CN104516290A - Ultrasonic transducer driving power supply - Google Patents
Ultrasonic transducer driving power supply Download PDFInfo
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- CN104516290A CN104516290A CN201410376021.3A CN201410376021A CN104516290A CN 104516290 A CN104516290 A CN 104516290A CN 201410376021 A CN201410376021 A CN 201410376021A CN 104516290 A CN104516290 A CN 104516290A
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- ultrasonic transducer
- digital signal
- signal processor
- phase
- driving power
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0423—Input/output
Abstract
The invention provides an ultrasonic transducer driving power supply comprising a frequency generator, a phase discriminating circuit and a digital signal processor. The frequency generator is controlled by a control signal and used for outputting a driving signal to an ultrasonic transducer; the phase discriminating circuit is used for generating the control signal and performing phase locking according to a phase discrimination result; according to the control signal generated after phase locking, the digital signal processor is capable of controlling the frequency generator to output the driving signal enabling the ultrasonic transducer to generate resonance. The digital signal processor controls the frequency generator to sweep frequency for the ultrasonic transducer, the phase discriminating circuit discriminates the phase of the output signal of the ultrasonic transducer in the process, then the digital signal process determines resonance frequency of the ultrasonic transducer according to the phase discrimination result and outputs the control signal via phase locking, the frequency generator can control the ultrasonic transducer to maintain operation under the resonance condition, and accordingly energy conversion efficiency of the ultrasonic transducer is improved.
Description
Technical field
The present invention relates to ultrasonic bond field, particularly a kind of driving power for ultrasonic transducer.
Background technology
Ultrasonic bond technique refers to the dither by ultrasonic generator excitation transducer, makes the mechanical energy of dither be converted to heat energy, thus realize plain conductor and integrated circuit pad and and lead frame pin between the thermal bonding of two kinds of metal materials.Its technique is simple, efficient, can complete the connection of solder joint, be therefore widely used in semiconductor die package field at Millisecond.
In above process, except the quality factor of transducer itself, the conversion efficiency that hyperacoustic energy is converted to mechanical energy by transducer is the gordian technique determining welding quality.Ultrasonic transducer conversion efficiency of mechanical energy when reaching resonance is the highest, but certain excursions can be there is because of the factor of various mechanical erection and load in resonance frequency, these factors directly can cause the decline of transducer energy conversion efficiency, thus affect welding quality.
Therefore, a kind of technical scheme that can improve ultrasonic generator serviceability of research and development is needed at present badly.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of driving power for ultrasonic transducer, can the working condition of tracking in time ultrasonic transducer, and process feedback information in time to compensate, to revise the output energy of ultrasonic transducer, make it have adaptive ability, thus improve serviceability.
For solving the problems of the technologies described above, embodiments of the invention provide a kind of driving power for ultrasonic transducer, comprising:
Frequency generator, is controlled by control signal, for ultrasonic transducer output drive signal;
Phase discriminator, for carrying out phase demodulation to the output signal of ultrasonic transducer, obtains identified result;
Digital signal processor, for generating described control signal, and carries out phase-locked according to described identified result;
Wherein, described digital signal processor can control described frequency generator in the control signal of phase-locked rear generation and export the drive singal making described ultrasonic transducer resonance.
Wherein, described driving power for ultrasonic transducer also comprises:
Voltage feedback circuit and current feedback circuit;
Described digital signal processor obtains the output voltage of described ultrasonic transducer according to described voltage feedback circuit, and obtains the output current of described ultrasonic transducer according to described current feedback circuit; And the electrical quantity needed for the described ultrasonic transducer work of preserving in advance is compared to the described output voltage got and described output current, and according to comparison result, described control signal is revised.
Wherein, described driving power for ultrasonic transducer also comprises:
Communication interface; Described digital signal processor is set up alternately by described communication interface and host computer, obtains the electrical quantity needed for described ultrasonic transducer work sent by host computer.
Wherein, described driving power for ultrasonic transducer also comprises:
The external memory storage be connected with described digital signal processor;
Described digital signal processor is also for being saved to described external memory storage by described electrical quantity and described identified result.
Wherein, described communication interface specifically comprises network interface and/or serial ports;
Described digital signal processor passes through described network interface or serial ports and host computer and sets up alternately, obtains the electrical quantity needed for described ultrasonic transducer work sent by host computer.
Wherein, described communication interface also comprises: parallel port.
