CN104451853B - A kind of finishing method of nickel capillary inner surface - Google Patents
A kind of finishing method of nickel capillary inner surface Download PDFInfo
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- CN104451853B CN104451853B CN201410620583.8A CN201410620583A CN104451853B CN 104451853 B CN104451853 B CN 104451853B CN 201410620583 A CN201410620583 A CN 201410620583A CN 104451853 B CN104451853 B CN 104451853B
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- nickel
- peristaltic pump
- polishing solution
- chemical polishing
- capillary inner
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Abstract
A kind of finishing method of nickel capillary inner surface, it mainly first prepares chemical polishing solution, the mass percent of its chemical composition is: oxidant 0.06 0.12%, nickel ion complexing agent 0.06 0.12% or add surfactant 0.005 0.01% or viscosity additive 0.05 0.1%, remaining be distilled water, the pH value being regulated chemical polishing solution by dilute sulfuric acid or phosphoric acid,diluted is 1.5 2.5;Then the one end of the peristaltic pump tube being connected with peristaltic pump is connected with nickel capillary, the other end of this peristaltic pump tube is put in the container equipped with above-mentioned chemical polishing solution, the flow of regulation liquid peristaltic pump is 80 220 milliliters per minute, after polishing reaction 1 2.5 minutes, clean nickel capillary inner surface more than 1 minute with distilled water, dry.The present invention can obviously reduce the roughness of nickel capillary inner surface, and its roughness can reach less than 0.6 micron.
Description
Technical field
The present invention relates to the finishing method of a kind of metal capillary.
Background technology
Nickel is that a kind of matter is hard, high temperature resistant and have ferromagnetic metallic element.It also has good mechanical strength
And ductility, stable chemical nature, there is the features such as the most oxidizable and anticorrosive, so nickel is
A kind of very important raw metal.Nickel petrochemical plant, industry equipment, automobile, electronic equipment, household electrical appliances,
Petroleum refining is quite varied with the application of the aspects such as communication apparatus, can be used to manufacture stainless steel, electroplate,
Special steel, nonferrous alloy, magnetic material, catalyst, battery etc..
Along with the progressively expansion of nickel material application, the shape of nickel material be it is also proposed new demand, therefore nickel hair
The application of tubule and nickel alloy capillary is also progressively increasing.At microelectronic, for microelectronic component
Nickel capillary in terms of encapsulation, it is desirable to its inside surface roughness is the lowest more good, to prevent microelectronic component at dress
Entering nickel capillary Nei Shiyin to produce excessive resistance and damage, the smooth nickel capillary of inner surface is at radio tube
Also important application is had with filament encapsulation aspect;At optical field, due to nickel have good physical property and
Stable chemical property, nickel capillary can be as the base tube of hollow-core fiber, and its inside surface roughness is the least,
The propagation performance of laser is the best, and uses nickel capillary to replace traditional quartz glass capillary to become
For improving hollow-core fiber mechanics and the new trend of calorifics reliability in the world.At chemical field, nickel pipe can be used as
Sensor in Type Hydrogen Meter;At medical domain, Ti-Ni marmem capillary is used for cardiovascular expansion
Opening on the medicine equipments such as support, the micro-pipe of titanium nickel is used for making active endoscope, catheter etc..Nickel capillary
Application so extensive, and a lot of field is more and more higher to the roughness requirements of its inner surface, and on the market
The nickel capillary that industrialized production obtains typically has bigger roughness, it is difficult to meet these application needs.
Therefore nickel capillary inner surface is carried out effective polishing the most urgent.
At present, the glossing of sheet metal surface is the most ripe, and has obtained the widest in the industrial production
General application.But for metal capillary, due to its internal elongate, it is impossible to complete polishing on polishing machine
Process, faint without the polishing particles of impressed pressure and the rubbing action of metallic interior surface, so can not be effectively
Polishing metal capillary inner surface, and up to the present in document about the polishing of metal capillary inner surface
Also rarely has report.
Summary of the invention
It is an object of the invention to provide a kind of nickel capillary that can effectively reduce nickel capillary inner surface roughness
The finishing method of pipe internal surface.The present invention mainly makes chemical polishing solution pass through with the form of high-voltage pulse fluid
In nickel capillary, nickel capillary inner surface is polished.
