CN104518135A - Organic electroluminescent device and preparation method thereof - Google Patents

Organic electroluminescent device and preparation method thereof Download PDF

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Publication number
CN104518135A
CN104518135A CN201310450465.2A CN201310450465A CN104518135A CN 104518135 A CN104518135 A CN 104518135A CN 201310450465 A CN201310450465 A CN 201310450465A CN 104518135 A CN104518135 A CN 104518135A
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layer
nitride layer
polyethylene terephthalate
organosilicon compound
organic electroluminescence
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周明杰
钟铁涛
王平
张振华
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Oceans King Lighting Science and Technology Co Ltd
Shenzhen Oceans King Lighting Science and Technology Co Ltd
Shenzhen Oceans King Lighting Engineering Co Ltd
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Oceans King Lighting Science and Technology Co Ltd
Shenzhen Oceans King Lighting Engineering Co Ltd
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Publication of CN104518135A publication Critical patent/CN104518135A/en
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention provides an organic electroluminescent device with the structure of a packaging layer. The packaging layer comprises a protective layer, a nitride layer, an organic silicon compound layer and a poly(ethylene terephthalate) film layer which are successively stacked. The poly(ethylene terephthalate) film layer and an anode conductive substrate are bonded to form an enclosed space, and the luminescence function layer, a cathode, the protective layer, the nitride layer and the organic silicon compound layer are accommodated in the enclosed space; the packaging layer can effectively prevent active substances such as external water, oxygen and the like from corroding the organic electroluminescent device and can prolong the service life of the organic electroluminescent device. The invention further provides a preparation method of the organic electroluminescent device. The preparation method is simple in process and low in raw material price, and can be easily prepared in a large area.

Description

A kind of organic electroluminescence device and preparation method thereof
Technical field
The present invention relates to field of organic electroluminescence, particularly relate to a kind of organic electroluminescence device and preparation method thereof.
Background technology
Organic electroluminescence device (OLED) is a kind of is luminescent material with organic material, can be the energy conversion device of luminous energy the electric energy conversion applied.It has the outstanding properties such as ultra-thin, self-luminous, response are fast, low-power consumption, has application prospect very widely in fields such as display, illuminations.
Electroluminescent organic material invades responsive especially to oxygen and steam.On the one hand because oxygen is quencher, luminous quantum efficiency can be made significantly to decline, and oxygen also can make its transmittability decline to the oxidation of hole transmission layer; On the other hand, steam can produce hydrolysis to organic compound, its stability is declined greatly, thus causes component failure, shortens the life-span of OLED.Therefore, usually need to carry out packaging protection process to OLED, luminescent device and external environment isolated, divides to prevent water, the intrusion of pernicious gas etc., and then improve stability and the useful life of OLED.
For flexible OLED product, if use traditional OLED encapsulation technology, add encapsulation cover plate in device back, the problems such as weight is large, cost is high, bad mechanical strength can be produced, limit the performance of flexible OLED product.At present, the water oxygen resistant ability of most flexible OLED is not strong, and useful life is shorter, and complicated process of preparation, cost are high.
Summary of the invention
In order to solve the problem; the present invention aims to provide a kind of organic electroluminescence device with encapsulation layer structure; this encapsulation layer structure can reduce outside water, oxygen isoreactivity material effectively to the erosion of organic electroluminescence device; thus effective protection is formed to device organic functional material and electrode, extend the useful life of organic electroluminescence device.Present invention also offers a kind of preparation method of organic electroluminescence device, this preparation method's technique is simple, cheaper starting materials, is easy to large area preparation.
First aspect, the invention provides a kind of organic electroluminescence device, comprise the anode conducting substrate stacked gradually, light emitting functional layer, negative electrode and encapsulated layer, described light emitting functional layer comprises the hole injection layer stacked gradually, hole transmission layer, luminescent layer, electron transfer layer and electron injecting layer, described encapsulated layer comprises the protective layer stacked gradually, nitride layer, organosilicon compound nitride layer and polyethylene terephthalate film layer, described polyethylene terephthalate film layer and described anode conducting substrate bonding form closed interval, and described light emitting functional layer, negative electrode, protective layer, nitride layer and organosilicon compound nitride layer are all placed in described closed interval,
The material of described protective layer is the one in CuPc, N, N'-diphenyl-N, N'-bis-(1-naphthyl)-1,1'-biphenyl-4,4'-diamines, oxine aluminium, silicon monoxide, magnesium fluoride and zinc sulphide;
The material of described nitride layer is Si 3n 4, one in AlN, BN, SiN, TaN and TiN;
The material of described organosilicon compound nitride layer is the one in poly-[(3-(two (trifluoromethyl) (methoxyl group) is silica-based) propyl group) two (trifluoromethyl) (methyl) silane], poly-[(3-(two (pentafluoroethyl group) (methoxyl group) is silica-based) propyl group) two (pentafluoroethyl group) (methyl) silane] and poly-[(3-(two (seven fluoropropyls) (methoxyl groups) are silica-based) propyl group) two (seven fluoropropyls) (methyl) silane];
The material of described polyethylene terephthalate film layer is polyethylene terephthalate (PET).
