CN104451582A - Conductive zirconia revolving target and preparation method thereof - Google Patents
Conductive zirconia revolving target and preparation method thereof Download PDFInfo
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- CN104451582A CN104451582A CN201410841672.5A CN201410841672A CN104451582A CN 104451582 A CN104451582 A CN 104451582A CN 201410841672 A CN201410841672 A CN 201410841672A CN 104451582 A CN104451582 A CN 104451582A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Abstract
The invention provides a conductive zirconia revolving target. The conductive zirconia revolving target is composed of ZrOx and has a density of 5.18-5.8 g/cm3, wherein X is larger than or equal to 1.2 and smaller than or equal to 1.8. The invention also provides a preparation method of the conductive zirconia revolving target. The method comprises preparing zirconia spraying powder; processing a spray substrate; spraying a priming coat; spraying a zirconia coating onto the spray substrate through a plasma spraying process. The conductive zirconia revolving target is compact in structure, uniform in composition, high in electrical conductivity, crackless and free from restriction to spray length and diameter can reach a thickness of 13 mm and a density of 5.18-5.8 g/cm3. The preparation method of the conductive zirconia revolving target is simple and convenient in production process and relatively low in cost.
Description
Technical field
The present invention relates to technical field of material, relate to a kind of electric conductive oxidation zirconium rotary target material and preparation method thereof specifically.
Background technology
Magnetron sputtering is generally divided into two kinds: d.c. sputtering and radio-frequency sputtering, and wherein d.c. sputtering is merely able to sputter electro-conductive material, but its equipment principle is simple, and when splash-proofing sputtering metal, its speed is also fast; And the use range of radio-frequency sputtering is more extensive, except sputtering except electro-conductive material, also can sputter non-conductive material, can also carry out reactive sputtering prepares the compound-materials such as oxide compound, nitride and carbide simultaneously.Because metal targets needs when adopting sputtering method to produce high refractive index film to adopt oxidizing reaction to generate sull, technics comparing is complicated and be difficult to the film obtaining excellent properties, and ordinary oxide is insulating material in the ordinary course of things, adopt ordinary oxide preparation of target materials high refractive index film can only adopt radio-frequency sputtering technique, be difficult to obtain higher sputter rate.
Rotary target material has a lot of advantages relative to planar targets, 1) planar target utilization ratio is low, and most high energy reaches 35-40%, and planar target is changed frequent, can increase operation and be unfavorable for maintenance of the equipment, affect production capacity for large-scale production.And rotary target utilization ratio is high, can reach more than 70%, maintenance intervals is long, and production capacity is high, avoids the shortcoming of planar target; 2) sputtering rate is fast, is 2-3 times of planar target; 3) effective minimizing beats arc and slag is fallen on surface, and technology stability is good.
For rotary plating target, require that rotary target material is single entirety, or segmentation is welded on same bushing pipe.With current technical qualification, the preparation method of rotary target material mainly comprises: hot isostatic pressing method, hot pressing sintering method and teeming practice, above technique respectively has relative merits, but the flexible control of different size is difficult to meet, especially hot pressing sintering method can only production length be that list within 300mm props up target, therefore can only by more piece segmentation Bonding on bushing pipe to reach certain length requirement, which increase the step of production, improve target production cost.
Plasma spraying rotary target material, metal or nonmetal spray coating powder are heated in plasma flame flow fusing or semi-molten state, and in company with plasma flame flow, deposit in advance on the workpiece surface that processed with high-velocity jet, along with the spraying back and forth continued, certain thickness target can be obtained.Because plasma spraying temperature is high, almost all refractory metals and ceramic powder can be sprayed; And spraying process is once shaped, the size of spraying target is unrestricted, and step is simple, convenient, flexible.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of production process simple and convenient, lower-cost electric conductive oxidation zirconium rotary target material and preparation method thereof.
For solving the problems of the technologies described above, the invention provides a kind of electric conductive oxidation zirconium rotary target material, this target material composition is ZrO
x, described target density is 5.18-5.8g/cm
3, wherein, 1.2≤X≤1.8.
Present invention also offers a kind of preparation method of electric conductive oxidation zirconium rotary target material, comprise the steps:
The preparation of zirconium oxide spray coating powder;
The process of spraying matrix;
Spraying prime coat;
On spraying matrix, zirconia coating is sprayed with plasma spray coating process.
