CN104451579B - High-low voltage conversion device for magnetron sputtering - Google Patents
High-low voltage conversion device for magnetron sputtering Download PDFInfo
- Publication number
- CN104451579B CN104451579B CN201410652562.4A CN201410652562A CN104451579B CN 104451579 B CN104451579 B CN 104451579B CN 201410652562 A CN201410652562 A CN 201410652562A CN 104451579 B CN104451579 B CN 104451579B
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- electrode
- rotating shaft
- sensor
- voltage conversion
- conversion device
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 27
- 238000001755 magnetron sputter deposition Methods 0.000 title abstract description 7
- 239000003990 capacitor Substances 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 229950000845 politef Drugs 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims 1
- 230000006698 induction Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract description 3
- 239000007888 film coating Substances 0.000 abstract 1
- 238000009501 film coating Methods 0.000 abstract 1
- 206010014357 Electric shock Diseases 0.000 description 4
- 238000000576 coating method Methods 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a high-low voltage conversion device which comprises an insulating support frame, an input part, an output part, a sensor induction device, a pneumatic bouncing device, a rotating shaft and a rotating system, wherein the electrodes of the input part and the output part are fixed on the insulating support frame, and the fixed electrode of the output part is connected with the rotating shaft of the rotating system together; and the rotating shaft drives a sensor induction plate to rotate on the path of the sensor induction device, is controlled by a sensor to stop rotation, and the integral rotating system is bounced by the pneumatic bouncing device to connect the input electrode and the output electrode, so that a switch function is achieved. The high-low voltage conversion device disclosed by the invention meets the requirement for multi-time bias voltage conversion in a magnetron sputtering film coating process. Compared with the traditional similar device, the high-low voltage conversion device disclosed by the invention is safer and more reliable in voltage conversion, can realize the switch with high-voltage insulation and 40-50 kV high-voltage impact characteristics and is provided with an automatic control system merged into a magnetron sputtering total control system.
Description
Technical field
The present invention relates to a kind of high/low pressure conversion device used in magnetic control sputtering vacuum coating field, it is possible to achieve meet
Using the requirement of different biass in coating process, and the high pressure Danger Electric shock risk in high-low pressure transformation process can be reduced.
Background technology
Need in magnetron sputtering process to use multiple bias, because the frequent transitions of bias will be it is often necessary to manually will
Electrode is changed, and the process of magnetron sputtering is complicated by this, simultaneously because frequent transitions electrode meeting stored charge, also can increase electric shock
Danger, the person is damaged.Moreover it is mostly external the opening of Non-follow control electrode conversion currently used for permutator herein
Close although having certain guarantee to operator, but or switch this high pressure using manually, danger is still deposited
?.So further on-off control is merged into computer system, by computer control, and by high/low pressure conversion device with height absolutely
The material parcel of edge, the switch closure simultaneously being carried out using pneumatic means between electrode is controlled, and can be reduced to Danger Electric shock risk
Minimum.
Content of the invention
The present invention is the difficult problem in order to bias convenient and safe conversion during overcoming vacuum coating, there is provided a kind of safety can
The high/low pressure conversion device leaning on.
To achieve these goals, the present invention adopts following technical proposals：
A kind of high/low pressure conversion device, described device includes insulating support, importation, output par, c, sensor sensing
Device, pneumatic bounce device, rotating shaft and rotation system；Described importation and described output section is fixed above described insulating support
The electrode dividing, the rotating shaft of the fixed electrode of described output par, c and described rotation system links together；Described rotating shaft drives gear
Piece rotates on the path of described sensor sensing device, is controlled by sensor and stops operating, is upspring by described pneumatic means whole
Individual described rotation system, makes input and output connect, thus realizing electrode linkage function.
Further, described rotation system includes movable electrode, movable insulator, Z axis base plate, sensor sensing
Plate, sensor composition, permanent-split capacitor motor.
Further, described asynchronous motor drives the rotation of described movable electrode and described sensor sensing plate.
Further, the rotation of described rotation system is by described sensor and sensor sensing baffle controls.
Further, the electrode of described importation includes：Conventional bias, is grounded a, special bias, is grounded b, superelevation is inclined
Five electrodes of pressure.
Further, described pneumatic bounce device controls the connection of described movable electrode and the electrode of described input system.
Further, the politef that described electrode major part is insulated covers, and in described fixed electrode and institute
When stating movable electrode contact, contact site is the invisible position being also to be difficult contact.
