CN1044409C - Image dissection method and apparatus by photon tunnel scan - Google Patents

Abstract

The present invention relates to a method and an instrument for decomposing the scanning image of a photon tunnel, and the instrument belongs to the optical microscope field. The present invention puts forward the principle and the derivation and decomposition formulas of the image decomposition method and provides a solving method to solve the problem that false images exist in a photon scanning tunnel microscope and are not distinguished because the false images are mixed together with sample pattern images and refractivity distribution images. For realizing the method, the instrument structure of the photon tunnel scanning image decomposition microscope and an illumination transform mechanism of fiber light guide are provided. The present invention has fifty to fifteen thousand times of microscopic magnifications on the same optical sample. And has wide application prospect in the fields such as biomedicine, genetic engineering, integrated optics, surface science, nanometer technology, etc.

Description

Photon tunnel scanning image decomposition method

The invention belongs to the optical microscope field, particularly a kind of photon scanning tunneling microscope of super diffraction limit explanation.

The space explanation of conventional (lens) optical microscope is subjected to diffraction limit (about half-wavelength) restriction.1991, Fei Leier people's numbers of patenting such as (F.L.Ferrell) is USP5,018,865 U.S.'s patents of invention, its name is called photon scanning tunneling microscope (PSTM), and 1992, the straight and even road (Fujihira of rattan, Masamichi) etc. applied for that number of patent application is the EP0535611 Europatent, it is called the height explanation finder that has photon scanning tunneling microscope.

Experiment has confirmed that the horizontal space explanation of PSTM can surpass diffraction limit, also has better longitudinal space explanation simultaneously.But all adopt the single beam illumination in the existing PSTM technology; when sample surfaces has fluctuating; surface inclination angle Δ θ changes surperficial incident angle θ; unavoidably will in the PSTM image, introduce illusion; this illusion usually mixes with sample surfaces pattern image and index distribution image and can not separate; thereby make current PSTM image interpretation have greatly difficulty, use and limited to very much.France Si Pala (SPIRAL) company once bought USP5 with a huge sum of money, 018,865 patent, and exploitation PSTM industry, owing to exist above problem not solve, development plan is died on the vine.In the EP0535611 patent of invention, the same existence because of single beam illumination, sample surfaces inclination angle change (Δ θ) introduced the illusion serious problems, so the patented product can not commercialization and industrialization.

The purpose of this invention is to provide a kind of photon tunnel scanning image decomposition method, can eliminate the illusion of in single beam illumination photons scanning tunnel microscope image, introducing with it because of sample surfaces inclination angle variation (Δ θ), and can decompose surface topography image and the refractive index change profile image that provides general optical sample (surface undulation variation and variations in refractive index are arranged), for PSTM technology commercialization and industrialization solve a key technical problem of current existence.

The used PSTM ultimate principle of the present invention is seen accompanying drawing 1a, evanescent wave (disappearance ripple) light intensity expression is (1a) formula, it and USP5,018, PSTM ultimate principle in 865 patents (accompanying drawing 1b) is different with expression formula (1b) formula, and this patent produces its intensity of evanescent wave (among Fig. 1 3) on sample surfaces approximate expression is: $I=K_{\mathrm{SP}}({\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1,\mathrm{\&theta;})\exp \&lsqb;-\frac{4\mathrm{\&pi;}}{\mathrm{\&lambda;}}Z{({\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1^2{\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="C9310411100092.png"\; state="\{\{state\}\}">sin</figure-callout>}}^2\mathrm{\&theta;}-1)}^{1/2}\&rsqb;----\left(1a\right)$ In the formula: K _SP=K _S(n ₁, θ) (S polarized light), or K _P(n ₁, θ) (P polarized light) n ₁Sin θ＞1, i.e. samples met total internal reflection condition; n ₁It is the sample refractive index; Z is the spacing of surveying point (among Fig. 1 five) and sample (among Fig. 1 1) surface, i.e. photon tunnel spacing; λ is parallel beam (among Fig. 1 a 5) optical wavelength.