Further, the preparation of described zirconium oxide spray coating powder comprises: by percentage to the quality, after being mixed by the Zirconium oxide powder of 93-98%, in the hydrogen atmosphere of 1500-1700 DEG C, sinters 6-10 hour with the carbon dust of 2-7%, then spray-dried, obtain 100-400 object zirconium oxide spray coating powder.
Further, the purity of described Zirconium oxide powder is not less than 99.5wt%, and particle diameter is 1-5um.
Further, the process of described spraying matrix comprises: first clean, the polish oil stain and zone of oxidation of removing described spraying matrix surface, then adopts described in sandblasting alligatoring and sprays matrix surface.
Further, described spraying prime coat is the alloy coat at spraying matrix surface spraying 0.1-0.3mm.
Further, described spraying alloy coat adopts plasma spraying method at described spraying matrix surface spraying nickel alclad, nickel chromium triangle, nickel chromium triangle aluminium or nichrome-chromium-aluminium-yttrium powder, or adopt arc process at described spraying matrix surface spraying xantal or ni-al alloyed wire.
Further, described plasma spray coating process sprays in the process of zirconia coating on spraying matrix, the rotating speed of described spraying matrix controls as 30-80r/min, and the distance controlling between spray gun and described spraying matrix is 120-200mm, and the translational speed of spray gun controls as 300-800mm/min.
Further, described plasma spray coating process sprays in the process of zirconia coating on spraying matrix, and described spraying matrix surface compressed air stream cools, and the surface temperature control of described spraying matrix is for being no more than 200 DEG C.
A kind of electric conductive oxidation zirconium rotary target material provided by the invention, target material structure densification, uniform composition, good conductivity, flawless, its spraying length and diameter unrestricted, thickness can reach 13mm, and density is 5.18-5.8g/cm
3, and the preparation method of electric conductive oxidation zirconium rotary target material provided by the invention, production process is simple and convenient, and cost is lower.
Accompanying drawing explanation
The preparation flow figure of a kind of electric conductive oxidation zirconium rotary target material that Fig. 1 provides for the embodiment of the present invention.
Embodiment
A kind of electric conductive oxidation zirconium rotary target material that the embodiment of the present invention provides, this target material composition is ZrO
x, described target density is 5.18-5.8g/cm
3, wherein, 1.2≤X≤1.8.
See Fig. 1, the preparation method of a kind of electric conductive oxidation zirconium rotary target material provided by the invention, comprises following processing step:
The preparation of zirconium oxide spray coating powder: the Zirconium oxide powder that by mass percent be 93-98%, purity is not less than 99.95wt%, particle diameter is 1-5um and mass percent are after the carbon dust mechanically mixing of 2-7%, 6-10 hour is sintered in the hydrogen atmosphere of 1500-1700 DEG C, then spray-dried, obtain 100-400 object dusty spray.
The process of spraying matrix: comprise surperficial oil stain and zone of oxidation with cleaning and the removal of mechanical grinding method, the roughness then utilizing sandblasting to make matrix surface to reach certain, to increase the bonding strength of matrix and coating.
Spraying prime coat: adopt plasma spraying method to spray at spraying matrix surface nickel alclad (Ni/Al), nickel chromium triangle (Ni/Cr), nickel chromium triangle aluminium (Ni/Cr/Al) or nichrome-chromium-aluminium-yttrium (Ni/Cr/Al/Y) alloy coat that a layer thickness is 0.1-0.5mm, or adopt arc spraying to spray at spraying matrix surface the xantal or ni-al alloyed wire that a layer thickness is 0.1-0.5mm.Wherein spray in prime coat process, spraying matrix rotates around central shaft, and spray gun maintains a certain distance with spraying matrix and back and forth at the uniform velocity moves back and forth with certain speed along spraying matrix direction.
On spraying matrix, zirconia coating is sprayed: in spraying process, spray matrix rotate around central shaft with the rotating speed of 30-80r/min with plasma spray coating process, keep the distance of 120-200mm between spray gun and spraying matrix, and spray gun back and forth at the uniform velocity moves with the speed of 300-800mm/min back and forth along spraying matrix direction.Cool at the surface pressurized air of spraying matrix in spraying process simultaneously, control its surface temperature and be no more than 200 DEG C.The design parameter spraying zirconia coating with plasma spray coating process on spraying matrix is as shown in table 1.
Table 1 plasma spraying method prepares zirconium white rotary target material parameter
Below by embodiment, electric conductive oxidation zirconium rotary target material provided by the invention and preparation method thereof is illustrated.
Embodiment 1
Be 133mm at external diameter, length be 3191mm stainless steel tube on coating thickness be the zirconium white target of 4mm.