Encapsulated layer is arranged on cathode outer side, comprises the protective layer, nitride layer, organosilicon compound nitride layer and the polyethylene terephthalate film layer that stack gradually.Protective layer can protect negative electrode under the condition not destroying vacuum, prevents the destruction of subsequent technique target and organic layer; Nitride layer compactness is good, is main water oxygen barrier layer; Siliconated nitride layer, with machine inorganic nature, has humidification to PET film blocking capability, improves the pliability of device, can reduce stress in thin film simultaneously, prevents be full of cracks; Outer PET film good toughness, shock-resistant, rub resistance, can play Anti-scratching, self also provides certain barrier effect simultaneously.
The material of protective layer is CuPc (CuPc), N, N'-diphenyl-N, N'-bis-(1-naphthyl)-1,1'-biphenyl-4,4'-diamines (NPB), oxine aluminium (Alq 3), silicon monoxide (SiO), magnesium fluoride (MgF 2) and zinc sulphide (ZnS) in one.
Preferably, the thickness of protective layer is 200 ~ 300nm.
The material of nitride layer is Si 3n 4, one in AlN, BN, SiN, TaN and TiN.
Preferably, the thickness of nitride layer is 100 ~ 150nm.
Described poly-[(3-(two (trifluoromethyl) (methoxyl group) is silica-based) propyl group) two (trifluoromethyl) (methyl) silane], poly-[(3-(two (pentafluoroethyl group) (methoxyl group) is silica-based) propyl group) two (pentafluoroethyl group) (methyl) silane] and poly-[(3-(two (seven fluoropropyls) (methoxyl groups) are silica-based) propyl group) two (seven fluoropropyls) (methyl) silane] is by 2, 2, 6, 6-tetra-(trifluoromethyl)-1, 2, 6-oxa-disiloxane, 2, 2, 6, 6-tetra-(pentafluoroethyl group)-1, 2, 6-oxa-disiloxane and 2, 2, 6, 6-tetra-(seven fluoropropyls)-1, 2, 6-oxa-disiloxane is polymerized by photocuring, described 2, 2, 6, 6-tetra-(trifluoromethyl)-1, 2, 6-oxa-disiloxane, 2, 2, 6, 6-tetra-(pentafluoroethyl group)-1, 2, 6-oxa-disiloxane and 2, 2, 6, 6-tetra-(seven fluoropropyls)-1, 2, the structure of 6-oxa-disiloxane is as follows respectively:
Organo-silicon compound have certain water oxygen resistant ability, and stress is also little than inorganic matter simultaneously, can play certain stress buffer effect.
Preferably, the thickness of organosilicon compound nitride layer is 1 ~ 1.5 μm.
The material of polyethylene terephthalate film layer is polyethylene terephthalate (PET).
Preferably, the thickness of polyethylene terephthalate film layer is 1 ~ 1.5 μm.
Preferably, the material of anode conducting substrate is conducting glass substrate or conduction organic film substrate.More preferably, anode conducting substrate is indium tin oxide (ITO).
Preferably, the thickness of anode conducting substrate is 100nm.
Light emitting functional layer is arranged on anode conducting substrate.
Light emitting functional layer comprises the hole injection layer, hole transmission layer, luminescent layer, electron transfer layer and the electron injecting layer that stack gradually.
Preferably, the material of hole injection layer is MoO 3the mixture be mixed to form according to mass ratio 3:7 with NPB.
Preferably, the thickness of hole injection layer is 10nm.
Preferably, the material of hole transmission layer is 4,4', 4''-tri-(carbazole-9-base) triphenylamine (TCTA).
Preferably, the thickness of hole transmission layer is 30nm.
Preferably, the material of luminescent layer is that three (2-phenylpyridines) close iridium (Ir (ppy) 3) mixture that is mixed to form according to mass ratio 5:95 with 1,3,5-tri-(1-phenyl-1H-benzimidazolyl-2 radicals-Ji) benzene (TPBi).
Preferably, the thickness of luminescent layer is 20nm.
Preferably, the material of electron transfer layer is 4,7-diphenyl-1,10-phenanthroline (Bphen)
Preferably, the thickness of electron transfer layer is 10nm.
Preferably, the material of electron injecting layer is cesium azide (CsN 3) mixture that is mixed to form according to mass ratio 3:7 with Bphen.
Preferably, the thickness of electron injecting layer is 20nm.
Negative electrode is arranged in light emitting functional layer.
