CN104536092B - A kind of single-chip integration formula multi-core optical fiber splitter and preparation method thereof - Google Patents
A kind of single-chip integration formula multi-core optical fiber splitter and preparation method thereof Download PDFInfo
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- CN104536092B CN104536092B CN201410777215.4A CN201410777215A CN104536092B CN 104536092 B CN104536092 B CN 104536092B CN 201410777215 A CN201410777215 A CN 201410777215A CN 104536092 B CN104536092 B CN 104536092B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
- G02B6/322—Optical coupling means having lens focusing means positioned between opposed fibre ends and having centering means being part of the lens for the self-positioning of the lightguide at the focal point, e.g. holes, wells, indents, nibs
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Abstract
The invention belongs to technical field of optical fiber, and in particular to be that a kind of can be achieved to arrive multi-core optical fiber into the single-chip integration formula multi-core optical fiber splitter and preparation method thereof that the optical path per single-core fiber all the way separates.Single-chip integration formula multi-core optical fiber splitter, by preparing there is the monolithic of micro-structure to form based on connect multi-core optical fiber, self-focusing lens or self-focusing lens group with the single mode optical fiber that corresponding core number has the micro- collimator in fine end, multi-core optical fiber splitter can realize that the optical path by multi-core optical fiber to every single-core fiber all the way separates.This double self-focusing lens coupled systems do not need to turn to prism, and structure is more compact, and operation difficulty substantially reduces, and make simpler.
Description
Technical field
The invention belongs to technical field of optical fiber, and in particular to be a kind of can be achieved multi-core optical fiber to often single light all the way
The single-chip integration formula multi-core optical fiber splitter and preparation method thereof of fine optical path separation.
Background technique
Multi-core optical fiber (MCF) is used as a kind of typical space division multiplexing (SDM) solution, with its high density, low cost, low
The advantages that energy consumption, most possible large-scale application was in fiber optic communication, significant increase transmission capacity.Various multi-core optical fibers exist
Fibre Optical Sensor and integrated optical device field play irreplaceable important function, but multi-core optical fiber faces a challenge, i.e.,
With the compatibility issue of existing system, this just need to develop a kind of high reliablity, low-loss, it is low harass and can volume production multicore
Optical fiber splitter.
United States Patent (USP) (US20120251045) is realized between MCF using the cylindrical lens of special construction or MCF and integrated
Interconnection between opto-electronic device (such as light source VCSEL).But this two-sided cylindrical lens end face processing is more complicated, and requires
Higher machining accuracy.United States Patent (USP) (US201300444978) then using a pair of of self-focusing lens or globe lens realize MCF it
Between interconnection, this method be difficult to matching alignment both ends MCF and can not achieve each core light channel separation.Document (Low
loss optical connection module for 7-core multi-core fiber and seven single
Mode fibers, Photonics Society Summer Topical Meeting Series, IEEE 2012) and
(Free-Space Coupling Optics for Multicore Fibers,Photonics Technology
Letters, IEEE 2012) a kind of Lens Coupling system for proposing, using lens by more a fibre core outgoing beam spaces MCF point
It opens, using the further multi_layer extraction of prism is turned to, is finally received, realized each fibre core optical channel of MCF using optical fiber collimator
It is coupled into single SMF respectively.This method is lower by accurately operating and controlling, harass and be lost, but structural volume
Larger, operation adjusts complexity and is difficult to volume production, and as the fibre core number of MCF is more, disadvantage is more obvious.
Summary of the invention
A kind of the purpose of the present invention is to provide manufacture crafts simple, flexible design, it is compact-sized, convenient for batch production,
Low-loss and the low single-chip integration formula multi-core optical fiber splitter harassed.The object of the invention is also to provide a kind of single-chip integration formulas
The production method of multi-core optical fiber splitter.
The object of the present invention is achieved like this:
A kind of single-chip integration formula multi-core optical fiber splitter by preparing there is the monolithic of micro-structure to be based on by multi-core optical fiber, certainly
Condenser lens or self-focusing lens group connects composition with the single mode optical fiber that corresponding core number has the micro- collimator in fine end, and multi-core optical fiber divides
Road device can be realized multi-core optical fiber to the optical path separation per single-core fiber all the way.
