CN104487770A - Radiant burner - Google Patents
Radiant burner Download PDFInfo
- Publication number
- CN104487770A CN104487770A CN201380039730.6A CN201380039730A CN104487770A CN 104487770 A CN104487770 A CN 104487770A CN 201380039730 A CN201380039730 A CN 201380039730A CN 104487770 A CN104487770 A CN 104487770A
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- China
- Prior art keywords
- liner
- combustion chamber
- nozzle
- perforation
- fletcher radial
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/12—Radiant burners
- F23D14/14—Radiant burners using screens or perforated plates
- F23D14/147—Radiant burners using screens or perforated plates with perforated plates as radiation intensifying means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/12—Radiant burners
- F23D14/14—Radiant burners using screens or perforated plates
- F23D14/145—Radiant burners using screens or perforated plates combustion being stabilised at a screen or a perforated plate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/12—Radiant burners
- F23D14/16—Radiant burners using permeable blocks
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Incineration Of Waste (AREA)
- Gas Burners (AREA)
Abstract
A radiant burner (8) and method are disclosed. The radiant burner (8) is for treating an effluent gas stream from a manufacturing process tool and comprises: a combustion chamber (14) having a porous sleeve (20) through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve (20): at least one effluent nozzle (12) for ejecting the effluent gas stream into the combustion chamber (14): and a perforated liner (42) proximate to the combustion surface. Providing a perforated liner (42) controls the combustion materials passing into the combustion chamber to treat the effluent gas stream and also provides a surface onto which residual combustion deposits may be received Accordingly, the liner (42) can both improve the efficiency of the treatment of the effluent gas stream and can act as a sacrificial surface which may be replaced or cleaned either in accordance with a maintenance regime or when the performance of the radiant burner reduces Such replacement or cleaning of the liner saves having to replace the porous sleeve or other components of the combustion chamber which cannot readily be removed or cleaned. This enables the radiant burner to operate at higher flow rates and avoids needing to increase the size of the radiant burner or needing to add further radiant burners.
Description
Technical field
The present invention relates to fletcher radial burner and method.
Background technology
Fletcher radial burner is known and is generally used for processing the effluent stream from manufacture process instrument used in such as semiconductor or flat-panel monitor process industry.During this manufacture, the compound (PFC) of residual PFC and other compound are present in from the effluent stream of process tool pumping.It is undesirable that PFC is difficult to remove from eluting gas and they be discharged in environment, since it is known they have relatively high greenhouse activity.
Known fletcher radial burner uses burning to remove PFC and other compound from effluent stream.Usually, effluent stream is the nitrogen stream comprising PFC and other compound.Fuel gas and effluent stream mix mutually and mixture of gas streams is transported in combustion chamber, combustion chamber side direction by the discharge of narrow meshed (foraminous) gas burner surface surround.Fuel gas and air are fed to narrow meshed burner with impact at the non-flaming combustion of discharging surface simultaneously, the air capacity transmitted by narrow meshed burner is not only enough to consume the fuel gas being fed to burner, and consumes all combustibles/combustibles (combustibles) in being ejected in combustion chamber mixture of gas streams.
Along with the surface area of produced semiconductor increases, the flow rate of eluting gas also increases.
Although there is technology for disposing effluent stream, they have their defect separately.Therefore, the technology that a kind of improvement for disposing effluent stream is provided is needed.
Summary of the invention
According to first aspect, a kind of fletcher radial burner for processing the effluent stream from manufacture process instrument is provided, this fletcher radial burner comprises: combustion chamber, and it has porous sleeve, and incendiary material is burnt for the burning surface pressing close to porous sleeve by porous sleeve; At least one mass flowing nozzle, it is for being ejected in combustion chamber by effluent stream; And perforation liner, it is close to burning surface.
First aspect recognizes that the problem of the flow rate of increase is to need to dispose more substantial eluting gas.A kind of scheme will be the size increasing fletcher radial burner.But first aspect recognizes that combustion mechanism that the problem of this scheme is in fletcher radial burner is complicated and the size only increasing fletcher radial burner may cause the performance of the fletcher radial burner decreased with the flow rate increased to some extent of mating eluting gas.And namely enablely produce the more large radiation formula burner with enough performances, integrating this is not intuitively at the on-the-spot place of manufacture compared with large radiation formula burner and existing treatment instrument.Another program will add other fletcher radial burner to increase disposal capacity.But first aspect also recognizes that the problem of this scheme is that these other fletcher radial burners and existing treatment instrument being integrated at the on-the-spot place of manufacture is not intuitively.Although first aspect also recognizes the flow rate increasing eluting gas by fletcher radial burner, this can cause the residue of combustion increased to some extent on fletcher radial burner that caused by non-PFC compound or deposit, and this weakened its performance in the past significantly along with the time.
Therefore, a kind of gas abatement equipment or fletcher radial burner is provided.Fletcher radial burner can process the effluent stream from manufacture process instrument.Fletcher radial burner can comprise combustion chamber.Combustion chamber can have porous or permeable sleeve, and incendiary material is by porous or permeable sleeve.Incendiary material can be pressed close to, the burning surface burning of close or contiguous porous sleeve.Can arrange one or more mass flowing nozzle, effluent stream is ejected in combustion chamber by it.Perforation, porous or punching liner can be pressed close to, near or be adjacent to burning surface and arrange.There is provided perforation liner to control to be delivered to incendiary material in combustion chamber process effluent stream and also to provide one surperficial, afterflaming deposit can be received in this on the surface.Therefore, liner can improve the treatment effeciency of effluent stream and can serve as sacrificial surface, or can replace when fletcher radial burner performance reduces or clean sacrificial surface according to maintenance system.This replacement of liner or clean must replacement can not be easy to remove or the porous sleeve of clean combustion chamber or other parts.This can make fletcher radial burner with the operation of higher flow rate and avoid increasing the needs of fletcher radial burner size or adding the needs of other fletcher radial burner.
In one embodiment, liner of boring a hole is contained in combustion chamber.Therefore, liner can be positioned at combustion chamber itself to receive residue of combustion and to protect other parts of combustion chamber.
In one embodiment, incendiary material burns to produce combustion product and liner of boring a hole is adjacent to combustion zone locates in the combustion zone that the burning surface with porous sleeve is pressed close to.
Therefore, liner can be adjacent to, near or be close to combustion zone and locate, in combustion zone, generate combustion product.The exact position of liner may be different according to the feature of combustion zone.In an embodiment, combustion product comprises such as oxygen.
In one embodiment, liner of boring a hole extends along the axial length of combustion chamber at least in part.Therefore, liner can extend along all or part of axial length of combustion chamber.
In one embodiment, liner of boring a hole is installed with multiple hole.There is provided hole or aperture that combustion product can be allowed to be delivered to from combustion zone in combustion chamber with mixing and process effluent stream.By recognize the accurate placement in hole or aperture by impact or control combustion product to the flowing in combustion chamber.
In one embodiment, liner of boring a hole comprises expandable network structure.There is provided expandable structure to provide two kinds of perforation and flexure occurs so that can deposit be removed for liner can be allowed the while of making product be delivered in combustion chamber from combustion zone.