Further, the control of described high/low pressure conversion device is by computer control.
It is an object of the invention to avoiding the conversion of Non-follow control high-low pressure, preventing from getting an electric shock, realizing in magnetron sputtered vacuum
The requirement of multiple conversions bias in coating process.Compare with existing similar device, the voltage conversion of this device more safely may be used
Lean on, be capable of High-Voltage Insulation and the switch of 40-50kV impacting with high pressure characteristic, and be designed with automatic control system, and merge
To in magnetron sputtering general control system.
Brief description
Fig. 1 is the structural design drawing of high/low pressure conversion device of the present invention.
Wherein, 1 is fixed electrode, belongs to output system, and 2 is the electrode of input system, and 3 is rotating shaft, and 4 is movable insulation
Body, 5 is Z axis base plate, and 6 is sensor sensing plate, and 7 is sensor, and 8 is pneumatic bounce device, and 9 is that capacitor operation asyn is electronic
Machine, 10 is movable electrode.
Fig. 2 is the structural representation of high/low pressure conversion device of the present invention.
Wherein 2 is the electrode of input system, and 10 is movable electrode, and 11 is importation, including conventional bias, ground connection
A, special bias, it is grounded b, superelevation biases five electrodes, 12 is the indoor bias electrode of vacuum, and 13 is vacuum chamber, and 14 is to rotate
System and pneumatic system and device, 15 is whole high/low pressure conversion device, i.e. device as shown in Figure 1.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of high/low pressure conversion device disclosed by the invention is elaborated.
As shown in figure 1, high/low pressure conversion device disclosed by the invention mainly includes insulating support, importation, output section
Point, rotating shaft and movable electrode combined system, sensor sensing system.Importation and output par, c is fixed above insulating support
Electrode, the fixed electrode of output par, c and rotating shaft link together, and rotating shaft drives catch to rotate on the path of sensor, by passing
The position that stops operating of sensor control, is upspring whole movable electrode combination unit by pneumatic means, makes input and output electrode even
Connect, so that circuit communication, realize switching function.
Specifically, computer controls asynchronous motor 9 to rotate, and drives movable electrode 10 and induction apparatuss tablet 6, works as induction apparatuss
Tablet 6 stops sensor location corresponding to computer instruction, and asynchronous motor 9 stops operating, and pneumatic bounce device 8 drives and turns
Movable electrode 10 is connected on the position of input system electrode 2 dynamic combination (10,4,6,9), then input system electrode 2 and defeated
Go out system fixed electrode 1 to connect, thus playing the effect of switch closure.The electrode of input system has five parts, includes respectively
Conventional bias, is grounded a, special bias, is grounded b, superelevation biases five electrodes.Described pneumatic bounce device control is described can galvanic electricity
The connection of the electrode of pole and described input system.The politef that described electrode major part is insulated covers, and described
When fixed electrode is contacted with described movable electrode, contact site be invisible be also be difficult contact position, with guarantee electrode it
Between mutually insulated.The control of described high/low pressure conversion device can be completed by computer, to ensure the safety of operator.
When carrying out high-low pressure conversion on computers, as shown in Figure 2 it is only necessary to click on corresponding bias, computer on computers
Controllable 14 rotation systems and activation system device carry out biasing conversion work, for example, want to be switched to superelevation from conventional bias inclined
Pressure, clicks on superelevation bias on computers, and movable electrode controls, by pneumatic means, the electrode position ejecting conventional bias, and is rotating
Rotate under the drive of system, through ground connection a, special bias, ground connection b, stop at superelevation and bias corresponding electrode position, and by gas
Dynamic device is upspring and is connected super high bias electrode.If it is desired to the electric charge of release accumulation, ground connection a or ground connection b can be clicked on, by upper
The method of stating connects the electrodes to be grounded a or ground connection b, discharges electric charge.
The foregoing is only the preferred embodiments of the present invention, the numerical value mentioned in the description of description above and number
Value scope is not limited to the present invention, simply provides preferred embodiment for the present invention, is not limited to the present invention, right
For those skilled in the art, the present invention can have various modifications and variations.All within the spirit and principles in the present invention,
Any modification, equivalent substitution and improvement made etc., should be included within the scope of the present invention.
