CN104459534A - Galvanometer motor linearity detection method and device - Google Patents
Galvanometer motor linearity detection method and device Download PDFInfo
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- CN104459534A CN104459534A CN201310422764.5A CN201310422764A CN104459534A CN 104459534 A CN104459534 A CN 104459534A CN 201310422764 A CN201310422764 A CN 201310422764A CN 104459534 A CN104459534 A CN 104459534A
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Abstract
The invention belongs to the laser marking technical field and relates to a galvanometer motor linearity detection method and device. The method comprises the following steps that: laser is emitted through a laser point light source, and the laser emitted by the laser point light source irradiates on a vibration lens of a galvanometer motor; laser spots reflected by the vibration lens of the galvanometer motor are acquired by a laser spot acquisition device; and the same instruction is transmitted to the galvanometer motor so as to make the galvanometer motor rotate, and the linearity of the galvanometer motor can be obtained according to the rotation angle of the galvanometer motor which is acquired by the laser spot acquisition device. According to the galvanometer motor linearity detection method and device of the vibration, a standard method and device are utilized to measure the linearity of the galvanometer motor; and since the linearity of the galvanometer motor can be detected, the performance of a laser marking machine can be improved, and requirements of the laser marking machine, for accuracy, can be satisfied.
Description
Technical field
The invention belongs to laser marking technical field, particularly relate to a kind of detection method and device of the galvanometer motor linearity.
Background technology
Laser marking machine is carrying out in laser marking process, what adopt is be placed on by mark thing on the reference plane under mark square toes to carry out mark operation, carry out in the process of mark utilizing laser marking machine for workpiece, owing to needing the light of mobile laser to carry out mark, and the mode changing laser beam adopts to change galvanometer motor, change the linearity that galvanometer motor then can relate to galvanometer motor, the linearity shows the instruction that galvanometer motor sends out identical, the consistance of the angle of the galvanometer sheet rotation of galvanometer motor, the actual effect of the linearity to object mark of galvanometer motor has a great impact, if the angle that galvanometer sheet rotates has very big-difference at every turn, then the mark effect of marking machine will non-constant.Now commercially also do not have a kind of pick-up unit can measuring the galvanometer motor linearity of standard, therefore, in order to improve the performance of laser marking machine, meet the requirement of marking machine to accuracy of detection, it is very necessary for detecting the galvanometer motor linearity.
Summary of the invention
The object of the embodiment of the present invention is the detection method and the device that provide a kind of galvanometer motor linearity, the linearity of galvanometer motor is measured by a kind of method and apparatus of standard, by detecting the galvanometer motor linearity, to improve the performance of laser marking machine, meet the requirement of marking machine to precision.
The embodiment of the present invention is achieved in that a kind of detection method of the galvanometer motor linearity, and described method comprises the steps:
By laser point light source Emission Lasers, and the laser that described laser point light source is launched is radiated on the galvanometer sheet of galvanometer motor;
By the laser facula of laser facula harvester collection after the lens reflecting that shakes of galvanometer motor;
Sending identical instruction to galvanometer motor makes galvanometer motor rotate, and according to the angle of the laser facula calculating galvanometer motor rotation that laser facula harvester collects, draws the linearity of galvanometer motor.
Further, the described concrete steps by the hot spot of laser facula harvester collection after the lens reflecting that shakes of galvanometer motor comprise:
The laser through the lens reflecting that shakes of galvanometer motor is received by the white balance plate of laser facula harvester;
Laser facula harvester is captured in the light spot image that laser that white balance plate receives is formed.
Further, the described white balance plate by laser facula harvester receives and also comprises before the laser step of the lens reflecting that shakes of galvanometer motor:
Form reflection mirror array by multiple catoptron, the laser of the lens reflecting that makes to shake is along the paths preset.
Further, describedly send identical instruction to galvanometer motor galvanometer motor is rotated, the hot spot collected according to laser facula harvester calculates the angle that galvanometer motor rotates, and show that the concrete steps of the linearity of galvanometer motor comprise:
The instruction sending equal length interval to galvanometer motor makes galvanometer motor rotate;
The laser facula collected according to laser facula harvester calculates anglec of rotation when rotating galvanometer motor each time;
The linearity of galvanometer motor is drawn according to the described anglec of rotation.
