CN104516010B - X-ray beam intensity monitoring device and X-ray inspection system - Google Patents
X-ray beam intensity monitoring device and X-ray inspection system Download PDFInfo
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- 238000012806 monitoring device Methods 0.000 title claims abstract description 49
- 238000007689 inspection Methods 0.000 title claims abstract description 32
- 238000011835 investigation Methods 0.000 claims abstract description 56
- 238000012544 monitoring process Methods 0.000 claims abstract description 45
- 238000012545 processing Methods 0.000 claims abstract description 23
- 238000012937 correction Methods 0.000 claims abstract description 14
- 238000004846 x-ray emission Methods 0.000 claims description 27
- 238000001514 detection method Methods 0.000 claims description 23
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 208000033748 Device issues Diseases 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical group O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
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- 239000003795 chemical substances by application Substances 0.000 description 1
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- 238000010894 electron beam technology Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
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Abstract
The invention discloses a kind of X-ray beam intensity monitoring device and X-ray inspection systems.X-ray beam intensity monitoring device includes strength investigation module and data processing module, strength investigation module is used to receive the irradiation of X-ray line and issues detectable signal, data processing module is coupled with strength investigation module to receive detectable signal and export X-ray beam intensity monitoring signal, wherein, X-ray beam intensity monitoring signal includes the dosage monitoring signal of X-ray line and the gamma correction signal of X-ray line.The X-ray beam intensity monitoring device can carry out dosage monitoring and brightness monitoring simultaneously, improve the service efficiency of X-ray beam intensity monitoring device.
Description
Technical field
The present invention relates to X-ray applied technical field, in particular to a kind of X-ray beam intensity monitoring device and X-ray
Inspection system.
Background technique
In X-ray inspection system, X-ray emission device is mainly electron accelerator or X-ray tube.X-ray emission dress
Set the both sides for being placed in tested object with detector array with X-ray examination.Under normal circumstances, the X that X-ray emission device issues
There is direct irradiation in the working beam on detector array in ray line, and has the redundancy beam being irradiated in outside detector array
Stream.
X-ray beam stream is usually fan-like pattern line, and the fan-like pattern line is perpendicular to ground, and work beam in the fan-like pattern line
Flow the width that the width at detector array generally requires substantially identical to detector array.For this purpose, often in X-ray emission
One collimator is set between device and detector array.Collimator is used to mask the redundancy line in X-ray line.Right
When tested object is checked, collimator is between X-ray emission device and tested object.
Generally pass through the monitoring of dosage monitoring or brightness monitoring realization to X-ray beam intensity to X-ray line.Dosage
Monitoring refers to the dose intensity by monitoring X-ray beam, and judges whether to be more than defined dose value, if being more than that will issue agent
Amount monitoring signal is operated with the power supply etc. for being alarmed or being cut off X-ray emission device.Brightness monitoring refers to acquiring each survey
The fluctuating change value of the X-ray beam intensity in the period is measured, the collected value of gamma correction signal correction detector array is issued,
To obtain more accurately being detected the information of object.
The dosage monitoring device and brightness monitoring device of X-ray line are common in X-ray inspection system, under normal circumstances this
Two kinds of devices are all to be present in X-ray inspection system each independently.
Illustrate the prior art for below using use electron accelerator as the X-ray inspection system of X-ray emission device
X-ray inspection system and its X-ray beam intensity monitoring device.
The dosage monitoring device of the prior art includes detecting module, which is typically all to be directly placed at electronics to add
At the X-ray stream outlet of fast device, in the cabinet of electron accelerator, X-ray is directed through the sensitive body of the detecting module
Product, then be irradiated on tested object.
The monitoring method that the brightness monitoring device of the prior art uses is to utilize to be located in X-ray examination detector array
The redundancy detector of the upper edge region of fan-like pattern line carries out luminance signal acquisition and issues gamma correction signal correction detection
The value that device array acquisition arrives.