A kind of single-chip integration formula multi-core optical fiber splitter production method, utilizes high-precision CO2Laser is on quartz substrate
By setup parameter batch etching certain length, the microflute of width and depth, then cut, respectively as egative film and cover plate, egative film
Fasten with cover plate by microflute alignment integral, position sandwiched in slot, each component of splitter that state is adjusted: multi-core optical fiber, from
Multi-core optical fiber splitter is made in focus lens group and single mode optical fiber, last dispensing, solidification, test and encapsulation batch.
The present invention is different from prior art, using double self-focusing lens groups, axial assembling, rotary alignment.With multi-core optical
The progress of fine manufacturing process, the size and parameter of multi-core optical fiber are all more stable, and the arrangement of single mode optical fiber beam is relatively fixed,
It ensure that the feasibility of multi-core optical fiber splitter of the present invention.Self-focusing lens or similar graded index multimode fibre have than
The smaller off-axis aberration of traditional optical lens, thus it is available it is lower loss and harass.This double self-focusing lens couplings
System does not need to turn to prism, and structure is more compact, and operation difficulty substantially reduces, and makes simpler.
Multi-core optical fiber splitter production method proposed by the present invention, using high-precision CO2Laser is criticized on quartz substrate
The amount etching line of rabbet joint is then placed in each component fine tuning assembling of splitter, the high efficiency of each fibre core optical channel of multi-core optical fiber easy to accomplish
Fan-in is fanned out to.The present invention is simple with operating procedure, flexible design, feasibility are good, is convenient for batch production, is compact-sized, low damage
Consumption and low the advantages that harassing.Which are mainly applied to the fields such as multi-core optical fiber communication, Fibre Optical Sensor and integrated optical device.
Detailed description of the invention
Fig. 1 is the seven core fibre splitter schematic diagram of manufacturing methodes based on self-focusing lens；
Fig. 2 is twin-core fiber splitter single-chip integration design and preparation method thereof schematic diagram；
Fig. 3 is that symmetrical five core fibre of circumference and seven core fibre symmetry axis are chosen to design with the corresponding single mode optical fiber beam line of rabbet joint and be illustrated
Figure；
Fig. 4 is single self-focusing lens twin-core fiber splitter top view.
Specific embodiment
It illustrates with reference to the accompanying drawing and the present invention is described in more detail:
The present invention is to provide a kind of design of multi-core optical fiber splitter single-chip integration and its production based on self-focusing lens
Method.Multi-core optical fiber splitter based on self-focusing lens is by multi-core optical fiber, self-focusing lens and corresponding core number band fibre end collimation
The single mode optical fiber of device connects composition.The multi-core optical fiber splitter can be realized multi-core optical fiber to the optical path point per single-core fiber all the way
From.The present invention gives splitter single-chip integration designs and preparation method thereof: utilizing high-precision CO2Laser is in quartz substrate
The upper microflute that certain depth is etched by setup parameter batch cuts half in a pair, and identical a pair of half is respectively as egative film
It fastens with cover plate by microflute alignment integral, position is sandwiched in slot, each component of connector that state is adjusted, it is last dispensing, solid
Change, the multi-core optical fiber splitter based on self-focusing lens can be made in test and encapsulation in batches.The present invention has manufacture craft letter
List, flexible design, it is compact-sized, convenient for volume production, low-loss and low the advantages that harassing.
Utilize high-precision CO2Laser is etched the microflute of certain depth, cutting on quartz substrate by setup parameter batch
In a pair to half, identical a pair of half is fastened integrally respectively as egative film and cover plate by microflute alignment, and position is sandwiched in slot
It sets, each component of connector that state is adjusted, this kind of multi-core optical fiber branch is made in last dispensing, solidification, test and encapsulation batch
Device.It is specifically refined as following procedure:
First according to each component of splitter -- the parameter of multi-core optical fiber, self-focusing lens (group) and single mode optical fiber determines corresponding
The length and width for being embedded in microflute are deep, and both ends are the buffer length that optical fiber pigtail reserves 20~50mm.Wherein correspond to core number single mode optical fiber work
It is integrated one microflute of insertion, needing to be distributed one symmetry axis of selection according to multi-core optical fiber cross section fibre core makes axis two sides fibre core point
Cloth is consistent；Then the shape and length, width and height of single mode optical fiber microflute are determined, according to symmetry axis to guarantee the fibre of the single mode optical fiber of filling
Core is distributed to be formed and the accurate similar rock-steady structure of multi-core optical fiber.