Further, the anglec of rotation concrete steps that the described hot spot collected according to laser facula harvester calculates when rotating galvanometer motor each time comprise:
The hot spot collected according to laser facula harvester gets the central point of hot spot;
Anglec of rotation when rotating galvanometer motor is each time calculated according to the central point of hot spot.
Another object of the embodiment of the present invention is the pick-up unit providing a kind of galvanometer motor linearity, and described device comprises:
Laser point light source, for Emission Lasers, and is radiated on the galvanometer sheet of galvanometer motor by the laser that described laser point light source is launched;
Laser facula harvester, for gathering the laser facula after the lens reflecting that shakes of galvanometer motor;
Linearity calculation element, makes galvanometer motor rotate for sending identical instruction to galvanometer motor, according to the angle of the laser facula calculating galvanometer motor rotation that laser facula harvester collects, draws the linearity of galvanometer motor.
Further, described laser facula harvester specifically comprises:
Catoptron, reflects for carrying out laser the light path changing laser;
White balance plate, for receiving laser and presenting laser facula;
Image capturing system, the laser facula presented for dialogue balance plate carries out image acquisition.
Further, described catoptron specifically comprises:
Multiple catoptron, for forming reflection mirror array by multiple catoptron, the laser of the lens reflecting that makes to shake is along the paths preset.
Further, described linearity calculation element comprises:
Instruction sending unit, makes galvanometer motor rotate for the instruction sending equal length interval to galvanometer motor;
Rotation angle computing unit, the representation of laser facula for collecting according to laser facula harvester calculates anglec of rotation when rotating galvanometer motor each time;
Linearity computing unit, for drawing the linearity of galvanometer motor according to the described anglec of rotation.
Further, described rotation angle computing unit specifically comprises:
Central point determining unit, the hot spot for collecting according to laser facula harvester gets the central point of hot spot;
Computing unit, for calculating anglec of rotation when rotating galvanometer motor each time according to the central point of hot spot.
The embodiment of the present invention is by a kind of detection method of the galvanometer motor linearity and device, by rotating galvanometer motor, galvanometer sector-meeting on galvanometer motor rotates along with galvanometer motor simultaneously, the hot spot of laser is gathered by laser facula harvester, obtain the distance of glossing up movement, the final anglec of rotation drawing galvanometer motor according to the displacement of hot spot, then the linearity of galvanometer motor is drawn according to the anglec of rotation of galvanometer motor.
Accompanying drawing explanation
Fig. 1 is the realization flow figure of the detection method of a kind of galvanometer motor linearity that first embodiment of the invention provides;
Fig. 2 is the realization flow figure of the detection method of a kind of galvanometer motor linearity that second embodiment of the invention provides;
Fig. 3 is the galvanometer motor linearity measure principle schematic that second embodiment of the invention provides;
Fig. 4 is the schematic diagram of the calculating spot center that second embodiment of the invention provides;
Fig. 5 is the schematic diagram of the calculating laser spot center point distance that second embodiment of the invention provides;
Fig. 6 is the galvanometer motor linearity contrast schematic diagram that second embodiment of the invention provides;
Fig. 7 is the structural drawing of the pick-up unit of a kind of galvanometer motor linearity that third embodiment of the invention provides;
Fig. 8 is a kind of galvanometer motor apparatus structure schematic diagram that third embodiment of the invention provides; And
Fig. 9 is the structural drawing of the pick-up unit of a kind of galvanometer motor linearity that fourth embodiment of the invention provides.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
Below in conjunction with specific embodiment, specific implementation of the present invention is described in detail:
embodiment one:
Fig. 1 shows the realization flow of the detection method of a kind of galvanometer motor linearity that first embodiment of the invention provides, and details are as follows:
S101, by laser point light source Emission Lasers, and is radiated at the laser that described laser point light source is launched on the galvanometer sheet of galvanometer motor.