In the implementation of the present invention, the inventors found that the above prior art has following shortcoming:
In the dosage monitoring device of the prior art, X-ray beam intensity has because that need to penetrate the sensitive volume of detecting module
It is lost, i.e. detection sensitive volume has intervened the X-ray beam intensity and reciprocal power-fed for reaching tested object.And due to electronics
Accelerator is heavy current installation, and the detecting module of dosage monitoring device is light current instrument, and detecting module is very easy to by the former
Electromagnetic interference is generally only capable of providing the average dosage information in a period of time, in such as several seconds.And in X-ray inspection system
To ensure safety, when the dosage of X-ray line is greater than defined threshold value, it is necessary to the power supply of X-ray emission device is cut off as early as possible,
Therefore it is required that dosage monitoring device must be reliable and be measured accurately, and the dosage monitoring device of the above prior art is difficult to meet this
It is required that.
In the brightness monitoring device of the prior art, the redundancy detector of detector array is easy the reflection by tested object
The interference of the factors such as signal and mechanically deform.And in the case where X-ray emission device is electron accelerator, in X-ray beam
(i.e. the direction of electron beam) X-ray beam intensity is big on " main beam " direction of stream, the bigger position X-ray beam with " main beam " angle
Intensity of flow is weaker, and the X-ray beam intensity in region locating for the redundancy detector is generally weaker, finally influences monitoring effect.
Summary of the invention
The purpose of the present invention is to provide a kind of X-ray beam intensity monitoring device and X-ray inspection systems, can be promoted
The service efficiency of X-ray beam intensity monitoring device.
First aspect present invention provides a kind of X-ray beam intensity monitoring device, including at strength investigation module and data
Module is managed, the strength investigation module is used to receive the irradiation of X-ray line and issues detectable signal, the data processing module
It is coupled with the strength investigation module to receive the detectable signal and export X-ray beam intensity monitoring signal, wherein described
X-ray beam intensity monitoring signal includes the dosage monitoring signal of the X-ray line and the gamma correction of the X-ray line
Signal.
Further, the X-ray beam intensity monitoring device includes multiple strength investigation modules, the multiple strong
Degree detecting module is coupled with the same data processing module.
Further, each strength investigation module independently seals.
Further, the data processing module includes integral amplifier and chromacoder, the integral amplifier
Coupled with the strength investigation module to receive the detectable signal and output voltage signal, the chromacoder with it is described
Integral amplifier is coupled to receive the voltage signal and export the dosage monitoring signal and the gamma correction signal.
Further, the chromacoder includes voltage comparator and analog-digital converter, the voltage comparator with
Integral amplifier coupling is to receive the voltage signal and outputs level signals are as the dosage monitoring signal, the mould
Number converter is coupled with the integral amplifier to receive the voltage signal and output digit signals as the gamma correction
Signal.
Further, the strength investigation module is flash detection module or detection of gas module.
Further, the strength investigation module is flash detection module, and the flash detection module includes scintillator, light
Sensing device and shielded layer, one end of the scintillator are coupled with the light-sensitive device, and the shielded layer is set to the photosensor
Part periphery.
Second aspect of the present invention provides a kind of X-ray inspection system, including X-ray emission device, detector array and X are penetrated
Harness intensity of flow monitoring device, wherein the X-ray beam intensity monitoring device is described in any one of first aspect present invention
X-ray beam intensity monitoring device.
Further, the X-ray line that the X-ray emission device issues includes being irradiated on the detector array
Working beam and the redundancy line being irradiated in except the detector array, the X-ray beam intensity monitoring device it is described
Strength investigation module is set to the photograph for receiving the redundancy line between the X-ray emission device and the detector array
It penetrates and issues the detectable signal.
Further, the X-ray inspection system further includes collimator, and the strength investigation module is set to the X and penetrates
Between line emitter and the collimator.