The Zirconium oxide powder that by mass percent be 98wt%, purity is not less than 99.5wt%, particle diameter is 1um and mass percent are that the carbon dust of 2wt% is after mechanically mixing, at 1500 DEG C, logical hydrogen sintering 6h, then obtains 100-225 object zirconium oxide spray coating powder by the spray-dried granulation of powder after sintering.
With dehydrated alcohol, surperficial oil stain is removed, sandblasting, make the roughness that matrix surface reaches certain.
With plasma spraying method spraying 0.1mm nickel-chromium-aluminum-yttrium coating, parameter is as shown in table 2.
Table 2 plasma spraying nichrome-chromium-aluminium-yttrium prime coat parameter
Being sprayed on by zirconium oxide spray coating powder plasma spraying method is coated with on the basal body pipe of prime coat, and target material surface pressurized air cools, and controls target material surface temperature at 180 DEG C.The spray parameters of zirconium white rotary target material is as shown in table 3.
Table 3 plasma spraying prepares zirconium white rotary target material parameter
Zirconium white rotary target material prepared by this example is black, compact structure, uniform composition, flawless; Thickness 4.3mm; Be 5.32g/cm with Archimedes's drainage detection density
3, fully oxidized by being heated in oxygen atmosphere, the composition that survey weightening finish method obtains target is ZrO
1.8.
Embodiment 2
Be 165mm at external diameter, length be 2791mm stainless steel tube on coating thickness be the zirconium white target of 6mm.
The Zirconium oxide powder that by mass percent be 95wt%, purity is not less than 99.5wt%, particle diameter is 3um and mass percent are that the carbon dust of 5wt% is after mechanically mixing, at 1600 DEG C, logical hydrogen sintering 8h, then obtains 140-325 object zirconium oxide spray coating powder by the spray-dried granulation of powder after sintering.
With dehydrated alcohol, surperficial oil stain is removed, sandblasting, make the roughness that matrix surface reaches certain.
By plasma spraying method spraying 0.3mm nickel chromium triangle coating, parameter is as shown in table 4.
Table 4 plasma spraying nickel chromium triangle prime coat parameter
Being sprayed on by zirconium oxide spray coating powder plasma spraying method is coated with on the basal body pipe of prime coat, and target material surface pressurized air cools, and controls target material surface temperature at 190 DEG C.The spray parameters of zirconium white rotary target material is as shown in table 5.
Table 5 plasma spraying prepares zirconium white rotary target material parameter
Zirconium white rotary target material prepared by this example is black, compact structure, uniform composition, flawless; Thickness 6.1mm; Be 5.02g/cm with Archimedes's drainage detection density
3, fully oxidized by being heated in oxygen atmosphere, the composition that survey weightening finish method obtains target is ZrO
1.6.
Embodiment 3
Be 173mm at external diameter, length be 2550mm stainless steel tube on coating thickness be the zirconium white target that 10mm is thick.
Be 94wt% by mass percent, purity is not less than 99.5wt%, particle diameter is the carbon dust mixing 6wt% in the Zirconium oxide powder of about 3um, after mechanically mixing, at 1650 DEG C, lead to hydrogen sintering 8h, then the spray-dried granulation of powder after sintering is obtained 140-325 object zirconium oxide spray coating powder.
With dehydrated alcohol, surperficial oil stain is removed, sandblasting, make the roughness that matrix surface reaches certain.
With arc spraying spraying 0.4mm nickel aluminium coating, parameter is as shown in table 6.
The parameter of table 6 Arc Sprayed Aluminum Bronze B alloy wire prime coat:
| Processing parameter | Electric current/A | Voltage/V | Silk material diameter | Wire feed rate | Supply gas pressure |
| Parameter value | 200 | 50 | 2.5mm | 100mm/s | 0.5MPa |
Being sprayed on by zirconium oxide spray coating powder plasma spraying method is coated with on the basal body pipe of prime coat, and target material surface pressurized air cools, and controls target material surface temperature below 180 DEG C.The spray parameters of zirconium white rotary target material is as shown in table 7.
Table 7 plasma spraying prepares zirconium white rotary target material parameter
Zirconium white rotary target material prepared by this example is black, compact structure, uniform composition, flawless; Thickness 9.8mm; Be 5.27g/cm with Archimedes's drainage detection density
3, fully oxidized by being heated in oxygen atmosphere, the composition that survey weightening finish method obtains target is ZrO
1.3.