Described digital signal processor receives host computer transmission timing signal by described parallel port, and carries out work according to this clock signal.
Wherein, described digital signal processor obtains especially by described network interface or serial ports and sends checking command by host computer; And send a checking signal according to described checking command to described frequency generator, make described frequency generator generate frequency continually varying drive singal in preset range, and make described ultrasonic transducer export the output signal of preset range frequency;
Wherein, described digital signal processor specifically controls the output signal of described phase discriminator to the output preset range frequency of ultrasonic transducer according to described checking command and carries out phase demodulation.
Wherein, described identified result is specially the phase differential of the output current described preset range frequency corresponding to output voltage of digital signal processor;
Described digital signal processor specifically carries out phase-locked according to phase differential minimum in described identified result.
Wherein, described driving power for ultrasonic transducer also comprises:
High-frequency isolation transformer, its one end is connected with the output terminal of described frequency generator, and the other end is used for being connected with the incoming end of described ultrasonic transducer, for carrying out impedance matching to described ultrasonic transducer.
Wherein, described driving power for ultrasonic transducer also comprises:
Power amplification circuit, accesses between described high-frequency isolation transformer and described frequency generator, for carrying out power amplification to described drive singal.
The beneficial effect of technique scheme of the present invention is as follows:
DSP CONTROL frequency generator of the present invention carries out frequency sweep to ultrasonic transducer, and in the process, phase discriminator carries out phase demodulation to the output signal of ultrasonic transducer, digital signal processor determines ultrasonic transducer resonance frequency according to identified result afterwards, and phase-locked output control signal, enable frequency generator control ultrasonic transducer and maintain resonant condition work, thus improve the efficiency of its energy conversion, can be widely used in ultrasonic bond process equipment, to improve bonding quality.
Accompanying drawing explanation
Fig. 1 is the structural representation of driving power for ultrasonic transducer of the present invention.
Embodiment
For making the technical problem to be solved in the present invention, technical scheme and advantage clearly, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
As shown in Figure 1, embodiments of the invention provide a kind of driving power for ultrasonic transducer, comprising:
Frequency generator, is controlled by control signal, for ultrasonic transducer output drive signal;
Phase discriminator, for carrying out phase demodulation to the output signal of ultrasonic transducer, obtains identified result;
Digital signal processor, for generating described control signal, and carries out phase-locked according to described identified result;
Wherein, described digital signal processor can control described frequency generator in the control signal of phase-locked rear generation and export the drive singal making described ultrasonic transducer resonance.
DSP CONTROL frequency generator of the present invention carries out frequency sweep to ultrasonic transducer, and in the process, phase discriminator carries out phase demodulation to the output signal of ultrasonic transducer, digital signal processor determines ultrasonic transducer resonance frequency according to identified result afterwards, and phase-locked output control signal, enable frequency generator control ultrasonic transducer and maintain resonant condition work, thus improve the efficiency of its energy conversion, can be widely used in ultrasonic bond process equipment, to improve bonding quality.
Further, on above-described embodiment basis, described driving power for ultrasonic transducer also comprises:
Voltage feedback circuit and current feedback circuit;
Described digital signal processor obtains the output voltage of described ultrasonic transducer according to described voltage feedback circuit, and obtains the output current of described ultrasonic transducer according to described current feedback circuit; And the electrical quantity needed for the described ultrasonic transducer work of preserving in advance is compared to the described output voltage got and described output current, and according to comparison result, described control signal is revised.
In the foregoing description, can in advance the electrical quantity needed for ultrasonic transducer work be kept in digital signal processor in advance.Digital signal processor, when carrying out work, periodically can regulate output current and the output voltage of ultrasonic transducer according to the electrical quantity preserved.Based on the processing horizontal of digital signal processor, the used time of above-mentioned one-period, in 50 microseconds, can ensure that ultrasonic transducer carries out work in stable amplitude completely.In addition, according to above-mentioned close-loop feedback principle, digital signal processor can carry out constant voltage, constant current, power limitation control to ultrasonic transducer, has widened the usable range of ultrasonic transducer.
Particularly, driving power for ultrasonic transducer of the present invention also comprises:
Communication interface; Described digital signal processor is set up alternately by described communication interface and host computer, obtains the electrical quantity needed for described ultrasonic transducer work sent by host computer.
Exemplarily, electrical quantity can be the value of the corresponding different time of current/voltage, i.e. the curve map of the corresponding time dimension of current/voltage.DSP CONTROL frequency generator generates the drive singal meeting curved profile.