Based on X-ray beam intensity monitoring device provided by the invention and X-ray inspection system, X-ray beam intensity prison
Control device includes strength investigation module and data processing module, and the irradiation that strength investigation module is used to receive X-ray line is concurrent
Detectable signal out, data processing module are coupled with strength investigation module to receive detectable signal and export X-ray beam intensity prison
Control signal, wherein X-ray beam intensity monitoring signal includes the brightness of the dosage monitoring signal and X-ray line of X-ray line
Correction signal, therefore the X-ray beam intensity monitoring device can carry out dosage monitoring and brightness monitoring simultaneously, improve X and penetrate
The service efficiency of harness intensity of flow monitoring device.
By referring to the drawings to the detailed description of exemplary embodiment of the present invention, other feature of the invention and its
Advantage will become apparent.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes part of this application, this hair
Bright illustrative embodiments and their description are used to explain the present invention, and are not constituted improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is the schematic layout pattern of the X-ray inspection system of first embodiment of the invention.
Fig. 2 is the B-B direction schematic cross-sectional view of X-ray inspection system shown in FIG. 1.
Fig. 3 is the knot of the strength investigation module of X-ray beam intensity monitoring device in X-ray inspection system shown in FIG. 1
Structure schematic illustration.
Fig. 4 is the C-C of strength investigation module shown in Fig. 3 to sectional structure schematic illustration.
Fig. 5 is the functional-block diagram of the X-ray beam intensity monitoring device of X-ray inspection system shown in FIG. 1.
Fig. 6 is the strength investigation of X-ray beam intensity monitoring device in the X-ray inspection system of second embodiment of the invention
The principle schematic diagram of the overlook direction of module.
Fig. 7 is that structural principle when observing perpendicular to X-ray fan-like pattern line of strength investigation module shown in fig. 6 is illustrated
Figure.
Into Fig. 7, each appended drawing reference respectively represents Fig. 1:
1, electron accelerator；
2, detector array；
3, collimator；
4, it is detected object；
5, flash detection module；
51, scintillator；
52, light-sensitive device；
53, shielded layer；
6, detection of gas module；
61, electrode plate with high voltage；
62, passive electrode plate；
63, working gas.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Below
Description only actually at least one exemplary embodiment be it is illustrative, never as to the present invention and its application or make
Any restrictions.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative work premise
Under every other embodiment obtained, shall fall within the protection scope of the present invention.
Unless specifically stated otherwise, positioned opposite, the digital table of the component and step that otherwise illustrate in these embodiments
It is not limited the scope of the invention up to formula and numerical value.Simultaneously, it should be appreciated that for ease of description, each portion shown in attached drawing
The size divided not is to draw according to actual proportionate relationship.For technology, side known to person of ordinary skill in the relevant
Method and equipment may be not discussed in detail, but in the appropriate case, and the technology, method and apparatus should be considered as authorizing explanation
A part of book.In shown here and discussion all examples, any occurrence should be construed as merely illustratively, and
Not by way of limitation.Therefore, the other examples of exemplary embodiment can have different values.It should also be noted that similar label
Similar terms are indicated in following attached drawing with letter, therefore, once it is defined in a certain Xiang Yi attached drawing, then subsequent attached
It does not need that it is further discussed in figure.
First embodiment
Fig. 1 to Fig. 5 shows the X-ray inspection system of first embodiment of the invention.
Fig. 1 is the schematic layout pattern of the X-ray inspection system of first embodiment of the invention.Fig. 2 is X-ray shown in FIG. 1
The B-B direction schematic cross-sectional view of inspection system.As depicted in figs. 1 and 2, the X-ray inspection system of first embodiment includes for sending out
Penetrate X-ray emission device, collimator 3, the detector array 2 of X-ray examination and the X-ray beam intensity monitoring dress of X-ray
It sets.