By laser point light source Emission Lasers, the laser that laser point light source is launched is radiated on the galvanometer sheet of galvanometer motor, by galvanometer sheet, laser reflection is gone out.
S102, by the laser facula of laser facula harvester collection after the lens reflecting that shakes of galvanometer motor.
The image of laser facula is gathered, the image that the image of collection is formed after the lens reflecting that shakes for laser on harvester by laser facula harvester.
S103, sends identical instruction to galvanometer motor and galvanometer motor is rotated, and according to the angle of the hot spot calculating galvanometer motor rotation that laser facula harvester collects, draws the linearity of galvanometer motor.
Sending identical instruction to galvanometer motor makes galvanometer motor rotate, because galvanometer sector-meeting while rotating at galvanometer motor rotates along with galvanometer motor simultaneously, when galvanometer sheet rotates, the light path of the rear laser of reflection can be changed, by gathering the light spot image that laser is formed on laser facula harvester, the displacement of hot spot can be calculated, then the anglec of rotation of galvanometer motor is drawn according to the displacement of hot spot, anglec of rotation when rotating by measuring each motor, can draw the linearity of galvanometer motor.
The embodiment of the present invention by the way, a kind of detection method of the galvanometer motor linearity, by rotating galvanometer motor, galvanometer sector-meeting on galvanometer motor rotates along with galvanometer motor simultaneously, the hot spot of laser is gathered by laser facula harvester, obtain the distance of glossing up movement, finally draw the anglec of rotation of galvanometer motor according to the displacement of hot spot, then draw the linearity of galvanometer motor according to the anglec of rotation of galvanometer motor.
embodiment two:
Fig. 2 shows the realization flow of the detection method of a kind of galvanometer motor linearity that second embodiment of the invention provides, and details are as follows:
S201, is placed in zero-bit by galvanometer motor.
Because normally used galvanometer motor is when rotated for carrying out rotation forward or backwards in equilibrium position, the angle rotated is the angle in fixed range value, be galvanometer motor when galvanometer motor is placed in equilibrium position and be placed in zero point, simultaneously when galvanometer motor is placed in zero-bit, can be placed on same parallel lines by the camera lens of the catoptron of the galvanometer sheet of galvanometer motor and laser facula harvester, white balance plate and image capturing system for the ease of calculating and measuring, wherein image capturing system comprises camera lens and camera.
S202, the laser being launched fixed light path by fixing laser point light source is radiated on the galvanometer sheet of galvanometer motor.
The laser being launched fixing input path by fixing laser point light source is radiated on the galvanometer sheet of galvanometer motor, and the incident angle between setting laser and galvanometer sheet is α, and incident angle is angle formed by laser and galvanometer sheet normal.
S203, by the laser facula of laser facula harvester collection after the lens reflecting that shakes of galvanometer motor.
By the hot spot of laser facula harvester after the lens reflecting that shakes of galvanometer motor, when gathering hot spot by laser facula harvester, receive laser by white balance plate and on white balance plate, present the hot spot of laser, wherein for the ease of measuring, the volume reducing laser facula harvester can change the light path of laser by arranging multiple catoptron, as shown in Figure 3, reflection mirror array is formed by arranging multiple catoptron, make to shake the laser of lens reflecting along the default paths of catoptron, the light path of laser is changed by the multiple catoptrons arranged, the hot spot displacement being amplified in laser when galvanometer sheet rotates of vast scale can be reached simultaneously, when galvanometer motor rotates very little angle, through multiple reflections, the distance of laser spot center change obtains multistage amplification, finally can realize measuring comparatively accurately.
S204, the instruction sending equal length interval to galvanometer motor makes galvanometer motor rotate.
Send the instruction at equal length interval to galvanometer motor, rotating to be of galvanometer motor rotates according to instruction length, and under the condition sending equal length instruction, galvanometer motor is in theory for rotating identical angle.
S205, the hot spot collected according to laser facula harvester calculates anglec of rotation when rotating galvanometer motor each time.