USP5, evanescent wave is created in sample stage (among Fig. 1 4) surface in 018,865, and sample is modulated its intensity, and expression formula is:

I=Kexp[-2kZsin ²θ _i-(n _i/ n _i) ²) ^1/2] in the formula: K is a constant, k=2 π n _i/ λ, n _i(air refraction)=1 is behind the substitution following formula $I=\mathrm{Kexp}\&lsqb;-\frac{4\mathrm{\&pi;}}{\mathrm{\&lambda;}}Z{({\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1^2{\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="C9310411100092.png"\; state="\{\{state\}\}">sin</figure-callout>}}^2{\mathrm{\&theta;}}_i-1)}^{1/2}\&rsqb;----\left(1b\right)$

Said n ₁Be sample refractive index, n _iBe the refractive index of sample stage, θ is a sample upper surface incident angle, θ _iIncident angle for objective table and example interface.

This patent has at first been illustrated following principle: after lambda1-wavelength (λ) and polarizability were determined, photon tunnel information (I) was Z, n ₁With the function of θ, promptly

I=I (Z, n ₁, θ) (2) its differential expression can be expressed the relational expression of relevant picture information among the PSTM, establishes the 0 orientation (see figure 2) that single beam is arranged on PSTM, and the expression formula of photon tunnel information variable is: $\mathrm{\&Delta;}{I}^0(Z,{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1,\mathrm{\&theta;})=\frac{\&PartialD;I}{\&PartialD;Z}\mathrm{\&Delta;Z}+\frac{\&PartialD;I}{{\&PartialD;\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1+\frac{\&PartialD;I}{\&PartialD;\mathrm{\&theta;}}\mathrm{\&Delta;\&theta;}-----\left(3\right)$ Survey the available thickness of sample (Z of height (H) of point (generally using fiber tip) ₀) add and survey point to sample surfaces spacing (Z) expression and (see Fig. 1 a), i.e. H=Z ₀+ Z is with its differential expression Δ H=Δ Z ₀+ Δ Z substitution (3) formula gets: $\mathrm{\&Delta;}{I}^0(Z,{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1,\mathrm{\&theta;})=\frac{\&PartialD;I}{\&PartialD;Z}(\mathrm{\&Delta;}{H}^0-\mathrm{\&Delta;}{Z}_0)+\frac{\&PartialD;I}{{\&PartialD;\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1+\frac{\&PartialD;I}{\&PartialD;\mathrm{\&theta;}}\mathrm{\&Delta;\&theta;}----\left(4\right)$ (3) formula and (4) formula relational expression that can be write as the relevant picture information of PSTM is as follows: $\mathrm{\&Delta;}{I}^0(x,y)=\frac{\&PartialD;I}{\&PartialD;Z}\mathrm{\&Delta;Z}(x,y)+\frac{\&PartialD;I}{{\&PartialD;\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{n}_1(x,y)+\frac{\&PartialD;I}{\&PartialD;\mathrm{\&theta;}}\mathrm{\&Delta;\&theta;}(x,y)----\left(5\right)$ $\frac{\&PartialD;I}{\&PartialD;Z}\&lsqb;\mathrm{\&Delta;}{H}^0(x,y)-\mathrm{\&Delta;}{Z}_0(x,y)\&rsqb;+\frac{\&PartialD;I}{\&PartialD;{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{n}_1(x,y)$ $+\frac{\&PartialD;I}{\&PartialD;\mathrm{\&theta;}}\mathrm{\&Delta;\&theta;}(x,y)$ Δ I in the formula ⁰(x, y), Δ Z (x, y), Δ n ₁(x, y), Δ H ⁰(x, y) (x y) is relevant iconic sign with Δ θ.The relevant coefficient of every partial differential representative is not the constant amount generally speaking, so it has brought difficulty for the image decomposition.(5) last illusion of representing Δ θ to introduce in formula (6) formula.