Wherein X-ray beam intensity monitoring device is used to monitor the X-ray beam intensity of X-ray emission device.X-ray beam
Intensity of flow monitoring device includes strength investigation module and data processing module.Data processing module coupled with strength investigation module with
The detectable signal of receiving intensity detecting module sending simultaneously exports X-ray beam intensity monitoring signal.X-ray beam intensity monitoring letter
Number include X-ray line dosage monitoring signal and X-ray line gamma correction signal.X-ray beam intensity monitoring dress
Dosage monitoring and brightness monitoring can be carried out simultaneously by setting, and improve the service efficiency of X-ray beam intensity monitoring device.
The X-ray line that X-ray emission device issues includes the working beam being irradiated on detector array 2 and is irradiated in
Redundancy line except detector array 2.The strength investigation module of X-ray beam intensity monitoring device is preferably provided at transmitting
To receive the irradiation of redundancy line and issue detectable signal between device and detector array 2.The intensity of the X-ray inspection system
What detecting module utilized is the redundancy line of X-ray line, and strength investigation module is not substantially by X-ray emission device and checking matter
The influence of body 4, so as to keep the monitored results of X-ray beam intensity more accurate and reliable.In addition, due to strength investigation module pair
Working beam does not influence, therefore does not interfere with the intensity of the working beam up to tested object 4 and detector array 2.
In first embodiment, X-ray emission device is electron accelerator 1.In other unshowned embodiments, Ke Yiwei
Other X-ray emission devices such as X-ray tube.
Collimator 3 is between X-ray emission device and detector array 2.Collimator 3 is for masking redundancy line.
When checking tested object 4, collimator 3 is between X-ray emission device and tested object 4, the work of X-ray line
Make line and is irradiated to tested object 4 and detector array 2 after collimator 3.
When X-ray inspection system has collimator 3, strength investigation module be located at X-ray emission device and collimator 3 it
Between.While the direct electromagnetic interference for being avoided electron accelerator 1 is arranged in this, X will not be influenced because of the setting of collimator 3 and penetrated
Harness intensity of flow monitored results.
Preferably, X-ray beam intensity monitoring device includes the multiple strength investigations being arranged symmetrically relative to working beam
Module.The X-ray line that multiple strength investigation modules can emit in X-ray emission device is arranged symmetrically relative to working beam
When beat occurs, the detectable signal for issuing each strength investigation module compensates each other, so as to make X-ray beam intensity
Monitored results are more accurate more reliable than single strength investigation module is only arranged.Two intensity are specifically provided in first embodiment
Detecting module.In other unshowned embodiments, more strength investigation modules, such as four can be set.
In first embodiment, working beam is fan-like pattern line, and strength investigation module is located at the covering of the fan side of fan-like pattern line
Side.The setting is in strength investigation module at " main beam " of X-ray line, closer to the center of X-ray line, thus
X-ray beam intensity information can be more effectively provided.
As depicted in figs. 1 and 2, for the covering of the fan of fan-like pattern line perpendicular to ground, 1 side of electron accelerator is front side,
2 side of detector array be rear side, fan-like pattern line covering of the fan each side arrange a strength investigation module (under
Claim left detecting module and right detecting module).Wherein left detecting module and right detecting module are placed in electron accelerator 1 and collimator
Between 3, by obtained detectable signal be transferred to data processing module merge processing and convert after, generate X-ray line it is strong
Spend monitoring signal.
Left detecting module and right detecting module are symmetrically arranged in the covering of the fan two sides of fan-like pattern line and are located at redundancy
The position that line can shine directly into, to carry out intensity monitoring to X-ray beam stream using redundancy line.Left detecting module and right spy
Module certain gap spaced intermediate is surveyed, the width in gap guarantees that working beam can insusceptibly be irradiated to detector array 2
Width requirement within the scope of.