Preferably, the material of negative electrode is aluminium (Al).
Preferably, the thickness of negative electrode is 100nm.
Second aspect, the invention provides a kind of preparation method of organic electroluminescence device, comprises the following steps:
S1, provide clean anode conducting substrate, and activation processing is carried out to described anode conducting substrate;
S2, prepare light emitting functional layer and negative electrode in the vacuum evaporation of described anode conducting substrate surface, described light emitting functional layer comprises the hole injection layer, hole transmission layer, luminescent layer, electron transfer layer and the electron injecting layer that stack gradually;
S3, the mode of vacuum evaporation is adopted to prepare protective layer at described cathode surface, the material of described protective layer is CuPc, N, N'-diphenyl-N, N'-bis-(1-naphthyls)-1, one in 1'-biphenyl-4,4'-diamines, oxine aluminium, silicon monoxide, magnesium fluoride and zinc sulphide;
S4, prepare nitride layer at described protective layer magnetron sputtering, the material of described nitride layer is Si 3n 4, one in AlN, BN, SiN, TaN and TiN;
S5, provide polyethylene terephthalate film;
S6, in an inert atmosphere, by 2,2,6,6-tetra-(trifluoromethyl)-1,2,6-oxa-disiloxane, 2,2,6,6-tetra-(pentafluoroethyl group)-1,2,6-oxa-disiloxane and 2,2,6,6-tetra-(seven fluoropropyls)-1,2, one in 6-oxa-disiloxane is spin-coated in described polyethylene terephthalate film, is then cured with ultraviolet light, light intensity 10 ~ 15mW/cm 2, time for exposure 200 ~ 300s, obtain the organosilicon compound nitride layer be formed in polyethylene terephthalate film, the material of described organosilicon compound nitride layer is poly-[(3-(two (trifluoromethyl) (methoxyl group) is silica-based) propyl group) two (trifluoromethyl) (methyl) silane], poly-[(3-(two (pentafluoroethyl group) (methoxyl group) is silica-based) propyl group) two (pentafluoroethyl group) (methyl) silane] or poly-[(3-(two (seven fluoropropyls) (methoxyl groups) are silica-based) propyl group) two (seven fluoropropyls) (methyl) silane], the material of described poly-polyethylene terephthalate rete is poly-polyethylene terephthalate,
S7, with packaging plastic, polyethylene terephthalate film and described anode conducting substrate bonding are formed closed interval, and light emitting functional layer, negative electrode, protective layer, nitride layer and organosilicon compound nitride layer are all placed in described closed interval, described organosilicon compound nitride layer covers on described nitride layer;
Obtain encapsulated layer after S3 ~ S7 step completes, comprise the protective layer, nitride layer, organosilicon compound nitride layer and the polyethylene terephthalate film layer that stack gradually;
Finally obtain described organic electroluminescence device.
In step S1, by the cleaning of antianode electrically-conductive backing plate, the organic pollution of removing anode conducting substrate surface.
Particularly, the clean operation of anode conducting substrate is: cleaned in supersonic wave cleaning machine with acetone, ethanol, deionized water, ethanol successively by anode conducting substrate, then dry up with nitrogen, stove-drying, obtains the anode conducting substrate cleaned.
Surface activation process is carried out to the anode conducting substrate after cleaning, to increase the oxygen content of conductive surface layer, improves the work function of conductive layer surface.
Preferably, the material of anode conducting substrate is conducting glass substrate or conduction organic film substrate.More preferably, anode conducting substrate is indium tin oxide (ITO).
Preferably, the thickness of anode conducting substrate is 100nm.
In step S2, light emitting functional layer is arranged on anode conducting substrate by vacuum evaporation.
Preferably, during vacuum evaporation light emitting functional layer, condition is vacuum degree 3 × 10 -5pa, evaporation rate
Light emitting functional layer comprises the hole injection layer, hole transmission layer, luminescent layer, electron transfer layer and the electron injecting layer that stack gradually.
Preferably, the material of hole injection layer is MoO 3the mixture be mixed to form according to mass ratio 3:7 with NPB.
Preferably, the thickness of hole injection layer is 10nm.
Preferably, the material of hole transmission layer is 4,4', 4''-tri-(carbazole-9-base) triphenylamine (TCTA).
Preferably, the thickness of hole transmission layer is 30nm.
Preferably, the material of luminescent layer is that three (2-phenylpyridines) close iridium (Ir (ppy) 3) mixture that is mixed to form according to mass ratio 5:95 with 1,3,5-tri-(1-phenyl-1H-benzimidazolyl-2 radicals-Ji) benzene (TPBi).
Preferably, the thickness of luminescent layer is 20nm.
Preferably, the material of electron transfer layer is 4,7-diphenyl-1,10-phenanthroline (Bphen)
Preferably, the thickness of electron transfer layer is 10nm.