In addition, because digital signal processor is buffered in the internal memory of self by electrical quantity and identified result, therefore after a power failure can obliterated data, for avoiding this situation to occur, described driving power for ultrasonic transducer also comprises:
The external memory storage (as EPPROM storer, FLASH flash memory) be connected with described digital signal processor, described electrical quantity and described identified result are saved to described external memory storage by described digital signal processor.External memory storage can not obliterated data after ensure that digital signal processor power down.
Exemplarily, above-mentioned communication interface specifically comprises network interface and/or serial ports;
Digital signal processor passes through described network interface or serial ports and host computer and sets up alternately, obtains the electrical quantity needed for described ultrasonic transducer work sent by host computer.
Preferably, as shown in Figure 1, driving power for ultrasonic transducer of the present invention comprises network interface and serial ports simultaneously, and user can select one of them to be connected with host computer according to appointed condition.
In addition, as shown in Figure 1, described communication interface also comprises: parallel port.
Described digital signal processor receives host computer transmission timing signal by described parallel port, and carries out work according to this clock signal.
In the foregoing description, transmitting clock signal due to parallel port does not need resolving, therefore, it is possible to realize the job control to digital signal processor fast.
Particularly, described digital signal processor is obtained by described network interface or serial ports and sends checking command by host computer; And send a checking signal according to described checking command to described frequency generator, make described frequency generator generate frequency continually varying drive singal in preset range, and make described ultrasonic transducer export the output signal of preset range frequency;
Wherein, described digital signal processor specifically controls the output signal of described phase discriminator to the output preset range frequency of ultrasonic transducer according to described checking command and carries out phase demodulation.
Particularly, above-mentioned identified result is specially the phase differential of the output current described preset range frequency corresponding to output voltage of digital signal processor;
Described digital signal processor specifically carries out phase-locked according to phase differential minimum in described identified result.
Resonance is arrived when the output current of ultrasonic transducer and the phase differential of output voltage are 0.Therefore, the setting of preset range frequency should contain the resonance frequency of ultrasonic transducer.Digital signal processor can determine the resonance frequency of ultrasonic transducer according to minimum phase difference, and carries out phase-locked according to internal algorithm.
In addition, preferably, described driving power for ultrasonic transducer also comprises:
Isolating transformer, its one end is connected with the output terminal of described frequency generator, the other end is used for being connected with the incoming end of described ultrasonic transducer, for carrying out impedance matching to described ultrasonic transducer, described driving power for ultrasonic transducer is enable to be applicable to the ultrasonic transducer of different parameters.
In addition, described driving power for ultrasonic transducer also comprises:
Power amplification circuit, accesses between described high-frequency isolation transformer and described frequency generator, for carrying out power amplification to described drive singal, enables drive singal reach ultrasonic transducer job requirement.
Below above-mentioned driving power for ultrasonic transducer is described in detail.
Driving power for ultrasonic transducer of the present invention adopts DC24V direct current supply.After powering on, the system of digital signal processor carries out initialization automatically, after initialization completes, digital signal processor sets up communication by network interface or serial ports in host computer, and the electrical quantity required for the work of download ultrasonic transducer is in self EMS memory and external memory storage.
The calibration carrying out phase place is needed before ultrasonic transducer work.As shown in Figure 1, in this process, host computer sends calibration command to digital signal processor, digital signal processor sends a checking signal to frequency generator after receiving calibration command, frequency generator can activate internal processes receiving checking signal, thus generate frequency continually varying drive singal in a preset range, drive singal is specially sine wave, pass through power amplifier, the two ends of ultrasonic transducer are loaded into after isolating transformer and ultrasonic transducer interface, make ultrasonic transducer analog operation, generating output signal (comprising current signal and voltage signal).
Meanwhile, DSP CONTROL phase detector carries out phase demodulation to this output signal.Exemplarily, phase detector can comprise complex programmable logic device (CPLD) and comparator circuit.Wherein, comparator circuit can be divided into the first comparator circuit and the second comparator circuit.The current signal of the first just output signal of ultrasonic transducer of the first comparator circuit is converted to voltage signal, and the voltage signal converted to by current signal is afterwards converted to the first square-wave signal after the first comparer in the first comparator circuit.In like manner, the voltage signal that ultrasonic transducer exports directly is converted to the second square-wave signal by the second comparer in the second comparator circuit.CPLD calculates the first square-wave signal and the second square wave signal phase difference according to internal processes, and this phase differential is sent to digital signal processor, checking procedure is obtained phase differential and carries out report form processing by digital signal processor, to and be saved in external memory storage and inner buffer.