The content of invention is a kind of photon tunnel scanning image decomposition method: it is characterized in that inventing PSTM image decomposition principle, the visual decomposition formula of deriving, π symmetrical beam illumination sample system is set, the illusion of introducing by surperficial inclination angle Δ θ when the elimination of utilization the present invention image decomposition formula rises and falls because of single beam illumination, sample surfaces have; Sample separation surface inclination angle change picture (Δ θ ^y(x is y) with Δ θ ^x(x, y)) decomposites sample topography image (Δ Z by special-purpose image processing method ₀(x, y)) and index distribution image (Δ n ₁(x, y)); Relevant partial differential coefficient with θ ( I/ θ, Z/ θ) provides by experiment in the image decomposition formula, with n ₁Relevant partial differential coefficient ( I/ n ₁, Z/ n ₁) to check the back by theoretical numerical simulation and part result of calculation and experimental data given, and set up corresponding partial differential coefficient standard database.

One of principal character of the present invention be with the orientation of 0 orientation π symmetry on the π symmetrical beam identical with 0 orientation is set, π symmetric double light beam is all with total internal reflection illumination sample, π orientation light beam (among Fig. 2 (8)) has identical wavelength with 0 orientation light beam (among Fig. 2 (7)), identical polarizability, same bundle intensity and identical θ (it is equivalent to changes 180 ° with 0 orientation light beam around the PSTM main shaft), see Fig. 2,9 is to be inverted conventional optical microscope among the figure, 10 is the base of instrument main shaft, the other end coupling photoelectric detector (11) of detection optical fiber point 3 is with the PSTM abbreviation π-PSTM system of π symmetrical beam illumination.(x, y), the incident angle of 0 orientation light beam is θ to sample surfaces same point in π-PSTM system ⁰(x, y)=(x, y), the incident angle of π orientation light beam is θ to θ+Δ θ ^π(x, y)=θ-Δ θ (x y), has identical reason with (5), (6) formula, and under π orientation beam lighting sample condition, the relational expression of relevant picture information should be: $\mathrm{\&Delta;}{I}^{\mathrm{\&pi;}}(x,y)=\frac{\&PartialD;I}{\&PartialD;Z}\mathrm{\&Delta;Z}(x,y)+\frac{\&PartialD;I}{\&PartialD;{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{n}_1(x,y)-\frac{\&PartialD;I}{\&PartialD;\mathrm{\&theta;}}\mathrm{\&Delta;\&theta;}(x,y)----\left(7\right)$ $=\frac{\&PartialD;I}{\&PartialD;Z}\&lsqb;\mathrm{\&Delta;}{H}^{\mathrm{\&pi;}}(x,y)-\mathrm{\&Delta;}{Z}_0(x,y)\&rsqb;+\frac{\&PartialD;I}{\&PartialD;{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{n}_1(x,y)-\frac{\&PartialD;I}{\&PartialD;\mathrm{\&theta;}}\mathrm{\&Delta;\&theta;}(x,y)----\left(8\right)$ With (5) formula and (7) formula addition, (6) formula and (8) formula addition, the illusion that can be eliminated (

Relational expression after Δ θ (x, y)): Δ I ^{(0+ π)}(x, y) ≡ Δ I ⁰(x, y)+Δ I ^π(x, y) $=2\&lsqb;\frac{\&PartialD;I}{\&PartialD;Z}\mathrm{\&Delta;Z}(x,y)+\frac{\&PartialD;I}{\&PartialD;{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{n}_1(x,y)\&rsqb;----\left(9\right)$ $=\frac{\&PartialD;I}{\&PartialD;Z}\&lsqb;\mathrm{\&Delta;}{H}^0(x,y)+\mathrm{\&Delta;}{H}^0(x,y)-2\mathrm{\&Delta;}{Z}_0(x,y)\&rsqb;+2\frac{\&PartialD;I}{\&PartialD;{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{n}_1(x,y)----\left(10\right)$ When in π-PSTM, doing the imaging of equal strength scan pattern, promptly require Δ I ⁰(x, y)=Δ I ^π(x, y)=0, survey the cusp height change picture by (10) Shi Kede: $\mathrm{\&Delta;H}(x,y)\&equiv;\&lsqb;\mathrm{\&Delta;}{H}^{\mathrm{\&pi;}}(x,y)+\mathrm{\&Delta;}{H}^0(x,y)\&rsqb;/2=\mathrm{\&Delta;}{Z}_0(x,y)\&rsqb;-\frac{\&PartialD;Z}{\&PartialD;{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{n}_1(x,y)----\left(11\right)$ It is eliminate after the illusion with the sample refractive index change delta n ₁(x, y) about and and pattern Δ Z ₀(x, y) image of Hun Heing.