Then high-precision CO is utilized2Laser etches " multi-core optical fiber-lens group-single-mode optics in batches on quartz substrate
The microflute of fibre " structure, is cut into a pair of identical half as egative film or cover plate after cleaning.
Finally multi-core optical fiber, single-mode optical fiber pigtail and self-focusing lens are put into half microflute, two half series connection
Get up to be assembled into " single mode optical fiber-lens group-multi-core optical fiber-lens group-single mode optical fiber " structure.Two sides single mode optical fiber difference
Connection light source and detector are monitored adjusting, then will wherein a piece of dispensing fix as egative film.It is made of similar method
Cover plate, difference are to take out multi-core optical fiber, lens and part single mode optical fiber when dispensing is fixed.Egative film and cover plate snap together a little
Test encapsulation is carried out as multi-core optical fiber splitter after glue is fixed.
The present invention may also include:
1, the production method is also applied for the extraordinary multicore of core spacing sufficiently large (being greater than bare optical fibre core spacing waiting)
Optical fiber does not need self-focusing lens and carries out the amplification of core spacing, can directly be directed at connection.
2, the production method is also applied for special multi-core optical fiber of the fibre core distribution in section without symmetry axis, can select optical fiber
Section diameter replaces symmetry axis, and then two groovings of batch etching are respectively as egative film and cover plate.
3, production method optimum option symmetry axis as far as possible with reduce egative film or cover plate microflute etch difficulty, in pair
The single mode optical fiber on axis is claimed to be placed on egative film, the single mode optical fiber in cover plate is not higher than substrate surface.
4, the production method need to insert matching support glass bar or optical fiber in gap when necessary buckles egative film and cover plate
Single mode optical fiber beam stable structure made of conjunction, fibre core distribution are accurate similar to the distribution of multi-core optical fiber fibre core.
Multi-core optical fiber splitter based on self-focusing lens is quasi- by multi-core optical fiber, self-focusing lens and corresponding core number band fibre end
The single mode optical fiber of straight device connects composition.Each component of connector positions assembling, two film traps by the laser-induced thermal etching slot on quartz substrate
Line alignment fastens, and rotary fine adjustment makes each corresponding optical channel position alignment, and multi-core optical fiber branch is made in test encapsulation after putting adhesive curing
Device.
Embodiment 1:
Fig. 1 is the seven core fibre splitter schematic diagram of manufacturing methodes based on self-focusing lens, seven core fibres 110, self-focusing
The corresponding placement of general single mode fiber 130 of lens 120-121 and the fine end collimator (for clarity, being not drawn into figure) of seven bands
In laser-induced thermal etching slot 140-143 on quartz substrate.Slot 143-143 is to utilize high-precision CO2Laser is carved by setup parameter
Erosion: 140 length of the multi-core optical fiber rectangle line of rabbet joint is that multi-core optical fiber tail optical fiber 110 is located at the design length inside splitter, depth etc.
In its radius；Self-focusing lens 120-121 is the combination of the self-focusing lens of two different parameters, and effect is by multi-core optical fiber
110 core spacing pull open imaging, correspond to the 130 fibre core position of single mode optical fiber of phase same core number, the distribution of similar fibre core, place rectangle
Line of rabbet joint 141-142 length is design length, and depth is equal to its radius；Seven single mode optical fibers 130 are positioned by dovetail groove 143 and are assembled,
Seven restrictions of single mode optical fiber 130 are arranged in fine with seven core fibre 110 by space made of the design of dovetail groove 143 fastens two slots
Core is distributed similar rock-steady structure, therefore 143 depth of dovetail groove is single mode fiber diametersTimes, inclined-plane and bottom surface press from both sides
Angle is 60 °, and length is that single-mode optical fiber pigtail 130 is located at the design length inside connector.Line of rabbet joint 140-143 presses setup parameter one
Secondary etching forming, the opening central axes of the line of rabbet joint are overlapped, and the line of rabbet joint depth of design guarantees each component 110-130 tool of the splitter being packed into
There is an identical assembling axis.Two panels with identical line of rabbet joint 140-143 is snapped together by line of rabbet joint alignment, limits branch
Each component 110-130 of device, rotary fine adjustment make corresponding optical channel position alignment, this kind of multi-core optical is made in point adhesive curing, test encapsulation
Fine splitter.