In addition, digital signal processor is the output voltage of the ultrasonic transducer of recording voltage feedback circuit and current feedback circuit feedback and output current simultaneously, and the frequency characteristic figure of ultrasonic transducer can be obtained according to internal processes, include but not limited to the graph of a relation of the graph of a relation of the graph of a relation of the graph of a relation of frequency and impedance, frequency and voltage, frequency and electric current, frequency and phase place, and be sent to host computer by network interface or serial ports, enable technician utilize host computer analysis, such as, remodify the electrical quantity needed for ultrasonic transducer work.
Afterwards, digital signal processor calculates according to the phase differential report data obtained after calibration, thus completes phase-locked work, namely forms PLL phaselocked loop to keep the minimum phase difference of ultrasonic transducer output voltage and output current (being desirably zero).
After phase-locked success, calibration process terminates, and host computer to digital signal processor transmission timing signal, drives digital signal processor to start normal work by parallel port.In this process, the electrical quantity of external memory storage can be loaded in self EMS memory by digital signal processor, and according to this electrical quantity generate phase-locked after control signal, with controlled frequency generator generate phase-locked after drive singal (namely the work capacity of ultrasonic transducer).Drive singal after phase-locked is loaded into ultrasonic transducer after power amplifier, isolating transformer and ultrasonic transducer interface, drives ultrasonic transducer according to energetic resonance work corresponding to drive singal.
In the process that whole energy applies, new electrical quantity also can be sent to digital signal processor by network interface or serial ports by host computer in real time, thus realizes the output demand of dynamic refresh, meets technological requirement complicated in actual bond process.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (10)
1. a driving power for ultrasonic transducer, is characterized in that, comprising:
Frequency generator, is controlled by control signal, for ultrasonic transducer output drive signal;
Phase discriminator, for carrying out phase demodulation to the output signal of ultrasonic transducer, obtains identified result;
Digital signal processor, for generating described control signal, and carries out phase-locked according to described identified result;
Wherein, described digital signal processor can control described frequency generator in the control signal of phase-locked rear generation and export the drive singal making described ultrasonic transducer resonance.
2. driving power for ultrasonic transducer according to claim 1, is characterized in that, also comprises:
Voltage feedback circuit and current feedback circuit;
Described digital signal processor obtains the output voltage of described ultrasonic transducer according to described voltage feedback circuit, and obtains the output current of described ultrasonic transducer according to described current feedback circuit; And the electrical quantity needed for the described ultrasonic transducer work of preserving in advance is compared to the described output voltage got and described output current, and according to comparison result, described control signal is revised.
3. driving power for ultrasonic transducer according to claim 1, is characterized in that, also comprises:
Communication interface; Described digital signal processor is set up alternately by described communication interface and host computer, obtains the electrical quantity needed for described ultrasonic transducer work sent by host computer.
4. driving power for ultrasonic transducer according to claim 3, is characterized in that, also comprises:
The external memory storage be connected with described digital signal processor;
Described digital signal processor is also for being saved to described external memory storage by described electrical quantity and described identified result.
5. driving power for ultrasonic transducer according to claim 3, is characterized in that, described communication interface specifically comprises network interface and/or serial ports;
Described digital signal processor passes through described network interface or serial ports and host computer and sets up alternately, obtains the electrical quantity needed for described ultrasonic transducer work sent by host computer.
6. driving power for ultrasonic transducer according to claim 3, is characterized in that, described communication interface also comprises: parallel port;
Described digital signal processor receives host computer transmission timing signal by described parallel port, and carries out work according to this clock signal.
7. driving power for ultrasonic transducer according to claim 5, is characterized in that, described digital signal processor obtains especially by described network interface or serial ports and sends checking command by host computer; And send a checking signal according to described checking command to described frequency generator, make described frequency generator generate frequency continually varying drive singal in preset range, and make described ultrasonic transducer export the output signal of preset range frequency;
Wherein, described digital signal processor specifically controls the output signal of described phase discriminator to the output preset range frequency of ultrasonic transducer according to described checking command and carries out phase demodulation.