The finishing method of the present invention is as follows:
(1) interior diameter of nickel capillary to be polished is 0.05-4 millimeter, wall thickness 0.01-2 millimeter;
(2) preparation chemical polishing solution:
The mass percent of the chemical composition of chemical polishing solution is: oxidant 0.06-0.12%, nickel ion are complexed
Agent 0.06-0.12% or add surfactant 0.005-0.01% or add viscosity additive 0.05-0.1, its
Remaining is distilled water, and the pH value being regulated chemical polishing solution by dilute sulfuric acid or phosphoric acid,diluted is 1.5-2.5;
The best in quality percentage of the chemical composition of described chemical polishing solution is: oxidant 0.08-0.1%, nickel from
Sub-complexing agent 0.08-0.1%, surfactant 0.005-0.01%, viscosity additive 0.05-0.1, remaining for steam
Distilled water, the optimal pH being regulated chemical polishing solution by dilute sulfuric acid or phosphoric acid,diluted is 1.8-2.2;
Described oxidant is persulfate, and described nickel ion complexing agent is lactic acid, and described surfactant is ten
Dialkyl benzene sulfonic acids sodium, described viscosity modifier is glycerine.
(3) finishing method:
First the greasy dirt of nickel capillary inner surface, the one end of peristaltic pump tube being then connected are removed with peristaltic pump
Being connected with nickel capillary, the other end of this peristaltic pump tube is put in the container equipped with above-mentioned chemical polishing solution, OK
Becoming the path of a fluid, the flow of regulation liquid peristaltic pump is that 80-220 milliliter is per minute, polishing reaction 1-2.5
After minute, clean nickel capillary inner surface more than 1 minute with distilled water, dry.
First polishing fluid is table in the oxidizing capillary in polishing fluid with the reaction of nickel capillary inner surface
The nickel in face, generates one layer of oxide, this oxide and then dissolve in an acidic solution.Due to the oxidation generated
Thing is different at the concavo-convex thickness not existed together of nickel capillary inner surface, and the speed dissolved the most in an acidic solution
Rate is different, makes the reaction of bossing have precedence over recessed part, and being continuously generated with molten by oxide-film
Solution gradually completes Micro-leveling effect, and then reduces surface roughness.
In order to accelerate the chemical reaction of metal surface, improve overall reaction rate, with the addition of in polishing fluid nickel from
Sub-complexing agent.Complexing agent can generate stable complexing product with nickel ion, and flows away with polishing waste liquid, also
Nickel ion can be avoided to adsorb on capillary inner surface.Surfactant has suction-operated, can adsorb
Metal surface, adds a small amount of surfactant and contributes to the polishing of nickel capillary inner surface, it is also possible to as
Brightener uses, even if the metal surface after Pao Guang is glossy.
In polishing fluid, add a small amount of viscosity modifier may also contribute to the polishing of nickel capillary inner surface, it
Can form one layer of adhesive film at inner surface, due to the effect of fluid flowing, this adhesive film is concavo-convex not at inner surface
The thickness existed together is different, and i.e. the adhesive film thickness of boss is less than the thickness of recessed position adhesive film, so
One, reactant is more than the diffusion rate at recessed position with generating the product diffusion rate at boss, enters
And cause boss to have precedence over recessed position and react with polishing fluid.
The present invention compared with prior art has the advantage that
Technique is simple and convenient to operate, efficiency high, it is possible to polishing metal capillary surface effectively, it is coarse
Degree can reach less than 0.6 micron.
Specific embodiment:
Embodiment 1
Configuration chemical polishing solution (mass percent): potassium peroxydisulfate 0.1%, lactic acid 0.1%, surplus are distillation
Water, using phosphoric acid,diluted regulation pH value of solution is 2.
First remove interior diameter be 1.3 millimeters, wall thickness be 0.1 millimeter, the nickel capillary inner surface of long 2 meters
Greasy dirt, is then connected the one end of the peristaltic pump tube being connected with peristaltic pump with nickel capillary, this peristaltic pump tube
The other end is put in the large beaker equipped with above-mentioned chemical polishing solution, goes into the path of a fluid.Regulation liquid
The flow of peristaltic pump is 120 milliliters per minute, starts polishing reaction, after 1.5 minutes, uses substantial amounts of distilled water
Clean nickel capillary inner surface 1 minute, dry.Survey its roughness: nickel capillary inner surface profile arithmetic is put down
All deviations are reduced to 0.5224 micron by 4.0214 microns.
Embodiment 2
Configuration chemical polishing solution (mass percent): potassium peroxydisulfate 0.1%, lactic acid 0.09%, surplus are for steaming
Distilled water, using phosphoric acid,diluted regulation pH value of solution is 2.2.
