CN104458112B - Pressure-detecting device and the admission pressure measure device using the pressure-detecting device - Google Patents
Pressure-detecting device and the admission pressure measure device using the pressure-detecting device Download PDFInfo
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- CN104458112B CN104458112B CN201410472084.9A CN201410472084A CN104458112B CN 104458112 B CN104458112 B CN 104458112B CN 201410472084 A CN201410472084 A CN 201410472084A CN 104458112 B CN104458112 B CN 104458112B
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- pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/24—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid specially adapted for measuring pressure in inlet or exhaust ducts of internal-combustion engines
Abstract
The present invention provides a kind of pressure-detecting device of the structure of the influence for the attachment that pressure value detected by pressure sensor is not easily susceptible to moisture and determines device using the admission pressure of the pressure-detecting device.In the pressure-detecting device (10) for determining device located at admission pressure, the detection space (15) surrounded by outside wall portions (14) is formed with housing (11), sensor incorporating section (17) is formed with above detection space (15), pressure sensor (21) is stored in sensor incorporating section (17).Formed below in sensor incorporating section (17) keeps out of the way space (18), keeps out of the way space (18) formation and keeps out of the way what is be recessed towards rear in recess.Enter the moisture of detection space (15) or be directed in the moisture that detection space (15) is produced and keep out of the way space (18), attachment of moisture can be prevented in the situation of sensor incorporating section (17).
Description
Technical field
The admission pressure of internal combustion engine is detected the present invention relates to a kind of pressure-detecting device and using the pressure-detecting device
Admission pressure determine device.
Background technology
Device is determined Patent Document 1 discloses a kind of admission pressure for being used to determine the air inflow of internal combustion engine.
The admission pressure determines device and is provided with the member as pressure-detecting device in the inside for being formed at the air chamber of housing
Part portion.The chip with Si barrier films is carried in the element portion.Entrance hole is formed with housing, and the admission pressure of internal combustion engine is from importing
Hole is imported to air chamber, and pressure is detected using the chip in the element portion is equipped on.The opening portion of entrance hole on housing
Around be formed with the convex portion as weir dike.
The admission pressure determines device in the winter time or cold district is in use, the moisture condensed in air chamber is hindered by teat
Gear, can prevent the moisture from entering entrance hole.
【Patent document 1】Japanese Unexamined Patent Publication 2000-186969 publications
Admission pressure described in patent document 1 is determined in device, and the convex portion for preventing moisture from entering entrance hole is formed at shell
Side, but do not take any countermeasure for moisture in the element portion as pressure-detecting device.
Element portion described in Fig. 1 and Fig. 2 of patent document 1 is that recess is formed with surface and is accommodated with the recess
Detect the structure of the chip of pressure signal.The recess for storing chip is only formed in element portion, beyond recess, surface is flat
Face.Due to do not take for will be attached to element portion surface on countermeasure from moisture to the regional guidance beyond the recess,
Therefore the moisture for being attached to element portion side is easily attached to the surface of the chip in the recess.
Especially in the technology described in patent document 1, the surface of the chip in recess towards gravity direction it is downward
Configuration, therefore on the surface of chip, moisture can continue to accumulate before the size that can be fallen by deadweight is grown to.Therefore it is difficult
The structure removed with the moisture on the surface that will attach to chip.
When attachment of moisture is in chip, the mass action of moisture leads to not carry out accurate air inlet in the barrier film of chip
Piezometry.
The content of the invention
The present invention proposes that its object is to provide a kind of moisture to be difficult to be attached to receipts in order to solve above-mentioned conventional problem
Receive the sensor incorporating section for having pressure sensor structure pressure-detecting device and using the pressure-detecting device air inlet pressure
Power determines device.
Pressure-detecting device of the present invention maintains pressure sensor, the spy of the pressure-detecting device in housing
Levy and be, the detection space surrounded around the housing is formed with by outside wall portions, the inside in the detection space is concave
Ground is formed with sensor incorporating section, and the pressure sensor is accommodated with the sensor incorporating section, in the detection space
Inside, the region beyond the sensor incorporating section, which is formed with, keeps out of the way space.