8. driving power for ultrasonic transducer according to claim 7, is characterized in that, described identified result is specially the phase differential of the output current described preset range frequency corresponding to output voltage of digital signal processor;
Described digital signal processor specifically carries out phase-locked according to phase differential minimum in described identified result.
9. driving power for ultrasonic transducer according to claim 5, is characterized in that, also comprises:
High-frequency isolation transformer, its one end is connected with the output terminal of described frequency generator, and the other end is used for being connected with the incoming end of described ultrasonic transducer, for carrying out impedance matching to described ultrasonic transducer.
10. driving power for ultrasonic transducer according to claim 9, is characterized in that, also comprises:
Power amplification circuit, accesses between described high-frequency isolation transformer and described frequency generator, for carrying out power amplification to described drive singal.
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| CN201410376021.3A CN104516290A (en) | 2013-09-30 | 2014-08-01 | Ultrasonic transducer driving power supply |
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| CN201310459751 | 2013-09-30 | ||
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| CN201410376021.3A CN104516290A (en) | 2013-09-30 | 2014-08-01 | Ultrasonic transducer driving power supply |
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Cited By (9)
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| CN105717831A (en) * | 2016-01-25 | 2016-06-29 | 深圳市德知拓电源技术有限公司 | Impedance matching system and method and control system of supersonic power supply |
| CN106357129A (en) * | 2016-09-14 | 2017-01-25 | 湘潭大学 | Signal-source-controllable giant magnetostrictive transducer drive power supply |
| CN108007557A (en) * | 2017-11-22 | 2018-05-08 | 锐泰安医疗科技（苏州）有限公司 | A kind of method and apparatus of lookup resonant frequency point for transducer |
| CN110112952A (en) * | 2019-05-20 | 2019-08-09 | 中北大学 | A kind of high-power dual-frequency ultrasonic wave vibratory impulse power supply with fixed skew |
| CN110531611A (en) * | 2019-05-30 | 2019-12-03 | 哈尔滨工业大学（深圳） | Ultrasonic bond frequency tracking method based on PSO algorithm and PID control |
| CN111112679A (en) * | 2019-12-23 | 2020-05-08 | 北京理工大学 | Ultrasonic vibration drilling control method and device |
| CN111381529A (en) * | 2018-12-29 | 2020-07-07 | 重庆西山科技股份有限公司 | Frequency control circuit, method and device and ultrasonic transducer system |
| CN112138617A (en) * | 2020-09-09 | 2020-12-29 | 西安仙峒科技有限责任公司 | Fast starting operation method for cavitation |
| CN114305600A (en) * | 2022-03-15 | 2022-04-12 | 厚凯(北京)医疗科技有限公司 | Control method and device of ultrasonic surgical instrument, surgical equipment and storage medium |
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| CN105717831A (en) * | 2016-01-25 | 2016-06-29 | 深圳市德知拓电源技术有限公司 | Impedance matching system and method and control system of supersonic power supply |
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| CN110112952A (en) * | 2019-05-20 | 2019-08-09 | 中北大学 | A kind of high-power dual-frequency ultrasonic wave vibratory impulse power supply with fixed skew |
| CN110531611A (en) * | 2019-05-30 | 2019-12-03 | 哈尔滨工业大学（深圳） | Ultrasonic bond frequency tracking method based on PSO algorithm and PID control |
| CN110531611B (en) * | 2019-05-30 | 2022-12-06 | 哈尔滨工业大学（深圳） | Ultrasonic bonding frequency tracking method based on PSO algorithm and PID control |
| CN111112679A (en) * | 2019-12-23 | 2020-05-08 | 北京理工大学 | Ultrasonic vibration drilling control method and device |
| CN112138617A (en) * | 2020-09-09 | 2020-12-29 | 西安仙峒科技有限责任公司 | Fast starting operation method for cavitation |
| CN114305600A (en) * | 2022-03-15 | 2022-04-12 | 厚凯(北京)医疗科技有限公司 | Control method and device of ultrasonic surgical instrument, surgical equipment and storage medium |
| CN114305600B (en) * | 2022-03-15 | 2022-06-03 | 厚凯(北京)医疗科技有限公司 | Control method and device of ultrasonic surgical instrument, surgical equipment and storage medium |
| WO2023174136A1 (en) * | 2022-03-15 | 2023-09-21 | 厚凯(北京)医疗科技有限公司 | Control method and apparatus for ultrasonic surgical instrument, surgical device, and storage medium |
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Application publication date: 20150415 |