In one embodiment, fletcher radial burner comprises: actuator, and it can operate that expandable network structure is immobilizated in the holding position in combustion chamber and make expandable at least one end cancellated be displaced to expanding position.This can allow this structure remain on position desired in combustion chamber and make this structure expansion deposit caused on this structure be removed simultaneously.
In one embodiment, expandable network structure has the first axial length and has the second axial length when in the expanded position when being in holding position, wherein the second axial length is greater than the first axial length.Therefore, the simple longitudinal extension part of this structure causes the flexure of perforation and makes deposit off normal (dislodge).
In one embodiment, the axial length that expandable network structure has when being in holding position mates with the axial length of combustion chamber and larger than combustion chamber of its axial length when in the expanded position.To recognize that many embodiments comprise the cascade structure of contiguous combustion chamber outlet, this structure can extend in the outlet of combustion chamber.
In one embodiment, expandable network structure comprises helical spring, and helical spring has and is arranged in order to make the isolated distance piece of adjacent turn when being in holding position.To recognize that other structure is also possible, such as honeycomb is arranged or knit sock, but provides helical spring to arrange to be particularly useful for and to provide self-supporting structure, and self-supporting structure maintains its external dimensions during axial expansion.
In one embodiment, helical spring is formed by one of cylindrical base and planar substrates.
In one embodiment, distance piece comprise following at least one: the protuberance being suitable for helical spring surface; Surround the annular ring on helical spring surface, lasso and winding around/spiral; And pleating helical spring, it has adjacent circle, between helical spring adjacent turn, leave gap.When spring is in holding position, the spacing between adjacent turn that these distance pieces control spring is set.
In one embodiment, the size of helical spring and distance piece and position are selected as the selected aperture density providing perforation liner.When spring is in holding position, by controlling helical spring and size that is distance piece, and by controlling the position of the distance piece on helical spring, the size of hole or perforation can be controlled.
In one embodiment, the hole density axially length variations of perforation liner.Therefore, the density of the per surface area of perforation, concentration degree or amount, or the vent surface of liner is amassed and non-vent surface amass between ratio may change along the axial length of liner.The size in hole or aperture and this of density change the flow rate, concentration or the amount that help the combustion product changed in the different piece of combustion chamber within the liner.Change the flow rate of the combustion product in combustion chamber, concentration or amount to help by providing the combustion product of right amount in proper position to improve the efficiency flowing out processing procedure.
In one embodiment, combustion chamber has the nozzle end that is close at least one mass flowing nozzle and in the discharge end axially away from least one mass flowing nozzle, the hole density of perforation liner reduces towards discharge end.Therefore, the density in aperture within the liner or concentration degree/enrichment (concentration) can reduce along the axial length of liner.This that is, the vent surface accumulated amount of liner is higher towards mass flowing nozzle brake specific exhaust emission end.This help increase eluting gas enters the combustion product amount near the position of combustion chamber, and reduces the amount of the combustion product near the discharge end of amount reduction place of untreated eluting gas.
In one embodiment, combustion chamber has in the discharge region being axially close to discharge end extension, and the hole density of perforation liner increases towards discharge region.Therefore, the vent surface that the region of the liner near discharge end can have increase or high concentration degree is amassed to be increased in the concentration of the combustion product near the minimum discharge end of eluting gas treatment effeciency.
In one embodiment, combustion chamber has in the nozzle region being axially close to nozzle end extension, and the hole density of perforation liner reduces towards nozzle region.Therefore, vent surface that is that the interior lining region near nozzle end can have a reduction or low concentration amass in case reduce residue of combustion or deposit cause particular characteristic degradation place or at these residues clean or deposit compared with the combustion product concentration in the region of difficulty.
In one embodiment, liner is bored a hole to be close to nozzle region place puncherless.
In one embodiment, fletcher radial burner comprises multiple nozzle of locating in circumference around combustion chamber and the hole density of liner of boring a hole is close to multiple nozzle increases in circumference.Therefore, the amount that the vent surface of liner is amassed can increase to send more combustion products near the effluent stream sprayed from nozzle near nozzle.This assists in ensuring that combustion product needs most in the region reacted with effluent stream at them and concentrates.
In one embodiment, fletcher radial burner comprises: at least one spreader nozzle on clear area cleaning fluid being ejected into perforation liner, and the hole density of perforation liner reduces towards clear area.Therefore, cleaning fluid can be lining with from nozzles spray to interior.The hole density of impacting at cleaning fluid in the region of liner may reduce or not provide hole even completely to prevent cleaning fluid from passing liner and to contact the porous sleeve of described fletcher radial burner or other can vitiable parts.
In one embodiment, liner of boring a hole comprises the one in net, wire mesh screens, perforated sheet and louvered thin slice.
In one embodiment, the louver board of louvered thin slice is oriented in order to be directed in combustion chamber by combustion product.To recognize that louver board is provided for the movement-oriented Liang Zhong mechanism also providing the effective barrier preventing cleaning fluid by liner to the regulation region in combustion chamber of combustion product simultaneously.
In one embodiment, the louver board of louvered thin slice is oriented at cleaning fluid first type surface received from least one spreader nozzle.Therefore, will recognize that use louver board can allow perforation to be arranged in clear area.To recognize that louver board is normally longer, thinner, plane institution movement; First type surface will be one of louvered comparatively large (usually ' on ' or ' under ') surface, instead of will be actually the little surface at its edge.
In one embodiment, perforation liner can axially displaced between accommodated position and non-accommodated position, and at accommodated position, perforation liner is contained in combustion chamber, and at non-accommodated position, perforation liner is from combustion chamber projection.Therefore, liner can at combustion chamber indoor moving with from combustion chamber projection so that clean.By recognize can provide this displacement using as provide spreader nozzle supplement or substitute.
In one embodiment, liner of boring a hole extends completely from the combustion chamber being in non-accommodated position.Remove liner completely from combustion chamber and contribute to its clean or replacement auxiliary further.
In one embodiment, fletcher radial burner comprises for keeping the cleaning slot of cleaning fluid and wherein at non-accommodated position, and perforation liner extends in cleaning slot.Liner is immersed in cleaning slot and helps to remove residue of combustion and clean described liner.
In one embodiment, fletcher radial burner comprises the device for stirring the perforation liner in described cleaning slot.To recognize that stirring also helps clean liner.
In one embodiment, perforation liner comprises the aperture for receiving in mass flowing nozzle the nozzle that is associated, and the displacement of perforation liner causes aperture to off normal to make any outflow process deposit be positioned on its outer surface relative to the movement of the nozzle that is associated in mass flowing nozzle.Therefore, the effect that liner is shifted may be convenient to remove and may deposit to combustion deposit on nozzle or residue, and these combustion deposits or residue may reduce the performance of these nozzles originally sooner or later.
In one embodiment, liner of boring a hole is metal.With when attempting porous sleeve or other parts of clean burning chamber, contingent machinery is compared with thermal shock stress, the machinery providing metal inner lining can allow to apply when performing clean to increase to some extent and thermal shock stress.