The pressure-detecting device of the present invention has been internally formed concave sensor in the detection space surrounded by outside wall portions
Incorporating section and in keeping out of the way space from the position that sensor incorporating section is deviateed.Enter the moisture or internally in detection space
The moisture of space generation can drop low-moisture influence and directly act in sensor incorporating section receipts easily to space transfer is kept out of the way
The probability for the pressure sensor received.
The present invention is configured to, and in the sensor incorporating section, the pressure sensor is covered by elastomer.And
And, it is preferred that the surface of the elastomer is recessed flexure plane, and the surface of elastomer forms opening to the sensor incorporating section
Peristoma portion.
When elastomer surface for recessed flexure plane and the surface be formed as with opening edge consecutive hours, be attached to elastomer
The moisture on surface readily flow to keep out of the way space, moisture is difficult to residue in the surface of elastomer.
It is currently preferred to be, it is described keep out of the way be spatially located at than sensor incorporating section deviation towards under gravity direction
The position of side.
Wherein, the downside for gravity direction, the downside on gravity direction are referred to " towards the downside of gravity direction ".
In the detection space surrounded by outside wall portions, by the way that space configuration will be kept out of the way in the position than sensor incorporating section on the lower, thus
The moisture detected in space can be guided to space is kept out of the way.
In the present invention, be configured to, it is described keep out of the way space and formed described keeping out of the way space and the biography than marking off
Keep out of the way towards what rear was recessed in recess the leading section of the inner wall part of sensor incorporating section.
In this case, it is preferred that the leading section of the inner wall part be located at than the outside wall portions leading section rearward
Position.
Above-mentioned by being formed keeps out of the way recess, the water tariff collection that thus will easily come from the surface flow of sensor incorporating section
In keeping out of the way space.
Or, in the present invention, circuit configuration is formed with the position deviateed from the sensor incorporating section of the housing
Portion, the space of keeping out of the way is formed in the front of the circuit configuration section.
It is characterised by moreover, the admission pressure of the present invention determines device, provided with being protected to the pressure-detecting device
The framework held, is formed with the air admission hole for importing the admission pressure of internal combustion engine to the detection space in the framework.
【Invention effect】
The present invention will go into detection space in the pressure-detecting device for being for example equipped on admission pressure measure device
Moisture or the moisture that produces is oriented to and keeps out of the way space in detection space, so as to easily prevent moisture to be attached directly to sensor receipts
Receive the situation in portion.
Due to making the countermeasure that moisture is kept out of the way from pressure sensor in pressure-detecting device formation, therefore with conventional like that to taking
The technology for carrying the countermeasure that the framework implementation of the admission pressure measure device of pressure-detecting device keeps out of the way moisture is compared, can be easy
Ground directly prevent moisture reach be accommodated with pressure sensor sensor incorporating section situation.
Therefore, it is difficult to make pressure detecting produce misoperation because of moisture, high-precision pressure detecting can be realized.
Brief description of the drawings
Fig. 1 is the stereogram of the pressure-detecting device of the first embodiment of the present invention.
Fig. 2 is the front view of the pressure-detecting device of first embodiment.
Fig. 3 is the sectional view obtained with Fig. 2 III-III line cuttings of the pressure-detecting device of first embodiment, and
And, it is to represent that pressure-detecting device is held in the sectional view of the state of the framework of admission pressure measure device.
Fig. 4 is the front view of the pressure-detecting device of second embodiment of the present invention.
Fig. 5 is the sectional view obtained with Fig. 4 V-V line cuttings of the pressure-detecting device of second embodiment.
【Symbol description】
1 admission pressure determines device
2 frameworks
4 air admission holes
10 pressure-detecting devices
11 housings
12 terminal boards
14 outside wall portions
14a leading sections
15 detection spaces
16 inner wall parts
16a leading sections
16b right parts
16c left parts
17 sensor incorporating sections
18 keep out of the way space
21 pressure sensors
22 IC package bodies
23 elastomers
110 pressure-detecting devices
111 housings
114 outside wall portions
116 inner wall parts
117 sensor incorporating sections
118 keep out of the way space
119 circuit configuration sections
Embodiment
The pressure-detecting device 10 of the first embodiment of the present invention is shown into Fig. 3 in Fig. 1, figure 3 illustrates
The admission pressure for being equipped with pressure-detecting device 10 determines a part for device 1.In the various figures, X1 directions are front, X2 directions
For rear, Y1 directions are right, and Y2 directions are left, and Z1 directions are top, and Z2 directions are lower section.