First remove interior diameter be 2 millimeters, wall thickness be 0.2 millimeter, the oil of the nickel capillary inner surface of long 5 meters
Dirt, is then connected the one end of the peristaltic pump tube being connected with peristaltic pump with nickel capillary, this peristaltic pump tube another
One end is put in the large beaker equipped with above-mentioned chemical polishing solution, goes into the path of a fluid.Regulation liquid is compacted
The flow of dynamic pump is 140 milliliters per minute, starts polishing reaction, after 1.5 minutes, clear with substantial amounts of distilled water
Wash nickel capillary inner surface more than 1.5 minutes, dry.Survey its roughness: nickel capillary inner surface profile arithmetic
Average deviation is reduced to 0.5244 micron by 4.2213 microns.
Embodiment 3
Configuration chemical polishing solution (mass percent): potassium peroxydisulfate 0.1%, lactic acid 0.1%, glycerine 0.1%,
Surplus is distilled water, and using phosphoric acid,diluted regulation pH value of solution is 2.2.
First remove interior diameter be 1.8 millimeters, wall thickness be 0.15 millimeter, the nickel capillary inner surface of long 4.4 meters
Greasy dirt, then the one end of the peristaltic pump tube being connected with peristaltic pump is connected with nickel capillary, this peristaltic pump tube
The other end put in the large beaker equipped with above-mentioned chemical polishing solution, go into the path of a fluid.Regulation liquid
The flow of body peristaltic pump is 160 milliliters per minute, starts polishing reaction, after 1.3 minutes, uses substantial amounts of distillation
Water cleans nickel capillary inner surface 70 seconds, dries.Survey its roughness: nickel capillary inner surface profile arithmetic
Average deviation is reduced to 0.5102 micron by 4.4162 microns.
Embodiment 4
Configuration chemical polishing solution (mass percent): potassium peroxydisulfate 0.08%, lactic acid 0.08%, dodecyl
Benzene sulfonic acid sodium salt 0.01%, surplus are distilled water, and using phosphoric acid,diluted regulation pH value of solution is 1.8.
First remove interior diameter be 1.2 millimeters, wall thickness be 0.08 millimeter, the nickel capillary inner surface of long 2.5 meters
Greasy dirt, then the one end of the peristaltic pump tube being connected with peristaltic pump is connected with nickel capillary, this peristaltic pump tube
The other end put in the large beaker equipped with above-mentioned chemical polishing solution, go into the path of a fluid.Regulation liquid
The flow of body peristaltic pump is 140 milliliters per minute, starts polishing reaction, after 2 minutes, uses substantial amounts of distilled water
Clean nickel capillary inner surface 80 seconds, dry.Survey its roughness: nickel capillary inner surface profile arithmetic is put down
All deviations are reduced to 0.5268 micron by 4.3246 microns.
Embodiment 5
Configuration chemical polishing solution (mass percent): potassium peroxydisulfate 0.08%, lactic acid 0.08%, dodecyl
Benzene sulfonic acid sodium salt 0.008%, glycerine 0.15%, surplus are distilled water, use phosphoric acid,diluted to regulate pH value of solution and are
2.2。
First remove interior diameter be 1 millimeter, wall thickness be 0.05 millimeter, the nickel capillary inner surface of long 0.5 meter
Greasy dirt, then the one end of the peristaltic pump tube being connected with peristaltic pump is connected with nickel capillary, this peristaltic pump tube
The other end put in the large beaker equipped with above-mentioned chemical polishing solution, go into the path of a fluid.Regulation liquid
The flow of body peristaltic pump is 130 milliliters per minute, starts polishing reaction, after 2 minutes, uses substantial amounts of distilled water
Clean nickel capillary inner surface 65 seconds, dry.Survey its roughness: nickel capillary inner surface profile arithmetic is put down
All deviations are reduced to 0.5001 micron by 4.3116 microns.
Embodiment 6
Configuration chemical polishing solution (mass percent): potassium peroxydisulfate 0.08%, lactic acid 0.09%, dodecyl
Benzene sulfonic acid sodium salt 0.01%, glycerine 0.2%, surplus are distilled water, and using phosphoric acid,diluted regulation pH value of solution is 2.