Preferably, the material of electron injecting layer is cesium azide (CsN 3) mixture that is mixed to form according to mass ratio 3:7 with Bphen.
Preferably, the thickness of electron injecting layer is 20nm.
Negative electrode is arranged in light emitting functional layer by vacuum evaporation.
Preferably, during vacuum evaporation negative electrode, condition is vacuum degree 3 × 10 -5pa, evaporation rate
Preferably, the material of negative electrode is aluminium (Al).
Preferably, the thickness of negative electrode is 100nm.
In step S3, protective layer is arranged on cathode surface by the mode of vacuum evaporation.
Preferably, vacuum evaporation condition is vacuum degree 8 × 10 -5pa ~ 3 × 10 -5pa, evaporation rate
The material of protective layer is CuPc (CuPc), N, N'-diphenyl-N, N'-bis-(1-naphthyl)-1,1'-biphenyl-4,4'-diamines (NPB), oxine aluminium (Alq 3), silicon monoxide (SiO), magnesium fluoride (MgF 2) and zinc sulphide (ZnS) in one.The material of protective layer all can make of evaporation process, just can directly make after having made electrode, avoids destroying vacuum condition.
Preferably, the thickness of protective layer is 200 ~ 300nm.
In step S4, nitride layer is arranged on protective layer by magnetron sputtering.
Preferably, magnetron sputtering preparation condition is background vacuum 1 × 10 -5~ 1 × 10 -3pa.
The material of nitride layer is Si 3n 4, one in AlN, BN, SiN, TaN and TiN.The material of nitride layer can make by same process condition, and water oxygen resistant ability is better simultaneously.
Preferably, the thickness of nitride layer is 100 ~ 150nm.
In step S6, organosilicon compound nitride layer adopts the technique of first spin coating post-exposure to make, and first by organo-silicon compound spin coating on a pet film, is cured, light intensity 10 ~ 15mW/cm with the ultraviolet light that wavelength is 365nm 2, time for exposure 200 ~ 300s.Then, organosilicon compound nitride layer is covered on nitride layer, obtain the protective layer, nitride layer, organosilicon compound nitride layer and the polyethylene terephthalate film layer that stack gradually.
Organo-silicon compound have certain water oxygen resistant ability, and stress is also little than inorganic matter simultaneously, can play certain stress buffer effect.
Described poly-[(3-(two (trifluoromethyl) (methoxyl group) is silica-based) propyl group) two (trifluoromethyl) (methyl) silane], poly-[(3-(two (pentafluoroethyl group) (methoxyl group) is silica-based) propyl group) two (pentafluoroethyl group) (methyl) silane] and poly-[(3-(two (seven fluoropropyls) (methoxyl groups) are silica-based) propyl group) two (seven fluoropropyls) (methyl) silane] is by 2, 2, 6, 6-tetra-(trifluoromethyl)-1, 2, 6-oxa-disiloxane, 2, 2, 6, 6-tetra-(pentafluoroethyl group)-1, 2, 6-oxa-disiloxane and 2, 2, 6, 6-tetra-(seven fluoropropyls)-1, 2, 6-oxa-disiloxane is polymerized by photocuring, described 2, 2, 6, 6-tetra-(trifluoromethyl)-1, 2, 6-oxa-disiloxane, 2, 2, 6, 6-tetra-(pentafluoroethyl group)-1, 2, 6-oxa-disiloxane and 2, 2, 6, 6-tetra-(seven fluoropropyls)-1, 2, the structure of 6-oxa-disiloxane is as follows respectively:
Preferably, the thickness of organosilicon compound nitride layer is 1 ~ 1.5 μm.
In step S7, with packaging plastic, polyethylene terephthalate film and described anode conducting substrate bonding are formed closed interval, and light emitting functional layer, negative electrode, protective layer, nitride layer and organosilicon compound nitride layer are all placed in described closed interval.
Particularly, at PET film edge-coating epoxy encapsulation glue, be then cured with the ultraviolet light that wavelength is 365nm, light intensity 10 ~ 15mW/cm 2, time for exposure 300 ~ 400s.The product that step S1 ~ S6 completes is encapsulated in described PET film and substrate.
The present invention has following beneficial effect:
(1) a kind of organic electroluminescence device with encapsulation layer structure provided by the invention; its encapsulated layer is stacked protective layer, nitride layer, organosilicon compound nitride layer and polyethylene terephthalate film layer; outside water, oxygen isoreactivity material effectively can be prevented the erosion of organic electroluminescence device, there is good sealing and longer useful life.