Admission pressure shown in Fig. 3 determines device 1 and is attached to the internal combustion engine being assemblied on cart, in framework 2 together
It is equipped with pressure-detecting device 10 and engine load sensor.In framework 2 it is integrally formed with air inlet pipe 3, internal combustion engine enters
Atmospheric pressure is applied from the air admission hole 4 inside air inlet pipe 3 to pressure-detecting device 10.
As shown in Figure 1 to Figure 3, housing 11 is provided with pressure-detecting device 10.Housing 11 is by PPS (polyphenylene sulfide) resin shape
Into.Three terminal boards 12 and two plate portions 13 are embedded with housing 11.Terminal board 12 and plate portion 13 are copper coin.
Housing 11, terminal board 12 and plate portion 13 are insert-molded method and integrated by so-called.In the manufacturing process,
It is formed with terminal board 12 on continuous first band (hoop material) at regular intervals in the Y direction, and with first
Plate portion 13 is formed with regular intervals on the second band that band abreast extends along Y-direction.By terminal board 12 and plate portion 13
It is arranged in the die cavity of shaping dies, Shaped shell 11 is carried out and by housing 11, terminal board to type intracavitary administration PPS molten resin
12 and the integration of plate portion 13.Afterwards, terminal board 12 and plate portion 13 are made respectively from strip material separated.
As shown in figure 1, being integrally formed with (X1 directions) prominent outside wall portions 14 forwards in housing 11.The shape of outside wall portions 14
As drum, in housing 11, the interior zone surrounded by outside wall portions 14 turns into detection space 15.As shown in figure 3, entering
Atmospheric pressure is determined in device 1, is internally provided with printed wiring substrate 6 in framework 2, the terminal board 12 of pressure-detecting device 10 is worn
The through hole of printed wiring substrate 6 is crossed, and is fixed on by leg 7 welding disk on the surface of printed wiring substrate 6.Moreover, outer wall
The front end face 14a in portion 14 is close to the recess 5 of the inner surface of framework 2, has passed through the admission pressure of air admission hole 4 to detection space 15
Apply.
As depicted in figs. 1 and 2, inner wall part 16 has been internally formed it in detection space 15.The front end face 16a of inner wall part 16 with
The front end face 14a of outside wall portions 14 is retreated compared to (bottom side in detection space 15) rearward.As shown in Fig. 2 inner wall part 16 is curved
Song is formed into drum, and right part 16b links with outside wall portions 14, and left part 16c and outside wall portions 14 are continuous.In right part
Between 16b and left part 16c (scope α), inner wall part 16 is integrated with outside wall portions 14, and actual inner wall part 16 is only limitted to scope α
Region in addition is β scope.
In housing 11, sensor incorporating section 17 is formed with concavely in the region surrounded by inner wall part 16.Such as Fig. 2
Shown, opening shape when sensor incorporating section 17 is from front is circle.Also as shown in figure 3, in sensor incorporating section 17
Bottom be fixed with pressure sensor 21, be built-in with the IC package body 22 of integrated circuit (ASIC).
Pressure sensor 21 is MEMS (Micro Electro Mechanical Systems) structure, with bearing pressure
Diaphragm portion, detect diaphragm portion deformation pressure drag component or the strain test element such as piezoelectric element.In IC package body 22
Integrated circuit is built-in with the amplifier being amplified to the detection output from pressure sensor 21, temperature sensor and is based on
The temperature gone out by the temperature sensor measurement carries out temperature-compensation circuit of temperature-compensating etc..Pressure sensor 21 and IC package
Body 22 is connected up by wire bonding, and the diagram of wire bonding is eliminated in the various figures.
In sensor incorporating section 17, IC package body 22 is located at upside (Z1 sides), and pressure sensor 21 is located at downside (Z2
Side).In sensor incorporating section 17, pressure sensor 21 is disposed in proximity to the position of the inner surface of inner wall part 16.Passing through pressure
On the center line O at the center of force snesor 21, the opening size of sensor incorporating section 17 be set to L1 and pressure sensor 21 with it is interior
When the distance of wall portion 16 is set to L2, less than 1/3 is turned into than (L2/L1).