Embodiment 4
Be 133mm at external diameter, length be 1550mm stainless steel tube on coating thickness be the zirconium white target that 13mm is thick.
The Zirconium oxide powder that by mass percent be 93wt%, purity is not less than 99.5wt%, particle diameter is about 5um and mass percent are that the carbon dust of 7wt% is after mechanically mixing, at 1700 DEG C, logical hydrogen sintering 10h, then obtains 240-400 object zirconium oxide spray coating powder by the spray-dried granulation of powder after sintering.
With dehydrated alcohol, surperficial oil stain is removed, sandblasting, make the roughness that matrix surface reaches certain.
With arc spraying spraying 0.5mm nickel aluminium coating, parameter is as shown in table 8.
The parameter of table 8 electric arc spraying ni-al alloyed wire prime coat:
| Processing parameter | Electric current/A | Voltage/V | Silk material diameter | Wire feed rate | Supply gas pressure |
| Parameter value | 200 | 50 | 3mm | 150mm/s | 0.6MPa |
Being sprayed on by zirconium oxide spray coating powder plasma spraying method is coated with on the basal body pipe of prime coat, and target material surface pressurized air cools, and controls target material surface temperature at 195 DEG C.The spray parameters of zirconium white rotary target material is as shown in table 9.
Table 9 plasma spraying prepares zirconium white rotary target material parameter
Zirconium white rotary target material prepared by this example is black, compact structure, uniform composition, flawless; Thickness 12.8mm; Be 5.27g/cm with Archimedes's drainage detection density
3, fully oxidized by being heated in oxygen atmosphere, the composition that survey weightening finish method obtains target is ZrO
1.2.
It should be noted last that, above embodiment is only in order to illustrate technical scheme of the present invention and unrestricted, although with reference to example to invention has been detailed description, those of ordinary skill in the art is to be understood that, can modify to technical scheme of the present invention or equivalent replacement, and not departing from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of right of the present invention.
Claims (9)
1. an electric conductive oxidation zirconium rotary target material, is characterized in that: this target material composition is ZrO
x, described target density is 5.18-5.8g/cm
3, wherein, 1.2≤X≤1.8.
2. a preparation method for electric conductive oxidation zirconium rotary target material described in claim 1, is characterized in that, comprise the steps:
The preparation of zirconium oxide spray coating powder;
The process of spraying matrix;
Spraying prime coat;
On spraying matrix, zirconia coating is sprayed with plasma spray coating process.
3. preparation method according to claim 2, it is characterized in that, the preparation of described zirconium oxide spray coating powder comprises: by percentage to the quality, after the Zirconium oxide powder of 93-98% is mixed with the carbon dust of 2-7%, 6-10 hour is sintered in the hydrogen atmosphere of 1500-1700 DEG C, then spray-dried, obtain 100-400 object zirconium oxide spray coating powder.
4. preparation method according to claim 3, is characterized in that: the purity of described Zirconium oxide powder is not less than 99.5wt%, and particle diameter is 1-5um.
5. preparation method according to claim 2, is characterized in that, the process of described spraying matrix comprises: first clean, the polish oil stain and zone of oxidation of removing described spraying matrix surface, then adopts described in sandblasting alligatoring and sprays matrix surface.
6. preparation method according to claim 2, is characterized in that: described spraying prime coat is the alloy coat at spraying matrix surface spraying 0.1-0.3mm.
7. preparation method according to claim 6, it is characterized in that: described spraying alloy coat adopts plasma spraying method at described spraying matrix surface spraying nickel alclad, nickel chromium triangle, nickel chromium triangle aluminium or nichrome-chromium-aluminium-yttrium powder, or adopt arc process at described spraying matrix surface spraying xantal or ni-al alloyed wire.
8. preparation method according to claim 2, it is characterized in that: described plasma spray coating process sprays in the process of zirconia coating on spraying matrix, the rotating speed of described spraying matrix controls as 30-80r/min, distance controlling between spray gun and described spraying matrix is 120-200mm, and the translational speed of spray gun controls as 300-800mm/min.