In one embodiment, liner of boring a hole comprises nickel.
In one embodiment, combustion zone and perforation liner are cylindrical.
According to second aspect, provide a kind of method for the treatment of the effluent stream from manufacture process instrument, the method comprises the following steps: incendiary material is burnt for the burning surface being close to porous sleeve by the porous sleeve of combustion chamber; Effluent stream is made to be ejected in combustion chamber from least one mass flowing nozzle; And perforation liner is provided, it is close to burning surface.
In one embodiment, liner of boring a hole is contained in combustion chamber.
In one embodiment, incendiary material burns to produce combustion product and liner of boring a hole is adjacent to combustion zone and locates in the combustion zone that the burning surface with porous sleeve is pressed close to.
In one embodiment, liner of boring a hole extends along the axial length of combustion chamber at least in part.
In one embodiment, liner of boring a hole is installed with multiple hole.
In one embodiment, liner of boring a hole comprises expandable network structure.
In one embodiment, the method comprises: expandable network structure is immobilizated in the holding position in combustion chamber and makes expandable at least one end cancellated be displaced to expanding position.
In one embodiment, expandable network structure has the first axial length and has the second axial length when in the expanded position when being in holding position, wherein the second axial length is greater than the first axial length.
In one embodiment, the axial length that expandable network structure has when being in holding position mates with the axial length of combustion chamber and larger than combustion chamber of its axial length when in the expanded position.
In one embodiment, expandable network structure comprises helical spring, and helical spring has and is arranged to make the isolated distance piece of adjacent turn when being in holding position.
In one embodiment, helical spring is formed by one of cylindrical base and planar substrates.
In one embodiment, distance piece comprise following at least one: the protuberance starting from helical spring surface; Surround the annular ring on helical spring surface, lasso and winding around/spiral; And pleating helical spring, it has adjacent circle, between helical spring adjacent turn, leave gap.
In one embodiment, the method comprises: select the size of helical spring and distance piece and position to provide the selected aperture density of perforation liner.
In one embodiment, the hole density axially length variations of perforation liner.
In one embodiment, combustion chamber has the nozzle end that is close at least one mass flowing nozzle and in the discharge end axially away from least one mass flowing nozzle, the hole density of perforation liner reduces towards discharge end.
In one embodiment, combustion chamber has in the discharge region being axially close to discharge end extension, and the hole density of perforation liner increases towards discharge region.
In one embodiment, combustion chamber has in the nozzle region being axially close to nozzle end extension, and the hole density of perforation liner reduces towards nozzle region.
In one embodiment, liner is bored a hole to be close to nozzle region place puncherless.
In one embodiment, injecting step comprises: to spray and the hole density of its middle punch liner is close to multiple nozzle increases in circumference from around combustion chamber at the multiple nozzles that circumference is located.
In one embodiment, the method comprises the following steps: the cleaning fluid from least one spreader nozzle is ejected into perforation liner clear area on and the hole density of its middle punch liner reduce towards clear area.
In one embodiment, liner of boring a hole comprises the one in net, wire mesh screens, perforated sheet and louvered thin slice.
In one embodiment, the louver board of louvered thin slice is oriented and is directed in combustion chamber by combustion product.
In one embodiment, the louver board of louvered thin slice is oriented at cleaning fluid first type surface received from least one spreader nozzle.
In one embodiment, the method comprises the following steps: make perforation liner axially displaced between accommodated position and non-accommodated position, and at accommodated position, perforation liner is contained in combustion chamber, and at non-accommodated position, perforation liner is from combustion chamber projection.
In one embodiment, liner of boring a hole extends completely from the combustion chamber being in non-accommodated position.
In one embodiment, axially extend step to comprise in the cleaning slot that perforation liner extended to keep cleaning fluid.
In one embodiment, the method comprises the following steps: stir the perforation liner in cleaning slot.
In one embodiment, liner of boring a hole comprises for receiving in mass flowing nozzle the aperture of the nozzle that is associated and the method comprises the step that makes perforation liner be shifted makes any outflow process deposit be positioned on its outer surface off normal to cause aperture relative to the nozzle be associated in mass flowing nozzle and move.
In one embodiment, liner of boring a hole is metal.
In one embodiment, liner of boring a hole comprises nickel.
In one embodiment, combustion chamber and perforation liner are cylindrical.
According to the third aspect, a kind of perforation liner of the fletcher radial burner for the treatment of the effluent stream from manufacture process instrument is provided, fletcher radial burner comprises: combustion chamber, and it has porous sleeve, and incendiary material is burnt for the burning surface pressing close to porous sleeve by porous sleeve; At least one mass flowing nozzle, it is for being ejected in combustion chamber by effluent stream, and the shape of perforation liner and configuration are suitable for being close to burning surface and place.
In one embodiment, the shape of liner of boring a hole and configuration are adapted to be received in combustion chamber.
In one embodiment, incendiary material burns to produce combustion product and the shape of liner of boring a hole and configuration are suitable for being adjacent to combustion zone and locate in the combustion zone that the burning surface with porous sleeve is pressed close to.
In one embodiment, the size of perforation liner is set as extending along the axial length of combustion chamber at least in part.
In one embodiment, liner of boring a hole is installed with multiple hole.
In one embodiment, liner of boring a hole comprises expandable network structure.
In one embodiment, expandable network structure has the first axial length and has the second axial length when in the expanded position when being in holding position, wherein the second axial length is greater than the first axial length.
In one embodiment, the axial length that expandable network structure has when being in holding position mates with the axial length of combustion chamber length and larger than combustion chamber of its axial length when in the expanded position.
In one embodiment, expandable network structure comprises helical spring, and helical spring has and is arranged to make the isolated distance piece of adjacent turn when being in holding position.
In one embodiment, helical spring is formed by one of cylindrical base and planar substrates.
In one embodiment, distance piece comprise following at least one: the protuberance starting from helical spring surface; Surround the annular ring on helical spring surface, lasso and winding around/spiral; And pleating helical spring, it has adjacent circle, between helical spring adjacent turn, leave gap.
In one embodiment, select the size of helical spring and distance piece and position to provide the selected aperture density of perforation liner.
In one embodiment, hole density axially length variations.
In one embodiment, hole density reduces towards discharge end.
In one embodiment, hole density increases towards discharge end.
In one embodiment, the hole density of perforation liner reduces towards nozzle region.
In one embodiment, liner is bored a hole to be close to nozzle region place puncherless.
In one embodiment, the hole density of perforation liner is close to multiple mentioned nozzle area in circumference and increases.
In one embodiment, the hole density of perforation liner reduces towards clear area.
In one embodiment, liner of boring a hole comprises the one in net, wire mesh screens, perforated sheet and louvered thin slice.
In one embodiment, louver board is oriented and is directed in combustion chamber by combustion product.
In one embodiment, louver board is oriented at cleaning fluid first type surface received from least one spreader nozzle.
In one embodiment, liner comprises the aperture for receiving associated streams delivery nozzle.
In one embodiment, liner of boring a hole is metal.
In one embodiment, liner of boring a hole comprises nickel.