(2) preparation method of a kind of organic electroluminescence device provided by the invention, this preparation method's technique is simple, cheaper starting materials, is easy to large area preparation.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structure chart of the organic electroluminescence device that the embodiment of the present invention 6 provides.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Embodiment 1:
A kind of organic electroluminescence device, is obtained by following operating procedure:
(1) clean anode conducting substrate is provided:
Cleaned in supersonic wave cleaning machine with acetone, ethanol, deionized water, ethanol successively by ito glass substrate, individual event washing cleaning 5 minutes, then dry up with nitrogen, stove-drying is stand-by; Surface activation process is carried out to the ito glass after cleaning; ITO thickness is 100nm;
(2) vacuum evaporation light emitting functional layer on ito glass substrate:
Particularly, light emitting functional layer comprises hole injection layer, hole transmission layer, luminescent layer, electron transfer layer and electron injecting layer;
The preparation of hole injection layer: by MoO 3the mixture be mixed to get according to mass ratio 3:7 with NPB as the material of hole injection layer, thickness 10nm, vacuum degree 3 × 10 -5pa, evaporation rate
The preparation of hole transmission layer: adopt 4,4', 4''-tri-(carbazole-9-base) triphenylamine (TCTA) as hole mobile material, vacuum degree 3 × 10 -5pa, evaporation rate evaporation thickness 30nm;
The preparation of luminescent layer: adopt Ir (ppy) 3the mixture be mixed to form according to mass ratio 5:95 with TPBi as the material of luminescent layer, vacuum degree 3 × 10 -5pa, evaporation rate evaporation thickness 20nm;
The preparation of electron transfer layer: evaporation one deck 4,7-diphenyl-1,10-phenanthroline (Bphen) as electron transport material, vacuum degree 3 × 10 -5pa, evaporation rate evaporation thickness 10nm;
The preparation of electron injecting layer: by CsN 3the mixture be mixed to form according to mass ratio 3:7 with Bphen as the material of electron injecting layer, vacuum degree 3 × 10 -5pa, evaporation rate evaporation thickness 20nm;
(3) negative electrode is prepared on light emitting functional layer surface:
Metallic cathode adopts aluminium (Al), and thickness is 100nm, vacuum degree 5 × 10 -5pa, evaporation rate
(4) encapsulated layer is prepared at cathode outer side:
Encapsulated layer comprises the protective layer, nitride layer, organosilicon compound nitride layer and the polyethylene terephthalate film layer that stack gradually;
The making of protective layer: adopt the mode of vacuum evaporation to prepare one deck CuPc on negative electrode, preparation condition vacuum degree 3 × 10 -5pa, evaporation rate obtaining thickness is 200nm;
The making of nitride layer: with Si 3n 4as the material of nitride layer, magnetically controlled sputter method is adopted to make, background vacuum 2 × 10 -4pa, thickness 100nm;
The making of organosilicon compound nitride layer: in an inert atmosphere, by the spin coating of 2,2,6,6-tetra-(trifluoromethyl)-1,2,6-oxa-disiloxane on a pet film, thickness is 1.5 μm, is then cured with the ultraviolet light that wavelength is 365nm, light intensity 15mW/cm 2time for exposure 300s, obtain the organosilicon compound nitride layer be formed in polyethylene terephthalate film, the material of described organosilicon compound nitride layer is poly-[(3-(two (trifluoromethyl) (methoxyl group) is silica-based) propyl group) two (trifluoromethyl) (methyl) silane];
The making of polyethylene terephthalate film layer: polyethylene terephthalate film and anode conducting substrate bonding are formed closed interval with epoxy encapsulation glue, and light emitting functional layer, negative electrode, protective layer, nitride layer and organosilicon compound nitride layer are all placed in closed interval, organosilicon compound nitride layer covers on nitride layer;
Final obtained organic electroluminescence device.
Embodiment 2:
A kind of organic electroluminescence device, is obtained by following operating procedure:
(1), (2), (3) are with embodiment 1;
(4) encapsulated layer is prepared at cathode outer side:
Encapsulated layer comprises the protective layer, nitride layer, organosilicon compound nitride layer and the polyethylene terephthalate film layer that stack gradually;
The making of protective layer: adopt the mode of vacuum evaporation to prepare one deck NPB on negative electrode, preparation condition vacuum degree 3 × 10 -5pa, evaporation rate obtaining thickness is 300nm;
The making of nitride layer: using AlN as the material of nitride layer, adopts magnetically controlled sputter method to make, background vacuum 2 × 10 -4pa, thickness 120nm;
The making of organosilicon compound nitride layer: in an inert atmosphere, by the spin coating of 2,2,6,6-tetra-(pentafluoroethyl group)-1,2,6-oxa-disiloxane on a pet film, thickness is 1.2 μm, is then cured with the ultraviolet light that wavelength is 365nm, light intensity 12mW/cm 2time for exposure 260s, obtain the organosilicon compound nitride layer be formed in polyethylene terephthalate film, the material of described organosilicon compound nitride layer is poly-[(3-(two (pentafluoroethyl group) (methoxyl group) is silica-based) propyl group) two (pentafluoroethyl group) (methyl) silane];
The making of polyethylene terephthalate film layer: polyethylene terephthalate film and anode conducting substrate bonding are formed closed interval with packaging plastic, and light emitting functional layer, negative electrode, protective layer, nitride layer and organosilicon compound nitride layer are all placed in closed interval, organosilicon compound nitride layer covers on nitride layer;
Final obtained organic electroluminescence device.