9. preparation method according to claim 8, it is characterized in that: described plasma spray coating process sprays in the process of zirconia coating on spraying matrix, described spraying matrix surface compressed air stream cools, and the surface temperature control of described spraying matrix is for being no more than 200 DEG C.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104805406A (en) * | 2015-04-17 | 2015-07-29 | 无锡舒玛天科新能源技术有限公司 | Aluminium-scandium rotating target material and preparation method thereof |
| CN104831242A (en) * | 2015-04-08 | 2015-08-12 | 无锡舒玛天科新能源技术有限公司 | Large-size integral aluminum-neodymium rotary target material and preparation method thereof |
| CN104831244A (en) * | 2015-04-17 | 2015-08-12 | 无锡舒玛天科新能源技术有限公司 | Aluminum tantalum rotating target material, and method used for preparing aluminum tantalum rotating target material via controlled atmosphere cold spraying |
| CN105058923A (en) * | 2015-08-17 | 2015-11-18 | 基迈克材料科技（苏州）有限公司 | Sputtering target capable of enhancing wear resistance and corrosion resistance of coated glass and manufacturing method |
| CN106893992A (en) * | 2017-03-01 | 2017-06-27 | 芜湖映日科技有限公司 | A kind of method for spraying the recycling of target matrix |
| CN108431292A (en) * | 2015-12-23 | 2018-08-21 | 万腾荣先进材料德国有限责任公司 | Sputtering target material based on zirconium oxide |
| CN108707870A (en) * | 2018-05-24 | 2018-10-26 | 宁波森利电子材料有限公司 | The preparation method of the sial rotary target material of high-compactness |
| CN111041432A (en) * | 2019-11-26 | 2020-04-21 | 广州市尤特新材料有限公司 | Rotary zirconia target material and preparation method thereof |
| CN114990486A (en) * | 2022-07-28 | 2022-09-02 | 广州市尤特新材料有限公司 | Rotary zirconia target material and preparation method thereof |
| CN115096675A (en) * | 2022-06-07 | 2022-09-23 | 佛山科学技术学院 | Zirconium tube calibration sample for underwater eddy current detection and preparation method thereof |
| CN115894034A (en) * | 2022-12-08 | 2023-04-04 | 北京航空航天大学 | Preparation method of chromium aluminum carbide ceramic, chromium aluminum carbide ceramic and application |
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|---|---|---|---|---|
| CN104831242A (en) * | 2015-04-08 | 2015-08-12 | 无锡舒玛天科新能源技术有限公司 | Large-size integral aluminum-neodymium rotary target material and preparation method thereof |
| CN104831242B (en) * | 2015-04-08 | 2017-11-24 | 无锡舒玛天科新能源技术有限公司 | Large scale integration aluminium neodymium rotary target material and preparation method thereof |
| CN104831244A (en) * | 2015-04-17 | 2015-08-12 | 无锡舒玛天科新能源技术有限公司 | Aluminum tantalum rotating target material, and method used for preparing aluminum tantalum rotating target material via controlled atmosphere cold spraying |
| CN104805406A (en) * | 2015-04-17 | 2015-07-29 | 无锡舒玛天科新能源技术有限公司 | Aluminium-scandium rotating target material and preparation method thereof |
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| CN108431292A (en) * | 2015-12-23 | 2018-08-21 | 万腾荣先进材料德国有限责任公司 | Sputtering target material based on zirconium oxide |
| CN108431292B (en) * | 2015-12-23 | 2020-04-21 | 万腾荣先进材料德国有限责任公司 | Zirconia-based sputtering target |
| CN106893992A (en) * | 2017-03-01 | 2017-06-27 | 芜湖映日科技有限公司 | A kind of method for spraying the recycling of target matrix |
| CN108707870A (en) * | 2018-05-24 | 2018-10-26 | 宁波森利电子材料有限公司 | The preparation method of the sial rotary target material of high-compactness |
| CN111041432A (en) * | 2019-11-26 | 2020-04-21 | 广州市尤特新材料有限公司 | Rotary zirconia target material and preparation method thereof |
| CN115096675A (en) * | 2022-06-07 | 2022-09-23 | 佛山科学技术学院 | Zirconium tube calibration sample for underwater eddy current detection and preparation method thereof |
| CN115096675B (en) * | 2022-06-07 | 2023-08-11 | 佛山科学技术学院 | Zirconium tube calibration sample for underwater vortex detection and preparation method thereof |
| CN114990486A (en) * | 2022-07-28 | 2022-09-02 | 广州市尤特新材料有限公司 | Rotary zirconia target material and preparation method thereof |
| CN114990486B (en) * | 2022-07-28 | 2022-10-18 | 广州市尤特新材料有限公司 | Rotary zirconia target material and preparation method thereof |
| CN115894034A (en) * | 2022-12-08 | 2023-04-04 | 北京航空航天大学 | Preparation method of chromium aluminum carbide ceramic, chromium aluminum carbide ceramic and application |
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