As shown in figure 3, the pressure sensor 21 and IC package body 22 fixed in the bottom of sensor incorporating section 17 are by elasticity
Body 23 is covered.Elastomer 23 is gelatinous viscoelastic body, e.g. gelatinous silicone resin or fluororesin.Elastomer 23 leads to
Cross to supply liquid resin material is solidified to form the resin material to the recess of sensor incorporating section 17, therefore its
Surface 23a turns into recessed flexure plane.
During liquid resin material being supplied in the inside to sensor incorporating section 17 and making its solidification, resinous wood
The surface of material continuous opening edge (the front end face 16a of inner wall part 16 inner side to sensor incorporating section 17 because of surface tension
Edge or corner).Therefore, as shown in Fig. 3 E portions, the surface 23a as recessed flexure plane of elastomer 23 is formed continuously sensing
The opening edge (the front end face 16a of inner wall part 16 interior side edge part or corner) of device incorporating section 17.That is, surface 23a and front end face
16a is continuous in the way of not forming difference of height at interface.
Therefore, the surface 23a moisture of elastomer 23 is attached to easily towards front end face 16a outflows.
Inside in the detection space 15 of housing 11, the region beyond sensor incorporating section 17, which is formed, keeps out of the way space 18.
Formed as shown in figure 3, keeping out of the way space 18 than forming the described interior of sensor incorporating section 17 (marking off sensor incorporating section 17)
The front end face 16a of wall portion 16 keeps out of the way in recess towards what rear (X2 directions) was recessed.Formed as shown in Fig. 2 keeping out of the way space 18
Between outside wall portions 14 and inner wall part 16, and formed in the right part 16b to left part 16c linked from inner wall part 16 and outside wall portions 14
In the range of.
As shown in Fig. 2 from range betas of the right part 16b of inner wall part 16 to left part 16c relative to cylindric inner wall part
16 center be sensor incorporating section 17 center more than the 180 degree in the range of formed.
As shown in Figure 1 to Figure 3, when admission pressure measure device 1 is arranged at into the internal combustion engine of cart etc., in pressure inspection
Survey in device 10, terminal board 12 is set upward (towards Z1 directions), in the detection space 15 surrounded by outside wall portions 14, is passed
Sensor incorporating section 17 be located at upside (Z1 sides), keep out of the way space 18 be located at be inclined to than sensor incorporating section 17 towards the side of gravity i.e.
The position of downside (Z2 sides).
In admission pressure determines device 1, the admission pressure of internal combustion engine is imported from the air admission hole 4 of framework 2, by admission pressure
Apply to the detection space 15 of pressure-detecting device 10.Admission pressure is via gelatinous elastomer 23 by pressure sensor 21
Detection, integrated circuit of the detection output in IC package body 22 carries out electric treatment.
The moisture that contains in the air inlet of internal combustion engine, the condensation produced by temperature difference etc. are attached to detection space 15 sometimes
It is internal.Due to elastomer 23 surface 23a be recessed flexure plane, even if therefore the attachment of moisture in the elasticity of sensor incorporating section 17
The surface 23a of body 23, can also fall along surface 23a so that moisture, which is easily accessible, keeps out of the way space 18 because of deadweight.Elastomer
23 surface 23a is continuous due to the leading section 16a without height poorly with inner wall part 16, therefore is attached to surface 23a moisture
Flowed on the 23a of surface and reach front end face 16a, and then can kept out of the way in space 18.
It is additionally, since to keep out of the way space 18 and formed in the front end face 16a than inner wall part 16 and keeps out of the way recess towards what rear was recessed
It is interior, thus enter keep out of the way space 18 moisture will not to elastomer 23 surface 23a adverse current.
Formed as shown in Fig. 2 keeping out of the way space 18 in the downside of cylindric inner wall part 16 in range beta more than 180 degree.