Claims (7)
1. a kind of high/low pressure conversion device during magnetic control sputtering vacuum coating, described device includes insulating support, defeated
Enter part, output par, c, sensor sensing device, pneumatic bounce device, rotating shaft and rotation system；Solid above described insulating support
Fixed described importation and the electrode of described output par, c, the rotating shaft of the fixed electrode of described output par, c and described rotation system
Link together；Described rotating shaft drives sensor sensing plate to rotate on the path of described sensor sensing device, by sensor
Control stops operating, and is upspring entirely described rotation system by described pneumatic bounce device, so that input and output is connected, thus realizing height
Low pressure handoff functionality；Described rotation system includes movable electrode, movable insulator, Z axis base plate, sensor sensing plate, sensing
Device, permanent-split capacitor motor.
2. device according to claim 1 is it is characterised in that described asynchronous motor drives described movable electrode, movable
Insulator and the rotation of described sensor sensing plate.
3. device according to claim 2 is it is characterised in that the rotation of described rotation system is by described sensor and sensing
Device tablet controls.
4. device according to claim 1 is it is characterised in that the electrode of described importation includes：Conventional bias, ground connection
A, special bias, it is grounded b, superelevation biases five electrodes.
5. device according to claim 1 is it is characterised in that described pneumatic bounce device controls described movable electrode and institute
State the connection of the fixed electrode of importation.
6. device according to claim 1 is it is characterised in that the politef that described electrode major part is insulated covers
Lid, and when described fixed electrode is contacted with described movable electrode, contact site is the invisible position being also to be difficult contact.
7. device according to claim 1 is it is characterised in that the control of described high/low pressure conversion device is by computer control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410652562.4A CN104451579B (en) | 2014-11-17 | 2014-11-17 | High-low voltage conversion device for magnetron sputtering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410652562.4A CN104451579B (en) | 2014-11-17 | 2014-11-17 | High-low voltage conversion device for magnetron sputtering |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104451579A CN104451579A (en) | 2015-03-25 |
| CN104451579B true CN104451579B (en) | 2017-02-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410652562.4A Active CN104451579B (en) | 2014-11-17 | 2014-11-17 | High-low voltage conversion device for magnetron sputtering |
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| CN (1) | CN104451579B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108844846B (en) * | 2018-04-04 | 2019-10-29 | 中国科学院力学研究所 | A kind of sampling and test method of the test of round-link chain alumetized steel high-temperature oxydation |
| CN113061850A (en) * | 2021-03-19 | 2021-07-02 | 安徽纯源镀膜科技有限公司 | Knocking rod device for PIC coating equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2018761A1 (en) * | 1968-09-24 | 1970-06-26 | Energy Conversion Devices Inc | |
| CN102047548A (en) * | 2008-05-26 | 2011-05-04 | 株式会社爱发科 | Bipolar pulse power source and power source device formed by connecting a plurality of bipolar pulse power sources in parallel |
| CN103774111A (en) * | 2014-02-25 | 2014-05-07 | 南华大学 | Circuit equipment and control method for achieving high-power pulse and large-current magnetron sputtering coating function |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3700785B2 (en) * | 2002-12-03 | 2005-09-28 | オリジン電気株式会社 | Power converter |
| JP4526879B2 (en) * | 2004-06-18 | 2010-08-18 | 四変テック株式会社 | DC power supply |
-
2014
- 2014-11-17 CN CN201410652562.4A patent/CN104451579B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2018761A1 (en) * | 1968-09-24 | 1970-06-26 | Energy Conversion Devices Inc | |
| CN102047548A (en) * | 2008-05-26 | 2011-05-04 | 株式会社爱发科 | Bipolar pulse power source and power source device formed by connecting a plurality of bipolar pulse power sources in parallel |
| CN103774111A (en) * | 2014-02-25 | 2014-05-07 | 南华大学 | Circuit equipment and control method for achieving high-power pulse and large-current magnetron sputtering coating function |
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| Publication number | Publication date |
|---|---|
| CN104451579A (en) | 2015-03-25 |
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| TR01 | Transfer of patent right |
Effective date of registration: 20231117 Address after: 511458 Room 501, building 1, 1119 Haibin Road, Nansha District, Guangzhou City, Guangdong Province Patentee after: Guangdong Aerospace Science and Technology Research Institute (Nansha) Address before: 100190, No. 15 West Fourth Ring Road, Beijing, Haidian District Patentee before: INSTITUTE OF MECHANICS, CHINESE ACADEMY OF SCIENCES |