Embodiment 3:
A kind of organic electroluminescence device, is obtained by following operating procedure:
(1), (2), (3) are with embodiment 1;
(4) encapsulated layer is prepared at cathode outer side:
Encapsulated layer comprises the protective layer, nitride layer, organosilicon compound nitride layer and the polyethylene terephthalate film layer that stack gradually;
The making of protective layer: adopt the mode of vacuum evaporation to prepare one deck Alq on negative electrode 3, preparation condition vacuum degree 3 × 10 -5pa, evaporation rate obtaining thickness is 250nm;
The making of nitride layer: using BN as the material of nitride layer, adopts magnetically controlled sputter method to make, background vacuum 2 × 10 -4pa, thickness 150nm;
The making of organosilicon compound nitride layer: in an inert atmosphere, by 2,2,6,6-tetra-(seven fluoropropyls)-1,2,6-oxa-disiloxane spin coating on a pet film, thickness is 1 μm, is then cured with the ultraviolet light that wavelength is 365nm, light intensity 10mW/cm 2time for exposure 200s, obtain the organosilicon compound nitride layer be formed in polyethylene terephthalate film, the material of described organosilicon compound nitride layer is poly-[(3-(two (seven fluoropropyls) (methoxyl groups) are silica-based) propyl group) two (seven fluoropropyls) (methyl) silane];
The making of polyethylene terephthalate film layer: polyethylene terephthalate film and anode conducting substrate bonding are formed closed interval with packaging plastic, and light emitting functional layer, negative electrode, protective layer, nitride layer and organosilicon compound nitride layer are all placed in closed interval, organosilicon compound nitride layer covers on nitride layer;
Final obtained organic electroluminescence device.
Embodiment 4:
A kind of organic electroluminescence device, is obtained by following operating procedure:
(1), (2), (3) are with embodiment 1;
(4) encapsulated layer is prepared at cathode outer side:
Encapsulated layer comprises the protective layer, nitride layer, organosilicon compound nitride layer and the polyethylene terephthalate film layer that stack gradually;
The making of protective layer: adopt the mode of vacuum evaporation to prepare one deck SiO on negative electrode, preparation condition vacuum degree 5 × 10 -5pa, evaporation rate obtaining thickness is 200nm;
The making of nitride layer: using SiN as the material of nitride layer, adopts magnetically controlled sputter method to make, background vacuum 2 × 10 -4pa, thickness 100nm;
The making of organosilicon compound nitride layer: in an inert atmosphere, by the spin coating of 2,2,6,6-tetra-(trifluoromethyl)-1,2,6-oxa-disiloxane on a pet film, thickness is 1.5 μm, is then cured with the ultraviolet light that wavelength is 365nm, light intensity 15mW/cm 2time for exposure 300s, obtain the organosilicon compound nitride layer be formed in polyethylene terephthalate film, the material of described organosilicon compound nitride layer is poly-[(3-(two (trifluoromethyl) (methoxyl group) is silica-based) propyl group) two (trifluoromethyl) (methyl) silane];
The making of polyethylene terephthalate film layer: polyethylene terephthalate film and anode conducting substrate bonding are formed closed interval with packaging plastic, and light emitting functional layer, negative electrode, protective layer, nitride layer and organosilicon compound nitride layer are all placed in closed interval, organosilicon compound nitride layer covers on nitride layer;
Final obtained organic electroluminescence device.
Embodiment 5:
A kind of organic electroluminescence device, is obtained by following operating procedure:
(1), (2), (3) are with embodiment 1;
(4) encapsulated layer is prepared at cathode outer side:
Encapsulated layer comprises the protective layer, nitride layer, organosilicon compound nitride layer and the polyethylene terephthalate film layer that stack gradually;
The making of protective layer: adopt the mode of vacuum evaporation to prepare one deck MgF on negative electrode 2, preparation condition vacuum degree 5 × 10 -5pa, evaporation rate obtaining thickness is 300nm;
The making of nitride layer: using TaN as the material of nitride layer, adopts magnetically controlled sputter method to make, background vacuum 2 × 10 -4pa, thickness 150nm;
The making of organosilicon compound nitride layer: in an inert atmosphere, by the spin coating of 2,2,6,6-tetra-(pentafluoroethyl group)-1,2,6-oxa-disiloxane on a pet film, thickness is 1.1 μm, is then cured with the ultraviolet light that wavelength is 365nm, light intensity 11mW/cm 2time for exposure 220s, obtain the organosilicon compound nitride layer be formed in polyethylene terephthalate film, the material of described organosilicon compound nitride layer is poly-[(3-(two (pentafluoroethyl group) (methoxyl group) is silica-based) propyl group) two (pentafluoroethyl group) (methyl) silane];
The making of polyethylene terephthalate film layer: polyethylene terephthalate film and anode conducting substrate bonding are formed closed interval with packaging plastic, and light emitting functional layer, negative electrode, protective layer, nitride layer and organosilicon compound nitride layer are all placed in closed interval, organosilicon compound nitride layer covers on nitride layer;
Final obtained organic electroluminescence device.