Embodiment 2:
Fig. 2 is twin-core fiber splitter single-chip integration design and preparation method thereof schematic diagram.Utilize high-precision CO2Laser
Etching places the rectangle line of rabbet joint 211-214 of each component 221-226 of splitter in batches on quartz substrate 200, and sinual costa 211 is right
Twin-core fiber 221, the corresponding self-focusing lens 222-223 for placing two different parameters of line of rabbet joint 212-213, the line of rabbet joint 214 should be placed
It is corresponding to place two single mode optical fibers 226 with fine end collimator 225.Symmetrical 221 liang of fibre core optical channels of twin-core fiber pass through autohemagglutination
Focus lens group 222-223 pulls open spacing, is injected separately into single mode optical fiber 226.The depth of line of rabbet joint 211-214 is splitter each group
The radius size of part 221-226, width are diameter, and line of rabbet joint 211-214 is once etched on quartz substrate 200, opening
Central axes correspond to the assembling axis of each component, they coincide together.The spacing of two line of rabbet joint 214 and twin-core fiber 221
For core spacing than referred to as core spacing amplification ratio, it determines the spacing amplifying power of self-focusing lens group 222-223.Rotation adjusts double
Core fibre 221 makes two fibre core lines be located at 200 surface of substrate, then corresponds to optical channel position alignment.With identical line of rabbet joint 211-214
Two panels press the line of rabbet joint alignment fasten, point adhesive curing, test encapsulation can be prepared by twin-core fiber splitter.
Fig. 3 is that symmetrical five core fibre (a) of circumference and symmetrical seven core fibres (b) symmetry axis of circumference are chosen and corresponding single mode optical fiber
Beam line of rabbet joint design diagram.Symmetrical five core fibre 301 of circumference and symmetrical seven core fibres, the 302 fibre core distribution of circumference have multiple symmetrical
Axis, optimum option symmetry axis 310,311 is to reduce line of rabbet joint etching difficulty.The line of rabbet joint is designed according to the symmetry axis 310,311 of selection
Shape and length parameter, utilize high-precision CO2The line of rabbet joint of laser bulk etching correspondingly-shaped on quartz substrate, respectively
As egative film 320,321 and cover plate 350,351.The design of the line of rabbet joint must be such that the single mode optical fiber of insertion is formed and multi-core optical fiber fibre core
It is distributed similar rock-steady structure, therefore matching must be added in the corresponding single mode optical fiber beam 330-340 of symmetrical five core fibre 301 of circumference
Capillary glass stick or glass tube are supported, as shown in Fig. 3 (a).By the single mode optical fiber being located just on symmetry axis be put into egative film 320,
In 321 line of rabbet joint, then cover plate 350, the single mode optical fiber 340,341 in 351 line of rabbet joint are not above substrate surface.
The size of matching support glass bar or glass tube first passes through the calculating of fibre core distributed architecture in advance.Single mode optical fiber 330,331,
340,341 when beam combination, keep each fiber end face consistent in the line of rabbet joint with a baffle.
Embodiment 3:
Fig. 4 gives a kind of single self-focusing lens twin-core fiber splitter top view, similar to Example 2, difference
It is the self-focusing lens 420 using 0.25 pitch length.410 fibre core output light of twin-core fiber is after lens 420 in rear end
Face center is tiltedly emitted in the form of collimated light beam, is transmitted in uniform dielectric gap 440, the single mode with fine end collimator 431
Optical fiber 430 specific position receive, collimated light beam vertical incidence to fine 431 end face center position of end collimator, efficient coupling into
Enter in single mode optical fiber 430.Index-matching fluid can be inserted in gap 440 to reduce end face reflection bring light loss.Using
Light beam is spatially separating by single self-focusing lens 420 in different directions, it is desirable that the length and single mode optical fiber 430 in gap 440 are aligned
Angle has very high precision, and this considerably increases the manufacture difficulties of the corresponding line of rabbet joint.