In one embodiment, liner of boring a hole is cylindrical.
According to fourth aspect, a kind of fletcher radial burner for the treatment of the effluent stream from manufacture process instrument perforation liner is provided, fletcher radial burner comprises: combustion chamber, and it has porous sleeve, and incendiary material is burnt for the burning surface being close to porous sleeve by porous sleeve; At least one mass flowing nozzle, it is for being ejected in combustion chamber by effluent stream, and shape and the configuration of perforation liner are suitable for being close to burning surface and placing.
In addition and preferably aspect state in appended independent sum dependent claims.The feature of dependent claims suitably can combine with the feature of independent claims, and combined with those features of clearly not stating in claim.
When apparatus characteristic is described to can operate to provide a kind of function, will recognize that this comprises the apparatus characteristic providing this function or be suitable for or be configured to provide this function.
Accompanying drawing explanation
Now further describe embodiments of the invention referring to accompanying drawing, in the accompanying drawings:
Fig. 1 shows the fletcher radial burner according to an embodiment;
Fig. 2 is the zoomed-in view at interface between the liner shown in Fig. 1 and nozzle;
Fig. 3 to Fig. 5 shows the region of the different density of such perforation according to embodiment;
Fig. 6 and Fig. 7 shows the displacement of the liner according to an embodiment;
Fig. 8 and Fig. 9 shows the fletcher radial burner according to an embodiment;
Figure 10 A to Figure 10 C shows according to the present invention, is coiled into the structure providing helical spring circle;
Figure 11 shows the side view of a part for the helical spring circle according to an embodiment; And
Figure 12 shows according to an embodiment, is coiled into the structure providing helical spring circle.
Detailed description of the invention
general introduction
Before any discussing in detail is carried out to embodiment, first general introduction will be provided.Like that as mentioned above, the condition in the combustion chamber of fletcher radial burner can make because eluting gas is to the flow rate variation in combustion chamber, and residue of combustion is deposited on the surface in combustion chamber.These residues are usually by preventing incendiary material to be flowed by burner element and providing effluent stream nozzle and the performance that affects combustion chamber by stopping.In addition, residue may affect the chemical property of the burning in combustion chamber.
In combustion chamber, provide the inner lining protection of perforation or porous burner element and/or nozzle to prevent these combustion deposits; because residue of combustion is lining with in being deposited on; with compared with burner element or the possible situation of nozzle, liner can be cleaned more easily and can in a multitude of different ways in any mode clean.Such as, scaler (scraper) can being used, by mechanically cleaning liner to liner water spray or by making liner expand to change the shape of boring a hole, and deposit being offed normal.Like this clean will be impossible usually or can damage burner element.Can original position or perform this clean by removing liner from combustion chamber.Therefore, this is not easy to realize for burner element or nozzle.This scheme makes clean described fletcher radial burner more easily and faster.
Therefore, the mechanical arrangement of liner can be configured to the ignition quality adjusting combustion chamber.Such as, the perforation in liner or the size in aperture may be confirmed as concentration and the flow of the burning gases that have impact in combustion chamber with distribution.And the size of perforation can be configured to configuration any cleaning material preventing or reduce for clean liner and contacts and may damage the possibility of combustion elements.
Therefore, can find out that the layout of liner helps to improve the performance of fletcher radial burner.
fletcher radial burner-one general configuration and operation
Fig. 1 shows fletcher radial burner according to an embodiment with 8 generally.Fletcher radial burner 8 utilizes vacuum pumping system to process the effluent stream from manufacture process instrument such as semiconductor or the pumping of flat-panel monitor process tool usually.Flow out stream received at entrance 10 place.Flow out stream and be transported to nozzle 12 from entrance 10, outflow stream is ejected in cylindrical combustion chamber 14 by nozzle 12.In this embodiment, fletcher radial burner 8 is included in four entrances 10 circumferentially, and each entrance 10 utilizes corresponding vacuum pumping system to carry the outflow stream from corresponding tool pumping.Alternatively, the outflow stream from the single instrument through disposing can be divided into multiple stream, and each stream is wherein transported to corresponding entrance 10.Each nozzle 12 is positioned in the respective interior bores 16 that formed in ceramic top plate 18, and ceramic top plate 18 limits upper surface or the inlet surface of combustion chamber 14.
Combustion chamber 14 has the sidewall that limits of discharge surface 21 by narrow meshed burner element 20, that such as described in EP 0 694 735.Burner element 20 is cylindrical and is retained in cylindrical shell body 24.Charging portion (plenum) volume 22 is defined in entering between surface 23 and cylindrical shell body 24 of burner element 20.The mixture of the fuel gas that such as natural gas or hydrocarbon are such and air is incorporated in charging portion volume 22 via one or more inlet nozzle (not shown).The mixture of fuel gas and air enters discharge surface 21 that surface 23 is delivered to burner element 20 in combustion chamber 14 combustion from burner element 20.
The ratio of the mixture of fuel gas and air changes to be the temperature being suitable for processing effluent stream by the temperature change in combustion chamber 14.And the mixture speed be incorporated in charging portion volume 22 that have adjusted fuel gas and air makes mixture to burn but does not cause visible flame at 21 places, discharge surface of burner element 20.The exhaust outlet 15 of combustion chamber 40 opens wide to make combustion product can export from fletcher radial burner 8.
Therefore, can find out, by entrance 10 receive and the eluting gas being supplied to combustion chamber 14 by nozzle 12 in combustion chamber 14 combustion, combustion chamber is by the fuel gas of burning near the discharge surface 21 of burner element 20 and the mixture heating of air.This burning causes the heating of chamber 14 and provides combustion product, such as oxygen, usually 7.5% to 10.5% scope, depend on the air/fuel mixture [CH being supplied to combustion chamber 14
4, C
3h
8, C
4h
10].Effluent stream in this heat and combustion product and combustion chamber 14 reacts with clean effluent stream.Such as, SiH
4and NH
3can be arranged in effluent stream, effluent stream is in combustion chamber 14 and O
2react to generate SiO
2, N
2, H
2o, NO
x.Equally, N
2, CH
4, C
2f
6can be provided in effluent stream, effluent stream is in combustion chamber 14 and O
2react to generate CO
2, HF, H
2o.
perforation liner-fixed and arranged
Liner 40 is arranged in combustion chamber 14.In this embodiment, liner 40 is for cylindrical and it is adjacent to the discharge surface 21 and be accepted in combustion chamber 14 of burner element 20.The burning of the mixture of fuel gas and air occurs in the combustion zone 25 contiguous with the discharge surface 21 of burner element 20.In this embodiment, location, the outer surface 44 of liner 40 contiguous combustion zone 25 makes combustion product by the perforation of liner 40 and enters combustion chamber 14.But, will recognize that liner 40 can be changed to change the condition in combustion chamber 14 relative to the discharge surface 21 of burner element 20 and the exact position of combustion zone 25.