According to after representation of laser facula calculating each rotation galvanometer motor that laser facula harvester collects, the displacement of laser facula, the anglec of rotation of galvanometer sheet is calculated by the displacement of laser facula, if galvanometer sheet becomes α angle incident in zero-bit with laser, laser is denoted as A, B, C, D, E respectively with the intersection point of catoptron 1,2,3,4,5 after reflection, establish galvanometer sheet to rotate θ angle when galvanometer motor rotates one time, laser is denoted as A ', B ', C ', D ', E ' respectively with the intersection point of catoptron 1,2,3,4,5 after reflection.For the ease of calculating, catoptron is arranged on two parallel lines, and the distance between parallel lines is set as H, can be calculated by geometric optical theory: AE=4Htan (α)
A’E’=4Htan(α+2θ)
AA’=H[tan(α+2θ)-tan(α)]
AE’=AA’+A’E’=5Htan(α+2θ)-h tan(α)
Then: EE '=AE '-AE=5H [tan (α+2 θ)-tan (α)]
EE ' moves axially distance for laser facula after 5 secondary reflections, push away according to expression formula is above counter, just can obtain the expression formula of galvanometer motor rotational angle: θ=(arctan ((EE '/5H)+tan (α))-α)/2.Time owing to sending instructions to galvanometer motor, all send out the instruction of fixed length interval, like this, according to the angle value moved axially apart from each actual rotation of galvanometer sheet just can be calculated of the laser facula calculated at every turn.
In specific implementation process, require to determine need through how many times reflection or set H as how many according to the accuracy of detection of the galvanometer motor linearity.Suppose through N secondary reflection, then the distance of laser spot center point change is (N+1) H [tan (α+2 θ)-tan (α)].The expression formula of rotational angle: θ=(arctan ((Δ d/ (N+1) H)+tan (α))-α)/2.When galvanometer motor rotates very little angle, after multiple reflections, the distance of laser spot center change obtains multistage amplification, even if galvanometer rotates very little angle like this, by the multistage amplification of catoptron, we calculate relation between galvanometer sheet rotational angle and laser spot center point displacement by image capturing system, first the central point calculating laser facula is needed after getting laser facula, carry out calculating by the central point getting hot spot and can improve precision further, calculate the schematic diagram at the center of laser facula as shown in Figure 4, laser facula is gathered by image capturing system, and binary conversion treatment is carried out to representation of laser facula, image after binary conversion treatment is carried out denoising, comprise and smoothly remove noise spot, laser speckle interferometry point etc., again rim detection is carried out to the image after denoising afterwards, burrs on edges is removed to representation of laser facula, the irregular obstacle body point such as salient point also carry out justifying matching, find out the center position of laser facula circle.After finding laser spot center point position, calculate the central point distance of laser facula, as shown in Figure 5, the center position round according to the representation of laser facula found out calculates the distance that radius of a circle is worth two adjacent laser light spot image center points.
S206, draws the linearity of galvanometer motor according to the described anglec of rotation.
After the angle value calculating each actual galvanometer motor rotation, the angle value that just can rotate according to galvanometer motor draw the linearity of galvanometer motor, and the contrast schematic diagram between the linearity wherein drawn according to actual measurement and the theoretic linearity as shown in Figure 6.
The embodiment of the present invention by the way, a kind of detection method of the galvanometer motor linearity, by rotating galvanometer motor, galvanometer sheet on galvanometer motor rotates along with galvanometer motor simultaneously, while galvanometer sheet rotates, galvanometer sector-meeting changes the light path of laser, the hot spot of laser is gathered by laser facula harvester, draw the distance of laser facula movement, the final anglec of rotation drawing galvanometer motor according to the displacement of laser facula, the linearity of galvanometer motor is drawn according to the anglec of rotation of galvanometer motor, after detecting the linearity of galvanometer motor, the linearity of the linearity of galvanometer motor and theoretical galvanometer motor is contrasted, the performance of laser marking machine can be improved, meet the requirement of marking machine to accuracy of detection.
embodiment three:
Fig. 7 shows the structural drawing of the pick-up unit of a kind of galvanometer motor linearity that third embodiment of the invention provides, and for convenience of explanation, illustrate only the part relevant to the embodiment of the present invention.