When in π-PSTM, doing the imaging of equal altitudes scan pattern, promptly require Δ H ⁰(x, y)=Δ H ^π(x y)=0, can get photon tunnel information change image by (10) formula: ${\mathrm{\&Delta;I}}_{\mathrm{\&Delta;H}=0}^{(0+\mathrm{\&pi;})}(x,y)\&equiv;\&lsqb;\mathrm{\&Delta;}{I}^0(x,y)+\mathrm{\&Delta;}{I}^{\mathrm{\&pi;}}(x,y){\&rsqb;}_{\mathrm{\&Delta;H}=0}=2\&lsqb;\frac{\&PartialD;I}{\&PartialD;{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{n}_1(x,y)-\frac{\&PartialD;I}{\&PartialD;Z}\mathrm{\&Delta;}{Z}_0(x,y)----\left(12\right)$ It is eliminate after the illusion with the sample refractive index change delta n ₁(x, y) about and and pattern Δ Z ₀(x, y) image of Hun Heing.

When in π-PSTM, doing equidistant scan pattern imaging, promptly require Δ Z (x, y)=0, by (9) Shi Kede: $\mathrm{\&Delta;}{I}_{\mathrm{\&Delta;}2=0}^{(0+\mathrm{\&pi;})}(x,y)=2\frac{\&PartialD;I}{\&PartialD;{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{n}_1(x,y)----\left(13\right)$ This image is a reflection sample refractive index change delta n ₁(x, non-linear image y) (because of

Be not the constant amount but for dull); When in single beam (Sb)-PSTM, doing equidistant scan pattern imaging (as EP0535611), by (5) Shi Kede: $\mathrm{\&Delta;}{I^0}_{\mathrm{\&Delta;Z}=0}(x,y)=\frac{\&PartialD;I}{\&PartialD;{\mathrm{<figure-callout\; id="1"\; label="n"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">n</figure-callout>}}_1}\mathrm{\&Delta;}{n}_1(x,y)+\frac{\&PartialD;I}{\&PartialD;\mathrm{\&theta;}}\mathrm{\&Delta;\&theta;}(x,y)----\left(14\right)$ It remains and contains illusion

Δ θ (x, y) and the combination picture relevant with refractive index.

This patent and EP0535611 patent and USP5,018, the contrast of 865 patents, one of topmost different characteristic is the (π-PSTM), eliminate the illusion that sample surfaces has fluctuating (being surperficial inclination angle Δ θ) introducing in the PSTM image of single beam illumination with it of PSTM system of invention π symmetrical beam illumination.Two of principal character of the present invention is that utilization (5) formula and (7) formula are subtracted each other and (6) formula is subtracted each other with (8) formula, separablely goes out sample surfaces inclination angle change picture.Thereby decomposite sample topography image and variations in refractive index image, in equal strength scanned imagery pattern, establish x direction and y direction surface angle of declination and be respectively Δ θ ^y(x is y) with Δ θ ^r(x, y) then, $\mathrm{\&Delta;}{\mathrm{\&theta;}}^y(x,y)=\frac{1}{2}\&lsqb;\mathrm{\&Delta;}{H}^{\mathrm{\&pi;}}(x,y)-\mathrm{\&Delta;}{H}^0(x,y)\&rsqb;/\frac{\&PartialD;Z}{\&PartialD;\mathrm{\&theta;}}----\left(15\right)$ $\mathrm{\&Delta;}{\mathrm{\&theta;}}^r(x,y)=\frac{1}{2}\&lsqb;\mathrm{\&Delta;}{\mathrm{<figure-callout\; id="3"\; label="H"\; filenames="C9310411100092.png,C9310411100111.png"\; state="\{\{state\}\}">H</figure-callout>}}^{3\mathrm{\&pi;}/2}(x,y)-\mathrm{\&Delta;}{H}^{\mathrm{\&pi;}/2}(x,y)\&rsqb;/\frac{\&PartialD;Z}{\&PartialD;\mathrm{\&theta;}}----\left(16\right)$ Sample topography is:

Substitution (11) formula, sample variations in refractive index image is: $\mathrm{\&Delta;}{n}_1(x,y)=\{\mathrm{\&Delta;}{Z}_0(x,y)-\frac{1}{2}\&lsqb;\mathrm{\&Delta;}{H}^{\mathrm{\&pi;}}(x,y)+\mathrm{\&Delta;}{H}^0(x,y)\&rsqb;\}/\frac{\&PartialD;Z}{\&PartialD;n_1}----\left(18\right)$ In equal altitudes scanned imagery pattern, then have:

Require in the formula two groups of π symmetrical beams of quadrature illuminator is set: 0-π orientation and pi/2-3 pi/2 orientation are the quadrature (see figure 3) each other.

Three of principal character of the present invention is the partial differential coefficient relevant with θ ( I/ θ used in the formula of visual decomposition method, Z/ θ) provides by experiment, experimental provision is seen Fig. 3, the incident beam of several different θ values is set in 0 orientation, its bundle characteristic is identical with beam intensity, behind given sample, can provide I/ θ and Z/ θ nonlinear relationship normal data by experiment, check the given and n in back by theoretical numerical simulation and part result of calculation and experimental data ₁Relevant partial differential coefficient ( I/ n ₁, Z/ n ₁), set up partial differential coefficient nonlinear relationship standard database, the piecewise linearity image transform software of design specialized is found the solution.

In the photon tunnel scanning image decomposition method, as only eliminating illusion, can be provided with time π symmetric illumination system and just can meet the demands, this system requirements twin-beam is a non-coherent bundle, replaces π orientation light beam then to require to eliminate its coherence as the total reflection light beam that will utilize 0 orientation light beam through reflection; Then need the time separable system quadrature two groups of π symmetric illuminations π of system symmetric illumination system and many θ value illuminators as adopting a laser instrument as decomposing sample surfaces pattern image and index distribution image, can adopt many optical fibre illuminations scheme implementation (see figure 3) that is coupled respectively, laser instrument (7) is wherein arranged, regulate light weakener (16), with lens (8), illuminating bundle support (17), the optional helium-neon laser of laser instrument, also replaceable other long wavelength lasers.Though, have the control of disengaging time and light intensity regulating to make things convenient for benefit as whole employing semiconductor laser scheme displacement wavelength difficulties.The objective table that makes sample produce total internal reflection among Fig. 3 is made up of very thin micro slide (13) sample support board (14) and fan-shaped prism (12).

Effect of the present invention and meaning, for PSTM technology commercialization and industrialization solve a key technical problem of current existence, can eliminate π-PSTM that the oversubscription of illusion debates will have wide application prospects in many nanosecond science and technology fields such as biomedicine, genetic engineering, integrated optics, Surface Science, optical material refractive index nanostructureds.

Description of drawings

Fig. 1, PSTM ultimate principle figure, 1a, for ultimate principle figure of the present invention, 1b, be USP5,018, in 865 among the FIGlB.1a total internal reflection occur in sample (1) and air (2) interface, total internal reflection occurs in sample stage glass (4) and sample (1) interface among the 1b.(3) are fiber tip among the figure, and (5) are parallel beam, and (6) are evanscent field, n ₁Be sample refractive index, n _iBe glass refraction, n _tBe air refraction, θ is the incident angle of light beam in sample/air interface, and θ i is the incident angle of glass/example interface.

Fig. 2, π symmetric illumination PSTM (synoptic diagram of π-PSTM), (1) sample, (3) fiber tip, (4) sample stage, (7) 0 orientation light beams, (8) π orientation light beam, (9) are inverted optics and are shown emblem mirror, (10) base, (11) photodetector

π-PSTM the synoptic diagram of the many θ value illuminations in Fig. 3, two groups of π symmetric illuminations of quadrature and 0 orientation, (1) sample, (3) fiber tip, (9) be inverted optical microscope, (11) photodetector, (12) fan-shaped prism, (13) micro slide, (14) sample support board, (15) optical fiber, (16) regulate beam intensity weakener, (17) support, (18) lenslet, the shared laser instrument that (7) coupling position is adjustable.