Liner 40 is perforated to allow combustion product to be delivered in combustion chamber 14 from combustion zone 25.Size and the distribution of these perforation are selected as being convenient to combustion product from combustion zone 25 to the distribution in combustion chamber 14 and flowing, as will be described in more detail below.And the size of perforation and distribution can be changed to protect burner element 20 to avoid damaging during clean liner 40.To recognize that perforation can be arranged in a multitude of different ways; Such as, liner 40 can by punching or rolling to form aperture or even can for louvered in proper position.
In this embodiment, liner 40 is formed by two parts, that is, cylindrical portion section and top plate portion section.Cylindrical portion section and top plate portion section 46 are by consolidation.Top board 46 has outer radial periphery to flange, and outer radial periphery is clamped between the upper segment 60 of fletcher radial burner 8 and lower section 62 to flange.This keeps liner 40 in place in combustion chamber 14.
spreader nozzle
In order to clean described secure liner, be provided with another endoporus 30 in ceramic top plate 18, spreader nozzle 32 extends through endoporus 30 at the arrival end place of combustion chamber 14.Spreader nozzle 32 is supplied the cleaning fluid from accumulator, such as water, accumulator operation to select or the fluid of fixed amount from spreader nozzle 32 in selected pressure distribution, such as water.The geometry of spreader nozzle 32 defines the spray pattern for cleaning fluid.In this example, arrange 120 ° of injection nozzles, it is with 120 ° of circular cone pilot fluid, has the angle tolerance causing the impact zone 34 of cleaning fluid to described liner 40 to impact.
The mechanical shock of the cleaning fluid contacted with the inner surface of hot liner 40, vaporization and/or thermal shock cause the residue of combustion be deposited on liner 40 to become and are separated.
nozzle cleaning
As found out in more detail from Fig. 2, top board 46 comprises aperture, and each in aperture receives respective nozzle 12.Aperture is limited by the vertical edge 48 of top board, and the tolerance of vertical edge 48 is set to provide the interference engagement with nozzle 12 outer surface 13.The existence of the vertical edge 48 of top board 46 makes to wipe any residue of combustion be deposited on the outer surface 13 of nozzle 12 off when liner 40 removes from combustion chamber 14.
In the embodiment shown in fig. 1, by being separated the upper segment 60 of described fletcher radial burner 8 and lower section 62 and achieving removing of liner 40.But hereafter in greater detail in embodiment, liner 40 can be shifted from combustion chamber 14, and is not separated upper segment 60 and lower section 62.
perforation liner-displaceable layout
Fig. 6 shows the displaceable layout according to an embodiment, wherein eliminates spreader nozzle 32.In order to clean described liner 14, it is shifted for clean from the exhaust outlet 15 of combustion chamber 14.Usually, liner 40 is displaced in water-bath 90.Be immersed in water-bath by liner 40 and cause mechanical shock, vaporization and/or thermal shock, this causes residue of combustion to off normal.Then liner 40 can be stirred in a water bath or water-bath itself can be stirred so that clean.
Especially, perforation liner 42 is by fixture 80 fixing connected with actuator 82, and actuator 82 is illustrated and is in accommodation or retracted position.The lower chambers being labeled as 92 generally connects with cylindrical shell body 24.Arrange lower chambers 92 for cool from combustion chamber 14 out through dispose eluting gas.Eluting gas through disposing enters cylindrical tube 83, is flowed and from outlet 88 out by aperture 85.Cylindrical tube 83 has cascade, and it flows in direction a and supplies 84 supplies by cascade.Cooling sprinkling 86 is led towards aperture 85 cascade.Cooling sprinkling 86 helps cooling through the eluting gas of disposal and retains microparticle material.Water-bath 90 maintains the bottom place of container 92.
Fig. 7 shows to be in and does not hold or the perforation liner 42 of projecting positions.Perforation liner 42 is displaced in water-bath 90 by actuator 82.Perforation liner 42 is immersed in water-bath 90 and residual deposit is removed.Actuator 82 is made to carry out moving back and forth the liner 42 helped in stirring water-bath 90.Actuator 82 can retract perforation liner 82 is shifted and is received in combustion chamber 14.The displacement of perforation liner 42 helps to remove any residual deposit on nozzle 12.
To recognize for this layout, and eliminate peripheral flange 50, and liner 40 is alternatively retained in combustion chamber 14 by fixture 80 and actuator 82.Then shift mechanism can make liner 40 turn back to accommodated position, as shown in Figure 1.
The residue of combustion that the displacement of liner 40 result on the outer surface 13 of nozzle 12 is removed.
Fixing with in displaceable layout, can insert mechanical scaler, it contacts with the inner surface 42 of liner 40 and provides mechanical cleaning.As an alternative or supplement, mechanical curettage device can be positioned in water-bath 90 and can to engage liner 40 during liner 40 is displaced to non-accommodated position.
perforation liner-expandable netted layout
Fig. 8 and Fig. 9 shows the fletcher radial burner according to an embodiment.All features of the embodiment that this embodiment incorporates above and hereafter mentions, but this embodiment eliminates and provides spreader nozzle 32 and actuator 82.Alternatively, as become obvious from following description, be provided with the actuator 82A of amendment, its operation is expanded to remove deposit to make liner 42A.But, will recognize that other embodiment also can comprise spreader nozzle 32 and make liner 42A to be shifted with similar fashion mentioned above to be ejected into by cleaning fluid on liner 42A and/or actuator 82.
In this embodiment, liner 42A be cylindrical and its be adjacent to burner element discharge surface be accepted in combustion chamber 14.The burning of the mixture of fuel gas and air is adjacent to the discharge surface of burner element and occurs in combustion zone.In this embodiment, the outer surface of liner 42A be adjacent to combustion zone location make combustion product by the perforation of liner 42A and enter combustion chamber 14A.But, will recognize that liner 42A can change the condition in combustion chamber 14A relative to the discharge surface of burner element and the exact position of combustion zone.
Liner 42A is expandable net, and it is perforated to allow combustion product to be delivered in combustion chamber 14A from combustion zone.Size and the distribution of these perforation are selected as being convenient to combustion product from combustion zone to the distribution in combustion chamber 14A and flowing, as will be described in more detail below.And for those embodiments incorporating spreader nozzle, the size of perforation and distribution can change to protect burner element to avoid being damaged during clean described liner 42A.To recognize and perforation can be set by multitude of different ways; Such as, liner 42A can be formed by helical spring, as will be described in more detail below or can being even knit sock.
In this embodiment, liner 42A is formed by two parts, that is, cylindrical portion section and top plate portion section.Cylindrical portion section and top plate portion section are by consolidation.Top board has outer radial periphery to flange, and outer radial periphery is clamped between the upper segment of fletcher radial burner and lower section to flange.Liner 42A is retained in combustion chamber 14A in place by this.
In alternative embodiments, when liner 42A is also used for cleaning in mode as described above from the displacement of the outlet of combustion chamber 14A, except the actuator 82A of amendment, liner 42A is by the fixture fixing connected with actuator 82.This can make liner 42A expand and submergence and/or hand scraping, as mentioned above.