Laser point light source 71, for Emission Lasers, and is radiated at the laser that described laser point light source is launched on the galvanometer sheet of galvanometer motor.
By laser point light source Emission Lasers, the laser that laser point light source is launched is radiated on the galvanometer sheet of galvanometer motor, by galvanometer sheet, laser reflection is gone out, wherein the apparatus structure schematic diagram of galvanometer motor as shown in Figure 8, galvanometer motor comprises a motor body, and the rotation platform of galvanometer motor is placed a galvanometer sheet.
Laser facula harvester 72, for gathering the hot spot after the lens reflecting that shakes of galvanometer motor.
The hot spot of laser is gathered, the laser facula that the hot spot of collection is formed after the lens reflecting that shakes for laser on harvester by laser facula harvester.
Linearity calculation element 73, makes galvanometer motor rotate for sending identical instruction to galvanometer motor, according to the angle of the hot spot calculating galvanometer motor rotation that laser facula harvester collects, draws the linearity of galvanometer motor.
Sending identical instruction to galvanometer motor makes galvanometer motor rotate, because galvanometer sector-meeting while rotating at galvanometer motor rotates along with galvanometer motor simultaneously, when galvanometer sheet rotates, the light path of the rear laser of reflection can be changed, by gathering the laser facula that laser is formed on laser facula harvester, the displacement of laser facula can be calculated, then the anglec of rotation of galvanometer motor is drawn according to the displacement of laser facula, anglec of rotation when rotating by measuring each motor, can draw the linearity of galvanometer motor.
The embodiment of the present invention by the way, a kind of pick-up unit of the galvanometer motor linearity, by rotating galvanometer motor, galvanometer sector-meeting on galvanometer motor rotates along with galvanometer motor simultaneously, the hot spot of laser is gathered by laser facula harvester, draw the distance of laser facula movement, finally draw the anglec of rotation of galvanometer motor according to the displacement of laser facula, then draw the linearity of galvanometer motor according to the anglec of rotation of galvanometer motor.
embodiment four:
Fig. 9 shows the structural drawing of the pick-up unit of a kind of galvanometer motor linearity that fourth embodiment of the invention provides, and for convenience of explanation, illustrate only the part relevant to the embodiment of the present invention.
Zero setting unit 91, for being placed in zero-bit by galvanometer motor.
Because normally used galvanometer motor is when rotated for carrying out rotation forward or backwards in equilibrium position, the angle rotated is the angle in fixed range value, be galvanometer motor when galvanometer motor is placed in equilibrium position and be placed in zero point, simultaneously when galvanometer motor is placed in zero-bit, the camera lens of the catoptron of the galvanometer sheet of galvanometer motor and laser facula harvester, white balance plate and image capturing system can be placed on same parallel lines for the ease of calculating and measuring.
Laser point light source 92, for Emission Lasers, and is radiated at the laser that described laser point light source is launched on the galvanometer sheet of galvanometer motor.
The laser being launched fixing input path by fixing laser point light source is radiated on the galvanometer sheet of galvanometer motor, and the incident angle between setting laser and galvanometer sheet is α, and incident angle is angle formed by laser and galvanometer sheet normal.
Laser facula harvester 93, for gathering the hot spot after the lens reflecting that shakes of galvanometer motor.