Embodiment 6:
A kind of organic electroluminescence device, is obtained by following operating procedure:
(1), (2), (3) are with embodiment 1;
(4) encapsulated layer is prepared at cathode outer side:
Encapsulated layer comprises the protective layer, nitride layer, organosilicon compound nitride layer and the polyethylene terephthalate film layer that stack gradually;
The making of protective layer: adopt the mode of vacuum evaporation to prepare one deck ZnS on negative electrode, preparation condition vacuum degree 5 × 10 -5pa, evaporation rate obtaining thickness is 250nm;
The making of nitride layer: using TiN as the material of nitride layer, adopts magnetically controlled sputter method to make, background vacuum 2 × 10 -4pa, thickness 120nm;
The making of organosilicon compound nitride layer: in an inert atmosphere, by 2,2,6,6-tetra-(seven fluoropropyls)-1,2,6-oxa-disiloxane spin coating on a pet film, thickness is 1.1 μm, is then cured with the ultraviolet light that wavelength is 365nm, light intensity 11mW/cm 2time for exposure 210s, obtain the organosilicon compound nitride layer be formed in polyethylene terephthalate film, the material of described organosilicon compound nitride layer is poly-[(3-(two (seven fluoropropyls) (methoxyl groups) are silica-based) propyl group) two (seven fluoropropyls) (methyl) silane];
The making of polyethylene terephthalate film layer: polyethylene terephthalate film and anode conducting substrate bonding are formed closed interval with packaging plastic, and light emitting functional layer, negative electrode, protective layer, nitride layer and organosilicon compound nitride layer are all placed in closed interval, organosilicon compound nitride layer covers on nitride layer;
Final obtained organic electroluminescence device.
Fig. 1 is the structural representation of the organic electroluminescence device of the present embodiment.As shown in Figure 1, the structure of this organic electroluminescence device comprises the anode conducting substrate 10, light emitting functional layer 20, negative electrode 30, the encapsulated layer 40(that stack gradually and comprises protective layer 401, nitride layer 402, organosilicon compound nitride layer 403, polyethylene terephthalate film layer 404).
Effect example
Adopt the vapor permeability (WVTR) of Ca film electrical testing system testing organic electroluminescence device, and test life-span (the T70@1000cd/m of organic electroluminescence device 2), from original intensity 1000cd/m 2decay to the time needed for 70%.WVTR and the life-span of the organic electroluminescence device of the embodiment of the present invention 1 ~ 6 preparation are as shown in table 1.As can be seen from the table, WVTR all remains on 10 -6g/ (m 2day) order of magnitude, minimumly reaches 6.7 × 10 -6g/ (m 2day), the real requirement of flexible OLED can be met.The life time of organic electroluminescence device remains on more than 13000, the longlyest reaches 14021 hours.This illustrates, the organic electroluminescence device of encapsulation layer structure that prepared by the present invention have can prevent outside water, oxygen isoreactivity material to the erosion of organic electroluminescence device effectively, has good sealing and longer useful life.
Table 1
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.

Claims (10)

1. an organic electroluminescence device, comprise the anode conducting substrate stacked gradually, light emitting functional layer, negative electrode and encapsulated layer, described light emitting functional layer comprises the hole injection layer stacked gradually, hole transmission layer, luminescent layer, electron transfer layer and electron injecting layer, it is characterized in that, described encapsulated layer comprises the protective layer stacked gradually, nitride layer, organosilicon compound nitride layer and polyethylene terephthalate film layer, described polyethylene terephthalate film layer and described anode conducting substrate bonding form closed interval, and described light emitting functional layer, negative electrode, protective layer, nitride layer and organosilicon compound nitride layer are all placed in described closed interval,
The material of described protective layer is the one in CuPc, N, N'-diphenyl-N, N'-bis-(1-naphthyl)-1,1'-biphenyl-4,4'-diamines, oxine aluminium, silicon monoxide, magnesium fluoride and zinc sulphide;
The material of described nitride layer is Si 3n 4, one in AlN, BN, SiN, TaN and TiN;
The material of described organosilicon compound nitride layer is the one in poly-[(3-(two (trifluoromethyl) (methoxyl group) is silica-based) propyl group) two (trifluoromethyl) (methyl) silane], poly-[(3-(two (pentafluoroethyl group) (methoxyl group) is silica-based) propyl group) two (pentafluoroethyl group) (methyl) silane] and poly-[(3-(two (seven fluoropropyls) (methoxyl groups) are silica-based) propyl group) two (seven fluoropropyls) (methyl) silane];
The material of described polyethylene terephthalate film layer is polyethylene terephthalate.