Therefore, it is possible to ensure to detect the volume for keeping out of the way space 18 in space 15 enough greatly, make the moisture for entering detection space 15
Or easily rest on the region with the discontiguous downside in sensor incorporating section 17 in the moisture that detection space 15 is produced.Its result
It is that moisture is difficult to be attached to the preceding surface 23a of elastomer 23, easily prevents pressure sensor 21 from being made this by the pressure of moisture
The pressure value for detect produces phenomenon as error.
The pressure-detecting device 110 of second embodiment of the present invention shown in Fig. 4 and Fig. 5 is with terminal board 112 under
The mode of side is fixed on admission pressure and determined in the framework 2 of device 1.The outside wall portions 114 of drum are towards front and a bodily form
Into in the housing 111 of pressure-detecting device 110, so as to form the detection space 115 surrounded by outside wall portions 114.
Upper section in detection space 115 is formed with sensor incorporating section 117, and the sensor incorporating section 117 is formed as
Concavity, pressure sensor 21 is fixed with the bottom of sensor incorporating section 117.Sensor incorporating section 117 is sensed by overburden pressure
The gelatinous elastomer 23 of device 21 is filled, and the surface 23a of elastomer 23 is recessed flexure plane.In this case, it is also elastomer
It is poorly continuous that 23 surface 23a does not form height because of surface tension with the front end face 116a of inner wall part 116.
As shown in Figure 4 and Figure 5, it is being inclined in housing 111 and than sensor incorporating section 117 downside towards the direction of gravity
Position be formed with circuit configuration section 119.As shown in figure 5, circuit configuration section 119 is concave in the bottom in detection space 115
Formed, IC package body 22 is fixed with the bottom of circuit configuration section 119.Also, the recess of IC package body 22 is accommodated with by resin
Material 119b occlusions.
The preceding surface 119a of circuit configuration section 119 is substantially flat shape.The preceding surface 119a is located at marking off biography
In the front end face 116a same planes of the inner wall part 116 of sensor incorporating section 117.
In the detection space 115 surrounded by outside wall portions 114, up pressure sensor 21, form in downside and receive
Receive the circuit configuration section 119 for having IC package body 22, therefore in detection space 115, in the preceding surface 119a of circuit configuration section 119
Front region be formed with internal volume greatly keep out of the way space 118.
As shown in figure 5, keeping out of the way space 118 forms interior table in the lower edge from sensor incorporating section 117 to outside wall portions 114
Untill the bottom in face in the range of Lb.The center of pressure sensor 21 and the top of the inner surface of outside wall portions 114
The distance between the ratio between Lc and detection opening size La of the space about 115 (Lc/La) be less than 1/4, apart from Lc and distance
The ratio between Lb (Lc/Lb) is less than 1/3.
In the pressure-detecting device 110 of second embodiment, the circuit configuration section 119 of IC package body 22 is being accommodated with
Front be formed with inner capacities greatly keep out of the way space 118, therefore enter the moisture of the inside in detection space 115 or in detection space
115 moisture produced, which are directed to, keeps out of the way space 118, and moisture is difficult to be attached to the preceding surface 23a of elastomer 23.
Due to being only accommodated with pressure sensor 21, therefore the face shared by sensor incorporating section 117 in sensor incorporating section 117
Product reduces, so that the inside in detection space 115, and it is big that region beyond the sensor incorporating section 117 forms inner capacities
Keep out of the way space 118.
The recessed flexure plane for being attached to moisture from the surface 23a of elastomer 23 of sensor incorporating section 117 flows to inner wall part 116
Leading section 116a, and directly flow out to keeping out of the way in space 118, therefore moisture is difficult to residue in the preceding surface 23a of elastomer 23.
Therefore, easily prevent from turning into showing for wrong value because of the presence of moisture by the pressure value that pressure sensor 21 is detected
As.
Claims (8)
1. a kind of pressure-detecting device, it maintains pressure sensor in housing,
The pressure-detecting device is characterised by,
The detection space surrounded around the housing is formed with by outside wall portions, the concave landform in inside in the detection space
Into there is sensor incorporating section, the pressure sensor is accommodated with the sensor incorporating section,
Inside in the detection space, the region beyond the sensor incorporating section, which is formed with, keeps out of the way space,
In the sensor incorporating section, the pressure sensor is covered by elastomer,
The surface of the elastomer is recessed flexure plane, and the surface of elastomer is formed to the opening edge of the sensor incorporating section,
It is described to keep out of the way the position being spatially located at than sensor incorporating section deviation towards the downside of gravity direction,
The surface of the elastomer does not have with marking off the front end face of the inner wall part for keeping out of the way space and the sensor incorporating section
There is height poorly continuous.