Laser facula harvester comprises: catoptron, and reflect for carrying out laser the light path changing laser, wherein catoptron can adopt multiple; White balance plate, for receiving laser and present the hot spot of laser on white balance plate; Image capturing system, the laser facula presented for dialogue balance plate carries out image acquisition.By the hot spot of laser facula harvester after the lens reflecting that shakes of galvanometer motor, when gathering hot spot by laser facula harvester, in the light path of laser, receive laser by white balance plate thus on white balance plate, present the hot spot of laser, wherein for the ease of measuring, the volume reducing laser facula harvester can change the light path of laser by arranging multiple catoptron, as shown in Figure 3, reflection mirror array is formed by arranging multiple catoptron, make to shake the laser of lens reflecting along the default paths of catoptron, the light path of laser is changed by the multiple catoptrons arranged, the hot spot displacement being amplified in laser when galvanometer sheet rotates of vast scale can be reached simultaneously, when galvanometer motor rotates very little angle, through multiple reflections, the distance of laser spot center change obtains multistage amplification, finally can realize measuring comparatively accurately.
Instruction sending unit 94, makes galvanometer motor rotate for the instruction sending equal length interval to galvanometer motor.
The instruction at equal length interval is sent to galvanometer motor, rotating to be of galvanometer motor rotates according to instruction length, under the condition sending equal length instruction, galvanometer motor, in theory for rotating identical angle, wherein sends instruction all can send equal length interval at every turn instruction by motion control card control galvanometer motor.
Rotation angle computing unit 95, the hot spot for collecting according to laser facula harvester calculates anglec of rotation when rotating galvanometer motor each time.
According to the hot spot that laser facula harvester collects, geometric optical theory is utilized to calculate the angle that when rotating galvanometer motor each time, galvanometer sheet or galvanometer motor rotate, wherein rotation angle computing unit comprises: central point determining unit, hot spot for collecting according to laser facula harvester gets the central point of hot spot, carry out calculating by the central point getting hot spot and can improve precision further, the computing unit of rotation angle computing unit calculates anglec of rotation when rotating galvanometer motor each time according to the central point of hot spot.
Linearity computing unit 96, for drawing the linearity of galvanometer motor according to the described anglec of rotation.
Draw the linearity of galvanometer motor according to the anglec of rotation, and the galvanometer motor linear graph drawn and theoretical linear degree are contrasted.
The embodiment of the present invention by the way, a kind of pick-up unit of the galvanometer motor linearity, by rotating galvanometer motor, galvanometer sheet on galvanometer motor rotates along with galvanometer motor simultaneously, while galvanometer sheet rotates, galvanometer sector-meeting changes the light path of laser, the hot spot of laser is gathered by laser facula harvester, obtain the distance of glossing up movement, the final anglec of rotation drawing galvanometer motor according to the displacement of hot spot, the linearity of galvanometer motor is drawn according to the anglec of rotation of galvanometer motor, after detecting the linearity of galvanometer motor, the linearity of the linearity of galvanometer motor and theoretical galvanometer motor is contrasted, the performance of laser marking machine can be improved, meet the requirement of marking machine to accuracy of detection.
One of ordinary skill in the art will appreciate that all or part of step realized in above-described embodiment method is that the hardware that can carry out instruction relevant by program has come, described program can be stored in computer read/write memory medium, described storage medium, as ROM/RAM, disk, CD etc.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a detection method for the galvanometer motor linearity, is characterized in that, described method comprises the steps:
By laser point light source Emission Lasers, and the laser that described laser point light source is launched is radiated on the galvanometer sheet of galvanometer motor;
By the laser facula of laser facula harvester collection after the lens reflecting that shakes of galvanometer motor;
Sending identical instruction to galvanometer motor makes galvanometer motor rotate, and according to the angle of the hot spot calculating galvanometer motor rotation that laser facula harvester collects, draws the linearity of galvanometer motor.
2. the method for claim 1, is characterized in that, the described concrete steps by the hot spot of laser facula harvester collection after the lens reflecting that shakes of galvanometer motor comprise:
The laser through the lens reflecting that shakes of galvanometer motor is received by the white balance plate of laser facula harvester;
Laser facula harvester is captured in the light spot image that laser that white balance plate receives is formed.
3. method as claimed in claim 2, is characterized in that, the described white balance plate by laser facula harvester receives and also comprises before the laser step of the lens reflecting that shakes of galvanometer motor:
Form reflection mirror array by multiple catoptron, the laser of the lens reflecting that makes to shake is along the paths preset.