2. organic electroluminescence device as claimed in claim 1, it is characterized in that, the thickness of described protective layer is 200 ~ 300nm.
3. organic electroluminescence device as claimed in claim 1, it is characterized in that, the thickness of described nitride layer is 100 ~ 150nm.
4. organic electroluminescence device as claimed in claim 1, it is characterized in that, the thickness of described organosilicon compound nitride layer is 1 ~ 1.5 μm.
5. organic electroluminescence device as claimed in claim 1, it is characterized in that, the thickness of described polyethylene terephthalate film layer is 1 ~ 1.5 μm.
6. a preparation method for organic electroluminescence device, is characterized in that, comprises the following steps:
S1, provide clean anode conducting substrate, and activation processing is carried out to described anode conducting substrate;
S2, prepare light emitting functional layer and negative electrode in the vacuum evaporation of described anode conducting substrate surface, described light emitting functional layer comprises the hole injection layer, hole transmission layer, luminescent layer, electron transfer layer and the electron injecting layer that stack gradually;
S3, the mode of vacuum evaporation is adopted to prepare protective layer at described cathode surface, the material of described protective layer is CuPc, N, N'-diphenyl-N, N'-bis-(1-naphthyls)-1, one in 1'-biphenyl-4,4'-diamines, oxine aluminium, silicon monoxide, magnesium fluoride and zinc sulphide;
S4, prepare nitride layer at described protective layer magnetron sputtering, the material of described nitride layer is Si 3n 4, one in AlN, BN, SiN, TaN and TiN;
S5, provide polyethylene terephthalate film;
S6, in an inert atmosphere, by 2, 2, 6, 6-tetra-(trifluoromethyl)-1, 2, 6-oxa-disiloxane, 2, 2, 6, 6-tetra-(pentafluoroethyl group)-1, 2, 6-oxa-disiloxane and 2, 2, 6, 6-tetra-(seven fluoropropyls)-1, 2, one in 6-oxa-disiloxane is spin-coated in described polyethylene terephthalate film, then be cured with ultraviolet light, light intensity 10 ~ 15mW/cm2, time for exposure 200 ~ 300s, obtain the organosilicon compound nitride layer be formed in polyethylene terephthalate film, the material of described organosilicon compound nitride layer is poly-[(3-(two (trifluoromethyl) (methoxyl group) is silica-based) propyl group) two (trifluoromethyl) (methyl) silane], poly-[(3-(two (pentafluoroethyl group) (methoxyl group) is silica-based) propyl group) two (pentafluoroethyl group) (methyl) silane] or poly-[(3-(two (seven fluoropropyls) (methoxyl groups) are silica-based) propyl group) two (seven fluoropropyls) (methyl) silane], the material of described poly-polyethylene terephthalate rete is poly-polyethylene terephthalate,
S7, with packaging plastic, polyethylene terephthalate film and described anode conducting substrate bonding are formed closed interval, and light emitting functional layer, negative electrode, protective layer, nitride layer and organosilicon compound nitride layer are all placed in described closed interval, described organosilicon compound nitride layer covers on described nitride layer;
Obtain encapsulated layer after S3 ~ S7 step completes, comprise the protective layer, nitride layer, organosilicon compound nitride layer and the polyethylene terephthalate film layer that stack gradually;
Finally obtain described organic electroluminescence device.
7. the preparation method of organic electroluminescence device as claimed in claim 6, it is characterized in that, the thickness of described protective layer is 200 ~ 300nm.
8. the preparation method of organic electroluminescence device as claimed in claim 6, it is characterized in that, the thickness of described nitride layer is 100 ~ 150nm.
9. the preparation method of organic electroluminescence device as claimed in claim 6, it is characterized in that, the thickness of described organosilicon compound nitride layer is 1 ~ 1.5 μm.
10. the preparation method of organic electroluminescence device as claimed in claim 6, it is characterized in that, the thickness of described polyethylene terephthalate film layer is 1 ~ 1.5 μm.
CN201310450465.2A 2013-09-27 2013-09-27 Organic electroluminescent device and preparation method thereof Pending CN104518135A (en)

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Application publication date: 20150415