Left detecting module and right detecting module are two symmetrical geometries, the identical detector of structure.Perpendicular to X
On the direction of the covering of the fan of ray line, have enough sensitive sizes meet in the case where fan-like pattern line deflects according to
So without departing from the cover width of the two detector sensitive volumes.Strength investigation module can be there are many implementation.Fig. 3 is figure
The principle schematic diagram of the strength investigation module of X-ray beam intensity monitoring device shown in 1.Fig. 4 is intensity shown in Fig. 3
The C-C of detecting module is to sectional structure schematic illustration.Fig. 3 and Fig. 4 is with one in left detecting module and right detecting module
Example illustrates the working principle of the strength investigation module of first embodiment.In Fig. 4, L represents the incident direction of X-ray line.
As shown in Figure 3 and Figure 4, left detecting module and right detecting module are flash detection module 5 in first embodiment.Flashing
Detecting module 5 includes scintillator 51, light-sensitive device 52, shielded layer 53 and reflecting layer (not shown).Wherein one end of scintillator 51
It is coupled with light-sensitive device 52 and between light-sensitive device 52 and working beam.The periphery of light-sensitive device 52 is arranged in shielded layer 53
For shielding damage of the X-ray of scattering to light-sensitive device 52.Shielded layer 53 is preferably made of heavy metal.Scintillator 51 exists
Reflecting layer is enclosed on the non-coupled face not coupled with light-sensitive device 52.The material in reflecting layer can be titanium dioxide.In addition, each
Flash detection module 5 has a respective light sealing structure, and scintillator 51 and the setting of light-sensitive device 52 are tied in corresponding sealing
Inside structure, it is ensured that sealing structure not light leakage.
The scintillator 51 (i.e. sensitive volume) of flash detection module 5 is preferably made of scintillation crystal.Scintillator 51 arrives
Length between light-sensitive device 52 preferably ensures that the beat of fan-like pattern line will not reach the position of light-sensitive device 52.Scintillator 51
It is preferably vertical with the incident direction L of X-ray line.
Flash detection module 5 is when detecting X-ray beam intensity, in x-ray bombardment to scintillation crystal, issues scintillation light,
Light-sensitive device 52 absorbs scintillation light and generates electric signal, and the electric signal that light-sensitive device 52 exports is input to data processing module and carries out down
The processing of one step.
Have the advantages that sensitive Media density is greatly and with higher sensitivity using flash detection module 5.
Fig. 5 is the functional-block diagram of the X-ray beam intensity monitoring device of X-ray inspection system shown in FIG. 1.Such as Fig. 5
Shown, data processing module is coupled with each strength investigation module, and the detectable signal of each strength investigation module output is transferred to together
Data processing module, data processing module receive detectable signal after the detectable signal of each strength investigation module in the data processing
It merges, handle in module and export X-ray beam intensity monitoring signal.
As shown in figure 5, data processing module includes integral amplifier and chromacoder.Wherein integral amplifier and each
The coupling of strength investigation module is to receive the detectable signal and output voltage signal that each strength investigation module issues.The voltage signal
Amplitude size is proportional to X-ray beam intensity.Chromacoder is coupled with integral amplifier to receive the electricity of integral amplifier
Pressure signal simultaneously exports X-ray beam intensity monitoring signal.
As shown in figure 5, chromacoder specifically includes voltage comparator and analog-digital converter in first embodiment.
Voltage comparator and analog-digital converter carry out conversion independent of each other.
Voltage comparator is coupled with integral amplifier to receive the voltage signal of integral amplifier and outputs level signals work
For the dosage monitoring signal of X-ray line.The reference voltage of the voltage comparator is determined according to the x-ray dose intensity of regulation.
Whether dosage monitoring signal control X-ray emission device should be unplugged or alarm.
Analog-digital converter is coupled with integral amplifier to receive the voltage signal of integral amplifier and output digit signals work
For the gamma correction signal of X-ray line.