Modified actuator 82A connects the end 42B contrary with top plate portion section.When hope removes deposit from liner 42A, modified actuator 82A extends the length of described liner 42A on the direction B shown in Fig. 9.When end 42B is shifted, top plate portion section is by liner 42A held in place.Modified actuator 82A uses annular ring to be connected with end 42B.The extension of liner 42 causes the perforation of liner 42A to extend and flexure, therefore makes any deposit off normal.Once liner 42A extends with aequum, modified actuator 82A makes expansion oppositely and makes liner 42A return to its holding position, as shown in Figure 8.
Usually, expand and will attempt to make the size of perforation expand only about half of and will the axial length of liner 42A be needed to extend in holding position usually between 1/3rd and 2/3rds of its axial length.
The advantage of this layout is by simple mechanical displacement, and deposit can be made to off normal.Compared with the shifting technique shown in Fig. 7, this displacement can relatively quick the to perform, and it is compared with any technology in technology mentioned above, the condition in combustion chamber 14A is had to the impact of reduction.
As mentioned above, an embodiment liner 42A comprises helical spring.Figure 10 A to Figure 10 C shows the structure being coiled into provide this helical spring circle.Be provided with substrate 100A, 100B.Substrate can be cylindrical, has automatic adjustment cross section; Or can be plane, there is straight in cross-section substantially.
Distance piece 102A, 102B, 102C are set to surround substrate 100A, 100B or from substrate 100A, 100B projection.Especially, distance piece 102A comprise around substrate 100A, 100B outer felt around small diameter substrate (such as silk).Distance piece 102B comprises the protuberance extended from the surface of substrate 100A, 100B.Distance piece 102C comprises annular ring on the outer surface being arranged at substrate 100A, 100B or lasso.
The diameter of substrate 100A, 100B is represented by distance D.Distance between an outer surface and the outer surface of distance piece 102A, 102B, 102C of substrate 100A, 100B is represented by distance d.The length of distance piece 102A, 102B, 102C is represented by distance l.Distance between adjacent spacers is represented by distance L.As shown in figure 11, when liner 42A is in holding position, distance d, D, l and L determine size and the geometry of perforation 104.Usually, distance D will be about 1.5mm to 2mm, and distance d will be generally about 2 to 2.5mm.Usually, chosen distance l and L is to avoid the distance piece in helical spring adjacent turn to come in contact.But, will recognize if desired, then may adjust these distances and they are contacted.
And, the length recognized by along substrate being changed distance d, D, l and L, when being in holding position, the density of such perforation in liner 42A can be changed, as will be described in more detail below.
Figure 12 shows the alternative helical ring structure according to an embodiment.In this embodiment, substrate 100A, 100B is provided with.
But, not be provided with the distance piece surrounding substrate 100A, 100B, alternatively, be provided with independent spacer structure 102D, independent spacer structure 102D itself is formed in helical spring and this helical spring circle is staggered between the adjacent turn of substrate 100A, 100B.Especially, distance piece 102C comprises pleating substrate, its with back and forth, sinusoidal or sawtooth profile and rising and falling, then it be wound in helical spring.By rising and falling, the spacing provided provides perforation when being in holding position.
liner perforation-combustion product generally flows control
In order to control to introduce from combustion zone 25 to the combustion product in combustion chamber 14, size and the distribution of perforation change as shown in Figure 3.In order to improve definition, cylindrical part is shown as rectangle net.
As can be seen, in the region 70 being adjacent to ceramic top plate 18, perforation is not provided or comparatively low-density perforation is provided.Alternatively, in the region 74 that the exhaust outlet 15 with combustion chamber 14 is contiguous, the perforation of higher density is provided.In region 72 between region 70 and 74, density of such perforation changes from the higher density perforation towards region 70 to the comparatively low-density perforation towards region 74.
In the region 72 near described nozzle 12, the distribution that more highdensity perforation has helped to be increased in effluent stream combustion product in the region of combustion chamber 14 combustion effluent stream is set.Generally speaking, reduce density of such perforation towards outlet 15 and reduce combustion product amount, because untreated effluent gases flow reduces.
Make region 74 be provided with more highdensity perforation and too increase the combustion product density in outlet 15 near zone of burning probably comparatively poor efficiency.The density of such perforation reduced in region 70 has helped the distribution reducing to experience in combustion chamber 14 at effluent stream combustion product in the region of less burning.
liner perforation-combustion product stream-nozzle optimization
In order to control to introduce from combustion zone 25 to the combustion product in combustion chamber 14, size and the distribution of perforation change as shown in Figure 4.In order to improve definition, cylindrical part is shown as rectangle net.
In the embodiment shown in fig. 1, four nozzles 12 in circumferential spaced at equal intervals are provided with.The relative position of those nozzles 12 schematically indicates in the diagram.In order to the existence of concentrated combustion product near each in those nozzles 12, compared with the density of such perforation in the 12b of region, the density of such perforation in the 12a of region increases.
To recognize the specific quantity and configuration that depend on nozzle 12, the exact position of region 12a and 12b will change with coupling.
liner perforation-spray protection
In order to prevent damaging burner element 20, the size of perforation and changes in distribution, as shown in Figure 5.In order to clearly, cylindrical part is shown as rectangle net.
As can be seen, arrange without perforation or the region 34 with low-density perforation.This prevent or reduces any cleaning fluid of spraying from spreader nozzle by liner 40 and catalytic combustion device element 20 and burner element 20 is caused to the possibility of damage.
To recognize in the embodiment utilizing louver board instead of perforation, do not need district 34 to exist.
liner perforation-density combinations
Control to provide combustion product and spray protection, the suitable density that the density shown in Fig. 3, Fig. 4 and Fig. 5 can combine to realize boring a hole liner distributes.Especially, such as, district 70 and 74 can be omitted.
Like that as mentioned above, the disposal of eluting gas such as silane, chlorosilane and organosilan produces solid by-product, such as SiO
2and Si
3n
4.This tends to be deposited on the surface in fletcher radial burner.Sedimentation rate is enough to make usual turbulent flame burner alternatively for disposing this gas usually produced during photovoltaic solar and flat panel display process.
In an embodiment, the sieve of perforated is inserted between burner element and combustion chamber.Such as, 6 inch diameter sieves are installed in 7 inch diameter burner element.Burner burns in a usual manner, and the sieve of perforated defines the gas purification radiation border of combustion chamber.Sieve can be coated to and be covered with metallic plate, and metallic plate is perforated to allow various fixture head projection, such as, and igniter (pilot burner), process nozzle, thermocouple etc.This provides sacrificial surface, covers and usually tends to deposit but the region of being made up of the material significantly more solid than base part (its normally/be the ceramic fibre that insulate for head and composite metal fiber/ceramic fibre for burner element at large).There is provided the sieve of perforated provide can be cleaned surface.In one embodiment, by carrying out these parts clean from the impact water droplet of high pressure spray spreader nozzle.In another embodiment, liner is installed on actuator, allows it from burner translation out, and is impregnated in the tank that is close to below burner.
Sieve can be simple perforation thin plate that is rolled and welding, or can be punched and for having shutter, combustion by-products is directed downwardly toward, but prevents any water from spraying or steam (if allowing by combustion chamber top) contacts with burner surface.Alternatively, knitted yarn braided wires mesh screen can be adopted.