2. pressure-detecting device according to claim 1, wherein,
Circuit configuration section is formed with the position deviateed from the sensor incorporating section of the housing, the space of keeping out of the way is formed
In the front of the circuit configuration section.
3. pressure-detecting device according to claim 1, wherein,
The space of keeping out of the way is formed in the range of the downside of the inner wall part is more than 180 degree, and the inner wall part is cylindrical shape.
4. a kind of pressure-detecting device, it maintains pressure sensor in housing,
The pressure-detecting device is characterised by,
The detection space surrounded around the housing is formed with by outside wall portions, the concave landform in inside in the detection space
Into there is sensor incorporating section, the pressure sensor is accommodated with the sensor incorporating section,
Inside in the detection space, the region beyond the sensor incorporating section, which is formed with, keeps out of the way space,
The space of keeping out of the way is formed in the leading section than marking off the inner wall part for keeping out of the way space and the sensor incorporating section
Keep out of the way towards what rear was recessed in recess,
In the sensor incorporating section, the pressure sensor is covered by elastomer,
The surface of the elastomer is recessed flexure plane, and the surface of elastomer is formed to the opening edge of the sensor incorporating section,
The surface of the elastomer and the front end face of the inner wall part are poorly continuous without height.
5. pressure-detecting device according to claim 4, wherein,
Position of the leading section of the inner wall part positioned at the leading section than the outside wall portions rearward.
6. pressure-detecting device according to claim 4, wherein,
Circuit configuration section is formed with the position deviateed from the sensor incorporating section of the housing, the space of keeping out of the way is formed
In the front of the circuit configuration section.
7. pressure-detecting device according to claim 4, wherein,
The inner wall part is cylindrical shape, and the space of keeping out of the way is formed in the range of the downside of the inner wall part is more than 180 degree.
8. a kind of admission pressure determines device, it is characterised in that
Provided with the framework kept to the pressure-detecting device described in claim 1, it is formed with internal combustion engine in the framework
The air admission hole that is imported to the detection space of admission pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710204865.3A CN107091712B (en) | 2013-09-18 | 2014-09-16 | Pressure detection device and intake pressure measurement device using same |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-192828 | 2013-09-18 | ||
| JP2013192828A JP6275431B2 (en) | 2013-09-18 | 2013-09-18 | Pressure detecting device and intake pressure measuring device using the same |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710204865.3A Division CN107091712B (en) | 2013-09-18 | 2014-09-16 | Pressure detection device and intake pressure measurement device using same |
Publications (2)
| Publication Number | Publication Date |
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| CN104458112A CN104458112A (en) | 2015-03-25 |
| CN104458112B true CN104458112B (en) | 2017-09-01 |
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| CN201710204865.3A Active CN107091712B (en) | 2013-09-18 | 2014-09-16 | Pressure detection device and intake pressure measurement device using same |
| CN201410472084.9A Active CN104458112B (en) | 2013-09-18 | 2014-09-16 | Pressure-detecting device and the admission pressure measure device using the pressure-detecting device |
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| CN201710204865.3A Active CN107091712B (en) | 2013-09-18 | 2014-09-16 | Pressure detection device and intake pressure measurement device using same |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6461741B2 (en) * | 2015-07-30 | 2019-01-30 | アルプス電気株式会社 | Sensor package |
| JP6612682B2 (en) * | 2016-06-03 | 2019-11-27 | パラマウントベッド株式会社 | Pressure detecting device and biological information measuring system |
| JP6584618B2 (en) * | 2018-10-03 | 2019-10-02 | アルプスアルパイン株式会社 | Sensor package |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP6275431B2 (en) | 2018-02-07 |
| JP2015059798A (en) | 2015-03-30 |
| CN107091712B (en) | 2020-03-10 |
| CN104458112A (en) | 2015-03-25 |
| CN107091712A (en) | 2017-08-25 |
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