Claims (3)

1. a photon tunnel scanning image decomposition method is characterized in that:

(1) in photon scanning tunneling microscope, under light beam throws light on the condition of sample respectively, gather the photon scanning tunneling microscope image that contains illusion with at least one group of π symmetric illumination system respectively, the visual addition that obtains is average, eliminate wherein illusion; Or under π symmetric illumination system light beam throws light on the condition of sample simultaneously, adopt the single pass imaging, eliminate wherein illusion;

(2) in photon scanning tunneling microscope with 0-π, Two groups of π symmetrical beams illumination sample system of quadrature gather respectively four orientation (0, π,

With ) four width of cloth scanning images, carry out image with following simultaneous equations respectively at different scanned imagery patterns and decompose:

(ⅰ) simultaneous equations is in equal strength scanned imagery pattern

Wherein, Δ θ ^y(x is y) with Δ θ ^x(x y) is y and x direction of scanning sample surfaces angle of declination image respectively, Δ H ⁰(x, y), Δ H ^π(x, y), Δ H ^Pi/2(x, y) and Δ ^{3 pi/2s}(x y) is the fiber tip height image 0, under π, pi/2 and the 3 pi/2 orientation beam lighting conditions respectively in the equal strength scanned imagery, Z be fiber tip to the sample surfaces distance, θ is an incident angle,

Be their partial differential coefficient, Δ Z ₀(x y) is sample surfaces pattern image, Δ x, and Δ y is a scanning step, Δ n ₁(x y) is sample refractive index image, n ₁Be the sample refractive index,

It is partial differential coefficient;

(ⅱ) simultaneous equations is in equal altitudes scanned imagery pattern

Wherein, I is a photon tunnel information, Δ I ⁰(x, y), Δ I ^π(x, y), Δ I ^Pi/2(x is y) with Δ I ^{3 pi/2s}(x y) is the photon tunnel presentation of information 0, under π, pi/2 and the 3 pi/2 orientation beam lighting conditions respectively in the equal altitudes scanned imagery,

,

With

Be respectively relevant partial differential coefficient, other symbols are the same;

(ⅲ) equation is in equidistant scanned imagery pattern ${\mathrm{\&Delta;n}}_1(x,y)=\frac{1}{2}\&lsqb;{\mathrm{\&Delta;I}}^0(x,y)+{\mathrm{\&Delta;I}}^{\mathrm{\&pi;}}(x,y){\&rsqb;}_{\mathrm{\&Delta;Z}=0}/\frac{\&PartialD;I}{{\&PartialD;}_{n1}}$ Or $=\frac{1}{4}\&lsqb;\mathrm{\&Delta;}{I}^0(x,y)+\mathrm{\&Delta;}{I}^{\mathrm{\&pi;}}(x,y)\&rsqb;+\mathrm{\&Delta;}{I}^{\mathrm{\&pi;}/2}(x,y)$ $+\mathrm{\&Delta;}{I}^{3\mathrm{\&pi;}/2}{(x,y)}_{\mathrm{\&Delta;Z}=0}/\frac{\&PartialD;I}{{\&PartialD;n}_1},$

Wherein, (Δ I ⁰(x, y)+Δ I ^π(x, y)) _{Δ z=0}Be illustrated in fiber tip to the constant equidistant scanned imagery of sample surfaces spacing (Z), Δ I under the π symmetric illumination condition ⁰(x is y) with Δ I ^π(x, y) and the image, other symbols are the same.

2 photon tunnel scanning image decomposition methods as claimed in claim 1 is characterized in that the symmetrical beam that uses is irrelevant mutually in π symmetric illumination system, identical wavelength is arranged, identical polarizability, identical beam intensity and identical incident angle (θ).

3 photon tunnel scanning image decomposition methods as claimed in claim 1, it is characterized in that I/ θ, Z/ θ partial differential coefficient adopt the illuminator of a plurality of different θ values under given sample condition, survey corresponding Δ I and the acquisition of Δ Z value by different Δ θ, with the discrete data match, provide the partial differential coefficient typical curve, the beam characteristics of a plurality of different θ value illuminators is identical with the beam intensity requirement, and can shine sample respectively.

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