4. the method for claim 1, it is characterized in that, describedly send identical instruction to galvanometer motor galvanometer motor is rotated, the hot spot collected according to laser facula harvester calculates the angle that galvanometer motor rotates, and show that the concrete steps of the linearity of galvanometer motor comprise:
The instruction sending equal length interval to galvanometer motor makes galvanometer motor rotate;
The hot spot collected according to laser facula harvester calculates anglec of rotation when rotating galvanometer motor each time;
The linearity of galvanometer motor is drawn according to the described anglec of rotation.
5. method as claimed in claim 4, is characterized in that, the anglec of rotation concrete steps that the described hot spot collected according to laser facula harvester calculates when rotating galvanometer motor each time comprise:
The hot spot collected according to laser facula harvester gets the central point of hot spot;
Anglec of rotation when rotating galvanometer motor is each time calculated according to the central point of hot spot.
6. a pick-up unit for the galvanometer motor linearity, is characterized in that, described device comprises:
Laser point light source, for Emission Lasers, and is radiated on the galvanometer sheet of galvanometer motor by the laser that described laser point light source is launched;
Laser facula harvester, for gathering the laser facula after the lens reflecting that shakes of galvanometer motor;
Linearity calculation element, makes galvanometer motor rotate for sending identical instruction to galvanometer motor, according to the angle of the laser facula calculating galvanometer motor rotation that laser facula harvester collects, draws the linearity of galvanometer motor.
7. device as claimed in claim 6, it is characterized in that, described laser facula harvester specifically comprises:
Catoptron, reflects for carrying out laser the light path changing laser;
White balance plate, for receiving laser and presenting laser facula;
Image capturing system, the laser facula presented for dialogue balance plate carries out image acquisition.
8. device as claimed in claim 7, it is characterized in that, described catoptron specifically comprises:
Multiple catoptron, for forming reflection mirror array by multiple catoptron, the laser of the lens reflecting that makes to shake is along the paths preset.
9. device as claimed in claim 6, it is characterized in that, described linearity calculation element comprises:
Instruction sending unit, makes galvanometer motor rotate for the instruction sending equal length interval to galvanometer motor;
Rotation angle computing unit, the representation of laser facula for collecting according to laser facula harvester calculates anglec of rotation when rotating galvanometer motor each time;
Linearity computing unit, for drawing the linearity of galvanometer motor according to the described anglec of rotation.
10. device as claimed in claim 9, it is characterized in that, described rotation angle computing unit specifically comprises:
Central point determining unit, the hot spot for collecting according to laser facula harvester gets the central point of hot spot;
Computing unit, for calculating anglec of rotation when rotating galvanometer motor each time according to the central point of hot spot.
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| CN108007390A (en) * | 2017-11-17 | 2018-05-08 | 北京长峰科威光电技术有限公司 | A kind of pendulum mirror linearity test system based on CCD |
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| CN109827505B (en) * | 2019-03-26 | 2020-05-19 | 北京航空航天大学 | High-precision laser scanning galvanometer position sensor calibration system |
| CN112037232A (en) * | 2020-08-13 | 2020-12-04 | 歌尔光学科技有限公司 | Galvanometer testing method, device and computer readable storage medium |
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| CN109738795B (en) * | 2018-12-09 | 2023-06-09 | 西安航天精密机电研究所 | Multistage motor rotor magnetic pole detection device |
| CN109827505B (en) * | 2019-03-26 | 2020-05-19 | 北京航空航天大学 | High-precision laser scanning galvanometer position sensor calibration system |
| CN110412463A (en) * | 2019-07-30 | 2019-11-05 | 中国船舶重工集团公司第七0七研究所 | A kind of quick online detection device towards high-velocity scanning motor |
| CN112037232A (en) * | 2020-08-13 | 2020-12-04 | 歌尔光学科技有限公司 | Galvanometer testing method, device and computer readable storage medium |
| WO2024051319A1 (en) * | 2022-09-05 | 2024-03-14 | 华为技术有限公司 | Galvanometer performance detection system and method and storage medium |
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