074761U (en) * | 1990-07-14 | 1991-04-10 | 北京有色金属研究总院 | Automatic rationing liquid feeder |
| KR100244477B1 (en) * | 1997-05-30 | 2000-02-01 | 김영환 | Cleaning solution automatic supplying apparatus and method for semiconductor wafer coater |
| CN201092532Y (en) * | 2007-07-25 | 2008-07-30 | 比亚迪股份有限公司 | Liquid quantitative supply device |
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| CN104555870A (en) | 2015-04-29 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |