CN1044856A - Thin transparent gold-gauze electrode and preparation thereof - Google Patents
Thin transparent gold-gauze electrode and preparation thereof Download PDFInfo
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- CN1044856A CN1044856A CN 90102815 CN90102815A CN1044856A CN 1044856 A CN1044856 A CN 1044856A CN 90102815 CN90102815 CN 90102815 CN 90102815 A CN90102815 A CN 90102815A CN 1044856 A CN1044856 A CN 1044856A
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Abstract
The present invention relates to a kind of spectroelectrochemistry and be used for the thin layer steamed golden engraved mesh electrode.Existing golden net costs an arm and a leg, and makes into electrode again by hand, electrode specification is differed, and fragility is not durable.The present invention adopts integrated circuit mask lithography technology photoetching gold net on piezoid or optical glass sheet, and making area is 25 * 8mm
2Electrode.This method technical maturity, price are low, and the golden net electrode of making is sturdy and durable, and the saturating scope of light is wide, uniform specification, and easily suitability for industrialized production is an electrode desirable in the spectroelectrochemistry technology.
Description
The present invention relates to the special-purpose thin transparent gold-gauze electrode of a kind of spectroelectrochemistry.
The history of the spectroelectrochemistry technology that at first proposes by U.S. professor kuwana existing more than ten years.Though the electrolytic cell of various different modes is arranged in this technology, the electrolytic cell of thin transparent gold-gauze electrode manufacturing is a kind of of works very well.Used golden net electrode all is with commodity gold net in spectroelectrochemistry technology at present, own hand-made, it not only costs an arm and a leg, and because commodity gold net is extremely fragile, and the technical requirement of preparation electrode is very high, the preparation method extremely bothers, again because manual preparation, can not make that to make electrode in full accord, so the electrolytic cell constant changes with electrode and different, make troubles to use.
The objective of the invention is to propose a kind of thin transparent gold-gauze electrode easy to prepare, cheap, well behaved and preparation technology thereof.
The euphotic electrode that is used for thin-layer spectral electrochemical research requires that electrode substance is stable, light transmission is good, conductivity is high.The printing opacity thin au net electrode that the present invention proposes, by common requirement, the mesh size is 400～600 orders, and wherein golden net is a carrier with piezoid or optical glass sheet, is coated with the chromium layer between carrier and gold net, and the chromium layer thickness is 100～200
, golden net is that the golden film of 2～4 μ m obtains through photoetching by the thickness of evaporation on the chromium layer.With quartz is that support is because it all has light transmission well to ultraviolet until near infrared region.If the gold net directly and the piezoid adhesion, adhesion is very poor, is easy to come off, breakage.And good adhesion arranged between chromium and the piezoid, the adhesion between it and the golden film also than golden film directly and quartz be combined into good, and the stable performance of chromium.Therefore, between piezoid and gold net, be coated with transition bed chromium.
Among the present invention, the Phnom Penh of wide a 0.3～0.6mm of being can be arranged around the gold net,, golden film extension be arranged above electrode to improve conductance, as long as it is be connected with lead, very convenient with silver paste.
The golden net electrode that the present invention proposes, method for making is as follows: with technique for vacuum coating first chromium coating on piezoid that cleaned or optical glass sheet, thickness is 100～200
, gold-plated again film, thickness are 2～4 μ m, adopt large scale integrated circuit mask lithography technology then, make grid, the mesh that requires electrode is 400～600 orders.When piezoid or optical glass sheet place the vacuum coating equipment evaporation, keep vacuum tightness 2～3 * 10
-5Torr, 130～200 ℃ of piezoid or optical glass sheet temperature place molybdenum boat to evaporate with high-purity chromium powder, and evaporation continues to keep piezoid or optical glass sheet temperature for this reason, the evaporated gold film to the thickness that requires.
After gold net electrode is made, can encapsulate.Electrode is positive to adopt a piezoid consistent with carrier piezoid width to make cover plate, leaves the gap between cover plate and the golden net electrode surface, and cover plate and electrode side are fixed with the mylar strip of paper used for sealing.
Advantage of the present invention is to have utilized the ic lithography process existing equipment, and the golden net electrode price of preparation is well below the direct electrode made from commodity gold net, and the electrode specification unanimity of making is sturdy and durable, and is because the electrolysis constant is constant, therefore easy to use.
Golden net electrode with the inventive method preparation is to be used for the desirable electrode of spectroelectrochemistry technology.The spectroelectrochemistry development in recent years is rapid, especially very big prospect is being arranged aspect the electrochemical research of biomolecule.It connects a kind of new technology of formation to spectral technique and electrochemical techniques, electrochemical result, parameter as normal potential, electron transfer number and the Chemical Kinetics of the product of electrode reaction, reactant all can obtain from spectroscopic methodology rapidly, so it more and more is subject to people's attention.
Description of drawings is as follows: Fig. 1 is the saturating thin layer steamed golden engraved mesh electrode of a light synoptic diagram, the spectroelectrochemistry electrolytic cell of Fig. 2 for forming with golden net electrode, and 1 is golden net among the figure, the 2nd, golden-rimmed, the 3rd, golden net electrode outlet line part, the 4th, contact conductor, the 5th, mylar strip of paper used for sealing position, the 6th, piezoid is the golden net electrode side-looking face of carrier, the 7th, quartzy cover plate, the 8th, glass graphite is to the utmost point, and the 9th, the Ag-AgCl reference electrode of saturated KCl, the 10th, measure solution, the 11st, incident light.
Embodiment:
Select 60 * 10 * 1mm for use
3The twin polishing quartz plate, soak more than 24 hours through chloroazotic acid, rinse with distilled water then, carry out ultrasonic cleaning half an hour with acetone, alcohol organic solvent again, taking-up promptly obtains the piezoid surface cleaned with deionized water rinsing.This piezoid is placed vacuum coating equipment, keep vacuum tightness 2～3 * 10
-5Torr, 150 ℃ of piezoid temperature, the high-purity chromium powder with 99.99% places molybdenum boat evaporation 30 seconds, and with the polarimeter test of the ellipse garden of laser, control chromium layer thickness is 100～200
Between, piezoid surface slightly some burnt hair mist gets final product.Then continuing to keep the piezoid temperature is 150 ℃, gold evaporation film to 2～4 μ m thickness.
The piezoid of the good golden film of evaporation is placed the photoresist spinner gluing, select negative photoresist for use, 3000 rev/mins of control rotating speeds took off after 20 seconds.Glue-coated piezoid is put into 85 ℃ of baking oven bakings 15 minutes, again piezoid is placed on the litho machine, put mask, ultraviolet photoetching 45 seconds.The piezoid that exposure is good immerses development in 45 seconds in the cyclohexane, immerses photographic fixing in 45 seconds in the butyl acetate again, puts into 30 minutes post bakes of 180 ℃ of baking ovens bakings then.Use KI: I
2: H
2O=4: 1: 100 solution corrosion gold film, use K
4MnO
4: H
2O=5: 100 solution corrosion chromium layers.So promptly make golden web area 8 * 25mm
2, golden netting twine is wide to be 12 μ m, the mesh area is (36 μ m)
2, glazed area is 56%, at the golden net electrode of ultraviolet light, visible light, the equal printing opacity of near infrared light.
Claims (3)
1, a kind of spectroelectrochemistry thin transparent gold-gauze electrode, the mesh size is 400～600 orders, it is characterized in that golden net is a carrier with piezoid or optical glass sheet, be coated with transition metal chromium between piezoid or optical glass sheet and gold net, the chromium layer thickness is 100～200
, golden net is that the golden film of 2～4 μ m obtains through photoetching by the thickness of evaporation on the chromium layer.
2, thin transparent gold-gauze electrode according to claim 1 is characterized in that around the gold net width being arranged is the Phnom Penh of 0.3～0.6mm, and the top of golden net electrode is extension, is connected with lead by silver paste.
3, a kind of manufacture craft of golden net electrode as claimed in claim 1 is characterized in that thickness is 100～200 with vacuum evaporation process first chromium coating on piezoid or optical glass sheet
, gold-plated again film, thickness are 2～4 μ m, use large scale integrated circuit mask lithography fabrication techniques grid then, the mesh that requires electrode is 400～600 orders.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90102815 CN1014459B (en) | 1990-03-17 | 1990-03-17 | Thin transparent gold-gauze electrode and its prepn. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90102815 CN1014459B (en) | 1990-03-17 | 1990-03-17 | Thin transparent gold-gauze electrode and its prepn. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1044856A true CN1044856A (en) | 1990-08-22 |
| CN1014459B CN1014459B (en) | 1991-10-23 |
Family
ID=4877702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 90102815 Expired CN1014459B (en) | 1990-03-17 | 1990-03-17 | Thin transparent gold-gauze electrode and its prepn. |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1014459B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109239109B (en) * | 2018-10-11 | 2023-12-15 | 中国科学院上海应用物理研究所 | Soft X-ray beam line flux detection device with in-situ gold steaming function |
-
1990
- 1990-03-17 CN CN 90102815 patent/CN1014459B/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109239109B (en) * | 2018-10-11 | 2023-12-15 | 中国科学院上海应用物理研究所 | Soft X-ray beam line flux detection device with in-situ gold steaming function |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1014459B (en) | 1991-10-23 |
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