The X-ray beam intensity monitoring device of the X-ray inspection system of first embodiment can carry out dosage monitoring simultaneously
It is monitored with brightness, improves the service efficiency of X-ray beam intensity monitoring device.And dosage monitoring no longer influences working beam
Intensity, and avoid the electromagnetic interference of electron accelerator 1.What brightness monitoring was no longer deformed by tested object 4 and system mechanics
It influences.
Second embodiment
Second embodiment different from the first embodiment, in a second embodiment with detection of gas module 6 replace first
The flash detection module 5 of embodiment is used as strength investigation module.Wherein, left detecting module and right detecting module respectively use a structure
Identical detection of gas module 6 detects the intensity of X-ray line.
Fig. 6 is the strength investigation of X-ray beam intensity monitoring device in the X-ray inspection system of second embodiment of the invention
The principle schematic diagram of the overlook direction of module.Fig. 7 is strength investigation module shown in fig. 6 perpendicular to X-ray fan-like pattern
Principle schematic diagram when line.Fig. 6 and Fig. 7 illustrates that second is real for one in left detecting module and right detecting module
Apply the working principle of the strength investigation module of example.In Fig. 6 and Fig. 7, L represents the incident direction of X-ray line.
Referring to Fig. 6 and Fig. 7, detection of gas module 6 includes gas ionization chamber.Gas ionization chamber includes two electrode plates, point
It Wei not electrode plate with high voltage 61 and passive electrode plate 62.Two electrode plates are each perpendicular to the incident direction L of X-ray line.High-voltage electricity
The external high-voltage electricity of pole plate 61, and the irradiation of redundancy line is received, passive electrode plate 62 is coupled with data processing module.High-field electrode
It is working gas 63 between plate 61 and passive electrode plate 62.Electrode plate with high voltage 61 and passive electrode plate 62 and working gas 63 need
It is mounted in a sealing structure.
The advantages of being used as strength investigation module using detection of gas module 6 is no irradiation damage, increases detection area very
It is easy, cost is relatively low.
Other undeclared places, can refer to the related content of first embodiment, details are not described herein in second embodiment.
Finally it should be noted that: the above embodiments are merely illustrative of the technical scheme of the present invention and are not intended to be limiting thereof；To the greatest extent
The present invention is described in detail with reference to preferred embodiments for pipe, it should be understood by those ordinary skilled in the art that: still
It can modify to a specific embodiment of the invention or some technical features can be equivalently replaced；Without departing from this hair
The spirit of bright technical solution should all cover within the scope of the technical scheme claimed by the invention.
Claims (8)
1. a kind of X-ray beam intensity monitoring device, which is characterized in that including strength investigation module and data processing module, institute
Strength investigation module is stated for receiving the irradiation of X-ray line and issuing detectable signal, the data processing module and described strong
Detecting module coupling is spent to receive the detectable signal and export X-ray beam intensity monitoring signal, wherein the X-ray beam
Intensity of flow monitoring signal includes the dosage monitoring signal of the X-ray line and the gamma correction signal of the X-ray line；Institute
Stating data processing module includes integral amplifier and chromacoder, the integral amplifier and the strength investigation module coupling
It closes to receive the detectable signal and output voltage signal, the chromacoder is coupled with the integral amplifier to receive
The voltage signal simultaneously exports the dosage monitoring signal and the gamma correction signal；The chromacoder includes voltage
Comparator and analog-digital converter, the voltage comparator are coupled with the integral amplifier to receive the voltage signal and export
As the dosage monitoring signal, the analog-digital converter is coupled with the integral amplifier to receive the voltage level signal
Signal and output digit signals are as the gamma correction signal；The voltage comparator and the analog-digital converter carry out each other
Independent conversion.
2. X-ray beam intensity monitoring device according to claim 1, which is characterized in that the X-ray beam intensity prison
Control device includes multiple strength investigation modules, the multiple strength investigation module and the same data processing module coupling
It closes.