First remove interior diameter be 0.8 millimeter, wall thickness be 0.05 millimeter, the nickel capillary inner surface of long 2 meters
Greasy dirt, then the one end of the peristaltic pump tube being connected with peristaltic pump is connected with nickel capillary, this peristaltic pump tube
The other end put in the large beaker equipped with above-mentioned chemical polishing solution, go into the path of a fluid.Regulation liquid
The flow of body peristaltic pump is 150 milliliters per minute, starts polishing reaction, after 1.8 minutes, uses substantial amounts of distillation
Water cleans nickel capillary inner surface 1 minute, dries.Survey its roughness: nickel capillary inner surface profile arithmetic
Average deviation is by 4.4186 microns to 0.5029 microns.
Claims (3)
1. the finishing method of a nickel capillary inner surface, it is characterised in that:
(1) interior diameter of nickel capillary to be polished is 0.05-4 millimeter, wall thickness 0.01-2 millimeter;
(2) preparation chemical polishing solution:
The mass percent of the chemical composition of chemical polishing solution is: oxidant 0.06-0.12%, nickel ion are complexed
Agent 0.06-0.12%, surfactant 0.005-0.01%, viscosity additive 0.05-0.1, remaining be distilled water,
The pH value being regulated chemical polishing solution by dilute sulfuric acid or phosphoric acid,diluted is 1.5-2.5;
(3) finishing method:
First the greasy dirt of nickel capillary inner surface, the one end of peristaltic pump tube being then connected are removed with peristaltic pump
Being connected with nickel capillary, the other end of this peristaltic pump tube is put in the container equipped with above-mentioned chemical polishing solution, adjusts
The flow of joint liquid peristaltic pump is that 80-220 milliliter is per minute, after polishing is reacted 1-2.5 minute, clear with distilled water
Wash nickel capillary inner surface more than 1 minute, dry.
The finishing method of nickel capillary inner surface the most according to claim 1, it is characterised in that: described
Oxidant is persulfate, and described nickel ion complexing agent is lactic acid, and described surfactant is detergent alkylate
Sodium sulfonate, described viscosity modifier is glycerine.
The finishing method of nickel capillary inner surface the most according to claim 1 and 2, it is characterised in that:
The best in quality percentage of the chemical composition of described chemical polishing solution is: oxidant 0.08-0.1%, nickel ion network
Mixture 0.08-0.1%, surfactant 0.005-0.01%, viscosity additive 0.05-0.1, remaining be distilled water,
The optimal pH being regulated chemical polishing solution by dilute sulfuric acid or phosphoric acid,diluted is 1.8-2.2.
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CN201410620583.8A CN104451853B (en) | 2014-11-06 | 2014-11-06 | A kind of finishing method of nickel capillary inner surface |
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CN201410620583.8A CN104451853B (en) | 2014-11-06 | 2014-11-06 | A kind of finishing method of nickel capillary inner surface |
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CN104451853B true CN104451853B (en) | 2016-08-24 |
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CN106826407A (en) * | 2017-01-18 | 2017-06-13 | 深圳中科康森瑞特科技发展有限公司 | A kind of metal capillary inner surface magnetic grinding polishing method and device |
CN115056129B (en) * | 2022-06-30 | 2024-01-23 | 深圳市恒永达科技股份有限公司 | Capillary particulate fluid polishing system, method and computer readable storage medium |
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JP2654185B2 (en) * | 1989-06-26 | 1997-09-17 | 住友電気工業株式会社 | Glass tube for glass capillary and method for producing the same |
US6630433B2 (en) * | 1999-07-19 | 2003-10-07 | Honeywell International Inc. | Composition for chemical mechanical planarization of copper, tantalum and tantalum nitride |
CN2405942Y (en) * | 1999-12-29 | 2000-11-15 | 中国科学院长春应用化学研究所 | Metal capillary tube chemical-polishing device |
US20070068901A1 (en) * | 2005-09-29 | 2007-03-29 | Wang Yuchun | Composition and method for enhancing pot life of hydrogen peroxide-containing CMP slurries |
EP1946886B1 (en) * | 2007-01-19 | 2010-03-17 | Fujitsu Limited | Capillary, capillary polishing method, and capillary polishing apparatus |
CN201020653Y (en) * | 2007-04-29 | 2008-02-13 | 西北有色金属研究院 | Internal wall surface polishing device for small diameter thin wall metal pipes |
CN102211295B (en) * | 2011-05-20 | 2013-04-24 | 公安部第一研究所 | Device and method for magnetorheologically polishing inner wall of capillary tube |
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