Liner needs to tolerate the high temperature oxidizing conditions of combustion chamber and the high thermal shock of the also clean event of tolerance.Therefore, liner can comprise inconnel 600 or similar alloy.Alternatively, mild steel may be used for the electrodeless nickel plating of heavy high phosphorus.When be heated in a vacuum furnace decoct stewed (braising) temperature time (800 DEG C to 250 DEG C), nickel coating flow in mild steel surface and phosphorus burnouts subsequently, leave the non-porous coating of pure nickel substantially, it has the fusing point of about 1440 DEG C and the coating fusing point of 800 DEG C to 1200 DEG C, depends on phosphorus content.
Like that as mentioned above, embodiment provides the burning of the such as process gas that silane, chlorosilane and organosilan are such to reduce discharging, and creates solid by-product such as SiO
2, Si
3n
4.These solids tend to be deposited on the surface in emission-reducing system, such as, on the head pottery and burner liner of fletcher radial burner.
Although provide best reduction performance (being treated to the destruction of restriction or removing the fuel use of often liter of gas of level of efficiency), this burner replaced by rudimentary (inferior) turbulent flame burner for the strictest photovoltaic solar and FPD technique.But embodiment gives the layout providing this process to reduce discharging, be combined with the efficiency of fletcher radial burner and performance and the average time between the maintenance of simpler turbulent flame device.
In one embodiment, the sieve of perforated is inserted between fletcher radial burner and combustion chamber.Such as, in 6 " diameter sieve is installed on 7 " diameter burner.Burner burns in a usual manner, and the sieve of perforated defines the gas purification radiation border of combustion chamber.Sieve can be coated to and be covered with metallic plate, and metallic plate is perforated to allow the projection of various head fixture, such as, and igniter, process nozzle, thermocouple etc.This provides sacrificial surface, covers and usually tends to deposit but the region of being made up of the material significantly more solid than base part (its normally/be the ceramic fibre that insulate for head and composite metal fiber/ceramic fibre for burner liner at large).
In another embodiment, sieve is the expanded screen utilizing silk rolling, and the distance piece had along silk defines the separate of described sieve opening to keep wire turn to be in.In order to clean described sieve, it is made to expand by making the lower end translation of sieve downward (upper end needs to be fixed).Sieve can be similar to crossing filter, but the spacing of line will need for such as 1mm on the line of similar size.This method is specially adapted to concentric burners, and wherein water sprinkling/cleaning steam method is unpractical.
Although disclose in detail illustrative embodiment of the present invention in this article referring to accompanying drawing, should be appreciated that the present invention is not limited to illustrated exact embodiment and when not departing from the category of the present invention limited by claims and its equivalent, can be made a variety of changes and revise by those skilled in the art to these embodiments.
Claims (26)
1., for the treatment of a fletcher radial burner for the effluent stream from manufacture process instrument, described fletcher radial burner comprises:
Combustion chamber, it has porous sleeve, and incendiary material is burnt for the burning surface being adjacent to described porous sleeve by described porous sleeve;
At least one mass flowing nozzle, it is for being ejected in described combustion chamber by described effluent stream; And
Perforation liner, it is adjacent to described burning surface.
2. fletcher radial burner according to claim 1, it is characterized in that, described perforation liner comprises expandable network structure.
3. fletcher radial burner according to claim 2, it is characterized in that, it comprises: actuator, and it is by operating described expandable network structure is immobilizated in the holding position in described combustion chamber and makes described expandable at least one end cancellated be displaced to expanding position.
4. fletcher radial burner according to claim 3, it is characterized in that, described expandable network structure has the first axial length and has the second axial length when being in described expanding position when being in described holding position, wherein said second axial length is greater than described first axial length.
5. the fletcher radial burner according to claim 3 or 4, it is characterized in that, described expandable network structure has the axial length that mates with the length of described combustion chamber when being in described holding position and axial length is greater than the length of described combustion chamber when being in described expanding position.
6. the fletcher radial burner according to any one of claim 2 to 5, is characterized in that, described expandable network structure comprises helical spring, and described helical spring has and is arranged to make the isolated distance piece of adjacent turn when being in described holding position.
7. fletcher radial burner according to claim 6, it is characterized in that, described helical spring is formed by one of cylindrical base and planar substrates.
8. the fletcher radial burner according to claim 6 or 7, is characterized in that, described distance piece comprise following at least one: be suitable for the protuberance on described helical spring surface; Surround the annular ring on described helical spring surface, lasso and winding around; And pleating helical spring, it has adjacent circle, between described helical spring adjacent turn, leave gap.
9. the fletcher radial burner according to any one of claim 6 to 8, is characterized in that, selects the size of described helical spring and distance piece and position to provide the selected aperture density of described perforation liner.
10. according to fletcher radial burner in any one of the preceding claims wherein, it is characterized in that, the hole density of described perforation liner changes along described axial length.
11. fletcher radial burners according to claim 10, it is characterized in that, described combustion chamber has the nozzle end that is adjacent at least one mass flowing nozzle described and in the discharge end axially away from least one mass flowing nozzle described, the described hole density of described perforation liner reduces towards described discharge end.
12. fletcher radial burners according to claim 10 or 11, is characterized in that, described combustion chamber has the discharge region being axially adjacent to described discharge end and extending, and the described hole density of described perforation liner increases towards described discharge region.
13., according to claim 10 to the fletcher radial burner according to any one of 12, is characterized in that, described combustion chamber has in the nozzle region being axially adjacent to the extension of described nozzle end, and the described hole density of described perforation liner reduces towards described nozzle region.
14., according to fletcher radial burner described in claim 13, is characterized in that, it is puncherless that described perforation liner is adjacent to described nozzle region place.
15. according to claim 10 to the fletcher radial burner according to any one of 14, it is characterized in that, it comprises the multiple described nozzle of locating in circumference around described combustion chamber and the described hole density of wherein said perforation liner is adjacent to described multiple described nozzle in circumference increases.
16. according to claim 10 to the fletcher radial burner according to any one of 15, it is characterized in that, it comprises at least one spreader nozzle on the clear area for cleaning fluid being ejected into described perforation liner, and the described hole density of described perforation liner reduces towards described clear area.
17. fletcher radial burners according to any one of claim 1 and claim 10 to 16, it is characterized in that, described perforation liner comprises louvered thin slice and the louver board of described louvered thin slice is oriented the described combustion product of guiding in described combustion chamber.
18. fletcher radial burners according to any one of claim 1 and claim 10 to 17, it is characterized in that, described perforation liner comprises louvered thin slice and the louver board of described louvered thin slice is oriented in described cleaning fluid first type surface received from least one spreader nozzle described.
19. according to fletcher radial burner in any one of the preceding claims wherein, it is characterized in that, described perforation liner can axially displaced between accommodated position and non-accommodated position, at described accommodated position, described perforation liner is contained in described combustion chamber, at described non-accommodated position, described perforation liner is from described combustion chamber projection.
20. fletcher radial burners according to claim 19, it is characterized in that, it comprises: for keeping the cleaning slot of cleaning fluid and wherein at described non-accommodated position, described perforation liner extends in described cleaning slot.
21. according to fletcher radial burner in any one of the preceding claims wherein, it is characterized in that, described perforation liner comprises the aperture for receiving associated streams delivery nozzle, and the displacement of described perforation liner causes described aperture to move any outflow process deposit be positioned on its outer surface is offed normal relative to the described mass flowing nozzle be associated.
22. 1 kinds, for the treatment of the method for the effluent stream from manufacture process instrument, said method comprising the steps of:
Make incendiary material by the porous sleeve of combustion chamber for the burning surface burning being adjacent to described porous sleeve;
Described effluent stream is made to be ejected in described combustion chamber from least one mass flowing nozzle; And
There is provided perforation liner, it is adjacent to described burning surface.
23. 1 kinds of perforation liners for the treatment of the fletcher radial burner of the effluent stream from manufacture process instrument, described fletcher radial burner comprises: combustion chamber, it has porous sleeve, and incendiary material is burnt for the burning surface being adjacent to described porous sleeve by described porous sleeve; At least one mass flowing nozzle, it is for being ejected in described combustion chamber by described effluent stream, and the shape of described perforation liner and configuration are suitable for being adjacent to described burning surface and place.
24. 1 kinds if this paper is with reference to the fletcher radial burner described by accompanying drawing.
25. 1 kinds as the method herein as described in reference accompanying drawing.
26. 1 kinds if this paper is with reference to the perforation liner of the fletcher radial burner described by accompanying drawing.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1213306.2 | 2012-07-26 | ||
| GB1213306.2A GB2504335A (en) | 2012-07-26 | 2012-07-26 | Radiant burner for the combustion of manufacturing effluent gases. |
| PCT/GB2013/051907 WO2014016566A2 (en) | 2012-07-26 | 2013-07-17 | Radiant burner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104487770A true CN104487770A (en) | 2015-04-01 |
Family
ID=46882011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380039730.6A Pending CN104487770A (en) | 2012-07-26 | 2013-07-17 | Radiant burner |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20150184850A1 (en) |
| EP (1) | EP2877782A2 (en) |
| JP (1) | JP2015526687A (en) |
| KR (1) | KR20150037892A (en) |
| CN (1) | CN104487770A (en) |
| GB (1) | GB2504335A (en) |
| TW (1) | TW201418629A (en) |
| WO (2) | WO2014016552A2 (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2532776A (en) * | 2014-11-28 | 2016-06-01 | Edwards Ltd | Radiant burner |
| GB2533293A (en) * | 2014-12-15 | 2016-06-22 | Edwards Ltd | Inlet assembly |
| GB201505447D0 (en) | 2015-03-30 | 2015-05-13 | Edwards Ltd | Radiant burner |
| GB2536905B (en) * | 2015-03-30 | 2020-01-08 | Edwards Ltd | Radiant burner |
| GB2550382B (en) * | 2016-05-18 | 2020-04-22 | Edwards Ltd | Burner Inlet Assembly |
| JP6777472B2 (en) * | 2016-09-06 | 2020-10-28 | エドワーズ株式会社 | Abatement equipment and deposit removal means used in abatement equipment |
| SG11201906205UA (en) * | 2017-01-06 | 2019-08-27 | Alzeta Corp | Systems and methods for improved waste gas abatement |
| US11187433B2 (en) | 2017-10-03 | 2021-11-30 | Lennox Industries Inc. | Pre-mix burner assembly for low NOx emission furnace |
| US10711998B2 (en) | 2017-10-03 | 2020-07-14 | Lennox Industries Inc. | Fresh air intake for low NOx emission furnace |
| US10711997B2 (en) | 2017-10-03 | 2020-07-14 | Lennox Industries Inc. | Burner box liner for low NOx emission furnace |
| TWI658805B (en) * | 2018-07-03 | 2019-05-11 | 關隆股份有限公司 | Burning device |
| US11162677B2 (en) | 2019-01-18 | 2021-11-02 | Lennox Industries Inc. | Air intake coupling with noise suppression for low NOx emission furnace |
| US11428438B2 (en) * | 2020-04-28 | 2022-08-30 | Rheem Manufacturing Company | Carryover burners for fluid heating systems and methods thereof |
| GB2608819A (en) * | 2021-07-13 | 2023-01-18 | Alzeta Corp | Pilot unit |
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| US20060104879A1 (en) * | 2004-11-12 | 2006-05-18 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
| CN101300411A (en) * | 2005-10-31 | 2008-11-05 | 应用材料股份有限公司 | Process abatement reactor |
| CA2816235A1 (en) * | 2010-12-20 | 2012-06-28 | Solaronics S.A. | Gas fired radiation emitter with embossed screen |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0906542B1 (en) * | 1996-06-25 | 2000-09-27 | Swedish Bioburner System Aktiebolag | Rotary burner for solid fuel |
| GB0005231D0 (en) * | 2000-03-03 | 2000-04-26 | Boc Group Plc | Abatement of semiconductor processing gases |
| US7569193B2 (en) * | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
-
2012
- 2012-07-26 GB GB1213306.2A patent/GB2504335A/en not_active Withdrawn
-
2013
- 2013-06-20 WO PCT/GB2013/051624 patent/WO2014016552A2/en active Application Filing
- 2013-07-17 WO PCT/GB2013/051907 patent/WO2014016566A2/en active Application Filing
- 2013-07-17 CN CN201380039730.6A patent/CN104487770A/en active Pending
- 2013-07-17 US US14/415,929 patent/US20150184850A1/en not_active Abandoned
- 2013-07-17 JP JP2015523607A patent/JP2015526687A/en active Pending
- 2013-07-17 EP EP13740343.2A patent/EP2877782A2/en not_active Withdrawn
- 2013-07-17 KR KR20157001982A patent/KR20150037892A/en not_active Application Discontinuation
- 2013-07-25 TW TW102126744A patent/TW201418629A/en unknown
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060104879A1 (en) * | 2004-11-12 | 2006-05-18 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
| CN101069041A (en) * | 2004-11-12 | 2007-11-07 | 应用材料股份有限公司 | Reactor design to reduce particle deposition during process abatement |
| CN101300411A (en) * | 2005-10-31 | 2008-11-05 | 应用材料股份有限公司 | Process abatement reactor |
| CA2816235A1 (en) * | 2010-12-20 | 2012-06-28 | Solaronics S.A. | Gas fired radiation emitter with embossed screen |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2877782A2 (en) | 2015-06-03 |
| GB201213306D0 (en) | 2012-09-05 |
| JP2015526687A (en) | 2015-09-10 |
| TW201418629A (en) | 2014-05-16 |
| WO2014016566A2 (en) | 2014-01-30 |
| US20150184850A1 (en) | 2015-07-02 |
| GB2504335A (en) | 2014-01-29 |
| WO2014016552A3 (en) | 2014-03-20 |
| WO2014016566A3 (en) | 2014-03-20 |
| WO2014016552A2 (en) | 2014-01-30 |
| KR20150037892A (en) | 2015-04-08 |
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Application publication date: 20150401 |