3. X-ray beam intensity monitoring device according to claim 2, which is characterized in that each strength investigation module
Independently seal.
4. X-ray beam intensity monitoring device according to any one of claim 1 to 3, which is characterized in that the intensity
Detecting module is flash detection module (5) or detection of gas module (6).
5. X-ray beam intensity monitoring device according to claim 4, which is characterized in that the strength investigation module is
Flash detection module (5), the flash detection module (5) include scintillator (51), light-sensitive device (52) and shielded layer (53), institute
The one end for stating scintillator (51) is coupled with the light-sensitive device (52), and the shielded layer (53) is set to the light-sensitive device (52)
Periphery.
6. a kind of X-ray inspection system, including X-ray emission device, detector array (2) and X-ray beam intensity monitoring dress
It sets, wherein the X-ray beam intensity monitoring device is that the X-ray line according to any one of claims 1 to 5 is strong
Spend monitoring device.
7. X-ray inspection system according to claim 6, which is characterized in that the X that the X-ray emission device issues is penetrated
Harness stream includes the working beam being irradiated on the detector array (2) and is irradiated in except the detector array (2)
Redundancy line, the strength investigation module of the X-ray beam intensity monitoring device be set to the X-ray emission device and
To receive the irradiation of the redundancy line and issue the detectable signal between the detector array (2).
8. X-ray inspection system according to claim 7, which is characterized in that the X-ray inspection system further includes collimation
Device (3), the strength investigation module are set between the X-ray emission device and the collimator (3).
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410851366.XA CN104516010B (en) | 2014-12-31 | 2014-12-31 | X-ray beam intensity monitoring device and X-ray inspection system |
| RU2015156055A RU2695099C2 (en) | 2014-12-31 | 2015-12-25 | X-ray beam intensity monitoring device and x-ray radiation monitoring system |
| US14/981,953 US10466372B2 (en) | 2014-12-31 | 2015-12-29 | X-ray beam intensity monitoring device and X-ray inspection |
| BR102015032988-1A BR102015032988B1 (en) | 2014-12-31 | 2015-12-30 | device for monitoring x-ray beam intensity, and x-ray inspection system |
| PL15203078T PL3040744T3 (en) | 2014-12-31 | 2015-12-30 | X-ray beam intensity monitoring device and x-ray inspection system |
| EP15203078.9A EP3040744B1 (en) | 2014-12-31 | 2015-12-30 | X-ray beam intensity monitoring device and x-ray inspection system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410851366.XA CN104516010B (en) | 2014-12-31 | 2014-12-31 | X-ray beam intensity monitoring device and X-ray inspection system |
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| CN104516010A CN104516010A (en) | 2015-04-15 |
| CN104516010B true CN104516010B (en) | 2018-12-11 |
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| RU2695099C2 (en) | 2014-12-31 | 2019-07-19 | Тсинхуа Юниверсити | X-ray beam intensity monitoring device and x-ray radiation monitoring system |
| CN104515781B (en) * | 2014-12-31 | 2018-01-23 | 清华大学 | X-ray inspection system |
| CN113101544B (en) * | 2021-04-02 | 2022-11-01 | 中国科学院近代物理研究所 | Beam halo detector interlocking application system and method for heavy ion treatment device |
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| CN204439843U (en) * | 2014-12-31 | 2015-07-01 | 清华大学 | X-ray beam intensity of flow supervising device and X-ray inspection system |
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| NL7416756A (en) * | 1974-12-23 | 1976-06-25 | Philips Nv | SCANNING X-RAY EXAMINATION DEVICE. |
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| JP4127840B2 (en) * | 2005-11-30 | 2008-07-30 | 独立行政法人放射線医学総合研究所 | Radiation measurement apparatus and data processing method |
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| CN204439577U (en) * | 2014-12-31 | 2015-07-01 | 清华大学 | X-ray inspection system |
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