For embodiment 1-3 when pack is fixed, needing for two half to be together in series is assembled into " single mode optical fiber-lens group-
Multi-core optical fiber-lens group-single mode optical fiber " structure, two sides single mode optical fiber is separately connected light source and detector is monitored adjusting,
Then it will wherein a piece of dispensing fix as egative film.Cover plate is made with similar method, difference is to take out when dispensing is fixed more
Core fibre, lens and part single mode optical fiber.
The present invention is based on the designs of the multi-core optical fiber splitter single-chip integration of self-focusing lens as can be seen from the above-described embodiment
And preparation method thereof, it have manufacture craft simple, flexible design, it is compact-sized, convenient for volume production, low-loss and it is low harass etc. it is excellent
Point.It can be used for the fields such as fiber optic communication, Fibre Optical Sensor and integrated optical device.
Claims (1)
1. a kind of single-chip integration formula multi-core optical fiber splitter, it is characterized in that: by seven core fibres, self-focusing lens group and corresponding core number
Single mode optical fiber with the micro- collimator in fine end connects composition, and multi-core optical fiber splitter can be realized seven core fibres to per single all the way
The optical path of optical fiber separates；
Seven core fibres, self-focusing lens group and seven are correspondingly placed on quartz substrate with the general single mode fiber of fine end collimator
Laser-induced thermal etching slot in；Slot is to utilize high-precision CO2Laser utilizes high-precision CO by setup parameter etching2Laser is in stone
The microflute for etching certain depth on English substrate by setup parameter batch cuts double of piece in a pair, identical a pair of half difference
Fasten integrally as egative film and cover plate by microflute alignment: multi-core optical fiber rectangular channel line length is that seven core fibre tail optical fibers are located at branch
Design length inside device, depth are equal to its radius；Self-focusing lens group is the combination of the self-focusing lens of two different parameters,
Seven core fibre core spacing are pulled open into imaging, correspond to the single mode optical fiber fibre core position of phase same core number, fibre core distribution, multi-core optical fibre core
Placement rectangular channel line length is design length, and depth is equal to its radius；Seven single mode optical fibers are positioned by dovetail groove and are assembled, dovetail groove
Design fasten two slots made of space the restriction of seven single mode optical fibers is arranged in it is identical steady with the distribution of seven core fibre fibre cores
Determine structure, trapezoidal groove depth is single mode fiber diametersTimes, inclined-plane and bottom surface angle are 60 °, and length is single mode optical fiber
Tail optical fiber is located at the design length inside connector；The line of rabbet joint of quartz substrate is once etched forming, the opening of the line of rabbet joint by setup parameter
Central axes are overlapped, and the line of rabbet joint depth of design guarantees that each component of splitter being packed into has an identical assembling axis；With phase
Two panels with the line of rabbet joint is snapped together by line of rabbet joint alignment, limits each component of splitter, rotary fine adjustment makes each component pair of splitter
Optical channel position alignment is answered, this kind of multi-core optical fiber splitter is made in point adhesive curing, test encapsulation.
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| CN106646843B (en) * | 2016-12-30 | 2023-03-24 | 重庆三峡医药高等专科学校 | Device for accurately controlling movement of single cells and ejection screening |
| CN110112635B (en) * | 2018-02-01 | 2020-10-30 | 桂林电子科技大学 | Device for generating switchable output multi-frequency microwave signals based on multi-core optical fiber |
| GB2594913A (en) * | 2020-03-10 | 2021-11-17 | Univ Heriot Watt | Method of fabricating an optical fibre preform |
| CN111650692B (en) * | 2020-05-10 | 2023-03-14 | 桂林电子科技大学 | Multicore optical fiber beam splitter based on high-refractive-index matching fluid |
| JP2021182040A (en) * | 2020-05-18 | 2021-11-25 | 住友電気工業株式会社 | Manufacturing method for fan-in fan-out device, and fan-in fan-out device |
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| US9341828B2 (en) * | 2011-03-31 | 2016-05-17 | Globalfoundries Inc. | Multi-core fiber optical coupling elements |
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| CN1423140A (en) * | 2001-12-04 | 2003-06-11 | 中国科学院半导体研究所 | Integrated structure of array waveguide grating and optical fiber array and manufacture method thereof |
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